Tool for assisting turbine assembly of magnetic suspension molecular pump to be installed on balancing machine

Abstract

The invention provides a tool for assisting a turbine assembly of a magnetic suspension molecular pump to be installed on a balancing machine, the tool comprises a tool shaft and a connecting component, the tool shaft comprises a first end part and a second end part which are opposite to each other, and the first end part and the second end part are used for being installed on a first supporting part and a second supporting part of the balancing machine respectively; and the mounting part is positioned between the first end part and the second end part and allows the turbine assembly to be sleeved on the mounting part. And the connecting component is used for detachably fixing the turbine assembly on the mounting part. The tool can ensure that the turbine assembly can be directly tested on an existing balancing machine, the defects of traditional indirect testing are overcome, it is ensured that the turbine assembly has higher dynamic balance precision, the performance of the magnetic suspension molecular pump is improved, and the service life of the magnetic suspension molecular pump is prolonged.

Description

Technical Field

[0001] Embodiments of the present invention relate to the technical field of magnetic levitation molecular pumps. More specifically, the present invention relates to a tool for mounting a turbine assembly of an auxiliary magnetic levitation molecular pump on a balancing machine. Background Art

[0002] Magnetic levitation molecular pumps are key core components of high-precision equipment such as integrated circuit manufacturing equipment, and are used to provide a high-purity ultra-high vacuum environment for high-precision equipment. During use, the rotating shaft of the magnetic levitation molecular pump and the turbine assembly mounted on the rotor need to operate at ultra-high speeds, and their dynamic balance accuracy directly affects the quality and lifespan of the magnetic levitation molecular pump and the high-precision equipment using it.

[0003] Although the design of the rotor usually approximates the form of a standard rotating body and has a high dynamic balance accuracy after manufacturing, due to the structural complexity and processing difficulty of the turbine assembly, they are often prone to relatively serious imbalance. The prior art uses an on-line balancing machine to perform dynamic balance testing on the magnetic levitation molecular pump, and this method can detect the unbalance amount in the actual operating environment of the turbine assembly. However, this testing method also has its limitations. Especially due to the characteristics of magnetic levitation, there is a lack of direct physical contact between the pump housing and the rotor carrying the turbine assembly, which makes it difficult for the vibration generated during the rotation of the turbine assembly and the rotating shaft to be transmitted through the pump housing, thereby affecting the accuracy of the dynamic balance test results of the turbine assembly. Summary of the Invention

[0004] To solve one or more of the above-mentioned technical problems, the present invention provides a tool for mounting a turbine assembly of an auxiliary magnetic levitation molecular pump on a balancing machine, so as to ensure that the turbine assembly can be directly tested on an existing balancing machine, solve the deficiencies of traditional indirect testing, facilitate ensuring that the turbine assembly has a higher dynamic balance accuracy, and improve the performance and lifespan of the magnetic levitation molecular pump.

[0005] The present invention provides a tool for mounting a turbine assembly of an auxiliary magnetic levitation molecular pump on a balancing machine. The tool includes a tooling shaft and a connecting member. The tooling shaft includes: a first end and a second end opposite to each other, the first end and the second end are respectively used for mounting on a first support part and a second support part of the balancing machine; a mounting part located between the first end and the second end, which allows the turbine assembly to be sleeved thereon. The connecting member is used to detachably fix the turbine assembly on the mounting part.

[0006] In an optional technical solution, the mounting portion includes a sleeve section for supporting the weight-adjusting baffle and the turbine body in the turbine assembly, and a shoulder section abutting against a side of the turbine body away from the weight-adjusting baffle and having an internal threaded hole, and the connecting component includes a locking screw that passes through the weight-adjusting baffle and the turbine body and is screwed into the internal threaded hole of the shoulder section.

[0007] In an optional technical solution, the fit between the turbine body and the sleeve section is a clearance fit, and the maximum clearance between the two is 2μm-5μm, wherein the sleeve section is a cone with a taper of 1:5000-1:3000, and its radial dimension gradually decreases from the first end to the second end.

[0008] In an optional technical solution, the number of the locking screws is 1 / 2 times the number of the assembly holes of the turbine body.

[0009] In an optional technical solution, the mass difference between any two of the locking screws does not exceed 1 / 1000 times the mass of the turbine body.

[0010] In an optional technical solution, the radial dimensions of the first end portion and the second end portion are the same and smaller than the radial dimension of the mounting portion.

[0011] In an optional technical solution, the tooling shaft also includes a connecting portion connecting the first end portion and the mounting portion, the length of the connecting portion is 1 / 3-1 / 2 times the length of the tooling shaft, and the radial dimension of the connecting portion is greater than the radial dimension of the first end portion, the second end portion and the mounting portion.

[0012] In an optional technical solution, the tooling shaft further includes a connecting portion connecting the second end portion and the mounting portion, and a radial dimension of the connecting portion is larger than a radial dimension of the second end portion and smaller than a radial dimension of the mounting portion.

[0013] In an optional technical solution, the roughness of the first end and the second end is 0.2 μm to 0.8 μm.

[0014] In an optional technical solution, the tooling shaft is made of stainless steel.

[0015] With the tools provided above, which mainly consist of a tooling shaft and a connecting member, the turbine assembly of the magnetic levitation molecular pump can be installed on the balancing machine, and it is ensured that the turbine assembly undergoes accurate and direct dynamic balancing tests on the balancing machine, which is beneficial to ensuring that the turbine assembly has higher dynamic balancing accuracy and improving the performance and service life of the magnetic levitation molecular pump. In addition, through the cooperation of the mounting portion on the tooling shaft and the connecting member, the turbine assembly can be conveniently sleeved and fixed on the tooling shaft. This method facilitates the installation and disassembly of the turbine assembly, simplifies the operation difficulty, and saves time and labor. Description of the Drawings

[0016] By reading the following detailed description with reference to the accompanying drawings, the above and other objects, features, and advantages of the exemplary embodiments of the present invention will become readily understandable. In the drawings, several embodiments of the present invention are shown in an exemplary rather than restrictive manner, and the same or corresponding reference numerals represent the same or corresponding parts, where:

[0017] Figure 1 The turbine assembly and the tools provided by the embodiments of the present invention are shown;

[0018] Figure 2 Shows Figure 1 The tooling shaft of the tool shown.

[0019] Description of the reference numerals: 1, tooling shaft; 11, first end; 12, second end; 13, mounting portion; 131, socket section; 132, shoulder section; 132a, internal threaded hole; 14, connecting portion; 15, connecting section; 2, connecting member; 100, tool; 201, turbine body; 202, weight adjustment shim; 200, turbine assembly. Detailed Embodiments

[0020] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of protection of the present disclosure.

[0021] The magnetic levitation molecular pump is a key core component of high-precision equipment such as integrated circuit manufacturing equipment, and is used to provide a high-purity ultra-high vacuum environment for high-precision equipment. It has strict requirements for the dynamic balance accuracy of the turbine assembly. The existing technology uses indirect measurement of the dynamic balance accuracy of the magnetic levitation molecular pump, which has certain limitations. The embodiments of the present invention provide a tool 100 for mounting the turbine assembly 200 of the magnetic levitation molecular pump on a balancing machine, so that the existing balancing machine can directly measure the dynamic balance accuracy of the turbine assembly 200, which is beneficial to ensuring that the turbine assembly 200 has higher dynamic balance accuracy, and improving the performance and service life of the magnetic levitation molecular pump.

[0022] As Figure 1 and Figure 2 shown, the tool 100 mainly includes a tooling shaft 1 and a connecting member 2. The tooling shaft 1 can be made of relatively durable metal materials such as ordinary steel or stainless steel, and it is recommended to be preferably made of stainless steel that is not easy to rust. The tooling shaft 1 includes a first end 11 and a second end 12 that are opposite to each other, and a mounting portion 13 located between the first end 11 and the second end 12. Among them, the first end 11 and the second end 12 are respectively used for mounting on the first support portion and the second support portion (such as a roller set) of the balancing machine. The mounting portion 13 allows the turbine assembly 200 to be sleeved thereon, so that the connecting member 2 can detachably fix the turbine assembly 200 on the mounting portion 13. During use, the balancing machine can support the tool 100 and the turbine assembly 200 it carries through the two support portions, and then drive the tooling shaft 1 and the turbine assembly 200 it carries to rotate synchronously through a belt connected to the turbine assembly 200 or the tooling shaft, so as to complete the dynamic balance test of the turbine assembly 200.

[0023] Based on this, the tool 100 can mount the turbine assembly 200 of the magnetic levitation molecular pump on the balancing machine, and ensure that the turbine assembly 200 can perform accurate and direct dynamic balance tests on the balancing machine, which is beneficial to ensuring that the turbine assembly 200 has higher dynamic balance accuracy, and improving the performance and service life of the magnetic levitation molecular pump. In addition, through the cooperation of the mounting portion 13 on the tooling shaft 1 and the connecting member 2, the turbine assembly 200 can be easily sleeved and fixed on the tooling shaft 1. This method is convenient for the installation and disassembly of the turbine assembly 200, can simplify the operation difficulty, and save time and labor.

[0024] In this embodiment, as Figure 2As shown, the mounting portion 13 includes a socket section 131 for carrying the weight adjustment flap 202 and the turbine body 201 in the turbine assembly 200, and a shoulder section 132 that abuts against the side of the turbine body 201 away from the weight adjustment flap 202 and has an internal threaded hole 132a. Among them, the weight adjustment flap 202 is generally a disc structure with a number of slot holes. During testing, the dynamic balance of the turbine assembly 200 can be adjusted only by increasing or decreasing the weight blocks inserted into the slot holes. The connecting member 2 includes a locking bolt that passes through the weight adjustment flap 202 and the turbine body 201 and is screwed into the internal threaded hole 132a of the shoulder section 132. It should be noted that the specific structures of the mounting portion 13 and the connecting member 2 provided in this embodiment are only a demonstration, and the two can be selected as other known structures that can achieve loading and fixing.

[0025] As an example, the fit between the turbine body 201 and the socket section 131 is a clearance fit, and the maximum clearance between the two is 2μm - 5μm. Among them, the socket section 131 is a conical shape with a taper of 1:5000 - 1:3000, and its radial dimension gradually decreases along the direction from the first end 11 to the second end 12. Through repeated experiments, it is known that only when the foregoing limitations, especially the parameter limitations, are met, the turbine assembly 200 can be easily and safely disassembled and assembled on the tooling shaft 1, and the disassembly and assembly process is not achieved by using a heating method, effectively improving the disassembly and assembly efficiency of the turbine assembly 200.

[0026] The number of locking bolts and the number of assembly holes of the turbine body 201 may not be limited. However, in order to balance the accuracy of the test results and improve the test efficiency at the same time, the number of locking bolts is recommended to be 1 / 2 times the number of assembly holes of the turbine body 201. For example, when the number of assembly holes of the turbine body 201 is 8, the number of locking bolts is 4. Practice shows that 4 locking bolts are sufficient to reliably fix the turbine assembly 200 on the mounting portion 13 of the tooling shaft 1, and compared with 8 locking bolts, the disassembly and assembly efficiency of the turbine assembly 200 can be effectively improved. Preferably, the mass difference between any two locking bolts does not exceed 1 / 1000 times the mass of the turbine body 201, which can effectively reduce the unbalance degree generated by the combination of locking bolts and interfere with the dynamic balance test accuracy of the turbine assembly 200.

[0027] In this embodiment, the radial dimensions of the first end 11 and the second end 12 are the same and smaller than the radial dimension of the mounting portion 13. In this way, it can be ensured that the turbine assembly 200 can be easily inserted into the mounting portion 13 of the tooling shaft 1, and it can be ensured that the balancing machine can stably drive the tooling shaft 1 and the turbine assembly 200 carried by it, and improve the dynamic balance test accuracy of the turbine assembly 200.

[0028] In this embodiment, the tooling shaft 1 further includes a connecting portion 14 that connects the first end portion 11 and the mounting portion 13. The length of the connecting portion 14 is 1 / 3 - 1 / 2 times the length of the tooling shaft 1. The radial dimension of the connecting portion 14 is greater than the radial dimensions of the first end portion 11, the second end portion 12, and the mounting portion 13. The connecting portion 14 occupies a relatively large volume on the tooling shaft 1 and does not contact the balancing machine and the turbine assembly 200, which is suitable for improving the dynamic balance accuracy of the tooling shaft 1 itself in a subtractive or additive manner and can reduce the interference of its unbalance accuracy on the dynamic balance test of the turbine assembly 200.

[0029] In this embodiment, the tooling shaft 1 further includes a connecting portion 15 that connects the second end portion 12 and the mounting portion 13. The radial dimension of the connecting section is greater than the radial dimension of the second end portion 12 and less than the radial dimension of the mounting portion 13. The position and dimension requirements of the connecting section can facilitate the transition from the mounting portion 13 to the second end portion 12 and avoid unnecessary processing waste caused by an extreme reduction in the radial dimension.

[0030] In this embodiment, the roughness of the first end portion 11 and the second end portion 12 is 0.2 μm - 0.8 μm. Within this roughness range, there is a good fit between the tooling shaft 1 and the supporting portion of the balancing machine, which can reduce friction and vibration during movement, thereby improving the stability and reliability of the test process.

[0031] In summary, the tool 100 ensures that the turbine assembly 200 can be directly tested on an existing balancing machine, solves the deficiencies of traditional indirect testing, is conducive to ensuring that the turbine assembly 200 has higher dynamic balance accuracy, and improves the performance and service life of the magnetic levitation molecular pump.

[0032] In the above description of this application, unless otherwise clearly specified and limited, terms such as "fixed", "installed", "connected", or "coupled" should be understood in a broad sense. For example, with respect to the term "connected", it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, or it can be the internal communication of two components or the interaction relationship between two components. Therefore, unless otherwise clearly limited in this application, those skilled in the art can understand the specific meaning of the above terms in the present invention according to specific circumstances.

[0033] In addition, terms such as "first" or "second" used in this application to refer to numbers or ordinals are only for descriptive purposes and cannot be understood as explicitly or implicitly indicating relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "a plurality" is at least two, such as two, three, or more, unless otherwise clearly specifically limited.

[0034] Although multiple embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art can conceive of many changes, alterations, and alternative ways without departing from the spirit and concept of the present invention. It should be understood that various alternatives to the embodiments of the present invention described herein can be employed in practicing the present invention. The appended claims are intended to define the scope of protection of the present invention and thus cover equivalents or alternatives within the scope of these claims.

Claims

1. A tool for mounting a turbine assembly of an auxiliary magnetic levitation molecular pump on a balancing machine, characterized in that The tool includes a tooling shaft, which comprises: A first end and a second end opposite to each other, the first end and the second end are respectively used for being mounted on the first support part and the second support part of the balancing machine; and A mounting part located between the first end and the second end, which allows the turbine assembly to be sleeved thereon; A connecting member, which is used for detachably fixing the turbine assembly on the mounting part.

2. The tool according to claim 1, wherein, The mounting part includes a socket section for carrying the weight adjustment washer and the turbine body in the turbine assembly, and a shoulder section that abuts against a side of the turbine body away from the weight adjustment washer and has an internal threaded hole. The connecting member includes a locking screw that passes through the weight adjustment washer and the turbine body and is screwed into the internal threaded hole of the shoulder section.

3. The tool according to claim 2, characterized in that The fit between the turbine body and the socket section is a clearance fit, and the maximum clearance between the two is 2μm - 5μm. Wherein the socket section is a conical shape with a taper of 1:5000 - 1:3000, and its radial dimension gradually decreases along the direction from the first end to the second end.

4. The tool according to claim 2, characterized in that The number of the locking screws is 1 / 2 times the number of the assembly holes of the turbine body.

5. The tool according to claim 2, characterized in that, The mass difference between any two of the locking screws does not exceed 1 / 1000 times the mass of the turbine body.

6. The tool according to any one of claims 1 to 5, characterized in that, The radial dimensions of the first end and the second end are the same and smaller than the radial dimension of the mounting part.

7. The tool according to any one of claims 1 to 5, characterized in that, The tooling shaft further includes a connecting part connecting the first end and the mounting part. The length of the connecting part is 1 / 3 - 1 / 2 times the length of the tooling shaft, and the radial dimension of the connecting part is larger than the radial dimensions of the first end, the second end and the mounting part.

8. The tool according to any one of claims 1 to 5, characterized in that, The tooling shaft further includes a connecting part connecting the second end and the mounting part. The radial dimension of the connecting section is larger than the radial dimension of the second end and smaller than the radial dimension of the mounting part.

9. The tool according to any one of claims 1 to 5, characterized in that, The roughness of the first end and the second end is 0.2μm - 0.8μm.

10. The tool according to any one of claims 1 to 5, characterized in that, The material of the tooling shaft is stainless steel.

Images