Control system for plasma generator

Abstract

The invention relates to the field of plasma generator control, in particular to a control system for a plasma generator, and the system comprises an information acquisition module which is used for monitoring the first working information of a target plasma generator in real time; the first energy efficiency ratio calculation module is used for calculating a first energy efficiency ratio EER of the target plasma generator according to the first working information; the first judgment module is used for presetting a standard energy efficiency ratio and judging whether the first energy efficiency ratio EER is higher than the standard energy efficiency ratio or not; compared with a traditional calculation method, the energy efficiency ratio calculation formula provided by the invention not only considers the performance parameters of a plurality of core components, but also considers the mutual influence among the parameters, so that the precision of the energy efficiency ratio of the plasma generator calculated by the method is higher, and the calculation accuracy is higher. Therefore, the power of each core component can be adjusted in the later period.

Description

Technical Field

[0001] The present invention relates to the field of plasma generator control, and specifically to a control system for a plasma generator. Background Art

[0002] A plasma generator is a device that can convert gas into a plasma state through a specific method, and has a wide range of applications in the fields of industry, environmental protection, medical treatment, scientific research, etc. The plasma generator ionizes gas molecules or atoms by applying a high voltage, high-frequency electromagnetic field or microwave energy to the gas, forming a plasma composed of free electrons, ions and neutral particles. In this process, after the gas absorbs energy, the electrons obtain sufficient kinetic energy to break away from the bondage of the atomic nucleus, generating an ionization effect, and forming a plasma with high electrical conductivity, high chemical reaction activity and strong electromagnetic response characteristics.

[0003] The traditional method for calculating the energy efficiency ratio of a plasma generator only calculates it through the ratio of the effective power of the plasma to the total input power, without considering the mutual influence of multiple core parameters such as power supply efficiency, gas ionization efficiency, heat loss, and plasma confinement stability. This leads to inaccurate calculation results of the energy efficiency ratio, and further affects the control accuracy of each core component of the plasma generator, which is not conducive to improving the overall energy efficiency ratio of the plasma generator. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the present invention provides a control system for a plasma generator, which solves the technical problems in the above background art.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A control system for a plasma generator, comprising:

[0007] An information acquisition module, which is used to monitor the first working information of the target plasma generator in real time;

[0008] A first energy efficiency ratio calculation module, which is used to calculate the first energy efficiency ratio of the target plasma generator according to the first working information ;

[0009] A first judgment module, which is used to preset a standard energy efficiency ratio and judge the first energy efficiency ratio whether it is higher than the standard energy efficiency ratio;

[0010] If so, it means that the target plasma generator is in a high energy efficiency interval, and the process ends;

[0011] If not, it means that the target plasma generator is not in a high energy efficiency interval, and enters the first adjustment module;

[0012] The first adjustment module is used to construct a plurality of adjustment first energy efficiency ratios. The standby adjustment scheme is selected, and the first energy efficiency ratio is selected The pre-selected adjustment plan with the largest amount of change;

[0013] A second judgment module, the second judgment module is used to judge whether the pre-selected adjustment solution is feasible;

[0014] If so, the pre-selected adjustment plan will be used as the final adjustment plan;

[0015] If not, the pre-selected adjustment scheme is deleted and the process returns to the first adjustment module;

[0016] The second adjustment module is used to adjust the first working information of the target plasma generator according to the determined adjustment scheme.

[0017] Furthermore, in the information acquisition module, the first working information includes the total power input, the effective power actually consumed by the plasma generator, the number of ionized particles, the ionization energy of a single particle, the ionization time, the total power input energy, the power generated by the plasma, the effective power of the plasma and the ambient temperature.

[0018] Furthermore, in the first energy efficiency ratio calculation module, the following specific steps are included:

[0019] S21. Calculate the power efficiency based on the total power input and the effective power actually consumed by the plasma generator. , and its calculation formula is:

[0020]

[0021] In the formula, Indicates the effective power actually consumed by the plasma generator; Indicates the total power input power;

[0022] S22. Calculate the basic gas ionization efficiency based on the number of ionized particles, the ionization energy of a single particle, the ionization time and the total energy of the power input ;

[0023] S23. Calculate the plasma confinement stability based on the plasma confinement time and the uniformity of the plasma density distribution , and its calculation formula is:

[0024]

[0025] In the formula, represents the confinement time of plasma; Indicates the uniformity of the plasma density distribution; Indicates the theoretical maximum confinement time; Indicates the theoretical uniformity coefficient;

[0026] S24. Calculate the basic heat loss power based on the power input to the power supply, the plasma generation power, and the plasma effective power , and its calculation formula is:

[0027]

[0028] In the formula, Indicates the power generated by the plasma; Indicates the plasma effective power;

[0029] S25. Correct the basic gas ionization efficiency and the basic heat loss power according to the plasma confinement stability to obtain the corrected gas ionization efficiency and the corrected heat loss power ;

[0030] S26. Calculate the first energy efficiency ratio according to the power supply efficiency , the corrected gas ionization efficiency , the corrected heat loss power , and the plasma confinement stability .

[0031] Furthermore, in step S22, it specifically includes the following steps:

[0032] S221. Calculate the energy required for ionization based on the number of ionized particles, the ionization energy of a single particle, and the ionization time , and its calculation formula is:

[0033]

[0034] In the formula, Indicates the number of ionized particles; Indicates the ionization energy of a single particle; Indicates the ionization time;

[0035] S222. Calculate the basic gas ionization efficiency according to the energy required for ionization and the total energy input to the power supply, and its calculation formula is:

[0036]

[0037] In the formula, Indicates the total energy input to the power supply.

[0038] Further, in step S25, the ionization efficiency of the base gas is corrected according to the following formula:

[0039]

[0040] The correction formula for the base heat loss power is as follows:

[0041]

[0042] In the formula, represents the suppression coefficient of plasma confinement on heat loss.

[0043] Further, in step S26, the formula for the first energy efficiency ratio is as follows:

[0044]

[0045] In the formula, represents the ambient temperature; represents the maximum temperature allowed by the system; represents the suppression coefficient of heat loss on the power supply efficiency; represents the correction coefficient of ambient temperature on the power supply efficiency.

[0046] Further, in the first adjustment module, the following steps are specifically included:

[0047] S41. Obtain the power supply efficiency , the corrected gas ionization efficiency , the corrected heat loss power , the plasma confinement stability and the third energy efficiency ratio of the target plasma generator in the past time period; ;

[0048] S42. Use the method of controlling variables to adjust the power supply efficiency , the corrected gas ionization efficiency , the corrected heat loss power , the plasma confinement stability respectively, and construct a training parameter set;

[0049] S43. Calculate the change in the corresponding third energy efficiency ratio according to the training parameter set, and construct a sample label;

[0050] S44. Use the training samples and sample labels to train the long short-term memory network to obtain the target model;

[0051] S44. Input the power efficiency , corrected gas ionization efficiency , corrected heat loss power , plasma confinement stability , and the first energy efficiency ratio of the target plasma generator during the time period into the target model, and output the second energy efficiency ratio and the corresponding source efficiency in descending order according to the change amount. Then, input the corrected gas ionization efficiency , corrected heat loss power , plasma confinement stability , and the adjustment values of the above parameters into the target model, and mark them as the adjustment plan to be used;

[0052] Power efficiency Corrected gas ionization efficiency Corrected heat loss power Plasma confinement stability And the first energy efficiency ratio Input into the target model, and output the second energy efficiency ratio and the corresponding source efficiency in descending order according to the change amount. Then, input the corrected gas ionization efficiency , corrected heat loss power , plasma confinement stability , and the adjustment values of the above parameters into the target model, and mark them as the adjustment plan to be used; Corrected gas ionization efficiency Corrected heat loss power Plasma confinement stability Adjustment values, and mark them as the adjustment plan to be used;

[0052] S45. Select the second energy efficiency ratio with the highest change amount and the corresponding source efficiency , corrected gas ionization efficiency , corrected heat loss power , plasma confinement stability adjustment values as the preliminary adjustment plan.

[0053] Corrected gas ionization efficiency Corrected heat loss power Plasma confinement stability Adjustment values as the preliminary adjustment plan.

[0053] Furthermore, in the second judgment module, it includes the following specific steps:

[0054] S51. Preset the effective intervals of all category information in the first working information;

[0055] S52. Calculate the adjusted second working information according to the preliminary adjustment plan;

[0056] S53. Judge whether the information of each category in the second working information is within the effective interval;

[0057] If so, it means the preliminary adjustment plan is feasible;

[0058] If not, it means the preliminary adjustment plan is not feasible.

[0059] Compared with the prior art, the present invention provides a control system for a plasma generator, having the following beneficial effects:

[0060] 1. The calculation formula of the energy efficiency ratio proposed in the present invention, compared with the traditional calculation method, not only considers the performance parameters of multiple core components, but also takes into account the mutual influence between these parameters. Therefore, the accuracy of the energy efficiency ratio of the plasma generator calculated by the present invention is higher, which is convenient for adjusting the power of each core component in the later stage.

[0061] 2. When selecting adjustment schemes, the present invention takes into account the mutual influence among multiple factors, which can effectively improve the accuracy of calculating the energy efficiency ratio of each adjustment scheme. In addition, for the multiple automatically generated adjustment schemes, the system can select the adjustment scheme with the highest energy efficiency ratio according to rationality. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] The drawings described herein are used to provide a further understanding of the present application and form a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application. In the drawings:

[0063] Figure 1 is a flowchart of a control system for a plasma generator according to the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0064] To make the above objects, features, and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the drawings and specific embodiments. Thereby, a full understanding of the implementation process of how the present application uses technical means to solve technical problems and achieve technical effects can be obtained and implemented accordingly.

[0065] Those of ordinary skill in the art can understand that all or part of the steps in the following embodiment methods can be completed by instructing relevant hardware through a program. Therefore, the present application can adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present application can adopt the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk memories, CD-ROMs, optical memories, etc.) containing computer-usable program codes.

[0066] A plasma generator generally includes a power supply system, a gas supply system, a plasma reaction chamber, an electrode system, a cooling system, a vacuum system, a control system, and a detection and diagnosis system. Among them, the functions of the core components of the above plasma generator are as follows:

[0067] Power supply system: Provide the energy required to ionize the gas;

[0068] Gas supply system: Provide the working gas (inert / reactant gas) and control the flow rate;

[0069] Plasma reaction chamber: The gas is ionized here to form a plasma;

[0070] Electrode system: Apply an electric field to break down and ionize the gas;

[0071] Cooling system: Prevent the electrodes and the reaction chamber from overheating;

[0072] Central controller: Adjust parameters such as power, gas flow, and pressure to achieve stable discharge;

[0073] Vacuum system: Maintain a low pressure in the reaction chamber to improve ionization efficiency;

[0074] Monitoring and diagnostic system: Analyze the plasma state in real time;

[0075] Each core component cooperates with each other under the management of the central controller to generate high-energy charged particles (ions, electrons) and active particles (radicals, excited molecules, etc.) to achieve applications in fields such as industry, semiconductor electronics industry, medical biology, and aerospace energy.

[0076] In addition to achieving stable discharge, the central controller also needs to reduce the energy consumption of the entire system and improve the energy efficiency ratio on the premise of ensuring the ionization effect. For this purpose, please refer to Figure 1 As shown, the present invention proposes a control system for a plasma generator, including an information acquisition module, a first energy efficiency ratio calculation module, a first judgment module, a first adjustment module, a second judgment module, and a second adjustment module, where:

[0077] The information acquisition module is used to monitor the first working information of the target plasma generator in real time; specifically, the common calculation method of the energy efficiency ratio of a plasma generator is to directly calculate through the effective power of the plasma and the total input power, and its calculation formula is:

[0078]

[0079] In the formula, represents the energy efficiency ratio of the plasma generator; represents the effective power of the plasma; represents the total input power of the plasma generator (including power supply efficiency, basic gas ionization efficiency, and heat loss, etc.);

[0080] However, the energy efficiency ratio of the plasma generator is comprehensively affected by multiple core components, including the working efficiency of the power supply system, plasma reaction chamber, cooling system, and electrode system. Therefore, in the information acquisition module, the first working information includes the total input power of the power supply, the effective power actually consumed by the plasma generator, the number of ionized particles, the ionization energy of a single particle, the ionization time, the total input energy of the power supply, the power generated by the plasma, the effective power of the plasma, and the ambient temperature.

[0081] The first energy efficiency ratio calculation module is used to calculate the first energy efficiency ratio of the target plasma generator according to the first working information ; specifically, in the first energy efficiency ratio calculation module, the following specific steps are included:

[0082] S21. Calculate the power supply efficiency based on the total input power of the power supply and the effective power actually consumed by the plasma generator , and its calculation formula is:

[0083]

[0084] In the formula, represents the effective power actually consumed by the plasma generator; represents the total input power of the power supply;

[0085] S22. Calculate the ionization efficiency of the base gas according to the number of ionized particles, the ionization energy of a single particle, the ionization time, and the total input energy of the power supply ; specifically, in step S22, it specifically includes the following steps:

[0086] S221. Calculate the energy required for ionization according to the number of ionized particles, the ionization energy of a single particle, and the ionization time , and its calculation formula is:

[0087]

[0088] In the formula, represents the number of ionized particles; represents the ionization energy of a single particle; represents the ionization time;

[0089] S222. Calculate the ionization efficiency of the base gas according to the energy required for ionization and the total input energy of the power supply , and its calculation formula is:

[0090]

[0091] In the formula, represents the total input energy of the power supply.

[0092] S23. Calculate the plasma confinement stability according to the confinement time of the plasma and the uniformity of the plasma density distribution , and its calculation formula is:

[0093]

[0094] In the formula, represents the confinement time of the plasma; represents the uniformity of the plasma density distribution; represents the theoretical maximum confinement time; represents the theoretical uniformity coefficient;

[0095] S24. Calculate the basic heat loss power according to the input power of the power supply, the plasma generation power, and the plasma effective power , and its calculation formula is:

[0096]

[0097] In the formula, represents the power generated by the plasma; represents the effective power of the plasma;

[0098] S25. According to the plasma confinement stability correct the ionization efficiency of the base gas and the base heat loss power to obtain the corrected gas ionization efficiency and the corrected heat loss power ; specifically, since the energy efficiency ratio of the plasma generator is jointly affected by these parameters such as power supply efficiency, heat loss, gas ionization efficiency, and plasma confinement stability, and these parameters do not act independently but interact with each other through complex physical coupling, any change in any link may affect the overall situation. Therefore, in step S25, the calculation formula for correcting the ionization efficiency of the base gas is:

[0099]

[0100] The calculation formula for correcting the base heat loss power is:

[0101]

[0102] In the formula, represents the suppression coefficient of the plasma confinement on the heat loss; in the present invention, is 0.35.

[0103] S26. Calculate the first energy efficiency ratio according to the power supply efficiency , the corrected gas ionization efficiency , the corrected heat loss power and the plasma confinement stability ; specifically, since the energy efficiency ratio of the plasma generator is jointly affected by multiple factors. For example: (1) Power supply parameters (voltage, frequency) affect the gas ionization efficiency, but the particle density after ionization in turn changes the plasma impedance, thereby affecting the power supply matching; (2) Gas flow cools the motor (reducing heat loss), but excessive gas flow will dilute the plasma density and reduce the ionization efficiency; (3) Magnetic field confinement can improve the plasma stability, but the energy consumption of the magnetic field coil may offset its benefits; therefore, in step S26, the calculation formula for the first energy efficiency ratio is:

[0104]

[0105] In the formula, Indicates the ambient temperature; Indicates the maximum temperature allowed by the system; Indicates the suppression factor of heat loss on power efficiency; represents the correction coefficient of ambient temperature to power efficiency; in the present invention, and They are 0.26 and 0.13 respectively; is a custom parameter;

[0106] Compared with the traditional calculation method, the calculation formula of the energy efficiency ratio proposed in step S2 of the present invention not only takes into account the performance parameters of multiple core components, but also takes into account the mutual influence between these parameters. Therefore, the energy efficiency ratio of the plasma generator calculated by the present invention is more accurate, which is convenient for adjusting the power of each core component in the later stage.

[0107] The first judgment module is used to preset a standard energy efficiency ratio and judge the first energy efficiency ratio Whether it is higher than the standard energy efficiency ratio;

[0108] If yes, it means that the target plasma generator is in a high energy efficiency range, and the process ends;

[0109] If not, it means that the target plasma generator is not in the high energy efficiency range, and enters the first adjustment module; specifically, the standard energy efficiency ratio is a custom parameter;

[0110] The first adjustment module is used to construct a plurality of adjustment first energy efficiency ratios The standby adjustment scheme is selected, and the first energy efficiency ratio is selected The preselected adjustment scheme with the largest change amount; Specifically, in order to improve the energy efficiency ratio of the plasma generator, the parameters of each core component in the plasma generator can be adjusted. To this end, in the first adjustment module, the following steps are specifically included:

[0111] S41, obtaining the target plasma generator in the past time period Power efficiency , Correction gas ionization efficiency , Corrected heat loss power , plasma confinement stability And the third energy efficiency ratio ; Specifically, power efficiency , Correction gas ionization efficiency , Corrected heat loss power , plasma confinement stability And the third energy efficiency ratio Obtained by calculating through the method in step S2;

[0112] S42. Respectively adjust the power efficiency , calibrate the gas ionization efficiency , calibrate the heat loss power , plasma confinement stability by using the method of controlling variables, and construct a training parameter set;

[0113] S43. Calculate the change amount of the corresponding third energy efficiency ratio , and construct a sample label; Specifically, the sample label includes the change amount of the third energy efficiency ratio and the power efficiency , calibrate the gas ionization efficiency , calibrate the heat loss power , plasma confinement stability after the adjustment value in step S42;

[0114] S44. Use the training samples and sample labels to train the long short-term memory network to obtain a target model;

[0115] S44. Input the power efficiency , calibrate the gas ionization efficiency , calibrate the heat loss power , plasma confinement stability , and the first energy efficiency ratio of the target plasma generator in the time period into the target model, and output the second energy efficiency ratio and the corresponding source efficiency , calibrate the gas ionization efficiency , calibrate the heat loss power , plasma confinement stability adjustment values from high to low according to the change amount, and mark them as the adjustment schemes to be used;

[0116] S45. Select the second energy efficiency ratio with the highest change amount and the corresponding source efficiency , calibrate the gas ionization efficiency , calibrate the heat loss power , plasma confinement stability adjustment values as the preselected adjustment scheme.

[0117] In step S4 of the present invention, when selecting the adjustment scheme, the mutual influence between multiple factors is considered, which can effectively improve the accuracy of calculating the energy efficiency ratio of each adjustment scheme. In addition, for the multiple automatically generated adjustment schemes, the system can select the adjustment scheme with the highest energy efficiency ratio according to rationality.

[0118] The second judgment module is used to judge whether the preselected adjustment plan is feasible;

[0119] If so, the preselected adjustment plan is taken as the determined adjustment plan;

[0120] If not, the preselected adjustment plan is deleted, and the first adjustment module is returned; Specifically, in the second judgment module, the following specific steps are included:

[0121] S51. Preset the valid intervals of all category information in the first working information;

[0122] S52. Calculate the adjusted second working information according to the pre-adjustment plan; Specifically, the second working information is obtained by reverse calculation through the calculation formula in step S2;

[0123] S53. Judge whether the information of each category in the second working information is within the valid interval;

[0124] If so, it means that the preselected adjustment plan is feasible;

[0125] If not, it means that the preselected adjustment plan is not feasible.

[0126] The second adjustment module is used to adjust the first working information of the target plasma generator according to the determined adjustment plan; Specifically, the target plasma generator is adjusted according to the determined adjustment plan to improve its energy efficiency ratio, and considering the mutual influence among multiple factors, the control accuracy can be effectively improved.

[0127] The above embodiments have introduced the present invention in detail. Specific examples are used in this article to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; At the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A control system for a plasma generator, characterized in that, Including: An information acquisition module, which is used to monitor the first working information of the target plasma generator in real time. The first working information includes the total power input of the power supply, the effective power actually consumed by the plasma generator, the number of ionized particles, the ionization energy of a single particle, the ionization time, the total energy input of the power supply, the power generated by the plasma, the effective power of the plasma, and the ambient temperature; The first energy efficiency ratio calculation module is configured to calculate the first energy efficiency ratio of the target plasma generator according to the first working information ; The first judgment module, which is used to preset the standard energy efficiency ratio and judge whether the first energy efficiency ratio is higher than the standard energy efficiency ratio; If so, it means that the target plasma generator is in the high energy efficiency range, and the process ends; If not, it means that the target plasma generator is not in the high energy efficiency range, and enters the first adjustment module; The first adjustment module is used to construct a plurality of adjustment first energy efficiency ratios. The standby adjustment scheme is selected, and the first energy efficiency ratio is selected The pre-selected adjustment plan with the largest amount of change; A second judgment module, which is used to judge whether the preselected adjustment plan is feasible; If so, use the preselected adjustment plan as the determined adjustment plan; If not, delete the preselected adjustment plan and return to the first adjustment module; A second adjustment module, which is used to adjust the first working information of the target plasma generator according to the determined adjustment plan.

2. The control system according to claim 1, wherein In the first energy efficiency ratio calculation module, the following specific steps are included: S21. Calculate the power supply efficiency based on the total power input to the power supply and the effective power actually consumed by the plasma generator , and its calculation formula is: ； In the formula, represents the effective power actually consumed by the plasma generator; represents the total power input of the power supply; S22. Calculate the ionization efficiency of the base gas according to the number of ionized particles, the ionization energy of a single particle, the ionization time, and the total input energy of the power supply ; S23. Calculate the plasma confinement stability based on the confinement time of the plasma and the uniformity of the plasma density distribution , and its calculation formula is as follows: ； In the formula, represents the confinement time of the plasma; represents the uniformity of the plasma density distribution; represents the theoretical maximum confinement time; represents the theoretical uniformity coefficient; S24. Calculate the basic heat loss power according to the power input of the power supply, the plasma generation power, and the effective plasma power , and its calculation formula is: ； In the formula, represents the power for plasma generation; represents the effective power of the plasma; S25. According to the plasma confinement stability correct the ionization efficiency of the base gas and the base heat loss power to obtain the corrected gas ionization efficiency and the corrected heat loss power ; S26. According to the power supply efficiency , calibrate the gas ionization efficiency , calibrate the heat loss power and the plasma confinement stability to calculate the first energy efficiency ratio .

3. The control system according to claim 2, wherein In step S22, the following specific steps are included: S221. Calculate the energy required for ionization based on the number of ionizing particles, the ionization energy of a single particle, and the ionization time , and its calculation formula is as follows: ； In the formula, represents the number of ionized particles; represents the ionization energy of a single particle; represents the ionization time; S222. Calculate the ionization efficiency of the base gas according to the energy required for ionization and the total energy input from the power supply , and its calculation formula is as follows: ； In the formula, represents the total input energy of the power supply.

4. The control system according to claim 2, characterized in that, In step S25, the correction calculation formula for the ionization efficiency of the basic gas is as follows: ； For the basic heat loss power The correction calculation formula is as follows: ； In the formula, represents the suppression coefficient of plasma confinement on heat loss.

5. The control system according to claim 2, wherein In step S26, the first energy efficiency ratio is calculated by the formula: ； In the formula, represents the ambient temperature; represents the maximum temperature allowed by the system; represents the suppression coefficient of heat loss on the power supply efficiency; represents the correction coefficient of ambient temperature on the power supply efficiency.

6. The control system according to claim 2, wherein In the first adjustment module, the following specific steps are included: S41. Obtain the target plasma generator during the past time period Power supply efficiency , Calibrate the gas ionization efficiency , Calibrate the heat loss power , Plasma confinement stability and the third energy efficiency ratio ; S42. Adjust the power efficiency, the calibration gas ionization efficiency, the calibration heat loss power, and the plasma confinement stability respectively by using the control variable method, and construct a training parameter set; Calibrate the gas ionization efficiency Calibrate the heat loss power Plasma confinement stability and construct a training parameter set; S43. Calculate the corresponding third energy efficiency ratio according to the training parameter set and construct a sample label; S44. Train the long short-term memory network with training samples and sample labels to obtain the target model; S44. Input the power efficiency of the target plasma generator during the time period , the corrected gas ionization efficiency , the corrected heat loss power , the plasma confinement stability and the first energy efficiency ratio into the target model, and output the second energy efficiency ratio and the corresponding source efficiency in descending order according to the change amount , the corrected gas ionization efficiency , the corrected heat loss power , the plasma confinement stability adjustment values, and mark them as the adjustment plan to be used; S45. Select the second energy efficiency ratio with the highest change amount and the corresponding source efficiency , correct the gas ionization efficiency , correct the heat loss power , plasma confinement stability The adjustment value is used as the preselected adjustment plan.

7. The control system according to claim 1, wherein In the second judgment module, the following specific steps are included: S51. Preset the effective interval of all category information in the first working information; S52. Calculate the adjusted second working information according to the pre-adjustment plan; S53. Judge whether the information of each category in the second working information is within the effective interval; If so, it means that the preselected adjustment plan is feasible; If not, it means that the preselected adjustment plan is not feasible.

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