Microscope sample stage precision positioning device based on magnetostriction

Abstract

The invention discloses a microscope sample stage precision positioning device based on magnetostriction, which comprises a substrate, an x-axis sliding plate arranged on the substrate and a y-axis sliding plate arranged on the x-axis sliding plate, and is characterized in that a magnetostriction displacement device and an x-axis displacement amplification device are arranged in the substrate, and the output end of the magnetostriction displacement device stretches out and draws back along the left-right direction, so as to drive the x-axis sliding plate to slide along the left-right direction; a magnetostriction displacement device with the output end stretching out and drawing back in the front-back direction and a y-axis displacement amplification device are arranged in the x-axis sliding plate so as to drive the y-axis sliding plate to slide in the front-back direction. According to the invention, the magnetostrictive displacement device is used as a driving source, has a nano-scale displacement resolution, and is combined with the displacement amplification device, so that tiny deformation can be converted into relatively large displacement capable of driving the sliding block, submicron-scale or even higher-precision positioning is realized, and the precise control requirement of the microscope on the position of a sample is met.

Description

Technical Field

[0001] The present invention relates to the field of precision positioning technology. More specifically, the present invention relates to a precision positioning device for a microscope sample stage based on magnetostriction. Background Art

[0002] Precision positioning of a microscope sample stage is one of the key technologies in fields such as biology and materials science. Traditional positioning devices mostly use stepping motors or piezoelectric ceramics for driving, which have problems such as low precision, slow response, and high cost. Magnetostrictive actuators have the advantages of high precision, fast response, and low power consumption, but there is a lack of an optimized design for combining them with a microscope sample stage in the prior art. Summary of the Invention

[0003] An object of the present invention is to solve at least the above problems and provide at least the advantages described later.

[0004] To achieve these and other advantages in accordance with the present invention, there is provided a precision positioning device for a microscope sample stage based on magnetostriction, comprising:

[0005] A substrate having a first light passing hole formed at its center, x-axis sliding grooves being formed in the front and rear sides of the substrate on the left and right directions with respect to the first light passing hole, x-axis sliders being slidably connected in the x-axis sliding grooves, a magnetostrictive displacement device having an output end that expands and contracts in the left and right directions being disposed on the right side of the first light passing hole within the substrate, the output end of the magnetostrictive displacement device being connected to an input end of an x-axis displacement amplification device disposed within the substrate, and an output end of the x-axis displacement amplification device being connected to the x-axis slider to drive the x-axis slider to slide in the left and right directions;

[0006] An x-axis slide plate disposed above the substrate and connected to the x-axis slider, the x-axis slide plate having a second light passing hole formed at its center, y-axis sliding grooves being formed in the left and right sides of the x-axis slide plate on the front and rear directions with respect to the second light passing hole, y-axis sliders being slidably connected in the y-axis sliding grooves, a magnetostrictive displacement device having an output end that expands and contracts in the front and rear directions being disposed on the rear side of the second light passing hole within the x-axis slide plate, the output end of the magnetostrictive displacement device being connected to an input end of a y-axis displacement amplification device disposed within the substrate, and an output end of the y-axis displacement amplification device being connected to the y-axis slider to drive the y-axis slider to slide in the front and rear directions;

[0007] A y-axis slide plate disposed above the x-axis slide plate and connected to the y-axis slider, the y-axis slide plate having a third light passing hole formed at its center, and a sample clamp being further disposed on the top surface of the y-axis slide plate.

[0008] Preferably, the magnetostrictive displacement device comprises:

[0009] A sleeve with a partition disposed at its center, and a core tube is coaxially disposed within the sleeve on one side of the partition;

[0010] A magnetostrictive rod, which is disposed within the core tube, with one end abutting against the partition and the other end being at one end port of the sleeve for outward output;

[0011] A coil, which is disposed between the core tube and the sleeve for generating an electromagnetic field after being energized;

[0012] A permanent magnet rod, which is disposed within the sleeve on the other side of the partition, and a through hole is provided at the center of the permanent magnet rod;

[0013] A hollow lead screw, which is disposed within the through hole and one end extends outside the other end port of the sleeve. A baffle is threadedly connected to the hollow lead screw, and the permanent magnet rod is fixedly connected to the baffle. A guiding groove is axially provided on the inner wall of the sleeve on the other side of the partition, and a guiding block matching the guiding groove is provided at the edge of the baffle. The hollow lead screw rotates to drive the baffle and the permanent magnet rod to approach or move away from the magnetostrictive rod.

[0014] Preferably, a first groove is provided at the right end of the substrate, and a first ejector rod hole with a cross-sectional area much smaller than that of the first groove is provided at the bottom of the first groove, and the first ejector rod hole penetrates through to the end face of the x-axis chute close to the right side of the substrate;

[0015] A first backfill block is disposed within the first groove. The width and height of the first backfill block match those of the first groove, and the length of the first backfill block is less than the depth of the first groove, so as to form a first accommodation space between the bottom of the first groove and the first backfill block. The right end of the first backfill block is flush with the right end of the substrate;

[0016] A first displacement device mounting hole penetrating through to the first accommodation space is provided at the right end of the first backfill block, and a magnetostrictive displacement device with an output telescoping in the left-right direction is disposed within the first displacement device mounting hole;

[0017] The x-axis displacement amplification device includes: a first ejector rod disposed within the first ejector rod hole; a first push plate, the width and height of which match those of the first groove. The first push plate is disposed within the first accommodation space, and the magnetostrictive rod of the magnetostrictive displacement device with an output telescoping in the left-right direction abuts against the first push plate. Mineral oil is provided within the first accommodation space between the first push plate and the first ejector rod and within the first ejector rod hole not filled by the first ejector rod for amplifying and transmitting the output of the magnetostrictive displacement device with an output telescoping in the left-right direction to the x-axis slider;

[0018] Wherein, a first air pressure balance hole penetrating through to the first accommodation space is further provided at the right end of the first backfill block.

[0019] Preferably, a first collar coaxial with the first displacement device mounting hole is provided at the right end of the first backfill block. A first x-axis knob is rotatably connected coaxially outside the first collar. The first x-axis knob is fixedly connected to the hollow lead screw. A first air hole communicating with the hollow lead screw is provided at the center of the first x-axis knob, and scales are provided on the surface of the first x-axis knob.

[0020] Preferably, a first return spring is provided in the x-axis chute. One end of the first return spring abuts against the end face of the x-axis chute close to the left side of the substrate, and the other end abuts against the x-axis slider.

[0021] Preferably, a second groove is formed at the rear end of the x-axis slide plate. A second ejector rod hole with a cross-sectional area much smaller than that of the second groove is formed at the bottom of the second groove, and the second ejector rod hole penetrates through to the end face of the y-axis chute close to the rear side of the x-axis slide plate;

[0022] A second backfill block is provided in the second groove. The width and height of the second backfill block match those of the second groove, and the length of the second backfill block is less than the depth of the second groove, so that a second accommodation space is formed between the bottom of the second groove and the second backfill block. The rear end of the second backfill block is flush with the rear end of the x-axis slide plate;

[0023] A second displacement device mounting hole penetrating through to the second accommodation space is formed at the rear end of the second backfill block. A magnetostrictive displacement device with an output telescoping in the front-rear direction is provided in the second displacement device mounting hole;

[0024] The y-axis displacement amplification device includes: a second ejector rod provided in the second ejector rod hole; a second push plate with a width and height matching those of the second groove. The second push plate is provided in the second accommodation space, and the magnetostrictive rod of the magnetostrictive displacement device with an output telescoping in the front-rear direction abuts against the second push plate. Mineral oil is provided in the second accommodation space between the second push plate and the second ejector rod and in the second ejector rod hole not filled by the second ejector rod, for amplifying and transmitting the output of the magnetostrictive displacement device with an output telescoping in the front-rear direction to the y-axis slider;

[0025] Wherein, a second air pressure balance hole penetrating through to the second accommodation space is further formed at the rear end of the second backfill block.

[0026] Preferably, a second collar coaxial with the second displacement device mounting hole is provided at the rear end of the second backfill block. A second y-axis knob is rotatably connected coaxially outside the second collar. The second y-axis knob is fixedly connected to the hollow lead screw. A second air hole communicating with the hollow lead screw is provided at the center of the second y-axis knob, and scales are provided on the surface of the second y-axis knob.

[0027] Preferably, a second return spring is arranged in the y-axis chute. One end of the second return spring abuts against the end face of the y-axis chute close to the front side of the substrate, and the other end abuts against the y-axis slider.

[0028] Preferably, quartz glass is arranged in the first light-transmitting hole, and cross positioning lines are etched on the quartz glass.

[0029] The present invention has at least the following beneficial effects: By using a magnetostrictive displacement device as the driving source, which has a displacement resolution at the nanometer level, combined with a displacement amplification device, it can convert a small deformation into a larger displacement that can drive the slider, achieving positioning at the sub-micron level or even higher precision, and meeting the precise control requirements of the microscope for the sample position. The response time of the magnetostrictive material is extremely short (in the microsecond level), and there are no problems of inertia and hysteresis of mechanical transmission components, so the sample position can be quickly adjusted, which is suitable for scenarios that require real-time dynamic observation or rapid scanning.

[0030] Other advantages, objectives and features of the present invention will be partially reflected by the following description, and will also be understood by those skilled in the art through the research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a top view structural schematic diagram of the precision positioning device for a microscope sample stage based on magnetostriction according to the present invention;

[0032] Figure 2 It is an internal structural schematic diagram of the substrate according to the present invention;

[0033] Figure 3 It is a top view structural schematic diagram of the substrate according to the present invention;

[0034] Figure 4 It is an internal structural schematic diagram of the x-axis slide plate according to the present invention;

[0035] Figure 5 It is a top view structural schematic diagram of the x-axis slide plate according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0036] The following further describes the present invention in detail with reference to the drawings, so that those skilled in the art can implement it according to the description in the specification.

[0037] It should be noted that, unless otherwise specified, the experimental methods described in the following embodiments are all conventional methods, and the reagents and materials, unless otherwise specified, can all be obtained through commercial channels; in the description of the present invention, the orientation or positional relationship indicated by terms such as "lateral", "longitudinal", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present invention.

[0038] As Figures 1 to 5 shown, the present invention provides a precision positioning device for a microscope sample stage based on magnetostriction, comprising:

[0039] A substrate 1, with a first light passing hole 2 opened at its center. On the substrate 1, x-axis chutes are opened along the left-right direction on both the front side and the rear side of the first light passing hole 2. An x-axis slider 3 is slidably connected in the x-axis chutes. Inside the substrate 1, on the right side of the first light passing hole 2, there is a magnetostrictive displacement device with an output end that expands and contracts along the left-right direction. The output end of the magnetostrictive displacement device is connected to the input end of an x-axis displacement amplification device arranged inside the substrate 1, and the output end of the x-axis displacement amplification device is connected to the x-axis slider 3 to drive the x-axis slider 3 to slide along the left-right direction;

[0040] An x-axis slide plate 4, which is arranged above the substrate 1 and connected to the x-axis slider 3. A second light passing hole 5 is opened at the center of the x-axis slide plate 4. On the x-axis slide plate 4, y-axis chutes are opened along the front-rear direction on both the left side and the right side of the second light passing hole 5. A y-axis slider 6 is slidably connected in the y-axis chutes. Inside the x-axis slide plate 4, on the rear side of the second light passing hole 5, there is a magnetostrictive displacement device with an output end that expands and contracts along the front-rear direction. The output end of the magnetostrictive displacement device is connected to the input end of a y-axis displacement amplification device arranged inside the substrate 1, and the output end of the y-axis displacement amplification device is connected to the y-axis slider 6 to drive the y-axis slider 6 to slide along the front-rear direction;

[0041] A y-axis slide plate 7, which is arranged above the x-axis slide plate 4 and connected to the y-axis slider 6. A third light passing hole 8 is opened at the center of the y-axis slide plate 7, and a sample clamp 9 is further arranged on the top surface of the y-axis slide plate 7.

[0042] Specifically, the x-axis chute can be milled downward from the top surface of the substrate 1. A shallow groove can also be milled on the top surface of the substrate 1 around the x-axis chute for installing a cover plate covering the top of the x-axis chute. A long circular hole is opened in the left-right direction on the part of the cover plate above the x-axis chute. The x-axis slide plate 4 can be connected to the x-axis slider 3 through a connecting rod passing through the long circular hole. The y-axis slide plate 7 can also be connected to the y-axis slider 6 through a similar solution.

[0043] In the above embodiment, the magnetostrictive displacement device is used as the driving source, which has a displacement resolution of the nanometer level. Combined with the displacement amplification device, the micro deformation can be converted into a larger displacement that can drive the slider, realizing sub-micron level or even higher-precision positioning, and meeting the precise control requirements of the microscope for the sample position. The response time of the magnetostrictive material is extremely short (in the microsecond level), and there are no problems of inertia and hysteresis of mechanical transmission components, so the sample position can be quickly adjusted, which is suitable for scenarios that require real-time dynamic observation or rapid scanning. The limited stroke of a single-stage magnetostrictive device (usually only a few micrometers) is extended through the displacement amplification device, realizing a stroke range of dozens of micrometers or even millimeters, while maintaining the structural stiffness and avoiding the deformation problem of traditional flexible hinges under large displacements. The x-axis and y-axis adopt a hierarchical structure design, and are respectively driven by independent magnetostrictive displacement devices and displacement amplification mechanisms to achieve orthogonal decoupled motion in the xy plane, avoiding cross-coupling errors and ensuring the independence and accuracy of positioning. The substrate 1, the x-axis slide plate 4 and the y-axis slide plate 7 are all provided with coaxial light passing holes (the first, second and third light passing holes 8) to ensure that the microscope optical path vertically penetrates the sample, avoiding imaging interference caused by structural occlusion, and is suitable for transmission or reflection microscope systems. The driving mechanism and the displacement amplification device are built inside the substrate 1 and the x-axis slide plate 4, reducing the occupation of external space, facilitating integration with the microscope main body, and meeting the requirements of compact equipment in laboratory or industrial environments. The magnetostrictive material can maintain the displacement without continuous power supply when static, and there is no heating problem, avoiding the influence of thermal drift on the positioning accuracy; at the same time, the fully enclosed structure design can effectively isolate external vibration and dust interference. The hierarchical structure and standardized interfaces facilitate the individual replacement or upgrade of each axis component, reduce the maintenance cost, and adapt to the flexible adjustment of different experimental requirements. In summary, through the combination of magnetostrictive drive and displacement amplification technology, this device achieves an optimal balance among high precision, large stroke, fast response and structural compactness, and is particularly suitable for the sample positioning requirements of precision observation equipment such as optical microscopes and scanning probe microscopes.

[0044] Further, the magnetostrictive displacement device includes:

[0045] A sleeve 10, with a partition plate arranged at its center, and a core tube coaxially arranged inside the sleeve 10 on one side of the partition plate;

[0046] A magnetostrictive rod 11 is disposed within the core tube, with one end abutting against the partition and the other end being at one end port of the sleeve 10 for external output;

[0047] A coil 12 is disposed between the core tube and the sleeve 10 for generating an electromagnetic field after being energized;

[0048] A permanent magnet rod 13 is disposed within the sleeve 10 on the other side of the partition. A through hole is provided at the center of the permanent magnet rod 13;

[0049] A hollow lead screw 14 is disposed within the through hole and one end extends outside the other end port of the sleeve 10. A baffle is threadedly connected to the hollow lead screw 14. The permanent magnet rod 13 is fixedly connected to the baffle. A guiding groove is axially provided on the inner wall of the sleeve 10 on the other side of the partition. A guiding block matching the guiding groove is provided at the edge of the baffle. The hollow lead screw 14 rotates to drive the baffle and the permanent magnet rod 13 to approach or move away from the magnetostrictive rod 11.

[0050] Specifically, the sleeve 10 can be made of a soft magnetic alloy (such as Permalloy or pure electrical iron); the partition can be made of high-strength stainless steel. The soft magnetic sleeve 10 can concentrate the magnetic field generated by the coil 12, and the partition separates the magnetic circuit from the mechanical structure to ensure the stable operation of the magnetostrictive rod 11.

[0051] Specifically, the core tube can be made of non-magnetic high-strength ceramic (such as Al2O3) or stainless steel, with an outer diameter in clearance fit with the inner diameter of the sleeve 10, an inner diameter slightly larger than the diameter of the magnetostrictive rod 11, and a length equivalent to that of the sleeve 10. The core tube is used to support the magnetostrictive rod 11 and provide a winding space for the coil 12. The ceramic material can reduce eddy current losses.

[0052] Specifically, the magnetostrictive rod 11 can be made of rare earth iron alloy (such as Terfenol-D, Tb 0.3 Dy 0.7 Fe 1.9 ), with a magnetostrictive coefficient of more than 1500 ppm. One end is fixed to the partition, and the other end extends out of the sleeve 10 as the output end, generating axial expansion and contraction under an applied magnetic field to achieve nanoscale displacement output.

[0053] Specifically, the coil 12 can be made of enameled copper wire, fixed by epoxy resin potting, with 500 - 2000 turns, and wound in the annular space between the core tube and the sleeve 10. It generates a controllable magnetic field after being energized to drive the deformation of the magnetostrictive rod 11.

[0054] Specifically, the permanent magnet rod 13 can be made of high remanence neodymium iron boron (NdFeB, remanence 1.2 - 1.4 T), with the diameter of the central through hole matching that of the hollow lead screw 14. It is used to provide a pre-biased magnetic field to optimize the linear response range of the magnetostrictive rod 11.

[0055] Specifically, the hollow lead screw 14 can be made of stainless steel, the baffle is made of brass or aluminum alloy, the diameter of the baffle has a clearance fit with the inner diameter of the sleeve 10, and the distance between the permanent magnet rod 13 and the magnetostrictive rod 11 is adjusted by rotating the lead screw to dynamically optimize the bias magnetic field.

[0056] The working principle of the magnetostrictive displacement device: After the coil 12 is energized, a circular magnetic field is generated. Under the action of the magnetic field, the magnetostrictive rod 11 expands and contracts axially, pushing the output end to drive the displacement amplification device. Or under the condition of power-off, rotating the hollow lead screw 14 can adjust the position of the permanent magnet rod 13, change the magnetic field strength where the magnetostrictive rod 11 is located, and thus push the output end to drive the displacement amplification device.

[0057] Through the axial movement of the permanent magnet rod 13, the working point of the magnetostrictive rod 11 can be adjusted in real time, improving the stability of the system in a wide temperature range. The magnetostrictive rod 11 responds to current changes in the microsecond level, and the permanent magnet rod 13 provides a static bias, without the need for continuous power supply to maintain displacement. There is no mechanical contact between the coil 12 and the magnetostrictive rod 11, avoiding frictional losses and prolonging the service life. The magnetic circuit and mechanical transmission are integrated in the sleeve 10, and the overall volume is only 1 / 3 - 1 / 2 of that of the traditional lead screw drive. The soft magnetic sleeve 10 shields external stray magnetic fields, ensuring that the positioning accuracy is not affected by environmental electromagnetic interference.

[0058] Further, a first groove is provided at the right end of the substrate 1, and a first ejector rod hole with a cross-sectional area much smaller than that of the first groove is provided at the bottom of the first groove, and the first ejector rod hole penetrates to the end face of the x-axis chute close to the right side of the substrate 1;

[0059] A first backfill block 15 is arranged in the first groove. The width and height of the first backfill block 15 match the first groove, and the length of the first backfill block 15 is less than the depth of the first groove, so as to form a first accommodating space between the bottom of the first groove and the first backfill block 15. The right end of the first backfill block 15 is flush with the right end of the substrate 1;

[0060] A first displacement device mounting hole penetrating through to the first accommodating space is provided at the right end of the first backfill block 15, and the magnetostrictive displacement device whose output end expands and contracts in the left-right direction is arranged in the first displacement device mounting hole;

[0061] The x-axis displacement amplification device includes: a first ejector rod 16 disposed in the first ejector rod hole; a first push plate 17 having a width and height matching the first groove, the first push plate 17 being disposed in the first accommodation space, and the magnetostrictive rod 11 of the magnetostrictive displacement device whose output end expands and contracts in the left-right direction abutting against the first push plate 17. Mineral oil is provided in the first accommodation space between the first push plate 17 and the first ejector rod 16 and in the first ejector rod hole not filled by the first ejector rod 16, for transmitting the amplified output of the magnetostrictive displacement device whose output end expands and contracts in the left-right direction to the x-axis slider 3.

[0062] Wherein, a first air pressure balance hole 18 penetrating through to the first accommodation space is further formed at the right end of the first backfill block 15.

[0063] Specifically, the substrate 1 can be made of high-strength aluminum alloy, such as 6061-T6 aluminum alloy. It has good strength, stiffness and corrosion resistance, relatively light weight, is convenient for processing and installation, and can provide a stable support structure for the entire device.

[0064] Specifically, the first backfill block 15 can be made of epoxy resin composite material. This material has good insulation, chemical corrosion resistance and dimensional stability, can be closely fitted with the first groove, and will not generate electromagnetic interference to the magnetostrictive displacement device.

[0065] Specifically, the mineral oil can be a hydraulic oil with a high viscosity index, such as ISO VG 32 hydraulic oil. It has good lubricity, anti-wear property and chemical stability, can effectively transmit pressure, reduce friction and wear between components, and at the same time can prevent rust and corrosion inside the device.

[0066] When in use in the above embodiment, when it is necessary to drive the x-axis slider to slide in the left-right direction, the coil 12 of the magnetostrictive displacement device is energized, and the coil 12 generates a magnetic field, causing the magnetostrictive rod 11 to undergo telescopic deformation under the action of the magnetic field. The expansion and contraction of the magnetostrictive rod 11 pushes the first push plate 17 abutting against it, and the first push plate 17 moves in the first accommodation space, applying pressure to the mineral oil between the first push plate 17 and the first ejector rod 16. Due to the incompressibility of the mineral oil, the pressure is transmitted to the first ejector rod 16 through the mineral oil, causing the first ejector rod 16 to move in the first ejector rod hole. The movement of the first ejector rod 16 pushes the x-axis slider to slide in the left-right direction, thereby realizing precise positioning of the sample stage in the x-axis direction. When it is necessary to change the position of the x-axis slider, only the magnitude and direction of the current applied to the coil 12 of the magnetostrictive displacement device need to be adjusted to change the expansion and contraction amount and direction of the magnetostrictive rod 11.

[0067] In the above embodiments, in terms of displacement amplification, mineral oil is used as the pressure transmission medium, and the output displacement of the magnetostrictive displacement device is amplified by the different cross-sectional areas of the first push plate 17 and the first ejector rod 16. This enables the relatively small expansion and contraction amount of the original magnetostrictive rod 11 to be converted into a larger displacement of the x-axis slider, breaking through the limitation of the relatively small stroke of the magnetostrictive device itself and meeting the positioning requirements of a larger range for the microscope sample stage. In terms of positioning accuracy, the magnetostrictive displacement device itself has high-precision displacement control capabilities. Combining with the pressure transmission method of mineral oil, it can accurately transmit minute displacements to the x-axis slider, achieving sub-micron or even nano-level positioning accuracy, providing guarantee for the high-precision observation of the microscope. In terms of reliability and stability, the materials used have good performance. The high-strength aluminum alloy substrate 1 provides stable support, and the backfill block made of epoxy resin composite material ensures the structural stability. The ejector rod and sleeve 10 made of stainless steel and the push plate made of brass have high strength and wear resistance. The use of hydraulic oil reduces the friction and wear between components, improving the reliability and service life of the entire device. At the same time, the buffering effect of the hydraulic oil can also absorb a certain amount of vibration and shock, making the device more stable during operation. Finally, in terms of structure, the structure of this device is compact, with reasonable layout of each component, occupying a small space, being convenient for integration with equipment such as microscopes, and being suitable for application scenarios with high space requirements.

[0068] Further, a first collar 19 coaxial with the first displacement device mounting hole is provided at the right end of the first backfill block 15. An x-axis knob 20 is rotatably connected coaxially outside the first collar 19. The x-axis knob 20 is fixedly connected to the hollow lead screw 14. A first air hole communicating with the hollow lead screw 14 is provided at the center of the x-axis knob 20, and a scale is provided on the surface of the x-axis knob 20.

[0069] Specifically, the first collar 19 can be made of polytetrafluoroethylene (PTFE) or brass. Polytetrafluoroethylene has an extremely low coefficient of friction and self-lubricity, ensuring smooth rotation of the x-axis knob without the need for additional lubrication; brass has good wear resistance and corrosion resistance, being suitable for long-term frequent operation. The x-axis knob is made of high-strength aluminum alloy (such as 6061-T6) or engineering plastic (such as polyoxymethylene POM). The aluminum alloy is lightweight and durable, while the plastic has low cost and good insulation. The scale on the surface of the knob is made by laser etching or screen printing process, and the material is black oxide coating or ink, ensuring clear and lasting scale.

[0070] When the above-mentioned embodiment is in use, manually rotate the x-axis knob, and drive the permanent magnet rod 13 to move axially through the threaded drive of the hollow lead screw 14. Since the first collar 19 is rotatably connected to the x-axis knob, the collar remains stationary when the knob rotates, avoiding driving the overall rotation of the magnetostrictive displacement device. The scale can visually display the adjustment amount of the permanent magnet rod 13 (for example, each grid corresponds to a displacement of 0.1 mm), which is convenient for users to accurately set the magnetic field strength. The first air hole allows air to circulate when the knob rotates, balancing the internal air pressure and preventing the negative pressure generated by the movement of the lead screw from affecting the adjustment feel. When it is necessary to compensate for temperature changes or optimize the linearity of the magnetostrictive rod 11, the position of the permanent magnet rod 13 is adjusted through the knob, changing its distance from the magnetostrictive rod 11, thereby adjusting the magnetic field size.

[0071] In the above-mentioned embodiment, the manually-operated mechanical adjustment knob does not require power supply, and is suitable for power-off maintenance or emergency adjustment scenarios. The scale quantization improves the adjustment accuracy and avoids blind operation. The collar reduces the rotational friction and lowers the adjustment torque. The air hole design prevents jamming caused by internal pressure changes. The integrated design of the knob and the lead screw saves space and is convenient for integration into a compact microscope structure. It is typically applied to precision instruments that require off-line calibration, such as the sample pre-positioning mechanism of a scanning electron microscope. Users can quickly perform a rough adjustment through the knob and then switch to the electric control fine adjustment mode to improve the operation efficiency.

[0072] Further, a first return spring 21 is arranged in the x-axis chute. One end of the first return spring 21 abuts against the end face of the x-axis chute close to the left side of the substrate 1, and the other end abuts against the x-axis slider 3.

[0073] When the above-mentioned embodiment is in use, when the magnetostrictive displacement device drives the x-axis slider to slide leftward, the first return spring 21 is compressed and stores elastic potential energy. When power is off or reset is required, the spring releases energy to push the slider back to the initial position.

[0074] In the above-mentioned embodiment, the mechanical reset does not require additional energy, ensuring that the system safely returns to its position after power-off. The pre-tightening force of the spring keeps the slider always in contact with the driving end (such as the first ejector rod 16), eliminating the transmission gap. The elastic buffer can absorb external impacts and protect the magnetostrictive device from rigid collisions. By replacing springs with different stiffnesses, different load requirements can be adapted. The structure is simple and the cost is low. During maintenance, only the slider needs to be disassembled to replace the spring. It can be applied to the microscope autofocus system that requires quick reset. The spring reset cooperates with the magnetostrictive drive to achieve a full-stroke round-trip movement within 0.1 second.

[0075] Further, a second groove is formed at the rear end of the x-axis slide plate 4. A second ejector rod hole with a cross-sectional area much smaller than that of the second groove is formed at the bottom of the second groove, and the second ejector rod hole penetrates to the end face of the y-axis chute close to the rear side of the x-axis slide plate 4;

[0076] A second backfill block 22 is arranged in the second groove. The width and height of the second backfill block 22 match those of the second groove, and the length of the second backfill block 22 is less than the depth of the second groove, so as to form a second accommodation space between the bottom of the second groove and the second backfill block 22. The rear end of the second backfill block 22 is flush with the rear end of the x-axis slide plate 4;

[0077] A second displacement device mounting hole penetrating through to the second accommodation space is formed at the rear end of the second backfill block 22, and a magnetostrictive displacement device with an output telescoping in the front-back direction is arranged in the second displacement device mounting hole;

[0078] The y-axis displacement amplification device includes: a second ejector rod 23 arranged in the second ejector rod hole; a second push plate 24 with a width and height matching those of the second groove. The second push plate 24 is arranged in the second accommodation space, and the magnetostrictive rod 11 of the magnetostrictive displacement device with an output telescoping in the front-back direction abuts against the second push plate 24. Mineral oil is arranged in the second accommodation space between the second push plate 24 and the second ejector rod 23 and in the second ejector rod hole not filled by the second ejector rod 23, for amplifying and transmitting the output of the magnetostrictive displacement device with an output telescoping in the front-back direction to the y-axis slider 6;

[0079] Wherein, a second air pressure balance hole 25 penetrating through to the second accommodation space is further formed at the rear end of the second backfill block 22.

[0080] During the use of the above embodiment, when it is necessary to drive the y-axis slider to slide in the front-back direction, the magnetostrictive displacement device with an output telescoping in the front-back direction is powered on, and its magnetostrictive rod 11 generates an axial deformation, pushing the second push plate 24 to move in the second accommodation space. The second push plate 24 compresses the mineral oil to form a hydraulic transmission. Due to the incompressibility of the mineral oil, the pressure is transmitted to the second ejector rod 23 through the oil. The cross-sectional area of the second ejector rod 23 is much smaller than that of the second push plate 24. Therefore, a small input displacement is amplified into a larger displacement of the second ejector rod 23, thereby driving the y-axis slider to move precisely. The second air pressure balance hole 25 balances the air pressure in the accommodation space in real time, eliminating the movement resistance caused by the pressure difference.

[0081] In the above embodiments, in terms of displacement amplification, mineral oil is used as the pressure transmission medium. Through the different cross-sectional areas of the second push plate 24 and the second ejector rod 23, the amplification of the output displacement of the magnetostrictive displacement device is achieved. This enables the relatively small expansion and contraction amount of the original magnetostrictive rod 11 to be converted into a larger displacement of the y-axis slider, breaking through the limitation of the relatively small stroke of the magnetostrictive device itself and meeting the positioning requirements of a larger range for the microscope sample stage. In terms of positioning accuracy, the magnetostrictive displacement device itself has a high-precision displacement control ability. Combined with the pressure transmission method of mineral oil, it can accurately transmit the minute displacement to the y-axis slider 6, achieving sub-micron or even nano-level positioning accuracy, providing guarantee for the high-precision observation of the microscope. At the same time, the buffering effect of the hydraulic oil can also absorb a certain amount of vibration and shock, making the device more stable during operation. Finally, in terms of structure, the structure of this device is compact, with reasonable layout of each component, occupying a small space, being convenient for integration with equipment such as microscopes, and being applicable to application scenarios with high space requirements.

[0082] Further, a second collar 26 coaxial with the second displacement device mounting hole is provided at the rear end of the second backfill block 22. A y-axis knob 27 is rotatably connected coaxially outside the second collar 26. The y-axis knob 27 is fixedly connected to the hollow lead screw 14. A second air hole communicating with the hollow lead screw 14 is provided at the center of the y-axis knob 27. A scale is provided on the surface of the y-axis knob 27.

[0083] When the above embodiments are in use, the y-axis knob is manually rotated, and the permanent magnet rod 13 is driven to move axially through the screw drive of the hollow lead screw 14. Since the second collar 26 and the y-axis knob 27 are rotatably connected, the collar remains stationary when the knob rotates, avoiding driving the entire magnetostrictive displacement device to rotate. The scale can intuitively display the adjustment amount of the permanent magnet rod 13 (for example, each grid corresponds to a displacement of 0.1 mm), facilitating the user to accurately set the bias magnetic field intensity. The second air hole allows air to flow through when the knob rotates, balancing the internal air pressure and preventing the negative pressure generated by the movement of the lead screw from affecting the adjustment feel. When it is necessary to compensate for temperature changes or optimize the linearity of the magnetostrictive rod 11, the position of the permanent magnet rod 13 is adjusted through the knob, changing its distance from the magnetostrictive rod 11, thereby adjusting the magnitude of the bias magnetic field.

[0084] In the above embodiments, the manual mechanical adjustment knob does not require power supply, and is applicable to power-off maintenance or emergency adjustment scenarios. The scale quantization improves the adjustment accuracy and avoids blind operation. The collar reduces the rotational friction and lowers the adjustment torque. The air hole design prevents jamming caused by internal pressure changes. The integrated design of the knob and the lead screw saves space and is convenient for integration into a compact microscope structure. It is typically applied to precision instruments that require off-line calibration, such as the sample pre-positioning mechanism of a scanning electron microscope. The user can quickly perform a rough adjustment through the knob and then switch to the electronic control fine adjustment mode to improve the operation efficiency.

[0085] Further, a second return spring 28 is disposed in the y-axis chute. One end of the second return spring 28 abuts against the end face of the y-axis chute close to the front side of the substrate 1, and the other end abuts against the y-axis slider 6.

[0086] During the use of the above embodiment, when the magnetostrictive displacement device drives the y-axis slider 6 to slide forward, the second return spring 28 is compressed to store elastic potential energy. When the power is off or reset is required, the spring releases energy to push the slider back to the initial position.

[0087] In the above embodiment, mechanical reset does not require additional energy, ensuring the safe return of the system after power off. The spring pre-tightening force keeps the slider always in contact with the driving end (such as the second ejector rod 23), eliminating the transmission gap. Elastic buffering can absorb external impacts and protect the magnetostrictive device from rigid collisions. By replacing springs with different stiffnesses, different load requirements can be adapted. The structure is simple and the cost is low. During maintenance, only the slider needs to be disassembled to replace the spring. It can be applied to the microscope autofocus system that requires quick reset. The spring reset cooperates with the magnetostrictive drive to achieve a full-stroke round-trip movement within 0.1 second.

[0088] Further, a quartz glass 29 is disposed in the first light passing hole 2, and cross positioning lines are etched on the quartz glass 29.

[0089] During the use of the above embodiment, the cross lines serve as a visual reference to help the user quickly align the center of the sample with the optical axis of the microscope objective. The low thermal expansion coefficient of the quartz glass 29 ensures the stability of the position of the cross lines and will not cause positioning deviation due to material deformation during temperature change. Preferably, an anti-reflection film (such as MgF2, reflectivity <1%) can be coated on the glass surface to reduce stray light interference and improve imaging contrast.

[0090] Next, a magnetostrictive rod made of Terfenol-D with a diameter of 5 mm and a length of 30 mm is used, which undergoes expansion and contraction under the action of a magnetic field, with a maximum expansion and contraction amount of 50 μm. A permanent magnet rod made of neodymium iron boron material with a diameter of 10 mm and a height of 5 mm is used. The hollow lead screw adopts a precision thread with a lead of 0.5 mm. The minimum scale on the surfaces of the x-axis knob and the y-axis knob is 1 μm. The displacement amplification ratios of the x-axis displacement amplification device and the y-axis displacement amplification device are 1:5. The positioning accuracy, response speed, and stability of the microscope sample stage precision positioning device based on magnetostriction are verified.

[0091] The experimental equipment includes: a laser interferometer for measuring displacement accuracy, an oscilloscope for measuring response time, and a temperature controller for testing temperature stability.

[0092] 1 Positioning accuracy test: Align the laser interferometer with the sample stage, set the measurement range to 0 - 50 μm, rotate the x-axis knob and y-axis knob respectively, adjust by 1 μm each time, and record the measurement values of the laser interferometer. Repeat 10 times, and calculate the average value and standard deviation;

[0093] The results are shown in Table 1 below:

[0094] Table 1

[0095] Number of adjustments Set value (μm) Measured value (μm) Error (μm) 1 1 1.02 0.02 2 2 2.01 0.01 3 3 3.03 0.03 4 4 4.02 0.02 5 5 5.01 0.01 6 6 6.03 0.03 7 7 7.02 0.02 8 8 8.01 0.01 9 9 9.03 0.03 10 10 10.02 0.02

[0096] Average value: The error is 0.02 μm, and the standard deviation is 0.01 μm.

[0097] The positioning accuracy error of the magnetostrictive-based precision positioning device for microscope sample stage is 0.02 μm, meeting the nanoscale positioning requirements.

[0098] 2. Response speed test: Connect the oscilloscope to the drive circuit of the magnetostrictive coil, record the time from the start of adjustment to the stop of the movement of the sample stage. The results are shown in Table 2 below:

[0099] Table 2

[0100]

[0101]

[0102] Average value: 1.52 ms.

[0103] The average response speed of the magnetostrictive-based precision positioning device for microscope sample stage is 1.52 ms, meeting the fast response requirements.

[0104] 3. Temperature stability test: Place the sample stage in the temperature controller, set the temperature range to 20°C - 40°C, measure the displacement change of the sample stage every time the temperature rises by 5°C, repeat 3 times, and calculate the average value. The results are shown in Table 3:

[0105] Table 3

[0106] Temperature (°C) Displacement change (μm) 20 0 25 0.01 30 0.02 35 0.03 40 0.04

[0107] For the magnetostrictive-based precision positioning device for microscope sample stage, when the temperature rises by 5°C each time, the displacement change is 0.01 μm, and the stability is good.

[0108] Although the embodiments of the present invention have been disclosed as above, it is not limited to only the applications listed in the specification and embodiments. It can be fully applied to various fields suitable for the present invention. For those familiar with the field, additional modifications can be easily made. Therefore, without departing from the general concept defined by the claims and the equivalent scope, the present invention is not limited to the specific details and the illustrated and described examples here.

Claims

1. A microscope sample stage precision positioning device based on magnetostriction, characterized in that: include: A substrate, a first light-through hole is provided at the center thereof, an x-axis slide groove is provided on the substrate in the front side and the rear side of the first light-through hole in the left-right direction, an x-axis slider is slidably connected in the x-axis slide groove, a magnetostrictive displacement device whose output end is retractable in the left-right direction is provided in the substrate on the right side of the first light-through hole, the output end of the magnetostrictive displacement device is connected to the input end of an x-axis displacement amplifying device provided in the substrate, and the output end of the x-axis displacement amplifying device is connected to the x-axis slider to drive the x-axis slider to slide in the left-right direction; an x-axis slide plate, which is arranged above the substrate and connected to the x-axis slider, a second light-through hole is provided at the center of the x-axis slide plate, a y-axis slide groove is provided on the left and right sides of the second light-through hole along the front-to-back direction on the x-axis slide plate, a y-axis slider is slidably connected in the y-axis slide groove, a magnetostrictive displacement device whose output end is telescopic along the front-to-back direction is provided in the x-axis slide plate at the rear side of the second light-through hole, the output end of the magnetostrictive displacement device is connected to the input end of a y-axis displacement amplifying device provided in the substrate, and the output end of the y-axis displacement amplifying device is connected to the y-axis slider to drive the y-axis slider to slide along the front-to-back direction; The y-axis slide is arranged above the x-axis slide and connected to the y-axis slide. A third light-through hole is opened at the center of the y-axis slide. A sample clamp is also arranged on the top surface of the y-axis slide.

2. The microscope sample stage precision positioning device based on magnetostriction according to claim 1, characterized in that: The magnetostrictive displacement device comprises: A sleeve, a partition is arranged at the center thereof, and a core tube is coaxially arranged in the sleeve on one side of the partition; A magnetostrictive rod is disposed in the core tube, one end of which abuts against the partition plate, and the other end is located at one end port of the sleeve for output to the outside; A coil, which is arranged between the core tube and the sleeve and is used to generate an electromagnetic field after being energized; A permanent magnet bar is arranged in the sleeve on the other side of the partition, and a through hole is arranged at the center of the permanent magnet bar; A hollow screw rod is arranged in the through hole and one end of which extends to the outside of the other end port of the sleeve. A baffle is threadedly connected to the hollow screw rod. The permanent magnet rod is fixedly connected to the baffle. A guide groove is axially arranged on the inner wall of the sleeve on the other side of the baffle. A guide block matching the guide groove is arranged on the edge of the baffle. The hollow screw rod rotates to drive the baffle plate and the permanent magnet rod to approach or move away from the magnetostrictive rod.

3. The microscope sample stage precision positioning device based on magnetostriction according to claim 2, characterized in that: A first groove is formed at the right end of the base plate, a first push rod hole whose cross-sectional area is much smaller than that of the first groove is formed at the bottom of the first groove, and the first push rod hole penetrates to the end surface of the x-axis slide groove close to the right side of the base plate; A first backfill block is disposed in the first groove, wherein the width and height of the first backfill block match those of the first groove, and the length of the first backfill block is less than the depth of the first groove, so that a first accommodation space is formed between the bottom of the first groove and the first backfill block, and the right end of the first backfill block is flush with the right end of the substrate; A first displacement device installation hole penetrating into the first accommodation space is formed at the right end of the first backfill block, and a magnetostrictive displacement device that extends in the left-right direction at the output end is arranged in the first displacement device installation hole; The x-axis displacement amplifying device comprises: a first push rod, which is arranged in the first push rod hole; a first push plate, whose width and height match the first groove, the first push plate is arranged in the first accommodating space, and the magnetostrictive rod of the magnetostrictive displacement device whose output end is telescopic in the left-right direction abuts against the first push plate, and mineral oil is arranged in the first accommodating space between the first push plate and the first push rod and in the first push rod hole not filled by the first push rod, for amplifying the output of the magnetostrictive displacement device whose output end is telescopic in the left-right direction and transmitting it to the x-axis slider; The right end of the first backfill block is further provided with a first air pressure balance hole penetrating into the first accommodation space.

4. The microscope sample stage precision positioning device based on magnetostriction according to claim 3, characterized in that: The right end of the first backfill block is provided with a first ring coaxial with the mounting hole of the first displacement device, and an x-axis knob is coaxially rotatably connected outside the first ring. The x-axis knob is fixedly connected to the hollow screw rod, and a first air hole connected to the hollow screw rod is provided at the center of the x-axis knob, and a scale is provided on the surface of the x-axis knob.

5. The microscope sample stage precision positioning device based on magnetostriction according to claim 3, characterized in that: A first return spring is arranged in the x-axis slide groove, one end of the first return spring abuts against the end surface of the x-axis slide groove close to the left side of the substrate, and the other end abuts against the x-axis slider.

6. The microscope sample stage precision positioning device based on magnetostriction according to claim 2, characterized in that: A second groove is formed at the rear end of the x-axis slide, a second push rod hole having a much smaller cross-sectional area than the second groove is formed at the bottom of the second groove, and the second push rod hole penetrates to the end surface of the y-axis slide groove close to the rear side of the x-axis slide; A second backfill block is disposed in the second groove, the width and height of the second backfill block match the second groove, and the length of the second backfill block is less than the depth of the second groove, so that a second accommodation space is formed between the bottom of the second groove and the second backfill block, and the rear end of the second backfill block is flush with the rear end of the x-axis slide plate; A second displacement device installation hole penetrating into the second accommodation space is provided at the rear end of the second backfill block, and the magnetostrictive displacement device that extends along the front-to-back direction at the output end is arranged in the second displacement device installation hole; The y-axis displacement amplifying device comprises: a second push rod, which is arranged in the second push rod hole; a second push plate, whose width and height match the second groove, the second push plate is arranged in the second accommodating space, and the magnetostrictive rod of the magnetostrictive displacement device whose output end is telescopic in the front-to-back direction abuts against the second push plate, and mineral oil is arranged in the second accommodating space between the second push plate and the second push rod and in the second push rod hole not filled by the second push rod, for amplifying the output of the magnetostrictive displacement device whose output end is telescopic in the front-to-back direction and transmitting it to the y-axis slider; A second air pressure balance hole penetrating into the second accommodation space is further provided at the rear end of the second backfill block.

7. The microscope sample stage precision positioning device based on magnetostriction according to claim 6, characterized in that: A second ring coaxial with the mounting hole of the second displacement device is provided at the rear end of the second backfill block, a y-axis knob is coaxially rotatably connected to the outside of the second ring, the y-axis knob is fixedly connected to the hollow screw rod, a second air hole connected to the hollow screw rod is provided at the center of the y-axis knob, and a scale is provided on the surface of the y-axis knob.

8. The microscope sample stage precision positioning device based on magnetostriction according to claim 6, characterized in that: A second return spring is arranged in the y-axis slide groove, one end of the second return spring abuts against the end surface of the y-axis slide groove close to the front side of the substrate, and the other end abuts against the y-axis slider.

9. The microscope sample stage precision positioning device based on magnetostriction according to claim 1, characterized in that: Quartz glass is arranged in the first light-through hole, and cross positioning lines are etched on the quartz glass.

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