System for transporting articles

Abstract

The present invention provides a system for transporting articles that can transport various articles and includes a transport robot implemented in a compact size. The system for transporting articles includes: a rail mounted to extend in a vertical direction; a lifting device configured to ascend and descend along the track; a carriage device mounted on the lifting device and configured to mount a first type of articles or a second type of articles having different heights; and a control device controlling at least one of the lifting device and the bracket device, in which the bracket device includes a base portion, a support portion mounted on the base portion and moving in an up-down direction relative to the base portion, and a gripper mounted on a lower portion of the support portion to move with movement of the support portion, the holder is configured to hold a first top flange of a first type of article and a second top flange of a second type of article, and the control device variably adjusts a distance between the support portion and the base portion according to whether the holder holds the first type of article or the second type of article.

Description

[0001] Cross - reference to related applications

[0002] This application claims priority to and all benefits arising under 35 U.S.C. 119 from Korean Patent Application No. 10 - 2023 - 0197024, filed with the Korean Intellectual Property Office on December 29, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present disclosure relates to a system for transporting articles. Background Art

[0004] Inside a semiconductor factory, articles are moved by an automatic transport system. The automatic transport system includes, for example, an overhead hoist transport (OHT) and an overhead shuttle (OHS).

[0005] Meanwhile, a tower lift is used to transport articles between floors. A tower lift may be required to transport various articles (e.g., wafer storage containers and alignment mark storage containers), and the size and clamping method may be changed according to the type of article. Summary of the Invention

[0006] Aspects of the present disclosure provide a system for transporting articles, the system being capable of transporting various types of articles and including a transport manipulator implemented in a compact size.

[0007] The object of the present invention is not limited thereto, and other aspects not mentioned will be clearly understood by those of ordinary skill in the art from the following description.

[0008] According to an aspect of the present disclosure, there is provided a system for transporting articles, the system including: a rail installed to extend in a vertical direction; a lifting device configured to move up and down along the rail; a carriage device installed on the lifting device and configured to mount a first type of article or a second type of article having different heights; a control device configured to control at least one of the lifting device and the carriage device, wherein the carriage device includes: a base; a support portion installed on the base and movable relative to the base in a vertical direction; and a gripper installed on a lower portion of the support portion to move with the movement of the support portion and configured to grip a first top flange of the first type of article and a second top flange of the second type of article, and the control device differently adjusts a distance between the support portion and the base according to whether the gripper grips the first type of article or the second type of article.

[0009] According to another aspect of the present disclosure, a system for transporting articles is provided. The system includes: a track installed to extend in the vertical direction; a lifting device configured to move up and down along the track; a manipulator mounted on the lifting device; and a control device configured to control at least one of the lifting device and the manipulator. The manipulator includes a first bracket device and a second bracket device arranged in the vertical direction. The first bracket device performs a turn motion through a first driver connected to the lifting device. The first bracket device includes: a base; a support portion mounted on the base; a second driver mounted on the base and configured to move the support portion in the vertical direction; a third driver mounted on the base and configured to move the support portion and the second driver in the forward and backward directions; and a gripper mounted on the lower portion of the support portion and configured to move with the movement of the support portion. The gripper is configured to grip a first top flange of a first type of article and a second top flange of a second type of article. The support portion is configured to support a first bottom surface of a third type of article. The control device maintains: when the gripper grips the first type of article, a first distance between the bottom surface of the first type of article and the base is within a first safety distance; when the gripper grips the second type of article, a second distance between the bottom surface of the second type of article and the base is within the first safety distance; and the first distance and the second distance are the same as each other.

[0010] According to another aspect of the present disclosure, a system for transporting articles is provided. The system includes: a first track installed to extend in a vertical direction; a lifting device configured to ascend and descend along the first track; a second track provided on a first side of the first track and installed in a horizontal direction; a third track provided on a second side of the first track and installed in a horizontal direction; a carriage device mounted on the lifting device and configured to mount a first type of article and a second type of article having different heights; a control device configured to control at least one of the lifting device and the carriage device. The carriage device includes: a base; a support portion mounted on the base and movable relative to the base in a vertical direction; and a gripper mounted on a lower portion of the support portion and movable with the movement of the support portion, the gripper being configured to grip a first top flange of the first type of article and a second top flange of the second type of article, the support portion being configured to support a bottom surface of a third type of article. The carriage device moves along the first track and transports the first type of article to the second track, and moves along the first track and transports the second type of article to the third track. The control device maintains: when the carriage device transports the first type of article, a first distance between a bottom surface of the first type of article and the base is within a first safety distance, and when the carriage device transports the second type of article, a second distance between a bottom surface of the second type of article and the base is within the first safety distance, and the first distance and the second distance are the same as each other.

[0011] Details of other exemplary embodiments are included in the detailed description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Referring to the drawings, the above and other aspects and features of the present disclosure will become apparent from the detailed description of the embodiments of the present disclosure.

[0013] Figure 1 FIG. [X] is a side view for describing a system for transporting articles according to some exemplary embodiments of the present disclosure;

[0014] Figure 2 FIG. [X] is a block diagram for describing a system for transporting articles according to some exemplary embodiments of the present disclosure;

[0015] Figure 3 FIG. [X] is for describing Figure 1 a perspective view of the robotic arm shown in FIG. [X];

[0016] Figure 4 FIG. [X] is a side view for describing a first carriage device;

[0017] Figure 5 FIG. [X] is for describing Figure 4 a perspective view of a second driver of the first carriage device shown in FIG. [X];

[0018] Figure 6 Is a perspective view of a third driver for a first carriage device shown in Figure 4 ;

[0019] Figure 7 Is a perspective view of a support portion of a first carriage device shown in Figure 4 ;

[0020] Figure 8 Is a perspective view of a gripper of a first carriage device shown in Figure 4 ;

[0021] Figure 9 Is a diagram for describing a first operation of a system for transporting an item according to some exemplary embodiments of the present disclosure;

[0022] Figure 10 Is a diagram for describing a second operation of a system for transporting an item according to some exemplary embodiments of the present disclosure;

[0023] Figure 11 Is Figure 9 an enlarged view of region Q1 of Figure 10 and region Q2 of

[0024] Figure 12 Is a diagram for describing a third operation of a system for transporting an item according to some exemplary embodiments of the present disclosure;

[0025] Figure 13 Is Figure 12 an enlarged view of region Q3 of

[0026] Figure 14 Is a conceptual diagram of a system for transporting an item according to some exemplary embodiments of the present disclosure. Detailed Description of the Invention

[0027] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. The advantages and features of the present disclosure, and the methods for achieving the advantages and features, will become apparent with reference to the following described exemplary embodiments in conjunction with the accompanying drawings. However, the present disclosure is not limited to the exemplary embodiments disclosed below, but can be implemented in various different forms. These exemplary embodiments are provided only to make the present disclosure complete and to allow those skilled in the art to fully understand the scope of the present disclosure, and the present disclosure is defined only by the scope of the claims. Throughout the specification, the same reference numerals denote the same components.

[0028] As shown in the accompanying drawings, spatially relative terms such as "below", "beneath", "under", "above", "over", etc. can be used to easily describe the relationship between one element or component and another. Spatially relative terms should be understood to include terms in different directions of an element during use or operation in addition to the directions shown in the drawings. For example, when the element shown in the figure is rotated, an element described as "below" or "beneath" another element can be located "above" the other element. Thus, the exemplary term 'below' can include both below and above. The element can also be oriented in other directions, and thus spatially relative terms can be interpreted according to the orientation.

[0029] The terms "first", "second", etc. are used to describe various elements, components, and / or parts, but these elements, components, and / or parts are not limited by these terms. These terms can only be used to distinguish one element, component, or part from another. Thus, within the spirit of the present disclosure, the first element, first component, or first part mentioned below can also be the second element, second component, or second part.

[0030] Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. When describing the exemplary embodiments of the present disclosure with reference to the accompanying drawings, the same or corresponding components will be denoted by the same reference numerals, and overlapping descriptions thereof will be omitted.

[0031] Figure 1 is a side view for describing a system for transporting an article according to some exemplary embodiments of the present disclosure. Figure 2 is a block diagram for describing a system for transporting an article according to some exemplary embodiments of the present disclosure. Figure 3 is for describing Figure 1 a perspective view of the robot shown in

[0032] Referring to Figures 1 to 3 , a system for transporting an article (i.e., a tower lift) includes a lifting device 80, a robot 10, and a control device 50.

[0033] The system for transporting an article moves an article in the up and down direction (or vertical direction) (Z direction) (see reference numeral V). In this regard, the control device 50 controls the operation of at least one of the lifting device 80 and the robot 10.

[0034] The track 88 is installed along the transport path so as to extend in the up and down direction (Z direction).

[0035] The lifting device 80 can be raised and lowered along the track 88 in various ways. For example, various methods can be applied to the lifting device 80, such as a method using a belt wound around a pair of pulleys installed on the upper and lower sides of the track, a method using a linear motor (LM) guide and a block, and a method using magnetic force.

[0036] The manipulator 10 is installed on the lifting device 80, and the manipulator 10 also moves with the movement of the lifting device 80. The manipulator 10 includes a first bracket device 100 and a second bracket device 200 installed in the vertical direction. Figure 1 and Figure 2 It is described in [reference] that the manipulator 10 includes two bracket devices 100 and 200, but the manipulator 10 can also include one bracket device, or can also include three or more bracket devices.

[0037] Each of the first bracket device 100 and the second bracket device 200 can perform an entry-exit operation. That is, each of the first bracket device 100 and the second bracket device 200 can perform a transmission operation and a recovery operation. To achieve such an operation, each of the first bracket device 100 and the second bracket device 200 can include a chain configuration capable of performing bending and stretching operations, but is not limited thereto. As long as the first bracket device 100 and the second bracket device 200 are configured to be mobile or deformable to pick up an item, the first bracket device 100 and the second bracket device 200 can be of any type.

[0038] Specifically, the first bracket device 100 includes a first driver 110, a second driver 120, a third driver 130, a base 140, a support portion 150, a gripper 160, a fall prevention portion 180, etc.

[0039] The base 140 is connected to the lifting device 80 and performs a swiveling operation through the first driver 110.

[0040] The support portion 150 can be installed on the base 140 and can move with the movement of the base 140. That is, the support portion 150 can perform a swiveling operation together with the base 140. In addition, the support portion 150 can be moved in the forward and backward directions (X direction) by the third driver 130. Additionally, the support portion 150 can be moved in the vertical direction (Z direction) relative to the base 140 by the second driver 120. That is, even if the base 140 does not move, the support portion 150 can be moved in the vertical direction by the second driver 120.

[0041] The gripper 160 can be installed on the lower side of the support portion 150 and can move with the movement of the support portion 150.

[0042] Meanwhile, the gripper 160 can selectively grip the first type of article or the second type of article. For example, the gripper 160 grips the first top flange of the first type of article or the second top flange of the second type of article.

[0043] The first type of article and the second type of article can be of different types. Accordingly, the shape, size, and height of the container can be different. The first type of article and the second type of article can be marking storage containers. For example, the first type of article can be an Extreme ultraviolet light pod (EUV POD), and the second type of article can be an RSP-150, but not limited thereto. The EUV POD and the RSP-150 have different sizes and heights.

[0044] In addition, the support portion 150 can support a third type of article different from the first type of article and the second type of article. The upper surface of the support portion 150 can contact the bottom surface of the third type of article, thereby supporting the third type of article. The third type of article can be a wafer storage container, for example, a Front Open Unified Pod (FOUP). A plurality of pins are mounted on the upper surface of the support portion 150 such that the plurality of pins can be engaged with holes on the bottom surface of the third type of article.

[0045] Additionally, the support portion 150 can support a fourth type of article different from the first to third types of articles. The fourth type of article can be a wafer storage container, for example, an opening shipping box (FOSB).

[0046] The anti-falling portion 180 is mounted on the base 140 to prevent the first or second type of article gripped by the gripper 160 and the third or fourth type of article supported by the support portion 150 from falling. The anti-falling portion 180 includes a first member 181 extending in the vertical direction (Z direction) on both sides of the support portion 150 and a second member 182 connected to the first member 181 and crossing the support portion 150 in the Y direction.

[0047] The second carrier device 200 can have substantially the same structure as the first carrier device 100. The second carrier device 200 includes a first driver 210, a second driver 220, a third driver 230, a base 240, a support portion 250, a gripper 260, an anti-falling portion 280, etc.

[0048] The base 240 is connected to the lifting device 80 and performs a swiveling operation through the first driver 210. The support portion 250 can be mounted on the base 240 and can move with the movement of the base 240.

[0049] The support portion 250 can be moved by the third driver 230 in the forward and backward directions (or the X direction), and can be moved by the second driver 220 relative to the base 240 in the up and down direction (or the Z direction).

[0050] The gripper 260 can be mounted on the lower side of the support portion 250 and can move along with the movement of the support portion 250. The gripper 260 can selectively grip a first type of article or a second type of article. The gripper 260 can grip a third type of article different from the first type of article and the second type of article. Additionally, the gripper 260 can grip a fourth type of article different from the first to third types of articles.

[0051] Hereinafter, for the sake of convenience of explanation, the structure and operation of the first carrier device 100 will be mainly described, but the same also applies to the structure and operation of the second carrier device 200.

[0052] In a system for transporting articles according to some exemplary embodiments of the present disclosure, the control device 50 can differently adjust the distance between the support portion 150 and the base 140 according to whether the gripper 160 grips a first type of article or a second type of article.

[0053] Specifically, in the case where the gripper 160 grips a first type of article, a first distance between the bottom surface of the first type of article and the base 140 can be maintained within a first safety distance, and in the case where the gripper 160 grips a second type of article, a second distance between the bottom surface of the second type of article and the base 140 can be maintained within the first safety distance. More specifically, the first distance and the second distance can be substantially the same.

[0054] When the support portion 150 selectively mounts third or fourth type articles of different heights, the control device 50 can differently adjust the distance between the uppermost surface of the third / fourth type article and the second member 182 according to whether the support portion 150 supports a third type article or a fourth type article.

[0055] Specifically, in the case where the support portion 150 supports a third type article, a third distance between the uppermost surface of the third type article and the second member 182 is maintained within a second safety distance, and in the case where the support portion 150 supports a fourth type article, a fourth distance between the uppermost surface of the fourth type article and the second member 182 is kept within the second safety distance. More specifically, the third distance and the fourth distance can be substantially the same. These operations will be described in detail later with reference to Figures 9 to 13 Describe these operations in detail.

[0056] Figure 4 Is a side view for describing the first carrier device. Figure 5 Is for describing Figure 4A perspective view of the second driver of the first bracket device shown in the figure. Figure 6 For describing Figure 4 A perspective view of the third driver of the first bracket device shown in the figure. Figure 7 For describing Figure 4 A perspective view of the support portion of the first bracket device shown in the figure. Figure 8 For describing Figure 4 A perspective view of the gripper of the first bracket device shown in the figure.

[0057] First, referring to Figure 4 and Figure 5 , the second driver 120 is mounted on the base 140, and the support portion 150 is configured to move in the vertical direction relative to the base 140. By means of the second driver 120, the support portion 150 and / or the gripper 160 can be moved to the first position P1, the second position P2, and the third position P3 at different heights in the vertical direction.

[0058] The second driver 120 includes a ball screw 121, linear motor LM guides 122 and 123, a motor 125, a belt 126, belt pulleys 127a and 127b, a fixing member 129, etc.

[0059] The ball screw 121 is mounted in the frame 128 so as to extend in the vertical direction (Z direction). The linear motor LM guides 122 and 123 are mounted on at least one side of the ball screw 121 and are parallel to the ball screw 121.

[0060] One surface of the fixing member 129 is fixed to the ball screw 121 and / or the linear motor LM guides 122 and 123, and the support portion 150 is fixed to the other surface of the fixing member 129.

[0061] The member for transmitting the rotational power of the motor 125 to the ball screw 121 can be mounted above the ball screw 121. For example, the belt pulley 127a is connected to the motor 125, the belt pulley 127b is connected to the ball screw 121, and the two belt pulleys 127a and 127b are connected to each other by the belt 126. The rotational power of the motor 125 is transmitted to the ball screw 121 through the belt pulley 127a, the belt 126, and the belt pulley 127b. By the operation of the ball screw 121, the support portion 150 and / or the gripper 160 can be moved to the preset positions P1, P2, and P3.

[0062] The first position P1 can be higher than the second position P2, and the second position P2 can be higher than the third position P3. For example, when the gripper 160 is intended to grip a first type of article, the support portion 150 moves to the first position P1. When the gripper 160 is intended to grip a second type of article, the support portion 150 moves to the second position P2. When the gripper 160 is intended to grip a third type of article, the support portion 150 moves to the third position P3.

[0063] Referring Figure 4 and Figure 6 , the third driver 130 is mounted on the base 140 to move the second driver 120, the support portion 150, and / or the gripper 160 in the forward and backward directions (X direction).

[0064] The third driver 130 includes linear motor LM guides 132 and 133, a motor 135, a belt 136, belt pulleys 137a and 137b, a fixing member 139, etc.

[0065] The linear motor LM guides 132 and 133 extend in the forward and backward directions (X direction) on both sides of the belt 136.

[0066] The fixing member 139 is fixed to the belt 136 and / or the linear motor LM guides 132 and 133. In addition, the second driver 120 (i.e., the frame 128 of the second driver 120) is mounted on the upper surface of the fixing member 139.

[0067] Two belt pulleys 137a and 137b are provided to be spaced apart from each other, and the belt pulley 137a is connected to the motor 135. The two belt pulleys 137a and 137b are connected to each other by the belt 136. The rotational force of the motor 135 is provided through the belt 136 to move the fixing member 139. Accordingly, the second driver 120, the support portion 150, and the gripper 160 connected to the fixing member 139 move in the forward and backward directions.

[0068] Referring Figure 4 and Figure 7 , the support portion 150 includes a plate 151, a diagonal detection sensor 153, a load detection sensor 155, a fixed position sensor 157, and a plurality of pins 158.

[0069] The plurality of pins 158 may be provided on the plate 151 and may be coupled to holes formed on the bottom surface of the third type of article and / or the fourth type of article.

[0070] The diagonal detection sensor 153 is installed at the rear of the plate 151 and faces the bottom surface of the plate 151. A hole 153a is formed in the bottom surface, and a reflector is provided inside the hole 153a. The diagonal detection sensor 153 provides light to the reflector inside the hole 153a. When an article is placed on the plate 151, the light is not reflected, and when the article is not placed on the plate 151, the light is reflected by the reflector.

[0071] The load detection sensor 155 also checks whether an article is placed on the plate 151. The fixed position sensor 157 checks whether the article is placed at a fixed position.

[0072] Reference Figure 4 、 Figure 7 and Figure 8 ,The gripper 160 includes a first gripper 160a and a second gripper 160b that are arranged to be spaced apart from each other in the left - right direction (Y - direction). The first gripper 160a and the second gripper 160b operate in the left - right direction (Y - direction) to open or close.

[0073] Each of the first gripper 160a and the second gripper 160b includes a body 165a and 165b, sensors 168a and 168b that are mounted on the bodies 165a and 165b and used for detecting load, and connecting portions 161a and 161b that are mounted on the bodies 165a and 165b and connected to the lower surface of the support portion 150. The sensors 168a and 168b can be reflection beam sensors, but are not limited thereto.

[0074] Meanwhile, referring to Figure 4 ,A first sensing member 152a can be mounted on the lower part of the support portion 150, and a second sensing member can be mounted on the base portion 140 at a position facing the first sensing member 152a. The control device 50 can identify the type of the article held by the gripper 160 based on the operation between the first sensing member 152a and the second sensing member. For example, the first sensing member 152a can be a light sensor, and the second sensing member can be a reflector. The control device 50 can identify the type of the article by checking whether the light provided from the first sensing member 152a is reflected by the reflector.

[0075] Figure 9 FIG. is for describing the first operation of the system for transporting an article according to some exemplary embodiments of the present disclosure. Figure 10 FIG. is for describing the second operation of the system for transporting an article according to some exemplary embodiments of the present disclosure. Figure 11 is for Figure 9 the area Q1 of Figure 10 and an enlarged view of the area Q2 of

[0076] Figure 9 Illustrates a case where the gripper 160 grips the first type of article B1 (e.g., EUV POD), and Figure 10 illustrates a case where the gripper 160 grips the second type of article B2 (e.g., RSP-150).

[0077] Referring to Figure 9 and Figure 10 , the first type of article B1 and the second type of article B2 have different dimensions (e.g., height or width). As shown in the figure, the height of the first type of article B1 can be higher than the height of the second type of article B2. When the gripper 160 grips the first type of article B1, the distance between the support portion 150 and the base portion 140 is maintained at H1. On the other hand, when the gripper 160 grips the second type of article B2, the distance between the support portion 150 and the base portion 140 is maintained at H2. The distance H1 and the distance H2 are different from each other.

[0078] As the position of the support portion 150 changes due to the second driver 120 (see P1 and P2), the distances H1 and H2 change from each other. For example, the lifting device 80 can be moved to a preset position regardless of the articles B1 and B2, and then the position of the support portion 150 can be changed using the second driver 120.

[0079] Specifically, the second driver 120 adjusts the height of the support portion 150 to a first height (corresponding to the distance H1), and the third driver 130 moves the support portion 150 forward in the X direction. The gripper 160 grips the first type of article B1, and then the support portion 150 is moved backward in the X direction by the third driver 130.

[0080] Similarly, the second driver 120 adjusts the height of the support portion 150 to a second height different from the first height (corresponding to the distance H2), and the third driver 130 moves the support portion 150 forward in the X direction. The gripper 160 grips the second type of article B2, and then the support portion 150 is moved backward in the X direction by the third driver 130.

[0081] Meanwhile, as Figure 11 shown, when the gripper 160 grips the first type of article B1, the first distance G1 between the bottom surface of the first type of article B1 and the base portion 140 is maintained within the first safety distance SR1. In addition, when the gripper 160 grips the second type of article B2, the second distance G2 between the bottom surface of the second type of article B2 and the base portion 140 is maintained within the first safety distance SR1.

[0082] The first type of article B1 and the second type of article B2 are transported at an interval relative to the base 140. Even when the first type of article B1 and the second type of article B2 are spaced apart from the base 140, in order to minimize the impact on the first type of article B1 and the second type of article B2, the first distance G1 and the second distance G2 need to be less than the first safety distance SR1. Specifically, the control device 50 controls the first distance G1 and the second distance G2 to be substantially the same.

[0083] When the gripper holds an article at a constant height, regardless of the type of the article (i.e., the height of the article), the distance between the article with a lower height and the base is greater than the distance between the article with a higher height and the base. In this case, if the gripper drops the low-height article, a relatively large impact may be applied to the low-height article.

[0084] On the other hand, in the exemplary embodiments of the present disclosure, regardless of the type of the article (i.e., the height of the article), the distances between the bottom surfaces of the articles B1 and B2 and the base 140 are substantially the same. Regardless of the type of the article, the article can be safely transported.

[0085] Figure 12 FIG. for describing the third operation of the system for transporting articles according to some exemplary embodiments of the present disclosure. Figure 13 is Figure 12 an enlarged view of region Q3.

[0086] Referring to Figure 12 and Figure 13 The third type of article B3 can be a wafer storage container (e.g., FOUP) and is supported by the upper surface of the support portion 150. When the support portion 150 supports the third type of article B3, the distance between the support portion 150 and the base 140 is maintained at H3. The distance H3 is different from the above distances H1 and H2. As the position of the support portion 150 changes due to the second driver 120 (see P3), the distance H3 changes.

[0087] For example, the second driver 120 adjusts the height of the support portion 150 to the third height (i.e., see H3), and the third driver 130 moves the support portion 150 forward in the X direction. The third type of article B3 is placed on the support portion 150, and then the third driver 130 moves the support portion 150 backward in the X direction.

[0088] To prevent the third type of article B3 from falling, the third distance G3 between the uppermost surface of the third type of article B3 and the second member 182 of the anti-falling portion 180 is maintained within the second safety distance SR2.

[0089] Meanwhile, if the support portion 150 supports a fourth type of article B4 having a different height from the third type of article B3, a fourth distance G4 between the uppermost surface of the fourth type of article B4 and the second member 182 of the fall prevention portion 180 is maintained within a second safety distance SR2. Specifically, the control device 50 controls the third distance G3 and the fourth distance G4 to be substantially the same.

[0090] Since the distances between the uppermost surfaces of the articles B3 and B4 and the fall prevention portion 180 are substantially the same, articles can be safely transported regardless of the type of article (i.e., the height of the article).

[0091] Figure 14 FIG. is a conceptual diagram of a system for transporting articles according to some exemplary embodiments of the present disclosure. For ease of explanation, points different from those described with reference to Figures 1 to 13 will be mainly described.

[0092] Reference Figure 14 , the system for transporting articles includes a first track 88 extending in the vertical direction, a second track 82 provided on a first side of the first track 88 and mounted in the horizontal direction, and a third track 83 provided on a second side of the first track 88 and mounted in the horizontal direction.

[0093] The robotic arm 10 includes the first carriage device and the second carriage device as described above. Each of the first carriage device and the second carriage device includes a base, a support portion mounted on the base and movable in the vertical direction relative to the base, and a gripper mounted on the lower portion of the support portion and movable with the movement of the support portion. In addition, the gripper is configured to grip a first top flange of a first type of article and a second top flange of a second type of article, and the support portion is configured to support the bottom surface of a third type of article.

[0094] The robotic arm 10 (i.e., the carriage device) moves along the first track 88 and transports the first type of article B1 to the second track 82. Alternatively, the robotic arm 10 (i.e., the carriage device) moves along the first track 88 and transports the third type of article B3 to the third track 83.

[0095] As an exemplary embodiment, the system for transporting articles may further include a fourth track provided on a third side of the first track 88 and mounted in the horizontal direction. The robotic arm 10 may move along the first track 88 and transport the second type of article to the fourth track.

[0096] When the manipulator 10 (i.e., the carriage device) transports the first type of article, the first distance between the bottom surface of the first type of article and the base can be maintained within the first safety distance, and when the carriage device transports the second type of article, the second distance between the bottom surface of the second type of article and the base can be maintained within the first safety distance. Here, the first distance and the second distance can be the same as each other.

[0097] Although the exemplary embodiments of the present disclosure have been described with reference to the accompanying drawings, those of ordinary skill in the art to which the present disclosure pertains will understand that the present disclosure can be embodied in other specific forms without changing its technical spirit or essential features. Therefore, it should be understood that the above exemplary embodiments are illustrative in all respects and not restrictive.

Claims

1. A system for transporting items, the system comprising: A track installed to extend in an up-down direction; a lifting device configured to ascend and descend along the track; A bracket device, the bracket device is mounted on the lifting device, and the bracket device is configured to mount first type of objects or second type of objects with different heights; a control device, the control device controlling at least one of the lifting device and the bracket device, Wherein, the bracket equipment includes: base; a support portion mounted on the base portion and movable in an up-down direction relative to the base portion, and a clamper mounted on a lower portion of the support portion to move with movement of the support portion, and the clamping portion is configured to clamp a first top flange of the first type of article and a second top flange of the second type of article, and The control device adjusts the distance between the support portion and the base differently depending on whether the gripper grips the first type of article or the second type of article.

2. The system according to claim 1, wherein: The control device maintains: In the case where the clamp holds the first type of article, a first distance between a bottom surface of the first type of article and the base is within a first safety distance, and In a case where the clamp holds the second type of article, a second distance between the bottom surface of the second type of article and the base is within the first safety distance.

3. The system according to claim 2, wherein: The first distance and the second distance are substantially the same.

4. The system according to claim 2, wherein: the control device adjusts the height of the support portion to a first height, moves the support portion forward, causes the clamper to clamp the first type of article, and then moves the support portion backward, The control device adjusts the height of the support portion to a second height different from the first height, moves the support portion forward, causes the clamper to clamp the second type of article, and then moves the support portion backward, and The first height and the second height are proportional to the first distance and the second distance, respectively.

5. The system according to claim 1, wherein: The bracket device also includes: a first sensing member mounted on a lower portion of the support portion, and a second sensing member mounted on the base at a position facing the first sensing member, and The control device identifies a type of an article gripped by the gripper based on an operation between the first sensing member and the second sensing member.

6. The system according to claim 1, wherein: The rack device is configured to mount a third type of item that is different from the first type of item and the second type of item, and The upper surface of the support portion contacts the bottom surface of the third type article to support the third type article.

7. The system according to claim 6, wherein: The bracket device also includes a fall prevention portion installed on the base and including a first member extending in an up-and-down direction on both sides of the support portion and a second member connected to the first member and spanning the support portion.

8. The system according to claim 7, wherein: The bracket device is configured to mount third type articles or fourth type articles having different heights, and the bracket device is configured so that the upper surface of the support portion supports the bottom surface of the third type article or the bottom surface of the fourth type article, and The control device maintains: In the case where the supporting portion supports the third type of article, a third distance between the uppermost surface of the third type of article and the second member is within a second safety distance, and In a case where the supporting portion supports the fourth type of article, a fourth distance between the uppermost surface of the fourth type of article and the second member is within the second safety distance.

9. The system according to claim 8, wherein: The third distance is substantially the same as the fourth distance.

10. The system according to claim 1, wherein: The system further comprises: a first actuator mounted on the lifting device and configured to rotate the base; and A second actuator is configured to move the support portion in a forward and rearward direction.

11. The system according to claim 1, wherein: The system further includes a third actuator mounted on the base and configured to move the support portion in an up-down direction. Wherein, the third driver comprises: A ball screw, wherein the ball screw is arranged in an up-down direction, a linear motor LM guide disposed on at least one side of the ball screw, and A fixing member has one surface fixed to the ball screw and the linear motor LM guide and another surface fixed to the support portion.

12. The system of claim 1, wherein: The bracket apparatus further includes a fall prevention portion installed on the base portion and extending in an up-and-down direction on both sides of the support portion.

13. A system for transporting an item, the system comprising: A track installed to extend in an up-down direction; a lifting device configured to ascend and descend along the track; A manipulator, the manipulator being mounted on the lifting device; as well as a control device, the control device controlling at least one of the lifting device and the manipulator, The manipulator comprises a first bracket device and a second bracket device arranged in an up-down direction. The first carriage device performs a rotational movement by being connected to a first drive of the lifting device, The first bracket device comprises: base; a support portion, the support portion being mounted on the base portion, a second actuator installed on the base and moving the support portion in an up-down direction, a third driver mounted on the base and moving the support and the second driver in forward and backward directions, and a holder, the holder being mounted on the lower part of the support and moving with the movement of the support, The clamp is configured to clamp a first top flange of a first type of article and a second top flange of a second type of article, The support portion is configured to support a first bottom surface of a third type of article, The control device maintains: In the case where the clamp holds the first type of article, a first distance between a bottom surface of the first type of article and the base is within a first safety distance, and In the case where the clamp holds the second type of article, a second distance between the bottom surface of the second type of article and the base is within the first safety distance, and The first distance and the second distance are identical to each other.

14. The system according to claim 13, wherein: The first bracket device also includes a fall prevention portion installed on the base and including a first member extending in an up-and-down direction on both sides of the support portion and a second member connected to the first member and installed to straddle the support portion.

15. The system of claim 14, wherein: The support portion is further configured to support a second bottom surface of a fourth type of article, The control device maintains: In the case where the supporting portion supports the third type of article, a third distance between the uppermost surface of the third type of article and the second member is within a second safety distance, and In the case where the supporting portion supports the fourth type of article, a fourth distance between the uppermost surface of the fourth type of article and the second member is within a second safety distance, and The third distance and the fourth distance are identical to each other.

16. The system of claim 13, wherein: The first type of item is an extreme ultraviolet mask transport box EUVPOD, The second type of article is RSP-150, and The third type of object is a front opening wafer transport box FOUP.

17. A system for transporting an item, the system comprising: a first rail installed to extend in an up-down direction; a lifting device configured to ascend and descend along the first track; a second track disposed on a first side of the first track and installed in a horizontal direction; a third rail, the third rail being disposed on the second side of the first rail and installed in a horizontal direction; a bracket device, the bracket device being mounted on the lifting device and configured to mount a first type of article and a second type of article having different heights; a control device, the control device controlling at least one of the lifting device and the bracket device, Wherein, the bracket equipment includes: base, a support portion mounted on the base portion and movable in an up-down direction relative to the base portion, and a holder, the holder being mounted on the lower part of the support and moving with the movement of the support, The clamp is configured to clamp a first top flange of the first type of article and a second top flange of the second type of article, and the support portion is configured to support a bottom surface of a third type of article, The bracket equipment: moving along the first track and transporting the first type of items to the second track, and moving along the first track and transporting the second type of items to the third track, The control device maintains: In the case where the rack device carries the first type of items, a first distance between the bottom surface of the first type of items and the base is within a first safety distance, and In the case where the rack device carries the second type of articles, a second distance between the bottom surface of the second type of articles and the base is within the first safety distance, and The first distance and the second distance are identical to each other.

18. The system of claim 17, wherein: The rack device is configured to mount a fourth type of item different from the first to third types of items, and The upper surface of the support portion contacts the bottom surface of the fourth type article to support the fourth type article.

19. The system of claim 18, wherein: The bracket device also includes a fall prevention portion installed on the base and including a first member extending in an up-down direction on both sides of the support portion and a second member connected to the first member and installed to straddle the support portion.

20. The system of claim 19, wherein: The control device maintains: In the case where the bracket device transports the third type of articles, a third distance between the uppermost surface of the third type of articles and the second member is within a second safety distance, and In the case where the bracket device transports the fourth type of articles, a fourth distance between the uppermost surface of the fourth type of articles and the second member is within a second safety distance, and The third distance and the fourth distance are identical to each other.

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