Anti-blocking gas spray header

Abstract

The invention relates to the field of semiconductor processing, in particular to an anti-clogging gas spray header which comprises a gas spray disc, a preliminary mixing assembly, a reinforced mixing assembly, a temperature control assembly and a collection and treatment assembly, a plurality of gas outlet holes are formed in the lower end of the gas spray disc, and before multiple reaction gas sources participate in processing, the gas outlet holes are formed in the gas spray disc; multiple gas sources are fully mixed in the reaction assembly pipe through the preliminary mixing assembly and the reinforced mixing assembly, heat is fully released during mixing, and then the heat generated by the temperature control assembly is effectively treated in the reaction assembly pipe through the temperature control assembly. The mixed processing gas is in a stable state and is sprayed out of the gas spraying disc, so that the problem of blockage possibly caused by the fact that the interior of the gas spraying disc is at high temperature for a long time is solved, and then the condensate water of the mixed gas which possibly generates the condensate water is independently collected and discharged through the collecting and processing assembly; and the phenomenon that condensate water blocks the air holes is avoided while the use of the air is not influenced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing, and specifically to an anti-clogging gas showerhead. Background Art

[0002] In the semiconductor industry, when preparing semiconductor products, it is often necessary to form a required film or crystal structure on the semiconductor material through a vapor growth technique. When performing vapor growth processing, one or more gas mixtures participating in the reaction need to be evenly delivered into the process chamber through a gas showerhead; When the existing gas showerheads for semiconductor vapor growth are in use, a variety of reaction gases are mixed into a uniform composite gas inside them, and then evenly ejected through a number of small holes below the gas showerhead. However, when a variety of gases are mixed inside the gas showerhead, the molecules are in constant thermal motion and they collide frequently. In a semiconductor vapor growth system, the gases are usually transported and reacted under a certain pressure and flow rate, and the collision frequency between molecules is higher, thus increasing the temperature of the mixed gas. When the temperature inside the gas showerhead is high for a long time, internal material peeling may occur, resulting in clogging of the outlet small holes. In addition, when the gas participating in the reaction is a high-boiling metal organic compound, when it is transported from a high-temperature gas source to a relatively low-temperature showerhead area, it may cool and condense into a liquid or solid, which will also clog the outlet small holes. Summary of the Invention

[0003] The purpose of the present invention is to provide an anti-clogging gas showerhead to solve the problems raised in the above background art.

[0004] To achieve the above purpose, the present invention provides the following technical solution: An anti-clogging gas showerhead, comprising: A gas showering disc, the lower end of the gas showering disc is provided with a number of air outlet holes, the center of the upper end of the gas showering disc is connected and communicated with an installation cylinder, and a reaction assembly tube is hermetically inserted into the installation cylinder through threads, and a porous interface is provided at the upper end of the reaction assembly tube; A preliminary mixing assembly, the preliminary mixing assembly is arranged at the upper end inside the reaction assembly tube, and the preliminary mixing assembly includes a conical mixing cavity and a number of spiral gas pipes; A strengthening mixing assembly, the strengthening mixing assembly is inserted into the reaction assembly tube and placed at the lower end inside the installation cylinder, and the strengthening mixing assembly includes a strengthening mixing seat, a central connection tube is vertically arranged at the center of the strengthening mixing seat, and a mixing cavity is vertically opened between the upper end of the strengthening mixing seat and the central connection tube; A temperature control assembly, the temperature control assembly includes a first refrigerant tank, a second refrigerant tank and a third refrigerant tank, the first refrigerant tank and the second refrigerant tank are opened in the strengthening mixing seat, and the third refrigerant tank is opened on one side of the reaction assembly tube close to the conical mixing cavity; A collection and processing component is provided at the lower end of the reaction assembly tube placed inside the installation cylinder. The collection and processing component includes a collection cylinder. A collection ball groove is provided at the lower end of the collection cylinder, and the lower end of the central connection tube is inserted into the collection ball groove.

[0005] Preferably, a number of commutation air grooves are symmetrically opened at the upper end of the reaction assembly tube located in the conical mixing chamber. Spiral air pipes are connected and communicated on one side of the commutation air grooves in the conical mixing chamber. The upper end of the conical mixing chamber is of a cylindrical groove structure, and the lower end is of a conical structure. The sides of the spiral air pipes are all in contact with the inner side wall of the conical mixing chamber, and reaction gas source connection grooves are opened through the porous interfaces in the commutation air grooves.

[0006] Preferably, an assembly groove is opened at the lower end of the reaction assembly tube. The upper end of the enhanced mixing seat is inserted into the assembly groove and fixedly connected by a number of bolts. The upper end of the central connection tube is vertically inserted into the conical mixing chamber, and the diameter of the lower end in the conical mixing chamber is larger than the diameter of the central connection tube.

[0007] Preferably, a refrigerant input groove is centrally connected to the conical mixing chamber in the porous interface. A conical docking groove is provided at the lower end of the refrigerant input groove. The upper end of the central connection tube is inserted into the conical docking groove by pressing with a sealing ring.

[0008] Preferably, the lower end in the conical mixing chamber corresponds to the mixing chamber of the enhanced mixing seat. Conical diversion grooves, commutation diversion grooves, first arc-shaped flow disturbance grooves and second arc-shaped flow disturbance grooves are successively provided on both sides in the mixing chamber of the enhanced mixing seat from top to bottom. The conical diversion groove and the first arc-shaped flow disturbance groove are connected by a partition at intervals. The commutation diversion groove and the second arc-shaped flow disturbance groove are connected by a partition at intervals, and the two partitions are arranged in a staggered manner.

[0009] Preferably, a number of mixing through grooves are penetrated and opened at the lower end in the mixing chamber of the enhanced mixing seat. The first refrigerant groove is opened at the center inside the enhanced mixing seat, and the second refrigerant groove is opened at the outer peripheral side close to the mixing chamber inside the enhanced mixing seat. The heat absorbed by the commutation diversion groove and the second arc-shaped flow disturbance groove can be transferred to the first refrigerant groove. The heat absorbed by the conical diversion groove and the first arc-shaped flow disturbance groove can be transferred to the second refrigerant groove. A number of staggered connection grooves are horizontally connected and opened at the lower ends of the first refrigerant groove and the second refrigerant groove. The number of staggered connection grooves and the number of mixing through grooves are arranged in a staggered manner. The upper and lower ends of the central connection tube are respectively connected and communicated with the refrigerant input groove and the first refrigerant groove.

[0010] Preferably, the upper end of the second refrigerant tank penetrates through the enhanced mixing seat. An annular docking groove is provided at the upper end inside the assembly groove of the reaction assembly pipe. The upper end of the annular docking groove communicates with the third refrigerant tank. The side of the enhanced mixing seat provided with the second refrigerant tank is hermetically plugged into the annular docking groove by annular pressing with an annular sealing ring. An annular discharge groove is provided at the upper end of the reaction assembly pipe inside the third refrigerant tank. The upper end of the annular discharge groove penetrates through the reaction assembly pipe and is provided with a circulation discharge joint.

[0011] Preferably, a threaded connection ring is provided at the lower end of the reaction assembly pipe. A threaded connection sleeve is sleeved on the outer peripheral side of the threaded connection ring through threads. A tubular ceramic inorganic membrane is provided at the lower end of the threaded connection sleeve. The upper end of the collection cylinder is threadedly inserted into the inner peripheral side of the threaded connection ring. The lower end of the enhanced mixing seat is inserted into the upper end inside the collection cylinder.

[0012] Preferably, a plurality of commutation air holes are obliquely opened inward on the outer peripheral side of the collection cylinder, and the tubular ceramic inorganic membrane is sleeved and attached to the outer peripheral side of the collection cylinder.

[0013] Preferably, a lifting relief groove is provided in the inner cavity of the central connection pipe placed in the collection ball groove. The inner diameter of the lifting relief groove is larger than the inner diameter of the central connection pipe. A spring partition plate is horizontally provided in the lifting relief groove through a support rod. A downward pressure spring is provided at the lower end of the spring partition plate. An anti - detachment plate is provided at the lower end of the downward pressure spring. A piston rod is provided at the center of the lower end of the anti - detachment plate. The piston rod is vertically and movably inserted into the inner cavity of the central connection pipe. The length of the piston rod is greater than the length of the downward pressure spring. An extension rod is provided at the center of the lower end of the piston rod. The extension rod extends out of the central connection pipe and is provided with a sealed ball head. A sealed ball groove is provided at the center of the lower end inside the collection ball groove. The sealed ball head is inserted into the sealed ball groove. A transfer groove is provided at the center of the piston rod. A plurality of suction holes are provided through the outer peripheral side of the piston rod in the transfer groove. And a suction groove is provided at the center of the sealed ball head communicating with the transfer groove.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: Before multiple reaction gas sources participate in processing, in the reaction assembly pipe, multi - gas sources are fully mixed through the preliminary mixing component and the enhanced mixing component. And during the mixing process, heat is fully released. Then, through the temperature control component, the generated heat is effectively processed in the reaction assembly pipe, so that the mixed processing gas is sprayed out from the gas spray tray in a stable state, avoiding the possible blockage problem caused by long - term high temperature inside the gas spray tray. Then, through the collection and treatment component, the condensate water in the mixed gas that may generate condensate water is independently collected and discharged, without affecting the use of the gas and without the phenomenon of condensate water blocking the air holes. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the first perspective of the structure of the present invention; Figure 2Schematic diagram of the second perspective of the structure of the present invention; Figure 3 Schematic diagram of the side-sectional structure of the present invention; Figure 4 For the present invention Figure 3 Schematic diagram of part A; Figure 5 For the present invention Figure 4 Schematic diagram of part B; Figure 6 For the present invention Figure 3 Schematic diagram of part C; Figure 7 For the present invention Figure 6 Schematic diagram of part D; Figure 8 For the present invention Figure 3 Schematic diagram of part E; Figure 9 For the present invention Figure 8 Schematic diagram of part F; Figure 10 Schematic diagram of the split structure of the reaction assembly tube and the enhanced mixing seat of the present invention; Figure 11 For the present invention Figure 10 Schematic diagram of part G; Figure 12 Schematic diagram of the split structure of the collection cylinder and the tubular ceramic inorganic membrane of the present invention.

[0016] In the figure: gas spray tray 1, installation cylinder 2, reaction assembly tube 3, porous interface 4, conical mixing chamber 5, reaction gas source connection groove 6, commutation gas groove 7, spiral gas pipe 8, enhanced mixing seat 9, central connection pipe 10, conical diversion groove 11, commutation diversion groove 12, first arc-shaped flow disturbance groove 13, second arc-shaped flow disturbance groove 14, mixing through groove 15, threaded connection ring 16, collection cylinder 17, threaded connection sleeve 18, tubular ceramic inorganic membrane 19, commutation air hole 20, first refrigerant groove 21, second refrigerant groove 22, misaligned connection groove 23, annular docking groove 24, third refrigerant groove 25, annular discharge groove 26, refrigerant input groove 27, circulation discharge joint 28, collection ball groove 29, lifting relief groove 30, piston rod 31, anti-disengagement plate 32, spring partition plate 33, downward pressure spring 34, sealing ball groove 35, sealing ball head 36, suction groove 37, suction hole 38. Specific embodiments

[0017] In order to clearly and completely describe the objectives, technical solutions of the present invention and make the advantages more clearly understood, the following further elaborates on the embodiments of the present invention with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, rather than all of the embodiments, and are only used to explain the embodiments of the present invention, not to limit the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

[0018] Please refer to Figures 1 - 12 , the present invention provides the following technical solutions: Embodiment 1: An anti-blocking gas spray head, comprising a gas spray disc 1 and a preliminary mixing assembly. A plurality of air outlet holes are provided at the lower end of the gas spray disc 1. The center of the upper end of the gas spray disc 1 is connected and communicated with an installation cylinder 2. A reaction assembly pipe 3 is hermetically inserted into the installation cylinder 2 through threads. A porous interface 4 is provided at the upper end of the reaction assembly pipe 3. The reaction assembly pipe 3 can be detachably connected to the installation cylinder 2 through threads, which is convenient for later replacement or position adjustment. The sealing method is a threaded cooperation with a sealing film. The installation cylinder 2 and the gas spray disc 1 are fixedly arranged by welding.

[0019] The preliminary mixing assembly is arranged at the upper end inside the reaction assembly pipe 3. The preliminary mixing assembly includes a conical mixing cavity 5 and a plurality of spiral gas pipes 8. A plurality of reversing gas grooves 7 are symmetrically opened at the upper end of the reaction assembly pipe 3 where it is located above the conical mixing cavity 5. Spiral gas pipes 8 are connected and communicated with the conical mixing cavity 5 on one side of the reversing gas grooves 7. The upper end of the conical mixing cavity 5 is a cylindrical groove structure, and the lower end is a conical structure. The sides of the spiral gas pipes 8 are all in contact with the inner side wall of the conical mixing cavity 5. And reaction gas source connection grooves 6 are provided through the porous interface 4 in the reversing gas grooves 7. According to the number of gases required to participate in the reaction, a reaction assembly pipe 3 with a corresponding number of reaction gas source connection grooves 6 and spiral gas pipes 8 is selected. When a variety of gases participating in the reaction enter the reaction gas source connection grooves 6 under high pressure, they enter the spiral gas pipes 8 through the reversing gas grooves 7, causing a change in the gas flow direction, so that the multiple gas flows spiral along the inner wall of the conical mixing cavity 5 in the conical mixing cavity 5, and under the converging action of the conical surface, they are preliminarily mixed.

[0020] An enhanced mixing component is provided to further enhance the mixing of the reaction gas after preliminary mixing. The enhanced mixing component is inserted into the lower end of the reaction assembly tube 3 placed in the installation cylinder 2. The enhanced mixing component includes an enhanced mixing seat 9. A central connecting tube 10 is vertically provided at the center of the enhanced mixing seat 9. A mixing cavity is vertically opened between the upper end of the enhanced mixing seat 9 and the central connecting tube 10. An assembly groove is opened at the lower end of the reaction assembly tube 3. The upper end of the enhanced mixing seat 9 is inserted into the assembly groove and fixedly connected by a plurality of bolts. The upper end of the central connecting tube 10 is vertically inserted into the conical mixing cavity 5, and the diameter of the lower end in the conical mixing cavity 5 is larger than the diameter of the central connecting tube 10. The enhanced mixing seat 9 and the reaction assembly tube 3 are detachably connected. When the enhanced mixing seat 9 is contaminated or damaged, it can be quickly replaced. The gas after preliminary mixing enters the mixing cavity of the enhanced mixing seat 9 for full contact.

[0021] A temperature control component is provided to control the temperature of the heating phenomenon generated by the gas mixing in the conical mixing cavity 5 and the enhanced mixing seat 9, so as to prevent the part of the gas spray tray 1 in contact with the gas from being in a high temperature state for a long time. The temperature control component includes a first refrigerant tank 21, a second refrigerant tank 22 and a third refrigerant tank 25. The first refrigerant tank 21 and the second refrigerant tank 22 are opened in the enhanced mixing seat 9. The third refrigerant tank 25 is opened on one side of the reaction assembly tube 3 close to the conical mixing cavity 5. The lower end in the conical mixing cavity 5 is correspondingly arranged with the mixing cavity of the enhanced mixing seat 9. On both sides of the mixing cavity of the enhanced mixing seat 9, conical diversion grooves 11, reversing diversion grooves 12, first arc-shaped flow disturbance grooves 13 and second arc-shaped flow disturbance grooves 14 are successively arranged from top to bottom. The conical diversion groove 11 and the first arc-shaped flow disturbance groove 13 are connected by a partition at intervals. The reversing diversion groove 12 and the second arc-shaped flow disturbance groove 14 are connected by a partition at intervals, and the two partitions are arranged in a staggered manner. A plurality of mixing through grooves 15 are vertically opened at the lower end of the mixing cavity of the enhanced mixing seat 9. The first refrigerant tank 21 is opened at the center in the enhanced mixing seat 9. The second refrigerant tank 22 is opened on the outer peripheral side of the enhanced mixing seat 9 close to the mixing cavity. The heat absorbed by the reversing diversion groove 12 and the second arc-shaped flow disturbance groove 14 can be transferred to the first refrigerant tank 21. The heat absorbed by the conical diversion groove 11 and the first arc-shaped flow disturbance groove 13 can be transferred to the second refrigerant tank 22. The conical diversion groove 11, the reversing diversion groove 12, the first arc-shaped flow disturbance groove 13 and the second arc-shaped flow disturbance groove 14 can cause the gas entering the enhanced mixing seat 9 from the conical mixing cavity 5 to have a flow disturbance, realizing repeated contact and collision of various gases inside it, and then discharging from the mixing through grooves 15; When a cold source substance is fed into the first refrigerant tank 21, the second refrigerant tank 22 and the third refrigerant tank 25, the heat of the conical diversion groove 11, the reversing diversion groove 12, the first arc-shaped flow disturbance groove 13, the second arc-shaped flow disturbance groove 14 and the side wall of the conical mixing cavity 5 can be respectively controlled. When the temperature is high, it can be cooled down, and when the temperature is low, it can be heated up.

[0022] A number of misaligned connection slots 23 are horizontally connected and opened at the lower end inside the first refrigerant tank 21 and the lower end inside the second refrigerant tank 22. The number of misaligned connection slots 23 is arranged in a misaligned manner with the number of mixing and permeating slots 15. A refrigerant input slot 27 is opened at the center of the porous interface 4 and communicates with the conical mixing cavity 5. A conical docking slot is provided at the lower end of the refrigerant input slot 27. The upper end of the central connection pipe 10 is tightly inserted into the conical docking slot through a sealing ring. The central connection pipe 10 communicates the refrigerant input slot 27 and the first refrigerant tank 21. The refrigerant input slot 27 is externally connected to a refrigerant substance. The upper end of the second refrigerant tank 22 penetrates through the enhanced mixing seat 9. An annular docking slot 24 is opened at the upper end inside the assembly slot of the reaction assembly pipe 3. The upper end of the annular docking slot 24 communicates with the third refrigerant tank 25. The side of the enhanced mixing seat 9 where the second refrigerant tank 22 is located is tightly sealed and inserted into the annular docking slot 24 through an annular sealing ring. An annular discharge slot 26 is provided at the upper end of the reaction assembly pipe 3 inside the third refrigerant tank 25. The upper end of the annular discharge slot 26 penetrates through the reaction assembly pipe 3 and is provided with a circulation discharge joint 28. When the refrigerant substance enters the refrigerant input slot 27, it enters the first refrigerant tank 21 through the central connection pipe 10, and then enters the second refrigerant tank 22 from the misaligned connection slots 23. After the refrigerant substance entering the second refrigerant tank 22 controls the temperatures of the conical diversion slot 11, the flow direction changing diversion slot 12, the first arc-shaped flow disturbing slot 13, and the second arc-shaped flow disturbing slot 14, it enters the third refrigerant tank 25 through the annular docking slot 24 to control the temperature inside the conical mixing cavity 5, and finally is discharged from the circulation discharge joint 28 for circulation; The gas that has undergone preliminary mixing and enhanced mixing enters the gas spray tray 1 and is blown towards the process chamber through the air outlet holes to participate in the vapor-phase growth processing of semiconductors.

[0023] Embodiment 2: On the basis of Embodiment 1, a collection and treatment component is provided to collect condensed water from the high-boiling-point metal organic compound gas that may generate condensed water vapor and discharge it at a selected time. The collection and treatment component is arranged at the lower end of the reaction assembly tube 3 placed in the installation cylinder 2. The collection and treatment component includes a collection cylinder 17. A collection ball groove 29 is provided at the lower end of the collection cylinder 17, and the lower end of the central connection tube 10 is inserted into the collection ball groove 29. A threaded connection ring 16 is provided at the lower end of the reaction assembly tube 3. A threaded connection sleeve 18 is sleeved on the outer peripheral side of the threaded connection ring 16 through threads. A tubular ceramic inorganic membrane 19 is provided at the lower end of the threaded connection sleeve 18. The upper end of the collection cylinder 17 is inserted into the inner peripheral side of the threaded connection ring 16 through threads. The lower end of the enhanced mixing seat 9 is inserted into the upper end of the collection cylinder 17. A plurality of diversion air holes 20 are obliquely opened inward on the outer peripheral side of the collection cylinder 17, and the tubular ceramic inorganic membrane 19 is sleeved and attached to the outer peripheral side of the collection cylinder 17. When the high-boiling-point metal organic compound gas enters the conical mixing cavity 5 and the enhanced mixing seat 9, if condensed water is generated, it can be dripped into the collection ball groove 29 of the collection cylinder 17 through the mixing and permeating groove 15 for collection. During this period, the mixed gas can be blown out through the inclined diversion air holes 20 to prevent the condensed water droplets from falling off the collection cylinder 17 and the collection ball groove 29; The setting of the tubular ceramic inorganic membrane 19 can further enhance the filtration of internal particles of the mixed gas to prevent blockage of the air outlet holes of the gas spraying disc 1. Similarly, when the gas fed into the conical mixing cavity 5 is a non-condensable gas, the tubular ceramic inorganic membrane 19 can also be used to further enhance the filtration of it.

[0024] The inner cavity of the central connection pipe 10 placed in the collection ball groove 29 is provided with a lifting relief groove 30. The inner diameter of the lifting relief groove 30 is larger than that of the central connection pipe 10. A spring partition plate 33 is horizontally arranged in the lifting relief groove 30 through a support rod. A downward pressure spring 34 is arranged at the lower end of the spring partition plate 33. An anti - detachment plate 32 is arranged at the lower end of the downward pressure spring 34. A piston rod 31 is arranged at the center of the lower end of the anti - detachment plate 32. The piston rod 31 is vertically and movably inserted into the inner cavity of the central connection pipe 10. The length of the piston rod 31 is larger than that of the downward pressure spring 34. An extension rod is arranged at the center of the lower end of the piston rod 31. The extension rod extends out of the central connection pipe 10 and is provided with a sealing ball head 36. A sealing ball groove 35 is opened at the center of the lower end in the collection ball groove 29. The sealing ball head 36 is inserted into the sealing ball groove 35. A transfer groove is opened at the center of the piston rod 31. A number of suction holes 38 are opened through the outer peripheral side of the piston rod 31 in the transfer groove. And a suction groove 37 is opened at the center of the sealing ball head 36 communicating with the transfer groove. When the refrigerant input groove 27 sends refrigerant substances into the central connection pipe 10, the piston rod 31 is always blocked by the downward pressure of the downward pressure spring 34 and in cooperation with the pressure of the incoming refrigerant, and always blocks the suction holes 38. When it is necessary to discharge the condensed water accumulated at the bottom of the collection ball groove 29, the circulation discharge joint 28 is blocked, and then the negative pressure suction device is connected to the refrigerant input groove 27. Under the action of high negative pressure, the piston rod 31 compresses the downward pressure spring 34 and rises. At this time, the suction holes 38 are connected to the lifting relief groove 30. The condensed water at the bottom of the collection ball groove 29 can be sucked and lifted through the suction groove 37, and discharged through the central connection pipe 10 and the refrigerant input groove 27. Since the water vapor content in the origin is less, it can be processed according to the customized cycle according to the gas source used. It can also be processed by directly disassembling the reaction assembly pipe 3 and replacing the collection cylinder 17.

[0025] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made in these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An anti-clogging gas shower head, characterized in that: include: A gas spray plate (1), wherein a plurality of gas outlet holes are provided at the lower end of the gas spray plate (1), a mounting tube (2) is provided at the center of the upper end of the gas spray plate (1), a reaction assembly tube (3) is provided in the mounting tube (2) through a threaded sealing plug, and a multi-hole interface (4) is provided at the upper end of the reaction assembly tube (3); A preliminary mixing component, the preliminary mixing component being arranged at the upper end of the reaction assembly tube (3), the preliminary mixing component comprising a conical mixing chamber (5) and a plurality of spiral air pipes (8); An enhanced mixing component, wherein the enhanced mixing component is plugged into a reaction assembly tube (3) and is placed at the lower end of the installation cylinder (2), the enhanced mixing component comprising an enhanced mixing seat (9), a central connecting tube (10) being vertically provided at the center of the enhanced mixing seat (9), and a mixing chamber being vertically provided between the upper end of the enhanced mixing seat (9) and the central connecting tube (10); A temperature control component, the temperature control component comprising a first refrigerant tank (21), a second refrigerant tank (22) and a third refrigerant tank (25), the first refrigerant tank (21) and the second refrigerant tank (22) being arranged in the enhanced mixing seat (9), and the third refrigerant tank (25) being arranged in the reaction assembly tube (3) on one side close to the conical mixing chamber (5); A collecting and processing component is arranged at the lower end of the reaction assembly tube (3) placed in the installation tube (2), and the collecting and processing component comprises a collecting tube (17), a collecting ball groove (29) is provided at the lower end of the collecting tube (17), and the lower end of the central connecting tube (10) is inserted into the collecting ball groove (29).

2. The anti-clogging gas shower head according to claim 1, characterized in that: The reaction assembly tube (3) is symmetrically provided with a plurality of reversing gas grooves (7) at the upper end of the conical mixing chamber (5); a spiral gas pipe (8) is provided in the conical mixing chamber (5) on one side of the reversing gas groove (7); the upper end of the conical mixing chamber (5) is a cylindrical groove structure, and the lower end is a conical structure; the sides of the spiral gas pipe (8) are in contact with the inner wall of the conical mixing chamber (5); and a reaction gas source connection groove (6) is provided in the reversing gas groove (7) through the porous interface (4).

3. The anti-clogging gas shower head according to claim 2, characterized in that: The lower end of the reaction assembly tube (3) is provided with an assembly groove, the upper end of the reinforced mixing seat (9) is inserted into the assembly groove and fixedly connected by a plurality of bolts, the upper end of the central connecting tube (10) is vertically inserted into the conical mixing chamber (5), and the diameter of the lower end of the conical mixing chamber (5) is greater than the diameter of the central connecting tube (10).

4. The anti-clogging gas shower head according to claim 3, characterized in that: The center of the porous interface (4) is connected to the conical mixing chamber (5) and is provided with a refrigerant input groove (27). The lower end of the refrigerant input groove (27) is provided with a conical docking groove. The upper end of the central connecting pipe (10) is pressed and inserted into the conical docking groove through a sealing ring.

5. The anti-clogging gas shower head according to claim 4, characterized in that: The lower end of the conical mixing chamber (5) is arranged corresponding to the mixing chamber of the enhanced mixing seat (9), and the two sides of the mixing chamber of the enhanced mixing seat (9) are provided with a conical guide groove (11), a reversing guide groove (12), a first arc-shaped spoiler groove (13) and a second arc-shaped spoiler groove (14) in order from top to bottom. The conical guide groove (11) and the first arc-shaped spoiler groove (13) are connected by a partition, and the reversing guide groove (12) and the second arc-shaped spoiler groove (14) are connected by a partition, and the two partitions are staggered.

6. The anti-clogging gas shower head according to claim 5, characterized in that: A plurality of mixing outlet grooves (15) are provided through the lower end of the mixing chamber of the enhanced mixing seat (9), a first refrigerant groove (21) is provided at the center of the enhanced mixing seat (9), and a second refrigerant groove (22) is provided at the outer peripheral side of the enhanced mixing seat (9) near the mixing chamber. The heat absorbed by the reversing guide groove (12) and the second arc-shaped spoiler groove (14) can be transferred to the first refrigerant groove (21), and the heat absorbed by the conical guide groove (11) and the first arc-shaped spoiler groove (13) can be transferred to the second refrigerant groove (22). A plurality of offset connection grooves (23) are provided at the lower end of the first refrigerant groove (21) and the lower end of the second refrigerant groove (22) to be horizontally connected. The plurality of offset connection grooves (23) are offset from the plurality of mixing outlet grooves (15), and the upper and lower ends of the central connecting pipe (10) are respectively connected to the refrigerant input groove (27) and the first refrigerant groove (21).

7. The anti-clogging gas shower head according to claim 6, characterized in that: The upper end of the second refrigerant tank (22) passes through the enhanced mixing seat (9), and an annular docking groove (24) is provided at the upper end of the assembly tank of the reaction assembly tube (3). The upper end of the annular docking groove (24) is connected to the third refrigerant tank (25). The enhanced mixing seat (9) is provided with a second refrigerant tank (22) on one side thereof, which is plugged into the annular docking groove (24) through an annular sealing ring for annular compression sealing. An annular discharge groove (26) is provided at the upper end of the third refrigerant tank (25) in the reaction assembly tube (3), and the upper end of the annular discharge groove (26) passes through the reaction assembly tube (3) and is provided with a circulation discharge joint (28).

8. The anti-clogging gas shower head according to claim 7, characterized in that: The lower end of the reaction assembly tube (3) is provided with a threaded connection ring (16), the outer peripheral side of the threaded connection ring (16) is provided with a threaded connection sleeve (18) through a threaded sleeve connection, the lower end of the threaded connection sleeve (18) is provided with a tubular ceramic inorganic membrane (19), the upper end of the collecting tube (17) is threadedly plugged into the inner peripheral side of the threaded connection ring (16), and the lower end of the enhanced mixing seat (9) is plugged into the upper end of the collecting tube (17).

9. The anti-clogging gas shower head according to claim 8, characterized in that: The outer peripheral side of the collecting tube (17) is provided with a plurality of reversing air holes (20) which are inclined inward, and the tubular ceramic inorganic membrane (19) is sleeved and fitted to the outer peripheral side of the collecting tube (17).

10. The anti-clogging gas shower head according to claim 9, characterized in that: The central connecting tube (10) is placed in the collecting ball groove (29) and has an inner cavity with a lifting and giving way groove (30). The inner diameter of the lifting and giving way groove (30) is larger than the inner diameter of the central connecting tube (10). A spring partition (33) is horizontally arranged in the lifting and giving way groove (30) through a support rod. A downward pressure spring (34) is arranged at the lower end of the spring partition (33). An anti-slip plate (32) is arranged at the lower end of the downward pressure spring (34). A piston rod (31) is arranged at the center of the lower end of the anti-slip plate (32). The piston rod (31) is vertically movably plugged into the inner cavity of the central connecting tube (10) to movably connect the piston rod (31) to the inner cavity of the central connecting tube (10). The length of the plug rod (31) is greater than the length of the downward pressure spring (34). An extension rod is provided at the center of the lower end of the piston rod (31). The extension rod extends out of the center connection tube (10) and is provided with a sealing ball head (36). A sealing ball groove (35) is provided at the center of the lower end of the collecting ball groove (29). The sealing ball head (36) is inserted into the sealing ball groove (35). A transfer groove is provided at the center of the piston rod (31). The transfer groove passes through the outer peripheral side of the piston rod (31) and is provided with a plurality of suction holes (38). A suction groove (37) is provided at the center of the sealing ball head (36) and is connected to the transfer groove.

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