Self-adaptive Hall measuring rod based on sample thermal deformation and measuring method

Abstract

The invention provides a self-adaptive Hall measuring rod based on sample thermal deformation and a measuring method, and belongs to the field of material testing. In the vacuum cavity of the Hall measuring rod, the free ends of the supporting rod, the movable electrode and the movable Hall probe are all arranged in the lead cavity and sequentially penetrate through the middle supporting piece to reach the test cavity. The movable electrode and the movable Hall probe are arranged in the threading cavity and respectively penetrate through the pressure spring and the force application fixing pieces, the force application fixing pieces are respectively fixed on the movable electrode and the movable Hall probe, and the upper ends of the force application fixing pieces are fixedly connected with the lower end of the pressure spring; the movable electrode penetrates through the sample table to be in contact with the horizontal plane of the inclined electrode wedge, and the inclined electrode wedge and the fixed electrode adjustably clamp a sample in the horizontal direction; the movable Hall probe penetrates through a central hole of the sample table to be opposite to the fixed Hall probe, and a sample is adjustably clamped in the vertical direction, so that sample clamping under thermal deformation is adaptively completed. According to the invention, the accuracy and stability of electrical parameter measurement of the thermal deformation sample are improved.

Description

Technical Field

[0001] The present invention belongs to the field of material testing, and particularly relates to an adaptive Hall measuring rod and a measuring method based on the thermal deformation of a sample. Background Art

[0002] The electrical transport properties are key parameters of conductor / semiconductor materials. When developing electronic components using conductor / semiconductor materials, it is necessary to test the electrical transport parameters of the materials, and temperature will significantly affect the electrical transport parameters of the materials. On the one hand, the electrical transport parameters of the conductor / semiconductor material samples themselves will change with temperature at different temperatures. On the other hand, there is significant thermal expansion and contraction of the samples when the temperature changes. When the conductor / semiconductor material needs to be continuously tested for electrical transport properties from low temperature to high temperature (70K - 1300K), it is necessary to ensure that the samples undergoing thermal deformation during the test always maintain good contact with the probes to accurately measure electrical transport parameters such as carrier concentration and mobility.

[0003] In the prior art, for samples with thermal deformation, the measurement methods of electrical transport parameters include the Hall measurement method and the van der Pauw measurement method. In these two measurement methods, the contact method between the sample and the probe / electrode is adhesion or screw fixation. However, adhesion is generally only applicable at relatively low temperatures (<400K), and it is not easy to place and sample the samples. The screw fixation method is to firmly fix the probe with a certain elasticity and the sample together through screws. Due to the tightening force of different users, it is easy to cause poor contact of the sample or crush the sample. Moreover, when measuring at an elevated temperature, the sample may be crushed due to thermal expansion. When measuring at a decreasing temperature, due to the shrinkage of the sample and the electrode / probe, the contact between the electrode / probe and the sample becomes poor. Summary of the Invention

[0004] In view of the above-mentioned defects or deficiencies in the prior art, the present invention aims to provide an adaptive Hall measuring rod and a measuring method based on the thermal deformation of a sample. By structurally designing and optimizing the sample stage, contact electrodes, and probes of the Hall measuring rod, the electrical transport parameters of samples with thermal deformation in the temperature range of 70K - 1300K can be measured without damaging the samples, and stable measurements can be carried out in the entire temperature range, improving the accuracy and stability of measuring the electrical parameters of samples with thermal deformation.

[0005] To achieve the above object, the embodiments of the present invention adopt the following technical solutions:

[0006] In the first aspect, the embodiments of the present invention provide an adaptive Hall measuring rod based on the thermal deformation of a sample. The Hall measuring rod includes: a vacuum chamber 1, a support rod 2, a sample stage 3, an electrode 4, a Hall probe 5, a thermocouple 6, a compression spring 7, and a force - applying fixture 8; wherein,

[0007] The vacuum chamber 1 is a sealed chamber, which sequentially includes a lead port 11, a lead chamber 12, a lead block 13, an upper lead post 14, a wire threading chamber 15, a ventilation hole 16, a lower lead post 17, a vacuum gauge connector 18, and a test chamber 19 from top to bottom; the wire threading chamber 15 has a rectangular cross-section, and an upper support plate 151 and a lower support plate 152 inside the chamber are symmetrically arranged on the upper and lower sides thereof.

[0008] The electrode 4 includes a pair of movable electrodes 41, a pair of electrode wedges 42, and a fixed electrode 43; the Hall probe 5 includes a pair of movable Hall probes 51 and a fixed Hall probe 52; the fixed Hall probe 52 is fixed to the bottom surface of the sample stage 3 through a fixed probe mounting hole 36, and the movable Hall probe 51 passes downward from within the lead chamber 12 through the lead block 13, the upper lead post 14, the wire threading chamber 15, the lower lead post 17, the vacuum gauge connector 18 to the test chamber 19, passes through the movable probe through-hole 33 of the sample stage 3, and faces the fixed Hall probe; the movable electrode 41 passes downward from within the lead chamber 12 through the lead block 13, the upper lead post 14, the wire threading chamber 15, the lower lead post 17, the vacuum gauge connector 18 to the test chamber 19, passes through the movable electrode through-hole 33 of the sample stage 3, and contacts the electrode wedge 42 provided on the inclined surface of the sample stage 3; the fixed electrode 43 is provided on the opposite side of the electrode wedge 42.

[0009] On the movable electrode 41 and the movable Hall probe 51 inside the wire threading chamber 15, a compression spring 7 and a force-applying fixture 8 are respectively provided. One end of the compression spring 7 is supported on the lower surface of the upper support plate 151 inside the chamber. The compression spring 7 is respectively sleeved on the movable electrode 41 and the movable Hall probe 51, and the other end of the compression spring 7 is fixed to the force-applying fixture 8, and the force-applying fixture 8 is respectively fixed to the movable electrode 41 and the movable Hall probe 51.

[0010] As a preferred embodiment of the present invention, the support rod 2 is provided inside the vacuum chamber 1, penetrates through the lead block 13, the upper lead post 14, the wire threading chamber 15, the lower lead post 17, the vacuum gauge connector 18 from the bottom of the lead chamber 12 to the lower end of the test chamber 19, and is provided with a tail-end insulating member 195 and a support rod adjusting nut 196 after passing through the sample stage 3; inside the test chamber 19, the support rod 2 is sequentially provided with an adjusting spring 191, an isolation block 193, the sample stage 3, the tail-end insulating member 195, and the support rod adjusting nut 196 from top to bottom.

[0011] The sample stage 3 is provided inside the test chamber 19; the sample stage 2 is provided with a pair of support post through-holes 31, and symmetrically provided with a movable electrode through-hole 32, a movable probe through-hole 33, a thermocouple through-hole 34, a fixed electrode mounting hole 35, a fixed probe mounting hole 36, and an inclined wedge surface 37 with the center line connecting the centers of the two support post through-holes as the axis of symmetry.

[0012] As a preferred embodiment of the present invention, the outer shape of the test cavity 19 is cylindrical; the sample stage 3 is cylindrical, and its outer diameter is smaller than the inner diameter of the test cavity 15; the isolation block 193 is cylindrical, and its outer diameter is smaller than the inner diameter of the test cavity 19, and it is provided with a support rod through hole, a movable electrode through hole, a movable probe through hole, and a thermocouple through hole.

[0013] As a preferred embodiment of the present invention, the ventilation holes 16 are symmetrically arranged on both sides of the middle waist of the wire threading cavity 15.

[0014] As a preferred embodiment of the present invention, when there are more than two isolation blocks 193, a support column 194 sleeved on the support rod 2 is arranged between every two isolation blocks 193; by arranging a plurality of isolation blocks 193 to form an alternating isolation mode of a plurality of isolation blocks and the air layers therebetween, the heat in the sample stage area can be better isolated.

[0015] As a preferred embodiment of the present invention, in the area of the test cavity 19 where the adjusting spring 191 is arranged, a hand-held part 192 is arranged on the corresponding movable electrode 41, movable Hall probe 51, and thermocouple 6.

[0016] As a preferred embodiment of the present invention, the lead cavity 12 has upper and lower detachable sealing flanges. The upper side is provided with a lead inlet 11 for putting in the support rod 2, movable electrode 41, movable Hall probe 51, and thermocouple 6. The lower side opening is docked with the lead block 13, and then is in snap connection with the upper lead column 14; the movable electrode leads, movable Hall probe leads, and thermocouple leads after wire threading are left in the lead cavity 12; from the lead block 13, upper lead column 14, the upper cavity support plate 151 and upper cavity support plate 152 in the wire threading cavity 15 to the lower lead column 17, as well as the isolation block 193 and the sample stage 3, there are support column through holes, contact electrode through holes, probe through holes, and thermocouple through holes with the same position and aperture.

[0017] As a preferred embodiment of the present invention, the lead block 13, upper cavity support plate 151, lower cavity support plate 152, support rod 2, isolation block 193, support column 194, and sample stage 3 are all made of rigid-shaped insulating and heat-insulating materials.

[0018] In a second aspect, the embodiment of the present invention further provides an adaptive Hall measurement method based on sample thermal deformation, which uses the Hall measurement rod as described above for measurement; the measurement method includes equipment installation, sample loading, sample testing, and sample unloading; wherein,

[0019] When performing equipment installation:

[0020] Connect the lead block 13, upper lead post 14, wire threading cavity 15, lower lead post 17, and vacuum gauge connector 18 of the vacuum chamber 1; install the support rod 2, movable electrode 41, movable Hall probe 51, and thermocouple 6; connect the lead cavity 12 and lead port 11 to the lead block 13, place the leads of the movable electrode, movable Hall probe, and thermocouple in the lead cavity 12, and connect and seal them to an external measuring device through the lead port 11; sleeve the tail end insulating part 195 at the lower end of the support rod and the lower side of the sample stage, and then connect the support rod adjusting nut 196 at the end;

[0021] When loading the sample:

[0022] Clamp the sample between the movable Hall probe 51 and the fixed Hall probe 52, so that the sample contacts the fixed electrode 43 on the front side and the vertical surface of the electrode wedge 42 on the back side at the same time;

[0023] After the sample is loaded and before testing, sleeve the test cavity 19 at the vacuum gauge connector 18, so that the connection part of the support rod 2 below the vacuum gauge connector 18 extends into the test cavity 19; tightly hold the vacuum chamber 1 to provide a vacuum or protective atmosphere according to the test requirements;

[0024] When testing the sample:

[0025] Connect the leads of the movable electrode, movable Hall probe, and thermocouple on the upper side of the lead cavity 12 to the test platform; place the test cavity 19 into a heating device to perform a sample deformation test at high temperature;

[0026] When unloading the sample:

[0027] After the test cavity 19 has cooled down, remove the vacuum or protective atmosphere, stably place the Hall measuring rod on the operating table, unscrew the vacuum gauge connector 18, and remove the test cavity 19; move the movable electrode 41 and the movable Hall probe 51, and push the force - applying fixture 8 to move a small distance towards the compression spring 7. At this time, the sample 9 is no longer under force, and use tweezers to remove the sample.

[0028] As a preferred embodiment of the present invention, when clamping the sample, the specific operations are as follows:

[0029] Step S1, move the movable electrode 41 and the movable Hall probe 51 through the handheld part 192 to compress the compression spring 7; temporarily fix the movable electrode 41 and the movable Hall probe 51 through the force - applying fixture 8 to create more space for the sample to be measured;

[0030] Step S2, place the sample 9 so that the two samples are supported on the fixed Hall electrode 52, located between the two movable Hall probes 51 and the fixed Hall probe 52, and at the same time located between the two electrode wedges 42 and the fixed electrode 43;

[0031] Step S3: Loosen the temporarily fixed movable electrode 41 and movable Hall probe 51 respectively, so that the movable electrode 41, electrode wedge 42 and fixed electrode 43 clamp the sample 9 in the horizontal direction, and at the same time the movable Hall probe 51 and fixed Hall probe 52 clamp the sample 9 in the vertical direction;

[0032] Step S4: Slide the test cavity 19 upwards from the adjusting nut 196 at the end of the support rod to the vacuum gauge joint 18, seal the lead outlet 11 of the lead cavity 12, and at the same time lead out the leads of the movable electrode, movable Hall probe and thermocouple; Seal the gas exchange port 16 and introduce a protective atmosphere or vacuum.

[0033] As a preferred embodiment of the present invention, when performing sample testing, it further includes:

[0034] When the sample deforms at high temperature, in the vertical direction, the expansion of the sample 9 pushes the movable Hall probe 51 upwards. At this time, the force - applying fixture 9 fixed to the movable Hall probe 51 in the threading cavity 15 compresses the compression spring 7, and the reaction force of the compression spring 7 causes the movable Hall probe 51 to apply a reaction force to the sample 9. At this time, the movable Hall probe 51 and the fixed Hall probe 52 clamp the sample in the vertical direction; In the horizontal direction, the expansion of the sample 9 pushes the electrode wedge 42 to slide upwards along the inclined side of the groove, thereby driving the movable electrode 41 in contact connection with the horizontal plane of the electrode wedge 42 to move upwards. At this time, the force - applying fixture 8 fixed to the movable electrode in the threading cavity 15 compresses the compression spring 7, and the reaction force of the compression spring 7 causes the movable electrode 41 to apply a reaction force to the electrode wedge 42 and transmit it to the sample. At this time, the electrode wedge 42 and the fixed electrode 43 clamp the sample 9 in the horizontal direction.

[0035] The technical solution provided by the embodiment of the present invention has the following beneficial effects:

[0036] The present invention provides an adaptive Hall measuring rod and measuring method based on sample thermal deformation, enabling the sample to maintain stable and good contact with the electrode / probe when thermal deformation occurs in a variable - temperature environment; after one - time pressure adjustment, even if used by different operators, the forces applied to each measured sample will remain stable, improving the accuracy and precision of the measurement; the sample - placing step of the Hall measuring rod in the present invention is simple; two samples can be measured simultaneously during one - time temperature change, improving the measurement efficiency.

[0037] Of course, when implementing any product or method of the present invention, it is not necessarily required to achieve all the above - mentioned advantages simultaneously. Description of the Drawings

[0038] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0039] Figure 1 are the external and sectional corresponding structure schematic diagrams of the adaptive Hall measurement rod based on the thermal deformation of the sample according to the embodiments of the present invention;

[0040] Figure 2 is Figure 1 the enlarged view of the structure of part A of the shown adaptive Hall measurement rod;

[0041] Figure 3 is the structure schematic diagram of the sample stage of the adaptive Hall measurement rod according to the embodiments of the present invention;

[0042] Figure 4 is the sample installation schematic diagram of the adaptive Hall measurement rod according to the embodiments of the present invention;

[0043] Figure 5 is the schematic diagram of the force-bearing principle of the contact between the sample and the electrode / probe of the adaptive Hall measurement rod according to the embodiments of the present invention.

[0044] Explanation of reference numerals:

[0045] 1 - Vacuum cavity; 11 - Lead port; 12 - Lead cavity; 13 - Lead block; 14 - Upper lead post; 15 - Threading cavity; 151 - Upper support plate inside the cavity; 152 - Lower support plate inside the cavity; 153 - Cover plate; 16 - Vent hole; 17 - Lower lead post; 18 - Vacuum gauge joint; 19 - Test cavity; 191 - Adjusting spring; 192 - Handheld part; 193 - Isolation block; 194 - Support column; 195 - Tail-end insulating part; 196 - Support rod adjusting nut; 2 - Support rod; 3 - Sample stage; 31 - Support column through hole; 32 - Movable electrode through hole; 33 - Movable probe through hole; 34 - Thermocouple through hole; 35 - Fixed electrode mounting hole; 36 - Fixed probe mounting hole; 37 - Inclined split surface; 4 - Electrode; 41 - Movable electrode; 42 - Electrode inclined split; 43 - Fixed electrode; 5 - Hall probe; 51 - Movable Hall probe; 52 - Fixed Hall probe; 6 - Thermocouple; 7 - Compression spring; 8 - Force-applying fixture; 9 - Test sample. Detailed implementation manners

[0046] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations. It should be noted that, without conflict, the embodiments and features in the embodiments of the present invention can also be combined with each other.

[0047] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In the description of the present invention, the terms "first", "second", "third", "fourth", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0048] Regarding the problem of testing the electrical transport parameters of conductor / semiconductor materials, the embodiments of the present invention provide an adaptive Hall measurement rod and a measurement method based on the thermal deformation of a sample. To maintain the stable contact between the electrodes and probes and the sample during measurement, the embodiments of the present invention design a new type of Hall sample rod that can adapt to the thermal deformation of the sample in a variable-temperature environment. Based on the force action principle between the electrodes and probes and the sample, the structural design of the sample stage, the structural design of the contact electrodes and probes are carried out. On the premise of ensuring that the lengths of the electrodes and probes are long enough, the leads are taken at the end far from the sample at room temperature, and a compression spring structure is added. The compression amount of the spring can make the electrodes / probes in close contact with the sample. The temperature range that the Hall measurement rod of the present invention can measure is 70K to 1300K. In this temperature range, the full contact between the electrodes / probes and the sample is maintained, and stable measurement can be carried out in the full temperature range.

[0049] As Figures 1-4 shown, the adaptive Hall measurement rod based on the thermal deformation of the sample according to the embodiments of the present invention includes: a vacuum chamber 1, a support rod 2, a sample stage 3, electrodes 4, Hall probes 5, thermocouples 6, compression springs 7, and force-applying fixtures 8.

[0050] The vacuum chamber 1 is an integral sealed chamber, which sequentially includes a lead port 11, a lead cavity 12, a lead block 13, an upper lead column 14, a wire-passing cavity 15, a ventilation hole 16, a lower lead column 17, a vacuum gauge joint 18, and a test cavity 19 from top to bottom.

[0051] Among them, the lead cavity 12 has a sealing flange that can be detachably connected up and down. A lead port 11 is provided on the upper side for inserting the support rod 2, the movable electrode 41, the movable Hall probe 51, and the thermocouple 6. The lower side is open and docked with the lead block 13, and then is in a snap connection with the upper lead post 14. The lead port 11, the lead cavity 12, the lead block 13, the upper lead post 14, the ventilation hole 16, the lower lead post 17, the vacuum gauge joint 18, and the test cavity 19 are cylindrical in shape. The lead port 11 is used for introducing components such as the support rod 2, the movable electrode 41, the movable Hall probe 51, and the thermocouple 6; the remaining movable electrode leads, movable Hall probe leads, and thermocouple leads after threading are left in the lead cavity 12; from the lead block 13, the upper lead post 14, the cavity upper support plates 151 and 152 in the threading cavity 15 to the lower lead post 17, as well as the isolation block 193 and the sample stage 3, there are support post through holes, contact electrode through holes, probe through holes, and thermocouple through holes with the same position and aperture.

[0052] The threading cavity 15 has a rectangular cross-section, and the front and rear surfaces are sealed with a detachable cover plate 153. The ventilation hole 16 is provided on the side surface of the threading cavity 15; preferably, the ventilation holes 16 are symmetrically arranged at the middle waist of the threading cavity, and a protective gas can be introduced, which is used to provide the required atmosphere for the entire vacuum cavity 1. The protective gas includes helium, argon, nitrogen, etc. Preferably, cavity upper support plates 151 and cavity lower support plates 152 are symmetrically arranged on the upper side and the lower side inside the threading cavity 15, respectively, for supporting the support rod 2, the movable electrode 41, the movable Hall probe 51, and the thermocouple 6 passing through. When assembling the equipment before testing, the cover plate 153 is opened, and the support rod 2, the movable electrode 41, the movable pile Hall probe 51, the thermocouple 6, etc. are introduced into the test cavity 19 through the threading cavity 15, so as to facilitate the threading operation; after threading is completed, the cover plate 153 is sealed and closed again.

[0053] Among them, compression springs 7 and force application fixtures 8 are respectively arranged on the movable electrode 41 and the movable Hall probe 51 inside the threading cavity 15. One end of the compression spring 7 is supported on the lower surface of the cavity upper support plate 151. The compression springs 7 are respectively sleeved on the movable electrode 41 and the movable Hall probe 51, and the other end of the compression spring 7 is fixed on the force application fixture 8, and the force application fixtures 8 are respectively fixed on the movable electrode 41 and the movable Hall probe 51. When the movable electrode 41 and / or the movable Hall probe 51 rise or fall due to the thermal deformation of the sample 9, the force application fixture 8 is driven to apply different forces to the compression spring 7, and the reaction force of the compression spring 7 is transmitted between the movable electrode 41 and / or the movable Hall probe 51 and the sample 9, so that the movable electrode 41 and / or the movable Hall probe 51 and the sample 9 always remain in contact, thereby completing the test. Preferably, the force application fixture 8 is fixed on the movable electrode 41 or the movable Hall probe 51 by means of fastening screws, glue, etc.

[0054] The support rod 2 is arranged inside the vacuum chamber 1, passing through the lead block 13, the upper lead post 14, the wire threading chamber 15, the lower lead post 17, and the vacuum gauge joint 18 from the bottom of the lead wire chamber 12 to the lower end of the test chamber 19.

[0055] Among them, inside the test chamber 19, an adjusting spring 191, an isolation block 193, a sample stage 3, a tail end insulating part 195, and a support rod adjusting nut 196 are sequentially arranged on the support rod 2 from top to bottom. The isolation block 193 is cylindrical, with an outer diameter smaller than the inner diameter of the test chamber 19. It is provided with a support rod through hole, a movable electrode through hole, a movable probe through hole, and a thermocouple through hole, enabling the test element to reach the sample stage. At the same time, when heating the sample stage 2 and the sample, it plays a heat insulation role. When there are more than two isolation blocks 193, a support post 194 sleeved on the support rod 2 is arranged between every two isolation blocks 193. By setting multiple isolation blocks 193 to form an alternating isolation method of multiple isolation blocks and the air layers between them, the heat in the sample stage area can be better isolated. When there are more than two isolation blocks 193, a support post 194 sleeved on the support rod 2 is arranged between every two isolation blocks 193. By setting multiple isolation blocks 193 to form an alternating isolation method of multiple isolation blocks and the air layers between them, the heat in the sample stage area can be better isolated, making the sample stage area form a nearly independent space to complete the test under the heated state of the sample.

[0056] In the area where the adjusting spring 191 is arranged in the test chamber 19, a handheld part 192 is arranged on the corresponding movable electrode 41, movable Hall probe 51, and thermocouple 6; since the movable electrode 41, movable Hall probe 51, and thermocouple 6 are all slender and precision components that need to travel a very long distance, in order to facilitate installation, the handheld part 192 is arranged here, enabling the movable electrode 41, movable Hall probe 51, and thermocouple 6 to smoothly pass through the isolation block 193, etc. to reach the sample stage, and at the same time not affecting the states of components such as the movable electrode 41, movable Hall probe 51, and thermocouple 6. The support rod adjusting nut 196 is used to adjust the effective length of the support rod 2 inside the test chamber 19.

[0057] The sample stage 3 is arranged inside the test chamber 19 and is cylindrical, with an outer diameter smaller than the inner diameter of the test chamber 15; the sample stage 2 is provided with a pair of support post through holes 31, and symmetrically arranged with a movable electrode through hole 32, a movable probe through hole 33, a thermocouple through hole 34, a fixed electrode mounting hole 35 (not shown in the figure), a fixed probe mounting hole 36, and an inclined split surface 37 with the center line connecting the two support post through holes as the axis of symmetry. In the exact middle of the sample stage 3 is a reserved positioning hole.

[0058] The electrode 4 includes a pair of movable electrodes 41, a pair of electrode wedges 42, and a fixed electrode 43; the Hall probe 5 includes a pair of movable Hall probes 51 and a fixed Hall probe 52. The fixed Hall probe 52 is fixed to the bottom surface of the sample stage 3 through the fixed probe mounting hole 36. The movable Hall probe 51 passes downward from within the lead cavity 12 through the lead block 13, the upper lead post 14, the wire threading cavity 15, the lower lead post 17, the vacuum gauge connection 18 to the test cavity 19, passes through the movable probe through hole 33 of the sample stage 3, and faces the fixed Hall probe; the movable electrode 41 passes downward from within the lead cavity 12 through the lead block 13, the upper lead post 14, the wire threading cavity 15, the lower lead post 17, the vacuum gauge connection 18 to the test cavity 19, passes through the movable electrode through hole 33 of the sample stage 3, and contacts the electrode wedge 42 provided on the inclined surface of the sample stage 3; the fixed electrode 43 is provided on the opposite side of the electrode wedge 42.

[0059] Wherein, the lower side of the sample stage 3 has an irregular groove, and one side of the groove is an inclined surface; the bottom surface of the sample stage 3 is connected to the fixed Hall probe 52 through the fixed probe mounting hole 36, so that the free end of the fixed Hall probe 52 extends out of the groove on the bottom surface of the sample stage 3 and faces the movable Hall probe 51 that passes through and extends out of the upper side of the groove; the inclined side surface of the groove is in sliding contact with the bottom surface of the electrode wedge 42, and the other side surface of the groove opposite to the vertical surface of the electrode wedge 42 is a vertical surface, and at the position opposite to the electrode wedge 42 on the vertical surface, the fixed electrode 43 is provided through the fixed electrode mounting hole 35. The electrode wedge 42 is a triangular body, including an inclined surface, a horizontal surface, and a vertical surface. The horizontal surface of the electrode wedge 42 contacts the end of the movable electrode 41.

[0060] The movable electrode 41 passes through the movable electrode through hole 32 on the sample stage and contacts the horizontal surface of the electrode wedge 42; the movable Hall probe 51 passes through the movable probe through hole 33 and faces the fixed Hall probe 52, and a sample 9 is loaded in a clamping manner in the middle; when loading the sample 9, the upper side of the sample 9 abuts against the movable Hall probe 51, the lower side abuts against the fixed Hall electrode 52, the front side abuts against the fixed electrode 43, and the rear side abuts against the vertical surface of the electrode wedge 42. Usually, a pair of samples 9 are symmetrically loaded on the sample stage 3. The samples can be the same or different. The two samples correspond to the paired movable electrodes and then contact the fixed electrode 43 at the same time, thereby forming an electrode test circuit, and at the same time correspond to the paired movable Hall probes 51 and then contact the fixed Hall probe 52 at the same time, thereby forming a Hall probe test circuit. One of the samples can also be replaced with a standard sample as long as the electrode test circuit and the Hall probe test circuit are formed.

[0061] In a specific application example, all the fixing parts and supporting parts, including the lead block 13, the upper support plate 151 in the cavity, the lower support plate 152 in the cavity, the support rod 2, the isolation block 193, the support column 194, and the sample stage 3, etc., are all made of materials with a rigid shape, such as ceramics.

[0062] In this embodiment, taking the upright state of the support rod 2 as the standard, the movable electrode 41, the electrode wedge 42, and the fixed electrode 43 clamp the sample 9 in the horizontal direction, and the movable Hall probe 51 and the fixed Hall probe 52 clamp the sample 9 in the vertical direction. Therefore, the sample 9 is in the best test state in the shape of a cuboid.

[0063] Based on the above adaptive Hall measuring rod based on the thermal deformation of the sample, the embodiment of the present invention also provides an adaptive Hall measurement method based on the thermal deformation of the sample. The measurement method includes equipment installation, sample loading, sample testing, and sample unloading.

[0064] When performing equipment installation:

[0065] First, connect the lead block 13, the upper lead column 14, the wire threading cavity 15, the lower lead column 17, and the vacuum gauge joint 18 of the vacuum cavity 1;

[0066] Pass the support rod 2 successively through the lead block 13, the upper lead column 14, the upper support plate 151 in the cavity, the wire threading cavity 15, the lower support plate 152 in the cavity, the lower lead column 17, the vacuum gauge joint 18, the adjusting spring 191, the isolation block 193, the support column 194, the sample stage 3, and the end insulating part 195. A support rod adjusting nut 196 is sleeved at the end of the support rod 2; then, in the same way, pass the movable electrode 41 and the movable Hall probe 51 successively through the lead block 13, the upper lead column 14, the upper support plate 151 in the cavity, the compression spring 7, the force applying fixture 8, the wire threading cavity 15, the lower support plate 152 in the cavity, the lower lead column 17, the vacuum gauge joint 18, the hand-held part 192, the isolation block 193, the support column 194 to the sample stage 3. Pass the movable Hall probe 51 through the sample stage 3 to face the fixed Hall probe 52 fixed on the bottom surface of the sample stage. Pass the movable electrode 41 through the sample stage 3 to contact the horizontal plane of the electrode wedge 42 slidably connected to the sample stage 3, so that the vertical plane of the electrode wedge 42 faces the fixed electrode 43 fixed on the opposite side of the sample stage. At the same time, pass the thermocouple successively through the lead block 13, the upper lead column 14, the upper support plate 151 in the cavity, the wire threading cavity 15, the lower support plate 152 in the cavity, the lower lead column 17, the vacuum gauge joint 18, the hand-held part 192, the isolation block 193, the support column 194 to the sample stage 3;

[0067] Connect the lead cavity 12 and the lead port 11 to the lead block 13, place the leads of the movable electrode 41, the movable Hall probe 51 and the thermocouple 6 in the lead cavity 12, and connect and seal them to the external measuring device through the lead port 11; sleeve the tail-end insulator 195 at the lower end of the support rod and the lower side of the sample stage, and then connect the support rod adjusting nut 196 at the end.

[0068] After the sample stage 3 holds the sample, sleeve the test cavity 19 at the vacuum gauge joint 18, so that the connecting part of the support rod below the vacuum gauge joint extends into the test cavity 19; connect the required atmosphere or vacuum pump at the gas exchange hole 16 according to the atmosphere requirement.

[0069] When loading or clamping the sample, the specific operations are as follows:

[0070] Step S1, move the movable electrode 41 and the movable Hall probe 51 through the handheld part 192 to compress the compression spring 7; temporarily fix the movable electrode 41 and the movable Hall probe 51 through the force-applying fixture 8 to make more space for the sample to be measured 9.

[0071] Step S2, place the sample 9 so that two samples (or one sample and one standard sample) are supported on the fixed Hall electrode 52, located between the two movable Hall probes 51 and the fixed Hall probe 52, and at the same time located between the two electrode wedges 42 and the fixed electrode 43.

[0072] Step S3, release the temporarily fixed movable electrode 41 and movable Hall probe 51 respectively, so that the movable electrode 41, the electrode wedge 42 and the fixed electrode 43 clamp the sample 9 in the horizontal direction, and at the same time the movable Hall probe 51 and the fixed Hall probe 52 clamp the sample 9 in the vertical direction.

[0073] Step S4, sleeve the test cavity 19 from the adjusting nut 196 at the tail end of the support rod up to the vacuum gauge joint 18, seal the lead port 11 of the lead cavity 12, and at the same time lead out the leads of the movable electrode, the movable Hall probe and the thermocouple; seal the gas exchange port 16 or connect to the corresponding gas cylinder or connect to the vacuum pump.

[0074] Through the above steps, the sample loading is completed.

[0075] When performing sample testing:

[0076] Connect the leads of the movable electrode, the movable Hall probe and the thermocouple on the upper side of the lead cavity 12 to the test platform; place the test cavity 19 in the heating device to perform the sample deformation test at high temperature. The test platform is an external signal acquisition device, and the external signal acquisition device includes a voltmeter, a power meter and a computer, etc.

[0077] When the sample deforms at high temperature, in the vertical direction, the expansion of the sample 9 will push the movable Hall probe 51 upward. At this time, the force - applying fixture 9 fixed on the movable Hall probe 51 in the threading cavity 15 compresses the compression spring 7. The reaction force of the compression spring 7 causes the movable Hall probe 51 to exert a reaction force on the sample 9. At this time, the movable Hall probe 51 and the fixed Hall probe 52 clamp the sample in the vertical direction; in the horizontal direction, the expansion of the sample 9 pushes the electrode wedge 42 to slide upward along the inclined side of the groove, thereby driving the movable electrode 41 in contact connection with the horizontal plane of the electrode wedge 42 to move upward. At this time, the force - applying fixture 8 fixed on the movable electrode in the threading cavity 15 compresses the compression spring 7. The reaction force of the compression spring 7 causes the movable electrode 41 to exert a reaction force on the electrode wedge 42 and transmit it to the sample. At this time, the electrode wedge 42 and the fixed electrode 43 clamp the sample 9 in the horizontal direction. Thus, the stable clamping of the sample during high - temperature measurement is ensured.

[0078] Before replacing the vacuum or inert gas environment, first place the Hall measurement rod on the corresponding bracket, place the sample stage on the Hall measurement rod in the heating furnace, and make the plane of the sample stage for placing the measured sample perpendicular to the strong magnetic field; after replacing the vacuum or inert gas environment, connect the external device, control the temperature of the heating furnace, the direction of the magnetic field, the direction of the current, and collect the Hall signal, etc.

[0079] When replacing or unloading the sample:

[0080] After the test cavity has cooled down, remove the vacuum or protective gas environment, stably place the Hall measurement rod on the operation table surface, unscrew the vacuum gauge tube joint, and remove the test cavity; move the movable electrode and the movable Hall probe, and push the force - applying fixture a small distance towards the compression spring. At this time, the sample is no longer stressed, and use tools such as tweezers to remove the sample. If replacing the sample, perform sample loading according to the sample loading process; or if unloading the sample after the test, place a standard gasket at the sample position, then socket the test cavity, and put away the Hall measurement rod.

[0081] In the process of continuous temperature - varying measurement, the principle of maintaining stable contact between the measured sample and the electrode / probe is as follows:

[0082] First of all, the compression spring 7 is kept in a compressed state, and both the movable electrode and the movable Hall probe maintain a pressure towards the sample stage direction;

[0083] On the one hand, the pressure of the movable electrode is transmitted to the electrode wedge; due to the cooperation of the electrode wedge with the inclined - angle structure on the sample stage, part of the pressure is decomposed to form a lateral pressure acting on the sample. The measured sample moves laterally and contacts the fixed electrode, so that the measured sample is laterally stressed and remains stable;

[0084] On the other hand, the pressure of the movable Hall probe directly acts on one side of the sample to be measured, causing the sample to be measured to move longitudinally and come into contact with the fixed Hall probe, so that the sample to be measured is longitudinally stressed and remains stable;

[0085] Finally, the electrode wedge, the fixed electrode, the movable Hall probe, and the fixed Hall probe are in square contact with the sample and maintain contact friction, so that the sample is stably fixed on the sample stage; due to the pressure of the compression spring on the movable Hall probe and the movable Hall probe being basically unchanged, when the sample to be measured, the ceramic sample stage, etc. are deformed by heat, the corresponding electrodes, probes, and the sample to be measured automatically adjust their positions to maintain stable contact.

[0086] During the continuous temperature change process, the principle of realizing stable contact between the sample to be measured and the electrode / probe is as Figure 5 shown: The structure of the electrode / probe cooperates with the sample stage, so that the electrode wedge 42, the fixed electrode 43, the movable Hall probe 51, and the fixed Hall probe 52 apply pressures in four directions to the sample to be measured, keeping the sample stable, namely F 12 , F 12 * , F2, F2 * . Among them, the relative positions of the action points of F 12 and F2 on the sample stage can be automatically adjusted with the thermal deformation of the sample to be measured.

[0087] It can be seen from the above technical solutions that the present invention provides an adaptive Hall measuring rod and measuring method based on the thermal deformation of the sample, enabling the sample to maintain stable and good contact with the electrode / probe when thermal deformation occurs in a variable temperature environment; after one pressure adjustment, even if different operators use it, the forces on each sample to be measured will remain stable, ensuring the accuracy and high precision of the test; the sample placement step of the Hall measuring rod in the present invention is simple; two samples can be measured simultaneously during one temperature change, improving the test efficiency.

[0088] The above description is only the preferred embodiment of the present invention and the explanation of the applied technical principles, and is not intended to limit the scope of the present invention claimed, but only represents the preferred embodiments of the present invention. Those skilled in the art should understand that the scope of the invention involved in the present invention is not limited to the technical solutions formed by the specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of protection of the present invention.

Claims

1. An adaptive Hall measuring rod based on the thermal deformation of a sample, characterized in that The Hall measurement rod includes: a vacuum cavity, a support rod, a sample stage, electrodes, Hall probes, thermocouples, compression springs, and force - applying fixtures; where The vacuum cavity is a sealed cavity, which successively includes a lead port, a lead cavity, a lead block, an upper lead post, a wire - passing cavity, a ventilation hole, a lower lead post, a vacuum gauge connector, and a test cavity from top to bottom; the wire - passing cavity has a rectangular cross - section, and an upper in - cavity support plate and a lower in - cavity support plate are symmetrically arranged on the upper and lower sides inside. The electrodes include a pair of movable electrodes, a pair of electrode wedges, and a fixed electrode; the Hall probes include a pair of movable Hall probes and a fixed Hall probe; the fixed Hall probe is fixed to the bottom surface of the sample stage through a fixed probe mounting hole, and the movable Hall probe passes downward from the lead cavity through the lead block, the upper lead post, the wire - passing cavity, the lower lead post, the vacuum gauge connector and extends into the test cavity, passes through the movable probe through - hole of the sample stage, and faces the fixed Hall probe; the movable electrode passes downward from the lead cavity through the lead block, the upper lead post, the wire - passing cavity, the lower lead post, the vacuum gauge connector and extends into the test cavity, passes through the movable electrode through - hole of the sample stage, and contacts the electrode wedge arranged on the inclined surface of the sample stage; the fixed electrode is arranged on the opposite side of the electrode wedge. On the movable electrode and the movable Hall probe inside the wire - passing cavity, a compression spring and a force - applying fixture are respectively arranged. One end of the compression spring is supported on the lower surface of the upper in - cavity support plate. The compression spring is respectively sleeved on the movable electrode and the movable Hall probe, and the other end of the compression spring is fixed on the force - applying fixture, and the force - applying fixture is respectively fixed on the movable electrode and the movable Hall probe.

2. The self - adaptive Hall measurement rod based on sample thermal deformation according to claim 1, wherein The support rod is arranged inside the vacuum cavity, passes through the lead block, the upper lead post, the wire - passing cavity, the lower lead post, the vacuum gauge connector from the bottom of the lead cavity to the lower end of the test cavity, and is provided with a tail - end insulator and a support - rod adjusting nut after passing through the sample stage. Inside the test cavity, the support rod is successively provided with an adjusting spring, an isolation block, a sample stage, a tail - end insulator, and a support - rod adjusting nut from top to bottom. The sample stage is arranged inside the test cavity; the sample stage is provided with a pair of support - column through - holes, and symmetrically arranged with the center - line connection of the two support - column through - holes as the symmetry axis are a movable - electrode through - hole, a movable - probe through - hole, a thermocouple through - hole, a fixed - electrode mounting hole, a fixed - probe mounting hole, and an inclined - wedge surface.

3. The self - adaptive Hall measurement rod based on sample thermal deformation according to claim 2, wherein The outer shape of the test cavity is cylindrical; the sample stage is cylindrical, and its outer diameter is smaller than the inner diameter of the test cavity; the isolation block is cylindrical, and its outer diameter is smaller than the inner diameter of the test cavity, and it is provided with a support - rod through - hole, a movable - electrode through - hole, a movable - probe through - hole, and a thermocouple through - hole.

4. The adaptive Hall measuring rod based on the thermal deformation of the sample according to claim 1, wherein The ventilation holes are symmetrically arranged on both sides of the middle waist of the wire - passing cavity.

5. The adaptive Hall measuring rod based on the thermal deformation of the sample according to claim 3, wherein, In the area of the test cavity where the adjusting spring is arranged, hand - held parts are arranged on the corresponding movable electrode, movable Hall probe, and thermocouple.

6. The adaptive Hall measuring rod based on the thermal deformation of the sample according to claim 5, wherein, The lead cavity has upper and lower detachable sealing flanges. The upper side is provided with a lead port for inserting a support rod, a movable electrode, a movable Hall probe, and a thermocouple. The lower side is open and docked with a lead block, which is then in snap-fit connection with the upper lead column; the movable electrode lead, the movable Hall probe lead, and the thermocouple lead after threading are left in the lead cavity; from the lead block, the upper lead column, the upper support plate in the cavity of the threading cavity, the upper support plate in the cavity to the lower lead column, as well as the isolation block and the sample stage, there are support post through holes, contact electrode through holes, probe through holes, and thermocouple through holes with the same position and aperture.

7. The adaptive Hall measurement rod based on the thermal deformation of the sample according to claim 6, characterized in that The lead block, the upper support plate in the cavity, the lower support plate in the cavity, the support rod, the isolation block, the support post, and the sample stage are all made of an insulating and heat-insulating material with a rigid shape.

8. An adaptive Hall measurement method based on the thermal deformation of a sample, characterized in that, Measurement is performed using the Hall measuring rod according to any one of claims 1-7; the measurement method includes equipment installation, sample loading, sample testing, and sample unloading; wherein, When performing equipment installation: Connect the lead block, the upper lead column, the threading cavity, the lower lead column, and the vacuum gauge joint of the vacuum cavity; install the support rod, the movable electrode, the movable Hall probe, and the thermocouple; connect the lead cavity and the lead port to the lead block, place the leads of the movable electrode, the movable Hall probe, and the thermocouple in the lead cavity, and connect and seal them to the external measuring equipment through the lead port; sleeve the tail-end insulating member on the lower end of the support rod and the lower side of the sample stage, and then connect the support rod adjusting nut to the end; When performing sample loading: Clamp the sample between the movable Hall probe and the fixed Hall probe, so that the sample contacts the fixed electrode on the front side and the vertical surface of the electrode wedge on the rear side at the same time; After sample loading and before testing, sleeve the test cavity at the vacuum gauge joint, so that the connection part of the support rod below the vacuum gauge joint extends into the test cavity; maintain the vacuum cavity to provide vacuum or protective atmosphere according to the test requirements; When performing sample testing: Connect the leads of the movable electrode, the movable Hall probe, and the thermocouple on the upper side of the lead cavity to the test platform; place the test cavity in a heating device to perform deformation testing of the sample at high temperature; When performing sample unloading: After the test cavity has cooled down, remove the vacuum or protective atmosphere, stably place the Hall measuring rod on the operating table, unscrew the vacuum gauge joint, and remove the test cavity; move the movable electrode and the movable Hall probe, and push the force-applying fixture a short distance towards the compression spring. At this time, the sample is no longer stressed, and use tweezers to remove the sample.

9. The adaptive Hall measurement method based on the thermal deformation of a sample according to claim 8, wherein When clamping the sample, the specific operation is as follows: Step S1, move the movable electrode and the movable Hall probe through the hand-held part to compress the compression spring; temporarily fix the movable electrode and the movable Hall probe through the force-applying fixture to create more space for the sample to be measured; Step S2, place the sample so that the two samples are supported on the fixed Hall electrode, located between the two movable Hall probes and the fixed Hall probe, and at the same time between the two electrode wedges and the fixed electrode; Step S3, release the temporarily fixed movable electrode and movable Hall probe respectively, so that the movable electrode, the electrode wedge, and the fixed electrode clamp the sample in the horizontal direction, and at the same time the movable Hall probe and the fixed Hall probe clamp the sample in the vertical direction; Step S4, sleeve the adjustment nut at the rear end of the support rod of the test chamber upward to the vacuum gauge joint, seal the lead port of the lead chamber, and connect the movable electrode, movable Hall probe and thermocouple lead wires; seal the ventilation port and connect to the protective atmosphere or vacuum.

10. The adaptive Hall measurement method based on the thermal deformation of the sample according to claim 8, characterized in that, When conducting sample testing, it further includes: When the sample is deformed at high temperature, in the vertical direction, the expansion of the sample pushes the movable Hall probe to move upward. At this time, the force-applying fixture fixed on the movable Hall probe in the threading cavity compresses the compression spring, and the reaction force of the compression spring causes the movable Hall probe to apply a reaction force on the sample. At this time, the movable Hall probe and the fixed Hall probe clamp the sample in the vertical direction; in the horizontal direction, the expansion of the sample pushes the electrode wedge to slide upward along the inclined side surface of the groove, thereby driving the movable electrode that is in contact with the horizontal surface of the electrode wedge to move upward. At this time, the force-applying fixture fixed on the movable electrode in the threading cavity compresses the compression spring, and the reaction force of the compression spring causes the movable electrode to apply a reaction force on the electrode wedge and transmit it to the sample. At this time, the electrode wedge and the fixed electrode clamp the sample in the horizontal direction.

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