Absolute pressure type metal film capacitive vacuum gauge

Abstract

The invention discloses an absolute pressure type metal film capacitive vacuum gauge, and relates to the technical field of vacuum gauges, the absolute pressure type metal film capacitive vacuum gauge comprises a shell, one side of the shell is fixedly connected with a first connecting pipe, the inner cavity of the shell is fixedly connected with a metal film, a ceramic block and a mounting block, and the inner cavity of the mounting block is provided with an alarm assembly. According to the absolute pressure type metal film capacitive vacuum gauge, the alarm assembly is arranged, the clamping mechanism is connected with the pipeline in the vacuum system, when the vacuum system enables the pipeline to generate pressure, the interior of the detection cavity is pressurized or depressurized, and at the moment, the metal film is bent to a certain degree to cause capacitance change; the pressure change can be deduced by measuring the change of the capacitance value, and when the sliding plate moves, the capacitance signal led out by the internal capacitor can be canceled, so that the operation of the internal capacitor and the external capacitor can be quickly closed, and the corresponding miniature audible and visual alarm is started to prompt that the vacuum gauge is damaged.

Description

Technical Field

[0001] The present invention relates to the technical field of capacitive vacuum gauges, and particularly to an absolute pressure type metal thin film capacitive vacuum gauge. Background Art

[0002] A vacuum gauge is a key component for real-time measurement of the vacuum degree in a vacuum system. It is usually divided into Bourdon vacuum gauges, thin film capacitive vacuum gauges, Pirani resistance vacuum gauges, thermocouple vacuum gauges, hot cathode ionization vacuum gauges, cold cathode ionization vacuum gauges, etc. Among them, the thin film capacitive vacuum gauge is one of the most commonly used instruments for measuring the vacuum degree under normal temperature and low vacuum conditions, and has advantages such as a wide measurement range and high measurement accuracy. In addition, according to the vacuum degree comparison principle of the thin film capacitive vacuum gauge, it can be divided into two types: differential pressure type and absolute pressure type. That is, the vacuum comparison chamber of the differential pressure type vacuum gauge needs to be evacuated by a vacuum pump at all times to maintain the vacuum degree, while the vacuum comparison chamber of the absolute pressure type vacuum gauge is a closed environment and does not require an external vacuum source.

[0003] Existing absolute pressure type metal thin film capacitive vacuum gauges often separate the vacuum gauge into a vacuum chamber and a detection chamber through a metal thin film. When in use, the vacuum degree of the vacuum system is measured by the curvature of the metal thin film. When the metal thin film leaks, it will affect the accuracy of detecting the vacuum degree of the vacuum system. When an error occurs, it is not convenient to prompt the user, and when the data detected by the vacuum gauge is abnormal, it is necessary to immediately manually turn off the operation of the vacuum gauge, and the vacuum gauge is difficult to automatically turn off the operation, thus affecting the use of the vacuum gauge.

[0004] Combining the above problems, we will find that existing vacuum gauges on the market are very difficult to avoid the above-mentioned problems simultaneously when in use, and even if they can be solved, they need to be solved in cooperation with external tools, thus unable to achieve the desired effect. Therefore, we propose an absolute pressure type metal thin film capacitive vacuum gauge. Summary of the Invention

[0005] The purpose of the present invention is to provide an absolute pressure type metal thin film capacitive vacuum gauge to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the present invention provides the following technical solution: An absolute pressure type metal thin film capacitive vacuum gauge, including a housing, a first connection pipe is fixedly connected to one side of the housing, a metal thin film, a ceramic block and a mounting block are fixedly connected to the inner cavity of the housing, an alarm assembly is arranged in the inner cavity of the mounting block, and a clamping mechanism is arranged on one side of the first connection pipe.

[0007] Preferably, an internal capacitor and an external capacitor are fixedly connected to the bottom of the ceramic block. The external capacitor is connected to the outside through a wire to export a capacitance signal. The outer shell is separated into a vacuum chamber and a detection chamber by a metal film, and the detection chamber communicates with the first connecting pipe.

[0008] Preferably, the alarm component includes a groove opened at the bottom of the mounting block. A partition component is slidably connected to the inner cavity of the groove. The partition component is used to isolate the vacuum chamber into a first negative pressure chamber and a second negative pressure chamber. Two first metal blocks, two second metal blocks and two third metal blocks are fixedly connected to the inner wall of the groove. Three micro sound and light alarms and a storage battery are fixedly connected to the surface of the outer shell. One of the first metal blocks, one of the second metal blocks and one of the third metal blocks are respectively electrically connected to the three micro sound and light alarms. The other first metal block, the other second metal block and the other third metal block are all electrically connected to the storage battery. The three micro sound and light alarms are all electrically connected to the storage battery. The partition component includes a sliding plate slidably connected to the inner cavity of the groove.

[0009] Preferably, a through hole is opened on one side of the sliding plate. A fixing block is fixedly connected to the inner wall of the through hole. Two springs are fixedly connected to both sides of the fixing block. The two springs are fixedly connected to a sliding strip at the end away from the fixing block. Metal contact blocks used in cooperation with the first metal block, the second metal block and the third metal block are fixedly connected to the opposite sides of the two sliding strips. A connecting wire is fixedly connected between the opposite sides of the two metal contact blocks. Two metal connecting strips are fixedly connected to the inner cavity of the mounting block. One of the metal connecting strips is connected to the internal capacitor through a wire, and the other metal connecting strip is connected to the outside through a wire to export a capacitance signal.

[0010] Preferably, two sealing rings are fixedly connected to the surface of the sliding plate. The surfaces of the two sealing rings are in close contact with the inner wall of the groove. A partition block used in cooperation with the sliding plate is fixedly connected to the inner wall of the groove.

[0011] Preferably, the clamping mechanism includes a second connecting pipe threadedly connected to one side of the first connecting pipe. One side of the second connecting pipe communicates with the first connecting pipe. An elastic cylinder is fixedly connected to the inner wall of the second connecting pipe. An extrusion chamber is formed between the elastic cylinder and the second connecting pipe. A clamping component is arranged on one side of the second connecting pipe. A piston component is arranged on the surface of the second connecting pipe.

[0012] Preferably, the piston assembly includes a piston tube fixedly connected to one side of the second connecting tube. A piston block is slidably connected to the inner cavity of the piston tube. The surface of the piston block is in close contact with the inner wall of the piston tube. One side of the piston block is fixedly connected to an adjusting block. One side of the adjusting block is rotatably connected to a first threaded rod. The surface of the first threaded rod is threadedly connected to the inner wall of the piston tube.

[0013] Preferably, the clamping assembly includes a fixing ring fixedly connected to one side of the second connecting tube. A toothed plate is slidably connected to the inner cavity of the fixing ring. The number of toothed plates is several. One side of the toothed plate is fixedly connected to a clamping block. One side of the fixing ring is rotatably connected to a toothed ring. One side of the second connecting tube is rotatably connected to a gear. The toothed plate and the toothed ring are both meshed with the gear.

[0014] Preferably, one side of the second connecting tube is fixedly connected to an L-shaped plate. A second threaded rod is threadedly connected to the inner cavity of the L-shaped plate. One end of the second threaded rod is fixedly connected to a connecting block. One side of the connecting block is fixedly connected to a friction pad for cooperating with the toothed ring.

[0015] Preferably, one side of the toothed plate is fixedly connected to a T-shaped rod. The surface of the T-shaped rod is slidably connected to the inner wall of the fixing ring.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. By setting an alarm component in the present invention, it is connected to the pipeline in the vacuum system through a clamping mechanism, so that the detection cavity is communicated with the pipeline. When the vacuum system causes pressure in the pipeline, the pressure in the detection cavity increases or decreases. At this time, the metal film will bend to a certain extent, causing a change in capacitance. Then, by measuring the change in capacitance value, the pressure change can be inferred. When there is a leak between the metal film and the outer shell, the sliding plate will move under the pressure of the pipeline. When the sliding plate is in contact and aligned with the first metal block or the third metal block, the corresponding micro sound and light alarm is activated. When there is a leak between the mounting block and the outer shell, the first negative pressure cavity will intake air, so that the sliding plate is aligned with the second metal block, and the corresponding micro sound and light alarm is activated. When the sliding plate is moving, the capacitance signal derived from the inner capacitance can be cancelled, so that the operation of the inner capacitance and the outer capacitance can be quickly turned off, and the corresponding micro sound and light alarm is activated to prompt that the vacuum gauge is damaged.

[0017] 2. By providing a clamping mechanism, the present invention inserts the pipeline in the vacuum system into the inner cavity of the second connecting pipe, and then rotates the first threaded rod, causing the piston block to move in the piston pipe, squeezing the air in the piston pipe into the inside of the extrusion cavity, thereby causing the elastic cylinder to be deformed under force, increasing the space in the extrusion cavity, making the elastic cylinder in close contact with the pipeline, thus sealing between the pipeline and the second connecting pipe. Then, the clamping assembly can clamp the pipeline, and pipelines with various diameters can be clamped and sealed. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic diagram of the overall structure of the present invention; Figure 2 is a sectional schematic diagram of the overall structure of the present invention; Figure 3 is an exploded schematic diagram of the first connecting pipe and the second connecting pipe of the present invention; Figure 4 is a schematic diagram of the structure of the second connecting pipe and the piston pipe of the present invention; Figure 5 is a sectional schematic diagram of the second connecting pipe and the piston pipe of the present invention; Figure 6 is a schematic diagram of the structure of the L-shaped rod and the second threaded rod of the present invention; Figure 7 is a sectional schematic diagram of the outer shell of the present invention; Figure 8 of the present invention Figure 7 is a partial enlarged view of part A in; Figure 9 is an exploded schematic diagram of the sliding plate and the metal contact block of the present invention.

[0019] In the figure: 1. Outer shell; 11. First connecting pipe; 12. Metal thin film; 13. Ceramic block; 14. Mounting block; 15. Inner capacitor; 16. Outer capacitor; 17. Vacuum chamber; 18. Detection chamber; 2. Alarm assembly; 201. Groove; 202. First negative pressure chamber; 203. Second negative pressure chamber; 204. First metal block; 205. Second metal block; 206. Third metal block; 207. Miniature acousto-optic alarm; 208. Storage battery; 209. Slide plate; 210. Through hole; 211. Fixed block; 212. Spring; 213. Slide bar; 214. Metal contact block; 215. Connecting wire; 216. Metal connecting bar; 217. Sealing ring; 218. Partition block; 3. Clamping mechanism; 301. Second connecting pipe; 302. Elastic cylinder; 303. Extrusion chamber; 304. Piston pipe; 305. Piston block; 306. Adjusting block; 307. First threaded rod; 308. Fixed ring; 309. Tooth plate; 310. Clamping block; 311. Tooth ring; 312. Gear; 313. L-shaped plate; 314. Second threaded rod; 315. Connecting block; 316. Friction pad; 317. T-shaped rod. Specific implementation mode

[0020] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0021] Embodiment 1: Please refer to Figures 1 - 9, the present invention provides a technical solution: an absolute pressure type metal thin film capacitive vacuum gauge, which includes a housing 1. One side of the housing 1 is fixedly connected with a first connecting pipe 11. A metal thin film 12, a ceramic block 13 and a mounting block 14 are fixedly connected in the inner cavity of the housing 1. An alarm assembly 2 is arranged in the inner cavity of the mounting block 14. A clamping mechanism 3 is arranged on one side of the first connecting pipe 11. The bottom of the ceramic block 13 is fixedly connected with an inner capacitor 15 and an outer capacitor 16. The outer capacitor 16 is connected to the outside through a wire to export a capacitance signal. The housing 1 is separated into a vacuum chamber 17 and a detection chamber 18 by the metal thin film 12. The detection chamber 18 communicates with the first connecting pipe 11. By setting the cooperation of the housing 1, the metal thin film 12, the ceramic block 13 and the mounting block 14, the detection chamber 18 is connected to the pipeline in the vacuum system through the first connecting pipe 11 and the clamping mechanism 3. When pressure is generated in the pipeline, pressure will be generated in the detection chamber 18, causing the metal thin film 12 to deform and cause a capacitance change. Then, the pressure change can be inferred by measuring the change in the capacitance value. The capacitance signal is exported through the inner capacitor 15 and the outer capacitor 16. When leakage occurs between the metal thin film 12 and the housing 1, the alarm assembly 2 is activated. When leakage occurs between the mounting block 14 and the housing 1, the alarm assembly 2 is also activated, so as to warn the operator.

[0022] The alarm component 2 includes a groove 201 formed at the bottom of the mounting block 14. A partition component is slidably connected to the inner cavity of the groove 201. The partition component is used to isolate the vacuum chamber 17 into a first negative pressure chamber 202 and a second negative pressure chamber 203. Two first metal blocks 204, two second metal blocks 205 and two third metal blocks 206 are fixedly connected to the inner wall of the groove 201. Three micro sound and light alarms 207 and a storage battery 208 are fixedly connected to the surface of the housing 1. One of the first metal blocks 204, one of the second metal blocks 205 and one of the third metal blocks 206 are electrically connected to the three micro sound and light alarms 207 respectively. The other first metal block 204, the other second metal block 205 and the other third metal block 206 are all electrically connected to the storage battery 208. The three micro sound and light alarms 207 are all electrically connected to the storage battery 208. The partition component includes a sliding plate 209 slidably connected to the inner cavity of the groove 201. By providing the alarm component 2, during the use process, when there is a leakage between the metal film 12 and the housing 1, air enters the detection chamber 18 through the pipeline, so that air enters the first negative pressure chamber 202. The sliding plate 209 is aligned with the third metal block 206 under the action of the negative pressure in the second negative pressure chamber 203. The air in the detection chamber 18 is pumped out through the pipeline, and the negative pressure in the first negative pressure chamber 202 can be continuously increased, so that the negative pressure in the first negative pressure chamber 202 is greater than the negative pressure in the second negative pressure chamber 203, thereby causing the sliding plate 209 to be aligned with the first metal block 204 under the action of the negative pressure in the first negative pressure chamber 202. When there is a leakage between the mounting block 14 and the housing 1, air enters the first negative pressure chamber 202, so that the negative pressure value in the first negative pressure chamber 202 is less than the negative pressure value in the second negative pressure chamber 203. Since the negative pressure values in the second negative pressure chamber 203 and the first negative pressure chamber 202 are the same and can be set as a fixed value, when the negative pressure value in the first negative pressure chamber 202 is the same as the atmospheric pressure, the sliding plate 209 is aligned with the second metal block 205 under the action of the second negative pressure chamber 203. Then, the storage battery 208 supplies power to the micro sound and light alarm 207. When the sliding plate 209 is aligned with the first metal block 204, the second metal block 205 and the third metal block 206 respectively, the storage battery 208 and the micro sound and light alarm 207 form a closed circuit, causing the micro sound and light alarm 207 to start, thereby warning the user.

[0023] A through hole 210 is formed on one side of the sliding plate 209. A fixed block 211 is fixedly connected to the inner wall of the through hole 210. Two springs 212 are fixedly connected to both sides of the fixed block 211. One end of the two springs 212 away from the fixed block 211 is fixedly connected to a sliding bar 213. Metal contact blocks 214 used in cooperation with the first metal block 204, the second metal block 205, and the third metal block 206 are fixedly connected to the opposite sides of the two sliding bars 213. A connecting wire 215 is fixedly connected between the opposite sides of the two metal contact blocks 214. Two metal connecting bars 216 are fixedly connected to the inner cavity of the mounting block 14. One of the metal connecting bars 216 is connected to the internal capacitor 15 through a wire, and the other metal connecting bar 216 is connected to the outside through a wire to export the capacitance signal. Two sealing rings 217 are fixedly connected to the surface of the sliding plate 209. The surfaces of the two sealing rings 217 are in close contact with the inner wall of the groove 201. A partition block 218 used in cooperation with the sliding plate 209 is fixedly connected to the inner wall of the groove 201. By providing the isolation assembly, when there is no leakage between the metal film 12 and the housing 1 and between the mounting block 14 and the housing 1, the sliding plate 209 is aligned with the metal connecting bar 216, so that the internal capacitor 15 can export the capacitance signal. When the sliding plate 209 moves, the contact between the sliding plate 209 and the metal connecting bar 216 is cancelled, thereby stopping the operation of the vacuum gauge. Through the extrusion of the sliding bar 213 by the spring 212, the metal contact block 214 can keep in contact with the metal connecting bar 216, so that the two metal connecting bars 216 are electrically conductive through the two metal contact blocks 214 and the connecting wire 215. By providing the sealing ring 217, the sliding plate 209 and the groove 201 can be sealed. By providing the partition block 218, the sliding plate 209 is prevented from disengaging from the inner cavity of the groove 201.

[0024] The specific implementation of this embodiment is as follows: The detection chamber 18 is connected to the pipeline in the vacuum system through the first connecting pipe 11 and the clamping mechanism 3. When pressure is generated in the pipeline, pressure will be generated in the detection chamber 18, causing the metal film 12 to deform and resulting in a change in capacitance. Then, by measuring the change in capacitance value, the pressure change can be inferred. During use, when there is a leak between the metal film 12 and the housing 1, air enters the detection chamber 18 through the pipeline, causing air to enter the first negative pressure chamber 202. The sliding plate 209 aligns with the third metal block 206 under the negative pressure of the second negative pressure chamber 203. The pipeline extracts the air in the detection chamber 18, and the negative pressure in the first negative pressure chamber 202 can be further increased, making the negative pressure in the first negative pressure chamber 202 greater than the negative pressure in the second negative pressure chamber 203. As a result, the sliding plate 209 aligns with the first metal block 204 under the negative pressure of the first negative pressure chamber 202. When there is a leak between the mounting block 14 and the housing 1, air enters the first negative pressure chamber 202, making the negative pressure value in the first negative pressure chamber 202 less than the negative pressure value in the second negative pressure chamber 203. Since the negative pressure values in the second negative pressure chamber 203 and the first negative pressure chamber 202 are the same and can be set as a fixed value, when the negative pressure value in the first negative pressure chamber 202 is the same as the atmospheric pressure, the sliding plate 209 can align with the second metal block 205. Then, the storage battery 208 supplies power to the micro sound and light alarm 207. When the sliding plate 209 aligns with the first metal block 204, the second metal block 205, and the third metal block 206 respectively, at this time, the storage battery 208 and the micro sound and light alarm 207 form a closed circuit, causing the micro sound and light alarm 207 to start, thereby warning the user.

[0025] Embodiment 2: Please refer to Figures 1 - 9 , the present invention provides a technical solution: An absolute pressure type metal film capacitive vacuum gauge, and the present invention makes corresponding improvements to the technical problems mentioned in the background art.

[0026] The clamping mechanism 3 includes a second connecting pipe 301 threadedly connected to one side of the first connecting pipe 11. One side of the second connecting pipe 301 communicates with the first connecting pipe 11. An elastic cylinder 302 is fixedly connected to the inner wall of the second connecting pipe 301. An extrusion chamber 303 is formed between the elastic cylinder 302 and the second connecting pipe 301. A clamping assembly is arranged on one side of the second connecting pipe 301, and a piston assembly is arranged on the surface of the second connecting pipe 301. By setting the clamping mechanism 3, the pipeline in the vacuum system is inserted into the second connecting pipe 301, and then the pipeline is clamped by the clamping assembly. Then, gas is added to the extrusion chamber 303 by using the piston assembly, causing the extrusion chamber 303 to expand. At this time, the elastic cylinder 302 is deformed by the force, causing the elastic cylinder 302 to wrap the pipeline, thereby achieving the effect of sealing between the pipeline and the second connecting pipe 301.

[0027] The piston assembly includes a piston tube 304 fixedly connected to one side of the second connecting pipe 301. A piston block 305 is slidably connected to the inner cavity of the piston tube 304. The surface of the piston block 305 is in close contact with the inner wall of the piston tube 304. One side of the piston block 305 is fixedly connected to an adjusting block 306. One side of the adjusting block 306 is rotatably connected to a first threaded rod 307. The surface of the first threaded rod 307 is threadedly connected to the inner wall of the piston tube 304. By setting the piston assembly, when adding air to the extrusion cavity 303, the first threaded rod 307 is rotated. Since the first threaded rod 307 is threadedly connected to the piston tube 304, when the first threaded rod 307 is rotated, the first threaded rod 307 drives the adjusting block 306 and the piston block 305 to move, thereby squeezing the gas in the piston tube 304 to the inner wall of the extrusion cavity 303, achieving the effect of pressurizing the extrusion cavity 303.

[0028] The clamping assembly includes a fixing ring 308 fixedly connected to one side of the second connecting pipe 301. A toothed plate 309 is slidably connected to the inner cavity of the fixing ring 308. The number of toothed plates 309 is several. One side of the toothed plate 309 is fixedly connected to a clamping block 310. One side of the fixing ring 308 is rotatably connected to a toothed ring 311. One side of the second connecting pipe 301 is rotatably connected to a gear 312. Both the toothed plate 309 and the toothed ring 311 are meshed with the gear 312. By setting the clamping assembly, when clamping the pipeline in the vacuum system, the toothed ring 311 is rotated, so that the toothed ring 311 drives the gear 312 to rotate, and the gear 312 drives the toothed plate 309 to move. The clamping block 310 is driven by the toothed plate 309 to clamp the pipeline. This clamping method can clamp pipelines with different diameters.

[0029] One side of the second connecting pipe 301 is fixedly connected to an L-shaped plate 313. A second threaded rod 314 is threadedly connected to the inner cavity of the L-shaped plate 313. One end of the second threaded rod 314 is fixedly connected to a connecting block 315. One side of the connecting block 315 is fixedly connected to a friction pad 316 used in cooperation with the toothed ring 311. By setting the cooperation of the L-shaped plate 313, the second threaded rod 314, the connecting block 315 and the friction pad 316, after clamping the pipeline, the second threaded rod 314 is rotated, so that the second threaded rod 314 drives the connecting block 315 and the friction pad 316 to move, and the friction pad 316 is in close contact with the toothed ring 311, thereby achieving the effect of limiting the toothed ring 311.

[0030] One side of the toothed plate 309 is fixedly connected with a T-shaped rod 317. The surface of the T-shaped rod 317 is slidably connected with the inner wall of the fixed ring 308. By providing the T-shaped rod 317, when the gear 312 drives the toothed plate 309 to move, the toothed plate 309 drives the T-shaped rod 317 to slide in the inner cavity of the fixed ring 308. The T-shaped design can effectively guide the toothed plate 309 and prevent the toothed plate 309 from tilting.

[0031] The specific implementation of this embodiment is as follows: Insert the pipeline in the vacuum system into the second connecting pipe 301, rotate the toothed ring 311, so that the toothed ring 311 drives the gear 312 to rotate, and the gear 312 drives the toothed plate 309 to move. The toothed plate 309 drives the clamping block 310 to clamp the pipeline. This clamping method can clamp pipelines with different diameters. After clamping the pipeline, rotate the second threaded rod 314, so that the second threaded rod 314 drives the connecting block 315 and the friction pad 316 to move, so that the friction pad 316 is in close contact with the toothed ring 311, thereby achieving the effect of limiting the toothed ring 311. When adding air to the extrusion cavity 303, rotate the first threaded rod 307. Since the first threaded rod 307 is threadedly connected with the piston tube 304, when rotating the first threaded rod 307, the first threaded rod 307 drives the adjusting block 306 and the piston block 305 to move, thereby squeezing the gas in the piston tube 304 to the inner wall of the extrusion cavity 303, realizing the effect of pressurizing the extrusion cavity 303, so that the extrusion cavity 303 expands. At this time, the elastic cylinder 302 is deformed by the force, so that the elastic cylinder 302 wraps the pipeline, thereby achieving the effect of sealing between the pipeline and the second connecting pipe 301.

[0032] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device.

[0033] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An absolute pressure type metal thin film capacitive vacuum gauge, comprising a housing (1), characterized in that: One side of the outer shell (1) is fixedly connected with a first connecting pipe (11). A metal film (12), a ceramic block (13) and a mounting block (14) are fixedly connected in the inner cavity of the outer shell (1). An alarm component (2) is arranged in the inner cavity of the mounting block (14). A clamping mechanism (3) is arranged on one side of the first connecting pipe (11). The alarm component (2) includes a groove (201) formed at the bottom of the mounting block (14). A partition component is slidably connected in the inner cavity of the groove (201). The partition component is used to isolate the vacuum cavity (17) into a first negative pressure cavity (202) and a second negative pressure cavity (203).

2. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 1, characterized in that: An inner capacitor (15) and an outer capacitor (16) are fixedly connected to the bottom of the ceramic block (13). The outer capacitor (16) is connected to the outside through a wire to export a capacitance signal. The outer shell (1) is separated into a vacuum cavity (17) and a detection cavity (18) by the metal film (12). The detection cavity (18) communicates with the first connecting pipe (11).

3. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 2, characterized in that: Two first metal blocks (204), two second metal blocks (205) and two third metal blocks (206) are fixedly connected to the inner wall of the groove (201). Three micro sound and light alarms (207) and a storage battery (208) are fixedly connected to the surface of the outer shell (1). One of the first metal blocks (204), one of the second metal blocks (205) and one of the third metal blocks (206) are respectively electrically connected to the three micro sound and light alarms (207). The other first metal block (204), the other second metal block (205) and the other third metal block (206) are all electrically connected to the storage battery (208). The three micro sound and light alarms (207) are all electrically connected to the storage battery (208). The partition component includes a sliding plate (209) slidably connected in the inner cavity of the groove (201).

4. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 3, wherein: A through hole (210) is formed on one side of the sliding plate (209). A fixing block (211) is fixedly connected to the inner wall of the through hole (210). Two springs (212) are fixedly connected to both sides of the fixing block (211). The two springs (212) are fixedly connected to a sliding strip (213) at the end far away from the fixing block (211). Metal contact blocks (214) used in cooperation with the first metal block (204), the second metal block (205) and the third metal block (206) are fixedly connected to the opposite sides of the two sliding strips (213). A connecting wire (215) is fixedly connected between the opposite sides of the two metal contact blocks (214). Two metal connecting strips (216) are fixedly connected in the inner cavity of the mounting block (14). One of the metal connecting strips (216) is connected to the inner capacitor (15) through a wire. The other metal connecting strip (216) is connected to the outside through a wire to export a capacitance signal.

5. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 4, characterized in that: Two sealing rings (217) are fixedly connected to the surface of the sliding plate (209). The surfaces of the two sealing rings (217) are in close contact with the inner wall of the groove (201). A partition block (218) that cooperates with the sliding plate (209) is fixedly connected to the inner wall of the groove (201).

6. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 1, characterized in that: The clamping mechanism (3) includes a second connecting pipe (301) threadedly connected to one side of the first connecting pipe (11). One side of the second connecting pipe (301) communicates with the first connecting pipe (11). An elastic cylinder (302) is fixedly connected to the inner wall of the second connecting pipe (301). An extrusion cavity (303) is formed between the elastic cylinder (302) and the second connecting pipe (301). A clamping assembly is arranged on one side of the second connecting pipe (301), and a piston assembly is arranged on the surface of the second connecting pipe (301).

7. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 6, characterized in that: The piston assembly includes a piston pipe (304) fixedly communicated with one side of the second connecting pipe (301). A piston block (305) is slidably connected to the inner cavity of the piston pipe (304). The surface of the piston block (305) is in close contact with the inner wall of the piston pipe (304). A regulating block (306) is fixedly connected to one side of the piston block (305). A first threaded rod (307) is rotatably connected to one side of the regulating block (306). The surface of the first threaded rod (307) is threadedly connected to the inner wall of the piston pipe (304).

8. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 6, wherein: The clamping assembly includes a fixing ring (308) fixedly connected to one side of the second connecting pipe (301). A toothed plate (309) is slidably connected to the inner cavity of the fixing ring (308). The number of the toothed plates (309) is several. A clamping block (310) is fixedly connected to one side of the toothed plate (309). A toothed ring (311) is rotatably connected to one side of the fixing ring (308). A gear (312) is rotatably connected to one side of the second connecting pipe (301). The toothed plate (309) and the toothed ring (311) are both meshed with the gear (312).

9. The absolute pressure type metal thin film capacitive vacuum gauge according to claim 8, characterized in that: An L-shaped plate (313) is fixedly connected to one side of the second connecting pipe (301). A second threaded rod (314) is threadedly connected to the inner cavity of the L-shaped plate (313). A connecting block (315) is fixedly connected to one end of the second threaded rod (314). A friction pad (316) that cooperates with the toothed ring (311) is fixedly connected to one side of the connecting block (315).

10. A barometric pressure type metal thin film capacitive vacuum gauge according to claim 8, characterized in that: A T-shaped rod (317) is fixedly connected to one side of the toothed plate (309). The surface of the T-shaped rod (317) is slidably connected to the inner wall of the fixing ring (308).

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