Polishing and measuring device and method for graphite seed crystal surface treatment

Abstract

The invention discloses a grinding and measuring device for graphite seed crystal surface treatment. The grinding and measuring device comprises a multi-area positioning module, a reasonable assembly layout module and an accurate measuring module. The multi-area positioning module is used for dividing the circular grinding piece into a plurality of specific areas to ensure the grinding uniformity; the component reasonable layout module optimizes the position of each functional component and improves the stability and efficiency; and the accurate measurement module acquires three-dimensional data by using a 3D contourgraph to ensure the processing accuracy. According to the method, the problems that in a traditional method, the grinding direction is uneven, the assembly layout is unreasonable, and accurate measurement means are lacked can be solved, the quality and efficiency of graphite seed crystal surface treatment are remarkably improved, and technical support is provided for semiconductor material processing.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor material processing, and specifically relates to a grinding and measuring device and method for the surface treatment of graphite seeds. Background Art

[0002] In the field of silicon carbide (SiC) crystal growth, the graphite seed holder, as a key auxiliary tool, plays a crucial role in seed bonding and crystal growth processes. Its surface quality directly affects the uniformity and yield of crystal growth. However, there are many deficiencies in the existing grinding and polishing methods for graphite seed holders, especially in the combination of crystal orientation control and manual operation flexibility, and an efficient and precise solution has not yet been formed.

[0003] After retrieval, a method for preparing a large-diameter SiC seed crystal with the publication number CN105671638B was disclosed, and the publication date was July 6, 2018. In this patent, after trimming and cutting a small-diameter SiC seed crystal, it is bonded and fixed on the seed holder by a close-packed splicing method, and the problem of diameter expansion of a large-diameter SiC substrate is solved through double-layer splicing arrangement and subsequent polishing process. However, the specific process of crystal orientation control on the surface of the graphite seed holder is not involved in this technical solution, and the polishing step relies on traditional mechanical polishing means, which is prone to problems such as uneven surface roughness and scratches, and it is difficult to meet the requirements of high-precision applications. In addition, this method has high requirements for the accuracy of the surface treatment of the seed holder, but lacks the effective combination of manual operation and process parameter optimization, which may lead to low processing efficiency and difficulty in ensuring consistency.

[0004] After retrieval, a method for preparing an in-situ n-type semiconductorized all-carbon structure on the surface of single-crystal diamond with the publication number CN107419329B was disclosed, and the publication date was August 27, 2019. In this patent, the surface roughness of single-crystal diamond is reduced to below 1 nm through mechanical polishing, and the nucleation and growth of ultra-nano diamond are realized by combining plasma etching and deposition processes. Although this technical solution focuses on the fineness of surface treatment, it mainly focuses on the special treatment of single-crystal diamond materials and does not involve the crystal orientation control problem of graphite seed holders. At the same time, this method relies on complex equipment and process conditions, and it is difficult to be directly applied to the large-scale production of graphite seed holders, and the flexibility of manual operation cannot be fully exerted, which limits its applicability in actual production.

[0005] The above problems indicate that there are still obvious deficiencies in the existing surface treatment technologies of graphite seed crystal holders in aspects such as crystal orientation control, surface quality consistency, combination of manual operation flexibility and process parameter optimization. Therefore, the present invention provides a method for manual polishing of crystal orientation control of silicon carbide graphite seed crystal holders, aiming to significantly improve the surface quality and processing efficiency of graphite seed crystal holders by integrating the flexibility of manual operation and precise process control to meet the needs of the silicon carbide industry for high-quality seed crystal holders. Summary of the Invention

[0006] In view of the technical problems of uneven grinding directions, unreasonable component layout, and lack of precise measurement means in the existing graphite seed crystal surface treatment methods, the present invention adopts the following technical solutions: A grinding and measuring device for graphite seed crystal surface treatment, including a multi-region positioning module, a reasonable component layout module, and a precise measurement module. The multi-region positioning module ensures the comprehensiveness and uniformity of grinding operations by dividing a circular grinding piece into multiple specific regions. The reasonable component layout module improves the stability and efficiency of the grinding process through the position optimization of each functional component. The precise measurement module uses a 3D profiler to collect three-dimensional data of the surface of the ground graphite seed crystal.

[0007] Preferably, the multi-region positioning module divides the circular grinding piece into nine partitions, namely the middle, upper, lower, left, right, upper right, lower left, lower right, and upper left. Each partition corresponds to a grinding direction and the covered grinding area is the same and there is no overlap.

[0008] Preferably, the boundaries between the partitions are determined by angle division to ensure that the covered grinding areas of the partitions are the same and there is no overlap.

[0009] Preferably, the reasonable component layout module includes a graphite seed crystal holder, SIC sandpaper, 3M tape, and a marble platform. The graphite seed crystal holder is located in the center of the marble platform and fixed by bolts. The SIC sandpaper is laid above the graphite seed crystal holder and fixed by 3M tape.

[0010] Preferably, the edge of the SIC sandpaper is aligned with the outer edge of the graphite seed crystal holder, and the surface of the marble platform is precisely processed to have a micron-level flatness.

[0011] Preferably, the precise measurement module includes a 3D profiler. The 3D profiler generates surface topography data through the principle of optical interference and transmits the data to a computer for analysis and processing.

[0012] Preferably, the probe of the 3D profiler is aligned with the center position of the graphite seed crystal holder to ensure that the measurement range covers the entire surface of the graphite seed crystal.

[0013] Preferably, it further includes a grinding and polishing process and auxiliary equipment module. The module includes a vacuum cleaner, which is connected to the edge of the marble platform through a flexible pipe, and its suction port is located directly above the SIC sandpaper.

[0014] Preferably, the suction force of the vacuum cleaner can be adjusted to adapt to graphite seeds of different materials.

[0015] Preferably, the component reasonable layout module includes the following specific structures: A graphite seed holder, located in the center of the marble platform, for supporting the graphite seeds to be polished; SIC sandpaper, laid above the graphite seed holder, as the main working surface in contact with the graphite seeds during the grinding process; 3M tape, pasted between the SIC sandpaper and the graphite seed holder, for fixing the position of the sandpaper to prevent it from shifting during the grinding process; The marble platform, as the basic working surface of the entire device, provides high flatness and stability; The graphite seed holder is fixed to the marble platform by bolts to ensure its stability during the grinding process; the SIC sandpaper is fixed by the adhesion of the 3M tape, and its edge is aligned with the outer edge of the graphite seed holder to avoid grinding deviation caused by sandpaper offset; the surface of the marble platform is precision machined with a micron-level flatness, which can effectively reduce errors caused by platform deformation.

[0016] Preferably, the invention further includes a grinding and polishing process and auxiliary equipment module, and its specific implementation steps are as follows: S1: Place the graphite seeds to be polished on the graphite seed holder and adjust their positions to make them in full contact with the sandpaper; S2: Lay SIC sandpaper on the graphite seed holder and fix it with 3M tape; S3: Start the grinding operation, and at the same time connect the vacuum cleaner to clean the dust generated during the grinding process; S4: After grinding is completed, move the graphite seeds to the measurement area and use a 3D profiler to accurately measure their surfaces; Among them, the vacuum cleaner is connected to the edge of the marble platform through a flexible pipe, and its suction port is located directly above the sandpaper, which can remove the generated dust in real time during the grinding process and avoid the influence of dust on the grinding effect. The suction force of the vacuum cleaner can be adjusted according to the characteristics of the grinding material to adapt to graphite seeds of different materials.

[0017] Compared with the prior art, the beneficial effects of the present invention are: 1. The multi-region positioning module divides the circular grinding piece into multiple specific regions, ensuring the uniformity and comprehensiveness of the grinding direction, and avoiding the problem of uneven surface treatment caused by a single grinding direction in the traditional method; 2. The component rational layout module optimizes the design of the graphite seed crystal holder, SIC sandpaper, 3M tape, and marble platform, improving the stability and efficiency of the grinding process; 3. The precise measurement module uses a 3D profiler to collect three-dimensional data of the surface of the polished graphite seed crystal, ensuring high precision in surface treatment; 4. The grinding and polishing process and auxiliary equipment module introduces auxiliary equipment such as a vacuum cleaner to achieve efficient and clean grinding and polishing operations, reducing environmental pollution and equipment maintenance costs.

[0018] In summary, the present invention provides an efficient method and device for surface treatment of graphite seed crystals through multi-region positioning, rational component layout, and precise measurement techniques, providing important technical support for the semiconductor material processing field. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the grinding direction positioning of the present invention; Figure 2 It is a schematic diagram of the layout of each component of the present invention; Figure 3 It is a schematic diagram of the equipment measurement of the present invention; Figure 4 It is a schematic diagram of the grinding and polishing process and auxiliary equipment of the present invention.

[0020] In the figure: 1. Middle; 2. Upper; 3. Lower; 4. Left; 5. Right; 6. Upper right; 7. Lower left; 8. Lower right; 9. Upper left; 10. Graphite seed crystal holder; 11. SIC sandpaper; 12. 3M tape; 13. Marble platform; 14. 3D profiler; 15. Graphite seed crystal holder; 16. Seed crystal holder; 17. Sandpaper; 18. 3M tape; 19. Marble platform; 20. Vacuum cleaner. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0022] The present invention provides a grinding and measuring device and method for surface treatment of graphite seed crystals, and its specific implementation manners will be described in detail in conjunction with Figure 1 to Figure 4 Hereinafter. In this embodiment, the device includes a multi-region positioning module, a component rational layout module, and a precise measurement module, and a complete operation process is realized through the grinding and polishing process and auxiliary equipment module.

[0023] In actual operation, it is first necessary to clarify the core structure of the present invention and the functions of its various parts. As Figure 2 shown, the device mainly includes a graphite seed crystal holder 10, SIC sandpaper 11, 3M tape 12, and a marble platform 13. The positional layout of these components is optimized to ensure the stability and efficiency of the entire grinding process. The graphite seed crystal holder 10 is located at the central position of the marble platform 13 and is fixed by bolts to prevent displacement during the grinding process. The SIC sandpaper 11 is laid above the graphite seed crystal holder 10 and serves as the main working surface in contact with the graphite seed crystal during the grinding process. To prevent the SIC sandpaper 11 from shifting during the grinding process, the 3M tape 12 is used to paste and fix it. The adhesion of the 3M tape 12 has been tested and can meet the requirements of long-term grinding. In addition, the surface of the marble platform 13 is precision machined with a micron-level flatness, which can effectively reduce errors caused by platform deformation.

[0024] In the specific implementation of the multi-region positioning module, as Figure 1 shown, the circular grinding piece is divided into nine specific regions, namely the middle 1, upper 2, lower 3, left 4, right 5, upper right 6, lower left 7, lower right 8, and upper left 9. Each partition corresponds to a grinding direction, and the operator can select a specific grinding region according to actual needs and gradually complete the grinding operation in a predetermined order. For example, when performing fine grinding on a certain region of the graphite seed crystal, the middle 1 region can be preferentially selected for preliminary treatment, and then the upper 2 or right 5 region can be sequentially switched to complete the subsequent operation. This partition design is based on the geometric characteristics of the circular grinding piece, and the boundaries between the partitions are determined by angle division, achieving the goal of consistent and non-overlapping grinding areas covered by each region. In this way, the problem of uneven surface treatment caused by a single grinding direction in the traditional method is avoided.

[0025] Furthermore, the design of the component rational layout module aims to improve the stability and efficiency of the grinding process. As Figure 2 shown, the positions of the various functional components are carefully arranged to ensure the coordination of the entire device during operation. The height of the graphite seed crystal holder 10 is slightly higher than the edge of the marble platform 13 to facilitate the operator to place and adjust the graphite seed crystal to be ground. The edge of the SIC sandpaper 11 is aligned with the outer edge of the graphite seed crystal holder 10 to avoid grinding deviation caused by sandpaper shift. In addition, the width of the 3M tape 12 is strictly controlled to ensure sufficient adhesion while not interfering with the working surface of the SIC sandpaper 11. The size of the marble platform 13 is customized according to actual needs, and its length, width, and height are set to 600 mm × 400 mm × 100 mm respectively to ensure that different specifications of graphite seed crystals can be accommodated. Through the above design, the stability and efficiency of the grinding process are significantly improved.

[0026] In the specific implementation of the precise measurement module, such as Figure 3 shown, a 3D profiler 14 is used to perform three-dimensional profile scanning on the surface of the polished graphite seed crystal. The 3D profiler 14 generates surface topography data through the principle of optical interference and transmits the data to a computer for analysis and processing. In actual operation, the probe of the 3D profiler 14 is aligned with the center position of the graphite seed crystal holder 10 to ensure that the measurement range covers the entire surface of the graphite seed crystal. The resolution of the 3D profiler 14 is set at the nanometer level, capable of capturing subtle changes on the surface of the graphite seed crystal. At the same time, the data acquisition speed of the 3D profiler 14 is optimized to be able to complete the scanning of a large area surface in a short time, thereby improving the measurement efficiency. In this way, high-precision measurement of the surface of the polished graphite seed crystal is achieved.

[0027] The implementation steps of the grinding and polishing process and auxiliary equipment module are as follows. S1: Place the graphite seed crystal to be polished on the graphite seed crystal holder 10 and adjust its position to make it in full contact with the SIC sandpaper 11. The operator needs to ensure that there is no gap between the surface of the graphite seed crystal and the SIC sandpaper 11 to avoid local untreated areas during the grinding process. S2: Lay the SIC sandpaper 11 on the graphite seed crystal holder 10 and fix it with 3M tape 12. The pasting process of the 3M tape 12 needs to apply force evenly to ensure the stability of the SIC sandpaper 11 during the entire grinding process. S3: Start the grinding operation and at the same time connect a vacuum cleaner 20 to clean the dust generated during the grinding process. As Figure 4 shown, the vacuum cleaner 20 is connected to the edge of the marble platform 13 through a flexible pipe, and its suction port is located directly above the SIC sandpaper 11. The suction force of the vacuum cleaner 20 can be adjusted according to the characteristics of the grinding material to adapt to graphite seed crystals of different materials. S4: After grinding is completed, move the graphite seed crystal to the measurement area and use a 3D profiler 14 to accurately measure its surface. In this way, efficient and clean grinding and polishing operations are achieved, reducing environmental pollution and equipment maintenance costs.

[0028] The technical effects of the present invention are achieved in the following ways. The multi-region positioning module ensures the uniformity and comprehensiveness of the grinding direction through the partition design of the circular grinding piece, solving the problem of uneven surface treatment caused by a single grinding direction in traditional methods. The component reasonable layout module improves the stability and efficiency of the grinding process through the optimized design of the graphite seed crystal holder 10, SIC sandpaper 11, 3M tape 12, and marble platform 13. The precise measurement module uses a 3D profiler 14 to collect three-dimensional data on the surface of the ground graphite seed crystal, ensuring high precision in surface treatment. The grinding and polishing process and auxiliary equipment module realizes efficient and clean grinding and polishing operations by introducing auxiliary equipment such as a vacuum cleaner 20, reducing environmental pollution and equipment maintenance costs. Through the above technical solutions, the present invention solves the problems of uneven grinding direction, unreasonable component layout, and lack of precise measurement means in traditional graphite seed crystal surface treatment methods, significantly improving the quality and efficiency of graphite seed crystal surface treatment.

[0029] In actual application scenarios, the device of the present invention is suitable for the high-precision treatment requirements of the surface of graphite seed crystals in the field of semiconductor material processing. For example, in the process of producing high-purity silicon carbide crystals, the surface quality of the graphite seed crystal directly affects the performance of the final product. By using the device and method provided by the present invention, the flatness and smoothness of the surface of the graphite seed crystal can be significantly improved, thus meeting the requirements of high-end applications. In addition, the device of the present invention can also be applied to other material processing fields that require high-precision surface treatment, such as the surface treatment of metal matrix composites and ceramic materials.

[0030] In summary, the present invention provides an efficient graphite seed crystal surface treatment method and device through multi-region positioning, reasonable component layout, and precise measurement technologies, providing important technical support for the field of semiconductor material processing.

[0031] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A grinding and measuring device for the surface treatment of graphite seeds, characterized in that: It includes a multi - area positioning module, a component rational layout module and an accurate measurement module. The multi - area positioning module ensures the comprehensiveness and uniformity of the grinding operation by dividing the circular grinding piece into multiple specific areas. The component rational layout module improves the stability and efficiency of the grinding process by optimizing the positions of each functional component. The accurate measurement module uses a 3D profiler to collect three - dimensional data of the surface of the polished graphite seed crystal.

2. The grinding and measuring device for surface treatment of graphite seeds according to claim 1, characterized in that: The multi - area positioning module divides the circular grinding piece into nine zones, namely the middle (1), upper (2), lower (3), left (4), right (5), upper - right (6), lower - left (7), lower - right (8) and upper - left (9). Each zone corresponds to a grinding direction and the covered grinding area is the same and there is no overlap.

3. The grinding and measuring device for the surface treatment of graphite seeds according to claim 2, characterized in that: The boundaries between the zones are determined by angular division to ensure that the covered grinding areas of the zones are the same and there is no overlap.

4. A grinding and measuring device for the surface treatment of graphite seeds according to claim 1, characterized in that: The component rational layout module includes a graphite seed crystal holder (10), SIC sandpaper (11), 3M tape (12) and a marble platform (13). The graphite seed crystal holder (10) is located at the center of the marble platform (13) and is fixed by bolts. The SIC sandpaper (11) is laid above the graphite seed crystal holder (10) and is fixed by 3M tape (12).

5. The grinding and measuring device for graphite seed crystal surface treatment according to claim 4, characterized in that: The edge of the SIC sandpaper (11) is aligned with the outer edge of the graphite seed crystal holder (10). The surface of the marble platform (13) is precisely machined to have a micron - level flatness.

6. The grinding and measuring device for graphite seed crystal surface treatment according to claim 1, characterized in that: The accurate measurement module includes a 3D profiler (14). The 3D profiler (14) generates surface topography data through the principle of optical interference and transmits the data to a computer for analysis and processing.

7. The polishing and measuring device for the surface treatment of graphite seeds according to claim 6, characterized in that: The probe of the 3D profiler (14) is aligned with the center position of the graphite seed crystal holder (10) to ensure that the measurement range covers the entire surface of the graphite seed crystal.

8. The polishing and measuring device for graphite seed crystal surface treatment according to claim 1, characterized in that: It also includes a grinding and polishing process and auxiliary equipment module. The module includes a vacuum cleaner (20). The vacuum cleaner (20) is connected to the edge of the marble platform (13) through a flexible pipe, and its suction port is located directly above the SIC sandpaper (11).

9. The polishing and measuring device for graphite seed crystal surface treatment according to claim 8, characterized in that: The suction force of the vacuum cleaner (20) can be adjusted to adapt to graphite seed crystals of different materials.

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