Coating equipment and coating method

Abstract

The invention discloses coating equipment and a coating method. The rotating piece of the coating equipment is arranged in the coating cavity, the driving piece of the power assembly is connected with the rotating piece, the driving piece can drive the lifting piece in the power assembly to ascend and descend, and the position of the lifting piece relative to the rotating piece can be changed. The substrate is mounted on the carrier, and the carrier is rotatably connected to the lifting part in a turnover manner. The film coating source in the film coating cavity is converted into the film layer on the substrate, the film layer reaches the standard, the lifting piece is controlled to ascend and descend, the distance between the substrate and the film coating source can be changed, the film layer needing to be prepared can be changed, and the deposition efficiency of optical film layers such as a reflecting layer can be improved. At least one substrate is installed on the carrier, and in the same furnace, the carrier is turned over to enable different substrates to deposit film layers. The required film layer can be deposited on the substrate without frequently opening the film coating cavity, and the number of the loadable and prepared substrates is increased in each furnace, so that the production efficiency of the film coating equipment is effectively improved. The problem that the coating efficiency of coating equipment is not high enough is solved to a certain extent.

Description

Technical Field

[0001] This application belongs to the technical field of coating processes, and particularly relates to a coating device and a coating method. Background Art

[0002] Vacuum coating technology, as a technology for generating specific film layers, has a wide range of applications in real production and life. The coating device includes a coating chamber, a rotating member and a coating source installed in the coating chamber, and the rotating member and the coating source are opposite to each other. The rotating member can mount a substrate, and under the action of an electric field or the like, the coating source realizes coating on the substrate.

[0003] Currently, when different thicknesses and different densities of film layers need to be coated on the substrate, the substrate needs to be mounted on the rotating member each time, and the parameters of the coating device need to be adjusted to the corresponding range. During the coating cycle, the utilization rate of the substrate on the rotating member is not high, and each time only the same thickness or density of film layer can be evaporated on the substrate. Different thicknesses or densities of film layers need to be processed in different batches, and the coating efficiency is not high enough. Summary of the Invention

[0004] This application provides a coating device and a coating method, aiming to solve the problem that the coating efficiency of the coating device is not high to at least a certain extent.

[0005] In the first aspect of this application, a coating device is provided, including:

[0006] A coating chamber and a rotating member connected in the coating chamber;

[0007] A coating source disposed in the coating chamber;

[0008] A power assembly, connected to the rotating member, and including a driving member fixed to the rotating member, and a lifting member connected to the driving member and configured to be lifted and lowered by the driving member;

[0009] A carrier, rotatably and flipably connected to the lifting member and opposite to the coating source, and the carrier is used for mounting a substrate.

[0010] In some embodiments, at least one of the two ends of the carrier is connected to the lifting member.

[0011] In some embodiments, at least two of the lifting members are respectively connected to the two ends of the carrier, and the lifting members at both ends can be lifted and lowered synchronously or asynchronously.

[0012] In some embodiments, the coating device further includes:

[0013] A toggling member, fixedly disposed in the coating chamber;

[0014] The matching piece is fixedly connected to the carrier. When the carrier rotates relative to the coating chamber together with the rotating piece, the matching piece contacts the shifting piece to drive the matching piece to turn over the carrier.

[0015] In some embodiments, at least two of the mating parts are respectively located on two axial sides of the carrier along the rotation centerline.

[0016] In some embodiments, the carrier is provided with a placement groove for placing the substrate, and at least two of the placement grooves are respectively located on both sides of the carrier along the axial direction of the rotation centerline.

[0017] In some embodiments, the carrier is provided with two limit ends, the lifting member is provided with at least two protrusions spaced apart from each other, and the two limit ends are respectively located between two different protrusions.

[0018] In some embodiments, the rotating member is provided with a mounting groove penetrating the rotating member, and part of the carrier is located in the mounting groove.

[0019] In some embodiments, the rotating member is plate-shaped, and one of the plate surfaces of the rotating member is opposite to the coating source, and the power assembly is located on the other plate surface of the rotating member away from the coating source.

[0020] In a second aspect of the present application, a coating method is provided, which is implemented by using the coating device as described above, and the coating method comprises:

[0021] Mounting the substrate on the carrier;

[0022] The carrier and the power assembly are controlled to plate film layers with different thicknesses on the substrate.

[0023] Advantageous effects provided by one or more embodiments of the present application:

[0024] The coating chamber can realize the vacuum environment required for coating, and the rotating part is connected in the coating chamber. The driving part of the power assembly is connected to the rotating part, and the driving part can drive the lifting part in the power assembly to rise and fall, and the position of the lifting part relative to the rotating part can change. During the coating process, the substrate can be installed on the carrier, and the carrier can be turned and connected to the lifting part. The coating source is opposite to the carrier, and under the action of external forces such as electric fields, the coating source can be converted into a film layer deposited on the substrate. After the film layer deposited on the substrate reaches the required thickness and density requirements, it is not necessary to open the coating chamber, and directly control the lifting and lowering of the lifting part to change the height of the carrier and the substrate on the carrier relative to the rotating part, that is, change the distance of the substrate relative to the coating source. The distance change will change the thickness and density of the film layer deposited on the substrate within the period, which can improve the deposition efficiency of optical film layers such as reflective layers. At least one substrate can be installed on the carrier, and in the same furnace, the carrier can be turned over to deposit film layers on substrates at different positions on the carrier. The required film layer can be deposited on the substrate without frequently opening the coating chamber, and the number of substrates that can be loaded and prepared in each batch is increased, which effectively improves the production efficiency of the coating equipment and solves the problem of insufficient coating efficiency of the coating equipment to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0026] Figure 1 A simplified structural schematic diagram of a coating device in one or more embodiments of the present application is shown.

[0027] Figure 2 Shows Figure 1 Schematic diagram of the structure of the rotating parts and power components.

[0028] Figure 3 Shows Figure 2 Schematic diagram of the structure of the power components and the vehicle.

[0029] Figure 4 A schematic diagram showing a matching relationship between a toggle member and a matching member is shown.

[0030] Figure 5 A flow chart of a coating method in one or more embodiments of the present application is shown.

[0031] Description of reference numerals: 1. Coating chamber; 2. Rotating member; 21. Mounting groove; 3. Coating source; 4. Power assembly; 41. Driving member; 42. Lifting member; 421. Protruding portion; 422. Protrusion; 5. Carrier; 51. Placing groove; 52. Body; 53. Limiting end; 54. Rotating end; 6. Poking member; 7. Fitting member. Detailed implementation manners

[0032] In order to enable those skilled in the art in the technical field to which the present application pertains to more clearly understand the present application, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0033] Please refer to Figure 1 and Figure 2 , Figure 1 which shows a simplified structural schematic diagram of a coating device in one or more embodiments of the present application, Figure 2 shows Figure 1 the structural schematic diagram of the rotating member and the power assembly in

[0034] The coating chamber 1 can realize the vacuum environment required for coating, and the rotating member 2 is connected in the coating chamber 1. The driving member 41 of the power assembly 4 is connected to the rotating member 2, and the driving member 41 can drive the lifting member 42 to rise and fall, and the position of the lifting member 42 relative to the rotating member 2 can change. During the coating process, the substrate can be mounted on the carrier 5, and the carrier 5 can be turned and connected to the lifting member 42. The coating source 3 is opposite to the carrier 5, and under the action of external forces such as electric fields, the coating source 3 can be converted into a film layer deposited on the substrate. After the film layer deposited on the substrate reaches the required thickness and density requirements, the coating chamber 1 can be opened without opening the coating chamber 1, and the lifting member 42 can be directly controlled to rise and fall to change the height of the carrier 5 and the substrate on the carrier 5 relative to the rotating member 2, that is, the distance of the substrate relative to the coating source 3 is changed. The change in distance will cause the thickness and density of the film layer deposited on the substrate to change during the period, which can improve the deposition efficiency of optical film layers such as reflective layers. At least one substrate can be mounted on the carrier 5. In the same batch, the carrier 5 can be turned over to deposit film layers on substrates at different positions on the carrier 5. The required film layer can be deposited on the substrate without frequently opening the coating chamber 1, and the number of substrates that can be loaded and prepared in each batch is increased, effectively improving the production efficiency of the coating equipment. To a certain extent, the problem of insufficient coating efficiency of the coating equipment is solved.

[0035] It should be noted that the coating principle of the coating equipment in the present application can be evaporation coating, sputtering coating or ion coating, and the coating source 3 can be set as an evaporation source or a sputtering source according to the coating situation, for example, it can be a positive electrode, a negative electrode or a compound required for coating, etc., and the present application does not limit this. The furnace involved in the present application is used to refer to a production cycle or a process flow.

[0036] Figure 3 Shows Figure 2 Schematic diagram of the structure of the power components and the vehicle. Figure 4 A schematic diagram showing a matching relationship between the toggle member and the matching member is shown, referring to Figure 3 and Figure 4 , both ends of the carrier 5 are connected to at least one lifting member 42. The flexibility of lifting the carrier 5 can be increased, and the position of the substrate on the carrier 5 can be adjusted easily.

[0037] In some embodiments, at least two lifting members 42 are rotatably connected to the carrier 5 at intervals. The two lifting members 42 can lift the carrier 5 synchronously or asynchronously, and can control the distance between the carrier 5 and the coating source 3 to change uniformly, ensuring that the thickness of the film deposited on the substrate is relatively uniform. It is also possible to deposit a film layer with a certain inclination on the surface with different thicknesses on the substrate. The present application does not limit this. It should be noted that whether the film layer needs to have a uniform thickness or a certain inclination can be adjusted according to the film layer to be prepared, and can be used to prepare corresponding film layers, etc., such as an isolation layer or a film layer with a certain shape itself.

[0038] In some embodiments, at least two lifting members 42 are respectively connected to both ends of the carrier 5, and the lifting members 42 located at both ends of the carrier 5 can be lifted synchronously or asynchronously. This is beneficial for adjusting the height and angle of the carrier 5 for preparing film layers with different requirements.

[0039] In some embodiments, at least two driving members 41 can be connected to the lifting member 42 at intervals. At least two driving members 41 are connected to the lifting member 42 at intervals, and each driving member 41 can drive the lifting member 42 to have a certain height difference, so that the position of the carrier 5 connected to the lifting member 42 can also be adjusted accordingly, which is beneficial for more precise adjustment of the positions of the carrier 5 and the substrate.

[0040] In some embodiments, the lifting member 42 can be plate-shaped, at least two lifting members 42 are arranged side by side, and one driving member 41 can be respectively connected to both ends or both sides in the length direction or width direction of the lifting member 42. The carrier 5 is rotatably connected to the middle of at least two lifting members 42. The driving members 41 on the same side of at least two lifting members 42 can move synchronously, while the driving members 41 on the other side of the lifting member 42 do not control the lifting of the lifting member 42, which can realize the inclination of the carrier 5. It is also possible that the driving members 41 on both sides or both ends of the lifting member 42 move synchronously to make the distance between the lifting member 42 and the carrier 5 and the coating source 3 move uniformly. This is convenient for implementation and control.

[0041] In some embodiments, the carrier 5 can be cube-shaped, two lifting members 42 can be provided, four driving members 41 can be provided, and the lifting members 42 are respectively located on both sides of the carrier 5. The four driving members 41 are connected to the lifting members 42 in pairs, and the four driving members 41 are distributed at the four corners of the carrier 5. This is convenient for implementation and for adjusting the positions of the lifting member 42 and the carrier 5.

[0042] In some embodiments, the driving member 41 may be a cylinder, a rack and pinion lifting mechanism, a telescopic rod, or other mechanisms. Correspondingly, the base, bracket, rack or gear, or one end of the rod in the driving member 41 is connected to the rotating member 2, and the corresponding push rod, the other end of the rod, or the corresponding rack and gear is connected to the lifting member 42. When the push rod or the telescopic rod rack moves or rotates, the lifting of the lifting member 42 can be achieved. The driving member 41 can also be a linear motor, etc., and the present application does not limit this.

[0043] Combined with Figures 1-4 , in some embodiments, the coating device further includes a toggling member 6 and a mating member 7. The toggling member 6 is fixedly connected inside the coating chamber 1, and the mating member 7 is fixedly connected to the carrier 5. Under the condition that the carrier 5 rotates relative to the coating chamber 1 together with the rotating member 2, the mating member 7 contacts the toggling member 6 to drive the mating member 7 to drive the carrier 5 to flip.

[0044] The toggling member 6 and the mating member 7 can cooperate. When the rotating member 2 needs to rotate relative to the coating chamber 1 to ensure that the coating source 3 uniformly contacts the substrate, when the rotating member 2 rotates one week, the mating member 7 on the carrier 5 can meet the toggling member 6 to interact. The toggling member 6 in the coating chamber 1 exerts a force on the mating member 7, so that the mating member 7 and the carrier 5 can flip one circle. The uncoated substrate replaces the substrate that has been coated with a part of the film and faces the coating source 3 for coating. The coated substrate can release certain stress, which is beneficial to improving the quality of the obtained film layer. It can also improve the coating efficiency of the coating device without frequently adjusting relevant parameters such as the lifting member 42.

[0045] It should be noted that Figure 4 is only used to illustrate the process of the cooperation and flipping of a certain carrier 5 and its corresponding mating member 7 and toggling member 6 in the coating device. Other mounting grooves 21 on the coating source 3, coating chamber 1, power assembly 4, and rotating member 2 are omitted. Figure 4 The upper figure above is the state when the mating member 7 just contacts the toggling member 6, Figure 4 The lower figure below is a schematic diagram of a certain stage during the flipping process of the mating member 7 and the carrier 5.

[0046] In some embodiments, at least two mating members 7 are respectively located on both axial sides of the carrier 5 along the rotation center line. This can facilitate the stable multiple flipping of the carrier 5, and the vibration of the carrier 5 is also small. Substrates can be installed on both sides of the carrier 5. When the rotating member 2 rotates one cycle, the carrier 5 makes one flip. The quality of the film layer on the substrate is better and more uniform. In the coating device, the mating member 7 can also be two, and the two mating members 7 are respectively located on both axial sides of the carrier 5 along the rotation center line.

[0047] In some embodiments, the toggling member 6 can be located on one of the two sides of the rotation center line of the rotating member 2.

[0048] The matching piece 7 is fixedly connected to the carrier 5 and protrudes from the rotating part 2 along the axial direction of the rotation center line. As the rotating part 2 rotates, the matching piece 7 contacts the toggle piece 6. The force exerted by the toggle piece 6 on the matching piece 7 generates a torque relative to the rotation center of the matching piece 7 and the carrier 5, so that the matching piece 7 and the carrier 5 tend to rotate relative to the rotating part 2 along the axial direction of the rotation center line. Superimposed with the displacement generated by the continuous rotation of the rotating part 2, the matching piece 7 and the carrier 5 can be flipped relative to the rotating part 2, and the matching piece 7 and the toggle piece 6 can be separated after flipping. It is easy to prepare and has low energy consumption.

[0049] In some embodiments, the toggle member 6 may also be configured to be in a plate shape, a strip shape, etc. A driving member 41 such as a telescopic cylinder may also be provided in the coating device to push the carrier 5 to flip. This application does not limit this.

[0050] In some embodiments, the carrier 5 is provided with placement grooves 51 for placing the substrate, and at least two placement grooves 51 are respectively located on both sides of the axial direction of the rotation center line of the carrier 5. The placement grooves 51 can facilitate the connection and installation of the substrate without taking up much space.

[0051] In some embodiments, the carrier 5 may be formed by hingedly connecting two bodies 52, which may be box-shaped, spherical, or box-shaped when the two bodies 52 are rotated and closed, and the present application does not limit this. The placement groove 51 may penetrate the carrier, the substrate is located in the carrier 5, and the part to be coated is exposed in the placement groove 51. The above structure of the carrier 5 can facilitate the placement and connection of the substrate, and can also make the coating area clearer, which is convenient for subsequent processing.

[0052] In some embodiments, the carrier 5 may also be configured as a block, and the substrate may be adhered or connected to the carrier 5 by fasteners, etc. This application does not limit this.

[0053] In some embodiments, the carrier 5 is provided with two limiting ends 53, and the lifting member 42 is provided with at least two mutually spaced protrusions 421, and the two limiting ends 53 are respectively located between two different protrusions 421. The two limiting ends 53 of the carrier 5 cooperate with the spaced protrusions 421 on the lifting member 42 to limit the carrier 5 and prevent shaking, and will not affect the flipping of the carrier 5. After flipping, the carrier 5 is still limited by the protrusions 421. The shaking of the carrier 5 is effectively prevented, and the quality of the obtained film layer is improved.

[0054] In some embodiments, there are at least two lifting members 42, and the lifting members 42 are arranged side by side. The carrier 5 may include a body 52 and a columnar limiting end 53. The carrier 5 is further provided with a columnar rotating end 54 spaced from the limiting end 53. The axes of the limiting end 53 and the rotating end 54 both extend in the same direction. The rotating end 54 and the limiting end 53 cooperate with different lifting members 42. The lifting member 42 cooperating with the rotating end 54 is provided with two spaced bumps 422. The rotating end can be rotatably inserted between the two bumps 422. The lifting member 42 is further provided with a cover plate 423 covering the two bumps 422, and the cover plate 423 is fixedly connected to the bumps 422. This can make the rotation of the carrier 5 more stable.

[0055] In some embodiments, the rotating end 54 can also be directly inserted into the through groove provided in the lifting member 42 for rotational connection. The present application does not limit this.

[0056] In some embodiments, the rotating member 2 is provided with an installation groove 21 penetrating the rotating member 2, and a part of the carrier 5 is located in the installation groove 21. This can reduce the overall space required for the carrier 5 to flip, and also facilitate the substrate on the carrier 5 relative to the coating source 3.

[0057] In some embodiments, the rotating member 2 is in a plate shape, and one of the plate surfaces of the rotating member 2 faces the coating source 3, and the power assembly 4 is located on the other plate surface of the rotating member 2 away from the coating source 3. This is convenient for installation, and can ensure that the coating source 3 mainly acts on the substrate on the carrier 5, which is beneficial to improving the coating efficiency.

[0058] In some embodiments, a plurality of power assemblies 4 and the carrier 5 are spaced apart and connected to the rotating member 2, and the rotating member 2 is provided with an installation groove 21 corresponding to each carrier 5. This is beneficial to improving the coating efficiency and thus improving the production efficiency of the coating equipment. Only one power assembly 4 and the carrier 5 installed on the rotating member 2 are schematically shown in the drawings for illustration only. The power assembly 4 and the carrier 5 can also be provided in multiple numbers.

[0059] It should be noted that the coating chamber 1 can actually be an openable chamber, such as an openable space formed in a box or a case or a bottle, so it will not be elaborated here.

[0060] Figure 5 The flowchart of the coating method in one or more embodiments of the present application is shown. Refer to Figure 5 , in the second aspect of the present application, a coating method is provided, which is implemented by using the coating equipment as described above. The coating method includes:

[0061] S101: Install the substrate on the carrier.

[0062] S102: Control the carrier and the power assembly to deposit film layers with different thicknesses on the substrate.

[0063] The technical effects of the coating method can be referred to the technical effects of the foregoing coating equipment, which will not be elaborated here.

[0064] In step S102 of some embodiments, within the period when the rotating member rotates one week, the thickness of the film layer formed on the substrate decreases as the distance between the carrier and the coating source increases, and the density of the film layer formed on the substrate decreases as the distance between the carrier and the coating source increases. The carrier and the power assembly can be adjusted according to the content in this paragraph.

[0065] In some embodiments, the coating method can be used to prepare an optical film layer. The coating principle of the coating equipment can be evaporation coating. Then, the height and angle between the evaporation source and the substrate can be adjusted to control different film layer thicknesses, so as to adapt to different wavelength and reflectivity requirements, enabling products with different wavelengths and different reflectivity requirements to be coated in the same furnace. The preparation efficiency of the optical film layer is improved.

[0066] For ease of understanding, some embodiments are provided here. For example, in the optical coating process, products with wavelengths of 920 nm, 945 nm, and 980 nm need to be produced, and each product needs to be coated on both sides. When evaporating one side and the requirement is a single-layer film, 145 nm of aluminum oxide needs to be evaporated for 945 nm. Then, for the 920 nm and 980 nm products, the height and angle of their respective substrate carriers can be appropriately adjusted so that the thickness of the aluminum oxide actually evaporated onto the 920 nm and 980 nm jigs can meet the requirements of their respective wavelengths. When evaporating the other side, it can be achieved by automatic flipping in the chamber or manual flipping by opening the chamber. When evaporating multiple layers of film, the above-mentioned device and method can also be used to achieve it. The present application does not limit this.

[0067] In this application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may include the first and second features being in direct contact, or may also include the first and second features not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0068] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.

[0069] In the present application, unless otherwise clearly defined and limited, the terms "connection", "fixation", etc. shall be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0070] In addition, in the present application, the descriptions such as "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second" may explicitly or implicitly include one or more features. In the description of the present application, the meaning of "a plurality" is two or more unless otherwise clearly and specifically defined.

[0071] Although the embodiments of the present application have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present application. The scope of the present application is defined by the claims and their equivalents.

Claims

1. A coating device, characterized in that, Comprising: Coating chamber; Rotating member, rotatably connected within the coating chamber; Coating source, disposed within the coating chamber; Power assembly, arranged within the coating chamber, including a driving member fixed to the rotating member, and a lifting member connected to the driving member and configured to be driven by the driving member to lift and lower; Carrier, rotatably and flip-connectably connected to the lifting member and opposite to the coating source, the carrier being for mounting a substrate.

2. The coating device according to claim 1, wherein At least two ends of the carrier are connected to at least one of the lifting members.

3. The coating equipment according to claim 1, characterized in that, At least two of the lifting members are respectively connected to two ends of the carrier, and the lifting members at both ends can be lifted and lowered synchronously or asynchronously.

4. The coating device according to any one of claims 1 to 3, characterized in that The coating equipment further includes: Poking member, fixedly arranged within the coating chamber; Fitting member, fixedly connected to the carrier, under the condition that the carrier rotates relative to the coating chamber together with the rotating member, the fitting member contacts the poking member to drive the fitting member to drive the carrier to flip.

5. The coating device according to claim 4, characterized in that At least two of the fitting members are respectively located on two axial sides of the carrier along the rotation center line.

6. The coating equipment according to claim 4, characterized in that The carrier is provided with a placement groove for placing the substrate, and at least two of the placement grooves are respectively located on two axial sides of the carrier along the rotation center line.

7. The coating device according to any one of claims 1 to 3, characterized in that, The carrier is provided with two limiting ends, and the lifting member is provided with at least two spaced protruding portions, and the two limiting ends are respectively located between two different protruding portions.

8. The coating device according to any one of claims 1 to 3, characterized in that The rotating member is provided with a mounting groove penetrating through the rotating member, and a part of the carrier is located within the mounting groove.

9. The coating device according to any one of claims 1 to 3, characterized in that, The rotating member is in a plate shape, and one of the plate surfaces of the rotating member is opposite to the coating source, and the power assembly is located on the other plate surface of the rotating member away from the coating source.

10. A coating method, characterized in that, Implemented by using the coating equipment according to any one of claims 1 to 9, the coating method includes: Mounting the substrate onto the carrier; Controlling the carrier and the power assembly to deposit film layers with different thicknesses on the substrate.

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