Infrared Combustion Device for Tail Gas in Photovoltaic Cell Production Process

Abstract

The present invention belongs to the technical field of exhaust gas treatment in photovoltaic cell production processes, and specifically relates to an infrared combustion device for exhaust gas in photovoltaic cell production processes. The infrared combustion device for exhaust gas in photovoltaic cell production processes replenishes fresh air into the tank body through multiple fresh air inlets, and cooperates with the nitrogen and air transported by the nitrogen supply pipe and the compressed air supply pipe to burn silane in the silane combustion chamber at the lower part of the tank body, thereby improving the processing capacity of silane exhaust gas. By using an infrared burner to perform infrared radiation catalytic oxidation on the exhaust in the infrared combustion chamber, flammable and explosive gases can be stably processed, and the exhaust gas processing capacity can be improved. The structure of the turbulence component in the infrared burner is designed to be switchable, which can meet the different functions of the combustion and purge working modes.

Description

Technical Field

[0001] The invention belongs to the technical field of tail gas treatment in photovoltaic cell production processes, and particularly relates to an infrared combustion device for tail gas in photovoltaic cell production processes. Background Art

[0002] The tail gas from photovoltaic cell production processes contains silane, hydrogen, acetylene, and other gases. Silane is a colorless gas with a foul odor at room temperature and pressure. It is flammable at room temperature and can combust explosively in air or halogen gases. Hydrogen and acetylene are also flammable and explosive gases. Therefore, effectively reducing tail gas emissions from the cell production process has become a major challenge in the current development of photovoltaic cell production.

[0003] Currently, the main methods for treating photovoltaic silane waste gas include physical, chemical, and biological methods. Physical methods mainly include adsorption, condensation, and membrane separation; chemical methods mainly include combustion, catalytic oxidation, and chemical absorption. Biological methods mainly include microbial degradation and plant absorption.

[0004] CN118729299A discloses a waste gas treatment system for the Topcon battery Poly process, which uses a combustion method to treat silane-containing tail gas and uses a vertical pipe to settle and collect dust, which can reduce the blockage of subsequent pipelines and reduce the energy consumption of the combustion barrel. However, the tail gas treatment capacity of this method is relatively small. In some places where the tail gas volume is large, such as when the air volume reaches 250m 3 / h scenario, this processing system cannot adapt. Summary of the Invention

[0005] The purpose of the present invention is to provide an infrared combustion device for tail gas in a photovoltaic cell production process.

[0006] The first aspect of the present application provides an infrared combustion device for tail gas from a photovoltaic cell production process, comprising:

[0007] Tank;

[0008] A porous plate is arranged in the tank body; the porous plate divides the interior of the tank body into a silane combustion chamber located at the bottom and an infrared combustion chamber located at the top; the silane combustion chamber is connected to an exhaust gas intake pipe, multiple fresh air inlets, a nitrogen supply pipe and a compressed air supply pipe; an infrared burner is arranged in the infrared combustion chamber for heating the gas entering the infrared combustion chamber from the silane combustion chamber through the porous plate by infrared radiation;

[0009] The infrared burner comprises:

[0010] Cylinder;

[0011] A spoiler assembly is arranged in the cylinder;

[0012] A gas inlet pipe, one end of which extends below the spoiler assembly and the other end of which is connected to the gas delivery device;

[0013] An air inlet is provided at the bottom of the cylinder and is used for connecting to an air delivery device;

[0014] The porous ceramic plate and the composite metal mesh are arranged on the upper part of the spoiler component;

[0015] The spoiler assembly includes:

[0016] An annular plate, rotatably mounted on the inner wall of the cylinder;

[0017] Four connecting rods are arranged in a cross shape on the inner side of the annular plate;

[0018] A first baffle and a second baffle inclined downward are respectively provided on both sides of each connecting rod;

[0019] The first baffle is fixedly connected to the connecting rod;

[0020] The second baffle is hinged to the connecting rod and can rotate around the connecting rod within a preset range; and

[0021] The gas delivery device and the air delivery device are both electrically connected to the control module;

[0022] When the infrared burner is burning, the control module controls the gas delivery device and the air delivery device to deliver gas and air respectively, and the first baffle and the second baffle are both in a downward tilted state; and

[0023] When the infrared burner is turned off, the control module controls the gas delivery device to stop delivering gas, and controls the air delivery device to increase the pressure of the delivered air; the air delivered by the delivery device is ejected through the air jet column and blows the second baffle to tilt upward, so that the spoiler component is in the shape of an impeller and drives the spoiler component to rotate.

[0024] In one embodiment of the present application, an air outlet connected to a negative pressure blower is provided on the top of the tank body, and a slag discharge port is provided on the bottom.

[0025] In one embodiment of the present application, the tail gas inlet pipe extends into the middle of the silane combustion chamber to transport the process tail gas into the silane combustion chamber.

[0026] In one embodiment of the present application, the multiple fresh air inlets are provided on the tank wall of the silane combustion chamber;

[0027] The nitrogen supply pipe and the compressed air supply pipe are used to respectively introduce nitrogen and air into the silane combustion chamber.

[0028] In one embodiment of the present application, a gas concentration detection device is provided on one side of the infrared burner for detecting the concentration of gas entering the infrared combustion chamber through the porous plate;

[0029] The gas concentration detection device and the infrared burner are electrically connected to a control module;

[0030] The control module controls the infrared burner to burn when the gas concentration reaches a preset condition.

[0031] In one embodiment of the present application, the preset conditions are: H2 concentration < 0.8%VOL, and 0.1%VOL ≤ C2H2 concentration ≤ 0.3%VOL.

[0032] In one embodiment of the present application, an air diversion cavity is provided in the bottom plate of the cylinder;

[0033] A plurality of air injection columns communicating with the air diversion cavity are protruded from the upper surface of the bottom plate;

[0034] The lower surface of the bottom plate is provided with the air inlet communicated with the air diversion cavity.

[0035] In one embodiment of the present application, a receiving groove for receiving the annular plate is provided on the inner wall of the cylinder;

[0036] A ball is provided in the receiving groove and is rotatably matched with the annular plate;

[0037] A plurality of friction pieces abutting against the annular plate are arranged in the accommodating groove.

[0038] A second aspect of the present application provides a method for operating the above-mentioned photovoltaic cell production process exhaust infrared combustion device, comprising:

[0039] The process tail gas is introduced into the silane combustion chamber, fresh air is introduced into the silane combustion chamber, and nitrogen and compressed air are introduced into the silane combustion chamber to make the silane burn in the silane combustion chamber;

[0040] After the tail gas in the silane combustion chamber enters the infrared combustion chamber through the porous plate, it is judged whether the gas concentration reaches the preset condition;

[0041] If so, the infrared burner is controlled to burn;

[0042] If not, purge the infrared burner.

[0043] The beneficial effects of the present invention are:

[0044] (1) The photovoltaic cell production process exhaust infrared combustion device of the present invention replenishes fresh air into the tank body through multiple fresh air inlets, and cooperates with nitrogen and air delivered by the nitrogen supply pipe and the compressed air supply pipe to burn silane in the silane combustion chamber at the lower part of the tank body, thereby improving the processing capacity of silane exhaust gas;

[0045] (2) The porous plate can block most of the silicon dioxide in the silane combustion chamber for subsequent slag treatment, reducing the impact on the subsequent infrared radiation catalytic oxidation of the exhaust gas;

[0046] (3) The infrared burner is used to catalyze and oxidize the exhaust gas in the infrared combustion chamber by infrared radiation, which can stably treat flammable and explosive gases and increase the exhaust gas treatment capacity;

[0047] (4) The infrared burner can burn only when the exhaust gas concentration meets the conditions, which improves energy saving and safety;

[0048] (5) The structure of the spoiler component is designed to be switchable so as to satisfy the different functions of the combustion and purge working modes.

[0049] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0050] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0052] Figure 1 Schematic diagram of an infrared combustion device for tail gas from a photovoltaic cell production process according to a preferred embodiment of the present invention;

[0053] Figure 2 1 is a top view of an infrared combustion device for tail gas from a photovoltaic cell production process according to a preferred embodiment of the present invention;

[0054] Figure 3 is a perspective view of an infrared burner according to a preferred embodiment of the present invention;

[0055] Figure 4is a cross-sectional view of an infrared burner according to a preferred embodiment of the present invention;

[0056] Figure 5 Schematic diagram of a spoiler assembly during combustion of an infrared burner according to a preferred embodiment of the present invention;

[0057] Figure 6 Schematic diagram of a spoiler assembly during purging of an infrared burner according to a preferred embodiment of the present invention;

[0058] Figure 7 It is a schematic diagram of the cooperation between the spoiler assembly and the cylinder in a preferred embodiment of the present invention.

[0059] In the picture:

[0060] Tank body 1, silane combustion chamber 101, infrared combustion chamber 102, air outlet 11, slag discharge port 12, porous plate 2, exhaust gas inlet pipe 3, fresh air inlet 4, nitrogen supply pipe 5, compressed air supply pipe 6, infrared burner 7, cylinder 71, air diversion chamber 711, air injection column 712, receiving groove 713, ball 714, friction part 715, spoiler assembly 72, annular plate 721, connecting rod 722, first baffle 723, second baffle 724, gas inlet pipe 73, air inlet 74, porous ceramic plate 75, composite metal mesh 76, gas concentration detection device 8. DETAILED DESCRIPTION

[0061] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0062] This application provides an infrared combustion device for exhaust gas from a photovoltaic cell production process and its operating method, which are described in detail below. It should be noted that the order in which the following embodiments are described does not limit the preferred order of the embodiments of this application. Furthermore, in the following embodiments, the descriptions of each embodiment have their own emphasis. For portions not detailed in one embodiment, please refer to the relevant descriptions of other embodiments.

[0063] See also Figure 1 and Figure 2In one embodiment, an infrared combustion device for exhaust gas from a photovoltaic cell production process includes: a tank body 1, a top of which is provided with an air outlet 11 connected to a negative pressure fan, and a bottom of which is provided with a slag discharge port 12; a porous plate 2, arranged in the tank body 1; the porous plate 2 divides the interior of the tank body 1 into a silane combustion chamber 101 located at the lower part and an infrared combustion chamber 102 located at the upper part; an exhaust gas inlet pipe 3, used for conveying process exhaust gas into the silane combustion chamber 101; a plurality of fresh air inlets 4, arranged on the tank wall of the silane combustion chamber 101; a nitrogen supply pipe 5 and a compressed air supply pipe 6, respectively used for introducing nitrogen and air into the silane combustion chamber 101; and an infrared burner 7, arranged in the infrared combustion chamber 102, used for heating the gas entering the infrared combustion chamber 102 from the silane combustion chamber 101 through the porous plate 2 by infrared radiation.

[0064] In this embodiment, when working, the negative pressure fan continuously generates negative pressure on the tank body 1 to replenish fresh air into the tank body 1 through multiple fresh air inlets 4; the nitrogen supply pipe 5 and the compressed air supply pipe 6 respectively introduce nitrogen and air into the silane combustion chamber 101; the tail gas inlet pipe 3 can be connected to the photovoltaic cell production process, and the process tail gas containing silane, hydrogen, acetylene and other inflammable and explosive gases enters the silane combustion chamber 101 through the tail gas inlet pipe 3, wherein the silane is converted into silicon dioxide and water after contacting with the air in the silane combustion chamber 101, and the remaining tail gas enters the red through the through holes on the porous plate 2 External combustion chamber 102; a part of the silica dust is blocked by the porous plate 2 and falls to the bottom of the silane combustion chamber 101, and can be subsequently processed through the slag discharge port 12, and the remaining part will enter the infrared combustion chamber 102 through the through holes on the porous plate 2; the infrared burner 7 can heat the temperature in the infrared combustion chamber 102 to a temperature at which hydrogen, acetylene, etc. can react with oxygen, for example, the reaction temperature of hydrogen is 574°C and the reaction temperature of acetylene is 305°C; finally, the gas and silica dust in the infrared combustion chamber 102 can be sucked into the subsequent processing equipment by the negative pressure fan.

[0065] In this embodiment, multiple fresh air inlets 4 can meet the demand for large air intakes and improve the processing capacity of silane-containing tail gas. The tail gas inlet pipe 3 can be multiple, each connected to a different process line. The tail gas inlet pipe 3 can extend into the middle of the silane combustion chamber 101 to facilitate mixing of the tail gas and the fresh air.

[0066] Optionally, the number of the fresh air inlets 4 may be four; the number of the exhaust gas intake pipes 3 may be multiple.

[0067] In this embodiment, on the one hand, the nitrogen supply pipe 5 and the compressed air supply pipe 6 can introduce nitrogen and air into the silane combustion chamber 101 according to the gas composition and concentration in the treated exhaust gas; on the other hand, turbulence can be generated in the silane combustion chamber 101, so that the exhaust gas and fresh air are fully mixed and the silane is completely burned.

[0068] In this embodiment, the infrared burner 7 replaces the open flame method of burning silane tail gas. The infrared radiation emitted by the infrared burner 7 has strong penetrating power, which can improve the catalytic oxidation effect of the tail gas and also increase the tail gas treatment capacity.

[0069] Furthermore, a gas concentration detection device 8 is provided on one side of the infrared burner 7 for detecting the gas concentration entering the infrared combustion chamber 102 through the porous plate 2; the gas concentration detection device 8 and the infrared burner 7 are electrically connected to a control module; the control module controls the infrared burner 7 to burn when the gas concentration reaches a preset condition.

[0070] In some application scenarios, as the production process progresses, the concentrations of the various components of flammable and explosive gases in the process exhaust will change. For example, in some stages, the concentrations of hydrogen and silane are high, in some stages, the concentration of acetylene is high, and in some stages, the concentration of silane is high. Therefore, in some stages, the infrared burner 7 is required to perform radiation catalysis, while in other stages, radiation catalysis is not required. The gas concentration entering the infrared combustion chamber 102 can be detected by the gas concentration detection device 8. When the gas concentration reaches a preset condition, the infrared burner 7 is controlled to burn.

[0071] Specifically, the preset conditions are: H2 concentration < 0.8%VOL, and 0.1%VOL ≤ C2H2 concentration ≤ 0.3%VOL.

[0072] Furthermore, when the H2 concentration is ≥ 0.8%VOL and / or the C2H2 concentration is > 0.3%VOL, the control module can control the negative pressure fan to increase suction to increase the fresh air volume and reduce the concentration of flammable and explosive gases. Furthermore, when the H2 concentration is < 0.8%VOL and the C2H2 concentration is < 0.1%VOL, the exhaust gas can be directly discharged after subsequent processing.

[0073] See also Figure 3 and Figure 4 The infrared burner 7 includes: a cylinder 71; a spoiler assembly 72, which is arranged in the cylinder 71; a gas inlet pipe 73, one end of which extends to the bottom of the spoiler assembly 72 and the other end is connected to the gas delivery device; an air inlet 74, which is arranged at the bottom of the cylinder 71 and is used to connect to the air delivery device; a porous ceramic plate 75, which is arranged on the upper part of the spoiler assembly 72; and a composite metal mesh 76, which is arranged at the upper end opening of the cylinder 71.

[0074] In this embodiment, after the gas and air enter the cylinder 71, they are preliminarily mixed in the space below the spoiler assembly 72, and then further fully mixed when passing through the spoiler assembly 72. After steady flow through the porous ceramic plate 75, they enter the space enclosed by the porous ceramic plate 75 and the composite metal mesh 76, are ignited and burned, and the composite metal mesh 76 is burned red to emit infrared radiation, and the gas in the infrared combustion chamber 102 is catalytically oxidized by infrared radiation.

[0075] In this embodiment, compared with using ceramics as a combustion catalyst, the composite metal mesh 76 is used to radiate infrared, which burns quickly and responds quickly, and the porous ceramic plate 75 will not turn red and cause tempering.

[0076] See also Figure 4 Furthermore, an air diversion cavity 711 is provided in the bottom plate of the cylinder 71; a plurality of air injection columns 712 connected to the air diversion cavity 711 are protruding from the upper surface of the bottom plate; and the air inlet 74 connected to the air diversion cavity 711 is provided on the lower surface of the bottom plate.

[0077] In this embodiment, after the air enters the air diversion chamber 711 through the air inlet 74, it is ejected from each air injection column 712 and mixed with the gas entering the cylinder 71 from the gas inlet pipe 73; the air injection column 712 is protruded from the bottom plate, which can disturb the gas input from the gas inlet pipe 73 so that the gas can be preliminarily mixed with the air.

[0078] Optionally, the spoiler assembly 72 can further disrupt and mix the air and gas. Specifically, the spoiler assembly 72 includes an annular plate 721 rotatably mounted on the inner wall of the cylinder 71; four connecting rods 722 arranged in a cross shape on the inner side of the annular plate 721; and a downwardly inclined first baffle 723 and second baffle 724 on either side of each connecting rod 722.

[0079] In this embodiment, the first baffle 723 and the second baffle 724 are both downwardly inclined, forming an inverted V-shape, which can not only turbulently affect the gas and air flow, but also increase the flow path of the gas and air. There is a gap between the baffles of adjacent connecting rods 722 for gas to pass through.

[0080] Furthermore, since silica dust may enter the infrared combustion chamber 102 from the silane combustion chamber 101, it is necessary to prevent the dust from settling on the composite metal mesh 76 and clogging its mesh, or even entering the pores of the porous ceramic plate 75. When the infrared burner 7 is burning, the continuous ejection of gas and air can prevent dust from settling; however, the infrared burner 7 may not be burning at certain times, so dust settling needs to be prevented.

[0081] For details, see Figure 5and Figure 6 , the first baffle 723 is fixedly connected to the connecting rod 722; the second baffle 724 is hinged to the connecting rod 722 and can rotate around the connecting rod 722 within a preset range. That is, the second baffle 724 can be as follows Figure 5 In the downward tilted state, the spoiler assembly 72 is in a normal spoiler state; the second baffle 724 can also be in an upward tilted state as shown in 6, and the spoiler assembly 72 is in an impeller state. Since the annular plate 721 is rotatably mounted on the inner wall of the cylinder 71, the spoiler assembly 72 can be rotated by the airflow.

[0082] Furthermore, the gas delivery device and the air delivery device may both be electrically connected to the control module;

[0083] When the infrared burner 7 is burning, the control module controls the gas delivery device and the air delivery device to deliver gas and air respectively. Since only the amount of air required for combustion is required, the air ejected by the air injection column 712 is insufficient to blow up the second baffle 724. The first baffle 723 and the second baffle 724 are both in a downwardly tilted state, and the spoiler assembly 72 is in a normal spoiler state.

[0084] When the infrared burner 7 is turned off, the porous ceramic plate 75 and the composite metal mesh 76 need to be purged continuously or intermittently. The control module controls the gas delivery device to stop delivering gas, and controls the air delivery device to increase the pressure of the delivered air, that is, the air flow rate ejected by the air jet column 712 becomes larger, which is sufficient to blow the second baffle 724 to tilt upward, so that the spoiler component 72 is in the shape of an impeller and drives the spoiler component 72 to rotate.

[0085] If the spoiler assembly 72 is fixed, the purging air can only pass through the gaps on the spoiler assembly 72 to purge a local area of the lower surface of the porous ceramic plate 75; however, if the spoiler assembly 72 is designed to rotate during purging, the air ejected by the air jet column 712 can be guided to the lower surface of the porous ceramic plate 75 by the baffle on the one hand, and on the other hand, the spoiler assembly 72 can be driven to rotate, so that the purging air can sweep the entire lower surface of the porous ceramic plate 75, making the purging more uniform. During the purging process, the high-speed airflow passes through the porous ceramic plate 75 and the composite metal mesh 76 in sequence and is discharged, which can purge the silica dust that has landed on the composite metal mesh 76 and the porous ceramic plate 75.

[0086] See also Figure 7As a rotatable mounting method for the spoiler assembly 72, a receiving groove 713 is provided on the inner wall of the cylinder 71 for accommodating the annular plate 721. Ball bearings 714 are disposed within the receiving groove 713 and rotatably engage with the annular plate 721. The balls 714 can be rotatably mounted within the upper and lower walls of the receiving groove 713. Of course, in other embodiments, the annular plate 721 can be rotatably mounted to the cylinder 71 via bearings.

[0087] To prevent the spoiler assembly 72 from rotating too fast and affecting the purge effect, the receiving groove 713 is provided with a plurality of friction members 715 that abut against the annular plate 721, thereby reducing the rotation speed of the spoiler assembly 72. In one embodiment, the spoiler assembly 72 can rotate once every 30 seconds or once every minute, so that the purge air can stably purge the lower surface of the porous ceramic plate 75.

[0088] In this embodiment, the structure of the spoiler assembly 72 is designed to be switchable, so as to meet the different functions of the combustion and purge working modes.

[0089] Accordingly, based on the above embodiment, this embodiment also provides a working method of the infrared combustion device for photovoltaic cell production process exhaust gas as described above, including: inputting the process exhaust gas into the silane combustion chamber 101, introducing fresh air into the silane combustion chamber 101, and inputting nitrogen and compressed air into the silane combustion chamber 101 to make silane burn in the silane combustion chamber 101; after the exhaust gas in the silane combustion chamber 101 enters the infrared combustion chamber 102 through the porous plate 2, it is judged whether the gas concentration reaches the preset condition; if so, the infrared burner 7 is controlled to burn; if not, the infrared burner 7 is purged.

[0090] In this embodiment, the specific working method of the infrared combustion device for the exhaust gas from the photovoltaic cell production process can be found in the above embodiment and will not be repeated here.

[0091] It should be noted that the various devices selected in this application (components whose specific structures are not described) are all universal standard parts or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or through conventional experimental methods.

[0092] In the description of the embodiments of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0093] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0094] Based on the above-mentioned ideal embodiment of the present invention, and through the above description, relevant personnel can make various changes and modifications without departing from the scope of the technical concept of the present invention. The technical scope of the present invention is not limited to the contents of the specification.

Claims

1. A photovoltaic cell production process tail gas infrared combustion device, characterized in that: include: Tank; A porous plate is disposed within the tank body; the porous plate divides the interior of the tank body into a silane combustion chamber located at the bottom and an infrared combustion chamber located at the top; the silane combustion chamber is connected to an exhaust gas inlet pipe, multiple fresh air inlets, a nitrogen supply pipe, and a compressed air supply pipe; an infrared burner is disposed within the infrared combustion chamber for heating the gas entering the infrared combustion chamber from the silane combustion chamber through the porous plate by infrared radiation; in The infrared burner comprises: Cylinder; A spoiler assembly is arranged in the cylinder; A gas inlet pipe, one end of which extends below the spoiler assembly and the other end of which is connected to the gas delivery device; An air inlet is provided at the bottom of the cylinder and is used for connecting to an air delivery device; The porous ceramic plate and the composite metal mesh are arranged on the upper part of the spoiler component; The spoiler assembly includes: An annular plate, rotatably mounted on the inner wall of the cylinder; Four connecting rods are arranged in a cross shape on the inner side of the annular plate; A first baffle and a second baffle inclined downward are respectively provided on both sides of each connecting rod; The first baffle is fixedly connected to the connecting rod; The second baffle is hinged to the connecting rod and can rotate around the connecting rod within a preset range; and The gas delivery device and the air delivery device are both electrically connected to the control module; When the infrared burner is burning, the control module controls the gas delivery device and the air delivery device to deliver gas and air respectively, and the first baffle and the second baffle are both in a downward tilted state; and When the infrared burner is turned off, the control module controls the gas delivery device to stop delivering gas and controls the air delivery device to increase the pressure of the delivered air; the air delivered by the air delivery device is ejected through the air jet column to blow the second baffle upward, so that the spoiler assembly is in the shape of an impeller and drives the spoiler assembly to rotate; A gas concentration detection device is provided on one side of the infrared burner for detecting the concentration of gas entering the infrared combustion chamber through the porous plate; The gas concentration detection device and the infrared burner are electrically connected to a control module; The control module controls the infrared burner to burn when the gas concentration reaches a preset condition.

2. The infrared combustion device for tail gas from photovoltaic cell production process according to claim 1, characterized in that: The top of the tank body is provided with an air outlet connected to the negative pressure fan, and the bottom is provided with a slag discharge port.

3. The infrared combustion device for tail gas from photovoltaic cell production process according to claim 1, characterized in that: The tail gas inlet pipe extends into the middle of the silane combustion chamber and is used for conveying process tail gas into the silane combustion chamber.

4. The infrared combustion device for tail gas from photovoltaic cell production process according to claim 2, characterized in that: The multiple fresh air inlets are arranged on the tank wall of the silane combustion chamber; The nitrogen supply pipe and the compressed air supply pipe are used to respectively introduce nitrogen and air into the silane combustion chamber.

5. The infrared combustion device for tail gas from photovoltaic cell production process according to claim 1, characterized in that: The preset conditions are: H2 concentration < 0.8%VOL, and 0.1%VOL ≤ C2H2 concentration ≤ 0.3%VOL.

6. The infrared combustion device for tail gas from photovoltaic cell production process according to claim 1, characterized in that: An air diversion cavity is provided in the bottom plate of the cylinder; A plurality of air injection columns communicating with the air diversion cavity are protruded from the upper surface of the bottom plate; The lower surface of the bottom plate is provided with the air inlet communicated with the air diversion cavity.

7. The infrared combustion device for tail gas from photovoltaic cell production process according to claim 1, characterized in that: The inner wall of the cylinder is provided with a receiving groove for receiving the annular plate; A ball bearing that rotates with the annular plate is arranged in the receiving groove; and a plurality of friction members that abut against the annular plate are arranged in the receiving groove.

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