Non-linear measured value accurate mapping method and system based on slope dynamic wingspan

Abstract

The invention discloses a nonlinear measurement value accurate mapping method and system based on a slope dynamic wingspan. The method comprises the following steps: establishing a plurality of data calibration points in one-to-one correspondence between a target domain and a measurement domain; defining calibration point intervals, and establishing a slope wingspan model corresponding to each calibration point interval; collecting a plurality of measurement domain data of the to-be-measured object; calculating through the slope wingspan model of the calibration point interval to which the data of each measurement domain belongs to obtain a corresponding target domain result group; re-integrating the target domain results in the target domain result group to reduce the number of the target domain results; selecting a median of the sorting of the integrated target domain results as a final mapping result; the method is simple and convenient in calculation process, high in mapping precision, high in real-time performance, low in manufacturing cost and easy to implement, and has wide application prospects in the fields of workpiece three-dimensional shape measurement based on the precision measurement technology, object dynamic property change monitoring, precision displacement measurement, trace gas measurement, trace mass weighing and the like.

Description

Technical Field

[0001] The present invention belongs to the field of precision measurement, and can be used to establish a non - linear mapping relationship between measurement domain data and target domain data, realize an accurate mapping from measurement domain data to target domain data, so as to complete the accurate detection of target domain data that is difficult to directly measure. The present invention can be widely applied to many application scenarios such as micro - movement monitoring of objects, surface topography detection of objects, trace gas measurement, precise measurement of object thickness, and micro - mass weighing. Specifically, it relates to a method and system for accurate mapping of non - linear measurement values based on a slope dynamic wingspan. Background Art

[0002] Due to its many advantages such as high precision, high reliability, and wide application range, precision measurement technology can be applied to various micro - precision measurements, such as surface topography detection of materials, monitoring of changes in dynamic properties of objects, thickness detection of objects, and micro - mass weighing. It has become a top priority for the high - quality development of high - end equipment manufacturing. In the main battlefields of the national economy such as mechanical manufacturing, national defense and military industry, and aerospace, the industry growth ranges from 5% to 20% after the introduction of measurement technology. Currently, there are many companies internationally dedicated to the research and development of precision measurement technology, such as Keyence Corporation in Japan, STIL Company in France, etc.

[0003] Currently, some technicians and relevant scholars in the field have proposed many methods for accurate mapping of non - linear measurement values. For example, by calculating key parameters in the measurement domain data system, a theoretical mapping conversion formula between measurement domain data and target domain data is established to complete the mapping from measurement domain data to target domain data. However, this method is not only very cumbersome, but also has low mapping conversion accuracy, high implementation difficulty, and is easily affected by the actual working condition environment. How to simply and quickly achieve non - linear accurate mapping from measurement domain data to target domain data, and ensure high mapping conversion accuracy and meet the requirements of the actual working condition environment is still a major difficulty in such problems. Summary of the Invention

[0004] In order to solve the accurate measurement of target domain data that is difficult to directly measure, the present invention provides a method and system for accurate mapping of non - linear measurement values based on a slope dynamic wingspan, which can act on measurement domain data that has a non - linear mapping relationship with target domain data, realize non - linear accurate mapping from measurement domain data to target domain data, and thus complete the accurate measurement of target domain data. The calculation method of the present invention is simple, the production and manufacturing cost is low and it is easy to implement. At the same time, it has a great effect on improving the mapping conversion accuracy.

[0005] To achieve the above technical objectives, in the first aspect, the present application provides a method for accurate mapping of non - linear measurement values based on a slope dynamic wingspan, including the following steps:

[0006] S1: Establish multiple data calibration points that correspond one to one between the target domain and the measurement domain;

[0007] S2: define the calibration point interval and establish the slope span model corresponding to each calibration point interval;

[0008] S3: collecting measurement data in multiple measurement domains of the object to be measured, i.e., measurement domain data, and storing them accordingly;

[0009] S4: Calculate according to the slope span model of the calibration point interval to which the collected measurement domain data belongs, and obtain the corresponding target domain result group;

[0010] S5: reintegrate the target domain results in the target domain result group to reduce the number of target domain results;

[0011] S6: Sort the integrated target domain results in order of numerical value, and select the median of the sorting as the final mapping result of the measurement domain data, so as to achieve a dynamic selection effect of the target domain result of the final mapping.

[0012] In a possible implementation, in step S1, establishing multiple data calibration points that correspond one-to-one between the target domain and the measurement domain includes the following process: using high-precision standard instruments that can be used for calibration in the target domain and the measurement domain respectively, with the target domain data as the vertical coordinate and the measurement domain data as the horizontal coordinate, to establish multiple data calibration points that correspond one-to-one between the target domain and the measurement domain.

[0013] In a possible implementation, step S2 includes: defining the area between two adjacent calibration points as a calibration point interval, and establishing a slope span model for each calibration point interval, wherein the slope span model is a straight line bundle consisting of multiple straight lines passing through the left calibration point in the calibration point interval, and the straight line bundle equation is: Where x is the measurement domain data; Indicated by The slope group is composed of The slope of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval. is the slope of point (n1+1), and the rest of the slopes are similar. Indicated by The intercept group is composed of The intercept of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval, and the rest of the intercepts are calculated in the same way; represents the target domain result group calculated by each pair of slope and intercept; n1 and n2 are empirical values.

[0014] In a possible implementation, step S3 includes: in the detection environment, after waiting for the detection system to run stably, using it to obtain multiple measurement domain data for the object to be measured and storing them in the database.

[0015] In a possible implementation, step S4 includes: sequentially searching for the serial numbers of the calibration point intervals to which the collected measurement domain data belong, and calculating the measurement domain data using the slope wingspan model corresponding to the calibration point interval to obtain the corresponding target domain result group.

[0016] In a possible implementation, step S5 includes: the target domain result group obtained in step S4 performing integration calculation, because contains multiple target domain results: Selecting different numbers of target domain results among them for re-integration to reduce the number of target domain results.

[0017] In a second aspect, the present application provides a non-linear measurement value precise mapping system based on slope dynamic wingspan, including the following modules:

[0018] Target domain data and measurement domain data calibration module, used to establish multiple data calibration points corresponding one-to-one between the target domain and the measurement domain;

[0019] Slope wingspan model establishment module, used to define the calibration point intervals and establish the slope wingspan models corresponding to each calibration point interval;

[0020] Measurement domain data acquisition module, used to acquire multiple measurement domain data for the object to be measured and perform corresponding storage;

[0021] Slope wingspan calculation module, used to sequentially search for the serial numbers of the calibration point intervals to which the collected measurement domain data belong, and calculate the measurement domain data using the slope wingspan model corresponding to the calibration point interval to obtain the corresponding target domain result group;

[0022] Target domain result group integration module, used to re-integrate the target domain results in the target domain result group to reduce the number of target domain results;

[0023] Mapping result dynamic selection module, used to sort the integrated target domain results in ascending order of numerical value, and select the median of the sorting as the final mapping result of the measurement domain data to achieve the dynamic selection effect of the final mapping target domain result.

[0024] In a possible implementation, the processing process of the target domain data and measurement domain data calibration module includes: using standard instruments that can be used for calibration in the target domain and the measurement domain respectively, using the target domain data as the vertical coordinate and the measurement domain data as the horizontal coordinate, to establish multiple data calibration points that correspond one to one between the target domain and the measurement domain.

[0025] In a possible implementation, the processing process of the slope span model establishment module includes: defining the area between two adjacent calibration points as a calibration point interval, and establishing a slope span model for each calibration point interval, wherein the slope span model is a straight line bundle consisting of multiple straight lines passing through the left calibration point in the calibration point interval, and the straight line bundle equation is: Where x is the measurement domain data; Indicated by The slope group consists of multiple slopes. The slope of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval. is the slope of point (n1+1), and the rest of the slopes are similar. Indicated by The intercept group consists of multiple intercepts. The intercept of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval, and the rest of the intercepts are calculated in the same way; represents the target domain result group calculated by each pair of slope and intercept; n1 and n2 are empirical values.

[0026] In a possible implementation, the processing process of the measurement domain data acquisition module includes: in the detection environment, after the detection system runs stably, using the detection system to obtain a plurality of measurement domain data of the object to be detected, and storing the data in a database.

[0027] In a possible implementation, the processing process of the slope span calculation module includes: searching for the calibration point interval sequence number to which the collected measurement domain data belongs in sequence, and calculating the measurement domain data using the slope span model corresponding to the calibration point interval to obtain the corresponding target domain result set.

[0028] In a possible implementation, the processing process of the target domain result group integration module includes: integrating the target domain result group obtained in step S4 Perform integrated calculations, because Included For example, multiple target domain results are selected and reintegrated, and a different number of target domain results are selected to calculate an average value to reduce the number of target domain results.

[0029] In a third aspect, the present application provides an electronic system device, including an electronic processor and a memory, wherein the memory stores a relevant computer program. When the electronic processor executes the computer program stored in the memory, the aforementioned precise mapping method of nonlinear measurement values ​​based on slope dynamic wingspan will be implemented.

[0030] The technical effect of the present invention is that it can establish a nonlinear precise mapping relationship between measurement domain data and target domain data according to actual working conditions, realize precise mapping from measurement domain data to target domain data, and achieve accurate detection of target domain data that is difficult to measure directly.

[0031] At the same time, the present invention eliminates the complicated calculation of system parameters in the process of establishing the traditional mapping relationship, and solves the problems of low mapping accuracy and complicated conversion process caused by idealized theoretical calculation.

[0032] The accurate mapping method and system calculation process of nonlinear measurement values ​​based on slope dynamic wingspan proposed in the present invention are simple, have high mapping accuracy, strong real-time performance, low manufacturing cost and are easy to implement. They occupy fewer resources and are very suitable for deployment in embedded miniaturized high-precision equipment with limited hardware resources and device volume, and have extremely high practical application value. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A flowchart of a method for accurately mapping nonlinear measurement values ​​based on slope dynamic span provided by the present invention;

[0034] Figure 2 A schematic diagram of scatter points for calibration of measurement domain-target domain data for the nonlinear measurement value accurate mapping method based on slope dynamic span provided by the present invention;

[0035] Figure 3 A schematic diagram of a slope span model of a calibration point interval of a nonlinear measurement value accurate mapping method based on slope dynamic span provided by the present invention;

[0036] Figure 4 It is a module schematic diagram of the nonlinear measurement value accurate mapping system based on slope dynamic wingspan of the present invention;

[0037] Figure 5 This is the measurement result of 50 spectrum peak wavelength values ​​of a 1 mm thick standard gauge block;

[0038] Figure 6 The 50th spectral peak wavelength value of the 1 mm thickness standard block is mapped by the system to the actual measurement value result diagram of the object to be measured. DETAILED DESCRIPTION

[0039] The present invention will be further described in detail in conjunction with the specific embodiments and the accompanying drawings given below. The embodiments are only used to explain the present invention, rather than to limit the present invention.

[0040] The present invention provides a method and system for accurately mapping non-linear measurement values based on slope dynamic wingspan, which can act on measurement domain data having a non-linear mapping relationship with target domain data, realize non-linear accurate mapping from measurement domain data to target domain data, and thus complete accurate measurement of target domain data that is difficult to directly measure. The present invention can establish a non-linear accurate mapping relationship between measurement domain data and target domain data according to actual working conditions, eliminating the cumbersome calculation of system parameters in the process of establishing traditional mapping relationships, as well as problems such as low conversion accuracy of mapping relationships and cumbersome conversion processes caused by idealized theoretical calculations, greatly reducing production and manufacturing costs and implementation difficulties, and at the same time having a greater improvement effect on mapping conversion accuracy.

[0041] See Figures 1 to 3 , the specific implementation steps of the non-linear measurement value accurate mapping method based on slope dynamic wingspan proposed in this embodiment are as follows:

[0042] S1: High-precision standard instruments that can be used for calibration in the target domain and the measurement domain are respectively used. Taking the target domain data as the ordinate and the measurement domain data as the abscissa, a plurality of data calibration points corresponding one-to-one between the target domain and the measurement domain are established. In this embodiment, the spectral peak wavelength value in the spectral confocal micro-displacement measurement process is used as the measurement domain data, and the precise displacement measurement value that is difficult to directly measure is used as the target domain data. The high-precision electric displacement platform in the target domain and the spectral peak wavelength value acquisition system of the spectral confocal displacement sensor in the measurement domain are respectively used as high-precision standard instruments, and then the calibration operation is completed. During the calibration process, since the target measurement accuracy of the spectral confocal displacement sensor in this embodiment is ±1μm, the high-precision electric displacement platform performs uniform continuous displacement steps at intervals of the highest displacement accuracy of 10μm, and the corresponding spectral peak wavelength values in the spectral peak wavelength value acquisition system are recorded. Taking the spectral peak wavelength value as the abscissa and the current position of the high-precision electric displacement platform as the ordinate, a plurality of discrete calibration points are obtained, as Figure 2 shown.

[0043] S2: The area between two adjacent calibration points is defined as a calibration point interval, and a slope wingspan model for each calibration point interval is established. The slope wingspan model is a straight line bundle composed of multiple straight lines passing through the left calibration point in the calibration point interval, as Figure 3 shown. The straight line bundle equation is where x is the measurement domain data; represents a slope group composed of and other multiple slopes, The slope of n1 points calculated for the left calibration point and the n1 - 1 calibration points adjacent to it on the left and right in the calibration point interval is the slope of (n1 + 1) points, and the other slopes are calculated in the same way; similarly, represents an intercept group composed of multiple intercepts such as The intercept of n1 points calculated for the left calibration point and the n1 - 1 calibration points adjacent to it on the left and right in the calibration point interval, and the other intercepts are calculated in the same way; represents the target domain result group calculated from each pair of slopes and intercepts. n1 and n2 are empirical values. In this embodiment, n1 = 3 and n2 = 7, that is, the slopes and intercepts of the left calibration point and the 2nd, 3rd, up to 6th calibration points adjacent to it on the left and right in each calibration interval are calculated respectively, and the slope group k (3,7) and the intercept group b (3,7) are formed, so as to form the slope wingspan model of the straight line bundle y (3,7) = k (3,7) x + b (3,7)

[0044] S3: In the detection environment, after waiting for the detection system to run stably, use it to obtain measurement data in multiple measurement domains for the object to be measured, that is, measurement domain data, and save it in the database. In this embodiment, after the spectral peak wavelength acquisition system of the spectral confocal displacement measurement sensor runs stably, use it to obtain spectral peak wavelength values for objects to be measured with different thicknesses. Multiple spectral peak wavelength values are obtained for each object to be measured and stored in the database according to the corresponding classification.

[0045] S4: Search for the serial number of the calibration point interval to which the collected measurement domain data belongs in sequence, and calculate the measurement domain data using the slope wingspan model corresponding to the calibration point interval to obtain the corresponding target domain result group In this embodiment, search for the serial number of the calibration point interval to which the collected spectral peak wavelength values belong in sequence, and use the slope wingspan model y (3,7) = k (3,7) x + b (3,7) to calculate and obtain the corresponding displacement measurement result group y (3,7) .

[0046] S5: Integrate and calculate the target domain result group obtained in step S4; since contains and other multiple target domain results, select different numbers of target domain results for re - integration. For example, select multiple target domain results to calculate the average value to reduce the number of target domain results. In this embodiment, select y3, y4, y5 from y (3,7) to calculate the average value to obtain the target domain result y 3*5 , similarly, calculate to obtain y​3*6 and y 3*7 。

[0047] S6: Sort the integrated target domain results in ascending order of numerical value, and select the median of the sorted results as the final mapping result of the measurement domain data to achieve the dynamic selection effect of the target domain results for the final mapping; in this embodiment, y 3*5 、y 3*6 and y 3*7 are sorted in ascending order of numerical value, and the median of the sorted results is selected as the displacement measurement value result of the final mapping of the spectral peak wavelength value, that is, the final mapping result.

[0048] See Figure 4 , this embodiment of the present invention also provides a precise mapping system for non-linear measurement values based on slope dynamic wingspan, specifically including the following modules:

[0049] Target domain data and measurement domain data calibration module, used to establish multiple data calibration points in one-to-one correspondence between the target domain and the measurement domain;

[0050] Slope wingspan model establishment module, used to define the calibration point interval and establish the slope wingspan model corresponding to each calibration point interval;

[0051] Measurement domain data acquisition module, used to collect multiple measurement domain data for the object to be measured and store them accordingly;

[0052] Slope wingspan calculation module, used to sequentially search for the serial number of the calibration point interval to which the collected measurement domain data belongs, and calculate the measurement domain data using the slope wingspan model corresponding to the calibration point interval to obtain the corresponding target domain result group;

[0053] Target domain result group integration module, used to re-integrate the target domain results in the target domain result group to reduce the number of target domain results;

[0054] Mapping result dynamic selection module, used to sort the integrated target domain results in ascending order of numerical value, and select the median of the sorted results as the final mapping result of the measurement domain data to achieve the dynamic selection effect of the target domain results for the final mapping.

[0055] The specific implementation methods of all the above modules are similar to the aforementioned precise mapping method for non-linear measurement values based on slope dynamic wingspan.

[0056] This embodiment also provides an electronic system device, including an electronic processor and a memory. A relevant computer program is stored in the memory. When the electronic processor executes the computer program stored in the memory, the aforementioned precise mapping method for non-linear measurement values based on slope dynamic wingspan will be implemented.

[0057] To better demonstrate the implementation effect of this method, in this embodiment, a standard gauge with a thickness of 1 mm is selected as the test object, and its thickness value is measured. Figure 5 To obtain 50 spectral peak wavelength values of the standard gauge using the spectral peak wavelength value acquisition system of a spectral confocal displacement measurement sensor with a target measurement accuracy of ±1 μm, so as to complete the acquisition of measurement domain data. Figure 6 The actual thickness measurement value results after the 50 spectral peak wavelength values collected are mapped by the non-linear measurement value precise mapping system based on the slope dynamic wingspan. It can be seen from the figure that the final mapping result provided by the method of the present invention is precise. The error of the actual thickness measurement value result after mapping is less than ±0.237 μm, and the variance is less than 0.008, with extremely high measurement accuracy and extremely strong stability. To further demonstrate the accuracy of the final mapping result provided by the method of the present invention, the above measurement operations are performed on more standard gauges with different thicknesses, and the actual thickness measurement value results of each thickness standard gauge after being mapped by the method of the present invention are listed in Table 1.

[0058]

[0059] It should be noted that the various embodiments described in the present invention are not restrictive and only serve to illustrate the present invention. Therefore, any other arbitrary implementation schemes obtained by those skilled in the relevant art in the field according to the technical route of the present invention, no matter what kind of modification or replacement is carried out, without departing from the basic idea of the present invention, all fall within the protection scope of the present invention.

Claims

1. A method for accurately mapping nonlinear measurements based on slope dynamic span, characterized in that: The steps include: S1: Establish multiple data calibration points that correspond one to one between the target domain and the measurement domain; S2: define the calibration point interval and establish the slope span model corresponding to each calibration point interval; S3: collecting measurement data in multiple measurement domains of the object to be measured, i.e., measurement domain data, and storing them accordingly; S4: Calculate according to the slope span model of the calibration point interval to which the collected measurement domain data belongs, and obtain the corresponding target domain result group; S5: reintegrate the target domain results in the target domain result group to reduce the number of target domain results; S6: Sort the integrated target domain results in order of numerical value, and select the median of the sorting as the final mapping result of the measurement domain data, so as to achieve a dynamic selection effect of the target domain result of the final mapping.

2. The method for accurately mapping nonlinear measurement values ​​based on slope dynamic span according to claim 1, characterized in that: Step S1 includes: using standard instruments that can be used for calibration in the target domain and the measurement domain respectively, using the target domain data as the ordinate and the measurement domain data as the abscissa, to establish a plurality of data calibration points that correspond one to one between the target domain and the measurement domain.

3. The method for accurately mapping nonlinear measurement values ​​based on slope dynamic span according to claim 1, characterized in that: Step S2 includes: defining the area between two adjacent calibration points as a calibration point interval, and establishing a slope span model for each calibration point interval. The slope span model is a straight line bundle consisting of multiple straight lines passing through the left calibration point in the calibration point interval. The straight line bundle equation is: Where x is the measurement domain data; Indicated by The slope group is composed of The slope of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval. is the slope of point (n1+1), and the rest of the slopes are similar. Indicated by The intercept group is composed of The intercept of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval, and the rest of the intercepts are calculated in the same way; represents the target domain result set calculated from each pair of slope and intercept; n1 and n2 are empirical values.

4. The method for accurately mapping nonlinear measurement values ​​based on slope dynamic span according to claim 1, characterized in that: Step S3 includes: in the detection environment, after the detection system is running stably, using the detection system to obtain a plurality of measurement domain data of the object to be detected, and storing the data in a database.

5. The method for accurately mapping nonlinear measurement values ​​based on slope dynamic span according to claim 1, characterized in that: Step S4 includes: searching for the calibration point interval sequence number to which the collected measurement domain data belongs in turn, and calculating the measurement domain data using the slope span model corresponding to the calibration point interval to obtain the corresponding target domain result set.

6. The method for accurately mapping nonlinear measurement values ​​based on slope dynamic span according to claim 1, characterized in that: Step S5 includes: grouping the target domain result obtained in step S4 Perform integrated calculations, Contains multiple target domain results: Different numbers of target domain results are selected and reintegrated to reduce the number of target domain results.

7. A nonlinear measurement value accurate mapping system based on slope dynamic span, characterized in that: Includes the following modules: A target domain data and measurement domain data calibration module is used to establish a plurality of data calibration points corresponding one to one between the target domain and the measurement domain; The slope-wingspan model building module is used to define the calibration point interval and build the slope-wingspan model corresponding to each calibration point interval; The measurement domain data acquisition module is used to collect multiple measurement domain data of the object to be measured and store them accordingly; The slope span calculation module is used to sequentially search for the calibration point interval sequence number to which the collected measurement domain data belongs, and calculate the measurement domain data using the slope span model corresponding to the calibration point interval to obtain the corresponding target domain result group; A target domain result group integration module, used for reintegrating the target domain results in the target domain result group to reduce the number of target domain results; The mapping result dynamic selection module is used to sort the integrated target domain results in order of numerical value and select the median of the sorting as the final mapping result of the measurement domain data to achieve the dynamic selection effect of the target domain result of the final mapping.

8. The nonlinear measurement value accurate mapping system based on slope dynamic span according to claim 7 is characterized in that: The processing process of the target domain data and measurement domain data calibration module includes: using the target domain data as the ordinate and the measurement domain data as the abscissa, establishing a plurality of data calibration points corresponding one to one between the target domain and the measurement domain.

9. The nonlinear measurement value accurate mapping system based on slope dynamic span according to claim 7, characterized in that: The processing process of the slope span model establishment module includes: defining the area between two adjacent calibration points as a calibration point interval, and establishing a slope span model for each calibration point interval. The slope span model is a straight line bundle consisting of multiple straight lines passing through the left calibration point in the calibration point interval. The straight line bundle equation is: Where x is the measurement domain data; Indicated by The slope group is composed of The slope of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval. is the slope of point (n1+1), and the rest of the slopes are similar. Indicated by The intercept group is composed of The intercept of point n1 is calculated from the left calibration point and the n1-1 calibration points adjacent to the left and right in the calibration point interval, and the rest of the intercepts are calculated in the same way; represents the target domain result set calculated from each pair of slope and intercept; n1 and n2 are empirical values.

10. An electronic system device, comprising an electronic processor and a memory, wherein the memory stores a related computer program, characterized in that: When the electronic processor executes the computer program stored in the memory, it is used to perform the nonlinear measurement value accurate mapping method based on slope dynamic span as described in any one of claims 1-6.

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