Edge detection system and lighting device

Abstract

The invention relates to the technical field of optical detection, in particular to an edge detection system and a lighting device. The edge detection system comprises a lighting module and an imaging module, the lighting module is provided with a concave portion surrounding the edge of a detected object, the axis surrounded by the concave face of the concave portion extends in the first direction, and a first light-emitting face generating bright field detection light and a second light-emitting face generating dark field detection light are both located on the concave face of the concave portion and arranged at intervals in the first direction. The imaging module can respectively collect signal light formed by reflecting the detection light by the edge of the detected object so as to obtain a bright field image and a dark field image of the edge of the detected object; the first light-emitting surface and the second light-emitting surface integrated on the concave surface of the concave part can be matched with the imaging module, so that bright field detection and dark field detection of the edge of the detected object are realized, the structure of the edge detection system can be simplified, and the comprehensive detection capability and the detection precision of the edge defect of the detected object are improved in a mode of combining the bright field detection and the dark field detection.

Description

Technical Field

[0001] This application relates to the field of optical detection technology, and particularly relates to an edge detection system and a lighting device. Background Art

[0002] During the manufacturing process of semiconductors, defects are likely to occur at the edges. Semiconductors with edge defects flowing into subsequent processes will have a greater impact on product performance. Currently, the optical principle can be used to detect semiconductor edge defects through bright-field detection.

[0003] Semiconductor edges often have multiple surfaces. When detecting each surface of the semiconductor edge through bright-field detection, in order to obtain images of the entire range of the semiconductor edge, light sources in different directions need to be set corresponding to each surface, which makes the structure of the entire detection system relatively complex; and the detection accuracy of bright-field detection is limited. For micro-defects, in order to further improve the detection accuracy, the method of single bright-field detection is no longer applicable. Summary of the Invention

[0004] This application provides an edge detection system and a lighting device to solve the technical problems of the complex structure and limited detection accuracy of the existing edge detection system.

[0005] According to one aspect of this application, in one embodiment, an edge detection system is provided, including: A lighting module for surrounding the edge of the object to be measured to form a recess. The axis surrounded by the concave surface of the recess extends in a first direction. The lighting module has a first light-emitting surface and a second light-emitting surface. The first light-emitting surface is used to generate bright-field detection light, and the second light-emitting surface is used to generate dark-field detection light. The first light-emitting surface and the second light-emitting surface are arranged at intervals on the concave surface of the recess in the first direction. The included angle between the light-emitting direction of the first light-emitting surface and the first direction is different from the included angle between the light-emitting direction of the second light-emitting surface and the first direction; An imaging module for collecting the bright-field signal light formed by the edge of the object to be measured reflecting the bright-field detection light to image the edge of the object to be measured and obtain a bright-field image of the edge of the object to be measured; the imaging module is also used to collect the dark-field signal light formed by the edge of the object to be measured scattering the dark-field detection light to image the edge of the object to be measured and obtain a dark-field image of the edge of the object to be measured.

[0006] In an optional embodiment, the lighting module includes a first light guide and a second light guide. The first light guide is coupled to the first light-emitting surface, and the first light guide is used to transmit bright-field illumination light to the first light-emitting surface to form the bright-field detection light. The second light guide is coupled to the second light-emitting surface, and the second light guide is used to transmit dark-field illumination light to the second light-emitting surface to form the dark-field detection light.

[0007] In an alternative embodiment, the illumination module includes a first illumination light source and a second illumination light source. The first illumination light source is coupled to the light incident surface of the first light guide member, and the first illumination light source is configured to generate the bright field illumination light. The second illumination light source is coupled to the light incident surface of the second light guide member, and the second illumination light source is configured to generate the dark field illumination light.

[0008] In an alternative embodiment, the first light emitting surface is an arc surface whose axis extends in the first direction, and the arc angle of the first light emitting surface is selected from the range of 180° to 270°; and / or, The second light emitting surface is an arc surface whose axis extends in the first direction, and the arc angle of the second light emitting surface is selected from the range of 180° to 270°.

[0009] In an alternative embodiment, the included angle between the light emitting direction of the first light emitting surface and the first direction is selected from the range of 50° to 80°, and the included angle between the light emitting direction of the second light emitting surface and the first direction is selected from the range of 30° to 50°.

[0010] In an alternative embodiment, the imaging module includes a first image acquisition unit, a second image acquisition unit, and a third image acquisition unit. The edge of the object to be measured has an upper inclined surface, an outer side surface, and a lower inclined surface. The first image acquisition unit acquires the bright field signal light reflected by the upper inclined surface of the edge of the object to be measured to generate a bright field image corresponding to the upper inclined surface, or acquires the dark field signal light scattered by the upper inclined surface of the edge of the object to be measured to generate a dark field image corresponding to the upper inclined surface. The second image acquisition unit acquires the bright field signal light reflected by the outer side surface of the edge of the object to be measured to generate a bright field image corresponding to the outer side surface, or acquires the dark field signal light scattered by the outer side surface of the edge of the object to be measured to generate a dark field image corresponding to the outer side surface. The third image acquisition unit acquires the bright field signal light reflected by the lower inclined surface of the edge of the object to be measured to generate a bright field image corresponding to the lower inclined surface, or acquires the dark field signal light scattered by the lower inclined surface of the edge of the object to be measured to generate a dark field image corresponding to the lower inclined surface.

[0011] According to one aspect of the present application, an illumination device is provided in an embodiment, including: A light source configured to generate bright field illumination light and dark field illumination light; An illumination assembly for receiving the bright-field illumination light and emitting bright-field detection light towards the edge of the object to be measured, or for receiving the dark-field illumination light and emitting dark-field detection light towards the edge of the object to be measured; the illumination assembly has a recess surrounding the edge of the object to be measured, the axis surrounded by the concave surface of the recess extends in a first direction, the illumination assembly further has a first light-emitting surface and a second light-emitting surface, the first light-emitting surface is for receiving the bright-field illumination light and emitting the bright-field detection light, the second light-emitting surface is for receiving the dark-field illumination light and emitting the dark-field detection light, the first light-emitting surface and the second light-emitting surface are arranged at intervals on the concave surface of the recess in the first direction, and the included angle between the light-emitting direction of the first light-emitting surface and the first direction is different from the included angle between the light-emitting direction of the second light-emitting surface and the first direction.

[0012] In an alternative embodiment, the illumination device includes a first light guide and a second light guide, both the first light guide and the second light guide have light-incident surfaces, the light-incident surface of the first light guide is for receiving the bright-field illumination light, and the light-incident surface of the second light guide is for receiving the dark-field illumination light; The first light guide is coupled to the first light-emitting surface to transmit the bright-field illumination light to the first light-emitting surface, and the second light guide is coupled to the second light-emitting surface to transmit the dark-field illumination light to the second light-emitting surface.

[0013] In an alternative embodiment, the concave surface has a first arc groove, the first light guide includes a first optical fiber bundle composed of a plurality of thin optical fibers, the first optical fiber bundle is for transmitting the bright-field illumination light, and the end faces of the plurality of thin optical fibers in the first optical fiber bundle are uniformly arranged in the first arc groove to form the first light-emitting surface; and / or, The concave surface has a second arc groove, the second light guide includes a second optical fiber bundle composed of a plurality of thin optical fibers, the second optical fiber bundle is for transmitting the dark-field illumination light, and the end faces of the plurality of thin optical fibers in the second optical fiber bundle are uniformly arranged in the second arc groove to form the second light-emitting surface.

[0014] In an alternative embodiment, the light source includes a first illumination light source and a second illumination light source, the first illumination light source is coupled to the light-incident surface of the first light guide, and the first illumination light source is for generating the bright-field illumination light; the second illumination light source is coupled to the light-incident surface of the second light guide, and the second illumination light source is for generating the dark-field illumination light.

[0015] In an alternative embodiment, the first light-emitting surface is an arc surface, and the arc angle of the first light-emitting surface is selected from the range of 180° to 270°; and / or, the second light-emitting surface is an arc surface, and the arc angle of the second light-emitting surface is selected from the range of 180° to 270°.

[0016] In an alternative embodiment, the angle between the light-emitting direction of the first light-emitting surface and the first direction is selected from the range of 50° to 80°, and the angle between the light-emitting direction of the second light-emitting surface and the first direction is selected from the range of 30° to 50°.

[0017] According to the edge detection system and the lighting device of the above embodiment, the edge detection system includes a lighting module and an imaging module. The lighting module has a recess surrounding the edge of the object to be measured. The axis surrounded by the concave surface of the recess extends in the first direction. The first light-emitting surface and the second light-emitting surface are both located on the concave surface of the recess and are arranged at intervals in the first direction. The first light-emitting surface is used to generate bright-field detection light, and the second light-emitting surface is used to generate dark-field detection light. The angle between the light-emitting direction of the first light-emitting surface and the first direction is different from the angle between the light-emitting direction of the second light-emitting surface and the first direction; the imaging module can respectively collect the bright-field signal light formed by the reflection of the bright-field detection light by the edge of the object to be measured and the dark-field signal light formed by the scattering of the dark-field detection light by the edge of the object to be measured, so as to obtain the bright-field image and the dark-field image of the edge of the object to be measured. Since both the first light-emitting surface and the second light-emitting surface are integrated on the concave surface of the recess in the lighting module, a bright-field illumination and a dark-field illumination mode that form an arc-shaped surround for the edge of the object to be measured are adopted. Such an integrated structure avoids the situation of separately setting the bright-field and dark-field lighting components and dispersedly setting the lighting components along the edge in the past, and can minimize the complexity of the lighting structure to the greatest extent; in addition, the lighting module cooperates with the imaging module to be able to perform bright-field detection and dark-field detection on the upper and lower inclined surfaces and the outer side surface of the edge of the object to be measured, and the imaging module can improve the defect detection ability while keeping the imaging accuracy unchanged during dark-field detection; the solution can simplify the structure of the edge detection system while improving the comprehensive detection ability and detection accuracy of the edge defects of the object to be measured through the combination of bright-field detection and dark-field detection. Description of the Drawings

[0018] Figure 1 is a schematic perspective view of a part of the lighting module in an embodiment of the edge detection system, and is also a schematic perspective view of a part of the lighting device in an embodiment; Figure 2 is a front view of a part of the lighting module in an embodiment of the edge detection system, and is also a front view of a part of the lighting device in an embodiment; Figure 3 is a schematic structural diagram of the relative position relationship between the first light-emitting surface and the second light-emitting surface in an embodiment; Figure 4 is a schematic general structure diagram of the first light-emitting surface, the second light-emitting surface, the imaging module and the object to be measured in an embodiment (the solid lines and dotted lines with arrows in the figure respectively represent the transmission paths of part of the light during bright-field detection and dark-field detection); Figure 5Schematic diagram of the general structure of another embodiment of the edge detection system and the object to be measured (the solid lines with arrows in the figure represent the transmission paths of part of the light during bright-field detection or dark-field detection).

[0019] In the figure: 10, illumination module; 11, illumination device; 100, housing; 110, irradiation component; 101, first cavity; 102, second cavity; 103, recess; 104, concave surface; 1041, first light-emitting surface; 1042, second light-emitting surface; 200, first light guide; 300, second light guide; 40, imaging module; 401, first image acquisition unit; 402, second image acquisition unit; 403, third image acquisition unit; 50, object to be measured; 501, upper surface; 502, lower surface; 503, upper inclined surface; 504, outer side surface; 505, lower inclined surface.

[0020] Explanation of the reference numerals in parentheses in the drawings: Among the reference numerals in parentheses in the drawings, the feature referred to by the reference numeral is both the feature represented by the number inside the parentheses and the feature represented by the number outside the parentheses. Specific embodiments

[0021] The following further details the present application in conjunction with the drawings through specific embodiments. Similar elements in different embodiments are labeled with related similar element numbers. In the following embodiments, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification to avoid overwhelming the core part of the present application with excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and general technical knowledge in the art.

[0022] In addition, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments, and the operation steps involved in each embodiment can also be reordered or adjusted in an obvious manner by those skilled in the art. Therefore, the specification and drawings are only for clearly describing a certain embodiment and do not mean to be the necessary composition and / or sequence.

[0023] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meaning. And the "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connection (coupling).

[0024] The present application discloses an edge detection system, which is mainly used to detect defects on the edge of a measured object 50. The measured object 50 includes semiconductors, display substrates, or other products that require defect detection through optical principles. The edge detection system of the present application can integrate both the first light-emitting surface 1041 and the second light-emitting surface 1042 on the concave surface 104 of the recess 103 in the illumination module 10, and cooperate with the imaging module 40 to achieve bright-field detection and dark-field detection of the edge of the measured object 50. In this way, while simplifying the structure of the edge detection system, the comprehensive detection ability and detection accuracy of defects on the edge of the measured object 50 can be improved through the combination of bright-field detection and dark-field detection.

[0025] Before introducing the edge detection system of the present application, a general introduction to the shape of the edge of the measured object 50 will be given first. The measured object 50 is generally in a sheet-like structure. Please refer to Figure 5 , the measured object 50 has an upper surface 501 and a lower surface 502. The edge of the measured object 50 generally has an upper inclined surface 503, a lower inclined surface 505, and an outer side surface 504. In the thickness direction of the measured object 50, that is, in the up and down direction, the upper inclined surface 503 is connected to the lower inclined surface 505 through the outer side surface 504. The upper inclined surface 503 is also connected to the upper surface 501 of the measured object 50, and the lower inclined surface 505 is also connected to the lower surface 502 of the measured object 50. The upper inclined surface 503 can be understood as the transition connection surface between the upper surface 501 and the outer side surface 504 of the measured object 50, and the lower inclined surface 505 can be understood as the transition connection surface between the lower surface 502 and the outer side surface 504 of the measured object 50.

[0026] The edge detection system of the present application includes an illumination module 10 and an imaging module 40. The illumination module 10 has a first light-emitting surface 1041 and a second light-emitting surface 1042. The first light-emitting surface 1041 is used to provide bright-field detection light to the edge of the measured object 50, so that the bright-field detection light is reflected by the edge of the measured object 50 to form bright-field signal light. The second light-emitting surface 1042 is used to provide dark-field detection light to the edge of the measured object 50, so that the dark-field detection light is scattered by the edge of the measured object 50 to form dark-field signal light. The light-emitting directions of the bright-field detection light and the dark-field detection light are different.

[0027] Specifically, please refer to Figures 1 to 5For the lighting module 10, the lighting module 10 is used to surround the edge of the object under test 50 to form a recess 103. The edge of the object under test 50 extends into the recess 103 with the opening of the recess 103 facing upward, so that the lighting module 10 is arranged around the edge of the object under test 50 in the thickness direction of the object under test 50. The axis surrounded by the concave surface 104 of the recess 103 extends in a first direction, and this first direction is perpendicular to the thickness direction of the object under test 50; the first light-emitting surface 1041 and the second light-emitting surface 1042 are located on the concave surface 104 of the recess 103 and are arranged at intervals in the first direction. Both the first light-emitting surface 1041 and the second light-emitting surface 1042 are concave surfaces arranged around the edge of the object under test 50. The bright-field detection light generated by the first light-emitting surface 1041 and the dark-field detection light generated by the second light-emitting surface 1042 can both be evenly irradiated onto the upper inclined surface 503, the outer side surface 504, and the lower inclined surface 505 of the edge of the object under test 50. The angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is different from the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction. For example, the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is greater than the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction, so as to ensure that the bright-field signal light reflected by the non-defect area of the edge of the object under test 50 can be received by the imaging module 40, and to ensure that the dark-field signal light reflected by the defect area of the edge of the object under test 50 can be received by the imaging module 40. Or it can also be set that the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is less than the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction, so as to realize the detection of different types of defects on the edge of the object under test 50.

[0028] In this way, the structure in which both the first light-emitting surface 1041 and the second light-emitting surface 1042 are integrally arranged on the concave surface 104 of the lighting module 10 can simplify the structure of the edge detection system while improving the comprehensive detection ability and detection accuracy of the defects on the edge of the object under test 50 through the combination of bright-field detection and dark-field detection.

[0029] It can be understood that when performing edge detection on a wafer, bright-field detection is generally at 1 pixel, and the highest precision is generally 1-2 um. To improve the edge detection precision through the bright-field method, it is necessary to synchronously improve the optical precision. As the precision increases, the depth of field of the optical system decreases sharply, and the overall cost requirement for this system increases. Another situation is to perform edge detection through the dark-field method. On the premise of unchanged imaging precision, it is necessary to adjust the light source energy to improve the detection precision to below 1 um, but this will also bring problems in terms of heat dissipation. The present application integrates bright-field illumination and dark-field illumination into one component, and at the same time shares a set of imaging systems. It is possible to install components of the illumination optical path and the imaging optical path in one cavity under limited space conditions. Through the method of fusing bright-field and dark-field light sources, the space volume of the detection cavity required for bright-field and dark-field is reduced, and the components required for imaging are reduced, and the defect detection ability below 1 um can be achieved without increasing the complexity of the imaging detection system.

[0030] In some embodiments, please refer to Figures 1 to 5 , the illumination module 10 includes a housing 100. The housing 100 surrounds the object to be measured 50 to form a recess 103. The cross-sectional shape of the concave surface 104 of the recess 103 in the direction perpendicular to the first direction can be C-shaped, U-shaped, circular arc-shaped, or a structure formed by connecting the upper base and two waist sides of an isosceles trapezoid. The shape of the recess 103 is set to satisfy that the detection light generated by the first light-emitting surface 1041 and the second light-emitting surface 1042 on the concave surface 104 can be received by the upper inclined surface 503, the lower inclined surface 505, and the outer side surface 504 of the edge of the object to be measured 50.

[0031] In some embodiments, the concave surface 104 of the recess 103 is an arc surface. Both the first light-emitting surface 1041 and the second light-emitting surface 1042 are arc surfaces with axes extending in the first direction. The arc angle range corresponding to the first light-emitting surface 1041 is 180° to 270°. For example, the arc angle corresponding to the first light-emitting surface 1041 can be 180°, 270°, or can also be 210°, 235°, etc. Such a setting helps to make the bright-field detection light generated by the first light-emitting surface 1041 cover all areas of the edge of the object to be measured 50, and helps to ensure the defect detection ability and detection precision of bright-field detection.

[0032] In some embodiments, the arc angle range corresponding to the second light-emitting surface 1042 is also 180° to 270°. For example, the arc angle corresponding to the second light-emitting surface 1042 can be 180°, 270°, or can also be 215°, 240°, etc. Such a setting helps to make the dark-field detection light generated by the second light-emitting surface 1042 cover all areas of the edge of the object to be measured 50, and helps to ensure the defect detection ability and detection precision of dark-field detection.

[0033] In some embodiments, the arc angles corresponding to the first light-emitting surface 1041 and the second light-emitting surface 1042 may be less than 180°, such as 175°, or may also be greater than 270°, such as 278°, as long as the bright-field illumination light and the dark-field illumination light can cover all regions of the edge of the object 50 to be measured.

[0034] In some embodiments, the shapes of the first light-emitting surface 1041 and the second light-emitting surface 1042 may match the concave surface 104 of the recess 103, such as a C shape, a U shape arranged around an axis extending in the first direction, or a structure formed by connecting the upper base and two waist sides of an isosceles trapezoid, as long as the bright-field detection light and the dark-field detection light can cover all regions of the edge of the object 50 to be measured.

[0035] The included angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction and the included angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction are both acute angles. As described above, the included angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is greater than the included angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction. In some embodiments, the included angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is selected from the range of 50° to 80°. For example, the included angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction may be 50°, 80°, or may also be 55°, 60°, etc. Such an arrangement of the light-emitting direction of the first light-emitting surface 1041 helps to improve the defect detection ability and detection accuracy during the bright-field detection process. Of course, in embodiments where the detection accuracy requirement is not high, the included angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction may also be less than 50° or greater than 80°, such as 48° or 83°, etc.

[0036] In some embodiments, the included angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction is selected from the range of 30° to 50°. For example, the included angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction may be 30°, 50°, or 40°, etc. Of course, in embodiments where the installation position accuracy requirement is not high, the included angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction may also be less than 30° or greater than 50°, such as 25° or 55°, etc.

[0037] In the edge detection system of the present application, the imaging module 40 is used to collect bright-field signal light to image the edge of the object 50 to be measured and obtain a bright-field image of the edge of the object 50 to be measured. The imaging module 40 is also used to collect dark-field signal light to image the edge of the object 50 to be measured and obtain a dark-field image of the edge of the object 50 to be measured. In this way, the bright-field signal light collected by the imaging module 40 in bright-field detection and the dark-field signal light collected in dark-field detection share the same optical path, which can also simplify the overall structure of the edge detection system and reduce the cost of the edge detection system.

[0038] In some embodiments, please refer to Figure 5 , the imaging module 40 includes a first image acquisition unit 401, a second image acquisition unit 402, and a third image acquisition unit 403. Each of the three image acquisition units includes a lens and a detector. The lenses are respectively used to receive bright-field signal light and dark-field signal light. The detector is connected to the lens. The detector can obtain a bright-field image of the edge of the object 50 to be measured according to the received bright-field signal light, and can also obtain a dark-field image of the edge of the object 50 to be measured according to the received dark-field signal light.

[0039] Specifically, please continue to refer to Figure 5, the first image acquisition unit 401 is located on the light output side of the bright-field signal light reflected by the upper inclined surface 503 at the edge of the object 50 to be measured. The first image acquisition unit 401 is configured to acquire the bright-field signal light formed by the reflection of the upper inclined surface 503 at the edge of the object 50 to be measured, so as to generate a bright-field image corresponding to the upper inclined surface 503 at the edge of the object 50 to be measured. Alternatively, the first image acquisition unit 401 is configured to acquire the dark-field signal light scattered by the upper inclined surface 503 at the edge of the object 50 to be measured, so as to generate a dark-field image corresponding to the upper inclined surface 503 at the edge of the object 50 to be measured; the second image acquisition unit 402 is located on the light output side of the bright-field signal light reflected by the outer side surface 504 at the edge of the object 50 to be measured. The second image acquisition unit 402 is configured to acquire the bright-field signal light formed by the reflection of the outer side surface 504 at the edge of the object 50 to be measured, so as to generate a bright-field image corresponding to the outer side surface 504 at the edge of the object 50 to be measured. Alternatively, the second image acquisition unit 402 is configured to acquire the dark-field signal light scattered by the outer side surface 504 at the edge of the object 50 to be measured, so as to generate a dark-field image corresponding to the outer side surface 504 at the edge of the object 50 to be measured; the third image acquisition unit 403 is located on the light output side of the bright-field signal light reflected by the lower inclined surface 505 at the edge of the object 50 to be measured. The third image acquisition unit 403 is configured to acquire the bright-field signal light formed by the reflection of the lower inclined surface 505 at the edge of the object 50 to be measured, so as to generate a bright-field image corresponding to the lower inclined surface 505 at the edge of the object 50 to be measured. Alternatively, the third image acquisition unit 403 is configured to acquire the dark-field signal light scattered by the lower inclined surface 505 at the edge of the object 50 to be measured, so as to generate a dark-field image corresponding to the lower side surface 505 of the object 50 to be measured. In this way, the three image acquisition units are dispersedly arranged to respectively obtain the bright-field images and dark-field images corresponding to the upper inclined surface 503, the outer side surface 504, and the lower inclined surface 505 at the edge of the object 50 to be measured, which can simplify the overall structure of the edge detection system while improving the defect detection ability of the edge detection system and the detection accuracy of the edge of the object 50 to be measured.

[0040] In some embodiments, for the illumination module 10, please refer to Figure 1 and Figure 2 , the illumination module 10 further includes a first light guide member 200 and a second light guide member 300. The first light guide member 200 is coupled to the first light emitting surface 1041. The first light guide member 200 is configured to transmit bright-field illumination light to the first light emitting surface 1041 to form bright-field detection light. The second light guide member 300 is coupled to the second light emitting surface 1042. The second light guide member 300 is configured to transmit dark-field illumination light to the second light emitting surface 1042 to form dark-field detection light; in this way, the bright-field illumination light and the dark-field illumination light are respectively transmitted through the first light guide member 200 and the second light guide member 300, which helps to reduce the loss during the transmission of the bright-field illumination light and the dark-field illumination light, and can also improve the anti-interference ability during the transmission of the bright-field illumination light and the dark-field illumination light.

[0041] Please refer to Figure 3, in the lighting module 10, the housing 100 surrounds the edge of the object 50 to form a recess 103. The concave surface 104 of the recess 103 is a part of the outer side surface of the housing 100. The housing 100 has relatively independent first and second cavities 101 and 102. The housing 100 has a first arc-shaped groove corresponding to the first light-emitting surface 1041 on the concave surface 104 of the recess 103, and the first arc-shaped groove communicates with the first cavity 101. The housing 100 also has a second arc-shaped groove corresponding to the second light-emitting surface 1042 on the concave surface 104 of the recess 103, and the second arc-shaped groove communicates with the second cavity 102.

[0042] Please refer to Figure 1 and Figure 2 , the first light guide member 200 includes a first optical fiber bundle composed of a plurality of thin optical fibers, and the second light guide member 300 includes a second optical fiber bundle composed of a plurality of thin optical fibers. The first optical fiber bundle is used to transmit bright-field illumination light, and the second optical fiber bundle is used to transmit dark-field illumination light. The first optical fiber bundle is connected to the housing 100, and a plurality of thin optical fibers in the first optical fiber bundle extend into the first cavity 101. The end faces of the plurality of thin optical fibers in the first optical fiber bundle are uniformly arranged in the first arc-shaped groove to form the first light-emitting surface 1041 at the first arc-shaped groove. The second optical fiber bundle is also connected to the housing 100, and a plurality of thin optical fibers in the second optical fiber bundle extend into the second cavity 102. The end faces of the plurality of thin optical fibers in the second optical fiber bundle are uniformly arranged in the second arc-shaped groove to form the second light-emitting surface 1042 at the second arc-shaped groove. The first light-emitting surface 1041 can be understood as being formed by the end faces of the plurality of thin optical fibers in the first optical fiber bundle being uniformly arranged in the first arc-shaped groove, and the second light-emitting surface 1042 can be understood as being formed by the end faces of the plurality of thin optical fibers in the second optical fiber bundle being uniformly arranged in the second arc-shaped groove. The plurality of thin optical fibers are uniformly arranged in the arc-shaped groove, so that both the first light-emitting surface 1041 and the second light-emitting surface 1042 have a light homogenizing effect, which can improve the transmission efficiency of the bright-field illumination light and the dark-field illumination light, help reduce the loss in the light transmission process, and enable the bright-field signal light and the dark-field signal light entering the imaging module 40 to be relatively uniform.

[0043] In some embodiments, the first light guide member 200 and / or the second light guide member 300 may further include a lens barrel and a plurality of lens groups. The lens barrel is fixedly connected to the housing 100. The internal space of the lens barrel in the first light guide member 200 communicates with the first cavity 101, and the internal space of the lens barrel in the second light guide member 300 communicates with the second cavity 102. The plurality of lens groups are arranged in the corresponding lens barrels at specific positions and orientations. The plurality of lens groups in the first light guide member 200 cooperate to transmit bright-field illumination light to the first cavity 101, and the bright-field illumination light exits from the first arc-shaped groove corresponding to the first cavity 101 to form bright-field detection light. The plurality of lens groups in the second light guide member 300 cooperate to transmit dark-field illumination light to the second cavity 102, and the dark-field illumination light exits from the second arc-shaped groove corresponding to the second cavity 102 to form dark-field detection light. Wherein, the region enclosed by the outer hole edges of the first arc-shaped groove far from the first cavity 101 forms a first light-emitting surface 1041, and the region enclosed by the outer hole edges of the second arc-shaped groove far from the second cavity 102 forms a second light-emitting surface 1042.

[0044] In some embodiments, the illumination module 10 further includes a first illumination light source (not shown in the figure) and a second illumination light source (not shown in the figure). The first illumination light source is used to generate bright-field illumination light, and the first illumination light source is coupled to the light-incident surface of the first light guide member 200. The second illumination light source is used to generate dark-field illumination light, and the second illumination light source is coupled to the light-incident surface of the second light guide member 300. The solution of separately arranging the first illumination light source and the second illumination light source facilitates adapting to different requirements of bright-field detection and dark-field detection by selecting or adjusting the brightness, wavelength, and color of the light source, thereby improving the defect detection ability and detection accuracy of the edge of the object 50 to be measured.

[0045] The first illumination light source includes a bright-field light box, and the second illumination light source includes a dark-field light box. The light-emitting bodies in the bright-field light box and the dark-field light box can both be LED light-emitting bodies. The first optical fiber bundle has a first end connected to the first illumination light source, and the end face of the first end is the light-incident surface of the first optical fiber bundle. The first optical fiber bundle also has a second end connected to the housing 100, and the end face of the second end can form the first light-emitting surface 1041. Similarly, one end of the second optical fiber bundle in its extending direction is connected to the second illumination light source, and the end face of the second optical fiber bundle for connecting to the second illumination light source is the light-incident surface of the second optical fiber bundle. The other end of the second optical fiber bundle in its extending direction is connected to the housing 100, and the end face of the other end can form the second light-emitting surface 1042.

[0046] In some embodiments, the illumination module 10 includes an illumination light source (not shown in the figure). The illumination light source can be an LED light source. The illumination light source can generate bright-field illumination light during the bright-field detection process and can also generate dark-field illumination light during the dark-field detection process. The light incident surface of the first light guide member 200 and the light incident surface of the second light guide member 300 are both connected to the illumination light source. The light incident surface of the first light guide member 200 can receive the illumination light generated by the illumination light source during the bright-field detection process to form bright-field illumination light, and the light incident surface of the second light guide member 300 can receive the illumination light generated by the illumination light source during the dark-field detection process to form dark-field illumination light.

[0047] The brightness, color, and wavelength of the bright-field illumination light and the dark-field illumination light can be the same; alternatively, a filter can be provided on the light-emitting side of the illumination light source to change the brightness, color, or wavelength of the corresponding illumination light during the dark-field or bright-field detection process, so that the bright-field illumination light is different from the dark-field illumination light.

[0048] In some embodiments, the illumination module 10 includes a first illumination light source and a second illumination light source. The first light guide member 200 and the second light guide member 300 may not be provided in the illumination module 10. The first illumination light source may be disposed in the first cavity 101 of the housing 100, and the bright-field illumination light generated by the first illumination light source is emitted from the first arc-shaped groove to form bright-field detection light; the second illumination light source may be disposed in the second cavity 102 of the housing 100, and the dark-field illumination light generated by the second illumination light source is emitted from the second arc-shaped groove to form dark-field detection light; wherein the first light-emitting surface 1041 and the second light-emitting surface 1042 are both virtual planes. The region enclosed by the outer hole edges of the first arc-shaped groove far from the first cavity 101 forms the first light-emitting surface 1041, and the region enclosed by the outer hole edges of the second arc-shaped groove far from the second cavity 102 forms the second light-emitting surface 1042.

[0049] The embodiments of the present application also disclose an illumination device 11. The illumination device 11 is applied in a system for detecting edge defects of a measured object 50, such as the above-mentioned edge detection system, and can cooperate with an image acquisition device to detect defects on the edge of the measured object 50. The measured object 50 in the embodiments of the illumination device 11 can be the same as the measured object 50 in the edge detection system, and will not be described in detail here.

[0050] Please refer to Figures 1 to 3, the lighting device 11 includes a light source (not shown in the figure) and an irradiation assembly 110. The light source is used to generate bright-field illumination light and dark-field illumination light. The irradiation assembly 110 is used to receive the bright-field illumination light and emit bright-field detection light toward the edge of the object under test 50, or the irradiation assembly 110 is used to receive the dark-field illumination light and emit dark-field detection light toward the edge of the object under test. The irradiation assembly 110 has a recess 103 surrounding the edge of the object under test 50. The axis surrounded by the concave surface 104 of the recess 103 extends in the first direction. The irradiation assembly 110 also has a first light-emitting surface 1041 and a second light-emitting surface 1042. The first light-emitting surface 1041 is used to receive the bright-field illumination light and emit bright-field detection light, and the second light-emitting surface 1042 is used to receive the dark-field illumination light and emit dark-field detection light. The first light-emitting surface 1041 and the second light-emitting surface 1042 are arranged at intervals in the first direction on the concave surface 104 of the recess 103. The angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is different from the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction. For example, the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is greater than the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction, so as to ensure that the bright-field signal light reflected by the non-defect area of the edge of the object under test 50 can be received by the image acquisition device, and to ensure that the dark-field signal light reflected by the defect area of the edge of the object under test 50 can be received by the image acquisition device. Alternatively, the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction can also be set to be less than the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction, so as to realize the detection of different types of defects on the edge of the object under test 50.

[0051] In this way, by integrating both the first light-emitting surface 1041 and the second light-emitting surface 1042 on the concave surface 104 of the recess 103 of the irradiation assembly 110, it is possible to realize the bright-field detection and dark-field detection of the edge of the object under test 50 on the premise of simplifying the structure of the lighting device, which helps to improve the defect detection ability and detection accuracy of the detection system where the lighting device 11 is located.

[0052] In some embodiments, for the irradiation assembly 110, please continue to refer to Figures 1 to 3 , the irradiation assembly 110 includes a housing 100. The housing 100 surrounds the object under test 50 to form a recess 103. The cross-sectional shape of the concave surface 104 of the recess 103 in a direction perpendicular to the first direction can be C-shaped, U-shaped, arc-shaped, or a structure formed by connecting the upper base and two waist sides of an isosceles trapezoid. The shape of the recess 103 is set to ensure that the detection light generated by the first light-emitting surface 1041 and the second light-emitting surface 1042 on the concave surface 104 can be received by the upper inclined surface 503, the lower inclined surface 505, and the outer side surface 504 of the edge of the object under test 50.

[0053] In some embodiments, the concave surface 104 of the concave portion 103 is an arc surface, and both the first light-emitting surface 1041 and the second light-emitting surface 1042 are arc surfaces with axes extending in the first direction. The arc angle range corresponding to the first light-emitting surface 1041 is 180° to 270°. For example, the arc angle corresponding to the first light-emitting surface 1041 can be 180°, 270°, or can also be 210°, 235°, etc. Such a setting helps the bright-field detection light generated by the first light-emitting surface 1041 to cover all areas of the edge of the object to be measured 50, and helps to ensure the defect detection ability and detection accuracy of bright-field detection.

[0054] In some embodiments, the arc angle range corresponding to the second light-emitting surface 1042 is also 180° to 270°. For example, the arc angle corresponding to the second light-emitting surface 1042 can be 180°, 270°, or can also be 215°, 240°, etc. Such a setting helps the dark-field detection light generated by the second light-emitting surface 1042 to cover all areas of the edge of the object to be measured 50, and helps to ensure the defect detection ability and detection accuracy of dark-field detection.

[0055] In some embodiments, the arc angles corresponding to the first light-emitting surface 1041 and the second light-emitting surface 1042 can be less than 180°, such as 175°, or can also be greater than 270°, such as 278°, as long as the bright-field illumination light and the dark-field illumination light can cover all areas of the edge of the object to be measured 50.

[0056] In some embodiments, the shapes of the first light-emitting surface 1041 and the second light-emitting surface 1042 can match the concave surface 104 of the concave portion 103, such as a C shape, a U shape arranged around the axis in the first direction, or a structure formed by connecting the upper base and two waist sides of an isosceles trapezoid, as long as the bright-field detection light and the dark-field detection light can cover all areas of the edge of the object to be measured 50.

[0057] The angles α between the light-emitting directions of the first light-emitting surface 1041 and the first direction and β between the light-emitting directions of the second light-emitting surface 1042 and the first direction are both acute angles. As described above, the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is greater than the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction. In some embodiments, the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction is selected from the range of 50° to 80°. For example, the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction can be 50°, 80°, or can also be 55°, 60°, etc. The light-emitting direction of the first light-emitting surface 1041 with such an angle setting helps to improve the defect detection ability and detection accuracy during bright-field detection. Of course, in embodiments where the requirement for detection accuracy is not high, the angle α between the light-emitting direction of the first light-emitting surface 1041 and the first direction can also be less than 50° or greater than 80°, such as 48° or 83°, etc.

[0058] In some embodiments, the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction is selected from the range of 30° to 50°. For example, the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction can be 30°, 50°, or 40°, etc. Of course, in embodiments where the requirement for the installation position accuracy is not high, the angle β between the light-emitting direction of the second light-emitting surface 1042 and the first direction can also be less than 30° or greater than 50°, such as 25° or 55°, etc.

[0059] In some embodiments, please refer to Figure 1 and Figure 2 and, the lighting device 11 further includes a first light guide member 200 and a second light guide member 300. Both the first light guide member 200 and the second light guide member 300 have light-incident surfaces. The light-incident surface 201 of the first light guide member 200 is used to be coupled with the light source to receive the bright-field illumination light generated by the light source, and the light-incident surface 301 of the second light guide member 300 is used to be coupled with the light source to receive the dark-field illumination light generated by the light source; the first light guide member 200 is coupled to the first light-emitting surface 1041 to transmit the bright-field illumination light to the first light-emitting surface 1041, and the second light guide member 300 is coupled to the second light-emitting surface 1042 to transmit the dark-field illumination light to the second light-emitting surface 1042. Transmitting the bright-field illumination light and the dark-field illumination light through the first light guide member 200 and the second light guide member 300 respectively helps to reduce the loss during the transmission of the bright-field illumination light and the dark-field illumination light, and can also improve the anti-interference ability during the transmission of the bright-field illumination light and the dark-field illumination light.

[0060] Please continue to refer to Figures 1 to 3, in the irradiation assembly 110, the housing 100 surrounds the edge of the object 50 to form a recess 103. The concave surface 104 of the recess 103 is a part of the outer side surface 504 of the housing 100. The housing 100 has relatively independent first and second cavities 101 and 102. The housing 100 has a first arc-shaped groove corresponding to the first light-emitting surface 1041 on the concave surface 104 of the recess 103, and the first arc-shaped groove communicates with the first cavity 101. The housing 100 also has a second arc-shaped groove corresponding to the second light-emitting surface 1042 on the concave surface 104 of the recess 103, and the second arc-shaped groove communicates with the second cavity 102.

[0061] Please refer to Figure 1 and Figure 2 , the first light guide 200 includes a first optical fiber bundle composed of a plurality of thin optical fibers, and the second light guide 300 includes a second optical fiber bundle composed of a plurality of thin optical fibers. The first optical fiber bundle is used to transmit bright-field illumination light, and the second optical fiber bundle is used to transmit dark-field illumination light. The first optical fiber bundle is connected to the housing 100, and a plurality of thin optical fibers in the first optical fiber bundle extend into the first cavity 101. The end faces of the plurality of thin optical fibers in the first optical fiber bundle are uniformly arranged in the first arc-shaped groove to form the first light-emitting surface 1041 at the first arc-shaped groove. The second optical fiber bundle is also connected to the housing 100, and a plurality of thin optical fibers in the second optical fiber bundle extend into the second cavity 102. The end faces of the plurality of thin optical fibers in the second optical fiber bundle are uniformly arranged in the second arc-shaped groove to form the second light-emitting surface 1042 at the second arc-shaped groove. The first light-emitting surface 1041 can be understood as being formed by the end faces of the plurality of thin optical fibers in the first optical fiber bundle being uniformly arranged in the first arc-shaped groove, and the second light-emitting surface 1042 can be understood as being formed by the end faces of the plurality of thin optical fibers in the second optical fiber bundle being uniformly arranged in the second arc-shaped groove. The plurality of thin optical fibers are uniformly arranged in the arc-shaped groove, so that both the first light-emitting surface 1041 and the second light-emitting surface 1042 have a light homogenizing effect, which can improve the transmission efficiency of the bright-field illumination light and the dark-field illumination light, help reduce the loss during the light transmission process, and enable the bright-field signal light and the dark-field signal light entering the image acquisition device to be relatively uniform.

[0062] In some embodiments, the first light guide 200 and / or the second light guide 300 may further include a lens barrel and a plurality of lens groups. The lens barrel is fixedly connected to the housing 100. The internal space of the lens barrel in the first light guide 200 communicates with the first cavity 101, and the internal space of the lens barrel in the second light guide 300 communicates with the second cavity 102. The plurality of lens groups are arranged in the corresponding lens barrels at specific positions and orientations. The plurality of lens groups in the first light guide 200 cooperate to transmit bright-field illumination light to the first cavity 101, and the bright-field illumination light exits from the first arc-shaped groove corresponding to the first cavity 101 to form bright-field detection light. The plurality of lens groups in the second light guide 300 cooperate to transmit dark-field illumination light to the second cavity 102, and the dark-field illumination light exits from the second arc-shaped groove corresponding to the second cavity 102 to form dark-field detection light. The region enclosed by the outer hole edges of the first arc-shaped groove far from the first cavity 101 forms the first light-emitting surface 1041, and the region enclosed by the outer hole edges of the second arc-shaped groove far from the second cavity 102 forms the second light-emitting surface 1042.

[0063] In some embodiments, the light source includes a first illumination light source and a second illumination light source. The first illumination light source is coupled to the light-incident surface of the first light guide 200 and is used to generate bright-field illumination light. The second illumination light source is coupled to the light-incident surface of the second light guide 300 and is used to generate dark-field illumination light. The solution of separately arranging the first illumination light source and the second illumination light source facilitates selecting or adjusting the brightness, wavelength, and color of the light source to meet the different requirements of bright-field detection and dark-field detection, thereby improving the defect detection ability and detection accuracy of the detection system where the illumination device 11 is located.

[0064] The first illumination light source includes a bright-field light box, and the second illumination light source includes a dark-field light box. The light-emitting bodies in the bright-field light box and the dark-field light box can both be LED light-emitting bodies. The first optical fiber bundle has a first end connected to the first illumination light source, and the end face of the first end is the light-incident surface of the first optical fiber bundle. The first optical fiber bundle also has a second end connected to the housing 100, and the end face of the second end can form the first light-emitting surface 1041. Similarly, one end of the second optical fiber bundle in its extending direction is connected to the second illumination light source, and the end face of the second optical fiber bundle for connecting to the second illumination light source is the light-incident surface of the second optical fiber bundle. The other end of the second optical fiber bundle in its extending direction is connected to the housing 100, and the end face of the other end can form the second light-emitting surface 1042.

[0065] In some embodiments, there is only one light source, which can be an LED light source. The light source can generate bright-field illumination light during bright-field detection and can also generate dark-field illumination light during dark-field detection. The light-incident surface of the first light guide member 200 and the light-incident surface of the second light guide member 300 are both connected to the light source. The light-incident surface of the first light guide member 200 can receive the illumination light generated by the light source during bright-field detection to form bright-field illumination light, and the light-incident surface of the second light guide member 300 can receive the illumination light generated by the light source during dark-field detection to form dark-field illumination light.

[0066] The brightness, color, and wavelength of the bright-field illumination light and the dark-field illumination light can be the same; alternatively, a filter can be provided on the light-emitting side of the light source to change the brightness, color, or wavelength of the corresponding illumination light during dark-field or bright-field detection, so that the bright-field illumination light is different from the dark-field illumination light.

[0067] In some embodiments, the light source includes a first illumination light source and a second illumination light source. The first light guide member 200 and the second light guide member 300 may not be provided in the illumination device 11. The first illumination light source may be disposed in the first cavity 101 of the housing 100, and the bright-field illumination light generated by the first illumination light source is emitted from the first arc-shaped groove to form bright-field detection light; the second illumination light source may be disposed in the second cavity 102 of the housing 100, and the dark-field illumination light generated by the second illumination light source is emitted from the second arc-shaped groove to form dark-field detection light; wherein the first light-emitting surface 1041 and the second light-emitting surface 1042 are both virtual planes. The region enclosed by the outer hole edges of the first arc-shaped groove far from the first cavity 101 forms the first light-emitting surface 1041, and the region enclosed by the outer hole edges of the second arc-shaped groove far from the second cavity 102 forms the second light-emitting surface 1042.

[0068] The above uses specific examples to elaborate on the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the technical field to which the present invention pertains, based on the idea of the present invention, several simple deductions, deformations, or substitutions can also be made.

Claims

1. An edge detection system, characterized in that, Comprising: A lighting module for surrounding the edge of the object to be measured to form a recess, the axis surrounded by the concave surface of the recess extending in a first direction, the lighting module having a first light-emitting surface and a second light-emitting surface, the first light-emitting surface being configured to generate bright-field detection light, the second light-emitting surface being configured to generate dark-field detection light, the first light-emitting surface and the second light-emitting surface being spaced apart in the first direction on the concave surface of the recess, the included angle between the light-emitting direction of the first light-emitting surface and the first direction being different from the included angle between the light-emitting direction of the second light-emitting surface and the first direction; An imaging module for collecting the bright-field signal light formed by the reflection of the bright-field detection light by the edge of the object to be measured to image the edge of the object to be measured and obtain a bright-field image of the edge of the object to be measured; the imaging module is further configured to collect the dark-field signal light formed by the scattering of the dark-field detection light by the edge of the object to be measured to image the edge of the object to be measured and obtain a dark-field image of the edge of the object to be measured.

2. The edge detection system according to claim 1, wherein The lighting module includes a first light guide and a second light guide, the first light guide being coupled to the first light-emitting surface, the first light guide being configured to transmit bright-field illumination light to the first light-emitting surface to form the bright-field detection light, the second light guide being coupled to the second light-emitting surface, the second light guide being configured to transmit dark-field illumination light to the second light-emitting surface to form the dark-field detection light.

3. The edge detection system according to claim 2, wherein, The lighting module includes a first lighting source and a second lighting source, the first lighting source being coupled to the light-incident surface of the first light guide, the first lighting source being configured to generate the bright-field illumination light; The second lighting source is coupled to the light-incident surface of the second light guide, the second lighting source being configured to generate the dark-field illumination light.

4. The edge detection system according to claim 1, wherein, The first light-emitting surface is an arc surface with an axis extending in the first direction, and the arc angle of the first light-emitting surface is selected from the range of 180° to 270°; and / or, The second light-emitting surface is an arc surface with an axis extending in the first direction, and the arc angle of the second light-emitting surface is selected from the range of 180° to 270°.

5. The edge detection system according to claim 1, characterized in that, The included angle between the light-emitting direction of the first light-emitting surface and the first direction is selected from the range of 50° to 80°, and the included angle between the light-emitting direction of the second light-emitting surface and the first direction is selected from the range of 30° to 50°.

6. The edge detection system according to claim 1, wherein The imaging module includes a first image acquisition unit, a second image acquisition unit, and a third image acquisition unit; the edge of the object to be measured has an upper inclined surface, an outer side surface, and a lower inclined surface; The first image acquisition unit acquires the bright-field signal light formed by the reflection of the upper inclined surface of the edge of the object to be measured to generate a bright-field image corresponding to the upper inclined surface, or acquires the dark-field signal light formed by the scattering of the upper inclined surface of the edge of the object to be measured to generate a dark-field image corresponding to the upper inclined surface; The second image acquisition unit acquires the bright-field signal light formed by the reflection of the outer side surface of the edge of the object to be measured to generate a bright-field image corresponding to the outer side surface, or acquires the dark-field signal light formed by the scattering of the outer side surface of the edge of the object to be measured to generate a dark-field image corresponding to the outer side surface; The third image acquisition unit acquires the bright-field signal light formed by reflection on the lower inclined surface of the edge of the object to be measured to generate a bright-field image corresponding to the lower inclined surface, or acquires the dark-field signal light formed by scattering on the lower inclined surface of the edge of the object to be measured to generate a dark-field image corresponding to the lower inclined surface.

7. A lighting device, characterized in that, Comprising: a light source for generating bright-field illumination light and dark-field illumination light; an irradiation assembly for receiving the bright-field illumination light and emitting bright-field detection light towards the edge of the object to be measured, or for receiving the dark-field illumination light and emitting dark-field detection light towards the edge of the object to be measured; the irradiation assembly has a recess surrounding the edge of the object to be measured, the axis surrounded by the concave surface of the recess extends in a first direction, the irradiation assembly further has a first light-emitting surface and a second light-emitting surface, the first light-emitting surface is for receiving the bright-field illumination light and emitting the bright-field detection light, the second light-emitting surface is for receiving the dark-field illumination light and emitting the dark-field detection light, the first light-emitting surface and the second light-emitting surface are arranged at intervals on the concave surface of the recess in the first direction, and the included angle between the light-emitting direction of the first light-emitting surface and the first direction is different from the included angle between the light-emitting direction of the second light-emitting surface and the first direction.

8. The lighting device according to claim 7, wherein The illumination device includes a first light guide and a second light guide, both the first light guide and the second light guide have light-incident surfaces, the light-incident surface of the first light guide is for receiving the bright-field illumination light, and the light-incident surface of the second light guide is for receiving the dark-field illumination light; the first light guide is coupled to the first light-emitting surface to transmit the bright-field illumination light to the first light-emitting surface, and the second light guide is coupled to the second light-emitting surface to transmit the dark-field illumination light to the second light-emitting surface.

9. The lighting device according to claim 8, characterized in that, The concave surface has a first arc groove, the first light guide includes a first optical fiber bundle composed of a plurality of thin optical fibers, the first optical fiber bundle is for transmitting the bright-field illumination light, and the end faces of the plurality of thin optical fibers in the first optical fiber bundle are uniformly arranged in the first arc groove to form the first light-emitting surface; and / or, the concave surface has a second arc groove, the second light guide includes a second optical fiber bundle composed of a plurality of thin optical fibers, the second optical fiber bundle is for transmitting the dark-field illumination light, and the end faces of the plurality of thin optical fibers in the second optical fiber bundle are uniformly arranged in the second arc groove to form the second light-emitting surface.

10. The lighting device according to claim 8, characterized in that, The light source includes a first illumination light source and a second illumination light source, the first illumination light source is coupled to the light-incident surface of the first light guide, and the first illumination light source is for generating the bright-field illumination light; the second illumination light source is coupled to the light-incident surface of the second light guide, and the second illumination light source is for generating the dark-field illumination light.

11. The lighting device according to claim 7, wherein The first light-emitting surface is an arc surface, and the arc angle of the first light-emitting surface is selected from the range of 180° to 270°; and / or, the second light-emitting surface is an arc surface, and the arc angle of the second light-emitting surface is selected from the range of 180° to 270°.

12. The lighting device according to claim 7, wherein, The included angle between the light-emitting direction of the first light-emitting surface and the first direction is selected from the range of 50° to 80°, and the included angle between the light-emitting direction of the second light-emitting surface and the first direction is selected from the range of 30° to 50°.

Images