Superconducting magnetic control single crystal furnace

Abstract

The invention relates to the technical field of crystal growth, in particular to a superconducting magnetic control single crystal furnace which is characterized in that a superconducting magnet is arranged on the periphery of a single crystal furnace body; the lifting assembly is arranged on the base and used for lifting the superconducting magnet; the stabilizing assembly is arranged on the base, is used for supporting the superconducting magnet and is connected with the lifting assembly; the coil adjusting assembly is installed on the base, and the output end of the coil adjusting assembly extends into the superconducting magnet and is used for driving the superconducting coil to move. The three superconducting coil groups are arranged in the superconducting coil mounting shell, the distances among the three superconducting coil groups are adjustable, and a magnetic field can be formed by applying direct current excitation to the three superconducting coil groups. Therefore, on one hand, the magnetic field distribution form can be adaptively adjusted and the magnetic field intensity of the center of the superconducting magnet can be improved according to the crystal pulling quality requirement of the superconducting magnetic control single crystal furnace, on the other hand, the uniformity and the quality of a single crystal silicon rod can be effectively improved, and the stability and the safety of the magnetic control single crystal furnace can be improved through the cooperation of the lifting assembly and the stabilizing assembly.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal growth, and particularly to a superconducting magnetic control single crystal furnace. Background Art

[0002] Single crystal silicon is a high-purity silicon crystal, whose atoms are arranged in a regular lattice and have a single crystal structure. Due to its unique electrical and physical properties, this material has important applications in the electronics industry. The production of single crystal silicon often relies on a single crystal furnace, and a superconducting magnet is required on the outer periphery of the single crystal furnace to form a magnetic field and directly draw the growth of single crystal silicon. However, in the prior art, the superconducting coil that forms the magnetic field cannot be adjusted, the magnetic field distribution form is single, and it cannot be adjusted according to different requirements for the quality of crystal pulling, resulting in poor versatility. Summary of the Invention

[0003] The present invention provides a superconducting magnetic control single crystal furnace to solve the problem of how to provide a superconducting magnetic control single crystal furnace with a variable magnetic field distribution form.

[0004] The present invention provides a superconducting magnetic control single crystal furnace, including: A superconducting magnet; arranged on the outer periphery of the single crystal furnace body; A lifting assembly; arranged on the base and used for lifting the superconducting magnet; A stabilizing assembly; arranged on the base and used for supporting the superconducting magnet, and one side of the lifting assembly is arranged on the stabilizing assembly; A coil adjusting assembly; installed on the base, and the output end extends into the interior of the superconducting magnet and is used for driving the displacement of the superconducting coil inside the superconducting magnet.

[0005] In some embodiments, the superconducting magnet includes: A superconducting coil placement shell; a column with a hollow circular ring cross-section; A superconducting coil; arranged inside the superconducting coil placement shell; The superconducting coil includes: A first coil; horizontally sleeved on the upper part inside the superconducting coil placement shell; A second coil group; arranged in the middle part inside the superconducting coil placement shell; A third coil; horizontally sleeved on the lower part inside the superconducting coil placement shell.

[0006] In some embodiments, the second coil group includes at least two second coils, and the second coils are circumferentially and uniformly installed in the middle part inside the superconducting coil placement shell.

[0007] In some embodiments, a U-shaped skeleton is arranged inside the superconducting coil placement shell; the U-shaped skeleton includes: The first U-shaped framework; threadedly connected to the upper part inside the superconducting coil housing, and the first coil is sleeved on the first U-shaped framework; The second U-shaped framework; sleeved in the middle part inside the superconducting coil housing, and the second coil group is arranged on the second U-shaped framework; The third U-shaped framework; threadedly connected to the lower part inside the superconducting coil housing, and the third coil is sleeved on the third U-shaped framework.

[0008] In some of these embodiments, the threading directions of the superconducting coil housing connected to the first U-shaped framework and the third U-shaped framework are opposite.

[0009] In some of these embodiments, the coil adjusting assembly includes: The first oil cylinder; installed on the base; The second oil cylinder; the output end of the first oil cylinder is connected to one side of the second oil cylinder, and the second oil cylinder is slidably connected to the base; The driving motor; the output end of the second oil cylinder is connected to one end of the driving motor; The rotating shaft; the output end of the driving motor is connected to one end of the rotating shaft, and the other end of the rotating shaft extends into the interior of the superconducting coil housing; Wherein, a first gear portion and a second gear portion are arranged on the rotating shaft, and engaging gears are arranged on one side of the first U-shaped framework and the third U-shaped framework close to the rotating shaft. The first gear portion meshes with the first U-shaped framework, and the second gear portion meshes with the third U-shaped framework.

[0010] In some of these embodiments, the lifting assembly includes: The lead screws; multiple are provided and evenly distributed on the outer periphery of the superconducting magnet. One end of the lead screw is threadedly connected to the stabilizing assembly; The driving assembly; the output end is connected to the other end of the lead screw.

[0011] In some of these embodiments, the driving assembly includes: The hoists; multiple are provided and arranged on the base, and the output ends are respectively connected to the other ends of the lead screws in a one-to-one correspondence; The reduction motor; one in number and arranged on the base between two adjacent hoists; The couplings; multiple are provided. The hoists are connected to the next adjacent hoist through the transmission shaft and the couplings. The two ends of the reduction motor are respectively connected to two adjacent hoists through the transmission shaft and the couplings.

[0012] In some of these embodiments, the stabilizing assembly includes: Fixed plates; there are multiple of them, evenly distributed on the base around the superconducting magnet; on the side of the fixed plate close to the superconducting magnet, a fixing groove is provided, and the lead screw is located inside the fixing groove; Connecting rods; adjacent two fixed plates are connected by connecting rods; Support seats; there are multiple of them, the top is connected to the bottom of the superconducting magnet, and the bottom is threadedly connected to the lead screw one by one.

[0013] In some embodiments, the support seat includes: L-shaped columns; the top is connected to the bottom of the superconducting magnet; Support plates; the bottom of the L-shaped column is connected to the upper surface of the support plate, and the lead screw is threadedly connected to the support plate; Reinforcing plates; one side is connected to the L-shaped column, and one side is connected to the upper surface of the support plate.

[0014] The beneficial effects of the present invention are as follows: A superconducting magnetic control single crystal furnace of the present invention drives the transmission shaft to rotate by setting a reduction motor, and then drives the circumferentially distributed lead screws to rotate synchronously, which can realize the stable lifting of the superconducting magnet without deviation; through the cooperation of the fixed plates, connecting rods and support seats, a stable fixing ring can be formed, so that the lower part of the superconducting magnetic control single crystal furnace of the present invention is enclosed to prevent safety accidents; by setting the second oil cylinder to drive the rotating shaft to rotate, and then driving the first U-shaped frame and the third U-shaped frame to rotate synchronously, the first coil and the third coil can be simultaneously moved away from / close to the second coil group, and thus the magnetic field distribution can be changed. In addition, on the premise that the thread directions of the superconducting coil placement shell connected to the first U-shaped frame and the third U-shaped frame are opposite, if it is necessary to adjust the position of the first coil alone, make the first gear part engage with the first U-shaped frame, and the third U-shaped frame disengage from the second gear part, and then start the drive motor to drive the first U-shaped frame to rotate; if it is necessary to adjust the position of the third coil alone, make the first gear part disengage from the first U-shaped frame, and the third U-shaped frame engage with the second gear part, and then start the drive motor to drive the third U-shaped frame to rotate; if it is necessary to adjust the positions of the first coil and the third coil at the same time, make the first gear part engage with the first U-shaped frame, and the third U-shaped frame engage with the second gear part, and the relative movement and the opposite movement of the first coil and the third coil can be realized through the forward and reverse rotation of the drive motor; when the first coil / third coil does not need to be adjusted, start the first oil cylinder to push the second oil cylinder to move, so that the first gear part and the second gear part disengage from the first U-shaped frame and the third U-shaped frame. A superconducting magnetic control single crystal furnace provided by the present invention can not only lift the whole superconducting magnet, and the lifting process is stable without deviation and has high safety, but also can adjust the first coil and the third coil in the superconducting magnet to form various magnetic field distributions to meet the requirements of different single crystal furnace crystal pulling quality and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 are schematic structural diagrams of some specific embodiments of a superconducting magnetic control single crystal furnace according to the present invention; Figure 2 is Figure 1 a schematic structural diagram of some other specific embodiments in a superconducting magnetic control single crystal furnace shown; Figure 3 is Figure 1 a schematic structural diagram of some specific embodiments of a lifting assembly in a superconducting magnetic control single crystal furnace shown; Figure 4 is Figure 1 a schematic structural diagram of some specific embodiments of a stabilizing assembly in a superconducting magnetic control single crystal furnace shown; Figure 5 is Figure 1 a schematic structural diagram of some specific embodiments of a coil adjusting assembly in a superconducting magnetic control single crystal furnace shown.

[0016] In the drawings, 100, superconducting magnet; 110, first coil; 120, second coil group; 121, second coil; 130, third coil; 140, U-shaped skeleton; 141, first U-shaped skeleton; 142, second U-shaped skeleton; 143, third U-shaped skeleton; 200, lifting assembly; 210, lead screw; 220, driving assembly; 221, hoist; 222, reduction motor; 223, coupling; 300, stabilizing assembly; 310, fixing plate; 311, sliding plate; 320, connecting rod; 330, support seat; 331, L-shaped column; 332, support plate; 333, rib plate; 340, directional slider; 400, coil adjusting assembly; 410, first oil cylinder; 420, second oil cylinder; 430, driving motor; 440, rotating shaft; 450, first gear part; 460, second gear part. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0018] At present, the production of single-crystalline silicon often relies on a single-crystal furnace, and a superconducting magnet is required on the outer periphery of the single-crystal furnace to form a magnetic field and directly draw the growth of single-crystalline silicon. In the prior art, the superconducting coil that forms the magnetic field cannot be adjusted, the magnetic field distribution form is single, it cannot be adjusted according to different requirements for the quality of crystal pulling, and it is not conducive to the production of multiple working conditions, and the versatility is poor. Therefore, providing a superconducting magnetic control single-crystal furnace with a variable magnetic field distribution form has become one of the technical problems that need to be solved urgently by those skilled in the art.

[0019] To solve the above problems, referring to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 , the present invention provides a superconducting magnetic control single-crystal furnace, which includes a superconducting magnet 100, a lifting assembly 200, a stabilizing assembly 300, and a coil adjusting assembly 400. Among them, the superconducting magnet 100 is arranged on the outer periphery of the single-crystal furnace body; the lifting assembly 200 is arranged on the base and is used for lifting the superconducting magnet 100; the stabilizing assembly 300 is arranged on the base and is used for supporting the superconducting magnet 100, and one side of the lifting assembly 200 is arranged on the stabilizing assembly 300; the coil adjusting assembly 400 is installed on the base, and the output end extends into the superconducting magnet 100 to drive the displacement of the superconducting coil inside the superconducting magnet 100.

[0020] Preferably, the superconducting magnet 100 includes a superconducting coil housing and a superconducting coil. Among them, the superconducting coil housing is a hollow circular cylinder for accommodating the superconducting coil and providing a low-temperature environment for the superconducting coil; the superconducting coil includes a first coil 110, a second coil group 120, and a third coil 130, all of which are wound with high-temperature superconducting tapes and are used to provide a magnetic field for the single-crystal furnace body. Among them, the first coil 110 is horizontally sleeved on the upper part inside the superconducting coil housing, the second coil group 120 is arranged in the middle of the superconducting coil housing, and the third coil 130 is horizontally sleeved on the lower part inside the superconducting coil housing.

[0021] Preferably, the superconducting magnet 100 further includes a vacuum chamber and a refrigerator. Among them, the vacuum chamber is a hollow circular cylinder for accommodating the superconducting coil housing and providing a vacuum environment for the superconducting coil housing; the refrigerator is installed on the top surface of the vacuum chamber, and the first-stage cold head and the second-stage cold head of the refrigerator are respectively conductively connected to the superconducting coil housing and the superconducting coil.

[0022] Preferably, the superconducting magnet 100 further includes a magnetic shielding body, which houses the vacuum chamber, the superconducting coil housing and the superconducting coil, and is used to isolate the leakage of the magnetic field generated after the superconducting coil is energized to protect the safety of external personnel and equipment.

[0023] Specifically, the distance between the horizontal plane where the first coil 110 is located at the initial position and the horizontal plane where the center of the second coil group 120 is located is the same as the distance between the horizontal plane where the third coil 130 is located at the initial position and the horizontal plane where the center of the second coil group 120 is located. In practical applications, according to the requirements for the crystal pulling quality of the superconducting magnetic control single crystal furnace, the first coil 110 and the third coil 130 can be adjusted to appropriate positions in cooperation with the coil adjusting assembly 400 to change the magnetic field distribution form. At the same time, on the basis of increasing the magnetic field intensity, the uniformity and quality of the single crystal silicon rod can be effectively improved, and the production efficiency can be improved. Compared with the superconducting magnet with a single and unchangeable magnetic field distribution form in the prior art, the technical solution disclosed by the present invention has stronger versatility.

[0024] Preferably, the second coil group 120 includes at least two second coils 121, and the second coils 121 are circumferentially and evenly installed in the middle of the superconducting coil placement shell.

[0025] Specifically, the first coil 110 and the third coil 130 are set as circular rings adapted to the circumferential direction of the superconducting coil placement shell, and the second coil 121 is set as a circular ring or a rectangle adapted to the arc of the superconducting coil placement shell. If it is a circular ring, the diameter of the circular ring is smaller than the width of the second U-shaped skeleton 142. If it is a rectangle, the height in the vertical direction of the rectangle is smaller than the width of the second U-shaped skeleton 142. The number of the second coils 121 is preferably 4, and they are evenly distributed on the second U-shaped skeleton 142. The included angle between the center connection lines of two adjacent second coils 121 and the second U-shaped skeleton 142 is 90 degrees. Through the settings of the first coil 110, the second coils 121, and the third coil 130, the distribution and uniformity of the magnetic field can be well adjusted, the thermal convection of the silicon solution in the single crystal furnace can be inhibited, and the uniformity and quality of the single crystal silicon rod can be improved.

[0026] Furthermore, the centers of the multiple second coils 121 are located on the same horizontal plane and are parallel to the plane where the first coil 110 is located and the plane where the third coil 130 is located.

[0027] Preferably, a U-shaped skeleton 140 is arranged inside the superconducting coil placement shell. The U-shaped skeleton 140 includes a first U-shaped skeleton 141, a second U-shaped skeleton 142, and a third U-shaped skeleton 143. Among them, the first U-shaped skeleton 141 is threadedly connected to the upper part inside the superconducting coil placement shell, and the first coil 110 is sleeved on the first U-shaped skeleton 141; the second U-shaped skeleton 142 is sleeved on the middle part inside the superconducting coil placement shell, and the second coil group 120 is arranged on the second U-shaped skeleton 142; the third U-shaped skeleton 143 is threadedly connected to the lower part inside the superconducting coil placement shell, and the third coil 130 is sleeved on the third U-shaped skeleton 143.

[0028] Specifically, the width inside the first U-shaped skeleton 141 should be slightly larger than the cross-sectional diameter of the first coil 110, the width of the second U-shaped skeleton 142 should be slightly larger than the diameter or height of the second coil 121, and the width of the third U-shaped skeleton 143 should be slightly larger than the cross-sectional diameter of the third coil 130. Among them, herringbone teeth are provided on the two short sides of the first U-shaped skeleton 141 and the third U-shaped skeleton 143, threads are provided on the bottom plate, and the thread directions on the first U-shaped skeleton 141 and the third U-shaped skeleton 143 are opposite, so that when the first U-shaped skeleton 141 and the third U-shaped skeleton rotate in the same direction, they move relatively or away from each other, thereby achieving the technical effect of changing the magnetic field distribution form.

[0029] Further, direct current with the same magnitude and opposite directions is applied to the first coil 110 and the third coil 130, and direct current with the same magnitude and opposite directions is applied to the two opposite second coils 121, so that a magnetic field that is symmetric up and down and has a zero magnetic surface in the central plane of the superconducting coil placement shell can be formed.

[0030] Further, the current magnitudes in the first coil 110 and the third coil 130 may not be the same, which can change the magnetic field distribution form and magnetic field intensity. The current magnitude in the second coil 121 may be the same as or different from the current magnitudes in the first coil 110 and the third coil 130. That is, in addition to adjusting the positions of the first coil 110 and the third coil 130 to change the magnetic field distribution form, the present invention can also adjust the magnetic field distribution form and magnetic field intensity by passing currents with different directions and magnitudes through the first coil 110, the second coil 121, and the third coil 130. Specifically, it can be set according to the needs of single crystal silicon growth in the superconducting magnetic control single crystal furnace. Whether it is to change the coil position alone, or to adjust the current magnitude or direction alone, or to change the coil position and adjust the magnitude and direction of each coil simultaneously, the technical solution of the present invention has stronger versatility.

[0031] Preferably, the thread directions of the superconducting coil placement shell connected to the first U-shaped skeleton 141 and the third U-shaped skeleton 143 are opposite.

[0032] Specifically, when the first U-shaped skeleton 141 and the third U-shaped skeleton 143 rotate in the same direction, their moving directions are opposite.

[0033] Preferably, the lifting assembly 200 includes: a lead screw 210 and a driving assembly 220. Among them, a plurality of lead screws 210 are provided and evenly distributed on the outer periphery of the superconducting magnet 100. One end of the lead screw 210 is threadedly connected to the stabilizing assembly 300, and the output end of the driving assembly 220 is connected to the other end of the lead screw 210.

[0034] Specifically, a rectangular limit plate is horizontally installed at the top of the lead screw 210, which is stuck when the lifting assembly 200 rises to the limit position to prevent slippage. At the same time, in the technical solution of the present invention, the number of lead screws 210 can be two, three, four, or five, and preferably four. When the number of lead screws 210 is two, the two lead screws 210 should be distributed radially along the superconducting coil placement shell. If the number of lead screws 210 is three, the three lead screws 210 should be circumferentially and evenly distributed around the axis where the center of the superconducting coil placement shell is located. If the number of lead screws 210 is four or five, their distribution forms are the same as that of the three lead screws 210, so that the superconducting magnet in the present invention is evenly stressed during the lifting process.

[0035] Preferably, the driving assembly 220 includes: a hoist 221, a reduction motor 222, and a coupling 223. Among them, multiple hoists 221 are provided and arranged on the base, and the output ends are respectively connected to the other ends of the lead screws 210; the number of reduction motors 222 is one, and it is arranged on the base between two adjacent hoists 221; multiple couplings 223 are provided, and the hoist 221 is connected to the next adjacent hoist 221 through a transmission shaft and a coupling 223, and both ends of the reduction motor 222 are respectively connected to two adjacent hoists 221 through a transmission shaft and a coupling 223.

[0036] Preferably, the stabilizing assembly 300 includes a fixing plate 310, a connecting rod 320, and a support seat 330. Among them, multiple fixing plates 310 are provided and evenly distributed on the base outside the circumference of the superconducting magnet 100, and two adjacent fixing plates 310 are connected by a connecting rod 320; multiple support seats 330 are provided, the top is connected to the bottom of the superconducting magnet 100, and the bottom is respectively threadedly connected to the lead screw 210.

[0037] Specifically, the number of fixing plates 310 is the same as the number of support seats 330 and lead screws 210, and can also be two, three, four, or five. When the number of fixing plates 310 and support seats 330 is two, they are distributed radially along the superconducting coil placement shell. When the number of fixing plates 310 and support seats 330 is three, four, or five, the distribution method is to be circumferentially and evenly distributed around the axis where the center of the superconducting coil placement shell is located.

[0038] Furthermore, the reduction motor 222 is a variable-frequency reduction motor, and the lead screw 210 is a T-shaped lead screw. When the superconducting magnet 100 rises to the upper end of the lead screw 210, the fixing ring formed by the fixing plate 310 and the connecting rod 320 can fix the upper part of the fixing plate 310, and further, when the upper end of the lead screw 210 is stressed, it can be mutually restricted with the fixing plate 310, so as to further prevent the fixing plate 310 or the lead screw 210 from shaking, so that the superconducting magnet 100 is more stable during the lifting or lowering process.

[0039] Furthermore, since each connecting rod 320 is located on the outer contour of the superconducting magnet, it will be subject to an outward tension. The two ends of the connecting rod 320 are respectively fixed between two adjacent fixing plates 310. Therefore, the fixing plates 310 will be subject to two forces with opposite directions and the same magnitude, thereby generating opposite-direction interaction forces to maintain the stability of the fixing plates 310 and the stability of the lifting of the superconducting magnet 100.

[0040] Preferably, the support base 330 includes: an L-shaped column 331, a support plate 332, and a rib plate 333. Among them, the top of the L-shaped column 331 is connected to the bottom of the superconducting magnet 100, the bottom of the L-shaped column 331 is connected to the upper surface of the support plate 332, and the lead screw 210 is threadedly connected to the support plate 332; one side of the rib plate 333 is connected to the L-shaped column 331, and the other side is connected to the upper surface of the support plate 332.

[0041] Specifically, the L-shaped column 331 is fixed to the bottom of the superconducting coil housing. Without increasing the width, the stress area of the fixing plate 310 is enlarged, the lifting height of the lead screw 210 is reduced, and the potential safety hazard is reduced.

[0042] Preferably, a fixing groove is formed on one side of the fixing plate 310 close to the superconducting magnet 100, and the lead screw 210 is located inside the fixing groove.

[0043] Furthermore, a sliding plate 311 is installed along the height direction in the fixing groove of the fixing plate 310. A plurality of positioning protrusions are uniformly arranged on the sliding plate 311 in the vertical direction. The longitudinal section of the positioning protrusion is rectangular. The stabilizing assembly 300 further includes an orienting slider 340. An orienting groove is formed on the orienting slider 340. The groove shape of the orienting groove is adapted to the surface shape of the sliding plate 311, that is, the orienting slider 340 is slidably connected to the sliding plate 311 through the orienting groove. The bottom of the orienting groove is connected to one end of the support plate 332 away from the superconducting coil housing. The orienting groove cooperates with the positioning protrusion. On the one hand, through the cooperation of the orienting groove and the positioning protrusion, the support plate 332 can be oriented. The positioning protrusion is clamped in the orienting groove, avoiding the rotation of the support base 330 during the lifting process. On the other hand, through the cooperation of the orienting groove and the positioning protrusion, two force-bearing fulcrums can be provided for the support plate 332 to reduce the axial force on the lead screw 210 and extend the service life of the lead screw 210. When the shape of the positioning protrusion is a quadrangular prism, the stress area can be ensured to be the largest and the orienting effect is better.

[0044] Furthermore, the setting of the rib plate 333 can make the structure of the stabilizing assembly 300 more firm, similar to a reinforcing rib, preventing the L-shaped column 331 from bending deformation or fracture caused by excessive force and extending its service life.

[0045] Preferably, the coil adjusting assembly 400 includes a first oil cylinder 410, a second oil cylinder 420, a driving motor 430 and a rotating shaft 440. The first oil cylinder 410 is fixedly installed on the base. The output end of the first oil cylinder 410 is connected to one side of the second oil cylinder 420. The second oil cylinder 420 is slidably connected to the base. The output end of the second oil cylinder 420 is connected to one end of the driving motor 430. The output end of the driving motor 430 is connected to one end of the rotating shaft 440. The other end of the rotating shaft 440 extends into the interior of the superconducting coil housing. The coil adjusting assembly 400 in the present application can adjust the positions of the first coil 110 and the third coil 130 relative to the second coil group 120 without changing the main structure and volume of the superconducting magnet. It can not only adaptively adjust the magnetic field distribution form and magnetic field intensity according to the crystal pulling quality requirements of the superconducting magnetic control single crystal furnace, but also be suitable for the assembly and maintenance of the single crystal furnace and ensure the stability and safety of the single crystal furnace.

[0046] Wherein, a first gear portion 450 and a second gear portion 460 are provided on the rotating shaft 440. Meshing gears, such as herringbone gears, are provided on one side of the first U-shaped frame 141 and the third U-shaped frame 143 close to the rotating shaft 440. The first gear portion 450 can be meshed and driven with the first U-shaped frame 141, and the third U-shaped frame 143 can be meshed and driven with the second gear portion 460.

[0047] Specifically, the length of the first gear portion 450 is twice the width of the first U-shaped frame 141, and the second gear portion 460 is twice the width of the third U-shaped frame 143. As Figure 5 shown, if it is necessary to adjust the positions of the first coil 110 and the third coil 130 relative to the second coil group 120 at the same time, the first gear portion 450 and the second gear portion 460 on the rotating shaft 440 are respectively meshed and driven with the first U-shaped frame 141 and the third U-shaped frame 143; if it is necessary to adjust the first U-shaped frame 141 alone, the second oil cylinder 420 drives the rotating shaft 440 to move downward, so that the second gear portion 460 disengages from the third U-shaped frame 143. At this time, the upper half of the first gear portion 450 is meshed with the first U-shaped frame 141, thereby realizing the position adjustment of the first coil 110 in the vertical position; if it is necessary to adjust the position of the third U-shaped frame 143 alone, the second oil cylinder 420 moves the rotating shaft 440 upward, so that the first gear portion 450 disengages from the first U-shaped frame. At this time, the lower half of the second gear portion 460 is meshed with the third U-shaped frame 143, thereby realizing the position adjustment of the third coil 130 in the vertical direction.

[0048] Furthermore, in the present invention, the length of the short side of the first U-shaped frame 141 and the third U-shaped frame 143 is greater than the length of the short side of the second U-shaped frame 142, and the length difference is greater than the depth of the herringbone gear, thereby avoiding the first gear portion 450 or the second gear portion 460 from being stuck at the second U-shaped frame 142.

[0049] Furthermore, the rotating shaft 440 extends into the interior through the outer shell of the superconducting coil housing, and the opening is a sliding opening structure to ensure the sealing performance and prevent magnetic leakage.

[0050] In the present invention, three superconducting coils are arranged in the superconducting coil housing, and the spacing, current direction and magnitude between the three superconducting coils are adjustable. At the same time, by applying a DC current excitation to the three superconducting coils, a magnetic field can be formed at the center of the superconducting magnet. Since the coil spacing, current direction and current magnitude are adjustable, various magnetic field distribution forms can be formed. In this way, on the one hand, the magnetic field distribution form can be adaptively adjusted according to the crystal pulling quality requirements of the superconducting magnetic control single crystal furnace, and the magnetic field intensity at the center of the superconducting magnet can be increased. On the other hand, on the basis of increasing the magnetic field intensity, the uniformity and quality of the single crystal rod can be effectively improved.

[0051] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation of the present invention.

[0052] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0053] In the present invention, unless otherwise clearly specified and limited, the terms "mounted", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated. It can be a mechanical connection, an electrical connection or communication with each other; it can be directly connected, or indirectly connected through an intermediate medium. It can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] In the present invention, the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0055] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

Claims

1. A superconducting magnetron single crystal furnace, characterized in that: include: The superconducting magnet (100) is arranged on the periphery of the single crystal furnace body; A lifting component (200); arranged on a base, and used for lifting the superconducting magnet (100); A stabilizing assembly (300); arranged on a base, used to support the superconducting magnet (100), and connected to the lifting assembly (200); A coil adjustment component (400) is arranged on a base, and an output end thereof extends into the superconducting magnet (100), and is used for driving the displacement of the superconducting coil inside the superconducting magnet (100).

2. A superconducting magnetron single crystal furnace according to claim 1, characterized in that: The superconducting magnet (100) comprises: A superconducting coil placement shell; a cylinder with a hollow circular cross section; A superconducting coil is arranged in the superconducting coil placement shell; The superconducting coil comprises: A first coil (110) is horizontally sleeved on the upper part of the superconducting coil placement shell; A second coil group (120); circumferentially arranged in the middle of the superconducting coil placement shell; The third coil (130) is horizontally sleeved in the lower part of the superconducting coil placement shell.

3. A superconducting magnetron single crystal furnace according to claim 2, characterized in that: The second coil group (120) comprises at least two second coils (121), and the at least two second coils (121) are evenly arranged in the circumferential direction at the middle part of the superconducting coil placement shell.

4. A superconducting magnetron single crystal furnace according to claim 2, characterized in that: A U-shaped frame (140) is also provided inside the superconducting coil placement shell; the U-shaped frame (140) comprises: A first U-shaped frame (141) is threadedly connected to the upper portion of the superconducting coil placement shell, and the first coil (110) is sleeved on the first U-shaped frame (141); A second U-shaped frame (142) is sleeved in the middle of the superconducting coil placement shell, and the second coil group (120) is arranged on the second U-shaped frame (142); The third U-shaped frame (143) is threadedly connected to the lower part of the superconducting coil placement shell, and the third coil (130) is sleeved on the third U-shaped frame (143).

5. A superconducting magnetron single crystal furnace according to claim 4, characterized in that: The thread directions of the superconducting coil placement shell connected to the first U-shaped frame (141) and the third U-shaped frame (143) are opposite.

6. A superconducting magnetron single crystal furnace according to claim 5, characterized in that: The coil adjustment assembly (400) comprises: The first oil cylinder (410) is mounted on the base; a second oil cylinder (420); an output end of the first oil cylinder (410) is connected to one side of the second oil cylinder (420), and the second oil cylinder (420) is slidably connected to the base; A driving motor (430); an output end of the second oil cylinder (420) is connected to one end of the driving motor (430); A rotating shaft (440); the output end of the driving motor (430) is connected to one end of the rotating shaft (440), and the other end of the rotating shaft (440) extends into the interior of the superconducting coil placement shell; The rotating shaft (440) is provided with a first gear portion (450) and a second gear portion (460); the first U-shaped frame (141) and the third U-shaped frame (143) are provided with matching gears on one side close to the rotating shaft (440); the first gear portion (450) is meshed with the first U-shaped frame (141); and the second gear portion (460) is meshed with the third U-shaped frame (143).

7. A superconducting magnetron single crystal furnace according to any one of claims 1 to 6, characterized in that: The lifting assembly (200) comprises: A plurality of screw rods (210) are provided and evenly distributed on the periphery of the superconducting magnet (100); one end of the screw rod (210) is threadedly connected to the stabilizing assembly (300); A driving component (220); an output end of which is connected to the other end of the lead screw (210).

8. The superconducting magnetron single crystal furnace according to claim 7, characterized in that: The driving assembly (220) comprises: A plurality of hoists (221) are provided and arranged on the base, and the output ends are connected to the other ends of the screw rods (210) in a one-to-one correspondence; A reduction motor (222); the number of which is one and which is arranged on a base between two adjacent elevators (221); Couplings (223); a plurality of couplings (223) are provided, the hoist (221) is connected to the next adjacent hoist (221) via a transmission shaft and the coupling (223), and both ends of the reduction motor (222) are connected to two adjacent hoists (221) via a transmission shaft and the coupling (223).

9. The superconducting magnetron single crystal furnace according to claim 7, characterized in that: The stabilizing assembly (300) comprises: A fixing plate (310); a plurality of fixing plates (310) are provided and evenly distributed on a base around the superconducting magnet (100); a fixing groove is provided on a side of the fixing plate (310) close to the superconducting magnet (100), and the lead screw (210) is located inside the fixing groove; Connecting rod (320); two adjacent fixing plates (310) are connected via the connecting rod (320); A plurality of support seats (330) are provided, the top of which is connected to the bottom of the superconducting magnet (100), and the bottom of which is threadedly connected to the lead screw (210) in a one-to-one correspondence.

10. The superconducting magnetron single crystal furnace according to claim 9, characterized in that: The support seat (330) comprises: An L-shaped column (331) having a top connected to the bottom of the superconducting magnet (100); A support plate (332); the bottom of the L-shaped column (331) is connected to the upper surface of the support plate (332), and the screw rod (210) is threadedly connected to the support plate (332); A rib plate (333) having one side connected to the L-shaped column (331) and one side connected to the upper surface of the support plate (332).

Images