Target visual mounting structure developed based on desktop cluster equipment

Abstract

The invention discloses a target material visual mounting structure developed based on desktop type cluster equipment. The target material visual mounting structure comprises a driving structure, a moving plate, a tin bronze sleeve, a cathode, a screw rod and a fixing device, the fixing device comprises a bottom plate, a sputtering cathode flange, a first importer guide pillar, a second importer guide pillar and a top plate; a sputtering cathode flange is arranged on the bottom plate; the first importer guide post, the second importer guide post and a screw rod are arranged between the sputtering cathode flange and the top plate; the top plate is provided with a driving structure; the movable plate penetrates through the first importer guide column, the second importer guide column and the screw rod, the screw rod is in threaded connection with the movable plate, the screw rod is connected with the driving structure, the tin bronze sleeve is fixedly connected with the movable plate, and the lower end of the tin bronze sleeve sequentially penetrates through the sputtering cathode flange and the bottom plate and is connected with the cathode. The driving mechanism drives the screw rod to drive the tin bronze sleeve and the cathode to move up and down, so that the up-down moving distance of the target material can be accurately adjusted, and the precision and stability of each adjustment are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of ion optics, and specifically to a visual installation structure of a target based on the development of a desktop cluster device. Background Art

[0002] Ion beam sputtering technology is a technology that uses an ion source to bombard the surface of a target made of different materials in a vacuum, so that the target material is deposited on the surface of a product. Ion beam sputtering technology is a very important method for preparing high-quality thin films developed in recent years, and it has advantages that cannot be compared with other film-making technologies. Moreover, ion beam sputtering technology has little pollution and the film-forming conditions are precisely controllable.

[0003] In a traditional ion sputtering system, the sputtering target is generally arranged opposite to the ion source. Due to the strong directivity of the ion source beam, the bombarded target area is too small, resulting in a low deposition rate. Moreover, ion beam sputtering deposition is not suitable for depositing large-area thin films with uniform thickness. In addition, the sputtering device is too complex, the equipment operation cost is high, and the target utilization rate is low.

[0004] In order to improve the utilization rate of the target, the prior art adopts the method of target selection plus rotation, but these technologies require at least two motors to drive, that is, one for target selection and one for driving the target to rotate, and the motors are all installed outside the vacuum chamber, and the transmission structure is complex. Summary of the Invention

[0005] The purpose of the present invention is to provide a visual installation structure of a target based on the development of a desktop cluster device, which does not use a motor, simplifies the mechanical structure through screw transmission, adds a pointer on the moving plate to accurately adjust the target depth, and at the same time adds a visible lens to facilitate real-time observation of the target situation, so as to solve the problems of complex transmission structure, inflexible structure adjustment, low target utilization rate, and inability to observe the target situation in the prior art.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0007] A visual installation structure of a target based on the development of a desktop cluster device, comprising: a driving structure, a moving plate, a tin bronze sleeve, a cathode, a screw rod, and a fixing device;

[0008] The fixing device includes a bottom plate, a sputtering cathode flange, a first introducer guide post, a second introducer guide post, and a top plate; the sputtering cathode flange is provided on the bottom plate, and the first introducer guide post and the second introducer guide post are provided between the sputtering cathode flange and the top plate;

[0009] The screw is located between the sputtering cathode flange and the top plate; the top plate is provided with a driving structure; the moving plate penetrates through the first introducer guide post, the second introducer guide post and the screw, the screw is threadedly connected to the moving plate, the screw is connected to the driving structure, the tin bronze sleeve is fixedly connected to the moving plate, and the lower end of the tin bronze sleeve sequentially penetrates through the sputtering cathode flange and the bottom plate and is connected to the cathode;

[0010] The driving mechanism drives the screw to drive the tin bronze sleeve and the cathode to move up and down.

[0011] According to the above technical solution, the driving structure includes an introducer handle, a driving gear and a driven gear; the introducer handle is located above the top plate, the introducer handle is connected to the driving gear, the driving gear meshes with the driven gear, and the driven gear is connected to the screw.

[0012] According to the above technical solution, the first introducer guide post and the second introducer guide post play a limiting role. When the screw rotates to drive the moving plate to rotate, the moving plate moves up and down in a rotating manner. Therefore, the first introducer guide post and the second introducer guide post play a limiting role, so that the moving plate can only move up and down and prevent rotation.

[0013] According to the above technical solution, a steel ruler is provided between the bottom plate and the top plate.

[0014] According to the above technical solution, a pointer is provided on the moving plate, and the pointer is located outside the steel ruler, which is used to monitor the penetration depth of the target in real time to ensure the accuracy and controllability of the operation.

[0015] According to the above technical solution, a viewing window is provided on the sputtering cathode flange to facilitate observing the internal working state; a tetrafluoroethylene buffer pad is provided above the viewing window for protecting the viewing window glass and sealing; a fluororubber ring is provided below the viewing window to further enhance the tightness of the system, prevent gas leakage, and ensure the stability and safety of the working environment.

[0016] According to the above technical solution, by rotating the introducer handle, the driving gear is rotated to drive the driven gear, so that the driven gear drives the screw to rotate, causing the moving plate to move up and down and driving the tin bronze sleeve and the cathode to move up and down.

[0017] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0018] 1. By driving the screw with the introducer handle and combining with the pointer to monitor the depth in real time, the up and down movement distance of the target can be accurately adjusted to ensure the accuracy and stability of each adjustment. The positioning of the target is more accurate, which can flexibly meet different experimental requirements and improve the controllability of the operation.

[0019] 2. The perspective window provided on the sputtering cathode flange allows for real-time observation of the target consumption and experimental progress. Through the perspective window, the usage of the target can be visually inspected, and any abnormalities or problems can be promptly detected, enabling effective intervention or adjustment.

[0020] 3. The innovation in the connection method of the sputtering cathode flange simplifies the disassembly, cleaning, and replacement of the target system. Operators can quickly complete the maintenance work of the target without excessive cumbersome steps, significantly reducing the equipment downtime. The simplicity during the cleaning and replacement processes avoids production delays caused by difficult cleaning, further enhancing the operation efficiency and production continuity of the equipment.

[0021] 4. The present invention not only meets the requirements of high-precision control but also takes into account the operational convenience and efficient maintenance of the equipment. By improving the operational convenience of the equipment, reducing downtime, and lowering maintenance costs, the overall cost-effectiveness is further enhanced. This optimized design not only improves the performance of laboratory equipment but also effectively extends the service life of the equipment, ensuring that the equipment operates in an efficient and stable state and meets the strict requirements for efficiency and reliability during the experimental process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings are used to provide a further understanding of the present invention and form a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention. In the drawings:

[0023] Figure 1 is a schematic diagram of the visual installation structure of the target based on a desktop cluster device according to the present invention;

[0024] Figure 2 is a cross-sectional view of the visual installation structure of the target based on a desktop cluster device according to the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0026] The present invention provides the following technical solutions:

[0027] A visual installation structure of a target developed based on a desktop cluster device, comprising: a driving structure, a moving plate 2, a tin bronze sleeve 6, a cathode 7, a screw rod 8, and a fixing device;

[0028] The fixing device includes a bottom plate 4, a sputtering cathode flange 5, a first introducer guide post 3, a second introducer guide post 17, and a top plate 1; the sputtering cathode flange 5 is provided on the bottom plate 4, and a first introducer guide post 3, a second introducer guide post 17, and a screw 8 are provided between the sputtering cathode flange 5 and the top plate 1;

[0029] The driving structure includes an introducer handle 11, a driving gear 12, and a driven gear 13. Among them, the introducer handle 11 is located above the top plate 1, the introducer handle 11 is connected to the driving gear 12, the driving gear 12 meshes with the driven gear 13, and the driven gear 13 is connected to the screw 8;

[0030] The moving plate 2 penetrates through the first introducer guide post 3, the second introducer guide post 17, and the screw 8. The screw 8 is threadedly connected to the moving plate 2, and the moving plate 2 is slidably connected to the first introducer guide post 3 and the second introducer guide post 17;

[0031] The tin bronze sleeve 6 is fixedly connected to the moving plate 2. The lower end of the tin bronze sleeve 6 sequentially penetrates through the sputtering cathode flange 5 and the bottom plate 4 and is connected to the cathode 7.

[0032] Among them, a steel ruler 9 is provided between the bottom plate 4 and the top plate 1, and a pointer 10 is provided on the moving plate 2. The pointer 10 is located outside the steel ruler 9 and is used to monitor the penetration depth of the target material in real time.

[0033] A perspective window 15 is provided on the sputtering cathode flange 5; a tetrafluoro buffer pad 14 is provided above the perspective window 15 for protecting the glass of the perspective window 15 and for sealing; a fluororubber ring 16 is provided below the perspective window 15.

[0034] The working principle of the present invention: By rotating the introducer handle 11, the driving gear 12 is rotated to drive the driven gear 13, so that the driven gear 13 drives the screw 8 to rotate, causing the moving plate 2 to move up and down and driving the tin bronze sleeve 6 and the cathode 7 to move up and down, capable of precisely adjusting the up and down movement distance of the target material, ensuring the accuracy and stability of each adjustment.

[0035] The perspective window provided on the sputtering cathode flange can observe the consumption situation of the target material and the progress of the experiment in real time. Through the perspective window, the usage situation of the target material can be intuitively viewed, any abnormalities or problems can be promptly discovered, and thus effective intervention or adjustment can be carried out. And the innovation of the connection method of the sputtering cathode flange makes the disassembly, cleaning, and replacement of the target material system more convenient. The operator can quickly complete the maintenance work of the target material without too many cumbersome steps, greatly reducing the equipment downtime.

[0036] It should be noted that in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0037] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A target visual installation structure developed based on a desktop cluster device, characterized in that, Including: A driving structure, a moving plate (2), a tin bronze sleeve (6), a cathode (7), a screw rod (8) and a fixing device; The fixing device includes a bottom plate (4), a sputtering cathode flange (5), a first introducer guide post (3), a second introducer guide post (17) and a top plate (1); the sputtering cathode flange (5) is provided on the bottom plate (4), and the first introducer guide post (3) and the second introducer guide post (17) are provided between the sputtering cathode flange (5) and the top plate (1); The screw rod (8) is located between the sputtering cathode flange (5) and the top plate (1); the top plate (1) is provided with a driving structure; the moving plate (2) penetrates through the first introducer guide post (3), the second introducer guide post (17) and the screw rod (8), the screw rod (8) is threadedly connected with the moving plate (2), the screw rod (8) is connected with the driving structure, the tin bronze sleeve (6) is fixedly connected with the moving plate (2), and the lower end of the tin bronze sleeve (6) sequentially penetrates through the sputtering cathode flange (5) and the bottom plate (4) and is connected with the cathode (7); The driving mechanism drives the screw rod (8) to drive the tin bronze sleeve (6) and the cathode (7) to move up and down.

2. The visual installation structure of the target material developed based on the desktop cluster device according to claim 1, characterized in that, The driving structure includes an introducer handle (11), a driving gear (12) and a driven gear (13); the introducer handle (11) is located above the top plate (1), the introducer handle (11) is connected with the driving gear (12), the driving gear (12) meshes with the driven gear (13), and the driven gear (13) is connected with the screw rod (8).

3. A target visual installation structure developed based on a desktop cluster device according to claim 1, characterized in that The first introducer guide post (3) and the second introducer guide post (17) play a limiting role.

4. A target visual installation structure developed based on a desktop cluster device according to claim 1, characterized in that, A steel ruler (9) is provided between the bottom plate (4) and the top plate (1).

5. A target visual installation structure developed based on a desktop cluster device according to claim 1, characterized in that, A pointer (10) is provided on the moving plate (2), and the pointer (10) is located outside the steel ruler (9) for monitoring the penetration depth of the target material in real time.

6. A target visual installation structure developed based on a desktop cluster device according to claim 1, characterized in that, A perspective window (15) is provided on the sputtering cathode flange (5); a tetrafluoroethylene buffer pad (14) is provided above the perspective window (15) for protecting the glass of the perspective window (15) and having a sealing effect; a fluororubber ring (16) is provided below the perspective window (15).

7. A target visual installation structure developed based on a desktop cluster device according to claim 1, characterized in that, By rotating the introducer handle (11), the driving gear (12) is rotated to drive the driven gear (13), so that the driven gear (13) drives the screw rod (8) to rotate, causing the moving plate (2) to move up and down and driving the tin bronze sleeve (6) and the cathode (7) to move up and down.

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