Charging boat, device and method for indium phosphide polycrystal synthesis

Abstract

The invention discloses a charging boat, device and method for indium phosphide polycrystal synthesis, and belongs to the technical field of semiconductor materials.The charging boat comprises a charging boat body and a gas guide pipe integrally formed with the charging boat body, and the gas guide pipe is located at one end of the charging boat body; one end, far away from the loading boat body, of the gas guide pipe is open, and a pipe body of the gas guide pipe is obliquely arranged upwards. The gas guide pipe with the pipe body inclining upwards is arranged at one end of the charging boat, the end, away from the charging boat body, of the gas guide pipe is open, a breakthrough opening for releasing gaseous phosphorus at the tail can be formed when the gaseous phosphorus escapes, stress is released, the gaseous phosphorus is prevented from being exploded from the interior of crystals, material loss is reduced, the risk of pipe cracking is reduced, and the service life of the charging boat is prolonged. Meanwhile, environmental pollution caused by waste generated by pipe cracking is avoided, the purity of indium phosphide can be improved by adopting the charging boat, and the impurity content is effectively reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor materials, and particularly relates to a charging boat, a device and a method for indium phosphide polycrystal synthesis. Background Art

[0002] Indium phosphide is a second-generation compound semiconductor material formed by the combination of group III elements and group V elements. It has a very important strategic position in the field of semiconductor materials. It is an irreplaceable semiconductor material for optoelectronic devices and microelectronic devices at present, and is widely used in high-tech fields such as solid-state lighting, microwave communication, optical fiber communication, microwave, millimeter-wave devices, and radiation-resistant solar cells. With the progress of the energy band engineering theory, ultra-thin material technology and deep sub-micron manufacturing technology, indium phosphide also increasingly shows its advantages in high-end microwave and millimeter-wave electronic devices and optoelectronic devices, becoming the preferred material for millimeter-wave high-end devices, receiving extensive attention, and having a very broad development and application prospect.

[0003] Polycrystalline material is the raw material for preparing single crystal, and the quality of polycrystalline material determines the yield and quality of single crystal. Therefore, the charging boat used for polycrystal synthesis is particularly important.

[0004] At present, both ends of the boat for indium phosphide polycrystal synthesis are arc-shaped and semi-closed. Since the tail of the boat is semi-closed, during the directional solidification of crystal growth, the surplus impurities are continuously squeezed towards the tail, and the stress cannot be released, causing the tail material to explode from the inside of the crystal, not only resulting in material loss, but also seriously cracking the charging tube, causing a tube cracking accident.

[0005] Therefore, there is an urgent need for a new type of charging boat to solve the problem of tail cracking during the growth process. Summary of the Invention

[0006] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a charging boat, a device and a method for indium phosphide polycrystal synthesis, which can effectively avoid the explosion inside the crystal, reduce material loss, reduce the risk of tube cracking, and at the same time avoid environmental pollution caused by the waste generated by tube cracking. Moreover, using the charging boat of the present invention can also improve the purity of indium phosphide and effectively reduce the impurity content.

[0007] To achieve the above purpose, the first aspect of the present application provides a charging boat for indium phosphide polycrystal synthesis, which is characterized in that it includes a charging boat body and a gas guide pipe integrally formed with the charging boat body. The gas guide pipe is located at one end of the charging boat body. The end of the gas guide pipe away from the charging boat body is open, and the pipe body of the gas guide pipe is inclined upward.

[0008] As an embodiment of the present application, the diameter of the gas guide pipe is 4-10 mm.

[0009] As an embodiment of the present application, the included angle between the gas guide pipe and the horizontal plane is 20 to 70°.

[0010] As an embodiment of the present application, the opening height of the gas guide pipe is not lower than the opening height of the charging boat body.

[0011] As an embodiment of the present application, the material of the charging boat is quartz or PBN.

[0012] The second aspect of the present application provides a device for synthesizing indium phosphide polycrystal, including a container for holding red phosphorus and a charging boat. One end of the container is for holding red phosphorus, and the other end is for holding the charging boat. The charging boat is for holding indium, and the gas guide pipe of the charging boat is located at the end far from the red phosphorus.

[0013] The charging boat is the charging boat described above.

[0014] The container is an ampoule bottle.

[0015] As an embodiment of the present application, a blocking cap is further provided between the end of the charging boat far from the red phosphorus and the container.

[0016] The third aspect of the present application provides a method for synthesizing indium phosphide polycrystal, based on the device for synthesizing indium phosphide polycrystal described above, including the following steps:

[0017] Place indium in the charging boat, and place red phosphorus and the charging boat at both ends of the container.

[0018] Put the container into a heater, heat the red phosphorus area to vaporize the red phosphorus, heat the charging boat, and fill it with an inert gas, and react for 4 to 8 hours.

[0019] Cool the end of the charging boat close to the red phosphorus to 780 to 820 °C, cool it, take it out, and obtain indium phosphide polycrystal.

[0020] As an embodiment of the present application, the temperature for heating the red phosphorus area is 500 to 600 °C.

[0021] As an embodiment of the present application, the temperature for heating the charging boat is 1100 to 1150 °C.

[0022] The beneficial effects of the present invention are as follows: One end of the charging boat described in the present invention is provided with a gas guide pipe with an inclined upward tube body, and the end of the gas guide pipe far from the charging boat body is open, which can provide a breakthrough for the escape of gaseous phosphorus at the tail, release the stress, avoid explosion from the inside of the crystal, reduce the loss of materials, and also reduce the risk of tube cracking. At the same time, it also avoids the environmental pollution caused by the waste generated by tube cracking. Moreover, using the charging boat of the present invention can also improve the purity of indium phosphide and effectively reduce the impurity content. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 FIG. 1 is a schematic structural diagram of a charging boat for indium phosphide polycrystal synthesis according to the present invention.

[0024] Figure 2 FIG. 2 is a schematic structural diagram of an apparatus for indium phosphide polycrystal synthesis according to the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] In order to make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0026] In the present application, among the technical features described in an open-ended manner, a closed technical solution composed of the listed features is included, and an open technical solution including the listed features is also included.

[0027] In the present application, when it comes to numerical ranges, unless otherwise specified, the above numerical ranges are considered continuous, and include the minimum and maximum values of the range, as well as each value between such minimum and maximum values. Further, when the range refers to integers, each integer between the minimum and maximum values of the range is included. In addition, when multiple ranges are provided to describe features or characteristics, the ranges can be combined. In other words, unless otherwise specified, all ranges disclosed herein should be understood to include any and all sub-ranges subsumed therein.

[0028] In the present application, there is no particular limitation on the specific dispersion and stirring treatment methods.

[0029] Unless otherwise specified, the component raw materials or instruments used in the embodiments and comparative examples of the present invention are all commercially available raw materials or instruments, and the component raw materials used in each parallel experiment are the same.

[0030] As Figure 1 shown, an embodiment of the present application provides a charging boat for indium phosphide polycrystal synthesis, including a charging boat body 1 and a gas guide pipe 2 integrally formed with the charging boat body. The gas guide pipe is located at one end of the charging boat body. The end of the gas guide pipe away from the charging boat body is open, and the pipe body of the gas guide pipe is inclined upward.

[0031] One end of the charging boat described in the present invention is provided with a gas guide pipe with an inclined upward tube body, and the end of the gas guide pipe away from the charging boat body is open, which can provide a breakthrough for the release of gaseous phosphorus at the tail, release the stress, avoid explosion from the inside of the crystal, reduce the loss of materials, and also reduce the risk of tube cracking. At the same time, it also avoids environmental pollution caused by waste generated by tube cracking. Moreover, using the charging boat of the present invention can also improve the purity of indium phosphide and effectively reduce the impurity content.

[0032] In one embodiment, the diameter of the gas guide pipe is 4 - 10 mm. For example, it can be 4 mm, 5 mm, 6 mm, 7 mm, 8 mm, 9 mm, 10 mm or the range composed of any two of them. Especially when the diameter of the gas guide pipe is within this range, it can further avoid the risk of tube cracking, improve the recovery rate, and reduce the impurity content.

[0033] In one embodiment, the included angle between the gas guide pipe and the horizontal plane is 20 - 70°. For example, it can be 20°, 25°, 30°, 35°, 40°, 45°, 50°, 55°, 60°, 65°, 70° or the range composed of any two of them. Especially when the included angle between the gas guide pipe and the horizontal plane is within this range, it can further avoid the risk of tube cracking, improve the recovery rate, and reduce the impurity content.

[0034] In one embodiment, the top end of the charging boat body can be open, or it can be sealed after charging according to the situation.

[0035] In one embodiment, the opening height of the gas guide pipe is not lower than the opening height of the charging boat body.

[0036] One embodiment of the present application provides a device for indium phosphide polycrystal synthesis, which is characterized in that it includes a container 3 for containing red phosphorus and a charging boat. One end of the container is used to contain red phosphorus 4, and the other end is used to contain the charging boat. The charging boat is used to contain indium, and the gas guide pipe of the charging boat is located at the end away from the red phosphorus.

[0037] The charging boat is the charging boat described above.

[0038] In one embodiment, a blocking cap 5 is further provided between the end of the charging boat away from the red phosphorus and the container.

[0039] The container is an ampoule bottle.

[0040] One embodiment of the present application provides a method for indium phosphide polycrystal synthesis. Based on the device for indium phosphide polycrystal synthesis described above, it includes the following steps:

[0041] Place indium in the charging boat, and place red phosphorus and the charging boat at both ends of the container.

[0042] Place the container into a heater, heat the red phosphorus area to vaporize the red phosphorus, heat the loading boat, and fill it with an inert gas, and react for 4 - 8 h;

[0043] Cool one end of the loading boat close to the red phosphorus to 780 - 820 °C, cool it, take it out, and obtain indium phosphide polycrystals.

[0044] In one of the embodiments, the temperature for heating the red phosphorus area is 500 - 600 °C.

[0045] In one of the embodiments, the temperature for heating the loading boat is 1100 - 1150 °C.

[0046] The following examples are provided to facilitate the understanding of the present invention. These examples are not provided to limit the scope of the claims.

[0047] Example 1

[0048] A device for synthesizing indium phosphide polycrystals includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is for containing red phosphorus, and the other end is for containing the loading boat. The loading boat is for containing indium, and the gas guide tube of the loading boat is located at the end far from the red phosphorus; a blocking cap is further provided between the end of the loading boat far from the red phosphorus and the container.

[0049] Among them, the loading boat (made of PBN material) includes a loading boat body and a gas guide tube integrally formed with the loading boat body. The gas guide tube is located at one end of the loading boat body. The end of the gas guide tube far from the loading boat body is open, and the tube body of the gas guide tube is inclined upward. The opening height of the gas guide tube is not lower than the opening height of the loading boat body.

[0050] The diameter of the gas guide tube is 5 mm, and the included angle between the gas guide tube and the horizontal plane is 60°.

[0051] The method for synthesizing indium phosphide polycrystals, based on the above-mentioned device for synthesizing indium phosphide polycrystals, includes the following steps:

[0052] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0053] Place the container into a heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill it with nitrogen until the pressure is 27 Pa, and react for 6 h;

[0054] Cool one end of the loading boat close to the red phosphorus uniformly to 800 °C (the cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystals.

[0055] Example 2

[0056] An apparatus for synthesizing indium phosphide polycrystals includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is for containing red phosphorus, and the other end is for containing the loading boat. The loading boat is for containing indium, and the gas guide tube of the loading boat is located at the end far from the red phosphorus; a blocking cap is further provided between the end of the loading boat far from the red phosphorus and the container.

[0057] Among them, the loading boat (made of PBN material) includes a loading boat body and a gas guide tube integrally formed with the loading boat body. The gas guide tube is located at one end of the loading boat body. The end of the gas guide tube far from the loading boat body is open, and the tube body of the gas guide tube is inclined upward. The opening height of the gas guide tube is not lower than the opening height of the loading boat body.

[0058] The diameter of the gas guide tube is 8 mm, and the included angle between the gas guide tube and the horizontal plane is 30°.

[0059] The method for synthesizing indium phosphide polycrystals, based on the above-mentioned apparatus for synthesizing indium phosphide polycrystals, includes the following steps:

[0060] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0061] Put the container into a heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill it with nitrogen until the pressure is 27 Pa, and react for 6 h;

[0062] Slowly cool the end of the loading boat close to the red phosphorus to 800 °C (the cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystals.

[0063] Example 3

[0064] An apparatus for synthesizing indium phosphide polycrystals includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is for containing red phosphorus, and the other end is for containing the loading boat. The loading boat is for containing indium, and the gas guide tube of the loading boat is located at the end far from the red phosphorus; a blocking cap is further provided between the end of the loading boat far from the red phosphorus and the container.

[0065] Among them, the loading boat (made of PBN material) includes a loading boat body and a gas guide tube integrally formed with the loading boat body. The gas guide tube is located at one end of the loading boat body. The end of the gas guide tube far from the loading boat body is open, and the tube body of the gas guide tube is inclined upward. The opening height of the gas guide tube is not lower than the opening height of the loading boat body.

[0066] The diameter of the air duct is 4 mm, and the angle between the air duct and the horizontal plane is 70°.

[0067] The method for synthesizing indium phosphide polycrystal, based on the device for synthesizing indium phosphide polycrystal described above, includes the following steps:

[0068] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0069] Put the container into the heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill nitrogen to a pressure of 27 Pa, and react for 6 h;

[0070] Cool the end of the loading boat close to the red phosphorus uniformly to 800 °C (cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystal.

[0071] Example 4

[0072] A device for synthesizing indium phosphide polycrystal, including an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is used to contain red phosphorus, and the other end is used to contain the loading boat. The loading boat is used to contain indium, and the air duct of the loading boat is located at the end far from the red phosphorus; a blocking cap is also provided between the end of the loading boat far from the red phosphorus and the container.

[0073] Among them, the loading boat (made of PBN material) includes a loading boat body and an air duct integrally formed with the loading boat body. The air duct is located at one end of the loading boat body. The end of the air duct far from the loading boat body is open, and the pipe body of the air duct is inclined upward. The opening height of the air duct is not lower than the opening height of the loading boat body.

[0074] The diameter of the air duct is 10 mm, and the angle between the air duct and the horizontal plane is 20°.

[0075] The method for synthesizing indium phosphide polycrystal, based on the device for synthesizing indium phosphide polycrystal described above, includes the following steps:

[0076] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0077] Put the container into the heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill nitrogen to a pressure of 27 Pa, and react for 6 h;

[0078] Cool the end of the loading boat close to the red phosphorus uniformly to 800 °C (cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystal.

[0079] Comparative Example 1

[0080] An apparatus for synthesizing indium phosphide polycrystals includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is used to contain red phosphorus, and the other end is used to contain the loading boat. The loading boat is used to contain indium, and the gas guide tube of the loading boat is located at the end far from the red phosphorus. A blocking cap is further provided between the end of the loading boat far from the red phosphorus and the container.

[0081] Among them, the loading boat (made of PBN material) is a conventional loading boat (without a gas guide tube).

[0082] The method for synthesizing indium phosphide polycrystals, based on the above-mentioned apparatus for synthesizing indium phosphide polycrystals, includes the following steps:

[0083] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0084] Place the container into a heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill it with nitrogen until the pressure is 27 Pa, and react for 6 h;

[0085] Cool the end of the loading boat close to the red phosphorus uniformly to 800 °C (the cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystals.

[0086] Comparative Example 2

[0087] An apparatus for synthesizing indium phosphide polycrystals includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is used to contain red phosphorus, and the other end is used to contain the loading boat. The loading boat is used to contain indium, and the gas guide tube of the loading boat is located at the end far from the red phosphorus. A blocking cap is further provided between the end of the loading boat far from the red phosphorus and the container.

[0088] Among them, the loading boat (made of PBN material) includes a loading boat body and a gas guide tube integrally formed with the loading boat body. The gas guide tube is located at one end of the loading boat body. The end of the gas guide tube far from the loading boat body is open, and the tube body of the gas guide tube is inclined upward. The opening height of the gas guide tube is not lower than the opening height of the loading boat body.

[0089] The diameter of the gas guide tube is 5 mm, and the included angle between the gas guide tube and the horizontal plane is 10°.

[0090] The method for synthesizing indium phosphide polycrystals, based on the above-mentioned apparatus for synthesizing indium phosphide polycrystals, includes the following steps:

[0091] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0092] Place the container into the heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill it with nitrogen until the pressure reaches 27 Pa, and react for 6 h;

[0093] Cool the end of the loading boat close to the red phosphorus at a uniform speed to 800 °C (cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystal.

[0094] Comparative Example 3

[0095] An indium phosphide polycrystal synthesis device includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is used to contain red phosphorus, and the other end is used to contain the loading boat. The loading boat is used to contain indium, and the gas guide pipe of the loading boat is located at the end far from the red phosphorus; a blocking cap is also provided between the end of the loading boat far from the red phosphorus and the container.

[0096] Among them, the loading boat (made of PBN material) includes a loading boat body and a gas guide pipe integrally formed with the loading boat body. The gas guide pipe is located at one end of the loading boat body. The end of the gas guide pipe far from the loading boat body is open, and the pipe body of the gas guide pipe is inclined upward. The opening height of the gas guide pipe is not lower than the opening height of the loading boat body.

[0097] The diameter of the gas guide pipe is 5 mm, and the included angle between the gas guide pipe and the horizontal plane is 80°.

[0098] The method for synthesizing indium phosphide polycrystal, based on the above-mentioned indium phosphide polycrystal synthesis device, includes the following steps:

[0099] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0100] Place the container into the heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill it with nitrogen until the pressure reaches 27 Pa, and react for 6 h;

[0101] Cool the end of the loading boat close to the red phosphorus at a uniform speed to 800 °C (cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystal.

[0102] Comparative Example 4

[0103] An indium phosphide polycrystal synthesis device includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is used to contain red phosphorus, and the other end is used to contain the loading boat. The loading boat is used to contain indium, and the gas guide pipe of the loading boat is located at the end far from the red phosphorus; a blocking cap is also provided between the end of the loading boat far from the red phosphorus and the container.

[0104] Among them, the loading boat (made of PBN material) includes a loading boat body and a gas guide pipe integrally formed with the loading boat body. The gas guide pipe is located at one end of the loading boat body. The end of the gas guide pipe far from the loading boat body is open, and the pipe body of the gas guide pipe is inclined upward. The opening height of the gas guide pipe is not lower than the opening height of the loading boat body.

[0105] The diameter of the gas guide pipe is 2 mm, and the included angle between the gas guide pipe and the horizontal plane is 60°.

[0106] The method for synthesizing indium phosphide polycrystal, based on the above-mentioned device for synthesizing indium phosphide polycrystal, includes the following steps:

[0107] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0108] Put the container into the heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the loading boat to 1240 °C, fill with nitrogen until the pressure is 27 Pa, and react for 6 h;

[0109] Slowly cool the end of the loading boat close to the red phosphorus to 800 °C (the cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystal.

[0110] Comparative Example 5

[0111] A device for synthesizing indium phosphide polycrystal includes an ampoule bottle for containing red phosphorus and a loading boat. One end of the container is used to contain red phosphorus, and the other end is used to contain the loading boat. The loading boat is used to contain indium. The gas guide pipe of the loading boat is located at the end far from the red phosphorus; a blocking cap is also provided between the end of the loading boat far from the red phosphorus and the container.

[0112] Among them, the loading boat (made of PBN material) includes a loading boat body and a gas guide pipe integrally formed with the loading boat body. The gas guide pipe is located at one end of the loading boat body. The end of the gas guide pipe far from the loading boat body is open, and the pipe body of the gas guide pipe is inclined upward. The opening height of the gas guide pipe is not lower than the opening height of the loading boat body.

[0113] The diameter of the gas guide pipe is 20 mm, and the included angle between the gas guide pipe and the horizontal plane is 60°.

[0114] The method for synthesizing indium phosphide polycrystal, based on the above-mentioned device for synthesizing indium phosphide polycrystal, includes the following steps:

[0115] Place 6.5 kg of indium in the loading boat, and place 1.75 kg of red phosphorus and the loading boat at both ends of the container;

[0116] Place the container into a heater, heat the red phosphorus area to 550 °C to vaporize the red phosphorus, heat the charging boat to 1240 °C, fill it with nitrogen until the pressure reaches 27 Pa, and react for 6 h;

[0117] Cool the end of the charging boat close to the red phosphorus at a constant speed to 800 °C (the cooling time is 36 h), cool it, take it out, and obtain indium phosphide polycrystals.

[0118] Test example

[0119] Use GDMS to analyze the element content of indium phosphide polycrystals and calculate the recovery rate.

[0120] Table 1

[0121]

[0122] As can be seen from Table 1, in the charging boat of the present invention, a gas guide pipe with an inclined upward tube body is provided at one end, and the end of the gas guide pipe away from the charging boat body is open, which can provide a breakthrough for the escape of gaseous phosphorus at the tail, release the stress, prevent explosion from the inside of the crystal, reduce the loss of materials, reduce the risk of tube cracking, avoid environmental pollution caused by the waste generated by tube cracking, and the charging boat of the present invention can also improve the purity of indium phosphide and effectively reduce the impurity content.

[0123] Comparing Example 1 with Comparative Examples 2-3, it can be seen that by setting the included angle between the gas guide pipe and the horizontal plane to 20-70°, the purity of indium phosphide can be further improved and the impurity content can be effectively reduced.

[0124] Comparing Example 1 with Comparative Examples 4-5, it can be seen that by controlling the diameter of the gas guide pipe to be 4-10 mm, the purity of indium phosphide can be further improved and the impurity content can be effectively reduced.

[0125] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit the protection scope of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. A loading boat for indium phosphide polycrystalline synthesis, characterized in that: The invention comprises a loading boat body and an air duct integrally formed with the loading boat body, wherein the air duct is located at one end of the loading boat body, an end of the air duct away from the loading boat body is open, and the tube body of the air duct is inclined upward.

2. The loading boat for indium phosphide polycrystalline synthesis according to claim 1, characterized in that: The diameter of the airway is 4 to 10 mm.

3. The loading boat for indium phosphide polycrystalline synthesis according to claim 1, characterized in that: The angle between the air guide tube and the horizontal plane is 20-70°.

4. The loading boat for indium phosphide polycrystalline synthesis according to claim 1, characterized in that: The opening height of the air guide tube is not lower than the opening height of the loading boat body.

5. The loading boat for indium phosphide polycrystalline synthesis according to claim 1, characterized in that: The material of the charging boat is quartz or PBN.

6. An apparatus for synthesizing indium phosphide polycrystals, characterized in that: A container for holding red phosphorus and a loading boat is provided, wherein one end of the container is used for holding red phosphorus, and the other end is used for holding the loading boat, wherein the loading boat is used for holding indium, and an air guide pipe of the loading boat is located at an end away from the red phosphorus; The loading boat is the loading boat according to any one of claims 1 to 5.

7. The device for synthesizing indium phosphide polycrystals according to claim 6, characterized in that: A blocking cap is also provided between the end of the loading boat away from the red phosphorus and the container.

8. A method for synthesizing indium phosphide polycrystals, characterized in that: The device for synthesizing indium phosphide polycrystals according to any one of claims 6 to 7 comprises the following steps: Place indium in a loading boat, and place red phosphorus and the loading boat at both ends of the container; Place the container in the heater, heat the red phosphorus area to vaporize the red phosphorus, heat the loading boat, fill it with inert gas, and react for 4 to 8 hours; The end of the loading boat close to the red phosphorus is cooled to 780-820° C., cooled, and taken out to obtain indium phosphide polycrystals.

9. The method for synthesizing indium phosphide polycrystals according to claim 8, characterized in that: The red phosphorus zone is heated at a temperature of 500-600°C.

10. The method for synthesizing indium phosphide polycrystals according to claim 8, characterized in that: The temperature at which the loading boat is heated is 1100-1150°C.

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