Installation and control method and device for a mask transfer manipulator

Abstract

The present invention relates to the technical field of handling machinery, and specifically relates to an installation and control method for a mask transfer manipulator, including the following steps: S1: Determine the installation position of the lifting module: Install the lifting module by hoisting to ensure the movement range of the manipulator in the vertical direction to adapt to the height of the product; S2: Center of gravity balance of the linear module: When the linear module extends to the farthest end, its center of gravity is within the range of the orthographic projection of the lifting module on the linear module, and the axis of the linear module along the movement direction intersects the vertical axis of the lifting module; S3: Determine the dust-free level: Set a vacuum pipeline in the linear module to meet the dust-free requirements of the manipulator by means of vacuum pumping; S4: Clamp different products through the clamping mechanism; S5: Balance the vibration during the movement: Detect the vibration frequencies of the rotating module and the linear module through vibration sensors to make the phase difference between the two be 180°.

Description

Technical Field

[0001] The present invention relates to the technical field of handling machinery, and particularly relates to an installation and control method and device for a mask transfer manipulator. Background Art

[0002] In the field of semiconductor manufacturing, as a key device connecting various processes of mask plate processing, the mask transfer manipulator undertakes the important task of efficiently and accurately transferring the mask plate between different process chambers. With the development of semiconductor technology towards smaller line widths and higher integration levels, unprecedented requirements have been put forward for the accuracy, speed, stability, and environmental cleanliness of mask plate transfer.

[0003] As the transfer height of the mask plate increases, the manipulator needs to have a higher height, but a higher height means that its stability cannot be guaranteed. Especially when lifting products with different heights or shapes, the problem of center of gravity offset is particularly prominent, which not only affects the transfer accuracy but also may cause mechanical vibration and increase the risk of mask plate damage. The conventional method is to increase the floor area of the manipulator to lower the center of gravity and ensure stability, but this method will affect the operation and installation of other structures.

[0004] Moreover, during the process of high-speed movement and precise positioning, the manipulator needs to have sufficient stiffness to resist deformation caused by inertial forces and external disturbances to ensure the absolute position accuracy of mask plate transfer. However, when the manipulator starts and stops, its vibration will reach a peak value, affecting the stability of the manipulator, and thus causing hidden cracks at the edge or inside of the mask plate.

[0005] Therefore, the present application has developed an installation and control method and device for a mask transfer manipulator to solve the problems existing in the prior art. Summary of the Invention

[0006] The object of the present invention is to provide an installation and control method and device for a mask transfer manipulator to solve the problems of insufficient arm span and insufficient stability in the prior art.

[0007] The technical solution of the present invention is: an installation and control method and device for a mask transfer manipulator, including the following steps:

[0008] S1: Determine the installation position of the lifting module: Install the lifting module by hoisting to ensure the movement range of the manipulator in the vertical direction to adapt to the height of the product;

[0009] S2: Center of gravity balance of the linear module: Determine the center of gravity position of the linear module. When the linear module extends to the farthest end, its center of gravity is within the range of the orthographic projection of the lifting module on the linear module, and the axis of the linear module in the movement direction intersects the vertical axis of the lifting module;

[0010] S3: Determine the dust-free level: Set up a vacuum pipeline inside the linear module, which passes through the rotary module and the lifting module and is connected to the outside, and meets the dust-free requirements of the manipulator by means of vacuum pumping;

[0011] S4: Clamp different products through the clamping mechanism;

[0012] S5: Balance the vibration during the movement process: Detect the vibration frequencies of the rotary module and the linear module through vibration sensors, and make the phase difference between the two be 180°.

[0013] Preferably, in step S5, during the startup stage of the rotary module and the linear module, the startup time interval between the linear module and the rotary module is △t, and the calculation formula is as follows:

[0014] ;

[0015] : Number of pole pairs;

[0016] : Target rotational speed reached by the startup of the rotary module;

[0017] : Vibration frequency of the rotary module.

[0018] Preferably, in step S5, during the stop stage of the rotary module and the linear module, the rotary module decelerates with an acceleration of At this time, the acceleration of the linear module is , and the calculation formula is as follows:

[0019] ;

[0020] : Moment of inertia of the rotary module;

[0021] : Load mass of the linear module;

[0022] : Vibration frequency of the rotary module;

[0023] : Vibration frequency of the linear module.

[0024] A mask transfer manipulator device, comprising:

[0025] A lifting module, which is fixedly installed in a top-hoisting form and is used to provide a lifting displacement in the vertical direction;

[0026] The rotation module is built inside the lifting module and can move up and down along the height direction of the lifting module to achieve the adjustment of the manipulator in the vertical direction and the circumferential direction;

[0027] The linear module is fixedly connected to the end of the rotation module away from the lifting module through a support platform. The linear module includes a fixed part and a telescopic part that makes a linear reciprocating motion along its own length direction. The fixed part is stably placed on the support platform, and a clamping mechanism is provided at the end of the telescopic part in the advancing direction; it is used to clamp objects in a limited space;

[0028] The vacuum joint is connected to the vacuum device and is used to remove dust inside the manipulator.

[0029] Preferably, the clamping mechanism includes:

[0030] The bottom plate is fixed on the telescopic part through a mounting plate and is placed in an inverted state. The surface of the bottom plate is provided with a pair of mounting grooves that are symmetrically distributed about the center and are offset from each other;

[0031] A pair of guide rails are arranged in parallel on the bottom plate and are respectively located outside the corresponding mounting grooves, so that the two mounting grooves are located between the pair of guide rails;

[0032] A pair of clamping jaw assemblies are respectively arranged at both ends along the length direction of the guide rail and make a reciprocating motion along the length direction of the guide rail through a driving device, and the movement trajectory covers the interval corresponding to the mounting groove.

[0033] Preferably, the driving device includes a plurality of coils and a plurality of permanent magnets. The plurality of coils are arranged in an array in the mounting groove, and the plurality of permanent magnets are arranged in an array on the side of the clamping jaw assembly adjacent to the coil. Through the interaction between the magnetic field generated by the coil and the permanent magnet, the linear motion of the clamping jaw assembly is realized.

[0034] Preferably, a magnetic conduction plate is provided between the permanent magnet and the coil. The magnetic conduction plate is fixedly arranged on the permanent magnet or fixedly arranged on the coil and is used to enhance the magnetic force.

[0035] Preferably, an adjustment plate is installed in the mounting groove. The adjustment plate is provided with a plurality of notches, and the plurality of notches are evenly arranged on the adjustment plate, so as to generate a tooth-slot force between the adjustment plate and the permanent magnet.

[0036] Preferably, a plurality of mounting hole positions are provided on the mounting plate. The telescopic part and the clamping mechanism are fixedly connected by passing fasteners through the mounting holes.

[0037] Compared with the prior art, the advantages of the present invention are:

[0038] (1) The lifting module is installed by means of hoisting, which not only ensures that the manipulator has sufficient movement range in the vertical direction to handle products of different heights, but also greatly reduces the occupied space of the lifting module, enabling the clamping and movement of the mask plate within a limited space. Moreover, the hoisting method changes the mechanical fingers at the end of the manipulator from the traditional inserting type to the grasping type. Therefore, it is necessary to add a driving device and an actuator. Through the linear motor that cooperates with each other by the magnetic steel and the coil, the thickness of the magnetic steel and the number of turns of the coil can be reduced to meet the space requirements. In addition, the two guide rails are distributed in a centrosymmetric and mutually misaligned manner, which can reduce the space required in terms of length while meeting the clamping force.

[0039] (2) The traditional elongation device is changed to a linear module to increase the elongation length to meet the requirements of mask plate clamping and movement. By reasonably controlling the position of the center of gravity when the linear module extends to the farthest end, it is made to fall within the orthographic projection range of the lifting module, effectively dispersing the weight, avoiding the generation of eccentric torque, and at the same time ensuring the accurate intersection of the axes, balancing the forces on both sides, reducing vibration and shaking, lowering the vibration frequency, and ensuring the reliability and stability of mask plate clamping and movement.

[0040] (3) A vacuum pipeline is arranged inside the linear module. It passes through the rotating module and the lifting module and is connected to the outside through a vacuum joint. The dust-free requirements of the manipulator are met by means of vacuum pumping, ensuring the cleanliness of the mask plate production environment, improving the product quality. At the same time, the surface cleanliness of the mask plate is maintained, avoiding the influence of impurity contamination on the quality and performance of the mask plate, and reducing the vibration generated by the friction of the internal components of the manipulator, reducing the damage of the vibration to the mask plate.

[0041] (4) High-precision vibration sensors are installed at the connection position between the rotating module and the linear module and at the telescopic part of the linear module to collect vibration acceleration signals in real time, monitor and adjust the vibration phase difference between the rotating module and the linear module to be close to 180°, so that the vibrations of the rotating module and the linear module during the start-up stage and the stop stage cancel each other out, thereby improving the stability of the mask plate and preventing the generation of hidden cracks at the edge or inside of the mask plate. Brief Description of the Drawings

[0042] The present invention will be further described below in conjunction with the drawings and embodiments:

[0043] Figure 1 It is a flowchart of the installation and control method and device for a mask transfer manipulator according to the present invention;

[0044] Figure 2 It is a schematic structural diagram of a mask transfer manipulator device according to the present invention;

[0045] Figure 3 It is Figure 2 An enlarged schematic diagram of A in

[0046] Figure 4Schematic diagram of the clamping mechanism of the present invention;

[0047] Figure 5 Top view of the clamping mechanism of the present invention;

[0048] Figure 6 Schematic diagram of the jaw assembly of the present invention;

[0049] Figure 7 Schematic diagram of the adjusting plate of the present invention.

[0050] Wherein: 1, lifting module; 2, rotating module; 3, linear module; 31, fixed part; 32, telescopic part; 4, support table; 5, clamping mechanism; 51, bottom plate; 52, installation groove; 53, guide rail; 54, jaw assembly; 55, driving device; 551, coil; 552, permanent magnet; 56, mounting plate; 6, vacuum joint; 7, adjusting plate; 71, notch. Detailed implementation manners

[0051] The following combines specific embodiments to further elaborate on the content of the present invention:

[0052] It should be noted that in the traditional structure, the mask transfer manipulator is fixedly installed on the ground, that is, in a non-hoisting manner, with the bottom of the lifting module fixed, the robotic arm fixed to the upper end of the lifting module, and the end of the robotic arm using plug-in mechanical fingers to pick and place the mask plate. However, in actual application scenarios, the stacking height of the product (mask plate) is relatively high. To meet the product processing requirements, it is necessary to continuously increase the height of the lifting module to adapt to products of different heights. However, after the height of the lifting module is increased, its motion stability cannot be guaranteed. To ensure the stable and reliable operation of the lifting module during operation, it is usually necessary to increase its installation footprint to enhance stability. However, this will actually affect the operation and installation of other structures, and the goal of stable operation cannot be achieved by expanding the footprint of the lifting module.

[0053] Therefore, as Figure 1 shown, the present application discloses an installation and control method and device for a mask transfer manipulator, including the following steps:

[0054] S1: Install the lifting module 1 in a hoisting manner. Specifically, the lifting module 1 is firmly installed on the top structure. Through this installation method, on the one hand, it can effectively ensure that the manipulator has sufficient movement range in the vertical direction, enabling it to easily handle products of different heights and fully meet the lifting requirements during product processing; on the other hand, compared with the traditional ground installation method, the hoisting installation significantly reduces the space occupied by the lifting module 1 in the horizontal direction, greatly improving the space utilization rate and perfectly solving the contradiction between the stable operation of the lifting module 1 and the stable operation and installation of other structures.

[0055] S2: After the hoisting and installation of the lifting module 1 are completed, although the space occupation is reduced to a certain extent, in actual applications, the installation method of the original elongation device is difficult to meet the operation requirements of the mask plate. To solve this dilemma, in this application, the traditional elongation device is replaced with a linear module 3 to adapt to the moving requirements of the existing mask plate.

[0056] However, the linear module 3 itself has a large weight. During the mask plate clamping operation, it needs to perform telescopic movements frequently. In this dynamic working state, the center of gravity position of the linear module 3 will affect the stability of the manipulator. If the center of gravity is not properly controlled, it is extremely easy to cause vibration during the telescopic movement, resulting in an abnormal increase in the vibration frequency, which will in turn affect the clamping accuracy and moving smoothness of the mask plate, thereby increasing the possibility of the mask plate breaking.

[0057] Specifically, the linear module 3 includes a fixed part 31 and a telescopic part 32. To ensure the stable operation of the system, when the telescopic part 32 of the linear module 3 extends and retracts to the extreme working position at the farthest end, the center of gravity is accurately located within the range of the orthographic projection of the lifting module 1 on the plane where the linear module 3 is located, effectively dispersing the weight of the linear module 3 to the lifting module 1, avoiding excessive eccentric moments caused by the center of gravity deviation. At this time, when the telescopic part 32 slides on the fixed part 31, since the weight of the telescopic part 32 itself is relatively light, it will not have a great impact on the center of gravity of the linear module 3. Therefore, after the center of gravity at the extreme working position when the telescopic part 32 extends and retracts to the farthest end is determined, the sliding of the telescopic part 32 will not affect its stability. At the same time, the axis of the linear module 3 along the movement direction intersects precisely with the vertical axis of the lifting module 1, enabling the linear module 3 to effectively balance the forces on both sides during the telescopic movement, reducing vibrations and swaying caused by uneven forces, significantly reducing the vibration frequency during the movement of the linear module 3, and ensuring the reliability and stability of the mask plate clamping and moving processes.

[0058] S3: Determine the dust-free level: A vacuum pipeline is arranged in the linear module 3 and passes through the rotary module 2 and the lifting module 1, and is connected to the outside through a vacuum joint 6 to meet the dust-free requirements of the manipulator by means of vacuum pumping.

[0059] S4: In the product picking operation scenario, the traditional method uses the lifting module 1 in combination with the plugging device to achieve the movement operation of the product. The mechanical finger of the plug-in type has a simple structure and is only a thin sheet-like structure. However, when the lifting module 1 is modified into a hoisting mode, the traditional plug-in plugging method is difficult to adapt to the operation requirements in the hoisting state. Therefore, the plugging mechanism is changed to the clamping mechanism 5. On the one hand, its structure highly conforms to the hoisting operation mode, can flexibly adapt to the spatial layout and operation requirements in the hoisting environment, and ensures the stable movement of the mask plate during hoisting; on the other hand, this mechanism is adjustable and can quickly and accurately adapt to different product sizes according to the size specifications of different products, and can achieve stable clamping, significantly improving the compatibility and operation efficiency of the manipulator for diversified products. But after the traditional plugging device is replaced by the clamping mechanism 5, the clamping mechanism 5 must be configured with a driving device 55 and other actuators. If the conventional design method is adopted, it will inevitably make the spatial layout of the clamping mechanism 5 larger than that of the traditional plug-in mechanical finger, including the dimensions in the thickness and length directions, and will also further increase its overall weight; therefore, through the reasonable design of the structure in this application, the dimensions in the thickness and length directions of the structure are minimized, and the specific structure of the clamping mechanism 5 is referred to as follows.

[0060] S5: In the automatic production process of the mask plate, after the clamping mechanism 5 accurately clamps the mask plate, it needs to be safely and stably transferred to the next process for processing. The transfer process requires the coordinated operation of the rotation module 2 and the linear module 3. However, in the actual operation process, the linear module 3 and the rotation module 2 will generate a dynamic impact effect during the start-up and stop phases, resulting in a sharp increase in the vibration frequency, making the vibration frequency significantly higher than that in the stable operation phase. Especially in the transfer scenario of ultra-thin and highly brittle materials such as mask plates, the vibration energy of the module is easily transmitted to the surface of the mask plate through the mechanical interface, resulting in edge chipping, hidden cracks or even overall fragmentation, thereby causing a decrease in the yield and cost losses.

[0061] To effectively suppress the destructive influence of the module vibration on the mask plate, in this application, high-precision vibration sensors are respectively installed at the connection position of the rotation module 2 and the linear module 3, that is, on the support platform 4, and on the telescopic part 32 of the linear module 3, to collect the vibration acceleration signal of the module in real time and transmit the signal to the control system. The control system performs spectral analysis on the collected signal based on the fast Fourier transform (FFT) algorithm, extracts the vibration main frequency, amplitude and phase characteristics, and monitors that the vibration phase difference between the rotation module 2 and the linear module 3 is always close to 180° (error tolerance ±5°).

[0062] In the start-up phase, the start-up time of the linear module 3 lags behind the start-up time of the rotation module 2, and the interval time is △t. The calculation formula is as follows:

[0063] ;

[0064] : Number of pole pairs;

[0065] : Target rotational speed reached by the rotation module at startup;

[0066] : Vibration frequency of the rotation module.

[0067] When the distance between the linear module 3 and the rotation module 2 satisfies △t, the phase difference of the vibration frequencies generated by the two is 180°.

[0068] In the stop phase, the rotation module 2 decelerates with an acceleration of , while the acceleration of the linear module 3 during deceleration is , and the calculation formula is as follows:

[0069] ;

[0070] : Moment of inertia of the rotation module;

[0071] : Load mass of the linear module;

[0072] : Vibration frequency of the rotation module;

[0073] : Vibration frequency of the linear module.

[0074] According to the weight of the different products being picked up and the real-time vibration frequencies of the linear module 3 and the rotation module 2, the acceleration of the linear module 3 is adjusted to satisfy the above formula, thereby achieving a phase difference of 180° in the vibration frequencies generated by the two modules. By adjusting the influence of the vibrations generated by the rotation module 2 and the linear module 3 during the startup phase and the stop phase on the movement process of the mask plate, it is possible to ensure that the mask plate meets the stability requirements during the entire movement process and guarantee the accuracy.

[0075] Furthermore, the linear module 3 and the clamping mechanism 5 are firmly connected through the mounting plate 56. A plurality of mounting holes are arranged on the mounting plate 56. During installation, fasteners pass through these mounting holes to tightly fix the telescopic part 32 of the linear module 3 and the clamping mechanism 5 together. Through the plurality of mounting holes, the number of connection points between the two is significantly increased, thereby effectively improving the overall connection stiffness between the linear module 3 and the clamping mechanism 5, significantly reducing the vibration amplitude during the movement of the manipulator, and significantly enhancing the stability, thus minimizing the impact of vibrations on the mask plate to the greatest extent.

[0076] Such as Figures 2 - 3As shown in the figure, a mask plate transfer manipulator device includes a lifting module 1, a rotating module 2, a linear module 3 and a vacuum joint 6. Specifically, the rotating module 2 selects a DD motor. Among them, the lifting module 1 is fixedly installed in a top suspension form, providing stable vertical lifting displacement for the device to ensure that the manipulator can operate at different height positions to meet the requirements of different mask plate heights. The rotating module 2 is built into the lifting module 1. Through cooperation with the lifting module 1, the rotating module 2 realizes flexible adjustment of the manipulator in two dimensions: the vertical direction and the circumferential direction. In the vertical direction, it rises and falls together with the lifting module 1; in the circumferential direction, it can rotate independently to adjust the posture of the manipulator to meet the requirements of different angular positions during the mask plate transfer process. The linear module 3 is firmly connected to the end of the rotating module 2 away from the lifting module 1 through a support table 4. The linear module 3 includes a fixed part 31 and a telescopic part 32. The fixed part 31 is fixed on the support table 4, providing a stable support foundation for the entire linear motion. The telescopic part 32 can perform linear reciprocating motion along the length direction of the linear module 3 itself. A clamping mechanism 5 is provided at the end of the telescopic part 32 in the advancing direction. By cooperating with the rotating module 2 and the linear module 3 to control the movement of the clamping mechanism 5, the clamping and movement of different products are satisfied.

[0077] In order to ensure the dust-free level of the manipulator, a vacuum joint 6 is also provided on the linear module 3. This joint is connected to an external vacuum device. During the mask plate transfer process, the vacuum joint 6 extracts the air inside the manipulator to form a negative pressure environment, thereby effectively removing possible impurities such as dust and particles inside. This not only helps to maintain the cleanliness of the mask plate surface and avoid affecting the quality and performance of the mask plate due to impurity contamination, but also reduces the vibration generated by the friction between the internal components of the manipulator and minimizes the damage to the mask plate caused by the vibration.

[0078] In this embodiment, the clamping mechanism 5 includes a base plate 51, guide rails 53, jaw assemblies 54, and a driving device 55. Among them, the base plate 51 serves as a support foundation, and a pair of mounting grooves 52 are provided on its surface. Correspondingly, a pair of guide rails 53 are provided outside the mounting grooves 52, such that the two mounting grooves 52 are included between this pair of guide rails 53. Thus, the guide rails 53 not only provide precise guidance for the movement of the jaw assemblies 54, but also can provide sufficient stability for the jaw assemblies 54, ensuring that the jaw assemblies 54 can move smoothly along a predetermined direction. The two jaw assemblies 54 are respectively located at both ends in the length direction of the guide rails 53, and their movement trajectories can completely cover the intervals of the corresponding mounting grooves 52, enabling the jaw assemblies 54 to move freely within the range where the mounting grooves 52 are located. The driving device 55 includes a plurality of coils 551 and a plurality of permanent magnets 552. The coils 551 are placed in the mounting grooves 52, and the permanent magnets 552 are installed on the side of the jaw assemblies 54 adjacent to the coils 551. When the coils 551 are energized, a magnetic field will be generated, and the permanent magnets 552 will be subjected to a force under the action of the magnetic field, thereby driving the jaw assemblies 54 to move along the guide rails 53.

[0079] Further, a plurality of coils 551 are provided and are arranged in an array in the mounting grooves 52. A plurality of permanent magnets 552 are provided and are arranged in an array on the moving plate. The permanent magnets 552 are arranged opposite to the coils 551. Through the interaction between the magnetic field generated by the coils 551 and the permanent magnets 552, the linear motion of the moving plate is realized. The array of the plurality of coils 551 forms a more uniform magnetic field region, improving the moving accuracy. At the same time, it can improve the overall thrust density, enabling the jaws to have a greater clamping force. The array arrangement of the plurality of permanent magnets 552 can further reduce the deflection or vibration generated by a single permanent magnet 552, enhancing the stability of the movement.

[0080] In practical applications, as Figures 4 - 7 shown, to complete the clamping operation in a limited space, although driving mechanisms such as electric cylinders can be miniaturized to meet the space requirements, their accuracy cannot be guaranteed. Therefore, a linear motor with permanent magnets 552 and coils 551 cooperating with each other is adopted. At the same time, the thickness of the permanent magnets 552 and the number of turns of the coils 551 can be reduced to meet the space requirements. Moreover, the two guide rails 53 are distributed in a centrosymmetric and mutually offset manner. On the basis of being able to meet the clamping force, the space required in terms of length is reduced. However, when the number of turns of the coils 551 is insufficient or the permanent magnets 552 are too thin, they cannot generate an effective thrust to meet the force for clamping the object. Therefore, a magnetic conduction plate (not shown in the figure) is fixedly arranged on the permanent magnets 552 or a magnetic conduction plate (not shown in the figure) is fixedly arranged on the coils 551. Whether the magnetic conduction plate is arranged on the permanent magnets 552 or the coils 551, it can increase the magnetic force, thereby increasing the thrust of the jaw assemblies 54. Under the condition of meeting the space requirements, the thrust is increased, thereby increasing the clamping force to meet the clamping requirements.

[0081] As shown in the figure, to prevent the dropped objects from being clamped due to sudden power failure, an adjusting plate 7 made of rigid material is provided in the installation groove 52. A plurality of equally spaced notches 71 are evenly distributed on the surface of the adjusting plate 7. When the magnet 552 on the moving plate and the adjusting plate 7 are in relative positions, the magnetic field of the magnet 552 will be embedded in the notch 71 structure of the adjusting plate 7, so as to form a cogging effect between the two. And the cogging force can exist independently of the electromagnetic force, and through the rigid structure of the adjusting plate 7 and the geometric cooperation of the magnet 552 array, a stable locking force is provided for the moving plate after power failure, ensuring that the clamped object can still maintain its position fixed without power supply and avoiding the risk of falling.

[0082] In order to more precisely control the grasping force of the jaw assembly 54 and meet higher precision requirements, an encoder is installed on one side of the installation groove 52, specifically in the moving direction of the jaw assembly 54 when clamping an object, for real-time monitoring of the displacement position and motion state of the jaw assembly 54. At the same time, a plurality of Hall elements are evenly arranged on the surface of the bottom plate 51 along the moving path direction of the jaw assembly 54. When the moving plate moves with the jaw assembly 54, the Hall elements can accurately feedback the real-time position information of the moving plate through the magnetic field change, complementing the encoder data to ensure the accuracy and reliability of the motion control.

[0083] The above embodiments are only used to illustrate the technical concept and features of the present invention, and their purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention.

Claims

1. An installation and control method for a mask transfer manipulator, characterized in that Including the following steps: S1: Determine the installation position of the lifting module (1): Install the lifting module (1) by hoisting to ensure the movement range of the manipulator in the vertical direction to adapt to the height of the product; S2: Center of gravity balance of the linear module (3): Determine the center of gravity position of the linear module (3). When the linear module (3) extends to the farthest end, its center of gravity is within the range of the orthographic projection of the lifting module (1) on the linear module (3), and the axis of the linear module (3) in the movement direction intersects with the vertical axis of the lifting module (1); S3: Determine the dust-free level: Install a vacuum pipeline in the linear module (3), which passes through the rotating module (2) and the lifting module (1) and is connected to the outside to meet the dust-free requirements of the manipulator by evacuating; S4: Clamp different products through the clamping mechanism (5); S5: Balance the vibration during the movement process: Detect the vibration frequencies of the rotating module (2) and the linear module (3) through vibration sensors to make the phase difference between the two 180 degrees.

2. The installation and control method of a mask transfer manipulator according to claim 1, characterized in that: In step S5, during the startup stage of the rotating module (2) and the linear module (3), the startup time interval between the linear module (3) and the rotating module (2) is △t, and the calculation formula is as follows: ； : Number of pole pairs; : The target rotational speed reached when the rotation module starts. : The vibration frequency of the rotation module.

3. The installation and control method of a mask transfer manipulator according to claim 1, characterized in that: In step S5, during the stop phase of the rotation module (2) and the linear module (3), the rotation module (2) decelerates at an acceleration of , and at this time, the acceleration of the linear module (3) is , and the calculation formula is as follows: ； : The inertia of the rotation module; : Load mass of the linear module; : The vibration frequency of the rotation module; : The vibration frequency of the linear module.

4. A mask transfer manipulator device is controlled by using the installation and control method of a mask transfer manipulator according to any one of claims 1-3, and is characterized in that, Including: The lifting module (1) is fixedly installed in a top-hoisting form and is used to provide lifting displacement in the vertical direction; The rotating module (2) is built inside the lifting module (1) and can move up and down along the height direction of the lifting module (1) to achieve the adjustment of the manipulator in the vertical and circumferential directions; The linear module (3) is fixedly connected to one end of the rotating module (2) away from the lifting module (1) through the support platform (4). The linear module (3) includes a fixed part (31) and a telescopic part (32) that makes a linear reciprocating motion along its own length direction. The fixed part (31) is stably placed on the support platform (4), and a clamping mechanism (5) is provided at the end of the telescopic part (32) in the advancing direction; it is used to clamp objects in a limited space; The vacuum joint (6) is connected to a vacuum device and is used to remove dust inside the manipulator.

5. The mask transfer manipulator device according to claim 4, characterized in that The clamping mechanism (5) includes: The bottom plate (51) is fixed on the telescopic part (32) through the mounting plate (56) and is placed in an inverted state. The surface of the bottom plate (51) is provided with a pair of mounting grooves (52) that are centrally symmetrically distributed and offset from each other; A pair of guide rails (53) are arranged in parallel on the bottom plate (51) and are respectively located outside the corresponding mounting grooves (52), so that the two mounting grooves (52) are located between the pair of guide rails (53); A pair of jaw assemblies (54) are respectively arranged at both ends along the length direction of the guide rail (53) and make a reciprocating motion along the length direction of the guide rail (53) through the driving device (55), and the movement track covers the interval of the corresponding mounting groove (52).

6. The mask transfer manipulator device according to claim 5, wherein: The driving device (55) includes a plurality of coils (551) and a plurality of permanent magnets (552). The plurality of coils (551) are arranged in an array in the mounting groove (52), and the plurality of permanent magnets (552) are arranged in an array on the side of the jaw assembly (54) adjacent to the coils (551). Through the interaction between the magnetic field generated by the coils (551) and the permanent magnets (552), the linear motion of the jaw assembly (54) is realized.

7. A mask transfer manipulator device according to claim 6, characterized in that: A magnetic conduction plate is provided between the permanent magnet (552) and the coil (551). The magnetic conduction plate is fixedly arranged on the permanent magnet (552) or on the coil (551) for enhancing the magnetic force.

8. The mask transfer manipulator device according to claim 6, characterized in that: An adjusting plate (7) is installed in the mounting groove (52). The adjusting plate (7) is provided with a plurality of notches (71). The plurality of notches (71) are uniformly arranged on the adjusting plate (7) to generate a cogging force between the adjusting plate (7) and the permanent magnet (552).

9. The mask transfer manipulator device according to claim 5, characterized in that: A plurality of mounting holes are formed in the mounting plate (56). The telescopic part (32) and the clamping mechanism (5) are fixedly connected by passing fasteners through the mounting holes.

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