Container transportation device and logistics processing system comprising container transportation device

Abstract

A container transport device capable of receiving power from and charging a battery while traveling along a track and a logistics processing system including the container transport device are provided. The logistics processing system is installed in a semiconductor manufacturing plant and includes: a first container transport device that transports a first container in which a plurality of substrates are accommodated; a container storage device for storing the first container; and a control device that controls the travel of the first container transport device, in which the first container transport device includes a battery and charges the battery while traveling along the track.

Description

Cross - reference to Related Applications

[0001] This application claims priority to Korean Patent Application No. 10 - 2023 - 0196142, filed with the Korean Intellectual Property Office on December 29, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0002] The present disclosure relates to a container transport device installed in a semiconductor manufacturing factory and a logistics handling system including the container transport device. Background Art

[0003] An Overhead Hoist Transport (OHT) transports a Front - Opening Unified Pod (FOUP) to a location where substrate processing equipment is located in a semiconductor manufacturing factory. A plurality of wafers are accommodated in the OHT.

[0004] The OHT operates based on power supplied through a power cable. However, various devices are installed in a semiconductor manufacturing factory, and there are areas where power cables are not laid. If the substrate processing equipment is located in these areas, it is necessary to transport the FOUP by means other than the OHT, which causes inconvenience. Summary of the Invention

[0005] Aspects of the present disclosure provide a container transport device and a logistics handling system including the container transport device, the container transport device receiving power from a battery and charging the battery while traveling along a track.

[0006] However, aspects of the present disclosure are not limited to the aspects set forth herein. The above and other aspects of the present disclosure will become more apparent to those of ordinary skill in the art to which the present disclosure pertains by referring to the detailed description of the present disclosure given below.

[0007] According to an aspect of the present disclosure, a logistics handling system is installed in a semiconductor manufacturing factory and includes: a first container transport device that transports a first container accommodating a plurality of substrates; a container storage device that stores the first container; and a control device that controls the travel of the first container transport device, wherein the first container transport device includes a battery and charges the battery while traveling along a track.

[0008] According to another aspect of the present disclosure, a container transport device is installed in a semiconductor manufacturing factory, transports a first container containing a plurality of substrates, and includes: a clamping module that clamps the first container; a lifting module that lifts the clamping module upward or downward when the first container is clamped; a power supply unit that provides power; and a driving module that is connected to driving wheels located on either side and provides a driving force generated by the power to the driving wheels, wherein the power supply unit includes a first power supply unit, a second power supply unit, and a charger unit, the first power supply unit is connected to a power cable installed in the semiconductor manufacturing factory, the second power supply unit includes a plurality of batteries, the charger unit charges the plurality of batteries, and when the container transport device travels along a track installed in the semiconductor manufacturing factory, the charger unit charges the plurality of batteries.

[0009] According to another aspect of the present disclosure, a logistics processing system is installed in a semiconductor manufacturing factory and includes: a container transport device that travels along a track and transports a first container containing a plurality of substrates; a container storage device that stores the first container; and a control device that controls the travel of the container transport device, wherein the container transport device includes a first power supply unit, a second power supply unit, and a charger unit, the first power supply unit is connected to a power cable installed in the semiconductor manufacturing factory and provides power required for the operation of the container transport device, the second power supply unit includes a plurality of batteries and provides power required for the operation of the container transport device, the charger unit charges the plurality of batteries, the track includes a magnetic flux generator that uses a plurality of magnets to generate magnetic flux, the charger unit includes a voltage generator that uses a coil to generate voltage, and the charger unit charges the plurality of batteries using the voltage generated when the magnetic flux generated by the plurality of magnets intersects the coil.

[0010] It should be noted that the effects of the present disclosure are not limited to the above effects, and according to the following description, other effects of the present disclosure will become apparent. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The above and other aspects and features of the present disclosure will become clearer by referring to the accompanying drawings and describing in detail the exemplary embodiments of the present disclosure, in which:

[0012] Figure 1 is a schematic diagram showing the internal configuration of a logistics processing system according to an embodiment of the present disclosure;

[0013] Figure 2 is a schematic diagram showing the structure of a container transport device forming a logistics processing system according to an embodiment of the present disclosure;

[0014] Figure 3 is a schematic diagram showing inside a semiconductor manufacturing factory Figure 2Schematic diagram of an exemplary installation configuration of a container transport device;

[0015] Figure 4 Schematic diagram for illustrating the power supply section within a container transport device according to a first exemplary embodiment of the present disclosure;

[0016] Figure 5 For illustrating the formation of Figure 4 First schematic diagram of a charger for the power supply section;

[0017] Figure 6 For illustrating the formation of Figure 4 Second schematic diagram of a charger for the power supply section;

[0018] Figure 7 For illustrating the formation of Figure 4 Schematic diagram of a voltage generator for the power supply section; and

[0019] Figure 8 Schematic diagram for illustrating the power supply section within a container transport device according to a second exemplary embodiment of the present disclosure. Detailed Description of the Invention

[0020] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. The same components in the drawings are denoted by the same reference numerals, and their repeated description will be omitted.

[0021] The present disclosure relates to a container transport device and a logistics processing system including the container transport device. The container transport device receives power from a battery and travels along a track to transport containers while being able to charge the battery. Hereinafter, the logistics processing system including the container transport device will be described first, and then the container transport device operable using the battery will be described.

[0022] Figure 1 Schematic diagram showing the internal configuration of a logistics processing system according to an embodiment of the present disclosure. Referring to Figure 1 , the logistics processing system 100 may be configured to include a container transport device 110, a container storage device 120, a control device 130, and a database 140.

[0023] The logistics processing system 100 may be installed in a semiconductor manufacturing factory. The logistics processing system 100 may include a plurality of container transport devices 110 and a plurality of container storage devices 120. The logistics processing system 100 may be configured to provide an automated logistics service within the semiconductor manufacturing factory.

[0024] The first direction D1 and the second direction D2 form a horizontal plane. For example, the first direction D1 may be the front - to - back direction, and the second direction D2 may be the left - to - right direction. Alternatively, the first direction D1 may be the left - to - right direction, and the second direction D2 may be the front - to - back direction. The third direction D3 is the vertical direction and is perpendicular to the plane formed by the first direction D1 and the second direction D2. The third direction D3 may be the up - and - down direction.

[0025] The container transport device 110 transports the containers to their destinations. For example, the container transport device 110 may be provided as an overhead hoist transporter (OHT).

[0026] The container transport device 110 may travel on a travel path (e.g., tracks (330a and 330b)) installed on the ceiling of a semiconductor manufacturing factory to transport the containers to their destinations. The container transport device 110 may transport the containers to various process chambers where semiconductor manufacturing processes are performed, such as deposition process chambers, etching process chambers, cleaning process chambers, heat treatment process chambers, etc., and multiple container transport devices 110a, 110b…110n may be arranged within the semiconductor manufacturing factory.

[0027] When the container transport device 110 transports the containers to the equipment where semiconductor manufacturing processes are performed, each of these containers may accommodate multiple substrates (e.g., wafers). These containers may be provided as front - opening unified pods (FOUPs).

[0028] The container transport device 110 may operate under the control of the control device 130. For this purpose, although not shown in Figure 1 , each container transport device 110 may include a communication module for wired / wireless communication with the control device 130.

[0029] The container transport device 110 is also capable of operating autonomously without the control of the control device 130. In this case, multiple sensors may be installed around the travel path of the container transport device 110 to provide information to prevent collisions between the container transport devices 110a, 110b…110n within the semiconductor manufacturing factory, and the container transport devices 110a, 110b…110n may also be configured to be able to communicate with each other.

[0030] Figure 2 is a schematic diagram showing the structure of a container transport device forming a logistics processing system according to an embodiment of the present disclosure. Figure 3 is a schematic diagram showing the installation configuration of the container transport device within the semiconductor manufacturing factory Figure 2 Reference Figure 2 and Figure 3, the container transport device 110 can be configured to include a clamping module 210, a lifting module 220, a driving module 230, a driving wheel 240, and a guiding wheel 250.

[0031] The clamping module 210 is configured to clamp the container 310. The clamping module 210 can descend to the position where the container 310 is placed (e.g., the equipment front-end module (EFEM)) to clamp the container 310 and transport the container 310 to its destination. The clamping module 210 can be provided as a gripper, for example.

[0032] The lifting module 220 is configured to lift the clamping module 210 up or down. The lifting module 220 can lift the clamping module 210 downward from near the ceiling 320 towards the ground so that the clamping module 210 can clamp the container 310, and once the clamping module 210 clamps the container 310, the lifting module 220 can lift the clamping module 210 back up near the ceiling 320. The lifting module 220 can be provided as a crane, for example.

[0033] Once the clamping module 210 and the lifting module 220 load the container 310, the container transport device 110 can transport the container 310 to its destination. When the container transport device 110 reaches the destination, the lifting module 220 lowers the clamping module 210 again, and the clamping module 210 releases its grip on the container 310 mounted on the loading port module of the EFEM, thereby transporting the substrate stored in the container 310 to the processing equipment where subsequent semiconductor manufacturing processes are to be performed.

[0034] Meanwhile, although Figure 2 and Figure 3 are not shown, the container transport device 110 can also include a storage module that provides an accommodation space instead of the clamping module 210. The storage module can be formed in a shape with an open top (e.g., a basket shape) to accommodate the container 310, and can also be formed in a shape with side doors that can be opened and closed (e.g., a cabinet shape).

[0035] The driving module 230 controls the driving wheel 240, which travels along a travel path (e.g., a pair of tracks 330a and 330b) installed on the ceiling 320 of the semiconductor manufacturing factory. Although Figure 2 and Figure 3 are not shown, the driving module 230 can include a driving motor, a drive shaft, etc. to achieve this purpose. Here, the driving motor can generate a driving force, and the drive shaft can provide the driving force generated by the driving motor to the driving wheel 240.

[0036] The drive wheels 240 are rotators that rotate using the driving force provided by the drive module 230, thereby allowing the container transport device 110 to travel on the pair of tracks 330a and 330b. The drive wheels 240 may be provided as a pair of drive wheels 240a and 240b to be able to travel on the pair of tracks 330a and 330b, respectively. In this case, the drive wheels 240a and 240b may be coupled to both sides of the drive module 230.

[0037] When the container transport device 110 travels on the pair of tracks 330a and 330b, the guide wheels 250 prevent the container transport device 110 from deviating from the pair of tracks 330a and 330b. Similar to the drive wheels 240, the guide wheels 250 may be provided as a pair of guide wheels 250a and 250b and may be installed at both ends of the bottom surface of the drive module 230 to be perpendicular to the drive wheels 240a and 240b, respectively.

[0038] The container transport device 110 may include a speed control section, a position control section, etc. Here, the speed control section may control the rotational speed of the drive wheels 240, and the position control section may correct the position of the container 310.

[0039] The position control section may include a slider and a rotator. The slider may move the container 310 in the vertical direction or the horizontal direction, and the rotator may rotate the container 310 clockwise or counterclockwise.

[0040] To provide a travel path for the container transport device 110, a track assembly may be installed on the ceiling 320 of a semiconductor manufacturing factory. The track assembly includes a pair of tracks 330a and 330b and a track support module 340. As described above, the pair of tracks 330a and 330b provide a travel path for the container transport device 110 and may be coupled to both ends of the track support module 340, which is fixed to the ceiling 320 of the semiconductor manufacturing factory.

[0041] Depending on the layout of the ceiling 320 within the semiconductor manufacturing factory, the pair of tracks 330a and 330b may be configured to include various types of sections, such as straight sections, curved sections, inclined sections, branch sections, and intersection sections, but the present disclosure is not limited thereto. The pair of tracks 330a and 330b may also be configured to include only one type of section among various types of sections.

[0042] The track support module 340 is fixed to the ceiling 320 of the semiconductor manufacturing factory and supports the pair of tracks 330a and 330b. The track support module 340 may be installed on the ceiling 320 of the semiconductor manufacturing factory to have a cover shape when viewed from the ground.

[0043] Return reference Figure 1, the container storage device 120 can store the containers 310. To this end, each of the container storage devices 120 may include an internal storage module. The storage module may be configured to be multi-layered. At each layer of the storage module, at least one container 310 may be stored, thereby allowing the storage module to store multiple containers 310. The storage module may be configured to be multi-layered in the third direction D3, but the present disclosure is not limited thereto. Alternatively, the storage module may be configured to be multi-layered in the first direction D1 or the second direction D2. Yet alternatively, the storage module may be configured to be multi-layered in one of the first direction D1 and the second direction D2 and the third direction D3. Similar to the container transport device 110, the container storage device 120 may be provided as a plurality of storage units 120a, 120b... 120n.

[0044] The container storage device 120 may be installed in the internal space of a semiconductor manufacturing factory. The container storage device 120 may be installed on the floor of a semiconductor manufacturing factory. The container storage device 120 may be a warehousing device. The container storage device 120 may also be installed on the ceiling of a semiconductor manufacturing factory. The container storage device 120 may be a side track buffer (STB).

[0045] The control device 130 controls the container transport devices 110a, 110b... 110n. The control device 130 may independently control each of the container transport devices 110a, 110b... 110n to safely transport the container 310 to its destination (e.g., various process equipment to perform semiconductor manufacturing processes).

[0046] The control device 130 may control the travel of the container transport device 110 by sending signals (such as start commands, stop commands, acceleration commands, deceleration commands, etc.) to the container transport device 110. In addition, the control device 130 may provide necessary information (e.g., the route to the destination) to the container transport device 110 through wired / wireless communication with the container transport device 110.

[0047] The control device 130 may identify the position of each of the container transport devices 110a, 110b... 110n. In this case, the control device 130 may use a plurality of sensors installed around the tracks (330a and 330b), and may also use the result data obtained through wired / wireless communication with each of the container transport devices 110a, 110b... 110n.

[0048] In the former case, the control device 130 can identify the position of each of the container transport devices 110a, 110b... 110n by using information such as the identification information (e.g., serial number) of each sensor, the position information of each sensor (e.g., two-dimensional (2D) coordinate information (x, y) or three-dimensional (3D) coordinate information (x, y, z)), and the identification information of each container storage device 120 that has passed through each sensor. In the latter case, each of the container transport devices 110a, 110b... 110n can independently measure its own position, and the control device 130 can identify the position of each of the container transport devices 110a, 110b... 110n through communication with each of the container transport devices 110a, 110b... 110n.

[0049] The control device 130 may include a processor that controls each component of the logistics processing system 100, a network that communicates with each component of the logistics processing system 100 in a wired or wireless manner, one or more instructions related to controlling the functions or operations of each component of the logistics processing system 100, a storage device for storing a processing scheme including instructions and various data, and the like. The control device 130 may further include a user interface, which includes an input device for an operator to perform command input operations to manage the logistics processing system 100, and an output device for visualizing and displaying the operation state of the logistics processing system 100. The control device 130 may be provided as a computing device for data processing and analysis, command transmission, and the like.

[0050] The instructions may be provided in the form of a computer program or application. The computer program may include one or more instructions and may be stored on a computer-readable recording medium. The instructions may include code generated by a compiler, code executable by an interpreter, and the like. The storage device may be provided as one or more storage media selected from the following: flash memory, hard disk drive (HDD), solid state drive (SSD), card-type memory, random access memory (RAM), static RAM (SRAM), read-only memory (ROM), electrically erasable programmable ROM (EEPROM), programmable ROM (PROM), magnetic memory, magnetic disk, and optical disk.

[0051] The database 140 stores the information required for the control device 130 to control the container transport devices 110a, 110b... 110n. The database 140 may be embedded in the control device 130, or may be separately provided externally and connected in a wired or wireless manner to provide necessary information to the control device 130.

[0052] Hereinafter, the container transport device 110 operated by using a battery will be described. Figure 4It is a schematic diagram for explaining the power supply part in the container transport device according to the first exemplary embodiment of the present disclosure.

[0053] Referring Figure 4 , the power supply part 400 of the container transport device 110 may include a first power supply unit 410, a second power supply unit 420, and a charger unit 430.

[0054] The first power supply unit 410 may be connected to a power cable installed in a semiconductor manufacturing factory. The first power supply unit 410 may supply the power provided through the power cable to the components in the container transport device 110 that require power. For example, the first power supply unit 410 may supply the power provided through the power cable to the drive module 230. The first power supply unit 410 may supply power to the drive motor in the drive module 230.

[0055] The first power supply unit 410 may receive alternating current (AC) power through the power cable. The first power supply unit 410 may supply power to a drive motor that operates using direct current (DC) power. The first power supply unit 410 may include an AC / DC converter. The first power supply unit 410 may convert the AC power into DC power through the AC / DC converter and then supply the DC power to the drive motor.

[0056] The first power supply unit 410 may receive DC power through the power cable. The first power supply unit 410 may supply power to a drive motor that operates using AC power. The first power supply unit 410 may include a DC / AC converter. The first power supply unit 410 may convert the DC power into AC power through the DC / AC converter and then supply the AC power to the drive motor.

[0057] If the first power supply unit 410 receives AC power and supplies the received AC power to a drive motor that operates using AC power, the first power supply unit 410 may not include an AC / DC converter or a DC / AC converter. Similarly, if the first power supply unit 410 receives DC power and supplies the received DC power to a drive motor that operates using DC power, the first power supply unit 410 may also not include an AC / DC converter or a DC / AC converter.

[0058] The second power supply unit 420 does not receive power from an external source but may have pre-stored power. The second power supply unit 420 may include one or more batteries 420a, 420b…420n.

[0059] The second power supply unit 420 can supply the power stored in the batteries 420a, 420b... 420n to the components in the container transport device 110 that require power in an emergency. For example, the second power supply unit 420 can supply power to the drive module 230. If the first power supply unit 410 cannot supply power to the drive module 230, the second power supply unit 420 can supply the power stored in the batteries 420a, 420b... 420n to the drive module 230.

[0060] The charger unit 430 can charge the batteries 420a, 420b... 420n. When the state of charge (SoC) of the batteries 420a, 420b... 420n drops below the reference level, the charger unit 430 can charge the batteries 420a, 420b... 420n. For example, when the charge level of the batteries 420a, 420b... 420n drops below 20%, the charger unit 430 can initiate charging of the batteries 420a, 420b... 420n.

[0061] The second power supply unit 420 can include the batteries 420a, 420b... 420n. If the charge level of any one of the batteries 420a, 420b... 420n drops below the reference level, the charger unit 430 can start charging the batteries 420a, 420b... 420n. Alternatively, the charger unit 430 can start charging the batteries 420a, 420b... 420n only when the charge levels of all the batteries 420a, 420b... 420n are below the reference level.

[0062] When the container transport device 110 travels along the tracks (330a and 330b) to transport the container 310, the charger unit 430 can charge the batteries 420a, 420b…420n. Figure 5 is for explaining the formation of Figure 4 the first exemplary schematic diagram of the charger for the power supply part. Figure 6 is for explaining the formation of Figure 4 the second exemplary schematic diagram of the charger for the power supply part.

[0063] The charger unit 430 includes a voltage generator 510, and a magnetic flux generator 520 can be installed in the tracks (330a and 330b). The voltage generator 510 can be installed inside the container transport device 110. The voltage generator 510 can be installed adjacent to the tracks (330a and 330b).

[0064] Reference Figure 7, the voltage generator 510 may be adjacent to the tracks (330a and 330b) from the bottom of the driving module 230. The voltage generator 510 may be disposed at a position where the guide wheels 250a and 250b are installed. In this case, the voltage generator 510 may be set not to contact the tracks (330a and 330b). If the voltage generator 510 includes three-phase coils, the U-phase coil, the W-phase coil, and the V-phase coil may be installed parallel to the longitudinal direction of the tracks (330a and 330b). The container transport device 110 may not include the guide wheels 250a and 250b.

[0065] However, the present disclosure is not limited thereto, and alternatively, the voltage generator 510 may be disposed on the drive shaft 260. In this case, the three-phase coils (i.e., the U-phase coil, the W-phase coil, and the V-phase coil) may be sequentially and repeatedly arranged along the rotation direction of the drive shaft 260. Alternatively, the voltage generator 510 may be disposed on the fixed member 270 that binds the drive wheels 240a and 240b to the drive shaft 260. In this case, the three-phase coils (i.e., the U-phase coil, the W-phase coil, and the V-phase coil) may be sequentially and repeatedly arranged along the rotation direction of the fixed member 270. Yet alternatively, the voltage generator 510 may be disposed within the drive wheels 240a and 240b. In this case, the three-phase coils (i.e., the U-phase coil, the W-phase coil, and the V-phase coil) may be sequentially and repeatedly arranged along the rotation direction of the drive wheels 240a and 240b. Figure 7 is a schematic diagram for explaining a voltage generator forming a power supply part according to a first exemplary embodiment of the present disclosure.

[0066] Return reference Figure 5 and Figure 6 , each voltage generator 510 may include a main body 511 and a coil 512. The main body 511 may include a plurality of protrusions 513. The protrusions 513 may be arranged along the longitudinal direction of the tracks (330a and 330b) (i.e., along the second direction D2). Grooves 514 may be formed between the protrusions 513. The coil 512 may be formed by the protrusions 513. The coil 512 may be provided as a three-phase coil (including a U-phase coil 512a, a V-phase coil 512b, and a W-phase coil 512c), but the present disclosure is not limited thereto. The U-phase coil 512a, the V-phase coil 512b, and the W-phase coil 512c may be repeatedly formed along the longitudinal direction (D2) of the tracks (330a and 330b). The coil 512 may be wound in a concentrated winding manner, but the present disclosure is not limited thereto. Alternatively, the coil 512 may also be wound in a distributed winding manner. Yet alternatively, the coil 512 may be wound in a full pitch winding or fractional pitch winding manner.

[0067] The magnetic flux generator 520 can be installed on the tracks (330a and 330b). A predetermined distance h can be formed between the voltage generator 510 of the container transport device 110 and the magnetic flux generator 520 on the tracks (330a and 330b). The magnetic flux generator 520 can include a plurality of magnets (521 and 522). The magnets (521 and 522) can include a magnet 521 having a first polarity and a magnet 522 having a second polarity. The magnet 521 can be a magnet having one of the N - pole polarity or the S - pole polarity. The magnet 522 can be a magnet having the other polarity of the N - pole polarity or the S - pole polarity. There can be a plurality of magnets 521. Similarly, there can be a plurality of magnets. The magnets 521 and the magnets 522 are alternately formed and can be repeatedly formed along the length direction (D2) of the tracks (330a and 330b). Both the magnet 521 and the magnet 522 can be provided as permanent magnets, but the present disclosure is not limited thereto. Alternatively, both the magnet 521 having a first polarity and the magnet 522 having a second polarity can be provided as electromagnets. Yet alternatively, the magnet 521 and the magnet 522 can be provided as a permanent magnet and an electromagnet respectively, and vice versa.

[0068] The magnetic flux generator 520 can be installed in all areas within the semiconductor manufacturing factory where the tracks (330a and 330b) are installed. In other words, the magnetic flux generator 520 can be installed in all the tracks (330a and 330b) within the semiconductor manufacturing factory, but the present disclosure is not limited thereto. Alternatively, the magnetic flux generator 520 can be installed only in some of the tracks (330a and 330b) within the semiconductor manufacturing factory. For example, the magnetic flux generator 520 can be installed in areas within the semiconductor manufacturing factory where no power cables are laid.

[0069] Alternatively, the magnetic flux generator 520 can be installed in areas within the semiconductor manufacturing factory where the traffic volume is relatively high. The semiconductor manufacturing factory can include a plurality of container transport devices 110. The container transport device 110 can include a container transport device (i.e., a wafer transport device) for transporting a container carrying a plurality of wafers and a container transport device (i.e., a mask transport device) for transporting a container carrying a plurality of masks. In some areas within the semiconductor manufacturing factory, both the wafer transport device and the mask transport device can be used. These areas can be mask areas, and compared with other areas, the mask areas can have a higher traffic volume. In such high - traffic - volume areas, the power consumption of the container transport device may be relatively high, and the power cables connected to the container transport device may be entangled. By installing the magnetic flux generator 520 in the tracks (330a and 330b) in the mask area, problems associated with the power consumption of the container transport device and problems such as power cable entanglement can be solved.

[0070] When the voltage generator 510 and the magnetic flux generator 520 are installed as described above, the magnetic flux generated by the magnets (521 and 522) when the container transport device 110 travels along the tracks (330a and 330b) can intersect the coil 512, thereby generating a voltage according to Ampere's law and Faraday's law. The charger unit 430 can charge the batteries 420a, 420b... 420n using the voltage obtained through the voltage generator 510. The voltage generator 510 and the magnetic flux generator 520 can be provided as a linear generator system capable of charging the batteries 420a, 420b... 420n. The charger unit 430 can include a regulator to charge the batteries 420a, 420b... 420n using the voltage generated in the coil 512. The charger unit 430 can also include an inverter, a DC / DC converter, etc.

[0071] The voltage obtained through the interaction between the voltage generator 510 and the magnetic flux generator 520 can be used to charge the batteries 420a, 420b... 420n, but the present disclosure is not limited thereto. The voltage obtained through the voltage generator 510 can also be provided to the drive module 230. The charger unit 430 can provide the voltage obtained through the voltage generator 510 to the drive module 230 instead of using the voltage to charge the batteries 420a, 420b... 420n. The container transport device 110 can use the voltage obtained through the voltage generator 510 to travel along the tracks (330a and 330b). Alternatively, the voltage obtained through the voltage generator 510 can also be provided to the sensor module. The charger unit 430 can provide the voltage to the sensor module instead of using the voltage to charge the batteries 420a, 420b... 420n. The container transport device 110 can use the voltage to obtain environmental sensing information. In addition, the voltage obtained through the voltage generator 510 can be provided to the communication module. The charger unit 430 can provide the voltage to the communication module instead of using the voltage to charge the batteries 420a, 420b... 420n. The container transport device 110 can use the voltage to communicate with the control device 130.

[0072] If the SoC of batteries 420a, 420b…420n is higher than the reference level, the charger unit 430 does not charge batteries 420a, 420b…420n, but supplies power to the drive module 230, the sensor module, the communication module, etc. For example, if the SoC of batteries 420a, 420b…420n is higher than 80%, the charger unit 430 may supply power to the drive module 230, the sensor module, the communication module, etc. The charger unit 430 may control the inverter to supply power to the drive module 230, the sensor module, the communication module, etc. The charger unit 430 may control the inverter to supply power to the drive module 230, the sensor module, the communication module, etc. through various control methods such as position control, speed control, vector control, etc.

[0073] Alternatively, the power supply part 400 of the container transport device 110 may not include the first power supply unit 410, and may only include the second power supply unit 420 and the charger unit 430. In this case, the second power supply unit 420 may provide all the power required for the operation of the container transport device 110. In an area where a power cable is laid, the charger unit 430 may charge the batteries 420a, 420b…420n, and in an area where no power cable is laid, the container transport device 110 may rely entirely on the power provided by the batteries 420a, 420b…420n.

[0074] Figure 8 is a schematic diagram for explaining the power supply part inside the container transport device according to the second exemplary embodiment of the present disclosure. Refer to Figure 8 , the power supply part 400 of the container transport device 110 may include a first power supply unit 410, a third power supply unit 440, a fourth power supply unit 450, and a charger unit 430.

[0075] Hereinafter, the Figure 8 embodiment will be described, and the description of the content repeated with the Figure 4 embodiment will be omitted, and the description will mainly focus on the differences from the Figure 4 embodiment. Figures 4 to 7 The description of the first power supply unit 410 and the charger unit 430 of Figure 8 may be directly applicable to the

[0076] Figure 4 embodiment. The second power supply unit 420 of Figure 8 may be configured to include the third power supply unit 440 and the fourth power supply unit 450 of Figure 8 . Alternatively, the third power supply unit 440 and the fourth power supply unit 450 of Figure 4 may be provided to replace the second power supply unit 420 of

[0077] The third power supply unit 440 may include one or more main batteries 440a, 440b... 440n. The fourth power supply unit 450 may include one or more auxiliary batteries 450a, 450b... 450n.

[0078] The main batteries 440a, 440b... 440n may be charged through the charger unit 430 using a power cable. The auxiliary batteries 450a, 450b... 450n may be charged through the charger unit 430 using a voltage generator 510 and a magnetic flux generator 520. The main batteries 440a, 440b... 440n and the auxiliary batteries 450a, 450b... 450n may be connected to each other, but the present disclosure is not limited thereto. Alternatively, the main batteries 440a, 440b... 440n and the auxiliary batteries 450a, 450b... 450n may not be connected to each other. If necessary, the auxiliary batteries 450a, 450b... 450n may be used to charge the main batteries 440a, 440b... 440n. The main batteries 440a, 440b... 440n may be used to charge the auxiliary batteries 450a, 450b... 450n.

[0079] When the container transport device 110 is moving along the tracks (330a and 330b), the container transport device 110 may use the power stored in the main batteries 440a, 440b... 440n. The container transport device 110 may use the power stored in the main batteries 440a, 440b... 440n to operate the drive module 230. For information acquisition using sensors, the container transport device 110 may use the power stored in the auxiliary batteries 450a, 450b... 450n. For communication with the control device 130, the container transport device 110 may use the power stored in the auxiliary batteries 450a, 450b... 450n.

[0080] When the container transport device 110 operates using the batteries 420a, 420b... 420n in an area where no power cable is laid, the SoC of the batteries 420a, 420b... 420n will decrease. However, according to an embodiment of the present disclosure, even in an area without a power cable, the batteries 420a, 420b... 420n can be charged through a linear power generation system. If the SoC of the batteries 420a, 420b... 420n is above the reference level, drive power can be provided to the container transport device 110 without charging the batteries 420a, 420b... 420n. In addition, the use of high-intensity discharge (HID) inverters and power cables in a semiconductor manufacturing factory can be further reduced. In addition, the frequency at which the container transport device 110 moves to an area where a power cable is laid only to charge the batteries 420a, 420b... 420n can be reduced, thereby improving the operation throughput.

[0081] Although embodiments of the present invention have been described with reference to the accompanying drawings, it should be understood that the present invention is not limited to these embodiments. The present invention can be implemented in various different forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without departing from the technical spirit or basic characteristics of the present invention. Therefore, the described embodiments should be considered illustrative rather than restrictive in all respects.

Claims

1. A logistics processing system installed in a semiconductor manufacturing plant, comprising: a first container transport device for transporting a first container containing a plurality of substrates; a container storage device for storing the first container; as well as a control device for controlling the movement of the first container transport device, The first container transport device comprises a battery, and the battery is charged while traveling along the track.

2. The logistics processing system according to claim 1, wherein: The first container transport device further includes a second power supply unit including a plurality of batteries and providing power required for the operation of the first container transport device, and a charger unit for charging the plurality of batteries.

3. The logistics processing system according to claim 2, wherein: The first container transport device further includes a first power supply unit that is connected to a power cable installed in the semiconductor manufacturing plant and provides power required for operation of the first container transport device.

4. The logistics processing system according to claim 3, wherein: If the first power supply unit cannot supply power, the second power supply unit supplies power.

5. The logistics processing system according to claim 2, wherein: The charger unit includes a voltage generator that generates a voltage using a coil, and charges the plurality of batteries using the voltage.

6. The logistics processing system according to claim 5, wherein: The track includes a magnetic flux generator that uses a plurality of magnets to generate magnetic flux.

7. The logistics processing system according to claim 6, wherein: The magnetic flux generator includes a first magnet and a second magnet having a different polarity than the first magnet, and The first magnets and the second magnets are installed alternately along the length direction of the track.

8. The logistics processing system according to claim 5, wherein: The voltage generator includes a first coil, a second coil and a third coil generating alternating current AC of different phases, and The first coil, the second coil, and the third coil are alternately installed in a direction parallel to a length direction of the rail.

9. The logistics processing system according to claim 5, wherein: The voltage generator includes: a body; a plurality of protrusions formed on a surface of the body and arranged spaced apart from each other in one direction; and a coil mounted through the protrusions and grooves formed between the protrusions.

10. The logistics processing system according to claim 6, wherein: The voltage generator and the magnetic flux generator do not contact each other.

11. The logistics processing system according to claim 6, wherein: The magnetic flux generator is installed in a rail in an area where the first container transporter is not connected to a power cable installed in the semiconductor manufacturing plant.

12. The logistics processing system according to claim 6, further comprising: A second container transport device transports a second container containing a plurality of photomasks, Therein, in an area where the first container transport device and the second container transport device are used together, the magnetic flux generator is installed in a track.

13. The logistics processing system according to claim 5, wherein: The charger unit provides the voltage as power required for operation of the first container transport device.

14. The logistics processing system according to claim 13, wherein: If the state of charge SoC of the plurality of batteries is above a reference level, the charger unit provides the voltage as power required for operation of the first container transport device.

15. The logistics processing system according to claim 2, wherein: The second power supply unit includes a third power supply unit and a fourth power supply unit, the third power supply unit includes a plurality of main batteries, and the fourth power supply unit includes a plurality of auxiliary batteries.

16. The logistics processing system according to claim 15, wherein: The charger unit charges the main battery using a power cable installed in the semiconductor manufacturing plant, and charges the auxiliary battery using a voltage obtained while traveling along the track.

17. The logistics processing system according to claim 15, wherein: If the first container transport device travels along the track, the third power supply unit supplies power stored in the main battery, and If the first container transport device performs sensing or communication, the fourth power supply unit supplies power stored in the auxiliary battery.

18. A container transport device installed in a semiconductor manufacturing plant and transporting a first container containing a plurality of substrates, the container transport device comprising: A clamping module, clamping the first container; a lifting module, for lifting the clamping module upward or downward when clamping the first container; The power supply part provides power; as well as a driving module connected to the driving wheels located on either side and providing the driving wheels with driving force generated by the electric power, in, The power supply section includes a first power supply unit, a second power supply unit and a charger unit, the first power supply unit being connected to a power cable installed in the semiconductor manufacturing plant, the second power supply unit including a plurality of batteries, the charger unit charging the plurality of batteries, and The charger unit charges the plurality of batteries while the container transport device travels along a track installed in the semiconductor manufacturing plant.

19. The container transport device according to claim 18, wherein: The charger unit includes a coil, and charges the plurality of batteries using a voltage generated when magnetic flux generated by a plurality of magnets installed in the track intersects the coil.

20. A logistics processing system installed in a semiconductor manufacturing plant, comprising: a container transport device that travels along the track and transports a first container containing a plurality of substrates; a container storage device for storing the first container; as well as a control device for controlling the movement of the container transport device, in, The container transport device includes a first power supply unit, a second power supply unit, and a charger unit, the first power supply unit being connected to a power cable installed in the semiconductor manufacturing plant and providing power required for the operation of the container transport device, the second power supply unit including a plurality of batteries and providing power required for the operation of the container transport device, and the charger unit charging the plurality of batteries, The track includes a magnetic flux generator that uses a plurality of magnets to generate magnetic flux, The charger unit includes a voltage generator that generates a voltage using a coil, and The charger unit charges the plurality of batteries using a voltage generated when magnetic fluxes generated by the plurality of magnets intersect the coil.

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