Light-transmitting window and optical subsystem

Abstract

The invention provides a light-transmitting window and an optical subsystem. The light inlet window comprises an upper layer and a lower layer; the upper layer comprises a plurality of rings with gradually increased radiuses, the plurality of rings are concentric, and the plurality of rings are combined to form a complete circle; the lower layer is a single circular light-transmitting window; and each ring of the upper layer is detachable and replaceable.

Description

Technical Field

[0001] The present invention relates to an optical system, and more particularly to a customizable light-transmitting window. Background Art

[0002] An optical subsystem generally includes a light-emitting component and a reflector portion. An important component in the light-emitting component is a UV lamp. In the process of using a UV lamp, optical uniformity is a determining factor affecting the process result, but some customers have special requirements for the process result, such as a low center film thickness value, or a high film thickness value for a certain circle, or a thick film thickness at a certain position, and a thin film thickness at certain positions, and so on.

[0003] Therefore, customizing the optical subsystem according to the needs of different customers is a topic of concern in the industry at present. Summary of the Invention

[0004] To solve the deficiencies in the prior art, the present invention provides a light-transmitting window and an optical subsystem.

[0005] The light-transmitting window includes: an upper layer and a lower layer.

[0006] The upper layer includes a plurality of concentric circles with increasing radii, and the plurality of circles combine to form a complete circle.

[0007] The lower layer is a single circular light-transmitting window.

[0008] Each circle of the upper layer is detachable and replaceable.

[0009] In one embodiment, the upper layer and the lower layer completely overlap.

[0010] In one embodiment, the material of the lower layer is high-transmission ultraviolet sapphire.

[0011] In one embodiment, the lower layer does not have a multi-layer structure.

[0012] In one embodiment, each of the plurality of circles can be composed of materials with different light transmittance.

[0013] In one embodiment, among the plurality of circles, an anti-reflection film is provided on the circle corresponding to the position where the light intensity is weak.

[0014] In one embodiment, each of the plurality of circles can have a customized shape.

[0015] The present invention also provides an optical subsystem, which includes: a light-emitting component and a light propagation device.

[0016] The light propagation device propagates the light source emitted by the light-emitting component to the wafer.

[0017] The light propagation device includes a light-transmitting window as described above.

[0018] In one embodiment, the light-emitting component includes a lamp tube, a microwave cavity, and a magnetron. The microwave cavity conducts the microwave emitted by the magnetron to the position where the lamp tube is located to resonate. The middle part of the lamp tube is in a cake shape or a spherical shape, and the center of the middle part is aligned with the center of the wafer. The light source output by the middle part is parallel light.

[0019] The light-transmitting window of the present invention adopts a double-layer structure, and the upper layer adopts a multi-layer structure, so that the process results can be adjusted according to the needs of different customers. For example, the central reflectivity should be low, or the reflectivity of a certain layer should be high, or the film thickness at a certain position should be thick, and the film thickness at some positions should be thin, etc., all of which can be achieved through the light-transmitting window of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above-described invention content of the present invention and the following specific embodiments will be better understood when read in conjunction with the accompanying drawings. It should be noted that the drawings are only examples of the claimed invention. In the drawings, the same reference numerals represent the same or similar elements.

[0021] Figure 1 Showing a schematic diagram of a part of the optical subsystem;

[0022] Figure 2 Showing a schematic diagram of a light-transmitting window according to an embodiment of the present invention;

[0023] Figure 3 Showing an exploded view of a light-transmitting window according to an embodiment of the present invention;

[0024] Figure 4A Showing a front view of a ring in the upper layer of a light-transmitting window according to an embodiment of the present invention;

[0025] Figure 4B Showing an overall schematic diagram of a ring in the upper layer of a light-transmitting window according to an embodiment of the present invention;

[0026] Figure 5 Showing the shape of a lamp tube according to an embodiment of the present invention;

[0027] Figure 6 Showing the shape of a lamp tube according to another embodiment of the present invention.

[0028] DESCRIPTION OF REFERENCE NUMERALS

[0029] 101 Lamp tube

[0030] 102 Microwave cavity

[0031] 103 Magnetron

[0032] 106 Light-transmitting window

[0033] 107 wafers

[0034] 201 upper layer

[0035] 202 lower layer

[0036] 301 antireflection film Detailed implementation manners

[0037] The detailed features and advantages of the present invention are described in detail in the following detailed implementation manners. The content is sufficient for any person skilled in the art to understand the technical content of the present invention and implement it accordingly. And according to the specification, claims and drawings disclosed in this specification, those skilled in the art can easily understand the related purposes and advantages of the present invention. Although the description of the present invention will be introduced in combination with the preferred embodiments, this does not mean that the features of this invention are limited to this implementation manner. On the contrary, the purpose of introducing the invention in combination with the implementation manner is to cover other alternatives or modifications that may extend based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusing or obscuring the key points of the present invention, some specific details will be omitted in the description.

[0038] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0039] In addition, the "upper", "lower", "left", "right", "top", "bottom", "horizontal", "vertical" used in the following description should be understood as the orientations shown in this paragraph and the related drawings. This relative term is only for the convenience of description, and it does not mean that the device described needs to be manufactured or operated in a specific orientation, so it should not be understood as a limitation to the present invention.

[0040] It can be understood that although the terms "first", "second", "third", etc. can be used here to describe various components, channels, components, regions, layers and / or parts, these components, channels, components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers and / or parts. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0041] As shown in this application and the claims, unless the context clearly indicates otherwise, words such as "a", "an", "one", and / or "the" are not specifically singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0042] In some embodiments, numbers are used to describe the components and attribute quantities. It should be understood that such numbers used in the description of the embodiments are, in some examples, modified by the modifiers "about", "approximate", or "substantially". Unless otherwise stated, "about", "approximate", or "substantially" indicate that the said numbers allow a variation of ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, and these approximate values may change according to the characteristics required by individual embodiments. In some embodiments, the numerical parameters should consider the specified significant digits and adopt the method of retaining the general number of digits. Although the numerical ranges and parameters used in some embodiments of this application to confirm the breadth of their scope are approximate values, in specific embodiments, such numerical settings are as precise as possible within the feasible range.

[0043] At the same time, this application uses specific words to describe the embodiments of this application. Such as "an embodiment", "one embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that the "an embodiment" or "one embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this specification is not necessarily the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.

[0044] Figure 1 A partial schematic diagram of the optical subsystem is shown. The optical subsystem generally includes a power controller (not shown), a light-emitting component, and a light propagation device.

[0045] The power controller provides power for the light-emitting component (the optical probe is also powered by the power controller), and real-time displays and monitors the light intensity value obtained by the light detection board. When the light intensity value is lower than the preset value, it self-feedback adjusts the output power of the power supply to adjust the light intensity of the light-emitting component.

[0046] The light-emitting component includes, but is not limited to, a lamp tube 101, a microwave cavity 102, and a magnetron 103.

[0047] The lamp tube 101 is used to provide a light source.

[0048] The light source includes visible light, infrared light, and / or ultraviolet light, etc.

[0049] In one embodiment, the lamp tube 101 emits ultraviolet light.

[0050] The microwave cavity 102 is a sheet metal structure that can conduct microwaves, and conducts the microwaves emitted by the magnetron 103 to the position where the lamp tube 101 is located to resonate.

[0051] The light propagation device includes an ultraviolet light-transmitting window 106.

[0052] The light-transmitting window 106 (ultraviolet light-transmitting window) is an optical component made of a special material. With its high transmittance to a specific ultraviolet wavelength band, good physical and chemical stability, and optical uniformity, it ensures that the UV lamp stably and accurately provides ultraviolet light to the wafer 107 in processes such as photolithography, which is crucial for the pattern transfer accuracy and product quality of chip manufacturing.

[0053] Figure 2 Shows a schematic diagram of a light-transmitting window according to an embodiment of the present invention.

[0054] Figure 3 Shows an exploded view of a light-transmitting window according to an embodiment of the present invention.

[0055] As Figure 2 and Figure 3 shown, the light-transmitting window of the present invention includes two layers: an upper layer 201 and a lower layer 202. The upper layer includes a plurality of circles with increasing radii. The plurality of circles are a detachable concentric circle structure. The plurality of circles combine to form a complete circle. The lower layer is a single circular light-transmitting window. The upper layer and the lower layer completely overlap.

[0056] In one embodiment, the light-transmitting window of the present invention can be an ultraviolet light-transmitting window.

[0057] It should be noted that each circle of the upper layer can be replaced separately.

[0058] The reason for this design is that in the UV process, the light intensity distribution is in a concentric circle distribution. Such an optical distribution will cause the ultraviolet light-transmitting window to receive strong light at some positions and weak light at some positions. Long-term strong ultraviolet irradiation will cause the ultraviolet light-transmitting window to generate color centers that absorb 215nm light. The more color centers, the lower the transmittance in the ultraviolet band, and the attenuation degrees caused by different light intensities are also different. Therefore, after a long time, the entire ultraviolet light-transmitting window needs to be replaced; while the present invention adopts a detachable multi-layer structure, so as long as the circle where the loss is located is replaced.

[0059] Furthermore, the outer light-transmitting window not only transmits light but also has the function of ensuring the cavity seal, and is easily damaged during use. Since the light-transmitting window of the present invention adopts a detachable multi-layer structure, only the outermost circle of the upper layer or the lower layer needs to be replaced, and there is no need to replace the entire light-transmitting window.

[0060] Further, in order to ensure the cavity sealing function of the light-transmitting window, the lower layer is designed as a single circular light-transmitting window and should not be designed as a multi-layer structure similar to the upper layer.

[0061] Further, in order to reduce the problem of easy breakage of the light-transmitting window, the lower layer can be made of high-strength materials.

[0062] Further, since each circle is independently designed, different designs can be made for the upper ultraviolet light-transmitting window to adjust the light path, and then the process results such as film thickness and film reflectivity can be adjusted to achieve customized process design.

[0063] In one embodiment, the material of the lower layer is high-transmittance ultraviolet sapphire.

[0064] Figure 4A A front view of a circle in the upper layer of the light-transmitting window according to an embodiment of the present invention is shown.

[0065] Figure 4B An overall schematic diagram of a circle in the upper layer of the light-transmitting window according to an embodiment of the present invention is shown.

[0066] As Figure 4A and Figure 4B shown, an anti-reflection film 301 is provided on this circle.

[0067] Due to the customized requirements of customers or according to the process results, the light-transmitting windows of each circle can be independently designed.

[0068] In one embodiment, materials with different light transmittances can be used for each circle to adjust the process results.

[0069] In one embodiment, an anti-reflection film can be added to the circle corresponding to the position where the light intensity is weak.

[0070] In one embodiment, a customized outer shape design is adopted for each circle to adjust the process results.

[0071] Therefore, the light-transmitting window of the present invention can be customized for each circle, and the process results can be adjusted.

[0072] The middle part of the lamp tube of the light-emitting component of the present invention is in a disc shape or a spherical shape, and the center of the middle part is aligned with the center of the wafer. The light source output from the middle part is parallel light.

[0073] Figure 5 A lamp tube shape according to an embodiment of the present invention is shown, wherein the middle part of the lamp tube is spherical. Figure 5 The shown lamp tube view is Figure 1 a top view of the lamp tube 101 in

[0074] Figure 6 A lamp tube shape according to another embodiment of the present invention is shown, wherein the middle part of the lamp tube is in a disc shape. FigureFigure 6 The shown view of the lamp tube is Figure 1 the top view of the lamp tube 101 in

[0075] The lamp tube of the present invention is in a pie shape or a spherical shape, so that the lamp tube can directly generate light intensity distributed in concentric circles without rotation. Compared with the strip-shaped lamp tubes in the prior art, since the lamp tube of the present invention does not require a rotating mechanism, the structure of the optical subsystem is simplified, and the problem of asymmetry in the single-chamber process result can be solved at the root.

[0076] The terms and expressions used above are only for description, and the present invention should not be limited to these terms and expressions. Using these terms and expressions does not mean excluding any equivalent features of the illustration and description (or parts thereof). It should be recognized that various possible modifications should also be included within the scope of the claims. Other modifications, variations and substitutions may also exist. Accordingly, the claims should be regarded as covering all such equivalents.

[0077] Similarly, it should be noted that, in order to simplify the presentation of the disclosure of the present application and thus help the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of the present application, sometimes multiple features are grouped into one embodiment, drawing or description thereof. However, this method of disclosure does not mean that the features required by the subject matter of the present application are more than those mentioned in the claims.

[0078] Likewise, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, those of ordinary skill in the art in this technical field should recognize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions can be made without departing from the spirit of the present invention. Therefore, as long as the changes and variations of the above embodiments are within the scope of the spirit of the present invention, they will fall within the scope of the claims of the present application.

Claims

1. A light-transmitting window, characterized in that, The light-transmitting window includes: an upper layer and a lower layer; the upper layer includes a plurality of circles with increasing radii, the plurality of circles are concentric, and the plurality of circles combine to form a complete circle; the lower layer is a single circular light-transmitting window; each circle of the upper layer is detachably replaceable; 2. The light-transmitting window according to claim 1, wherein, the upper layer and the lower layer completely overlap; 3. The light-transmitting window according to claim 1, wherein the material of the lower layer is highly transparent ultraviolet sapphire; 4. The light-transmitting window according to claim 1, wherein the lower layer does not have a multi-layer structure; 5. The light-transmitting window according to claim 1, characterized in that, each of the plurality of circles can be composed of materials with different light transmittance; 6. The light-transmitting window according to claim 1, wherein among the plurality of circles, an anti-reflection film is provided on the circle corresponding to the position where the light intensity is weak; 7. The light-transmitting window according to claim 1, characterized in that, each of the plurality of circles can have a customized shape; 8. An optical subsystem, characterized in that, the optical subsystem includes: a light-emitting component and a light propagation device; the light propagation device propagates the light source emitted by the light-emitting component to the wafer; the light propagation device includes the light-transmitting window according to any one of claims 1 to 7.

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