Flexible substrate stripping device and stripping method thereof

Abstract

The invention relates to the technical field of flexible substrate stripping, and discloses a flexible substrate stripping device and a stripping method thereof.The flexible substrate stripping device comprises a bottom frame, a bearing plate is arranged in the bottom frame, stand columns are fixedly arranged at the four corners of the upper end of the bottom frame, and a top frame is fixedly arranged at the upper ends of the stand columns; the linear stripping structure is fixedly arranged on the right side of the lower end of the top frame and comprises a first side plate and a second side plate, a sliding rod is fixedly arranged between the first side plate and the second side plate, a first servo motor is fixedly arranged on one side of the interior of the first side plate, and a first driving lead screw is fixedly arranged at the output end of the first servo motor; a first sliding block is mounted outside the first driving screw rod and the sliding rod; and the first electric telescopic rod is fixedly arranged at the lower end of the first sliding block, and a hanging frame is fixedly arranged at the lower end of the first electric telescopic rod. The flexible layer is adsorbed through the adsorption plate, and the adsorption plate is matched to slowly turn to a horizontal state, so that the flexible layer is gradually stripped.

Description

Technical Field

[0001] The present invention relates to the technical field of flexible substrate peeling, and specifically relates to a flexible substrate peeling device and a peeling method thereof. Background Art

[0002] Flexible substrate peeling devices are mainly used to separate flexible substrates (such as thin heat-resistant materials made of polymers such as polyimide PI and polyethylene terephthalate PET) from the substrates (such as glass, metal, or another layer of substrate) to which they are attached. Such devices are crucial in the production process of flexible electronic devices (such as flexible displays and sensors), and it is necessary to ensure that the peeling process is efficient, precise, and does not damage the substrate.

[0003] The traditional flexible substrate peeling method is to directly insert a blade or a roller into the interface between the flexible layer and the rigid layer and achieve separation through external force. This method has significant defects. The local pressure is too large at the moment of peeling, which easily causes the flexible layer to tear or the edge of the rigid substrate to break. Therefore, a flexible substrate peeling device and a peeling method thereof are proposed. Summary of the Invention

[0004] (I) Technical Problems to be Solved In view of the deficiencies of the prior art, the present invention provides a flexible substrate peeling device and a peeling method thereof to solve the problems raised in the above background art.

[0005] (II) Technical Solutions To achieve the above object, the present invention provides the following technical solutions: A flexible substrate peeling device and a peeling method thereof, including: A bottom frame, in which second chutes are provided on both the front and rear sides of the interior of the bottom frame. A bearing plate is arranged inside the bottom frame. Columns are fixedly provided at the four corners of the upper end of the bottom frame, and a top frame is fixedly provided at the upper ends of the columns; A laser scanning device, fixedly provided on the left side of the lower end of the top frame; A linear peeling structure, fixedly provided on the right side of the lower end of the top frame. The linear peeling structure includes a first side plate and a second side plate, and the first side plate and the second side plate are fixedly connected to the top frame. A slide bar is fixedly arranged between the first side plate and the second side plate. A first servo motor is fixedly arranged on one side inside the first side plate. A first driving lead screw is fixedly arranged at the output end of the first servo motor. A first slider is installed outside the first driving lead screw and the slide bar. The first slider is in threaded fit with the first driving lead screw and is slidably connected to the slide bar; A first electric telescopic rod, fixedly provided at the lower end of the first slider. A suspension frame is fixedly provided at the lower end of the first electric telescopic rod. A sliding disk is fixedly provided at the lower end inside the suspension frame; An adsorption plate, arranged at the lower end inside the suspension frame. First chutes are provided on both the front and rear sides inside the adsorption plate, and the sliding disk is slidably connected to the first chutes; Iron blocks, fixedly arranged at the outer two ends of the adsorption plate; The second electric telescopic rod is arranged at the lower end of the first side plate. The lower end of the second side plate is provided with a third electric telescopic rod. U-shaped electromagnets are fixedly arranged at the lower ends of the second electric telescopic rod and the third electric telescopic rod; The first matrix adsorption holes are opened at the lower end of the adsorption plate. A first vacuum generator is fixedly arranged at the upper end of the adsorption plate.

[0006] Preferably, the bearing plate is slidably connected to the second sliding groove. The first side plate and the second side plate are fixedly connected to the top frame. The second electric telescopic rod is fixedly connected to the first side plate. The third electric telescopic rod is fixedly connected to the second side plate. The bearing plate is used for placing the flexible substrate.

[0007] Preferably, second matrix adsorption holes are opened at the upper end of the bearing plate. A second vacuum generator is fixedly arranged at the lower end of the bearing plate. The second vacuum generator is used to generate vacuum negative pressure through the second matrix adsorption holes to adsorb the flexible substrate.

[0008] Preferably, a second slider is arranged at the lower end of the second vacuum generator, and the second slider is fixedly connected to the second vacuum generator.

[0009] Preferably, a second servo motor is fixedly arranged at the right end inside the bottom frame. A second driving lead screw is fixedly arranged at the output end of the second servo motor. The second slider is in threaded fit connection with the second driving lead screw. The second servo motor is used to control the rotation of the second driving lead screw to drive the bearing plate to move.

[0010] Preferably, bottom columns are arranged at the four corners of the lower end of the bottom frame, and the bottom columns are fixedly connected to the bottom frame. The bottom columns are used to support the bottom frame.

[0011] A method for peeling a flexible substrate, based on the above-mentioned peeling device for a flexible substrate, includes the following steps: Step 1: Place the flexible substrate on the bearing plate, and start the second vacuum generator to adsorb and fix the flexible substrate through the second matrix adsorption holes; Step 2: Turn on the laser scanning device, and control the bearing plate to move towards the linear peeling structure; Step 3: After the laser scanning of the flexible substrate in Step 2 is completed, the bearing plate drives the flexible substrate to move to the lower end of the linear peeling structure; Step 4: Control the first electric telescopic rod, the second electric telescopic rod and the third electric telescopic rod to lower the adsorption plate, and turn on the first vacuum generator to adsorb the flexible layer through the first matrix adsorption holes; Step 5: Turn off the U-shaped electromagnet at the lower end of the second electric telescopic rod, control the first electric telescopic rod to contract and lift the hanging frame to pull the right end of the adsorption plate to tilt up, and control the second electric telescopic rod to lift the U-shaped electromagnet at the lower end of the second electric telescopic rod to the horizontal height of the adsorption plate; Step 6: Turn on the U-shaped electromagnet at the lower end of the second electric telescopic rod, turn off the U-shaped electromagnet at the lower end of the third electric telescopic rod, and start the first servo motor to control the hanging frame to move towards the left end of the adsorption plate so that the adsorption plate flips to the horizontal state, and the flexible layer is completed for peeling.

[0012] (III) Beneficial effects Compared with the prior art, the present invention provides a flexible substrate peeling device and a peeling method thereof, having the following beneficial effects: In the present invention, the first servo motor is used to control the rotation of the first driving lead screw, and then control the parallel movement of the hanging frame, so that the adsorption plate changes from an inclined state to a horizontal state, and this state change is linear. The way that one end of the adsorption plate tilts up and the other end slowly follows makes the adsorption plate always keep parallel contact with the flexible layer, avoiding stress concentration caused by sudden angle change during the peeling process; the adsorption holes cover the entire contact surface, which can evenly disperse the peeling stress and reduce the risk of tearing of the flexible layer, thus solving the problems raised in the background art. Description of the drawings

[0013] Figure 1 It is a three-dimensional view of the overall structure of the present invention; Figure 2 It is a schematic diagram of the linear peeling structure of the present invention; Figure 3 It is a three-dimensional view of the hanging frame structure of the present invention; Figure 4 It is a three-dimensional view of the internal structure of the bottom frame of the present invention; Figure 5 It is a three-dimensional view of the adsorption plate structure of the present invention.

[0014] In the figure: 1. Bottom frame; 2. Bottom column; 3. Column; 4. Top frame; 5. Laser scanning device; 6. First side plate; 7. Second side plate; 8. Slide bar; 9. First servo motor; 10. First driving lead screw; 11. First slider; 12. First electric telescopic rod; 13. Hanging frame; 14. Slide disk; 15. Second electric telescopic rod; 16. Third electric telescopic rod; 17. U-shaped electromagnet; 18. Adsorption plate; 19. First chute; 20. Iron block; 21. First vacuum generator; 22. Second servo motor; 23. Second driving lead screw; 24. Second chute; 25. Bearing plate; 26. Second vacuum generator; 27. Second slider; 28. Second matrix adsorption hole; 29. First matrix adsorption hole. Specific embodiments

[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0016] The present invention provides a technical solution, a flexible substrate peeling device and a peeling method thereof. Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 , including: A bottom frame 1, second chutes 24 are provided on both the front and rear sides inside the bottom frame 1, a bearing plate 25 is arranged inside the bottom frame 1, columns 3 are fixedly provided at the four corners of the upper end of the bottom frame 1, and a top frame 4 is fixedly provided at the upper ends of the columns 3; A laser scanning device 5 is fixedly provided on the left side of the lower end of the top frame 4; A linear peeling structure is fixedly provided on the right side of the lower end of the top frame 4. The linear peeling structure includes a first side plate 6 and a second side plate 7, and the first side plate 6 and the second side plate 7 are fixedly connected to the top frame 4. A sliding rod 8 is fixedly provided between the first side plate 6 and the second side plate 7. A first servo motor 9 is fixedly provided on one side inside the first side plate 6. A first driving lead screw 10 is fixedly provided at the output end of the first servo motor 9. A first slider 11 is installed outside the first driving lead screw 10 and the sliding rod 8. The first slider 11 is in threaded engagement with the first driving lead screw 10, and the first slider 11 is slidably connected to the sliding rod 8; A first electric telescopic rod 12 is fixedly provided at the lower end of the first slider 11. A hanging frame 13 is fixedly provided at the lower end of the first electric telescopic rod 12. A sliding disk 14 is fixedly provided at the lower end inside the hanging frame 13; An adsorption plate 18 is arranged at the lower end inside the hanging frame 13. First chutes 19 are provided on both the front and rear sides inside the adsorption plate 18, and the sliding disk 14 is slidably connected to the first chutes 19; Iron blocks 20 are fixedly provided at both ends of the outside of the adsorption plate 18; A second electric telescopic rod 15 is arranged at the lower end of the first side plate 6. A third electric telescopic rod 16 is provided at the lower end of the second side plate 7. U-shaped electromagnets 17 are fixedly provided at the lower ends of the second electric telescopic rod 15 and the third electric telescopic rod 16; First matrix adsorption holes 29 are opened at the lower end of the adsorption plate 18. A first vacuum generator 21 is fixedly provided at the upper end of the adsorption plate 18.

[0017] It should be noted that, in order to save space and highlight the innovative elements of this patent, some conventional devices such as the laser scanning device 5, servo motor, driving lead screw, electric telescopic rod and vacuum generator are not described in detail in this patent.

[0018] Please refer to Figure 1 and Figure 4 , the carrier plate 25 is slidably connected to the second chute 24, the first side plate 6 and the second side plate 7 are fixedly connected to the top frame 4, the second electric telescopic rod 15 is fixedly connected to the first side plate 6, the third electric telescopic rod 16 is fixedly connected to the second side plate 7, and the carrier plate 25 is used for placing the flexible substrate.

[0019] Please refer to Figure 1 and Figure 4 , a second matrix adsorption hole 28 is formed at the upper end of the carrier plate 25, and a second vacuum generator 26 is fixedly provided at the lower end of the carrier plate 25. The second vacuum generator 26 is used to generate vacuum negative pressure through the second matrix adsorption hole 28 to adsorb the flexible substrate.

[0020] Please refer to Figure 1 and Figure 4 , a second slider 27 is provided at the lower end of the second vacuum generator 26, and the second slider 27 is fixedly connected to the second vacuum generator 26.

[0021] Please refer to Figure 1 and Figure 4 , a second servo motor 22 is fixedly provided at the right end inside the bottom frame 1. A second driving lead screw 23 is fixedly provided at the output end of the second servo motor 22. The second slider 27 is in threaded engagement with the second driving lead screw 23. The second servo motor 22 is used to control the rotation of the second driving lead screw 23 to drive the carrier plate 25 to move.

[0022] Please refer to Figure 1 , bottom columns 2 are provided at the four corners of the lower end of the bottom frame 1, and the bottom columns 2 are fixedly connected to the bottom frame 1. The bottom columns 2 are used to support the bottom frame 1.

[0023] A method for peeling a flexible substrate, based on the above-mentioned flexible substrate peeling device, includes the following steps: Step 1: Place the flexible substrate on the carrier plate 25 and start the second vacuum generator 26 to adsorb and fix the flexible substrate through the second matrix adsorption hole 28; Step 2: Turn on the laser scanning device 5 and control the carrier plate 25 to move towards the linear peeling structure; Step 3: After the laser scanning in Step 2 for the flexible substrate is completed, the carrier plate 25 carries the flexible substrate and moves to the lower end of the linear peeling structure; Step 4: Control the first electric telescopic rod 12, the second electric telescopic rod 15 and the third electric telescopic rod 16 to lower the adsorption plate 18, and turn on the first vacuum generator 21 to adsorb the flexible layer through the first matrix adsorption hole 29; Step 5: turn off the U-shaped electromagnet 17 at the lower end of the second electric telescopic rod 15, control the first electric telescopic rod 12 to retract and lift the hanging frame 13 to pull the right end of the adsorption plate 18 up, and control the second electric telescopic rod 15 to raise the U-shaped electromagnet 17 at the lower end of the second electric telescopic rod 15 to the level of the adsorption plate 18; Step 6: Turn on the U-shaped electromagnet 17 at the lower end of the second electric telescopic rod 15, turn off the U-shaped electromagnet 17 at the lower end of the third electric telescopic rod 16, start the first servo motor 9 to control the hanging frame 13 to move toward the left end of the adsorption plate 18 so that the adsorption plate 18 is flipped to a horizontal state, and the flexible layer is peeled off.

[0024] This solution: the flexible substrate is placed on the upper end of the carrier plate 25, the second vacuum generator 26 is started to adsorb and fix the flexible substrate through the second matrix adsorption holes 28, the laser scanning device 5 is turned on to selectively weaken the interface adhesion between the flexible layer and the rigid layer through the interaction between the laser and the material (photothermal effect or photochemical reaction), and the threshold force required for subsequent mechanical peeling is reduced, the second servo motor 22 is started to control the rotation of the second drive screw 23, the second drive screw 23 and the second slider 27 are threadedly matched and the carrier plate 25 and the second slide groove 24 are slidably connected, the rotational motion of the second drive screw 23 is converted into a linear motion of the carrier plate 25, and then the flexible substrate is carried to move to increase the laser scanning range, so that the entire flexible substrate completes the laser scanning and moves to the lower end of the linear peeling structure, the first electric telescopic rod 12, the second electric telescopic rod 15 and the third electric telescopic rod 16 are synchronously extended so that the adsorption plate 18 remains horizontal and descends to fit the upper end of the flexible layer of the flexible substrate, the first vacuum generator 21 is started to pass The flexible layer is adsorbed through the first matrix adsorption hole 29, and then the U-shaped electromagnet 17 at the lower end of the second electric telescopic rod 15 is closed and the first electric telescopic rod 12 is controlled to rise, one end of the adsorption plate 18 is tilted and the flexible layer is lifted and separated, and the second electric telescopic rod 15 is controlled to carry the U-shaped electromagnet 17 at its lower end to rise, and then the U-shaped electromagnet 17 is turned on to fix the iron block 20 at the right end of the adsorption plate 18 by magnetic adsorption, and then the U-shaped electromagnet 17 at the lower end of the third electric telescopic rod 16 is closed and the first servo motor 9 is controlled to rotate the first driving screw 10, and the first slider 11 and the first driving screw 10 are threadedly matched and the first slider 11 is slidably connected to the slide rod 8, The rotational motion of the first driving screw 10 is converted into the linear motion of the first slider 11, and then the first slider 11 is controlled to carry the first electric telescopic rod 12 and the hanging frame 13 toward the adsorption plate 18 toward its left end, so that the left end of the adsorption plate 18 is lifted until the adsorption plate 18 is in a horizontal state, and the flexible layer is peeled off.

[0025] It should be noted that, in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device.

[0026] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A stripping device for a flexible substrate, characterized in that: include: A bottom frame (1), wherein second slide grooves (24) are provided on both the front and rear sides of the bottom frame (1), a bearing plate (25) is provided inside the bottom frame (1), upright posts (3) are fixedly provided at the four corners of the upper end of the bottom frame (1), and a top frame (4) is fixedly provided at the upper end of the upright posts (3); A laser scanning device (5) is fixedly mounted on the left side of the lower end of the top frame (4); A linear peeling structure is fixedly arranged on the right side of the lower end of the top frame (4), and the linear peeling structure comprises a first side plate (6) and a second side plate (7), and the first side plate (6) and the second side plate (7) are fixedly connected to the top frame (4), a sliding rod (8) is fixedly arranged between the first side plate (6) and the second side plate (7), a first servo motor (9) is fixedly arranged on one side inside the first side plate (6), a first driving screw rod (10) is fixedly arranged at the output end of the first servo motor (9), a first sliding block (11) is installed outside the first driving screw rod (10) and the sliding rod (8), the first sliding block (11) is connected to the first driving screw rod (10) by threaded matching, and the first sliding block (11) is slidably connected to the sliding rod (8); A first electric telescopic rod (12) is fixedly mounted on the lower end of the first sliding block (11); a hanging frame (13) is fixedly mounted on the lower end of the first electric telescopic rod (12); and a sliding plate (14) is fixedly mounted on the lower end of the hanging frame (13); An adsorption plate (18) is arranged at the lower end of the interior of the hanging frame (13), and first slide grooves (19) are provided on both the front and rear sides of the interior of the adsorption plate (18), and the sliding plate (14) is slidably connected to the first slide grooves (19); Iron blocks (20) are fixedly mounted on both ends of the outer side of the adsorption plate (18); A second electric telescopic rod (15) is arranged at the lower end of the first side plate (6); a third electric telescopic rod (16) is arranged at the lower end of the second side plate (7); and a U-shaped electromagnet (17) is fixedly arranged at the lower end of each of the second electric telescopic rod (15) and the third electric telescopic rod (16); The first matrix adsorption holes (29) are opened at the lower end of the adsorption plate (18), and the upper end of the adsorption plate (18) is fixedly provided with a first vacuum generator (21).

2. The stripping device for a flexible substrate according to claim 1, characterized in that: The bearing plate (25) is slidably connected to the second slide groove (24), the first side plate (6) and the second side plate (7) are fixedly connected to the top frame (4), the second electric telescopic rod (15) is fixedly connected to the first side plate (6), and the third electric telescopic rod (16) is fixedly connected to the second side plate (7).

3. The stripping device for a flexible substrate according to claim 1, characterized in that: The upper end of the carrying plate (25) is provided with a second matrix adsorption hole (28), and the lower end of the carrying plate (25) is fixedly provided with a second vacuum generator (26).

4. The stripping device for a flexible substrate according to claim 3, characterized in that: A second sliding block (27) is provided at the lower end of the second vacuum generator (26), and the second sliding block (27) is fixedly connected to the second vacuum generator (26).

5. The stripping device for a flexible substrate according to claim 4, characterized in that: A second servo motor (22) is fixedly disposed at the right inner end of the bottom frame (1), a second drive screw rod (23) is fixedly disposed at the output end of the second servo motor (22), and a second slider (27) is connected to the second drive screw rod (23) via threaded engagement.

6. The stripping device for a flexible substrate according to claim 1, characterized in that: Bottom columns (2) are provided at the four corners of the lower end of the bottom frame (1), and the bottom columns (2) are fixedly connected to the bottom frame (1).

7. A method for stripping a flexible substrate, using a flexible substrate stripping device as claimed in any one of claims 1 to 6, characterized in that: The steps include: Step 1: placing the flexible substrate on the carrier plate (25), and starting the second vacuum generator (26) to adsorb and fix the flexible substrate through the second matrix adsorption holes (28); Step 2: Turn on the laser scanning device (5) to control the carrier plate (25) to move in the direction of the linear peeling structure: Step 3: After the laser scanning of the flexible substrate in step 2 is completed, the carrier plate (25) carries the flexible substrate and moves to the lower end of the linear peeling structure; Step 4: controlling the first electric telescopic rod (12), the second electric telescopic rod (15) and the third electric telescopic rod (16) to lower the adsorption plate (18), and turning on the first vacuum generator (21) to adsorb the flexible layer through the first matrix adsorption holes (29); Step 5: close the U-shaped electromagnet (17) at the lower end of the second electric telescopic rod (15), control the first electric telescopic rod (12) to retract and lift the hanging frame (13) to pull the right end of the adsorption plate (18) up, and control the second electric telescopic rod (15) to raise the U-shaped electromagnet (17) at the lower end of the second electric telescopic rod (15) to the level of the adsorption plate (18); Step 6: Turn on the U-shaped electromagnet (17) at the lower end of the second electric telescopic rod (15), turn off the U-shaped electromagnet (17) at the lower end of the third electric telescopic rod (16), start the first servo motor (9) to control the hanging frame (13) to move toward the left end of the adsorption plate (18), so that the adsorption plate (18) is flipped to a horizontal state, and the flexible layer is peeled off.

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