Thin gas transmission device

Abstract

A thin type gas transmission device comprises a shell module, a gas outlet plate, a valve plate and a gas collecting plate are sequentially combined to form a composite structure to restrain internal pressure expansion, the gas outlet plate and the gas collecting plate are at least one metal piece, the valve plate is a rubber piece, and the Young's coefficient of the metal piece is larger than 50 GPa; a pump module; wherein the shell module is arranged on the pump module.

Description

Technical Field

[0001] The present invention relates to a thin gas transmission device. More specifically, it is a thin gas transmission device that improves the rigid structure of the housing module to suppress the deformation and expansion problems caused by internal pressure, thereby enhancing the gas flow rate. Background Art

[0002] In daily life, many instruments or devices that require hydrodynamic drive usually use traditional motors and fluid valves to achieve the purpose of fluid transportation. However, traditional motors and fluid valves also generate noise problems during operation, resulting in inconvenience and discomfort in use, especially when deflating. Therefore, in the existing technology, some manufacturers have developed thin pumps based on the piezoelectric principle to try to improve the instruments using traditional fluid transmission devices, making the thin pumps miniaturized, having the effect of quickly transmitting high-flow fluids, and also reducing unnecessary noise when deflating (relieving pressure).

[0003] However, although in the existing technology, the transmission volume of fluids has been significantly improved, due to the increasing demand in the current technology and market for instruments or devices that require hydrodynamic drive, how to further improve the gas exchange element structure of the thin pump based on traditional technology to increase the transmission volume of fluids remains an unchanged topic. In addition, when the transmission volume of fluids and the inflow and deflation speeds need to be correspondingly increased, there will also be a significant improvement requirement for the assembly strength of the structure or materials of the thin pump itself. The most direct reason is that in addition to the increased stress that the thin pump needs to bear inside due to the increased inflow and deflation speeds, if the assembly strength is insufficient, the lifespan of the thin pump will also be shortened. In addition, insufficient assembly strength will also make the internal structure of the thin pump not strong enough. When the internal structure strength decreases and gradually loosens after a certain period of use, the deformation of the structure will directly cause the transmission volume of fluids and the inflow and deflation speeds to continuously change during the product life cycle. Additionally, in the current thin gas transmission device housing module, if non-metallic materials are used, there is a problem of insufficient rigidity and inability to withstand the deformation and expansion caused by internal pressure, which affects the overall gas transmission volume. When the thin pump is applied to sphygmomanometers, blood pressure modules of portable devices, or other measuring instruments, the continuously changing inflow and deflation volumes will also affect the measurement precision and accuracy, resulting in the need to shorten the maintenance or calibration cycle, increasing the industrial economic cost and utilization troubles. Therefore, from the current market perspective, the existing thin pump technology still has great room for improvement. Summary of the Invention

[0004] The main object of the present invention is to provide a thin gas transmission device. To avoid the problem that if the gas collecting plate and the air outlet plate formed by the housing module are made of non-metallic materials, there will be insufficient rigidity and they cannot withstand the internal pressure, resulting in deformation and expansion, which affects the overall gas transmission volume. Therefore, at least one metal part is used as a component of the housing module to suppress the problem of deformation and expansion caused by the internal pressure of the housing module. After further improving the material of the housing module, the gas transmission volume (inlet and outlet gas speeds) is continuously increased. In addition, an adhesive interface is provided between the pump module and the gas collecting plate with a glue material, so that the assembly strength can be further improved, and the overall assembly strength is improved.

[0005] To achieve the above object, the present invention provides a thin gas transmission device, including: a housing module, which is formed by sequentially combining an air outlet plate, a valve sheet and a gas collecting plate to form a composite structure to suppress internal pressure expansion, wherein the air outlet plate and the gas collecting plate are at least one metal part, the valve sheet is a rubber part, and the Young's modulus of the metal part is greater than 50 GPa; a pump module; wherein the housing module is arranged on the pump module.

[0006] To achieve the above object, in a thin gas transmission device provided by the present invention, an adhesive interface with a thickness of 0.4 - 0.5 mm is further provided between the pressure chamber surface of the gas collecting plate and the pump module, so that the gas collecting plate and the pump module are firmly assembled and combined. Description of the Drawings

[0007] Figure 1A It is a schematic external view of the present invention.

[0008] Figure 1B It is a partially exploded schematic view of the present invention.

[0009] Figure 2A It is a front exploded schematic view of some components of the present invention.

[0010] Figure 2B It is a back exploded schematic view of some components of the present invention.

[0011] Figure 3A It is a front exploded schematic view of the pump module of the present invention.

[0012] Figure 3B It is a back exploded schematic view of the pump module of the present invention.

[0013] Figure 4A It is a cross-sectional schematic view of the pump module of the present invention.

[0014] Figure 4B It is a first operation schematic view of the pump module of the present invention.

[0015] Figure 4C It is a second operation schematic view of the pump module of the present invention.

[0016] Figure 4D Figure III shows the operation of the pump module of the present invention.

[0017] Figure 5A Figure shows a top view of the thin gas transfer device of the present invention.

[0018] Figure 5B is Figure 5A the sectional view taken along the A-A section in

[0019] Figure 5C is Figure 5A the intake operation sectional view taken along the A-A section in Figure 5D is Figure 5A the pressure relief operation sectional view taken along the A-A section in

[0020]

Symbol Explanation

[0021] 100: Thin gas transfer device

[0022] A: Housing module

[0023] 1: Gas collecting plate

[0024] 11: First confluence surface

[0025] 12: Second confluence surface

[0026] 13: Accommodation groove

[0027] 131: Accommodation bottom surface

[0028] 14: Confluence protrusion

[0029] 15: Confluence hole

[0030] 16: Pressure chamber

[0031] 17: Through groove

[0032] 18: Tenon

[0033] 2: Valve sheet

[0034] 21: First valve surface

[0035] 22: Second valve surface

[0036] 23: Exhaust valve

[0037] 231: Valve hole

[0038] 24: Pressure relief valve

[0039] 25: Positioning hole

[0040] 3: Exhaust plate

[0041] 31: First exhaust surface

[0042] MJ24A - 1321CN_24A455 1TWCN_Chinese Simplified Version32: Second air outlet surface

[0043] 33: Air outlet groove

[0044] 331: Air outlet hole

[0045] 35: Connecting ditch

[0046] 36: Pressure relief convex part

[0047] 361: Pressure relief hole

[0048] 37: Pressure relief ditch

[0049] 38: Fixing hole

[0050] B: Pump module

[0051] 41: Inflow plate

[0052] 41a: Inflow hole

[0053] 41b: Bus bar groove

[0054] 41c: Bus bar chamber

[0055] 42: Resonance piece

[0056] 42a: Hollow hole

[0057] 42b: Movable part

[0058] 42c: Fixed part

[0059] 43: Piezoelectric actuator

[0060] 43a: Suspension plate

[0061] 43b: Outer frame

[0062] 43c: Bracket

[0063] 43d: Piezoelectric element

[0064] 43e: Gap

[0065] 43f: Convex part

[0066] 44: First insulating sheet

[0067] 45: Conductive sheet

[0068] 46: Second insulating sheet

[0069] 47: Chamber space

[0070] C: Adhesive material Detailed implementation manners

[0071] Embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various variations in different aspects, all of which do not depart from the scope of the present invention, and the descriptions and drawings therein are for illustrative purposes in essence and are not intended to limit the present invention.

[0072] Please refer to Figure 1A 、 Figure 1B and Figure 2A As shown, the present case provides a thin gas transmission device 100, including a housing module A and a pump module B. The pump module B is combined with the housing module A to provide gas output, thereby constituting a thin gas transmission device 100 capable of transporting gas. It should be noted that the pump module B can be a piezoelectric pump or a microelectromechanical systems pump (abbreviation: MEMS PUMP).

[0073] Please refer to Figure 2A and Figure 2B As shown, the above-mentioned housing module A is formed by sequentially stacking and combining an air outlet plate 3, a valve plate 2, and a gas collecting plate 1 into a composite structure. The gas collecting plate 1 has a first confluence surface 11, a second confluence surface 12, a receiving groove 13, a confluence protrusion 14, a plurality of confluence holes 15, a pressure chamber 16, a through groove 17, and at least one tenon 18.

[0074] The above-mentioned first confluence surface 11 and the second confluence surface 12 are opposite; the receiving groove 13 is recessed from the first confluence surface 11, and the receiving groove 13 has a receiving bottom surface 131; the confluence protrusion 14 is located on the second confluence surface 12 and protrudes perpendicularly from the second confluence surface 12; the confluence holes 15 are arranged around the confluence protrusion 14, and the number of confluence holes 15 in Figure 2A 、 Figure 2B is 3, but those skilled in the art can adjust the number according to actual applications; the pressure chamber 16 is recessed in the receiving bottom surface 131; the through groove 17 is arranged in the pressure chamber 16, and the through groove 17 is spaced from the confluence holes 15 and the confluence protrusion 14 by a distance; and the pressure chamber 16 is recessed from the receiving bottom surface 131 to form a step distance, and is respectively connected to the confluence holes 15 and the through groove 17. It should be noted that the step distance formed by the pressure chamber 16 being recessed from the receiving bottom surface 131 is 0.05 - 0.15 mm.

[0075] The above-mentioned valve plate 2 has a first valve surface 21, a second valve surface 22, an air outlet valve 23, a pressure relief valve 24 and at least one positioning hole 25. The first valve surface 21 is opposite to the second valve surface 22, and the first valve surface 21 of the valve plate 2 is attached to the second confluence surface 12 of the air collecting plate 1; the air outlet valve 23 is vertically corresponding to the confluence hole 15, and the thickness of the air outlet valve 23 is less than the thickness of the valve plate 2, which is formed by the depression of the first valve surface 21 and the second valve surface 22. The air outlet valve 23 is provided with a valve hole 231, and the valve hole 231 is vertically corresponding to the confluence convex part 14 of the air collecting plate 1 and is misaligned with the confluence hole 15; the pressure relief valve 24 is vertically corresponding to the through groove 17, and the thickness of the pressure relief valve 24 is less than the thickness of the valve plate 2, which is formed by the depression of the first valve surface 21 and the second valve surface 22.

[0076] The above-mentioned air outlet plate 3 has a first air outlet surface 31, a second air outlet surface 32, an air outlet groove 33, a connecting channel 35, a pressure relief convex part 36, a pressure relief channel 37 and at least one fixing hole 38; wherein the first air outlet surface 31 is opposite to the second air outlet surface 32, and the first air outlet surface 31 is attached to the second valve surface 22 of the valve plate 2; the air outlet groove 33 is vertically corresponding to the air outlet valve 23 of the valve plate 2 and is formed by the depression of the first air outlet surface 31. The air outlet groove 33 is provided with an air outlet hole 331, and the air outlet hole 331 is vertically corresponding to the valve hole 231; the pressure relief convex part 36 is arranged on the first air outlet surface 31 and is provided with at least one pressure relief hole 361; at least one connecting channel 35 is formed by the depression of the first air outlet surface 31, connects the air outlet groove 33 and extends linearly from the air outlet groove 33 towards the pressure relief convex part 36; the pressure relief channel 37 is formed by the depression of the second air outlet surface 32, one end of which is communicated with the pressure relief hole 361 and the other end extends to the edge of the air outlet plate 3. Among them, the number of the above-mentioned connecting channels 35 is at least one, and in the best embodiment of this case, it is two. At the same time, in one view of the present invention, the connecting channel 35 extends linearly from the air outlet groove 33 towards the pressure relief convex part 36, and there is no bent angle structure in the middle. Preferably, the flow channel depth of the connecting channel 35 is 0.08 mm to 0.13 mm. At the same time, in order to match the flow channel depth of the connecting channel 35, the main body thickness of the air outlet plate 3 is 0.2 mm to 0.4 mm, so that the air outlet plate 3 can withstand the stress intensity during the air inlet and air release processes. In addition, compared with the structure with a bent angle, the straight structure of the connecting channel 35 can not only shorten the travel of the gas transmission path, increase the gas flow rate during pressure relief to achieve the benefit of accelerating the air release speed, but also has a relatively simple structure in the process, so while increasing the gas flow rate, it can also reduce the manufacturing difficulty of the thin-type gas transmission device 100 and improve the industrial availability.

[0077] According to a specific embodiment of the present invention, in order to form a thin gas transmission device 100 to meet the requirements of high air flow and thinness, it is particularly required that the thickness of the air collecting plate 1 is between 0.2 and 0.3 mm, the valve plate 2 is between 0.4 and 0.6 mm, and the air outlet plate 3 is between 0.2 and 0.4 mm, so as to achieve a thin gas transmission device 100; also, due to the overall thin structure of the device, the air collecting plate 1, the valve plate 2 and the air outlet plate 3 are all thin plate structures. When the gas is transmitted, the air collecting plate 1 and the air outlet plate 3 will be subjected to the internal pressure of the transmitted gas and there will be a problem of expansion. If these air collecting plates 1 and air outlet plates 3 are made of non-metallic materials, there will be insufficient rigidity and they cannot withstand the internal pressure and cause deformation and expansion. Therefore, at least one plate of the air collecting plate 1 and the air outlet plate 3 of the present invention is a metal part. Therefore, the air outlet plate 3, the valve plate 2 and the air collecting plate 1 are sequentially combined to form a composite structure, which can suppress problems other than internal pressure expansion. It should be noted that the air outlet plate 3 and the air collecting plate 1 can be at least one metal part, the valve plate 2 is a rubber part, and the Young's modulus of the metal part is greater than 50 GPa; in a specific embodiment, the air outlet plate 3 is a metal part with a Young's modulus greater than 50 GPa, and the air collecting plate 1 is a plastic part with a Young's modulus less than 20 GPa. In a specific embodiment, the air outlet plate 3 is a plastic part with a Young's modulus less than 20 GPa, and the air collecting plate 1 is a metal part with a Young's modulus greater than 50 GPa. Or in a specific embodiment, the air outlet plate 3 is a metal part with a Young's modulus greater than 50 GPa, and the air collecting plate 1 is a metal part with a Young's modulus greater than 50 GPa.

[0078] According to a view of the present invention, in order to improve the assembly strength of the air collecting plate 1, a glue material C with a thickness of 0.4 to 0.5 mm can be further provided on the bonding surface between the surface of the pressure chamber 16 of the air collecting plate 1 and the pump module B of the valve plate 2, so that the air collecting plate 1 and the pump module B are firmly assembled and combined.

[0079] Please continue to refer to Figure 2A , in this embodiment, the number of the pressure relief holes 361 is 1, but it is not limited thereto. The number of the pressure relief holes 361 can also be 3 to 12. Among them, the multiple pressure relief holes 361 can be arranged in a triangular arrangement, a rectangular arrangement, a polygonal arrangement, an arc arrangement, a circular arrangement, a matrix arrangement, etc., or a combination of the above. In addition, the aperture of the pressure relief holes 361 is between 0.1 mm and 1 mm. The number of the pressure relief holes 361 in this embodiment is 1, and the aperture is 0.8 mm. In this embodiment, in addition to quickly exhausting the air, the pressure relief holes 361 can also reduce the sound during pressure relief and exhaust, achieving the effect of noise reduction; in the embodiment of the present invention, the pump module B is arranged on the accommodating bottom surface 131 of the accommodating groove 13 and covers the pressure chamber 16 to introduce the gas into the pressure chamber 16; Please continue to refer to Figure 2B, the number and positions of the positioning holes 25 and the fixing holes 38 are arranged opposite to the tenons 18. In the embodiment of the present invention, the numbers of the tenons 18, the positioning holes 25, and the fixing holes 38 are all 4, but this is not a limitation. The tenons 18 are respectively inserted into the positioning holes 25 and the fixing holes 38 for positioning and fixing.

[0080] Please refer to Figure 3A and Figure 3B , the pump module B includes an inlet flow plate 41, a resonance piece 42, a piezoelectric actuator 43, a first insulating sheet 44, a conductive sheet 45, and a second insulating sheet 46 that are sequentially stacked and combined. The inlet flow plate 41 has at least one inlet hole 41a, at least one bus bar groove 41b, and a bus bar chamber 41c. The inlet hole 41a is for introducing gas. The inlet hole 41a correspondingly penetrates through the bus bar groove 41b, and the bus bar groove 41b converges to the bus bar chamber 41c, so that the gas introduced by the inlet hole 41a can converge into the bus bar chamber 41c. In this embodiment, the numbers of the inlet holes 41a and the bus bar grooves 41b are the same, and the numbers of the inlet holes 41a and the bus bar grooves 41b are respectively 4, but this is not a limitation. The 4 inlet holes 41a respectively penetrate through the 4 bus bar grooves 41b, and the 4 bus bar grooves 41b converge to the bus bar chamber 41c.

[0081] Please refer to Figure 3A , Figure 3B and Figure 4A As shown in, the above-mentioned resonance piece 42 is assembled on the inlet flow plate 41 by a fitting method, and the resonance piece 42 has a hollow hole 42a, a movable part 42b, and a fixed part 42c. The hollow hole 42a is located at the center of the resonance piece 42 and corresponds to the bus bar chamber 41c of the inlet flow plate 41. The movable part 42b is arranged around the hollow hole 42a and in the area opposite to the bus bar chamber 41c, and the fixed part 42c is arranged on the outer peripheral edge part of the resonance piece 42 and is fixed to the inlet flow plate 41.

[0082] Please continue to refer to Figure 3A , Figure 3B and Figure 4AAs shown, the above piezoelectric actuator 43 is joined to the resonance plate 42 and is disposed corresponding to the resonance plate 42, and includes a suspension plate 43a, an outer frame 43b, at least one bracket 43c, a piezoelectric element 43d, at least one gap 43e, and a convex portion 43f. Among them, the suspension plate 43a is in a square shape. The reason for using a square for the suspension plate 43a is that compared with the design of a circular suspension plate, the structure of the square suspension plate 43a obviously has the advantage of power saving. Because for a capacitive load operating at the resonance frequency, its power consumption will increase with the increase of the frequency. Also, since the resonance frequency of the square suspension plate 43a is significantly lower than that of the circular suspension plate, its relative power consumption is also significantly lower. That is, the square-designed suspension plate 43a adopted in this case has the benefit of power-saving advantages; the outer frame 43b is disposed around the outside of the suspension plate 43a; at least one bracket 43c is connected between the suspension plate 43a and the outer frame 43b to provide an elastic support force for suspending the suspension plate 43a; and a piezoelectric element 43d has a side length that is less than or equal to the side length of the suspension plate 43a of the suspension plate 43a, and the piezoelectric element 43d is attached to a surface of the suspension plate 43a to apply a voltage to drive the suspension plate 43a to bend and vibrate; and at least one gap 43e is formed between the suspension plate 43a, the outer frame 43b, and the bracket 43c for gas to pass through; the convex portion 43f is provided on the opposite surface of the surface of the suspension plate 43a to which the piezoelectric element 43d is attached. In this embodiment, the convex portion 43f can be made on the suspension plate 43a by an etching process and is a convex structure integrally formed and protruding from the opposite surface of the surface to which the piezoelectric element 43d is attached.

[0083] Please continue to refer to Figure 3A , Figure 3B and Figure 4AAs shown, the above-mentioned inflow plate 41, resonance piece 42, piezoelectric actuator 43, first insulating piece 44, conductive piece 45, and second insulating piece 46 are stacked and combined in sequence. A chamber space 47 needs to be formed between the suspension plate 43a of the piezoelectric actuator 43 and the resonance piece 42. The chamber space 47 can be formed by filling a material in the gap between the resonance piece 42 and the outer frame 43b of the piezoelectric actuator 43. For example, conductive glue, but not limited thereto, so that a certain depth can be maintained between one surface of the resonance piece 42 and the suspension plate 43a to form the chamber space 47, thereby guiding the gas to flow more quickly. And because the suspension plate 43a and the resonance piece 42 maintain an appropriate distance to reduce mutual contact interference, the generation of noise can be reduced. Of course, in another embodiment, the height of the outer frame 43b of the piezoelectric actuator 43 can also be increased to reduce the thickness of the conductive glue filled in the gap between the resonance piece 42 and the outer frame 43b of the piezoelectric actuator 43. In this way, the overall structure assembly of the pump module B will not be indirectly affected by the filling material of the conductive glue due to the hot pressing temperature and the cooling temperature, avoiding the actual distance of the chamber space 47 after molding being affected by the thermal expansion and contraction factors of the filling material of the conductive glue, but not limited thereto. In addition, the chamber space 47 will affect the transmission effect of the pump module B. Therefore, maintaining a fixed chamber space 47 is very important for the pump module B to provide stable transmission efficiency.

[0084] To understand the output actuation method of the above pump module B for gas transmission, please continue to refer to Figures 4B to 4D As shown, please first refer to Figure 4B , after the piezoelectric element 43d of the piezoelectric actuator 43 is applied with a driving voltage, it deforms and drives the suspension plate 43a to displace downward. At this time, the volume of the chamber space 47 increases, and a negative pressure is formed in the chamber space 47, so that the gas in the confluence chamber 41c is drawn into the chamber space 47. At the same time, the resonance piece 42 is synchronously displaced downward under the influence of the resonance principle, which increases the volume of the confluence chamber 41c. And because the gas in the confluence chamber 41c enters the chamber space 47, a negative pressure state is also formed in the confluence chamber 41c. Then, the gas is sucked into the confluence chamber 41c through the inflow hole 41a and the confluence discharge groove 41b; please refer to Figure 4C again. The piezoelectric element 43d drives the suspension plate 43a to displace upward, compressing the chamber space 47. Similarly, the resonance piece 42 is displaced upward by the suspension plate 43a due to resonance, forcing the gas in the chamber space 47 to be pushed downward through the gap 43e for transmission to achieve the effect of transmitting gas; finally, please refer to Figure 4D . When the suspension plate 43a returns to its original position, the resonance piece 42 still displaces downward due to inertia. At this time, the resonance piece 42 will cause the gas in the compressed chamber space 47 to move toward the gap 43e and increase the volume of the confluence chamber 41c, allowing the gas to continuously converge in the confluence chamber 41c through the inflow hole 41a and the confluence discharge groove 41b. By continuously repeating the aboveFigures 4B to 4D The pump module B shown provides a gas transmission actuation step, so that the pump module B can allow the gas to continuously enter the flow channel formed by the inlet plate 41 and the resonance plate 42 from the inlet hole 41a to generate a pressure gradient, and then transmit the gas downward through the gap 43e to make the gas flow at high speed, thereby achieving the actuation operation of the pump module B to transmit the gas output.

[0085] See also Figure 5A As shown, Figure 5A The top view of the thin gas transmission device 100 of the present invention is as described above. The gas collecting plate 1, the valve plate 2, and the gas outlet plate 3 are stacked in sequence. The pump module B is disposed on the bottom surface 131 of the gas collecting plate 1 in the receiving groove 13 to seal the pressure chamber 16. The structure and operation of the pump module B have been described and will not be repeated. In addition, please refer to Section 5B, Figure 5C ,as well as Figure 5D , which shows Figure 5A In the figure, the structure of the AA' cross section and the gas intake and exhaust methods of the thin gas transmission device 100 are shown.

[0086] Based on the above, please refer to Figure 5C In this structure, during the air intake process, when the pump module B is driven, it will draw gas into the pressure chamber 16. The gas in the pressure chamber 16 will pass through the confluence hole 15 and the through groove 17 respectively and contact the valve plate 2. The gas passing through the confluence hole 15 will push the outlet valve 23 of the valve plate 2 downward, so that the outlet valve 23 is separated from the confluence protrusion 14, and the valve hole 231 is opened. The gas can move toward the outlet plate 3 through the valve hole 231, enter the outlet groove 33 of the outlet plate 3, and finally be discharged from the outlet hole 331 to complete the gas transmission.

[0087] MJ24A-1321CN_24A455 1TWCN_Simplified Chinese Version The gas passing through the through groove 17 will push the pressure relief valve 24 of the valve plate 2. The pressure relief valve 24 is pushed downward by the gas, and hits the pressure relief protrusion 36 of the gas outlet plate 3 and closes its pressure relief hole 361. Although the gas in the gas outlet groove 33 passes through the connecting groove 35, the pressure relief hole 361 is closed by the pressure relief valve 24 at this time, so it cannot be discharged from the pressure relief hole 361, thereby avoiding gas diversion, gas flow, insufficient gas pressure and other problems.

[0088] Please continue reading Figure 5D, Schematic diagram of the pressure relief operation of the thin gas transmission device 100. The gas flows back from the air outlet hole 331 to the air outlet groove 33 of the air outlet plate 3, and pushes the air outlet valve 23 of the valve plate 2 upward. The confluence convex part 14 can tightly abut against the air outlet valve 23 to close the valve hole 231, preventing the gas from passing through the valve hole 231 to move towards the confluence hole 15. At the same time, the gas located in the air outlet groove 33 pushes the pressure relief valve 24 slightly upward through the connecting ditch 35, increasing the volume between the pressure relief valve 24 and the pressure relief convex part 36, increasing the gas entering the pressure relief hole 361. The gas is introduced into the pressure relief ditch 37 through the pressure relief hole 361, and the gas is discharged from the pressure relief ditch 37 to complete the pressure relief operation.

[0089] In summary, the present invention provides a thin gas transmission device. By using at least one plate member as a metal member for the gas collecting plate and the air outlet plate, and the valve plate as a rubber member, and the Young's modulus of the metal member is greater than 50 GPa. In this way, the air outlet plate, the valve plate and the gas collecting plate are sequentially combined to form a composite structure, which can suppress the problem of internal pressure expansion in the housing module. After further improving the material of the housing module, the gas transmission volume (inlet and outlet gas speeds) can be continuously increased. In addition, an adhesive material is provided at the bonding interface between the pump module and the gas collecting plate, so that the assembly strength can be further improved, and the overall assembly strength is improved, which is very useful for production.

Claims

1. A thin gas transmission device, comprising: A housing module, which is formed by sequentially combining an air outlet plate, a valve sheet, and a gas collecting plate to form a composite structure to suppress internal pressure expansion. The air outlet plate and the gas collecting plate are at least one metal part, the valve sheet is a rubber part, and the Young's modulus of the metal part is greater than 50 GPa; A pump module; Wherein the housing module is structured on the pump module.

2. The thin gas transmission device according to claim 1, wherein the air outlet plate is a metal part, the gas collecting plate is a plastic part, and the Young's modulus of the plastic part is less than 20 GPa.

3. The thin gas transmission device according to claim 1, wherein the air outlet plate is a plastic part, the Young's modulus of the plastic part is less than 20 GPa, and the gas collecting plate is a metal part.

4. The thin gas transmission device according to claim 1, wherein the air outlet plate is a metal part and the gas collecting plate is a metal part.

5. The thin gas transmission device according to claim 1, wherein the housing module is sequentially combined by the air outlet plate, the valve sheet, and the gas collecting plate, wherein: The gas collecting plate includes: A first confluence surface; A second confluence surface opposite to the first confluence surface; A receiving groove recessed from the first confluence surface, having a receiving bottom surface; A confluence convex part located on the second confluence surface; A plurality of confluence holes surrounding the confluence convex part; A pressure chamber recessed in the receiving bottom surface; and A through groove provided in the pressure chamber; The valve sheet includes: A first valve surface attached to the second confluence surface; A second valve surface opposite to the first valve surface; An air outlet valve perpendicularly corresponding to the plurality of confluence holes, recessed from the first valve surface and the second valve surface, and provided with a valve hole, the valve hole being misaligned with the plurality of confluence holes. Among them, the air outlet valve is abutted by the confluence convex part, so that the valve hole is closed by the confluence convex part; and A pressure relief valve perpendicularly corresponding to the through groove, recessed from the first valve surface and the second valve surface; The air outlet plate includes: A first air outlet surface attached to the second valve surface; A second air outlet surface opposite to the first air outlet surface; An air outlet groove recessed from the first air outlet surface, perpendicularly corresponding to the air outlet valve, and provided with an air outlet hole, perpendicularly corresponding to the valve hole; A pressure relief convex part located on the first air outlet surface, provided with at least one pressure relief hole; At least one connecting groove recessed from the first air outlet surface, connecting the air outlet groove, and linearly extending from the air outlet groove towards the pressure relief convex part; and The pump module is disposed in the receiving groove to transport gas to the gas collecting plate; When the pump module operates, gas is introduced into the gas collecting plate, passes through the plurality of confluence holes and the through groove, and respectively pushes the air outlet valve and the pressure relief valve. When pushing the air outlet valve, the air outlet valve bends downward and disengages from the confluence convex part to open the valve hole, so that gas can pass through the valve hole into the air outlet groove and be discharged from the air outlet hole of the air outlet groove. When pushing the pressure relief valve, the pressure relief valve bends downward and abuts against the pressure relief convex part to close the at least one pressure relief hole, preventing gas from being discharged through the at least one pressure relief hole.

6. The thin gas transmission device according to claim 5, wherein the thickness of the through groove is between 0.9 and 1.2 mm.

7. The thin gas transmission device as claimed in claim 5, wherein a first-order difference distance is formed by the pressure chamber being recessed from the accommodating bottom surface, and the order difference distance is 0.05 - 0.15 mm.

8. The thin gas transmission device as claimed in claim 5, wherein the flow channel depth range of the at least one connecting trench is between 0.08 mm and 0.13 mm.

9. The thin gas transmission device as claimed in claim 5, wherein the thickness range of the air outlet plate is between 0.2 mm and 0.4 mm.

10. The thin gas transmission device as claimed in claim 5, wherein a glue material with a thickness of 0.4 - 0.5 mm is further provided on the bonding interface between the pressure chamber surface of the gas collecting plate and the pump module.

11. The thin gas transmission device as claimed in claim 5, wherein the gas collecting plate further includes a pressure chamber which is recessed from the accommodating bottom surface and is respectively communicated with the plurality of converging holes and the through groove, and the pump module is arranged on the accommodating bottom surface of the accommodating groove to cover the pressure chamber thereby.

12. The thin gas transmission device as claimed in claim 1, wherein the pump module has: An inlet plate having at least one inlet hole, at least one converging row groove and a converging chamber, wherein the at least one inlet hole is for introducing a gas, the at least one inlet hole correspondingly penetrates through the converging row groove, and the converging row groove converges to the converging chamber so that the gas introduced by the at least one inlet hole converges into the converging chamber; A resonance piece joined to the inlet plate, having a hollow hole, a movable part and a fixed part, the hollow hole is located at the center of the resonance piece and corresponds to the converging chamber of the inlet plate, the movable part is arranged in the area around the hollow hole and opposite to the converging chamber, and the fixed part is arranged on the outer peripheral edge part of the resonance piece and is fixed to the inlet plate; and A piezoelectric actuator joined to the resonance piece and correspondingly arranged with the resonance piece; Among them, There is a chamber space between the resonance piece and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the gas is introduced from the at least one inlet hole of the inlet plate, converges to the converging chamber through the converging row groove, then flows through the hollow hole of the resonance piece, and is resonantly transmitted by the piezoelectric actuator and the movable part of the resonance piece.

13. The thin gas transmission device as claimed in claim 12, wherein the piezoelectric actuator includes: A suspension plate in a square shape, capable of bending vibration; An outer frame surrounding the outside of the suspension plate; At least one bracket connected between the suspension plate and the outer frame for providing an elastic support force for the suspension plate; And A piezoelectric element having a side length which is less than or equal to the side length of the suspension plate, and the piezoelectric element is attached to a surface of the suspension plate for being applied with a voltage to drive the suspension plate to bend and vibrate.

14. The thin gas transmission device as claimed in claim 12, wherein the pump module further includes a first insulating sheet, a conductive sheet and a second insulating sheet, and the inlet plate, the resonance piece, the piezoelectric actuator, the first insulating sheet, the conductive sheet and the second insulating sheet are stacked and combined in sequence.

15. The thin gas transfer device as claimed in claim 1, wherein the pump module is a microelectromechanical pump.

16. The thin gas transfer device as claimed in claim 5, wherein the aperture diameter of the at least one pressure relief hole is between 0.1 mm and 1 mm.

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