Rotary joint device and positioning device comprising rotary joint device and linear guide device

Abstract

The invention relates to a rotary joint device (DGA) comprising a first part (15), a second part (70) and a coupling device (KE) comprising at least one solid joint (80A, 80B) for connecting the first part (15) and the second part (70), such that the second part can be rotated relative to the first part about a rotation axis (DZ) extending in a first direction (Z), the first portion (15) and the second portion (70) each have an extension perpendicular to the axis of rotation (DZ). The second part (70) is arranged axially offset from the first part (15) by a distance with respect to the axis of rotation (DZ). The coupling device (KE) comprises a first solid body joint (80A) and a second solid body joint (80B), the first solid body joint (80A) and the second solid body joint (80B) each having two end sections and an intermediate section, the intermediate section being connected to the end sections by an elastically deformable web portion, and the intermediate section being connected to the end sections by an elastically deformable web portion, and the first solid body joint (80A) and the second solid body joint (80B) being connected to the first solid body joint (80A) and the second solid body joint (80B). A respective end section of the solid body joint (80A, 80B) is rigidly connected to the second portion (70), and a respective middle section of the solid body joint (80A, 80B) is rigidly connected to the first portion (15).

Description

Technical Field

[0001] The present invention relates to a rotary joint device and a positioning device, wherein the rotary joint device includes a first part, a second part and a coupling device, the coupling device includes at least one solid body joint for connecting the first part and the second part, and the positioning device includes the rotary joint device having a linear guiding device. Background Art

[0002] Rotary joint devices of the above type are generally designed such that the coupling device is formed to connect the first part and the second part via at least one solid body joint so that the second part can rotate relative to the first part about a rotation axis extending in one direction, wherein the first part and the second part each have an extension perpendicular to the rotation axis. The rotation of the first part relative to the second part about the rotation axis is thus related to the elastic deformation of the solid body joint connecting the first part and the second part.

[0003] A variety of different solid body joints of the above type are known, each solid body joint including a fixed end and a flexible end, wherein the fixed end and the flexible end are connected by a thin elastic abdomen, and the fixed end of the solid body joint is, for example, used to connect to the first part of the rotary joint device of the above type, while the flexible end of the solid body joint is used to connect to the second part of the rotary joint device.

[0004] A swivel joint device of the above type can be used, for example, in a positioning device for positioning a movable member, wherein the positioning device is adapted to move the movable member in two different directions arranged at right angles to each other relative to a flat surface formed on a base. This type of positioning device typically has two different axes, which are arranged at right angles to each other and extend parallel to the flat surface of the base, wherein one axis is also guided on the other axis by a guiding device, so that this axis can move relative to the other axis in the longitudinal direction of the other axis. Therefore, a solid joint of the swivel joint device of the above type is used, for example, to facilitate connecting the guiding device to this axis, so that the guiding device can rotate relative to this axis about a rotation axis, wherein the rotation axis, for example, extends substantially perpendicular to the flat surface of the base. In this case, the guiding device is connected to this axis by the solid joint, so that the guiding device can pivot relative to this axis about the rotation axis at least within a certain angular range, and thus the spatial position of the guiding device relative to this axis can be changed. Therefore, even if the spatial position of this axis relative to the other axis changes within a certain tolerance range, the guiding device can always remain in a specific spatial position relative to the other axis. Therefore, the corresponding tolerance regarding the spatial position of this axis relative to the other axis can be compensated by the deformation of the solid joint.

[0005] This type of positioning device is used, for example, in the semiconductor industry to facilitate, for example, bringing a semiconductor wafer to different positions during a process step of forming a micro-structure on the surface of the semiconductor wafer, or positioning the semiconductor wafer relative to a measuring device for metrological purposes.

[0006] For example, in industrial applications for the production of micro-structures or for the inspection and / or characterization of micro-structures by measurement, a positioning device is required to be adapted to move a movable member (such as a platform or table for receiving an object to be positioned, respectively) in a first direction and a second direction (i.e., two-dimensional directions relative to a specified plane) at the highest possible speed and optionally at the highest possible acceleration (for example, in the range of 2g or higher), so as to perform repetitive and reproducible positioning of it at a specified position with high precision (i.e., the precision is in the sub-micron range) in each case.

[0007] To provide rapid and precise positioning of a movable member in a first direction and a second direction, a positioning device of the above type typically includes a base (e.g., a block made of granite) and a moving device, the base including a flat guiding surface arranged parallel to the first direction and parallel to the second direction, the moving device being for moving the movable member relative to the flat guiding surface of the base. Thus, a moving device of the above type may also have, for example, a first moving device of a gantry design, which includes a gantry beam and a gantry drive, wherein the gantry beam is arranged above the flat guiding surface and extends at a certain distance from the flat guiding surface in the second direction, the gantry drive being for moving the gantry beam relative to the base in the first direction. Thus, the gantry beam has a first end and a second end opposite to the first end, wherein the gantry drive includes two first linear axes extending in the first direction, each first linear axis including a linear drive, and the two first linear axes extending in the first direction are designed such that one of the linear drives of the two first linear axes is connected to the first end of the gantry beam, and the other linear drive of the two first linear axes is connected to the second end of the gantry beam.

[0008] To enable the movable member to move in the first direction and the second direction, the movable member is thus mounted on the gantry beam in such a way that the movable member can linearly move along the gantry beam in the second direction, wherein the gantry beam has a second linear axis extending in the second direction, which includes a linear drive connected to the movable member for moving the movable member in the second direction.

[0009] To enable the movable member to be repeatedly and reproducibly positioned at a specified position with high precision (i.e., precision in the nanometer range) relative to the guiding surface of the base, for many applications, it is advantageous to support the gantry beam of the first moving device on the base by an air bearing when moving along the flat guiding surface of the base. Thus, during the movement of the gantry beam relative to the base, the surface area of the gantry beam and the guiding surface of the base in the region of the air bearing are separated by an air cushion, respectively positioned opposite to each other and moving relative to each other, so as to be able to move relative to each other without contact.

[0010] For many applications of positioning devices of the above type, it is necessary to form positioning devices of this type in a "high-dynamic manner" such that they are suitable for moving a movable member with a large acceleration (e.g., in the range of 2g or greater). In the case of a high-dynamic positioning device of the above type, a basic requirement is that the deformation of the positioning device, in particular the frame beam of the first moving device, due to inertia should be as small as possible during the large acceleration of the frame beam in the first direction by the linear drives of the two first linear axes, and during the large acceleration of the movable member in the second direction by the linear drive of the second linear axis, the frame beam should have as large a stiffness as possible with respect to deformations in the form of bending and / or torsion about the first direction and / or the second direction.

[0011] For a positioning device of the above type, in the case where the frame beam is guided on a base by means of an air bearing and formed in a high-dynamic manner, its structure is specifically known, which has a "flat" configuration such that the two linear drives of the first linear axis are arranged, if possible, at the centroid height of all components of the positioning device moved by these two linear drives to maximize the dynamic torsional stiffness (corresponding to the natural frequency) of the frame beam. The latter is related to the fact that the greater the perpendicular distance (i.e., perpendicular to the flat guiding surface of the base) between the force vectors of the linear drives of the two first linear axes acting on the frame beam and the centroid of all components of the positioning device moved by the linear drives of the two first linear axes, the stronger the frame beam twists in response to the acceleration movement in the first direction caused by the inertia of the components of the positioning device moved by the linear drives of the two linear axes, which unfavorably prolongs the setting time required for the frame beam to reach a stable position again after the acceleration movement in the first direction.

[0012] For example, a positioning device of the above type formed in a high-dynamic manner is disclosed in Document CN113977294A. In this positioning device, the frame beam is guided on the flat guiding surface of the base by means of air bearings. The positioning device is designed for precisely positioning a movable member in the form of a movable table for receiving a workpiece (for example, for micro-machining of the workpiece). The frame beam of the positioning device is guided on the flat guiding surface on the top side of the base by two horizontal air bearings, wherein one of the two horizontal air bearings is arranged at the first end of the frame beam so as to support or guide the first end of the frame beam on the flat guiding surface of the base when moving in the first direction, and the other of the two horizontal air bearings is arranged at the second end of the frame beam so as to support or guide the second end of the frame beam on the flat guiding surface on the top side of the base when moving in the first direction. The movable worktable to be positioned can be moved in a second direction (the longitudinal direction of the frame beam) by a linear drive of a second linear axis arranged on the frame beam, and is also supported or guided on the top side of the base by means of the horizontal air bearings on the flat guiding surface. In order to laterally guide the frame beam when moving in the first direction, a lateral guiding surface is provided, which extends parallel to the first direction and perpendicular to the flat guiding surface of the base. Relative to the flat guiding surface on the top side of the base, the lateral guiding surface is arranged at approximately the same height as the frame beam, so that the lateral guiding surface is arranged laterally adjacent to the frame beam near one of the ends of the frame beam and is at a certain distance from this end of the frame beam. The frame beam is guided on the lateral guiding surface by lateral air bearings. For this purpose, the lateral air bearings are fastened to the side surface of the frame beam at the end of the frame beam arranged near the lateral guiding surface. This arrangement of the lateral guiding surface (i.e., being laterally close to the frame beam near one of the ends of the frame beam and maintaining a certain distance from this end of the frame beam) maximizes the dynamic bending stiffness of the frame beam in response to the acceleration of the movable table in the second direction (corresponding to the longitudinal direction of the frame beam). The latter is related to the fact that the greater the distance between the position where the frame beam is guided on the lateral guiding surface by the lateral air bearings and the centroid of the movable table arranged on the frame beam, the greater the bending moments respectively acting on the frame beam or the lateral air bearings in response to the acceleration of the movable table in the second direction, which reduces the bending stiffness of the frame beam and unfavorably prolongs the setting time required for the frame beam to reach a stable position again after the movable table accelerates in the second direction.To balance the tolerances and different speeds of the two linear drives of the two first linear axes in response to the movement of the frame beam in the first direction, the lateral air bearing is connected to this end of the frame beam through a solid body joint (located between the lateral air bearing and this end of the frame beam), such that the lateral air bearing can pivot relative to the frame beam.

[0013] The solid body joint particularly includes a relatively thin first abdominal portion, which extends substantially parallel to the second direction and parallel to the third direction, wherein the third direction extends perpendicular to the first direction and perpendicular to the second direction. The first abdominal portion is flexible, so that it has a small stiffness for bending about an axis extending in the third direction, such that the first abdominal portion of the solid body joint provides rotation of the lateral air bearing relative to the frame beam about an axis extending in the third direction. The solid body joint further includes a relatively thin second abdominal portion, which extends substantially parallel to the first direction and parallel to the second direction. This second abdominal portion is flexible, such that it has a small stiffness for bending about an axis extending in the first direction, so that the second abdominal portion of the solid body joint provides rotation of the lateral air bearing relative to the frame beam about an axis extending in the first direction.

[0014] The defect of the positioning device disclosed in Document CN113977294A is that: compared with the distance that the movable member to be positioned can move relative to the flat guiding surface of the base by means of the corresponding positioning device, it has relatively large space requirements (relative to the base surface parallel to the first direction and the second direction, wherein the corresponding parts of the positioning device are arranged to be spatially distributed on this base surface), which is mainly due to the spatial arrangement of the two first linear axes and the second linear axis and the spatial arrangement of the lateral air bearing for guiding the frame beam on one lateral guiding surface, wherein the lateral air bearing is laterally arranged adjacent to the frame beam near one end of the frame beam and is at a certain distance from this end of the frame beam.

[0015] Regarding the positioning device disclosed in Document CN113977294A, the above-mentioned solid body joint also forms the connection between the lateral air bearing and the frame beam, which has relatively low stiffness for the rotation of the lateral air bearing relative to the frame beam about an axis extending in the first direction or about an axis extending in the second direction, and also has low stiffness for the translation of the lateral air bearing relative to the frame beam in the first direction or the second direction. Therefore, the connection between the lateral air bearing and the frame beam formed by the solid body joint can undergo relatively strong deformation in response to the mechanical stress of the frame beam, which results in the rotation of the frame beam relative to the lateral air bearing about an axis extending in the first direction or about an axis extending in the second direction, or results in the translation of the frame beam relative to the lateral air bearing in the first direction or the second direction. The latter is limited in the case of high-dynamic applications, where the frame beam will be subjected to mechanical stress of the above type when the movable table moves in the first direction and / or the second direction with the maximum possible acceleration. Summary of the Invention

[0016] The object of the present invention is to overcome the above-mentioned defects and provide a rotary joint device, which includes a first part, a second part and a coupling device. Among them, the coupling device includes at least one solid body joint for connecting the first part and the second part, so that the second part can rotate relative to the first part about a rotation axis extending in the first direction. Among them, the coupling device particularly provides a compact arrangement of the first part and the second part with relatively small space requirements, and also ensures that the coupling device has relatively high stiffness for the rotation of the first part relative to the second part about at least one direction perpendicular to the rotation axis.

[0017] The present invention also provides a positioning device, which includes the rotary joint device combined with a linear guiding device.

[0018] The above object is achieved by a rotary joint device having the features defined in claim 1 and a positioning device having the features defined in claim 13.

[0019] The rotary joint device includes a first part, a second part and a coupling device. Among them, the coupling device includes at least one solid body joint for connecting the first part and the second part, so that the second part can rotate relative to the first part about a rotation axis extending in the first direction. Among them, the first part and the second part respectively have extensions perpendicular to the rotation axis, and the second part is arranged relative to the first part to be axially offset by a certain distance relative to the rotation axis.

[0020] According to the present invention, the coupling device has a first solid body joint and a second solid body joint. The first solid body joint consists of a first elongated solid body that extends perpendicular to the first direction along a first plane parallel to the first direction and has a longitudinal axis arranged perpendicular to the first direction. Among them, the first elongated solid body has the following longitudinal portions that are arranged one after another in the direction of the longitudinal axis of the first elongated solid body: A first end section that forms the first end of the first elongated solid body; A second end section that forms the second end of the first elongated solid body, and this second end is oppositely positioned relative to the first end of the first elongated solid body in the direction of the longitudinal axis of the first elongated solid body; An intermediate section that is located between the first end section and the second end section of the first elongated solid body; A first abdominal portion that is located between the first end section and the intermediate section of the first elongated solid body and is connected to the first end section and the intermediate section; A second abdominal portion that is located between the second end section and the intermediate section of the first elongated solid body and is connected to the second end section and the intermediate section of the first elongated solid body.

[0021] The second solid body joint consists of a second elongated solid body that extends perpendicular to the first direction along a second plane parallel to the first direction and has a longitudinal axis arranged perpendicular to the first direction. Among them, the second elongated solid body has the following longitudinal portions that are arranged one after another in the direction of the longitudinal axis of the second elongated solid body: A first end section that forms the first end of the second elongated solid body; A second end section that forms the second end of the second elongated solid body, and the second end is oppositely positioned relative to the first end of the second elongated solid body in the direction of the longitudinal axis of the second elongated solid body; An intermediate section that is located between the first end section and the second end section of the second elongated solid body; A first abdominal portion that is located between the first end section and the intermediate section of the second elongated solid body and is connected to the first end section and the intermediate section; A second abdominal portion that is located between the second end section and the intermediate section of the second elongated solid body and is connected to the second end section and the intermediate section of the first elongated solid body.

[0022] The first part is thus connected to the second part via the first solid body joint and the second solid body joint such that a first end section of the first elongated solid body and a second end section of the first elongated solid body are rigidly connected to the first part, and an intermediate section of the first elongated solid body is rigidly connected to the second part, and such that a first end section of the second elongated solid body and a second end section of the second elongated solid body are rigidly connected to the second part, and an intermediate section of the second elongated solid body is rigidly connected to the first part, wherein the first plane and the second plane are inclined relative to each other such that the first plane and the second plane form a common intersection line extending parallel to the first direction.

[0023] A first abdominal part and a second abdominal part of the first elongated solid body of the first solid body joint respectively have an extension length perpendicular to the first plane, which extension length is less than the extension length perpendicular to the first plane of the first end section of the first elongated solid body and less than the extension length perpendicular to the first plane of the second end section of the first elongated solid body and the extension length perpendicular to the first plane of the intermediate section of the first elongated solid body, such that the first abdominal part and the second abdominal part of the first elongated solid body are elastically deformable, and the intermediate section of the first solid body joint is movable relative to the first end section of the first solid body joint and the second end section of the first solid body joint.

[0024] A first abdominal part and a second abdominal part of the second elongated solid body of the second solid body joint respectively have an extension length perpendicular to the second plane, which extension length is less than the extension length perpendicular to the second plane of the first end section of the second elongated solid body and less than the extension length perpendicular to the second plane of the second end section of the second elongated solid body and the extension length perpendicular to the second plane of the intermediate section of the second elongated solid body, such that the first abdominal part and the second abdominal part of the second elongated solid body are elastically deformable, and the intermediate section of the second solid body joint is movable relative to the first end section of the second solid body joint and the second end section of the second solid body joint.

[0025] The first part and the second part are thus connected via the first solid body joint and the second solid body joint such that the second part is rotatably mounted on the first part via the first solid body joint and the second solid body joint about the common intersection line of the first plane and the second plane.

[0026] The use of the solid body joint provides a frictionless and backlash-free relative movement between the first part and the second part of the rotary joint device, and provides a simple option for changing the arrangement of the first part relative to the second part in a precisely controllable and reproducible manner.

[0027] For simplicity, the first solid body joint and the second solid body joint can be formed identically, in particular with respect to the shape of the solid body joint and with respect to the material (e.g., steel) for manufacturing the solid body joint.

[0028] The coupling device comprising the first solid body joint and the second solid body joint ensures the connection between the first part and the second part such that the common intersection line of the first plane and the second plane forms a virtual axis of rotation about which the first part can rotate relative to the second part. Thus, the spatial position of the axis of rotation relative to the first part or the second part is mainly determined by the spatial positions of the first plane and the second plane.

[0029] Therefore, the rotary joint device provides the option of appropriately selecting the spatial position of the axis of rotation relative to the first part and the second part as required: the required spatial position of the axis of rotation relative to the first part and the second part is selected according to the specific application of the rotary joint device; the spatial positions of the first solid body joint and the second solid body joint relative to each other and relative to the first part and the second part can be selected to achieve the spatial position of the axis of rotation.

[0030] Since the second part is arranged relative to the first part with an axial offset from the axis of rotation by a certain distance, the first part and the second part are arranged one after another in a row relative to the axis of rotation. In this way, the rotary joint device ensures a space-saving arrangement in which the first part and the second part are radially spatially extended relative to the rotary joint device with respect to the axis of rotation.

[0031] The first solid body joint and the second solid body joint of the coupling device are connected to the first part and the second part such that the two end segments (or the first end segment and the second end segment respectively) of the first solid body joint and the two end segments (or the first end segment and the second end segment respectively) of the second solid body joint are rigidly connected to the second part of the rotary joint device, while the intermediate segment of the first solid body joint and the intermediate segment of the second solid body joint are rigidly connected to the first part of the rotary joint device. This configuration of the coupling device has the effect that, in response to the movement of the first part relative to the second part, the intermediate segment of the first solid body joint inevitably moves relative to the two end segments of the first solid body joint that are rigidly connected to the second part, and the intermediate segment of the second solid body joint also inevitably moves relative to the two end segments of the second solid body joint that are rigidly connected to the second part. The above-mentioned movement of the intermediate segment of the first solid body joint relative to the two end segments of the first solid body joint that are rigidly connected to the second part requires that the first abdominal part and the second abdominal part of the first solid body joint can undergo elastic deformation during the movement of the intermediate segment of the first solid body joint. Therefore, the above-mentioned movement of the intermediate segment of the second solid body joint relative to the two end segments of the second solid body joint that are rigidly connected to the first part requires that the first abdominal part and the second abdominal part of the second solid body joint can undergo elastic deformation during the movement of the intermediate segment of the second solid body joint. The first solid body joint of the coupling device is connected to the first part and the second part of the rotary joint device such that the first solid body joint forms a connection between the first part and the second part that has a relatively low stiffness for rotation of the first part relative to the second part about a first direction and for translation of the first part relative to the second part in a direction perpendicular to the first plane (compared to the stiffness of such a connection between the first part and the second part for translation of the first part relative to the second part in a direction parallel to the first plane).

[0032] Accordingly, the second solid body joint of the coupling device is connected to the first part and the second part of the rotary joint device such that the second solid body joint forms a connection between the first part and the second part that has a relatively low stiffness for rotation of the first part relative to the second part about a first direction and for translation of the first part relative to the second part in a direction perpendicular to the second plane (compared to the stiffness of such a connection between the first part and the second part for translation of the first part relative to the second part in a direction parallel to the second plane). The arrangement in which the first solid body joint and the second solid body joint are joined to each other ensures that the first part is rotatably arranged on the second part such that the arrangement in which the first solid body joint and the second solid body joint are joined to each other has a minimum possible rotational stiffness with respect to the rotation of the first part relative to the second part about the common intersection line of the first plane and the second plane (which extends in the first direction).

[0033] The coupling system formed by the first part, the second part, the first solid body joint, and the second solid body joint has corresponding stiffnesses for the rotation of the first part relative to the second part about the first direction, for the translation of the first part relative to the second part along an axis extending perpendicular to the first direction, or for the rotation of the first part relative to the second part about an axis extending perpendicular to the first direction, depending on the arrangement of the first solid body joint and the second solid body joint relative to each other, and in particular depending on the magnitude of the inclination of the first plane relative to the second plane. Therefore, the inclination of the first plane relative to the second plane can be appropriately selected so as to appropriately select the corresponding stiffness as required.

[0034] The first solid body joint and the second solid body joint can be formed such that the spatial extent of the first solid body joint and the spatial extent of the second solid body joint are relatively small compared to the spatial extent of the first part and the second part of the rotary joint device. Therefore, the first solid body joint and the second solid body joint can be arranged such that the space required for the arrangement of the first solid body joint and the second solid body joint is relatively small, and thus a compact connection between the first part and the second part of the rotary joint device is achieved.

[0035] The arrangement in which the first solid body joint and the second solid body joint are joined to each other has the advantage that the rotational stiffness with respect to the rotation of the first part relative to the second part about the first direction is as small as possible, in that the first part and the second part together form a system which is coupled by the first solid body joint and the second solid body joint, and that the system has a low natural frequency (for example, in the range of less than 30 Hz) with respect to the rotation of the first part relative to the second part about the first direction. In this case, the low natural frequency is advantageous for the dynamic behavior of the rotary joint device in response to an accelerating movement of the rotary joint device in a second and / or third direction perpendicular to the first direction, for example, for the control of a drive for moving the rotary joint device in a second and / or third direction perpendicular to the first direction. This advantage is relevant, for example, to an application in which a part of the rotary joint device (i.e., the first part or the second part of the rotary joint device) is guided by a linear guide such that this part can move linearly in a second direction perpendicular to the first direction, and the corresponding other part (i.e., the second part or the first part of the rotary joint device) is connected by a plurality of drives for moving the corresponding other part in the second direction. In this case, it is advantageous that the arrangement of the first solid body joint and the second solid body joint has as small a rotational stiffness as possible, since in this case the plurality of drives do not have to drive the corresponding other part completely synchronously, but can be controlled independently of each other within certain tolerances.

[0036] Regarding the dynamic characteristics of the swivel joint device in response to the accelerated movement of the swivel joint device in the second and / or third directions perpendicular to the first direction, it is advantageous that the first part and the second part together form a system that is coupled by means of the first solid body joint and the second solid body joint, and in response to the accelerated movement of the first part and the second part in the second and / or third directions perpendicular to the first direction, has a relatively high stiffness both for the translation of the first part relative to the second part in the first direction and / or the second direction and / or the third direction, and for the rotation of the first part relative to the second part about the second direction and / or the third direction perpendicular to the first direction. For the translation of the first part relative to the second part in the first direction and / or the second direction and / or the third direction, and for the rotation of the first part relative to the second part about the second and / or third directions perpendicular to the first direction, the coupling system formed by the first part, the second part, the first solid body joint and the second solid body joint has a relatively high stiffness, so that the driving force for moving the swivel joint device about the second and / or third directions perpendicular to the first direction can be adjusted more quickly in response to the accelerated movement of the first part and / or the second part in the first direction and in response to the accelerated movement of the movable member in the second and / or third directions perpendicular to the first direction, the vibration characteristics of the first part or the second part can be improved, and the positioning of the swivel joint device with higher precision can be achieved by the actuator.

[0037] In an embodiment of the swivel joint device, the first solid body joint or the second solid body joint is respectively formed such that, in the undeformed state of the first solid body joint, the first solid body joint is formed symmetrically with respect to the first plane, and / or, in the undeformed state of the second solid body joint, the second solid body joint is formed symmetrically with respect to the second plane.

[0038] The symmetrical configuration of the first solid body joint or the second solid body joint respectively provides relatively simple manufacturing and a compact arrangement of the corresponding solid body joint, and has a relatively small space requirement. Thus, the arrangement of the first solid body joint and the second solid body joint has the following technical effect: the second part is held in a position stationary relative to the first part by the first solid body joint and the second solid body joint, such that the second part can be moved out of this stationary position by rotation of the second part relative to the first part about the common intersection line of the first plane and the second plane. Therefore, when the first solid body joint and the second solid body joint are respectively in an undeformed state, the second part is in the stationary position, so that each intermediate section of these solid body joints is respectively held in a stable position relative to the first end section and the second end section of the first solid body joint or the second solid body joint. If the second part is moved out of the stationary position by its rotation relative to the first part, the abdominal portions of the first solid body joint and the second solid body joint are elastically deformed, so that the first solid body joint and the second solid body joint together generate a restoring force acting on the second part, and this restoring force counteracts the movement of the second part out of the stationary position.

[0039] Another embodiment of the rotary joint device is formed such that, in a first direction, a first end segment of a first elongated solid body of the first solid body joint has an extended length that is greater than an extended length of the first end segment of the first elongated solid body perpendicular to a first plane; and / or, in the first direction, a second end of the first elongated solid body of the first solid body joint has an extended length that is greater than an extended length of the second end segment of the first elongated solid body perpendicular to the first plane; and / or, in the first direction, an intermediate segment of the first elongated solid body of the first solid body joint has an extended length that is greater than an extended length of the intermediate segment of the first elongated solid body perpendicular to the first plane; and / or, in the first direction, a first abdominal portion of the first elongated solid body of the first solid body joint has an extended length that is greater than an extended length of the first abdominal portion of the first elongated solid body perpendicular to the first plane; and / or, in the first direction, a second abdominal portion of the first elongated solid body of the first solid body joint has an extended length that is greater than an extended length of the second abdominal portion of the first elongated solid body perpendicular to the first plane; and / or, in the first direction, a first end segment of a second elongated solid body of the second solid body joint has an extended length that is greater than an extended length of the first end segment of the second elongated solid body perpendicular to a second plane; and / or, in the first direction, a second end of the second elongated solid body of the second solid body joint has an extended length that is greater than an extended length of the second end segment of the second elongated solid body perpendicular to the second plane; and / or, in the first direction, an intermediate segment of the second elongated solid body of the second solid body joint has an extended length that is greater than an extended length of the intermediate segment of the second elongated solid body perpendicular to the second plane; and / or, in the first direction, a first abdominal portion of the second elongated solid body of the second solid body joint has an extended length that is greater than an extended length of the first abdominal portion of the second elongated solid body perpendicular to the second plane; and / or, in the first direction, a second abdominal portion of the second elongated solid body of the second solid body joint has an extended length that is greater than an extended length of the second abdominal portion of the second elongated solid body perpendicular to the second plane.

[0040] Due to the above structure of the first solid body joint or the second solid body joint, the coupling device forms a connection between a first part and a second part of the rotary joint device, which has a relatively high stiffness for translation of the first part relative to the second part in a first direction (along the axis of rotation of the rotary joint device) and for rotation of the first part relative to the second part about an axis oriented perpendicular to the first direction.

[0041] Another embodiment of the rotary joint device is characterized in that the first solid body joint in a non-deformed state and the second solid body joint in a non-deformed state are arranged relative to each other such that the first solid body joint and the second solid body joint are symmetrically arranged about a third plane extending parallel to the first direction, wherein the common intersection line of the first plane and the second plane extends in this third plane.

[0042] In this arrangement of the first solid body joint and the second solid body joint, the first part and the second part form a system that is coupled by means of the coupling device and has particularly high stiffness against translation of the first part relative to the second part along an axis extending parallel to the third plane and perpendicular to the first direction.

[0043] Furthermore, in response to translation of the first part relative to the second part along an axis extending parallel to the third plane and perpendicular to the first direction, the first solid body joint and the second solid body joint are respectively subjected to mechanical stresses and thus deformed in the same way. This prevents the coupling device from causing rotation of the first part relative to the second part about the first direction in response to mechanical stresses, which also cause translation of the first part relative to the second part parallel to the third surface and perpendicular to the first direction, and thus provides, for example, stabilization of the spatial position of the first part relative to the second part in response to dynamic stresses on the rotary joint device, which dynamic stresses cause translation of the first part relative to the second part of the above type.

[0044] One embodiment of the rotary joint device is also formed such that the first solid body joint is arranged relative to the second solid body joint such that there is a distance perpendicular to the first direction between the first solid body joint and the second solid body joint. This distance can be appropriately selected so that, for example, the first solid body joint and the second solid body joint can be connected to the first part and the second part of the rotary joint device in a simple manner (e.g., respectively according to the corresponding shapes of the first part or the second part), and the spatial position of the rotation axis of the rotary joint device relative to the first part and the second part can be additionally defined as required.

[0045] One embodiment of the rotary joint device is formed such that the second part has a first elongated hollow space that extends along the first plane in a first direction, and the first solid body joint is disposed in the first elongated hollow space such that, in the first direction, the first solid body joint extends through the first elongated hollow space at least over a part of its extension in the first direction. The second part may correspondingly have a second elongated hollow space that extends along the second plane in the first direction, wherein the second solid body joint is disposed in the second elongated hollow space such that, in the first direction, the second solid body joint extends through the second elongated hollow space at least over a part of its extension in the first direction.

[0046] This design of the second part provides the possibility of integrating the first solid body joint and / or the second solid body joint into the second part, such that the first solid body joint and / or the second solid body joint do not protrude from the respective hollow space or at most protrude a relatively small distance in the first direction. The first part and the second part can be connected to each other in this way by the first solid body joint and / or the second solid body joint, such that the rotary joint device as a whole has a relatively small installation height in the direction of the axis of rotation.

[0047] In a further refinement of the above embodiment, it can also be provided that the first elongated hollow extends along the first plane such that the longitudinal axis of the first elongated hollow space is parallel to the first plane and perpendicular to the first direction, and the first elongated hollow space is laterally bounded with respect to the first plane by two side walls of the second part, wherein the two side walls of the second part are positioned opposite each other and extend parallel to the first plane in the first direction and have a certain distance from each other in a direction perpendicular to the first plane. Accordingly, the second elongated hollow space can be provided to extend along the second plane such that the longitudinal axis of the second elongated hollow space is parallel to the second plane and perpendicular to the first direction, and the second elongated hollow space is laterally bounded with respect to the second plane by the two side walls of the second part, wherein the two side walls of the second part are positioned opposite each other and extend parallel to the second plane in the first direction (Z) and have a certain distance from each other in a direction perpendicular to the second plane. The first hollow space and the second hollow space can be manufactured in a simple manner respectively, and the first solid body joint or the second solid body joint can be conveniently and compactly integrated into the second part respectively.

[0048] In another improvement of the above-described embodiment, it may be provided that two side walls that are positioned opposite each other and laterally limit the second part of the first elongated hollow space with respect to the first plane are formed such that they enclose the first end segment and the second end segment of the first solid body joint, so that the first end segment and the second end segment of the first solid body joint are connected to the second part in a positive manner.

[0049] The above shape of the side walls of the first elongated hollow space enables a rigid connection between the first end segment of the first solid body joint and the second part and a rigid connection between the second end segment of the first solid body joint and the second part to be achieved in a simple manner. The side walls of the first elongated hollow space may be formed such that, for example, the first end segment of the first solid body joint and the second end segment of the first solid body joint are held between the side walls of the first elongated hollow space in a positive manner along the direction of the axis of rotation of the rotary joint device over the entire length of the extension length of the first end segment or the second end segment. In this way, the first end segment and the second end segment of the first solid body joint can be firmly connected to the second part, so that the first end segment and the second end segment of the first solid body joint do not deform in response to the movement of the first part relative to the second part.

[0050] Two side walls that are positioned opposite each other and laterally limit the second part of the second elongated hollow space with respect to the second plane are formed such that they enclose the first end segment and the second end segment of the second solid body joint, so that the first end segment and the second end segment of the second solid body joint are connected to the second part in a positive manner.

[0051] The above shape of the side walls of the second elongated hollow space enables a rigid connection between the first end segment of the second solid body joint and the second part and a rigid connection between the second end segment of the second solid body joint and the second part to be achieved in a simple manner. The side walls of the second elongated hollow space may be formed such that, for example, the first end segment of the second solid body joint and the second end segment of the second solid body joint are held between the side walls of the second elongated hollow space in a positive manner along the direction of the axis of rotation of the rotary joint device over the entire length of the extension length of the first end segment or the second end segment. In this way, the first end segment and the second end segment of the second solid body joint can be firmly connected to the second part, so that the first end segment and the second end segment of the second solid body joint do not deform due to the movement of the first part relative to the second part.

[0052] The rotary joint device may include one or more stop members that serve as mechanical stops to limit the rotation of the second part relative to the first part about the axis of rotation. For this purpose, the second part may have, for example, at least one stop member that is arranged such that when the second part is in a stationary position relative to the first part, the stop member is at a distance from the intermediate section of the first solid body joint, and the stop member can be brought into contact with the intermediate section of the first solid body joint by rotating the second part by a specified maximum angle of rotation about the common intersection line of the first plane and the second plane, so that the intermediate section of the first solid body joint forms a mechanical stop for the second part that can limit the rotation of the second part. Additionally or alternatively, the carrier may have at least one stop member that is arranged such that when the second part is in a stationary position relative to the first part, the stop member is at a distance from the intermediate section of the second solid body joint, and the stop member can be brought into contact with the intermediate section of the second solid body joint by rotating the second part by a specified maximum angle of rotation about the common intersection line of the first plane and the second plane, so that the intermediate section of the second solid body joint forms a mechanical stop for the second part that limits the rotation of the second part. In this way, mechanical overload of the first solid body joint and the second solid body joint can be avoided.

[0053] In a further refinement of the above-described embodiment, it is also possible to provide that two side walls of the second part that are positioned relative to each other and laterally limit the first elongated hollow space relative to the first plane are formed such that they enclose the intermediate section of the first solid body joint, where, perpendicular to the first plane, the two side walls of the second part that are positioned relative to each other and laterally limit the first elongated hollow space relative to the first plane have a distance perpendicular to the first plane that is greater than the extension of the intermediate section of the first solid body joint perpendicular to the first plane, so that the intermediate section of the first solid body joint can move relative to the second part.

[0054] The above shape of the side wall of the first elongated hollow space enables the first and second parts of the rotary joint device to rotate relative to each other about the axis of rotation, provided that, in response to the rotation of the first part relative to the second part, the intermediate section of the first solid body joint does not abut against one of the two side walls of the second part, wherein the two side walls of the second part are positioned opposite to each other and laterally limit the first elongated hollow space relative to the first plane. Each of the two side walls of the second part that are positioned opposite to each other and laterally limit the first elongated hollow space relative to the first plane thus forms a mechanical stop for the intermediate section of the first solid body joint and thus limits the rotation angle by which the first part can rotate relative to the second part about the axis of rotation of the rotary joint device. Additionally or alternatively, it may also be provided that the two side walls of the second part that are positioned opposite to each other and laterally limit the second elongated hollow space relative to the second plane are formed such that they enclose the intermediate section of the second solid body joint, wherein, perpendicular to the second plane, the two side walls of the second part that are positioned opposite to each other and laterally limit the second elongated hollow space have a distance perpendicular to the second plane, and this distance is greater than the extension section of the intermediate section of the second solid body joint perpendicular to the second plane, so that the intermediate section of the second solid body joint can move relative to the second part.

[0055] The above shape of the side wall of the first elongated hollow space or the second elongated hollow space respectively enables the first and second parts of the rotary joint device to rotate relative to each other about the axis of rotation, provided that, in response to the rotation of the first part relative to the second part, the intermediate section of the second solid body joint does not abut against one of the two side walls of the second part, wherein the two side walls are positioned opposite to each other and laterally define the second elongated hollow space relative to the second plane. Each of the two side walls of the second part that are positioned opposite to each other and laterally define the second elongated hollow space relative to the first plane thus forms a mechanical stop for the intermediate section of the second solid body joint and thus limits the rotation angle by which the first part can rotate relative to the second part about the axis of rotation of the rotary joint device.

[0056] One embodiment of the rotary joint device is also configured such that the intermediate section of the first solid body joint can move relative to the second part in a translational motion perpendicular to the first plane, and / or the intermediate section of the first solid body joint can move relative to the second part by rotation about a rotational axis extending in a first direction. Similarly, the intermediate section of the second solid body can move relative to the second part in a translational motion perpendicular to the second plane, and / or the intermediate section of the second solid body joint can move relative to the second part by rotation about a rotational axis extending in a first direction. Since the intermediate sections of the first solid body joint and the second solid body joint can move in the above-described manner, it is ensured that the first part can rotate relative to the second part of the rotary joint device about the rotational axis of the rotary joint device that extends in the first direction.

[0057] One embodiment of the rotary joint device is configured such that the first plane and the second plane are inclined relative to each other such that the first plane and the second plane intersect at an angle greater than or equal to 10° and less than or equal to 120° on a common intersection line.

[0058] For this embodiment, it is ensured that the coupling system formed by the first part, the second part, the first solid body joint, and the second solid body joint has a relatively small stiffness for the rotation of the first part relative to the second part about the first direction. Additionally, for the translation of the first part relative to the second part along an axis extending perpendicular to the first direction, or for the rotation of the first part relative to the second part about an axis extending perpendicular to the first direction, it has a relatively large stiffness, which is large enough for many applications.

[0059] Therefore, the coupling system formed by the first part, the second part, the first solid body joint, and the second solid body joint has a relatively low natural frequency with respect to the vibration of the coupling system about the rotation of the first part relative to the second part about the first direction, while having a relatively high natural frequency with respect to the vibration of the coupling system about the translation of the first part relative to the second part along an axis extending perpendicular to the first direction or the rotation of the first part relative to the second part about an axis extending perpendicular to the first direction. This is very advantageous for the transient response of the rotary joint device in dynamic applications, because in dynamic applications, the rotary joint device as a whole must move with a relatively large acceleration.

[0060] One embodiment can be configured such that the first plane and the second plane are inclined relative to each other such that the first plane and the second plane intersect at an angle greater than or equal to 30° and less than or equal to 90° on a common intersection line.

[0061] For this embodiment, it ensures that the coupling system formed by the first part, the second part, the first solid body joint and the second solid body joint has particularly high stiffness in terms of translation of the first part relative to the second part along an axis extending perpendicular to the first direction or rotation of the first part relative to the second part about an axis extending perpendicular to the first direction.

[0062] The rotary joint device of the present invention can advantageously be used as a component of a positioning device for positioning a movable member. For example, the rotary joint device can be used for the support structure of the movable member to be positioned.

[0063] A corresponding positioning device can, for example, have a rotary joint device as described in the present invention and a linear guiding device for guiding the second part of the rotary joint device, wherein the second part of the rotary joint device is guided by means of the linear guiding device such that the second part can linearly move in a second direction extending perpendicular to the first direction. Since the second part of the rotary joint device is guided by the linear guiding device, the rotary joint device can move as a whole to be guided in the second direction, wherein the structure of the rotary joint device is such that the first part can rotate relative to the second part about a rotational axis extending in the first direction.

[0064] Alternatively, the positioning device can have a rotary joint device as described in the present invention and a linear guiding device for guiding the first part of the rotary joint device, wherein the first part of the rotary joint device is guided by means of the linear guiding device such that the first part can linearly move in a second direction extending perpendicular to the first direction.

[0065] The linear guiding device can be realized by known techniques. For example, the second part can be guided by rolling elements on a guiding surface or a guide rail, or the second part can be guided on a guiding surface by means of a sliding bearing or an air bearing.

[0066] One embodiment of the positioning device is formed such that it is equipped with at least one linear drive which is connected to the first part of the rotary joint device for moving the first part in the second direction. A plurality of linear drives connected to the first part of the rotary joint device can also be provided for moving the first part, wherein the plurality of linear drives can be arranged in a spatial distribution and can be controlled independently of one another. For example, a linear motor is suitable as the linear drive of the positioning device. The positioning device can, for example, be formed such that each linear drive device is a linear motor. Linear drives of other designs are generally also applicable, for example, linear drives including a threaded shaft or a ball or roller screw drive.

[0067] Another improvement of the above-described embodiment of the positioning device includes a base having at least one flat guiding surface and / or a guiding beam having at least one flat guiding surface, wherein the second part is guided on the flat guiding surface of the base and / or the flat guiding surface of the guiding beam by at least one air bearing. The rotary joint device ensures that the second part and the at least one air bearing can rotate together relative to the first part about a rotation axis extending in a first direction. For example, the spatial position of the air bearing relative to the first part can be changed in order to compensate for the arrangement tolerances of the first part relative to the flat guiding surface or relative to the guiding beam respectively. Thereby, it can be avoided that the air bearing comes into contact with the flat guiding surface or with the guiding beam respectively due to the movement of the rotary joint device in a second direction, and thus being damaged.

[0068] Alternatively, an embodiment of the positioning device can be designed such that the first part is guided by a linear guiding device, and there is at least one linear drive connected to the second part of the rotary joint device for moving the second part in a second direction.

[0069] In a further improvement of this embodiment of the positioning device, the linear guiding device can include a base having at least one flat guiding surface and / or a guiding beam having at least one flat guiding surface, and the first part can be guided on the flat guiding surface of the base and / or on the flat guiding surface of the guiding beam by means of at least one air bearing. Description of the Drawings

[0070] The further details of the present invention will be described below with reference to the drawings, in particular, exemplary embodiments of the rotary joint device and the positioning device of the present invention, wherein: Figure 1 A perspective view of the rotary joint device of the present invention is shown, which includes a first part, a second part, and a coupling device for connecting the first part and the second part so that the second part can rotate relative to the first part about a rotation axis DZ. Wherein, in the exploded view, the coupling device includes an arrangement of two solid body joints, and the respective parts of the rotary joint device are separated from each other in the direction of the rotation axis DZ; Figure 2 Is shown in a side view Figure 1 The rotary joint device in, wherein the rotary joint device extends perpendicular to the rotation axis DZ; Figure 3 Is shown in a top view Figure 1 The rotary joint device DGA in, the rotary joint device DGA extends along the rotation axis DZ; Figure 4A shows a perspective view of one of the two solid body joints shown in Figure 1 ; a top view of the solid body joint in Figure 4B shows Figure 4A the direction of the axis of rotation DZ; a side view of the solid body joint in Figure 4C shows Figure 4B in a direction perpendicular to the symmetry plane ME1 or ME2 shown in Figure 4B respectively; a top view of the solid body joint in Figure 5A shows Figure 4A the direction of the axis of rotation DZ, where the solid body joint is in an undeformed state and shows two degrees of freedom of movement of the intermediate section of the solid body joint relative to the first and second end sections of the solid body joint; a top view of the solid body joint in Figure 5B shows Figure 5A the direction of the axis of rotation DZ, where the solid body joint is in a deformed state after the intermediate section of the solid body joint has moved relative to the first and second end sections of the solid body joint based on the first degree of freedom of movement; a top view of the solid body joint in Figure 5C shows Figure 5A the direction of the axis of rotation DZ, where the solid body joint is in a deformed state after the intermediate section of the solid body joint has moved relative to the first and second end sections of the solid body joint based on the second degree of freedom of movement; a perspective view of a conventional solid body joint in the prior art; a top view of the conventional solid body joint in an undeformed state in the direction of the axis Z; a top view of the conventional solid body joint in a deformed state in the direction of the axis Z; a top view of the second part of the rotary joint device in Figure 6A shows a perspective view of a conventional solid body joint in the prior art; Figure 6B shows Figure 6A the direction of the axis Z; Figure 6C shows Figure 6A the direction of the axis Z; Figure 7 shows Figure 1 a top view of the second part of the rotary joint device in the direction Z extending along the axis of rotation DZ; Figure 8 shows in an enlarged view Figure 1 a top view of the second part of the rotary joint device in the direction Z extending along the axis of rotation DZ; Figure 9 shows including Figure 1A positioning device for a rotary joint device and a linear guiding device for guiding a second part of the rotary joint device; and Figure 10 shows Figure 9 an exploded schematic view of the various parts of the positioning device shown. Detailed implementation mode

[0071] Unless otherwise mentioned, in each case, the same reference numerals are used to denote the same elements in the drawings.

[0072] Figures 1 - 3 The rotary joint device DGA of the present invention is shown from different perspectives. Among them, Figure 1 shows relative to Figure 1 a perspective view of the rotary joint device DGA with respect to a coordinate system having three axes X, Y, Z (X-axis, Y-axis, Z-axis) (which are orthogonal to each other); Figure 2 and Figure 3 the same rotary joint device DGA is shown from other perspectives, especially in a (side) view perpendicular to the Z-axis (in this example along the X-axis) and a top view along the Z-axis.

[0073] The rotary joint device DGA includes: a first part 15, a second part 70, and a coupling device KE. Among them, the coupling device KE is used to connect the first part 15 and the second part 70 so that the second part 70 can rotate relative to the first part about a rotation axis DZ extending in a first direction Z. The structure and function of the coupling device will be described in more detail below.

[0074] In this embodiment, both the first part 15 and the second part 70 have a cuboid shape. Alternatively, the first part 15 and the second part 70 can generally be parts having any shape respectively.

[0075] The first part 15 and the second part 70 respectively have extensions perpendicular to the rotation axis DZ, and among them, the second part 70 is arranged relative to the first part 15 to be axially offset by a certain distance with respect to the rotation axis DZ.

[0076] In this embodiment, the coupling device KE has a first solid body joint 80A and a second solid body joint 80B.

[0077] Figure 1 An exploded view of the rotary joint device DGA is shown, where all details of the rotary joint device DGA, here namely, the first part 15, the second part 70, and the two solid body joints 80A and 80B of the coupling device KE are separated from each other in the Z-axis direction. In contrast, Figure 2The rotary joint device DGA in an assembled state is shown, in which the first part 15 and the second part 70 are connected to each other via two solid joints 80A and 80B of the coupling device KE, which will be described in more detail below.

[0078] As Figure 1 and Figure 3 shown, on the side of the second part 70 facing the first part 15, a first elongated hollow space 71A and a second elongated hollow space 71B are formed for receiving the first solid joint 80A and the second solid joint 80B, so that (in the assembled state of the rotary joint device DGA) at least a section of the first solid joint 80A extends in the first elongated hollow space 71A, and at least a section of the second solid joint 80B extends in the second elongated hollow space 71B.

[0079] From Figures 1 - 3 and Figure 4A it can be seen that the first solid joint 80A consists of a first elongated solid body that extends perpendicular to the first direction Z along a first plane ME1 parallel to the first direction Z and has a longitudinal axis arranged perpendicular to the first direction Z, wherein the first elongated solid body has the following longitudinal parts arranged one after another in the longitudinal axis direction of the first elongated solid body: A first end section E1, which forms the first end of the first elongated solid body; A second end section E2, which forms the second end of the first elongated solid body, and this second end is oppositely positioned to the first end of the first elongated solid body in the longitudinal axis direction of the first elongated solid body; An intermediate section F, which is arranged between the first end section and the second end section of the first elongated solid body; A first abdominal section S1, which is arranged between the first end section E1 and the intermediate section F of the first elongated solid body and is connected to the first end section E1 and the intermediate section F; A second abdominal section S2, which is arranged between the second end section E2 and the intermediate section F and is connected to the second end section E2 and the intermediate section F of the first elongated solid body.

[0080] Therefore, the second solid joint 80B includes a second elongated solid body that extends perpendicular to the first direction Z along a second plane ME2 parallel to the first direction Z and has a longitudinal axis arranged perpendicular to the first direction Z, wherein the second elongated solid body has the following longitudinal parts ( Figures 1 - 3 and Figure 4A ) arranged one after another in the longitudinal axis direction of the second elongated solid body: A first end portion segment E1, which forms the first end of the second elongated solid body; A second end portion segment E2, which forms the second end of the second elongated solid body, and this second end is oppositely positioned to the first end of the second elongated solid body in the direction of the longitudinal axis of the second elongated solid body; An intermediate segment F, which is arranged between the first end portion segment and the second end portion segment of the second elongated solid body; A first abdominal segment S1, which is arranged between the first end portion segment E1 of the second elongated solid body and the intermediate segment F, and is connected to the first end portion segment E1 and the intermediate segment F; A second abdominal segment S2, which is arranged between the second end portion segment E2 of the second elongated solid body and the intermediate segment F, and is connected to the second end portion segment E2 of the first elongated solid body and the intermediate segment F.

[0081] The first part 70 is connected to the second part 15 via a first solid body joint 80A and a second solid body joint 80B, such that the first end portion segment E1 of the first elongated solid body and the second end portion segment E2 of the first elongated solid body are rigidly connected to the second part 70, and, the intermediate segment F of the first elongated solid body is rigidly connected to the first part 15, and, the first end portion segment E1 of the second elongated solid body and the second end portion segment E2 of the second elongated solid body are rigidly connected to the second part 70, and, the intermediate segment F of the second elongated solid body is rigidly connected to the first part 15.

[0082] The first plane ME1 and the second plane ME2 are inclined relative to each other, such that the first plane ME1 and the second plane ME2 form a common intersection line DZ extending parallel to the first direction (Z) ( Figure 1 、 Figure 3 ).

[0083] Both the first abdominal part S1 and the second abdominal part S2 of the first elongated solid body of the first solid body joint 80A have an extension length perpendicular to the first plane ME1, and this extension length is less than the extension length of the first end portion segment E1 of the first elongated solid body perpendicular to the first plane ME1, the extension length of the second end portion segment E2 of the first elongated solid body perpendicular to the first plane ME1, and the extension length of the intermediate segment F of the first elongated solid body perpendicular to the first plane ME1, so that the first abdominal part S1 and the second abdominal part S2 of the first elongated solid body can be elastically deformed, and, the intermediate segment F of the first solid body joint 80A can move relative to the first end portion segment E1 of the first solid body joint 80A and the second end portion segment E2 of the first solid body joint 80A.

[0084] The first abdominal portion S and the second abdominal portion S2 of the second slender solid body of the second solid body joint 80B both have an extension length perpendicular to the second plane ME2, which is smaller than the extension length of the first end segment E1 of the second slender solid body perpendicular to the second plane ME2, the extension length of the second end segment E2 of the second slender solid body perpendicular to the second plane ME2, and the extension length of the middle segment F of the second slender solid body perpendicular to the second plane ME2, so that the first abdominal portion S1 and the second abdominal portion S2 of the second slender solid body can be elastically deformed, and the middle segment F of the second solid body joint 80B can move relative to the first end segment E1 of the second solid body joint 80B and the second end segment E2 of the second solid body joint 80B.

[0085] The arrangement of the first 80A and second 80B solid body joints of the second 80B solid body joint thus has the effect that the second part 70 is rotatably mounted on the first part 15 about a common intersection line DZ of the first and second planes ME1 and ME2 via the first 80A and second 80B solid body joints.

[0086] In this embodiment, the rotary joint device DGA is formed such that the first solid body joint 80A is formed symmetrically with respect to the first plane ME1 in the undeformed state of the first solid body joint 80A, and the second solid body joint 80B is formed symmetrically with respect to the second plane ME2 in the undeformed state of the second solid body joint 80A ( Figure 1 , Figure 3 and Figure 4B ).

[0087] In this embodiment, the first solid body joint 80A and the second solid body joint 80B are identically formed.

[0088] In this embodiment, the rotary joint device (DGA) is also formed as ( Figure 1 , Figure 4A , Figure 4B , 4C ): In the first direction Z, the first end section E1 of the first elongated solid body of the first solid body joint 80A has an extension length h, which is greater than an extension length t_3 of the first end section E1 of the first elongated solid body perpendicular to the first plane ME1; In the first direction Z, the second end section E2 of the first elongated solid body of the first solid body joint 80A has an extension length h, which is greater than an extension length t_3 of the second end section E2 of the first elongated solid body perpendicular to the first plane ME1; In the first direction Z, the middle section F of the first elongated solid of the first solid joint 80A has an extended length hF, and this extended length hF is greater than the extended length t_4 of the middle section F of the first elongated solid perpendicular to the first plane ME1; In the first direction Z, the first abdominal portion S1 of the first elongated solid of the first solid joint 80A has an extended length h, and this extended length h is greater than the extended length t_2 of the first abdominal portion S1 of the first elongated solid perpendicular to the first plane ME1; In the first direction Z, the second abdominal portion S2 of the first elongated solid of the first solid joint 80A has an extended length h, and this extended length h is greater than the extended length of the second abdominal portion S2 of the first elongated solid perpendicular to the first plane ME1; In the first direction Z, the first end section E1 of the second elongated solid of the second solid joint 80B has an extended length h, and this extended length h is greater than the extended length t_3 of the first end section E1 of the second elongated solid perpendicular to the second plane ME2; In the first direction Z, the second end section E2 of the second elongated solid of the second solid joint 80B has an extended length h, and this extended length h is greater than the extended length t_3 of the second end section E2 of the second elongated solid perpendicular to the second plane ME2; In the first direction Z, the middle section F of the second elongated solid of the second solid joint 80B has an extended length hF, and this extended length hF is greater than the extended length t_4 of the middle section F of the second elongated solid perpendicular to the second plane ME2; In the first direction Z, the first abdominal portion S1 of the second elongated solid of the second solid joint 80B has an extended length h, and this extended length h is greater than the extended length t_2 of the first abdominal portion S1 of the second elongated solid perpendicular to the second plane ME2; In the first direction Z, the second abdominal portion S2 of the second elongated solid of the second solid joint 80B has an extended length h, and this extended length h is greater than the extended length t_2 of the second abdominal portion S2 of the second elongated solid perpendicular to the second plane ME2.

[0089] As Figure 1 、 Figure 4A and Figure 4BAs shown, the first abdominal portion S1 of the first solid joint 80A or the first abdominal portion S1 of the second solid joint 80B does not have to be formed such that the extension length of the first abdominal portion S1 of the first solid joint 80A perpendicular to the first plane ME1 and the extension length of the first abdominal portion S1 of the second solid joint 80B perpendicular to the second plane ME2 are constant along the longitudinal axis of the first solid joint 80A or along the longitudinal axis of the second solid joint 80A, respectively, over the entire extension length 1_2 of the first abdominal portion S1 between the first end segment E1 and the intermediate segment F.

[0090] The second abdominal portion S2 of the first solid joint 80A or the second abdominal portion S2 of the second solid joint 80B does not have to be formed such that the extension length of the second abdominal portion S2 of the first solid joint 80A perpendicular to the first plane ME1 and the extension length of the second abdominal portion S2 of the second solid joint 80B perpendicular to the second plane ME2 are constant along the longitudinal axis of the first solid joint 80A or along the longitudinal axis of the second solid joint 80B, respectively, over the entire extension length 1_2 of the second abdominal portion S2 between the second end segment E2 and the intermediate segment F.

[0091] As Figure 4A and Figure 4B shown, the first abdominal portion S1 of the first solid joint 80A in this embodiment has a variable extension length perpendicular to the first plane ME1, and the first abdominal portion S1 of the second solid joint 80B has a variable extension length perpendicular to the second plane ME2.

[0092] In this embodiment, the first abdominal portion S1 of the first solid joint 80A or the first abdominal portion S1 of the second solid joint 80B respectively has three longitudinal portions arranged one in front of the other in the longitudinal axis direction of the solid joint: a first thin longitudinal segment G1 adjacent to the first end segment E1, a second thin longitudinal segment G2 adjacent to the intermediate segment F, and an intermediate longitudinal segment connecting the first thin longitudinal segment G1 and the second thin longitudinal segment G2.

[0093] Therefore, the first thin longitudinal segment G1 and the second thin longitudinal segment G2 respectively have an extension length l_1 along the longitudinal axis of the first solid joint 80A or along the longitudinal axis of the second solid joint 80B.

[0094] In this embodiment, the first thin longitudinal segment G1 and the second thin longitudinal segment G2 of the first solid joint 80A or the second solid joint 80B respectively have an extension length t_1 perpendicular to the first plane ME1 or perpendicular to the second plane ME2, and this extension length t_1 is less than the extension length t_2 of the intermediate longitudinal segment connecting the first thin longitudinal segment G1 and the second thin longitudinal segment G2 perpendicular to the first plane ME1 or perpendicular to the second plane ME2.

[0095] In this embodiment, the second abdominal part S2 of the first solid joint 80A or the second abdominal part S2 of the second solid joint 80B correspondingly has three longitudinal segments arranged in sequence in the longitudinal direction of the solid joint: a fourth thin longitudinal segment G4 adjacent to the second end segment E2, a third thin longitudinal segment G3 adjacent to the intermediate segment F, and an intermediate longitudinal segment connecting the third thin longitudinal segment G3 and the fourth thin longitudinal segment G4.

[0096] Therefore, the third thin longitudinal segment G3 and the fourth thin longitudinal segment G4 respectively have an extension length l_1 along the longitudinal axis of the first solid joint 80A or along the longitudinal axis of the second solid joint 80B.

[0097] In this embodiment, the third thin longitudinal segment G3 and the fourth thin longitudinal segment G4 of the first solid joint 80A or the second solid joint 80B respectively have an extension length t_1 perpendicular to the first plane ME1 or perpendicular to the second plane ME2, and this extension length t_1 is less than the extension length t_2 of the intermediate longitudinal segment connecting the third thin longitudinal segment G3 and the fourth thin longitudinal segment G4 perpendicular to the first plane ME1 or perpendicular to the second plane ME2.

[0098] From Figure 3 It can be seen that the rotary joint device DGA is formed in this example such that the first solid joint 80A in the undeformed state of the first solid joint 80A and the second solid joint 80B in the undeformed state of the second solid joint 80B are arranged relative to each other such that the first solid joint 80A and the second solid joint 80B are symmetrically arranged about a third plane E3 extending parallel to the first direction Z, wherein the common intersection line DZ of the first plane ME1 and the second plane ME2 extends in this third plane E3. Thus, in response to the translation of the first part 15 relative to the second part 70 along an axis extending parallel to the third plane E3 and perpendicular to the first direction Z, the first solid joint 80A and the second solid joint 80B are each mechanically stressed and deformed in the same manner.

[0099] In this embodiment, the rotary joint device DGA is formed such that the first solid body joint 80A is arranged relative to the second solid body joint 80B: perpendicular to the first direction Z, with the first solid body joint 80A spaced apart from the second solid body joint 80B by a certain distance ( Figure 3 ). As can be seen from Figure 3 , the first solid body joint 80A and the second solid body joint 80B are symmetrically arranged relative to the third plane E3, and thus are offset from each other by a certain distance in the direction of the X-axis perpendicular to the third plane E3. The effect of this arrangement of the first solid body joint 80A and the second solid body joint 80B is that the rotary joint device DGA has a relatively large stiffness for the rotation of the second part 70 relative to the first part 15 about the Y-axis, where the greater this stiffness, the greater the distance between the first solid body joint 80A and the second solid body joint 80B in the X-axis direction.

[0100] As can be seen from Figure 1 and Figure 3 , the rotary joint device DGA can be formed such that the second part 70 has a first elongated hollow space 71 that extends along a first plane ME1 in the first direction Z, where the first solid joint 80A is arranged in the first elongated hollow space 71A such that in the first direction Z, at least a part of the extension length of the first solid body joint 80A extends through the first elongated hollow space 71A in the first direction Z.

[0101] Therefore, the second part 70 may have a second elongated space 71B that extends along a second plane ME2 in the first direction Z, where the second solid body joint 80B is arranged within the second elongated hollow space 71B such that in the first direction Z, at least a part of the extension length of the second solid body joint 80B extends through the second elongated hollow space in the first direction Z.

[0102] In this embodiment, the dimensions of the first elongated hollow space 71A are designed such that at least the first end segment E1 and the second end segment E2 of the first solid joint 80A extend through the first elongated hollow space 71A in the first direction Z over their entire extension length h. Correspondingly, the dimensions of the second elongated hollow space 71B are designed such that the first end segment E1 and the second end segment E2 of the second solid joint 80B extend through the second elongated hollow space 71B in the first direction Z over their entire extension length h. In this case, the first solid joint 80A is substantially completely embedded within the first elongated hollow space 71A, while the second solid joint 80B is completely embedded within the second elongated hollow space 71B, such that this embodiment of the rotary joint device DGA is formed to be particularly compact.

[0103] As Figure 2 , Figure 4A and Figure 4C shown, in this embodiment, the extension length hF of the respective intermediate segments F of the first solid joint 80A and the second solid joint 80B in the first direction is greater than the extension length h of the first end segment E1 and the second end segment E2.

[0104] In this case, the intermediate segments F of the first solid joint 80A and the second solid joint 80B can protrude a certain distance in the first direction Z from the side of the first elongated hollow space 71A or the second elongated hollow space 71B facing the first part 15. This facilitates fastening the intermediate segments F of the first solid joint 80A and the second solid joint 80B to the side of the first part 15 facing the second part 70 by fastening means, thereby rigidly connecting the respective intermediate segments F of the first solid joint 80A and the second solid joint 80B to the first part 15.

[0105] From Figure 3 , Figure 7 and Figure 8 it can be seen that the rotary joint device DGA is formed in this embodiment such that the first elongated hollow space 71A extends along a first plane ME1, such that the longitudinal axis of the first elongated hollow space 71A is arranged parallel to the first plane ME1 and parallel to the first direction Z, and the elongated hollow space 71A is laterally defined relative to the first plane ME1 by two side walls HSA1 or HSA2 of the second part 70, wherein the two side walls HSA1 and HSA2 of the second part 70 are positioned opposite each other and both extend parallel to the first plane ME1 in the first direction Z and have a certain distance from each other in a direction perpendicular to the first plane ME1.

[0106] Accordingly, the rotary joint device DGA is formed such that the second elongated hollow space 71B extends along a second plane ME2, so that the longitudinal axis of the second elongated hollow space 71B is parallel to the second plane ME2 and perpendicular to the first direction Z, and the second elongated hollow space 71B is laterally delimited with respect to the second plane ME2 by two side walls HSB1 or HSB2 of the second part 70, wherein the two side walls HSB1 and HSB2 of the second part 70 are positioned opposite to each other and both extend parallel to the second plane ME2 in the first direction Z and have a certain distance from each other in a direction perpendicular to the second plane ME2.

[0107] From Figure 3 , Figure 7 and Figure 8 it can be seen that the two side walls HSA1, HSA2 of the second part 70 which are positioned opposite to each other and laterally delimit the first elongated hollow space 71A with respect to the first plane ME1 are formed in the present embodiment such that they surround the first end segment E1 and the second end segment E2 of the first solid body joint 80A, so that the first end segment E1 and the second end segment E2 of the first solid body joint 80A are connected to the second part 70 in an accurate manner. In this way, it is ensured that the first end segment E1 and the second end segment E2 of the first solid body joint 80A are rigidly held on the second part 70.

[0108] Accordingly, the two side walls HSB1, HSB2 of the second part 70 which are positioned opposite to each other and laterally delimit the second elongated hollow space 71B with respect to the second plane ME2 are formed in such a way that they surround the first end segment E1 and the second end segment E2 of the second solid body joint 80B, so that the first end segment E1 and the second end segment E2 of the second solid body joint 80B are connected to the second part 70 in an accurate manner. In this way, it is ensured that the first end segment E1 and the second end segment E2 of the second solid body joint 80B are rigidly held on the second part 70.

[0109] The first end segments E1 and the second end segments E2 of the first solid body joint 80A and the second solid body joint 80B can be fastened to the second part 70 (by conventional fastening means suitable for this type of connection, for example by screws and / or by adhesion).

[0110] From Figure 3 , Figure 7 and Figure 8As can be seen, two side walls HSA1, HSA2 that are positioned relative to each other and laterally define the first elongated hollow space 71A relative to the first plane ME1 are formed in this embodiment such that they enclose the intermediate section F of the first solid body joint 80A, wherein the two side walls HSA1, HSA2 of the second part 70 have a distance perpendicular to the first plane ME1 that is greater than the extension length t_4 of the intermediate section F of the first solid body joint 80A perpendicular to the first plane ME1. Thereby ensuring that when the first part 15 moves relative to the second part 70, the intermediate section F of the first solid body joint 80A can move relative to the second part 70.

[0111] Therefore, two side walls HSB1, HSB2 that are positioned relative to each other and laterally define the second elongated hollow space 71B relative to the second plane ME2 are formed such that they enclose the intermediate section F of the second solid body joint 80B, wherein the two side walls HSB1, HSB2 of the second part 70 have a distance perpendicular to the second plane ME2 that is greater than the extension length t_4 of the intermediate section F of the second solid body joint 80B perpendicular to the second plane ME2. Thereby ensuring that when the first part 15 moves relative to the second part 70, the intermediate section F of the second solid body joint 80B can move relative to the second part 70.

[0112] As Figure 3 , Figures 5A - 5C , Figure 7 and Figure 8 shown, the first solid body joint 80A and the second solid body joint 80B of the rotary joint device DGA are arranged in this embodiment such that: The intermediate section F of the first solid body joint 80A can move relative to the second part 70 in a translational motion perpendicular to the first plane ME1 ( Figure 5B ); The intermediate section F of the first solid body joint 80A can move relative to the second part 70 in a rotational motion about a rotation axis extending in the first direction Z ( Figure 5C ); The intermediate section F of the second solid body joint 80B can move relative to the second part 70 in a translational motion perpendicular to the second plane ME2 ( Figure 5B ); The intermediate section F of the second solid body joint 80B can move relative to the second part 70 in a rotational motion about a rotation axis extending in the first direction Z ( Figure 5C ).

[0113] The rotary joint device DGA is formed such that the first plane ME1 and the second plane ME2 are inclined relative to each other so that the first plane ME1 and the second plane ME2 intersect a common intersection line DZ at an angle α (hereinafter referred to as "device angle α") that is greater than or equal to 10° and less than or equal to 120°. The rotary joint device DGA can be specifically formed such that the first plane ME1 and the second plane ME2 are inclined relative to each other so that the first plane ME1 and the second plane ME2 intersect the common intersection line DZ at an angle that is greater than or equal to 30° and less than or equal to 90°.

[0114] The respective magnitude of the device angle α is related to the magnitude of the stiffness of the coupling system formed by the first part 15, the second part 70, the first solid joint 80A, and the second solid joint 80B, as well as the magnitude of the natural frequency.

[0115] One aspect of the invention relates to the design of the solid joint 80A or 80B, which is rigidly connected to the second part 70 on both sides at two end segments E1 and E2. The solid joint 80A or 80B has an intermediate segment F that is movable relative to the two end segments E1 and E2 and is rigidly connected to the first part 15 to couple the second part 70 of the rotary joint device DGA to the first part 15 of the rotary joint device DGA, wherein the first part 15 is arranged relative to the second part to be axially offset (stacked design) relative to the rotation axis DZ. By means of the design of the respective solid joints 80A, 80B, and the device angle α, the desired system natural frequency and static stiffness can be set. The two compact solid joints 80A, 80B, which are formed in the form of a coupling device KE, can save space in terms of functionality and can thus be better integrated into the rotary joint device DGA.

[0116] For the coupling device KE of the rotary joint device DGA, the elastically deformable abdominal portions S1 and S2 are responsible for translational and rotational degrees of freedom. Figures 4A - 4C and Figures 5A - 5C The two main degrees of freedom of the intermediate segment F of the solid joint 80A or 80B shown respectively in Figures 4A - 4C and Figures 5A - 5C are translational in the X direction and rotation about the Z axis with respect to a coordinate system having three axes X, Y, Z (X-axis, Y-axis, Z-axis) (which are orthogonal to each other). Thereby, the X-axis is respectively oriented perpendicular to the first plane ME1 (with respect to the first solid joint 80A) or perpendicular to the second plane ME2 (with respect to the second solid joint 80B).

[0117] The characteristics of these two main degrees of freedom are the corresponding low natural frequencies and static stiffnesses. The rotation (torsion) about the Y-axis is referred to as the third degree of freedom of the intermediate section F, which is significantly affected by the lengths and thicknesses of the abdominal sections S1 and S2. Since the two end sections E1 and E2 of the corresponding solid joints 80A or 80B are rigidly connected to the second part 70 on both sides respectively, the deflection of the intermediate section F is related to the deformations of the abdominal sections S1 and S2, which respectively correspond to a combination of tension and bending (for the translation of the intermediate section F in the X-axis direction and the rotation of the intermediate section F about an axis extending parallel to the Z-direction, as Figure 5A , Figure 5B and Figure 5C shown). This results in a significant increase in the stiffness of all six degrees of freedom compared to the conventional joint shown in Figures 6A - 6C .

[0118] Figures 6A - 6C shows a conventional solid joint having a fixed end F1 coupled to a first component A and a second flexible end F2 connected to a second component B, the second component B being connected to the fixed end F1 via an elastically deformable abdominal section S1. Under the action of the mechanical stress of the force K on the flexible end F2, the movement of the flexible end F2 relative to the fixed end F1 is generally such that the abdominal section S1 is deformed by bending but is not thereby subjected to tension. Therefore, this results in a lower stiffness of the conventional solid joint than the stiffness of the coupling device KE of the rotary joint device DGA of the present invention.

[0119] The above rigid connection of the two end sections E1 and E2 of the two solid joints 80A and 80B to the second part 70 and the arrangement of the two solid joints 80A and 80B relative to each other at the above device angle α provide a rigid connection between the end sections E1 and E2 of the two solid joints 80A and 80B, thereby forming a combined solid joint having a virtual rotation axis DZ. For each of the two solid joints 80A and 80B, the rotational degree of freedom about the virtual rotation axis DZ is formed by the combination of the two degrees of freedom of the translation of the intermediate section F in the X-direction as shown in Figure 5B and the rotation of the intermediate section F about an axis parallel to the Z-direction as shown in Figure 5C .

[0120] To achieve the highest possible stiffness of the rotary joint device DGA for the rotation of the first part 15 relative to the second part 70 about the Y-axis as shown in Figures 1 - 3 , the two solid joints 80A and 80B are placed at the greatest possible distance from each other (as shown in Figures 1 - 3is useful in the X direction). The stiffness of the first part 15 relative to the rotation of the second part 70 about the X axis can be influenced by the design of the two solid joints 80A, 80B and the device angle α. Due to the high stiffness of the two solid joints 80A, 80B, the combination of the two solid joints 80A and 80B arranged at the angle α and each firmly connected to the second part 70 at both ends rotates only relatively little about the Z axis. In order to prevent the solid joints 80A and 80B from being overloaded or for the movement of the intermediate section F, corresponding stoppers (corresponding to the side walls HSA1, HSA2, HSB1, HSB2) can be provided in the second part 70.

[0121] In this embodiment, the rotational stiffness between the second part 70 and the first part 15 about the first direction (Z axis) will be as low as possible, while the stiffness in the Y direction will be as high as possible. A device angle α of about 60° provides a good compromise for this application. The parallel alignment (α = 0°) of the two solid joints 80A, 80B results in a significant increase in the rotational stiffness between the second part 70 and the first part 15 about the Z axis, while the stiffness in the X direction is minimized. On the other hand, the arrangement with the device angle α = 180° results in hardening of the system in the X direction and a significant reduction in the stiffness in the Y direction as well as the stiffness for the rotation of the first part 15 relative to the second part 70 about the X axis and the Z axis.

[0122] For the stiffness and natural frequency of each of the solid joints 80A and 80B, the following applies Figures 4A - 4C and Figures 5A - 5C : Each of the solid joints 80A and 80B is substantially symmetric with respect to the two central planes XZ and YZ ( Figure 4B ), where the shapes of the end sections E1 and E2 and the intermediate section F can vary.

[0123] Each of the solid joints 80A and 80B has a low static stiffness and natural frequency for translation in the X direction and rotation about an axis extending parallel to the Z direction, while maintaining as high a stiffness and natural frequency as possible for translation in the X and Z directions and rotation about the X and Y directions.

[0124] The stiffness and natural frequency for translation in the X direction and rotation about an axis extending parallel to the Z direction are significantly affected by the abdominal part thickness t_1 and the distance l_2 between one of the two end sections E1 and E2 and the intermediate section F. The greater the distance l_2, the smaller the stiffness and natural frequency for translation in the X direction and rotation about an axis extending parallel to the Z direction. Therefore, l_2 is usually less than the height h. The smaller the abdominal thickness t_1, the smaller the stiffness and natural frequency in all axis directions.

[0125] The stiffness and natural frequency for rotation about the Y axis are affected by the abdominal thicknesses t_1 and t_2 and the distance l_2. Among them, the greater the abdominal thicknesses t_1 and t_2, the greater the stiffness and natural frequency for rotation about the Y axis. The smaller the distance l_2, the greater the stiffness and natural frequency for rotation about the Y axis.

[0126] By increasing the local thickness of the abdominal parts S1 and S2 to t_2, the stiffness and natural frequency for rotation about the Y axis increase by many times (> 3 times), and also, due to bulging or bending, the risk of instability in the Y direction is reduced. The stiffness (about +50%) and natural frequency (about +15%) in the remaining axial directions are also increased.

[0127] The stiffness and natural frequency for translation in the Z direction and rotation about an axis extending parallel to the X direction are affected by the abdominal thickness t_1 and the height h. The greater the height h, the higher the stiffness and natural frequency for translation in the Z direction and rotation about an axis extending parallel to the X direction. The abdominal thickness t_1, the abdominal thickness t_2, the thickness t_3, the height h, and the lengths l_1 and l_2 can be preferably as follows: The ratio of the abdominal thickness t_1 to the height h is preferably in the range of 1:10 to 1:30; The ratio of the abdominal thickness t_1 to the abdominal thickness t_2 is preferably in the range of 1:2 to 1:5; The ratio of the abdominal thickness t_1 to the thickness t_3 is preferably in the range of 1:5 to 1:30; The ratio of the abdominal thickness t_1 to the abdominal length l_1 is preferably in the range of 1:2 to 1:5; The ratio of the abdominal length l_1 to the abdominal length l_2 is preferably less than 1.

[0128] Below will refer to Figure 9 and Figure 10 describe the positioning device combined with the rotary joint device DGA of the present invention.

[0129] Figure 9 and Figure 10 show the positioning device 1 (or parts of the positioning device 1) for positioning the movable member 5. In this example, the movable member 5 is designed as a movable platform or a movable table, which includes a support surface. For example, an object can be placed on this support surface, and this object can be positioned together with the movable member 5 through the positioning device 1.

[0130] Figure 9 and 10 A perspective view of the positioning device 1 is shown in a coordinate system (X axis, Y axis, Z axis) having three axes X, Y, and Z.

[0131] FromFigure 10 As can be seen, the positioning device 1 includes a base B, which can be realized, for example, by a plate made of granite. In this example, the base B has a flat guiding surface FF on its top side, and the flat guiding surface FF is parallel to the second direction (corresponding to Figure 10 the X-axis direction of Figure 1 and is hereinafter referred to as the "second direction X") and parallel to the third direction (corresponding to

[0132] the Y-axis direction of

[0133] and is hereinafter referred to as the "third direction Y").

[0134] The positioning device 1 is designed to enable the movable member 5 to move parallel to the flat guiding surface FF of the base B in the second direction X and / or the third direction Y, so as to position it at a specified position with an accuracy in the sub-micron range (i.e., less than 1 μm) in each case. To provide rapid positioning, it is arranged to be able to move the movable member 5 along the second direction X and / or the third direction Y with a relatively large acceleration (2g and greater). For this purpose, the positioning device 1 has a first moving device 10 with a frame type design. The first moving device 10 includes a frame beam 15 and a frame drive GA. Among them, the frame beam 15 is arranged above the flat guiding surface FF and extends at a certain distance from the flat guiding surface FF in the third direction Y. The frame drive GA is used to move the frame beam 15 relative to the base B in the second direction X. The frame beam 15 has a longitudinal axis extending in the third direction Y, and relative to this longitudinal axis, it has a first end 15.1 and a second end 15.2 positioned opposite to the first end 15.1. Among them, the frame drive GA includes two first linear axes X1 or X2 extending in the second direction X, and each first linear axis respectively includes a linear drive LMX1 or LMX2. The linear drive LMX1 of one of the first linear axes X1 is thus connected to the first end 15.1 of the frame beam 15, so that the first end 15.1 of the frame beam 15 can be moved in the second direction X by means of the linear drive LMX1. The linear drive LMX2 of the other first linear axis X2 is thus connected to the second end 15.2 of the frame beam 15, so that the second end 15.2 of the frame beam 15 can also be moved in the second direction X by means of the linear drive LMX2.In this embodiment, the linear drivers LMX1 and LMX2 are respectively constituted by conventional linear motors. Thus, the linear driver LMX1 (which is formed as a linear motor) has a stator 20A and a rotor 20B, wherein the stator 20A linearly extends in the second direction X and is fixed to the base B, and the rotor 20B is movable relative to the stator 20A in the second direction X and is fixed to the first end 15.1 of the frame beam 15 via the adapter plate 15a. Thus, the linear driver LMX2 (which is formed as a linear motor) has a stator 21A and a rotor 21B, wherein the stator 21A linearly extends in the second direction X and is fixed to the base B, and the rotor 21B is movable relative to the stator 21A in the second direction X and is fixed to the second end 15.2 of the frame beam 15 via the adapter plate 15b.

[0135] In a cross-section perpendicular to the second direction X, the stator 20A of the linear driver LMX1 and the stator 21A of the linear driver LMX2 respectively have a substantially U-shaped profile, which profile includes two legs arranged adjacent to each other, and the two legs respectively define gaps that extend along the second direction X over the entire length of the respective stator 20A or 20B, namely: the gap SX1 of the stator 20A, the gap SX2 of the stator 21A. As is common in conventional linear motors, the stator 20A includes means for providing a static magnetic field in the gap SX1 of the stator 20A, and the stator 21A includes means for providing a static magnetic field in the gap SX2 of the stator 21A. Thus, the rotor 20B of the linear driver LMX1 includes a coil (not shown in the figure), which can be supplied with alternating current for generating an alternating magnetic field and extends spatially such that a part 20B-1 of the rotor 20B, which includes the coil of the rotor 20B, protrudes into the gap SX1 of the stator 20A, and the rotor 20B can move in this gap SX1 in the second direction X by a distance corresponding to the extension length of the stator 20A in the second direction X. Thus, the rotor 21B of the linear driver LMX2 includes a coil (not shown in the figure), which can be supplied with alternating current for generating an alternating magnetic field and extends spatially such that a part 21B-1 of the rotor 21B, which includes the coil of the rotor 21B, protrudes into the gap SX2 of the stator 21A, and the rotor 21B can move in this gap SX2 in the second direction X by a distance corresponding to the extension length of the stator 21A in the second direction X. In order to control the movement of the frame beam 15 in the second direction X, the linear drivers LMX1 and LMX2 of the two first linear axes X1 or X2 can be controlled independently of each other by a control device (not shown in the figure).

[0136] In order to respectively achieve a space-saving arrangement of the two first linear axes X1 or X2, Figure 1In the embodiment of the positioning device 1 shown, the stators of the linear drives LMX1 and LMX2 are arranged such that the gap SX1 of the stator 20A and the gaps SX2 of the stator 21A, as well as the rotors 20B and 21B, extend substantially parallel to a plane that is arranged parallel to the second direction X and perpendicular to the flat guiding surface FF of the base B, so that the gap SX1 of the stator 20A and the gap SX2 of the stator 21A, as well as the rotors 20B and 21B, have much smaller extension lengths in the third direction Y than in the direction perpendicular to the flat guiding surface FF. This arrangement of the two first linear axes X1 or X2 is advantageous for the stress on the base surface that is as small as possible in the plane extending parallel to the second direction X and parallel to the third direction Y. In particular, due to the respective structures of the stators 20A and 21A and the structures of the rotors 20B and 21B in the above arrangement perpendicular to the flat guiding surface FF, each of the two linear drives LMX1 and LMX2 has an extension in the third direction Y that is several times (usually greater than 2 times) larger than the extension of the corresponding linear drive LMX1 or LMX2. The latter can be clearly seen according to Figure 10 the positioning device 1 shown in

[0137] As Figure 9 shown, the movable member 5 is mounted on the frame beam 15 such that the movable member 5 can linearly move along the third direction Y on the frame beam 15, wherein the frame beam 15 has a second linear axis Y1 extending along the third direction Y, which includes a linear drive LMY connected to the movable member 5 for moving the movable member 5 along the third direction Y.

[0138] In this embodiment, the linear drive LMY of the second linear axis Y1 is also formed as a conventional linear motor and (similar to the structures of the linear drives LMX1 and LMX2) includes a stator 100A and a rotor 100B, wherein the stator 100A linearly extends in the third direction Y and is fixed to the top side of the frame beam 15, and the stator 100A extends in the third direction Y between the first end 15.1 and the second end 15.2 over the entire length of the frame beam 15, and the rotor 100B can move relative to the stator 100A in the third direction Y and is fixed to the movable member 5.

[0139] In a cross-section perpendicular to the third direction Y, the stator 100A of the linear actuator LMY has a substantially U-shaped profile that includes two legs arranged adjacent to each other, and the two legs respectively define a gap SY extending along the third direction Y over the entire length of the stator 100A. The stator 100A includes means for providing a static magnetic field in the gap SY of the stator 100A. Accordingly, the rotor 100B of the linear actuator LMY includes a coil (not shown in the figure), which can be supplied with alternating current for generating an alternating magnetic field and extends spatially such that a part 100B-1 of the rotor 100B, which includes the coil of the rotor 100B, projects into the gap SY of the stator 100A, and the rotor 100B can move a distance in the gap SY along the third direction Y, and this distance corresponds to the extension length of the stator 100A in the third direction Y. To control the movement of the movable member 5 in the third direction Y, the linear actuator LMY can be controlled by means of control means (not shown in the figure).

[0140] As Figure 9 shown, the positioning device 1 includes a first air bearing device LL1, and the first air bearing device LL1 includes a plurality of air bearings connected to the frame beam 15 for guiding the frame beam on the flat guiding surface FF of the base B. Figure 9 As shown, the first air bearing device LL1 includes a first air bearing arrangement 30, and the first air bearing arrangement 30 includes at least one first horizontal air bearing provided at the first end 15.1 of the frame beam 15 for guiding the first end 15.1 of the frame beam 15 on a first part FF1 of the flat guiding surface FF extending along the second direction X. The first air bearing device LL1 further includes a second air bearing arrangement 35, which includes at least one second horizontal air bearing provided at the second end 15.2 of the frame beam 15 for guiding the second end 15.2 of the frame beam 15 on a second part FF2 of the flat guiding surface FF extending along the second direction X. The respective air bearings of the first air bearing arrangement 30 and the second air bearing arrangement 35 serve to support or guide a part of the first end 15.1 of the frame beam 15 and the second end 15.2 of the frame beam 15 on the flat guiding surface FF.

[0141] Still as Figure 9As shown, the first air bearing device LL1 further includes a third air bearing arrangement 50, which includes at least one third horizontal air bearing and at least one fourth horizontal air bearing. Among them, the at least one third horizontal air bearing and the at least one fourth horizontal air bearing are arranged on the "middle part" of the frame beam 15 between the first end 15.1 and the second end 15.2 of the frame beam 15, so that this "middle part" of the frame beam 15 is guided on the third part FF3 of the flat guiding surface FF extending along the second direction X by means of the third horizontal air bearing and the fourth horizontal air bearing. Among them, relative to the third direction Y, this third part FF3 is arranged between the first part FF1 of the flat guiding surface FF and the second part FF2 of the flat guiding surface. The details will be described below in conjunction with Figure 10 Describe the details of the third air bearing arrangement 50 for the above at least one third horizontal air bearing and the above at least one fourth horizontal air bearing.

[0142] In this article, the "middle part" of the frame beam 15 is considered to be the longitudinal part of the frame beam 15 extending in the third direction Y, and its length extending in the third direction Y is at most 50% of the extension of the frame beam 15 in the third direction Y. And, relative to the first end 15.1 and the second end 15.2 of the frame beam 15, its distance in the third direction Y is at least 25% of the extension length of the frame beam 15 in the second direction Y.

[0143] Figure 9 A guiding beam FB is also shown, which extends in the second direction X and has a flat side surface SF. This flat side surface SF is parallel to the second direction X and parallel to the first direction (corresponding to Figure 9 the Z-axis direction of, hereinafter referred to as "the first direction Z") that is substantially perpendicular to the flat guiding surface FF. The guiding beam FB is arranged on the base B and is adjacent to the third part FF3 of the flat guiding surface FF. The third air bearing arrangement 50 further includes at least one lateral air bearing provided on the middle part of the frame beam 15 for guiding the frame beam on this flat side surface SF of the guiding beam FB. The details of the above at least one lateral air bearing of the third air bearing arrangement 50 will be described below in conjunction with Figure 10 to describe.

[0144] As will be described in more detail below, in the present embodiment, all the air bearings of the third air bearing arrangement 50 are part of a "module" that forms a unit and is fixed to the frame beam 15 and is disposed in the intermediate space between the frame beam 15 and the flat guide surface FF below the frame beam 15, and which has the task of supporting or guiding the middle part range of the frame beam 15 in the third part FF3 of the flat guide surface FF by the horizontal air bearings of the third air bearing arrangement 50, and has the task of laterally guiding the frame beam 15 on the flat side surface SF of the guide beam FB when moving along the second direction X by the at least one lateral air bearing of the third air bearing arrangement 50. Thus, the above-mentioned module forms a "sliding element" GE that is fixed to the frame beam 15 and is formed to slide without contact on the third part FF3 of the flat guide surface FF and on the flat side surface SF of the guide beam FB along the second direction X during the operation of the positioning device 1, that is, an air cushion is formed between the sliding element GE and the third part FF3 of the flat guide surface FF by the corresponding horizontal air bearings of the third air bearing arrangement 50, and an air cushion is formed between the sliding element GE and the flat side surface SF of the guide beam FB by the corresponding lateral air bearings of the third air bearing arrangement 50.

[0145] It should be emphasized that each horizontal air bearing of the first air bearing device LL1 is preloaded with respect to the flat guide surface FF of the base B, and each lateral air bearing of the first air bearing device LL1 is preloaded with respect to the flat side surface SF of the guide beam FB. Thus, each air bearing of the second air bearing device LL2 is preloaded with respect to one of the flat guide surfaces FFG1 or FFG2 of the frame beam 15 or with respect to the flat side surface SFG2 of the frame beam 15. In this embodiment, a magnetic device is used to preload the corresponding air bearings, but the magnetic device is not relevant to the present invention and will not be described in more detail.

[0146] Reference Figure 9 and Figure 10 , the details of the sliding element GE will be described below in connection with the air bearings of the third air bearing arrangement 50. As Figure 10 shown, the sliding element GE includes a carrier 70 as the main component, which is used to receive the air bearings of the third air bearing arrangement 50 and is fixed to the frame beam 15 so as to hold the air bearings of the third air bearing arrangement 50 at a specified position relative to the frame beam 15. In the present embodiment, the carrier 70 is formed as a housing having a plurality of cavities.

[0147] In this embodiment, the carrier 70 has the shape of a horizontal flat plate. As Figure 9 and Figure 10 shown, the carrier 70 is mounted on the frame beam 15 such that the carrier 70 extends parallel to the flat guiding surface FF of the base B and parallel to the flat side surface SF of the guiding beam FB in the intermediate space below the frame beam 15 and between the frame beam 15 and the third part FF3 of the flat guiding surface FF.

[0148] From Figure 10 it can be seen that the third air bearing device 50 in this embodiment includes a total of two horizontal air bearings L3 and L4, which are arranged on the lower side of the carrier 70 facing the flat guiding surface FF of the base B.

[0149] From Figure 10 it can be seen that the two horizontal air bearings L3 and L4 are arranged relative to each other such that they have a certain distance from each other in the second direction X.

[0150] From Figure 10 it can be seen that the third air bearing device 50 in this embodiment has two lateral air bearings L1 or L2 for guiding the frame beam 15 on the flat side surface SF of the guiding beam FB, wherein the two lateral air bearings L1 and L2 are arranged relative to each other such that they have a certain distance from each other in the second direction X.

[0151] As Figure 10 shown, two elongated, substantially cubic hollow spaces 71A or 71B are respectively formed on the top side of the carrier 70 facing the frame beam 15. The hollow spaces 71A or 71B respectively have a longitudinal axis perpendicular to the first direction Z or parallel to the flat guiding surface FF of the base B, and, relative to the second direction X, the elongated hollow space 71A and the elongated hollow space 71B are arranged such that they have a certain distance from each other in the second direction X. As Figure 10As shown, the elongated hollow spaces 71A and 71B are respectively used to receive the first solid body joint 80A or the second solid body joint 80B, wherein the first solid body joint 80A is intended to be inserted into the hollow space 71A, while the second solid body joint 80B is intended to be inserted into the hollow space 71B, and the two solid body joints 80A or 80B are respectively arranged to establish a connection between the carrier 70 and the frame beam 15, such that the sliding element GE is on the one hand respectively held in a stable position relative to the frame beam 15 via the two solid body joints 80A or 80B, and on the other hand respectively mounted on the frame beam 15 through the two solid body joints 80A or 80B, so that the sliding element GE can rotate relative to the frame beam 15 about a rotation axis extending in the first direction Z, whereby the arrangement of the two solid body joints 80A or 80B respectively corresponds to a "rotary joint", which is used to connect the sliding element GE to the frame beam 15 and hold it on the frame beam 15 in a movable (rotatable) manner.

[0152] In this embodiment, the positioning device 1 is designed such that the frame beam 15, the carrier 70, the first solid body joint 80A and the second solid body joint 80B form an embodiment of the rotary joint device of the present invention.

[0153] The frame beam 15, the carrier 70, the first solid body joint 80A and the second solid body joint 80B of the positioning device 1 structurally and functionally specifically correspond to Figures 1 - 3 the rotary joint device DGA shown in: the frame beam 15 of the positioning device 1 thus corresponds to the first part 15 of the rotary joint device DGA, the carrier 70 of the positioning device 1 corresponds to the second part 70 of the rotary joint device DGA, the first solid body joint 80A of the positioning device 1 is the same as the first solid body joint 80A of the rotary joint device DGA, and the second solid body joint 80B of the positioning device 1 is the same as the second solid body joint 80B of the rotary joint device DGA.

[0154] The elongated hollow spaces 71A and 71B formed in the carrier 70 of the positioning device 1 for respectively receiving the first solid body joint 80A or the second solid body joint 80B also correspond to the elongated hollow spaces 71A and 71B formed in the second part 70 of the rotary joint device DGA.

[0155] The above structure of the carrier 70 can integrate two solid connectors 80A or 80B onto the carrier 70 respectively. For this purpose, the solid connector 80A can be inserted as a whole into the first elongated hollow space 71A such that the two end segments E1 and E2 of the first solid connector 80A are rigidly connected to the carrier 70 (by conventional fastening means suitable for this type of connection, such as by screws and / or by bonding), while the middle segment F of the first solid connector 80A is rigidly connected to the frame beam 15.

[0156] For this purpose, the second solid connector 80B can be inserted as a whole into the second elongated hollow space 71B such that the two end segments E1 and E2 of the second solid connector 80B are rigidly connected to the carrier 70 (by conventional fastening means suitable for this type of connection, such as by screws and / or by bonding), while the middle segment F of the second solid connector 80B is rigidly connected to the frame beam 15.

[0157] As Figure 10 shown, the first solid connector 80A and the second solid connector 80B are each formed of an elongated solid (such as steel) that extends perpendicular to the first direction Z in a plane parallel to the first direction Z, and that has a longitudinal axis disposed perpendicular to the first direction Z.

[0158] As Figure 1 and Figure 10 shown, it is assumed herein that the first elongated solid forming the first solid connector 80A extends in a first plane ME1 parallel to the first direction Z, while the second elongated solid forming the second solid connector 80B extends in a second plane ME2 parallel to the first direction Z.

[0159] The first solid connector 80A and the second solid connector 80B are formed such that when the two solid connectors 80A and 80B are in their undeformed basic states respectively (as Figure 9As shown, the carrier 70 or the sliding element GE is respectively held in a stable stationary position relative to the frame beam 15. Since the first abdominal section S1 and the second abdominal section S2 of the first solid joint 80A and the first abdominal section 1 and the second abdominal section S2 of the second solid joint 80B are both formed to be elastically deformable, and since the middle section F of the first solid joint 80A (in the basic state where the first solid joint 80A is not deformed) has a certain distance from the side wall portion HSA1 and from the side wall portion HSA2 in the direction perpendicular to the first plane ME1 in each case, and the middle section F of the second solid joint 80B (in the basic state where the second solid joint 80B is not deformed) has a certain distance from the side wall portion HSB1 and the side wall portion HSB2 in the direction perpendicular to the second plane ME2, the carrier 70 or the sliding element GE is respectively held on the frame beam 15 by the first solid joint 80A and the second solid joint 80B, such that the carrier 70 or the sliding element GE can move relative to the frame beam 15 respectively, provided that the central section F of the first solid joint 80A does not abut against any one of the side wall portions HSA1 or HSA2, and that neither of the side wall portions HSA1 or HSA2 blocks the corresponding movement of the carrier 70 or the sliding element GE relative to the frame beam 15, and / or, the central section F of the second solid joint 80B does not abut against any one of the side walls HSB1 or HSB2, and that neither of the side wall portions HSB1 or HSAB2 blocks the corresponding movement of the carrier 70 or the sliding element GE relative to the frame beam 15 respectively.

[0160] Regarding the positioning device 1, it is worth noting that the arrangements of the first solid joint 80A and the second solid joint 80B respectively present the connections between the frame beam 70 or the sliding element GE and the frame beam 15, while the frame beam 15 on the one hand ensures as large a stiffness as possible for the translation of the carrier 70 or the sliding element GE relative to the frame beam 15 in the second direction X, the third direction Y, and the first direction Z, but on the other hand, has as small a stiffness as possible for the rotation of the carrier 70 or the sliding element GE relative to the frame beam 15 about the rotation axis extending in the first direction Z.

[0161] To meet the above requirements, the first solid joint 80A and the second solid joint 80B are arranged relative to each other on the carrier 70 such that the first plane ME1 and the second plane ME2 are not parallel to each other but are arranged in an inclined manner relative to each other, so that the first plane ME1 and the second plane ME2 form a common intersection line DZ extending parallel to the first direction Z (as Figure 1as shown). In this case, the first plane ME1 and the second plane ME2 form an angle α with respect to this common intersection line DZ, and this angle α must be greater than 0° and less than 180°. In order to ensure that the arrangements of the first solid joint 80A and the second solid joint 80B have a sufficiently high stiffness respectively for the translation of the carrier 70 or the sliding element GE relative to the frame beam 15 in the second direction X and in the third direction Y, the angle α should preferably satisfy the condition 30° ≤ α ≤ 90°. For Figure 9 and Figure 10 the embodiment shown, the angle α is approximately 60°.

[0162] The arrangements of the first solid joint 80A and the second solid joint 80B are such that the first plane ME1 and the second plane ME2 form an angle α of approximately 60° with respect to the common intersection line DZ. In this case, it represents a good compromise, that is, the arrangements of the first solid joint 80A and the second solid joint 80B are such that the stiffness of the carrier 70 or the sliding element GE relative to the frame beam 15 about the common intersection line DZ of the first plane ME1 and the second plane ME2 is small enough, and the arrangements of the first solid joint 80A and the second solid joint 80B have a sufficiently large stiffness for the translation of the carrier 70 or the sliding element GE relative to the frame beam 15 in the second direction X or the third direction Y.

[0163] Herein, the common intersection line DZ of the first plane ME1 and the second plane ME2 forms a "virtual" axis of rotation (which extends in the first direction Z), and the carrier 70 or the sliding element GE is rotatably mounted relative to the frame beam 15 about this "virtual" axis of rotation by the arrangements of the first solid joint 80A and the second solid joint 80B.

[0164] Therefore, by appropriately selecting the arrangements of the side wall portions HSA1 and / or HSA2 and / or HSB1 and / or HSB2, the maximum rotation angle can be determined, and the carrier 70 can rotate from its rest position about the "virtual" axis of rotation DZ by this maximum rotation angle. Thereby, mechanical overload of the first solid joint 80A and the second solid joint 80B can be prevented. For the positioning device 1, it is advantageous that, for example, the carrier 70 can rotate relative to the frame beam 15 about the "virtual" axis of rotation DZ by at least approximately ±0.1°.

Claims

1. A rotary joint device (DGA), comprising: A first part (15); A second part (70); And A coupling device (KE), wherein the coupling device (KE) includes at least one solid joint (80A, 80B) for connecting the first part (15) and the second part (70) such that the second part can rotate relative to the first part about a rotation axis (DZ) extending in a first direction (Z); Wherein the first part (15) and the second part (70) each have an extension perpendicular to the rotation axis (DZ); The second part is arranged relative to the first part to be axially offset by a certain distance relative to the rotation axis (DZ); Characterized in that: the coupling device (KE) includes a first solid joint (80A) and a second solid joint (80B); Wherein the first solid joint (80A) is composed of a first elongated solid extending perpendicular to the first direction (Z) along a first plane parallel to the first direction (Z), the first elongated solid having a longitudinal axis arranged perpendicular to the first direction (Z), wherein the first elongated solid has the following longitudinal parts arranged one after another in the direction of the longitudinal axis of the first elongated solid: A first end segment (E1), which forms the first end of the first elongated solid; A second end segment (E2), which forms the second end of the first elongated solid, the second end being oppositely positioned to the first end of the first elongated solid in the direction of the longitudinal axis of the first elongated solid; An intermediate segment (F), which is located between the first end segment and the second end segment of the first elongated solid; A first abdominal part (S1), which is located between the first end segment (E1) and the intermediate segment (F) of the first elongated solid and is connected to the first end segment (E1) and the intermediate segment (F); A second abdominal part (S2), which is located between the second end segment (E2) and the intermediate segment (F) of the first elongated solid and is connected to the second end segment (E2) and the intermediate segment (F) of the first elongated solid; The second solid joint (80B) is composed of a second elongated solid extending perpendicular to the first direction (Z) along a second plane (ME2) parallel to the first direction (Z), the second elongated solid having a longitudinal axis arranged perpendicular to the first direction (Z), wherein the second elongated solid has the following longitudinal parts arranged one after another in the direction of the longitudinal axis of the second elongated solid: A first end segment (E1), which forms the first end of the second elongated solid; A second end segment (E2), which forms the second end of the second elongated solid, the second end being oppositely positioned to the first end of the second elongated solid in the direction of the longitudinal axis of the second elongated solid; An intermediate segment (F), which is located between the first end segment and the second end segment of the second elongated solid; The first abdominal part (S1), which is located between the first end segment (E1) and the intermediate segment (F) of the second elongated solid body and is connected to the first end segment and the intermediate segment; The second abdominal part (S2), which is located between the second end segment (E2) and the intermediate segment (F) of the second elongated solid body and is connected to the second end segment (E2) and the intermediate segment (F) of the second elongated solid body; Wherein, the first part (15) is connected to the second part (70) via the first solid body joint (80A) and the second solid body joint (80B) such that: The first end segment (E1) of the first elongated solid body and the second end segment (E2) of the first elongated solid body are rigidly connected to the second part (70), and the intermediate segment (F) of the first elongated solid body is rigidly connected to the first part (15); and, The first end segment (E1) of the second elongated solid body and the second end segment (E2) of the second elongated solid body are rigidly connected to the second part (70), and the intermediate segment (F) of the second elongated solid body is rigidly connected to the first part (15); Wherein, the first plane (ME1) and the second plane (ME2) are inclined relative to each other such that the first plane (ME1) and the second plane (ME2) form a common intersection line (DZ) extending parallel to the first direction (Z); The first abdominal part (S1) and the second abdominal part (S2) of the first elongated solid body of the first solid body joint (80A) respectively have extension lengths (t_1, t_2) perpendicular to the first plane (ME1), and the extension lengths (t_1, t_2) are less than the extension length (t_3) of the first end segment (E1) of the first elongated solid body perpendicular to the first plane (ME1), less than the extension length (t_3) of the second end segment (E2) of the first elongated solid body perpendicular to the first plane (ME1), and less than the extension length (t_4) of the intermediate segment (F) of the first elongated solid body perpendicular to the first plane (ME1), so that the first abdominal part (S1) and the second abdominal part (S2) of the first elongated solid body are elastically deformable, and the intermediate segment (F) of the first solid body joint (80A) can move relative to the first end segment (E1) and the second end segment (E2) of the first solid body joint (80A); The first abdominal part (S1) and the second abdominal part (S2) of the second slender solid of the second solid joint (80B) respectively have extension lengths (t_1, t_2) perpendicular to the second plane (ME2), and the extension lengths (t_1, t_2) are less than the extension length (t_3) of the first end segment (E1) of the second slender solid perpendicular to the second plane (ME2) and less than the extension length of the second end segment (E2) of the second slender solid perpendicular to the second plane (ME2) and the extension length (t_4) of the middle segment (F) of the second slender solid perpendicular to the second plane (ME2), so that the first abdominal part (S1) and the second abdominal part (S2) of the second slender solid are elastically deformable, and the middle segment (F) of the second solid joint (80B) can move relative to the first end segment (E1) of the second solid joint (80B) and the second end segment (E2) of the second solid joint (80B); Wherein, the second part (70) is rotatably mounted on the first part (15) around the common intersection line (DZ) of the first plane (ME1) and the second plane (ME2) through the first solid joint (80A) and the second solid joint (80B).

2. The swivel joint device (DGA) according to claim 1, characterized in that: In the undeformed state of the first solid joint (80A), the first solid joint (80A) is formed symmetrically with respect to the first plane (ME1); and / or In the undeformed state of the second solid joint (80B), the second solid joint (80B) is formed symmetrically with respect to the second plane (ME2).

3. The rotary joint device (DGA) according to claim 1 or 2, characterized in that: In the first direction (Z), the first end segment (E1) of the first slender solid of the first solid joint (80A) has an extension length (h), and the extension length (h) is greater than the extension length (t_3) of the first end segment (E1) of the first slender solid perpendicular to the first plane (ME1); and / or In the first direction (Z), the second end segment (E2) of the first slender solid of the first solid joint (80A) has an extension length (h), and the extension length (h) is greater than the extension length (t_3) of the second end segment (E2) of the first slender solid perpendicular to the first plane (ME1); and / or In the first direction (Z), the middle segment (F) of the first slender solid of the first solid joint (80A) has an extension length (hF), and the extension length (hF) is greater than the extension length (t_4) of the middle segment (F) of the first slender solid perpendicular to the first plane (ME1); and / or In the first direction (Z), the first abdominal portion (S1) of the first elongate solid of the first solid joint (80A) has an extension length (h) that is greater than the extension length (t_2) of the first abdominal portion (S1) of the first elongate solid perpendicular to the first plane (ME1); and / or In the first direction (Z), the second abdominal portion (S2) of the first elongate solid of the first solid joint (80A) has an extension length (h) that is greater than the extension length (t_2) of the second abdominal portion (S2) of the first elongate solid perpendicular to the first plane (ME1); and / or In the first direction (Z), the first end segment (E1) of the second elongate solid of the second solid joint (80B) has an extension length (h) that is greater than the extension length (t_3) of the first end segment (E1) of the second elongate solid perpendicular to the second plane (ME2); and / or In the first direction (Z), the second end segment (E2) of the second elongate solid of the second solid joint (80B) has an extension length (h) that is greater than the extension length (t_3) of the second end segment (E2) of the second elongate solid perpendicular to the second plane (ME2); and / or In the first direction (Z), the intermediate segment (F) of the second elongate solid of the second solid joint (80B) has an extension length (hF) that is greater than the extension length (t_4) of the intermediate segment (F) of the second elongate solid perpendicular to the second plane (ME2); and / or In the first direction (Z), the first abdominal portion (S1) of the second elongate solid of the second solid joint (80B) has an extension length (h) that is greater than the extension length (t_2) of the first abdominal portion (S1) of the second elongate solid perpendicular to the second plane (ME2); and / or In the first direction (Z), the second abdominal portion (S2) of the second elongate solid of the second solid joint (80B) has an extension length (h) that is greater than the extension length (t_2) of the second abdominal portion (S2) of the second elongate solid perpendicular to the second plane (ME2).

4. The swivel joint device (DGA) according to any one of claims 1 to 3, characterized in that: In the undeformed state of the first solid body joint (80A) and the undeformed state of the second solid body joint (80B), the first solid body joint (80A) and the second solid body joint (80B) are arranged relative to each other such that the first solid body joint (80A) and the second solid body joint (80B) are symmetrically arranged with respect to a third plane (E3) extending parallel to the first direction (Z), wherein the common intersection line (DZ) of the first plane (ME1) and the second plane (ME2) extends in the third plane (E3).

5. The swivel joint device (DGA) according to any one of claims 1 to 3, characterized in that: The first solid body joint (80A) is arranged relative to the second solid body joint (80B) such that in a direction perpendicular to the first direction (Z), the first solid body joint (80A) is spaced apart from the second solid body joint (80B) by a certain distance.

6. The rotary joint device (DGA) according to any one of claims 1-5, characterized in that: The second part (70) has a first elongated hollow space (71A) extending along the first plane (ME1) in the first direction (Z), and the first elongated solid body joint (80A) is arranged within the first elongated hollow space (71A) such that in the first direction (Z), the first solid body joint (80A) extends through at least a part of the first elongated hollow space (71A) along its extension in the first direction (Z); The second part (70) has a second elongated hollow space (71B) extending along the second plane (ME2) in the first direction (Z), and the second elongated solid body joint (8B) is arranged within the second elongated hollow space (71B) such that in the first direction (Z), the second solid body joint (80B) extends through at least a part of the second elongated hollow space (71B) along its extension in the first direction (Z).

7. The swivel joint device (DGA) according to claim 6, characterized in that: The first elongated hollow space (71A) extends along the first plane (ME1) such that the longitudinal axis of the first elongated hollow space (71A) is arranged parallel to the first plane (ME1) and perpendicular to the first direction (Z), and the first elongated hollow space (71A) is laterally limited with respect to the first plane (ME1) by two side walls (HSA1, HSA2) of the second part (70), wherein the two side walls (HSA1, HSA2) of the second part (70) are positioned opposite to each other and extend parallel to the first plane (ME1) in the first direction (Z) respectively, and have a certain distance from each other in a direction perpendicular to the first plane (ME1); The second elongated hollow space (71B) extends along the second plane (ME2) such that the longitudinal axis of the second elongated hollow space (71B) is arranged parallel to the second plane (ME2) and perpendicular to the first direction (Z), and the second elongated hollow space (71B) is laterally limited relative to the second plane (ME2) by two side walls (HSB1, HSB2) of the second part (70), wherein the two side walls (HSB1, HSB2) of the second part (70) are positioned opposite to each other and extend parallel to the second plane (ME2) in the first direction (Z) and have a distance from each other in a direction perpendicular to the second plane (ME2).

8. The swivel joint device (DGA) according to claim 6 or 7, characterized in that: The two side walls (HSA1, HSA2) of the second part (70) that are positioned opposite to each other and laterally define the first elongated hollow space (71A) relative to the first plane (ME1) are formed such that they enclose a first end segment (E1) and a second end segment (E2) of the first solid joint (80A), so that the first end segment (E1) and the second end segment (E2) of the first solid joint (80A) are connected to the second part (70) in a precise manner; The two side walls (HSB1, HSB2) of the second part (70) that are positioned opposite to each other and laterally define the second elongated hollow space (71B) relative to the second plane (ME2) are formed such that they enclose a first end segment (E1) and a second end segment (E2) of the second solid joint (80B), so that the first end segment (E1) and the second end segment (E2) of the second solid joint (80B) are connected to the second part (70) in a precise manner.

9. The swivel joint device (DGA) according to any one of claims 6-8, characterized in that: The two side walls (HSA1, HSA2) of the second part (70) that are positioned opposite to each other and laterally define the first elongated hollow space (71A) relative to the first plane (ME1) are formed such that they enclose the intermediate segment (F) of the first solid joint (80A), wherein, in a direction perpendicular to the first plane (ME1), the two side walls (HSA1, HSA2) of the second part (70) that are positioned opposite to each other and laterally define the first elongated hollow space (71A) relative to the first plane (ME1) have a distance perpendicular to the first plane (ME1), and this distance is greater than the extension length (t_4) of the intermediate segment (F) of the first solid joint (80A) perpendicular to the first plane (ME1), so that the intermediate segment (F) of the first solid joint (80A) can move relative to the second part (70); Two side walls (HSB1, HSB2) of the second part (70) that are positioned relative to each other and laterally define the second part of the second elongated hollow space (71B) relative to the second plane (ME2) are formed such that they enclose the intermediate section (F) of the second solid joint (80B), wherein the two side walls (HSB1, HSB2) of the second part (70) that are positioned relative to each other and laterally define the second part of the second elongated hollow space (71B) relative to the second plane (ME2) have a distance perpendicular to the second plane, and this distance is greater than the extension length (t_4) of the intermediate section (F) of the second solid joint (80B) perpendicular to the second plane (ME2), so that the intermediate section (F) of the second solid joint (80B) can move relative to the second part (70).

10. The rotary joint device (DGA) according to any one of claims 6-8, characterized in that: The intermediate section (F) of the first solid joint (80A) can move relative to the second part (70) in a translational motion perpendicular to the first plane (ME1); and / or The intermediate section (F) of the first solid joint (80A) moves relative to the second part (70) by rotation about a rotation axis extending in the first direction (Z); The intermediate section (F) of the second solid joint (80B) can move relative to the second part (70) in a translational motion perpendicular to the second plane (ME2); and / or The intermediate section (F) of the second solid joint (80A) moves relative to the second part (70) by rotation about a rotation axis extending in the first direction (Z).

11. The swivel joint device (DGA) according to any one of claims 1-10, characterized in that: The first plane (ME1) and the second plane (ME2) are inclined relative to each other such that the first plane (ME1) and the second plane (ME2) intersect on the common intersection line (DZ) at an angle greater than or equal to 10° and less than or equal to 120°.

12. The swivel joint device (DGA) according to any one of claims 1-11, characterized in that: The first plane (ME1) and the second plane (ME2) are inclined relative to each other such that the first plane (ME1) and the second plane (ME2) intersect on the common intersection line (DZ) at an angle greater than or equal to 30° and less than or equal to 90°.

13. A positioning device (1), comprising a rotary joint device (DGA) as described in any one of claims 1 - 12 and linear guiding devices (B, FB) for guiding the first part (15) or the second part (70) of the rotary joint device (DGA); wherein: The first part of the rotary joint device (DGA) is guided by means of the linear guiding device such that the first part can linearly move in a second direction (X) extending perpendicular to the first direction (Z); or The second part (70) of the rotary joint device (DGA) is guided by means of the linear guiding devices (B, FB) such that the second part (70) can linearly move in a second direction (X) extending perpendicular to the first direction (Z).

14. The positioning device (1) according to claim 13, characterized in that: If the second part (70) is guided by means of the linear guide device (B, FB), there is at least one linear drive (LMX1, LMX2) connected to the first part (15) of the rotary joint device (DGA) for moving the first part (15) in the second direction (X).

15. The positioning device (1) according to claim 13 or 14, characterized in that: The linear guide device comprises a base (B) having at least one flat guide surface (FF) and / or a guide beam (FB) having at least one flat guide surface (SF), and the second part (70) is guided on the flat guide surface of the base (B) and / or the flat guide surface (SF) of the guide beam (FB) by means of at least one air bearing (L1, L2, L3, L4).

16. The positioning device (1) according to claim 13, characterized in that: If the first part is guided by means of the linear guide device, there is at least one linear drive connected to the second part of the rotary joint device for moving the second part in the second direction (X).

17. The positioning device according to claim 13 or 16, characterized in that: The linear guide device comprises a base (B) having at least one flat guide surface (FF) and / or a guide beam (FB) having at least one flat guide surface (SF), and the first part is guided on the flat guide surface of the base (B) and / or on the flat guide surface of the guide beam (FB) by means of at least one air bearing.

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