Photovoltaic cell production process tail gas infrared combustion device and working method thereof

Abstract

The invention belongs to the technical field of photovoltaic cell production process tail gas treatment, and particularly relates to a photovoltaic cell production process tail gas infrared combustion device and a working method thereof. According to the photovoltaic cell production process tail gas infrared combustion device, fresh air is supplemented into the tank body through the multiple fresh air openings, and silane can be combusted in the silane combustion chamber on the lower portion of the tank body in cooperation with nitrogen and air conveyed by the nitrogen supply pipe and the compressed air supply pipe, so that the silane tail gas treatment capacity can be improved. Infrared radiation catalytic oxidation is carried out on tail gas in the infrared combustion chamber through the infrared combustor, flammable and explosive gas can be stably treated, and the tail gas treatment amount can be increased. The turbulent flow assembly in the infrared burner is designed to be switchable in state, and different functions of burning and purging working modes can be met.

Description

Technical Field

[0001] The present invention belongs to the technical field of tail gas treatment in the production process of photovoltaic cells, and particularly relates to an infrared combustion device for the tail gas of the production process of photovoltaic cells and its working method. Background Art

[0002] The tail gas in the production process of photovoltaic cells contains silane, hydrogen, acetylene, etc. Silane is a colorless gas with a foul smell under normal temperature and pressure, is easy to catch fire at room temperature, and can undergo explosive combustion in air or halogen gas. Hydrogen, acetylene, etc. are also flammable and explosive gases. Therefore, how to effectively reduce the tail gas emission in the battery production process has become a major issue in the current development of photovoltaic cell production.

[0003] Currently, the main methods for treating photovoltaic silane waste gas include physical methods, chemical methods, and biological methods. Physical methods mainly include adsorption, condensation, and membrane separation, etc.; chemical methods mainly include combustion method, catalytic oxidation method, and chemical absorption method, etc.; biological methods mainly include microbial degradation method and plant absorption method, etc.

[0004] CN118729299A discloses an exhaust gas treatment system for the Poly process of Topcon cells, which uses the combustion method to treat the tail gas containing silane, and through the vertical pipe to settle and collect dust, it can reduce the blockage of subsequent pipelines and reduce the energy consumption of the combustion barrel. However, the tail gas treatment capacity of this method is small, and in some occasions with a large tail gas flow rate, such as the scenario where the air volume reaches 250m 3 / h, this treatment system cannot adapt. Summary of the Invention

[0005] The purpose of the present invention is to provide an infrared combustion device for the tail gas of the production process of photovoltaic cells and its working method.

[0006] The first aspect of the present application provides an infrared combustion device for the tail gas of the production process of photovoltaic cells, including: A tank body; A perforated plate, arranged inside the tank body; the perforated plate divides the interior of the tank body into a silane combustion chamber located at the lower part and an infrared combustion chamber located at the upper part; the silane combustion chamber is communicated with a tail gas inlet pipe, a plurality of fresh air inlets, a nitrogen supply pipe, and a compressed air supply pipe; an infrared burner is arranged in the infrared combustion chamber for heating the gas entering the infrared combustion chamber from the silane combustion chamber through the perforated plate by infrared radiation; wherein The infrared burner includes: A cylinder body; A turbulence component, arranged inside the cylinder body; A gas inlet pipe for fuel gas, one end of which extends below the turbulence component, and the other end is connected to a fuel gas delivery device; An air inlet, provided at the bottom of the cylinder body, for connecting an air conveying device; A porous ceramic plate and a composite metal mesh, provided on the upper part of the flow disturbing component; where The flow disturbing component includes: An annular plate, rotatably installed on the inner wall of the cylinder body; Four connecting rods, arranged in a cross shape on the inner side of the annular plate; where On both sides of each connecting rod, a first baffle and a second baffle inclined downward are respectively provided; The first baffle is fixedly connected to the connecting rod; The second baffle is hinged to the connecting rod and can rotate around the connecting rod within a preset range; and Both the gas conveying device and the air conveying device are electrically connected to the control module; When the infrared burner burns, the control module controls the gas conveying device and the air conveying device to respectively convey gas and air, and both the first baffle and the second baffle are in a downward inclined state; and When the infrared burner is turned off, the control module controls the gas conveying device to stop conveying gas, and controls the air conveying device to increase the pressure of the conveyed air; the air conveyed by the conveying device is ejected through the air injection column and blows the second baffle to an upward inclined state, so that the flow disturbing component is in the shape of an impeller and drives the flow disturbing component to rotate.

[0007] In an embodiment of the present application, an air outlet communicating with a negative pressure fan is provided at the top of the tank body, and a slag discharge port is provided at the bottom.

[0008] In an embodiment of the present application, the tail gas inlet pipe extends into the middle of the silane combustion chamber for conveying process tail gas into the silane combustion chamber.

[0009] In an embodiment of the present application, the plurality of fresh air inlets are provided on the tank wall of the silane combustion chamber; The nitrogen supply pipe and the compressed air supply pipe are respectively used for introducing nitrogen and air into the silane combustion chamber.

[0010] In an embodiment of the present application, a gas concentration detection device is provided on one side of the infrared burner for detecting the gas concentration entering the infrared combustion chamber through the porous plate; The gas concentration detection device and the infrared burner are electrically connected to a control module; When the gas concentration reaches a preset condition, the control module controls the infrared burner to burn.

[0011] In an embodiment of the present application, the preset condition is: H2 concentration < 0.8%VOL, and 0.1%VOL ≤ C2H2 concentration ≤ 0.3%VOL.

[0012] In an embodiment of the present application, an air diversion cavity is provided inside the bottom plate of the cylinder body; On the upper surface of the bottom plate, a number of air injection columns communicating with the air diversion cavity are convexly provided; On the lower surface of the bottom plate, the air inlet communicating with the air diversion cavity is provided.

[0013] In an embodiment of the present application, a receiving groove for receiving an annular plate is provided on the inner wall of the cylinder body; In the receiving groove, balls rotatably engaged with the annular plate are provided; In the receiving groove, a number of friction members abutting against the annular plate are provided.

[0014] The second aspect of the present application provides a working method of the tail gas infrared combustion device for photovoltaic cell production process as described above, including: Inputting process tail gas into the silane combustion chamber, introducing fresh air into the silane combustion chamber, and inputting nitrogen and compressed air into the silane combustion chamber to enable silane to burn in the silane combustion chamber; After the tail gas in the silane combustion chamber enters the infrared combustion chamber through the porous plate, determining whether the gas concentration reaches a preset condition; If so, controlling the infrared burner to burn; If not, purging the infrared burner.

[0015] The beneficial effects of the present invention are: (1) The tail gas infrared combustion device for photovoltaic cell production process of the present invention replenishes fresh air into the tank body through multiple fresh air inlets, and cooperates with the nitrogen and air conveyed by the nitrogen supply pipe and the compressed air supply pipe, so that silane can be burned and processed in the silane combustion chamber at the lower part of the tank body, which can improve the processing capacity of silane tail gas; (2) The porous plate can block most of the silicon dioxide in the silane combustion chamber for subsequent slag discharge treatment, reducing the influence on the subsequent tail gas infrared radiation catalytic oxidation; (3) The tail gas in the infrared combustion chamber is subjected to infrared radiation catalytic oxidation by the infrared burner, which can stably process flammable and explosive gases and can improve the tail gas treatment capacity; (4) The infrared burner can burn only when the tail gas concentration meets the conditions, improving the energy saving and safety; (5) The structure of the flow disturbance component is designed to be switchable, which can meet the different functions of the combustion and purging working modes.

[0016] Other features and advantages of the present invention will be described in the subsequent description, and part of them will become obvious from the description or be understood by implementing the present invention. The objectives and other advantages of the present invention are realized and obtained by the structures specifically pointed out in the description and the drawings.

[0017] In order to make the above objects, features and advantages of the present invention more obvious and understandable, the following specifically gives preferred embodiments and, in conjunction with the accompanying drawings, the detailed description is as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required to be used in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 is a schematic diagram of an infrared combustion device for the tail gas of a photovoltaic cell production process according to a preferred embodiment of the present invention; Figure 2 is a top view of an infrared combustion device for the tail gas of a photovoltaic cell production process according to a preferred embodiment of the present invention; Figure 3 is a three-dimensional view of an infrared burner according to a preferred embodiment of the present invention; Figure 4 is a cross-sectional view of an infrared burner according to a preferred embodiment of the present invention; Figure 5 is a schematic diagram of a turbulence component when the infrared burner of the present invention is burning; Figure 6 is a schematic diagram of a turbulence component when the infrared burner of the present invention is purging; Figure 7 is a schematic diagram of the cooperation between the turbulence component and the cylinder body according to a preferred embodiment of the present invention.

[0020] In the figure: tank body 1, silane combustion chamber 101, infrared combustion chamber 102, air outlet hole 11, slag discharge port 12, perforated plate 2, tail gas inlet pipe 3, fresh air inlet 4, nitrogen gas supply pipe 5, compressed air supply pipe 6, infrared burner 7, cylinder body 71, air diversion cavity 711, air injection column 712, receiving groove 713, ball 714, friction member 715, turbulence component 72, annular plate 721, connecting rod 722, first baffle 723, second baffle 724, gas inlet pipe 73, air inlet 74, porous ceramic plate 75, composite metal mesh 76, gas concentration detection device 8. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention.

[0022] This application provides an infrared combustion device for the tail gas of a photovoltaic cell production process and its working method, which will be described in detail below. It should be noted that the description order of the following embodiments does not limit the preferred order of the embodiments of this application. And in the following embodiments, each embodiment has its own emphasis. For the parts not detailed in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0023] See Figure 1 and Figure 2 , in an embodiment, an infrared combustion device for the tail gas of a photovoltaic cell production process includes: a tank body 1, with an air outlet 11 communicated with a negative pressure fan arranged at the top and a slag discharge port 12 arranged at the bottom; a perforated plate 2 arranged inside the tank body 1; the perforated plate 2 divides the interior of the tank body 1 into a silane combustion chamber 101 located in the lower part and an infrared combustion chamber 102 located in the upper part; a tail gas inlet pipe 3 for conveying process tail gas into the silane combustion chamber 101; a plurality of fresh air inlets 4 arranged on the tank wall of the silane combustion chamber 101; a nitrogen supply pipe 5 and a compressed air supply pipe 6 respectively used for introducing nitrogen and air into the silane combustion chamber 101; and an infrared burner 7 arranged in the infrared combustion chamber 102 for heating the gas entering the infrared combustion chamber 102 from the silane combustion chamber 101 through the perforated plate 2 by infrared radiation.

[0024] In this embodiment, during operation, the negative pressure fan continuously generates negative pressure on the tank body 1 to supplement fresh air into the tank body 1 through a plurality of fresh air inlets 4; the nitrogen gas supply pipe 5 and the compressed air supply pipe 6 respectively introduce nitrogen gas and air into the silane combustion chamber 101; the tail gas inlet pipe 3 can be connected to the photovoltaic cell production process, and the process tail gas containing flammable and explosive gases such as silane, hydrogen, and acetylene enters the silane combustion chamber 101 through the tail gas inlet pipe 3. Among them, after the silane comes into contact with the air in the silane combustion chamber 101, it becomes silicon dioxide and water, and the remaining tail gas enters the infrared combustion chamber 102 through the through holes on the porous plate 2; a part of the silicon dioxide dust is blocked by the porous plate 2 and falls to the bottom of the silane combustion chamber 101, and can be subjected to subsequent treatment through the slag discharge port 12, and the remaining part will enter the infrared combustion chamber 102 through the through holes on the porous plate 2; the infrared burner 7 can heat the temperature in the infrared combustion chamber 102 to the temperature at which hydrogen, acetylene, etc. can react with oxygen. For example, the reaction temperature of hydrogen is 574°C and the reaction temperature of acetylene is 305°C; finally, the gas and silicon dioxide dust in the infrared combustion chamber 102 can be sucked into the subsequent treatment equipment by the negative pressure fan.

[0025] In this embodiment, the plurality of fresh air inlets 4 can meet the demand for a large air intake volume and can improve the processing capacity of the tail gas containing silane. The tail gas inlet pipe 3 can be multiple and are respectively connected to different process lines. The tail gas inlet pipe 3 can extend into the middle of the silane combustion chamber 101 to facilitate the mixing of the tail gas and the fresh air.

[0026] Optionally, the number of fresh air inlets 4 can be four; the tail gas inlet pipe 3 can be multiple.

[0027] In this embodiment, on the one hand, the nitrogen gas supply pipe 5 and the compressed air supply pipe 6 can introduce nitrogen gas and air into the silane combustion chamber 101 according to the gas components and concentrations in the treated tail gas; on the other hand, it can generate turbulence in the silane combustion chamber 101 to make the tail gas and the fresh air mix fully and the silane burn completely.

[0028] In this embodiment, the infrared burner 7 replaces the way of burning the silane tail gas with an open flame. The radiation infrared rays emitted by the infrared burner 7 have strong penetration power, which can improve the catalytic oxidation effect of the tail gas and also increase the tail gas treatment capacity.

[0029] Furthermore, a gas concentration detection device 8 is arranged on one side of the infrared burner 7 for detecting the gas concentration entering the infrared combustion chamber 102 through the porous plate 2; the gas concentration detection device 8 and the infrared burner 7 are electrically connected to a control module; when the gas concentration reaches a preset condition, the control module controls the infrared burner 7 to burn.

[0030] In some application scenarios, as the production process progresses, the concentrations of the components of flammable and explosive gases in the process tail gas will change. For example, in some stages, the concentrations of hydrogen and silane are high, in some stages, the concentration of acetylene is high, and in some stages, the concentration of silane is high. Therefore, in some stages, the infrared burner 7 is required for radiative catalysis, and in some stages, radiative catalysis is not required. The gas concentration detection device 8 can be used to detect the gas concentration entering the infrared combustion chamber 102, and when the gas concentration reaches the preset conditions, the infrared burner 7 is controlled to burn.

[0031] Specifically, the preset conditions are: H2 concentration < 0.8%VOL, and 0.1%VOL ≤ C2H2 concentration ≤ 0.3%VOL.

[0032] Furthermore, when the H2 concentration ≥ 0.8%VOL and / or the C2H2 concentration > 0.3%VOL of the above upper limit value, the control module can control the negative pressure fan to increase the suction to increase the fresh air volume to reduce the concentration of flammable and explosive gases. In addition, when the H2 concentration < 0.8%VOL and the C2H2 concentration < 0.1%VOL, the tail gas can be directly discharged after being treated by subsequent processes.

[0033] See Figure 3 and Figure 4 As shown in [relevant figure], the infrared burner 7 includes: a cylinder body 71; a flow disturbance component 72 disposed inside the cylinder body 71; a gas inlet pipe 73, one end of which extends below the flow disturbance component 72 and the other end of which is connected to a gas delivery device; an air inlet 74 disposed at the bottom of the cylinder body 71 for connecting to an air delivery device; a porous ceramic plate 75 disposed above the flow disturbance component 72; and a composite metal mesh 76 disposed at the upper opening of the cylinder body 71.

[0034] In this embodiment, after the gas and air enter the cylinder body 71, they are preliminarily mixed in the lower space of the flow disturbance component 72, and then further fully mixed when passing through the flow disturbance component 72. After being stabilized by the porous ceramic plate 75, they enter the space surrounded by the porous ceramic plate 75 and the composite metal mesh 76 and are ignited for combustion. The composite metal mesh 76 is burned red for infrared radiation to perform infrared radiative catalytic oxidation on the gas in the infrared combustion chamber 102.

[0035] In this embodiment, compared with using ceramics as the combustion catalyst, using the composite metal mesh 76 for infrared radiation has a faster burning red speed and a faster response speed, and the porous ceramic plate 75 will not turn red to cause flashback.

[0036] See Figure 4 As shown in [relevant figure], further, an air diversion cavity 711 is provided inside the bottom plate of the cylinder body 71; a plurality of air injection columns 712 communicating with the air diversion cavity 711 are convexly provided on the upper surface of the bottom plate; and the air inlet 74 communicating with the air diversion cavity 711 is provided on the lower surface of the bottom plate.

[0037] In this embodiment, after air enters the air diversion chamber 711 through the air inlet 74, it is ejected from each air injection column 712 and mixed with the gas that enters the cylinder body 71 through the gas inlet pipe 73; the air injection columns 712 protrude from the bottom plate, and can cause turbulence to the gas input by the gas inlet pipe 73, so that the gas can be preliminarily mixed with the air.

[0038] Optionally, the turbulence component 72 can further cause turbulence and mixing of the air and the gas. Specifically, the turbulence component 72 includes: an annular plate 721 rotatably installed on the inner wall of the cylinder body 71; four connecting rods 722 arranged in a cross shape on the inner side of the annular plate 721; and first baffles 723 and second baffles 724 that are downwardly inclined on both sides of each connecting rod 722.

[0039] In this embodiment, both the first baffle 723 and the second baffle 724 are downwardly inclined, and the two baffles can form an inverted V shape. On the one hand, it can cause turbulence to the gas and the air, and on the other hand, it can increase the flow path of the gas and the air. There are gaps for gas to pass through between the baffles of adjacent connecting rods 722.

[0040] Furthermore, since silica dust will enter the infrared combustion chamber 102 from the silane combustion chamber 101, it is necessary to prevent the dust from settling on the composite metal mesh 76 to block its mesh holes and even enter the holes of the porous ceramic plate 75. When the infrared burner 7 is burning, due to the continuous ejection of gas and air, the dust settlement can be prevented; however, during some time periods, the infrared burner 7 may not be burning, so it is necessary to prevent the dust from settling.

[0041] Specifically, referring to Figure 5 and Figure 6 , the first baffle 723 is fixedly connected to the connecting rod 722; the second baffle 724 is hinged to the connecting rod 722 and can rotate around the connecting rod 722 within a preset range. That is, the second baffle 724 can be in the downwardly inclined state as shown in Figure 5 , and at this time, the turbulence component 72 is in the normal turbulence state; the second baffle 724 can also be in the upwardly inclined state as shown in 6, and at this time, the turbulence component 72 is in the impeller state. Since the annular plate 721 is rotatably installed on the inner wall of the cylinder body 71, the turbulence component 72 can be blown by the air flow to rotate.

[0042] Furthermore, the gas delivery device and the air delivery device can both be electrically connected to the control module; When the infrared burner 7 is burning, the control module controls the gas delivery device and the air delivery device to deliver gas and air respectively. Since only the amount of air required for combustion needs to be satisfied, the air ejected from the air injection column 712 is not sufficient to blow up the second baffle 724. Both the first baffle 723 and the second baffle 724 are in a downward inclined state, and the turbulence component 72 is in a normal turbulence state; When the infrared burner 7 is turned off, it is necessary to continuously or intermittently purge the porous ceramic plate 75 and the composite metal mesh 76. The control module controls the gas delivery device to stop delivering gas and controls the air delivery device to increase the pressure of the delivered air, that is, the air flow velocity ejected from the air injection column 712 becomes larger, which is sufficient to blow the second baffle 724 to an upward inclination, so that the turbulence component 72 is in an impeller shape and drives the turbulence component 72 to rotate.

[0043] If the turbulence component 72 is fixed, the purging air can only pass through the gaps on the turbulence component 72 to purge a local area of the lower surface of the porous ceramic plate 75; and by designing the turbulence component 72 to be rotatable during purging, on the one hand, the air ejected from the air injection column 712 can be guided by the baffle to the lower surface of the porous ceramic plate 75, and on the other hand, it can drive the turbulence component 72 to rotate, which can make the purging air sweep over the entire lower surface of the porous ceramic plate 75, making the purging more uniform. During the purging process, the high-speed air flow is discharged after passing through the porous ceramic plate 75 and the composite metal mesh 76 in sequence, and can purge the silicon dioxide dust deposited on the composite metal mesh 76 and the porous ceramic plate 75.

[0044] See Figure 7 , as a rotational mounting method of the turbulence component 72, a receiving groove 713 for receiving the annular plate 721 is provided on the inner wall of the cylinder body 71; rolling balls 714 that are rotationally matched with the annular plate 721 are provided in the receiving groove 713. The rolling balls 714 can be rotationally mounted in the upper and lower walls of the receiving groove 713. Of course, in other embodiments, the annular plate 721 can be rotationally mounted to the cylinder body 71 through bearings.

[0045] In order to prevent the rotation speed of the turbulence component 72 from being too fast and affecting the purging effect, a number of friction members 715 that abut against the annular plate 721 are provided in the receiving groove 713, which can reduce the rotation speed of the turbulence component 72. In one embodiment, the turbulence component 72 can rotate one week in 30 s, or one week in one minute, so that the purging air can stably sweep over the lower surface of the porous ceramic plate 75.

[0046] In this embodiment, the structure of the turbulence component 72 is designed to be switchable, which can meet the different functions of the combustion and purging working modes.

[0047] Correspondingly, on the basis of the above embodiments, the present embodiment further provides a working method for an infrared combustion device for the tail gas of a photovoltaic cell production process as described above, including: inputting the process tail gas into the silane combustion chamber 101, introducing fresh air into the silane combustion chamber 101, inputting nitrogen and compressed air into the silane combustion chamber 101 to cause silane to burn in the silane combustion chamber 101; after the tail gas in the silane combustion chamber 101 enters the infrared combustion chamber 102 through the porous plate 2, determining whether the gas concentration reaches a preset condition; if so, controlling the infrared burner 7 to burn; if not, purging the infrared burner 7.

[0048] In this embodiment, the specific working method of the infrared combustion device for the tail gas of the photovoltaic cell production process can be referred to as described in the above embodiments, and will not be elaborated here.

[0049] It should be noted that each device (components without specific structures described) selected in the present application is a general standard component or a component known to those skilled in the art, and its structure and principle can be known to those skilled in the art through technical manuals or obtained through conventional experimental methods.

[0050] In the description of the embodiments of the present invention, unless otherwise clearly defined and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0051] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0052] Taking the above ideal embodiments of the present invention as an inspiration, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the specification.

Claims

1. An infrared combustion device for the tail gas of a photovoltaic cell production process, characterized in that, Comprising: A tank body; A perforated plate, which is arranged inside the tank body; the perforated plate divides the interior of the tank body into a silane combustion chamber located at the lower part and an infrared combustion chamber located at the upper part; the silane combustion chamber is communicated with an exhaust gas inlet pipe, a plurality of fresh air inlets, a nitrogen supply pipe and a compressed air supply pipe; an infrared burner is arranged in the infrared combustion chamber for heating the gas entering the infrared combustion chamber from the silane combustion chamber through the perforated plate by infrared radiation; Wherein The infrared burner includes: A cylinder body; A flow disturbing component, which is arranged inside the cylinder body; A gas inlet pipe for fuel gas, one end of which extends below the flow disturbing component and the other end is connected to a fuel gas conveying device; An air inlet, which is arranged at the bottom of the cylinder body and is used for connecting an air conveying device; A porous ceramic plate and a composite metal mesh, which are arranged above the flow disturbing component; wherein The flow disturbing component includes: An annular plate, which is rotatably installed on the inner wall of the cylinder body; Four connecting rods, which are arranged in a cross shape on the inner side of the annular plate; wherein First baffles and second baffles inclined downward are respectively arranged on both sides of each connecting rod; The first baffle is fixedly connected with the connecting rod; The second baffle is hinged to the connecting rod and can rotate around the connecting rod within a preset range; and The fuel gas conveying device and the air conveying device are both electrically connected to a control module; When the infrared burner burns, the control module controls the fuel gas conveying device and the air conveying device to respectively convey fuel gas and air, and both the first baffle and the second baffle are in a downward inclined state; and When the infrared burner is turned off, the control module controls the fuel gas conveying device to stop conveying fuel gas and controls the air conveying device to increase the pressure of the conveyed air; the air conveyed by the conveying device is ejected through an air injection column and blows the second baffle to an upward inclined state, so that the flow disturbing component is in the shape of an impeller and drives the flow disturbing component to rotate.

2. The infrared combustion device for the tail gas of the photovoltaic cell production process according to claim 1, wherein An air outlet communicated with a negative pressure fan is arranged at the top of the tank body, and a slag discharge port is arranged at the bottom.

3. The infrared combustion device for the tail gas of the photovoltaic cell production process according to claim 1, wherein The exhaust gas inlet pipe extends into the middle of the silane combustion chamber for conveying process exhaust gas into the silane combustion chamber.

4. The infrared combustion device for the tail gas of the photovoltaic cell production process according to claim 2, wherein The plurality of fresh air inlets are arranged on the tank wall of the silane combustion chamber; The nitrogen supply pipe and the compressed air supply pipe are respectively used for introducing nitrogen and air into the silane combustion chamber.

5. The infrared combustion device for the tail gas of the photovoltaic cell production process according to claim 1, wherein A gas concentration detection device is arranged on one side of the infrared burner for detecting the gas concentration of the gas entering the infrared combustion chamber through the perforated plate; The gas concentration detection device and the infrared burner are electrically connected to a control module; When the gas concentration reaches a preset condition, the control module controls the infrared burner to burn.

6. The infrared combustion device for the tail gas of the photovoltaic cell production process according to claim 5, wherein The preset conditions are: the concentration of H2 < 0.8%VOL, and 0.1%VOL ≤ the concentration of C2H2 ≤ 0.3%VOL.

7. The tail gas infrared combustion device for the photovoltaic cell production process according to claim 1, wherein an air diversion chamber is arranged inside the bottom plate of the cylinder body; a plurality of air injection columns communicating with the air diversion chamber are convexly arranged on the upper surface of the bottom plate; an air inlet communicating with the air diversion chamber is arranged on the lower surface of the bottom plate.

8. The tail gas infrared combustion device for the photovoltaic cell production process according to claim 1, wherein a receiving groove for receiving an annular plate is arranged on the inner wall of the cylinder body; rolling balls rotatably matched with the annular plate are arranged in the receiving groove; a plurality of friction members abutting against the annular plate are arranged in the receiving groove.

9. A working method of an infrared combustion device for the tail gas of a photovoltaic cell production process according to any one of claims 1-8, characterized in that, It includes: inputting process tail gas into the silane combustion chamber, introducing fresh air into the silane combustion chamber, and inputting nitrogen and compressed air into the silane combustion chamber to enable silane to burn in the silane combustion chamber; after the tail gas in the silane combustion chamber enters the infrared combustion chamber through the porous plate, judging whether the gas concentration reaches the preset conditions; if so, controlling the infrared burner to burn; if not, purging the infrared burner.

Images