Fluorescent light filter based on metasurface semiconductor chip

Abstract

The invention discloses a fluorescence optical filter based on a metasurface semiconductor chip, the fluorescence optical filter comprises a substrate layer and a metamaterial layer, the metamaterial layer comprises a micro-nano structure, the micro-nano structure is integrated on the outer side of the substrate layer, the micro-nano structure is composed of multiple groups of nano columns, and the multiple groups of nano columns are distributed in a multi-layer stacking mode. According to the metamaterial, the metamaterial is generally composed of a multi-layer stacked three-dimensional structure, has electromagnetic characteristics, such as negative refractive index and zero refractive index, which are not possessed by any natural material, has an ultrathin planar structure, does not generate chromatic aberration, can be produced in a large scale by using an existing semiconductor factory, and does not focus light rays by refracting or diffracting light waves; the light wave is controlled and focused by adjusting the phase of the light wave, so that one chip type light filter generally at least meets the requirements of 2-3 fluorescent channels, and one chip type light filter can replace the original 2-3 conventional coated fluorescent light filters.

Description

Technical Field

[0001] The invention relates to the technical field of fluorescent filters, and in particular to a fluorescent filter based on a super-surface semiconductor chip. Background Art

[0002] Fluorescence filter is the abbreviation of fluorescence imaging filter, which is a key optical component used in life science instruments. The main function of imaging filter is to select and separate the characteristic band spectrum of excitation light and emission fluorescence in biomedical fluorescence inspection and analysis system, and then observe through fluorescence microscope. Generally speaking, fluorescence filter is composed of three filters with different functions, namely excitation filter, emission filter and dichroic mirror.

[0003] The fluorescent filters for PCR currently used in the market are all coated. Based on the principle of optical filters, they use special materials and multi-layer film design to screen the light passing through. This filter is usually composed of multiple layers of materials with different refractive indices. These layers are stacked in a specific order to form a structure that can reflect light within a specific wavelength range. By precisely controlling the thickness of each layer, a bandpass filter can be designed that only allows light within a certain wavelength range to pass.

[0004] Due to the shortcomings and characteristics of the coating process, hundreds of layers of film need to be coated on the glass slide to meet the OD value required for fluorescent PCR. The complicated process leads to high prices. In addition, due to the complexity of the coating, a fluorescent filter usually only meets the needs of one fluorescent channel. Therefore, it is urgent to propose a corresponding fluorescent filter based on a metasurface semiconductor chip to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to propose a fluorescent filter based on a super-surface semiconductor chip in order to solve the above-mentioned problem.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A fluorescent filter based on a metasurface semiconductor chip comprises a substrate layer and a metamaterial layer, wherein the metamaterial layer comprises a micro-nano structure, wherein the micro-nano structure is integrated outside the substrate layer, and the micro-nano structure is composed of multiple groups of nanocolumns, and the multiple groups of nanocolumns are distributed in a multi-layer stack.

[0008] Preferably, the metamaterial layer further comprises a protective layer, which is wrapped around the outer side of the micro-nano structure and is fixedly connected to the base layer.

[0009] Preferably, the nanorods are in a square column structure.

[0010] Preferably, the nanocolumn is a cylindrical structure.

[0011] Preferably, the nano-columns include equal amounts of square columns and cylindrical columns, and the square columns and the cylindrical columns are distributed alternately.

[0012] In summary, due to the adoption of the above technical solutions, the beneficial effects of the present invention are as follows:

[0013] 1. In the present application, the multi-dimensional regulation of the optical field is realized at the sub-wavelength spatial scale by using metamaterials. By adopting specific structural units, the flexible regulation of parameters such as the phase, polarization, and amplitude of light is realized, perfectly solving the problem that usually only one fluorescence channel is satisfied on a fluorescence filter. At the same time, metamaterials are usually composed of multi-layer stacked three-dimensional structures, having electromagnetic characteristics that any natural material does not have, such as negative refractive index, zero refractive index, etc., having an ultra-thin planar structure, not generating chromatic aberration, and can be mass-produced using existing semiconductor factories. It does not focus light by refracting or diffracting light waves, but realizes the control and focusing of light waves by adjusting the phase of light waves. Therefore, a chip-type filter usually satisfies the requirements of at least 2-3 fluorescence channels, and a chip-type filter can replace the original 2-3 conventional coated fluorescence filters.

[0014] 2. In the present application, by precisely arranging sub-wavelength-sized elements at the micro scale, these elements can perform local phase modulation on the incident electromagnetic wave, thereby realizing the focusing, divergence, or other complex manipulations of light waves. The difference between the surface of the metamaterial and traditional optical elements lies in that the interaction between its sub-wavelength structure and the incident electromagnetic field can introduce sudden changes in optical parameters, breaking through the dependence of traditional optical elements on the propagation optical path. This characteristic enables the metasurface to flexibly and greatly modulate the amplitude, phase, polarization and other characteristics of the optical field within an extremely thin thickness range, providing new possibilities for the miniaturization and integration of optical field information sensing. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Shows a schematic diagram of the filtering of a filter by a conventional coating process according to an embodiment of the present invention;

[0016] Figure 2 Shows a schematic diagram of the basic structure according to an embodiment of the present invention;

[0017] Figure 3 Shows a schematic diagram of the working principle of a metasurface filter according to an embodiment of the present invention;

[0018] Figure 4 Shows a schematic plan view of a metasurface filter according to an embodiment of the present invention

[0019] Figure 5 Shows a schematic diagram of the transmission of two wavelengths according to an embodiment of the present invention.

[0020] Figure 6 Shows a schematic diagram of the micro - surface of a chip provided according to an embodiment of the present invention.

[0021] Figure 7 Shows an optical computing diagram provided according to an embodiment of the present invention.

[0022] Figure 8 Shows a schematic diagram of a square - column structure provided according to an embodiment of the present invention.

[0023] Figure 9 Shows a schematic diagram of a cylindrical structure provided according to an embodiment of the present invention;

[0024] Figure 10 Shows a schematic diagram of a bimodal structure provided according to an embodiment of the present invention. Detailed implementation manners

[0025] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0026] Embodiment 1:

[0027] Please refer to Figures 1-10 , the present invention provides a technical solution:

[0028] A fluorescence filter based on a metasurface semiconductor chip, comprising a base layer and a metamaterial layer. The metamaterial layer includes micro - nano structures, and the micro - nano structures are integrated on the outer side of the base layer. The micro - nano structures are composed of multiple groups of nano - columns, and the multiple groups of nano - columns are distributed in a multi - layer stacked manner. The metamaterial layer further includes a protective layer, and the protective layer wraps the outside of the micro - nano structures and is fixedly connected to the base layer;

[0029] Using metamaterials to achieve multi-dimensional control of the optical field at the sub-wavelength spatial scale, specific structural units are adopted to flexibly control parameters such as the phase, polarization, and amplitude of light, perfectly solving the problem that usually only one fluorescence channel is satisfied on a fluorescence filter. At the same time, metamaterials are usually composed of multi-layer stacked three-dimensional structures and have electromagnetic properties that no natural material possesses, such as negative refractive index, zero refractive index, etc. They have an ultra-thin planar structure, do not produce chromatic aberration, and can be mass-produced using existing semiconductor factories. It does not focus light by refracting or diffracting light waves, but controls and focuses light waves by adjusting the phase of light waves. Therefore, a chip-type filter usually satisfies the requirements of at least 2-3 fluorescence channels, and a chip-type filter can replace the original 2-3 conventional coated fluorescence filters. By precisely arranging sub-wavelength-sized elements at the microscale, these elements can perform local phase modulation on the incident electromagnetic wave, thereby achieving focusing, divergence, or other complex manipulations of light waves. The difference between the metamaterial surface and traditional optical elements lies in that the interaction between its sub-wavelength structure and the incident electromagnetic field can introduce sudden changes in optical parameters, breaking through the dependence of traditional optical elements on the propagation optical path. This characteristic enables the metasurface to flexibly and significantly modulate characteristics such as the amplitude, phase, and polarization of the optical field within an extremely thin thickness range, providing new possibilities for the miniaturization and integration of optical field information sensing.

[0030] Example Two:

[0031] Please refer to Figure 8 , a fluorescence filter based on a metasurface semiconductor chip, including a base layer and a metamaterial layer. The metamaterial layer includes micro-nano structures, and the micro-nano structures are integrated on the outer side of the base layer. The micro-nano structures are composed of multiple groups of nano-columns, and the multiple groups of nano-columns are distributed in a multi-layer stacked manner. The metamaterial layer further includes a protective layer, and the protective layer wraps the outside of the micro-nano structures and is fixedly connected to the base layer. The nano-columns are in a square column structure;

[0032]

[0033] By changing the sizes l of different Si units, monochromatic filtering with central wavelengths of 425 nm, 492 nm, 520 nm, 567 nm, and 646 nm can be respectively achieved, and the full width at half maximum (the above values are all examples, and the specific values can be changed, for example, 492 can be 500, and 520 can be 550).

[0034] Example Four:

[0035] Please refer to Figure 9, A fluorescence filter based on a metasurface semiconductor chip, comprising a base layer and a metamaterial layer. The metamaterial layer includes micro-nano structures integrated on the outer side of the base layer. The micro-nano structures are composed of multiple groups of nano-columns, and the multiple groups of nano-columns are distributed in a multi-layer stacked manner. The metamaterial layer further includes a protective layer, which is wrapped around the outside of the micro-nano structures and is fixedly connected to the base layer. The nano-columns are cylindrical structures;

[0036]

[0037] When the shape of the nano-columns is changed from square columns to cylindrical columns, similar effects to those of square columns can be achieved;

[0038] By changing the sizes l of different Si units, monochromatic filtering with central wavelengths of 425 nm, 492 nm, 520 nm, 567 nm, and 646 nm can be achieved respectively, as well as the full width at half maximum (the above values are all examples, and the specific values can be changed. For example, 492 can be 500, and 520 can be 550)

[0039] Example 3:

[0040] Please refer to Figure 10 , A fluorescence filter based on a metasurface semiconductor chip, comprising a base layer and a metamaterial layer. The metamaterial layer includes micro-nano structures integrated on the outer side of the base layer. The micro-nano structures are composed of multiple groups of nano-columns, and the multiple groups of nano-columns are distributed in a multi-layer stacked manner. The metamaterial layer further includes a protective layer, which is wrapped around the outside of the micro-nano structures and is fixedly connected to the base layer. The nano-columns include an equal number of square columns and cylindrical columns, and the square columns and cylindrical columns are distributed alternately;

[0041]

[0042] The nano-columns have a bimodal structure. By changing the sizes l of different Si units, monochromatic filtering with central wavelengths of 425 nm, 492 nm, 520 nm, 567 nm, and 646 nm can be achieved respectively, as well as the full width at half maximum (the above values are all examples, and the specific values can be changed. For example, 492 can be 500, and 520 can be 550).

[0043] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to these embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A fluorescent filter based on a metasurface semiconductor chip, comprising a substrate layer and a metamaterial layer, characterized in that: The metamaterial layer includes a micro-nano structure, which is integrated on the outside of the substrate layer. The micro-nano structure is composed of multiple groups of nano-pillars, and the multiple groups of nano-pillars are distributed in a multi-layer stack.

2. The fluorescent filter based on the supersurface semiconductor chip according to claim 1, characterized in that: The metamaterial layer also includes a protective layer, which is wrapped around the outer side of the micro-nano structure and is fixedly connected to the base layer.

3. The fluorescent filter based on the supersurface semiconductor chip according to claim 1, characterized in that: The nanocolumn is in a square column structure.

4. The fluorescent filter based on the supersurface semiconductor chip according to claim 1, characterized in that: The nanocolumn is a cylindrical structure.

5. The fluorescent filter based on the super-surface semiconductor chip according to claim 1, characterized in that: The nanocolumns include equal amounts of square columns and circular columns, and the square columns and circular columns are staggeredly distributed.

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