Nozzle plate for a droplet ejecting head and method for manufacturing the same

Abstract

A nozzle plate for a droplet ejection head, the nozzle plate comprising: one or more bars (92) comprising one or more sub-bars (93) wherein the one or more sub-bars comprise one or more droplet ejection nozzles (131); and one or more frames (60) comprising one or more openings (61); wherein each of the one or more sub-bars fits within a corresponding opening in the one or more frames, and wherein the one or more bars and the one or more frames together present a media facing surface (118) of the nozzle plate. Droplet ejection heads including one or more nozzle plates, and droplet ejection apparatuses including one or more of the droplet ejection heads, and methods of manufacturing the nozzle plates are also provided.

Description

[0001] The present disclosure relates to a nozzle plate for a droplet ejection head. The nozzle plate can be particularly suitable for use in a droplet ejection head (such as a drop-on-demand inkjet printhead), or more generally, for use in a droplet ejection device (especially a droplet ejection device including one or more nozzle plates). The nozzle plate provides one or more nozzle arrays, where at least one nozzle can be fluidly connected to a corresponding fluid chamber including an actuator. The actuator is operable to cause a liquid droplet to be released through the nozzle in an ejection direction in response to an electrical signal. In many applications, a durable nozzle plate is required that can withstand harsh operating environments and prevent damage during cleaning. Such a durable nozzle plate can include a silicon nozzle plate or a nozzle plate of a similar material. However, the cost of such a durable nozzle plate can be high. The present disclosure relates to a nozzle plate with greater durability obtained at a reduced cost. The present disclosure also describes a method of manufacturing such a nozzle plate.

[0002] Background

[0003] Droplet ejection heads are now widely used, whether in more traditional applications such as inkjet printing or in 3D printing or other rapid prototyping technologies. As a result, liquids, such as inks, can have new chemical properties to adhere to new substrates and increase the functionality of the deposited material. Droplet ejection heads have been developed that can be used in industrial applications, for example, for direct printing onto substrates such as tiles or textiles, or for forming elements such as color filters in LCD or OLED displays for flat panel TVs. Such industrial printing technologies using droplet ejection heads allow for short-run production, product customization, and even custom-designed printing. Therefore, it should be understood that droplet ejection heads continue to evolve and specialize to accommodate new and / or increasingly challenging applications. However, despite many advancements in the field of droplet ejection heads, there is still room for improvement.

[0004] In recent years, there has been increasing interest in the use of silicon nozzle plates, due to the precision that can be achieved and their durability, making them desirable compared to nozzle plates made of softer materials such as polyimide. For example, in some industrial applications, it can be problematic during operation that some fluids may accidentally remain on the nozzle plate on the media facing surface, such as curable ink, and this ink cures on that surface. For some such cured inks, the cured ink can only be removed by a strong friction action, and a nozzle plate made of silicon (or other similar durable materials) is better able to withstand such a strong friction action, and such a nozzle plate can withstand a strong cleaning procedure without being damaged, such as scratched. These nozzle plates would solve the durability problem, but the cost can be high. This is because the nozzle plates can be quite large, and in some cases, only 6 or 7 nozzle plates can fit on a 6-inch silicon wafer (imperial units are still commonly used for these wafers).

[0005] The present invention has been designed in view of the above problems. Summary of the Invention

[0007] Aspects of the invention are set out in the appended independent claims, while details of specific embodiments of the invention are set out in the appended dependent claims.

[0008] According to a first aspect of the present invention, there is provided a nozzle plate for a droplet ejection head, the nozzle plate comprising: one or more strips, which comprise one or more sub-strips, wherein the one or more sub-strips comprise one or more droplet ejection nozzles; and one or more frames, which comprise one or more openings; wherein each of the one or more sub-strips is fitted within a corresponding opening of the one or more frames such that the one or more strips and the one or more frames together present the media facing surface of the nozzle plate.

[0009] According to a second aspect of the present invention, there is provided a droplet ejection head, the droplet ejection head comprising one or more nozzle plates according to the first aspect, and one or more fluid chambers fluidly connected to one or more of the droplet ejection nozzles; wherein the fluid chambers comprise actuators which are actuable to eject fluid droplets from one of the one or more droplet ejection nozzles in response to an ejection instruction.

[0010] According to a third aspect of the present invention, there is provided a droplet ejection device, the droplet ejection device comprising one or more droplet ejection heads according to the second aspect.

[0011] According to a fourth aspect of the present invention, there is provided a method of manufacturing a nozzle plate for a droplet ejection head, the method comprising:

[0012] - forming a release layer on a top surface of a substrate;

[0013] - forming a seed layer on top of the release layer;

[0014] - placing one or more sub-strip members on the seed layer and holding the one or more sub-strip members using a temporary adhesive;

[0015] - forming one or more frames around the one or more sub-strip members such that each of the one or more sub-strip members fits within a corresponding opening in the one or more frames; and

[0016] - peeling the nozzle plate from the substrate.

[0017] According to a fifth aspect of the present invention, there is provided an alternative method of manufacturing a nozzle plate for a droplet ejection head, comprising:

[0018] - forming a frame;

[0019] - forming one or more openings in the frame such that there is a ledge in each of the openings;

[0020] - placing an adhesive on a part of the ledge in the opening and / or on a boundary edge of the opening;

[0021] - placing one or more sub-strip members in each of the openings such that a part of the sub-strip member is supported by the ledge; and

[0022] - curing the adhesive to attach the sub-strip member to the frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1A A schematic view of a nozzle plate according to an embodiment of the present invention is depicted, the nozzle plate including a frame and two strip members, each strip member including a sub-strip member.

[0025] Figure 1B Depicts Figure 1A An end view of an embodiment of, showing the nozzle plate thickness.

[0026] Figure 2A A schematic view of a nozzle plate according to another embodiment is depicted, the nozzle plate being similar to Figure 1A the nozzle plate of, but including a single strip member divided into two sub-strip members.

[0027] Figure 2B Depicts the end view of an embodiment of Figure 2A , showing the nozzle plate thickness and the fluid chamber below the nozzle plate.

[0028] Figure 2C Depicts the side view of an embodiment of Figure 2A , showing the nozzle plate and the fluid chamber below the nozzle plate.

[0029] Figure 3 Depicts a schematic view of a nozzle plate according to another embodiment, the nozzle plate being similar to Figure 1A 's nozzle plate and further including an outer frame.

[0030] Figure 4 Depicts a schematic view of a nozzle plate according to another embodiment similar to Figure 3 's nozzle plate, in which there are a plurality of bridges connecting the two frames.

[0031] Figure 5 Depicts a schematic view of a nozzle plate according to another embodiment similar to Figure 2A 's nozzle plate, in which the bar member includes a plurality of sub-bar members having stepped portions.

[0032] Figure 6 Depicts a schematic view of a nozzle plate according to another embodiment similar to Figure 2A 's nozzle plate, in which the sub-bar members are staggered and non-uniform.

[0033] Figure 7A Depicts a schematic view of a part of a nozzle plate according to another embodiment, the nozzle plate including a frame having a support flange.

[0034] Figure 7B Depicts Figure 7A the end view of a part of the nozzle plate.

[0035] Figure 7C Depicts a schematic view of an embodiment of a nozzle plate, the nozzle plate including Figure 7A and Figure 7B 's frame, in which two bar members are inserted into the frame and supported by the support flange.

[0036] Figure 8A Depicts a schematic view of another embodiment of a nozzle plate, the nozzle plate being similar to Figure 7C 's nozzle plate.

[0037] Figure 8B Depicts Figure 8A the end view of the nozzle plate.

[0038] Figure 9ADepicts the first step in the manufacturing process of a nozzle plate according to an embodiment.

[0039] Figure 9B Depicts the second step in the manufacturing process of a nozzle plate according to an embodiment.

[0040] Figure 9C Depicts the third step in the manufacturing process of a nozzle plate according to an embodiment.

[0041] Figure 9D Depicts the fourth step in the manufacturing process of a nozzle plate according to an embodiment.

[0042] Figure 9E Depicts the fifth step in the manufacturing process of a nozzle plate according to an embodiment.

[0043] Figure 9F Depicts the sixth step in the manufacturing process of a nozzle plate according to an embodiment.

[0044] It should be noted that the drawings are not drawn to scale and some features may be shown at an enlarged size so that these features are more clearly visible.

[0045] Detailed description of the drawings

[0046] Embodiments and their various implementations will now be described with reference to the drawings. Throughout the following description, like reference numerals are used for like elements where appropriate.

[0047] Figure 1A Depicts a schematic view of a nozzle plate 170 for a droplet ejection head according to an embodiment, the nozzle plate including a frame 60 and two bar members 92a, 92b. Each bar member 92a, 92b may include one or more sub-bar members 93. In Figure 1A the embodiment, each bar member 92a, 92b respectively includes a sub-bar member 93a, 93b. Figure 1B Depicts Figure 1AEnd view of an embodiment, showing that the nozzle plate 170 has a thickness t in the ejection direction 15, where the ejection direction 15 is the direction in which droplets are ejected in use (in this example, the ejection direction 15 is the negative z-direction). The nozzle plate 170 has a medium-facing surface 118, which is the outer surface of the nozzle plate 170 when the nozzle plate 170 is installed in the droplet ejection head, and the medium-facing surface 118 faces the medium towards which the droplets are ejected (such that in use, the ejection direction 15 is perpendicular to the medium-facing surface 118). It can be seen that the nozzle plate 170 is arranged such that there are: two strip members 92a, 92b, each strip member respectively including a sub-strip member 93a, 93b, and the sub-strip members 93a, 93b each include one or more droplet ejection nozzles 131; and a frame 60, which includes two openings 61a, 61b, such that each of the sub-strip members 93a, 93b is surrounded by a corresponding one of the openings 61a, 61b, and each of the openings 61a, 61b is arranged adjacent to the outer perimeter edge 94a, 94b of the corresponding one of the sub-strip members 93a, 93b. The strip members 92a, 92b and the frame 60 together present the medium-facing surface 118 of the nozzle plate 170. It can also be seen that the boundary edges 64a, 64b of the openings 61a, 61b are respectively consistent with the shapes of the outer perimeter edges 94a, 94b.

[0048] Each strip member 92a, 92b includes a plurality of nozzles 131, and the plurality of nozzles 131 are arranged in corresponding arrays 130a, 130b and extend in the array direction 10. The strip members 92a, 92b are arranged adjacent to each other, but are separated by a separation distance Sd in the separation direction 5. In Figure 1A the embodiment, there are two strip members 92a, 92b, but more generally, the nozzle plate 170 may include one or more strip members 92, and the one or more strip members 92 are arranged such that the droplet ejection nozzles 131 are arranged in one or more nozzle arrays 130a, 130b extending in the array direction 10. In addition, as Figure 1A shown, in the case where there are two or more such strip members 92, adjacent strip members 92 may be offset from each other by a separation distance Sd in the separation direction 5, where Sd is measured between adjacent and aligned outer edges of the corresponding strip member 92. From Figure 1A it can also be seen that the strip members 92a, 92b are aligned with each other at both ends in the array direction 10, but it can be understood that this is by no means necessary, and in other arrangements, the strip members 92a, 92b may be offset from each other in the array direction 10, and in this case, the separation distance Sd is measured by the edges of the strip member 92 extending in the array direction 10.

[0049] From Figure 1AIt can be seen that both of the sub-bar members 93a and 93b include recessed anchors 95a_i1 and 95b_i2 along the array direction 10 at one end of the bar members 92a and 92b. Examples of two different types of recessed anchors 95 are shown, partially circular 95a_i1 and T-shaped 95b_i2. In this document, a recess means that the anchor 95 includes removing material from the sub-bar members 93a and 93b and filling it with material attached to or included in the frame 60. It is generally understood that the anchor 95 does not need to be a recessed anchor 95_i; in some arrangements, the nozzle plate 170 may include an anchor 95 as a protrusion 95_p and / or a recess 95_i. Additionally, it can be understood that Figure 1A the two shapes of the recessed anchor 95_i depicted in Figure 1A are in no way restrictive, and any suitable shape can be used. Additionally, the anchors can have the same or different shapes on different sub-bar members 93. Additionally, it can be understood that although the recessed anchors 95 are shown at one end of the sub-bar members 93a and 93b in

[0050] this is in no way required, and the recessed anchor 95 can be formed at any suitable point on the corresponding outer peripheral edge 94 of the sub-bar member 93. It can also be understood that the anchors do not need to be aligned between the bar members 92 and can be located at different positions on different sub-bar members 93. Figure 1A In

[0051] each sub-bar member 93a and 93b there is one anchor, but this is in no way restrictive, and one or more sub-bar members 93a and 93b can include one or more anchors 95 for anchoring one or more sub-bar members 93a and 93b within the frame 60.

[0051] It is generally understood that the bar members 92a and 92b and the sub-bar members 93a and 93b can include suitably wear-resistant but expensive materials such as silicon. It is also generally understood that one or more frames 60 can include suitable materials that are cheaper and / or less wear-resistant than the materials of the sub-bar members 93a and 93b and thus the bar members 92a and 92b. By constructing the nozzle plate 170 in this way, the beneficial properties of the wear-resistant material can be utilized while reducing the total cost of the nozzle plate 170. The beneficial properties of the wear-resistant material can mean that the wear-resistant material can more durably withstand cleaning operations such as, for example, wiping, so that the nozzle may not be damaged during use, or that damage to the nozzle can be reduced or delayed for a longer service life, thereby maintaining a longer life of the nozzle plate while reducing the total cost of the nozzle plate.

[0052] Now consider Figure 2A which depicts a schematic view of a nozzle plate 270 according to another embodiment, the nozzle plate 270 being similar to the nozzle plate of Figure 1A but including a single bar 92 (compared to Figure 1A which includes two bars 92a, 92b, each bar including a single sub-bar 93a, 93b respectively) that is divided into two sub-bars 93i, 93ii. Figure 1A Figure 2B depicts an end view of an embodiment of Figure 2A showing the nozzle plate thickness t and a plurality of fluid chambers 121 below the nozzle plate 270. The fluid chambers 121 are arranged in an array 120 extending in the array direction 10, the array 120 corresponding to the array of nozzles 130 such that each fluid chamber 121 has at least one nozzle 131 fluidly connected to the fluid chamber 121. The corresponding fluid chambers 121 may be actuable (or include actuators) to eject one or more fluid droplets via at least one nozzle 131 in response to an ejection command. Figure 2C depicts a side view of an embodiment of Figure 2A showing the nozzle plate 270 and the fluid chambers 121 below the nozzle plate 270.

[0053] It can be seen that in Figure 2A the bar 92 includes an array 130 of nozzles 131, where the array extends in the array direction 10 and is arranged in the sub-bars 93i, 93ii. It can also be seen that adjacent nozzles 131 in the array 130 are staggered perpendicular to the array direction 10 (i.e., in the spacing direction 5, which is the y-direction in this example). This staggering of the nozzles 131 can allow the use of different firing regimes, such as multi-stage firing, such as three-stage firing. For example, offsetting adjacent nozzles 131 from each other allows compensation for staged firing while still printing into the same print line on the print medium. It can be understood that staggering the nozzles 131 in this way is by no means necessary and it can depend on how the droplet ejection head is operated, and in other arrangements, the nozzles 131 in a given nozzle array 130 can all be in the same y-position, as shown in Figure 1A

[0054] It can be seen that in the embodiment of Figure 2A the sub-bars 93i, 93ii have the same shape, and each of the sub-bars 93i, 93ii includes staggered edge portions 97i_1, 97i_2, 97ii_1, 97ii_2 arranged on opposite edges of the respective sub-bars 93i, 93ii. In Figure 2AIn the embodiment, the staggered edge portions 97i_1, 97i_2, 97ii_1, 97ii_2 are arranged at both ends of each corresponding sub-bar member 93i, 93ii in the array direction 10. From Figure 2A As can be seen, the staggered edge portion 97i_2 on the first sub-bar member 93i of the sub-bar members is arranged in an inlaid relationship adjacent to and facing the corresponding staggered edge portion 97ii_1 on the second sub-bar member 93ii. This can contribute to the alignment and positioning of the sub-bar members 93i, 93ii relative to each other. In addition, it can be seen that in this embodiment, the staggered edge portions 97i_1, 97i_2 are arranged on the outer peripheral edges 94i, 94ii of the sub-bar members 93i, 93ii at the opposite ends of the bar member 92 in the array direction 10. It can be seen that the openings 61i, 61ii in the frame 60 have matching staggered edge portions 64i_1, 64ii_2 on their peripheral edges 64i, 64ii, and the staggered edge portions 64i_1, 64ii_2 are arranged adjacent to the corresponding staggered edge portions 97i_1, 97ii_2 of the sub-bar members 93i, 93ii. This arrangement can contribute to the alignment and positioning of the sub-bar members 93i, 93ii and thus the bar member 92 relative to the frame 60, and can further contribute to the alignment of the bar member 92 as a whole relative to the frame 60.

[0055] It can generally also be understood that in the case where the corresponding bar member 92 includes two or more sub-bar members 93, there may be a gap g between the two sub-bar members 93, where the two sub-bar members 93 have faces adjacent to each other (see, for example, in Figure 2A where the staggered edge portion 97i_2 is arranged adjacent to and facing the staggered edge portion 97ii_1, with a gap g therebetween). The material in the gap g between the two sub-bar members 93i, 93ii may include a part of the frame 60. Then, the frame 60 may include openings 61i, 61ii for each corresponding sub-bar member 93i, 93ii, and the openings 61i, 61ii may be separated from each other through the gap g in the region where the two sub-bar members 93 have faces adjacent to each other. It can be understood that the width of the gap g between adjacent sub-bar members 93 may be limited by the nozzle pitch ns, such that when the array 130 extends over two or more sub-bar members 93, the nozzle pitch ns in the array 130 is maintained. For example, the nozzle pitch or spacing ns may be 150 μm. In order to maintain sufficient sub-bar member material around the nozzles 131 adjacent to the gap g between the sub-bar members 93 while also maintaining the nozzle pitch ns, the gap width may be a smaller value of 20 μm - 40 μm.

[0056] Now turning to Figure 3, which depicts a schematic view of a nozzle plate 370 according to another embodiment of the present invention. It can be seen that this embodiment is similar to Figure 1A 's embodiment, with the main difference being the presence of frames 60a, 60b around each sub-bar element 93a, 93b and an outer frame 75 surrounding the two frames 60a, 60b, such that in this embodiment, each frame 60a, 60b includes a single opening 61a, 61b respectively. The outer frame 75 includes two outer openings 76a, 76b such that the frames 60a, 60b are surrounded by a respective one of the two outer openings 76a, 76b. It can be seen that the outer openings 76a, 76b can preferably conform to the shape of the outer perimeter edges 68a, 68b of the frames 60a, 60b. This can mean that the outer openings 76a, 76b closely follow the shape of the outer perimeter edges 68a, 68b. For example, if the frames 60a, 60b are formed in the space between the sub-bar elements 93a, 93b and the outer frame 75 by a method such as electroforming, the growth of the frames 60a, 60b in the space between the sub-bar elements 93a, 93b and the outer frame 75 will be restricted by the edges of the sub-bar elements 93a, 93b and the edges of the outer openings 76a, 76b in the outer frame 75 adjacent to the growing frames 60a, 60b. Additionally, when using an alternative method, the frames 60a, 60b can be formed by filling the space between the sub-bar elements 93a, 93b and the outer frame 75 with a flowable material that can be shaped between the edges of the sub-bar elements 93a, 93b and the outer frame 75. The flowable material can then solidify, or any suitable method can be used to cure it in order to form the frames 60a, 60b. It is generally understood that such methods of growing the frames or using a flowable material that can subsequently solidify or cure can be applied in any embodiment suitable for those described herein. More generally, any suitable method can be used to form one or more frames 60 surrounding one or more sub-bar elements 93.

[0057] Figure 4 Depicts a schematic view of a nozzle plate 470 according to another embodiment. The nozzle plate 470 is similar to Figure 3 's nozzle plate, but in which there are a plurality of bridging portions 81i - 81iv connecting the two frames 60a, 60b, such that in the region between the two frames 60a, 60b, the outer frame 75 is divided into portions 75i - 75iii. In Figure 4There are four bridging portions, and in other arrangements, there may be one bridging portion 81, or multiple bridging portions 81i-n, where n is an integer. The bridging portion 81 can be used to control the spacing distance Sd between adjacent strip members 92a, 92b. This can help improve the alignment accuracy between the strip members 92a, 92b, and thus improve nozzle positioning, and further improve printing accuracy. It can be seen that the bridging portion 81 extends in the spacing direction 5 and is arranged between adjacent spaced strip members 92 to control the distance between the strip members 92. From Figure 4 It can be seen that two bridging portions 81i, 81iv are perpendicular to the array direction 10 and parallel to the spacing direction 5, while two bridging portions 81ii, 81iii are inclined at an angle α with respect to the array direction 10. It can be understood that this is by no means necessary, and other arrangements can be envisioned, such as those in which all bridging portions are oriented in the same way, or all bridging portions are oriented in different ways. In addition, although Figure 4 depicts multiple bridging portions 81, it can be understood that a single bridging portion 81 may be sufficient. In addition, there may be multiple bridging portions 81, and the multiple bridging portions 81 may be arranged to form a pattern, such as a zigzag or honeycomb or basket weave pattern. More generally, any suitable arrangement or layout of one or more bridging portions 81 can be used, and such bridging portions 81 can enable the sub-strip members 93 and the strip members 92 to be aligned relative to each other. Generally, the nozzle plate 470 may include a bridging portion 81 formed of the same material as the frame 60. In addition, the nozzle plate 470 may include one or more bridging portions 81, where at least one of the bridging portions 81 may be connected to the one or more frames 60. Alternatively, the bridging portion 81 may include a material different from the frame 60. In the case where the nozzle plate includes one or more outer frames 75, the outer frames 75 may be arranged adjacent to and surrounding the outer perimeter of the one or more frames 60, and, if present, adjacent to and surrounding one or more outer edges of the bridging portion 81.

[0058] Now turning to Figure 5 this Figure 5 depicts a schematic view of a nozzle plate 570 according to another embodiment. The nozzle plate 570 is similar to Figure 2A - Figure 2Cthe nozzle plate, but wherein the strip member 92 includes a plurality of sub-strip members 93ai - 93biii arranged in a mosaic arrangement in both the array direction 10 and the spacing direction 5. It can be seen that in this embodiment, the two arrays of nozzles 130a, 130b are included within one strip member 92, separated by an array spacing distance Ad in the spacing direction 5. It can also be seen that there are step portions at both ends in the array direction 10 of each sub-strip member 93ai - 93biii. For example, there are step portions 97bi_1, 97bi_2 on the opposite sides of the sub-strip member 93bi in the array direction 10, and step portions 97bi_3, 97bi_4 on the opposite sides of the sub-strip member 93bi in the spacing direction 5. It can be seen that similar features exist on all sub-strip members 93ai - 93biii, and although not all sub-strip members are labeled for simplicity, they can be labeled and numbered in the same way as the sub-strip member 93bi from 93ai_1 - 93biii_4. It can be said that in the nozzle plate 570, each sub-strip member 93 includes four or more staggered edge portions 97 arranged in two or more pairs. The first pair (e.g., 97_1, 97_2) can be located on the opposite edges of the corresponding sub-strip member 93 in the array direction 10, and the second pair (e.g., 97_3, 97_4) can be located on the opposite edges of the corresponding sub-strip member 93 in the spacing direction 5.

[0059] The staggered edge portions 97 can contribute to the alignment of the sub-strip members 93 relative to each other and also relative to the strip member 92 and the frame 60, in order to position the nozzles 131 to form the nozzle arrays 130a, 130b. For example, in the case where two sub-strip members 93 are arranged adjacent to each other in the array direction 10, such as sub-strip members 93ai and 93aii, the staggered edge portion 97ai_2 on the first sub-strip member 93ai is arranged in a mosaic relationship adjacent to and facing the corresponding staggered edge portion 97ai_1 on the second sub-strip member 93aii in the array direction 10. Similarly, in the spacing direction 5, the staggered edge portion 97bi_4 on the sub-strip member 93bi is arranged in a mosaic relationship adjacent to and facing the corresponding staggered edge portion 97ai_3 on the sub-strip member 93ai in the spacing direction 5.

[0060] Figure 5 The nozzle plate 570 includes a frame 60 having a plurality of openings 61ai - 61biii, one opening for each corresponding sub-strip member 93ai - 93biii (not all openings are Figure 5 marked), such that each sub-strip member 93 is surrounded by the opening 61 in the frame 60. It can also be seen that, as Figure 3As shown, for example, the nozzle plate 570 includes an outer frame 75 that surrounds the frame 60. The outer frame 75 includes an outer opening 76 such that the frame 60 is surrounded by the outer opening 76. It can be seen that the openings 61ai - 61biii can preferably conform to the shape of the outer peripheral edges 94ai - 94biii of the sub - strip members 93ai - 93biii. It can also be seen that the outer opening 76 conforms to the shape of the outer peripheral edge 68 of the frame 60. It can further be seen that the shape of the outer opening 76 reflects the shape of the outer peripheral edge 68, and the shape of the outer peripheral edge 68 in turn reflects the shape of the outermost part of the sub - strip member 93, i.e., the shape of the outer peripheral edge 94, which includes the staggered edge portions 97 positioned adjacent to the outer opening 76.

[0061] Now turning to Figure 6 , Figure 6 FIG. depicts a schematic view of a nozzle plate 670 according to another embodiment. The nozzle plate 670 is similar to Figure 5 the nozzle plate, but wherein the sub - strip members 93 are non - uniform and arranged in a staggered pattern so as to align with the nozzle array 130 in the array direction 10. Such an arrangement can be used, for example, where different - shaped sub - strip members 93 can best utilize the available space on the mold or allow for shape differences between the sub - strip members 93 such that the nozzles 131 can be aligned as close as possible to their desired positions. Although not shown here, it can be understood that Figure 6 the corresponding sub - strip members 93i - 93vi of

[0062] Now consider Figure 7A , Figure 7B and Figure 7C , which respectively depict schematic views of a portion of an embodiment of a nozzle plate 770 including the frame 60 ( Figure 7A ), an end view of the frame 60 ( Figure 7B ), and a nozzle plate 770 including Figure 7A and Figure 7B the frame 60 with two strip members 92a, 92b inserted therein ( Figure 7C ). First turning to Figure 7A , it can be seen that the frame 60 includes two openings 61a, 61b, and each of the openings 61a, 61b respectively includes boundary edges 64a, 64b. It can also be seen that the frame 60 includes a step portion for each of the openings 61a, 61b that defines support flanges 67a, 67b, and the support flanges 67a, 67b are configured to be located beneath the corresponding edge portions of the respective sub - strip members 93a, 93b (see Figure 7C ). Such an arrangement can assist in manufacturing and operation by providing support to the strip members 92.

[0063] In Figure 7A - Figure 7C the arrangement, the frame 60 may comprise glass or ceramic. Alternatively, the frame 60 may comprise a polymer. A layer of adhesive and / or sealant may be placed between the support flanges 67a, 67b and the sub-strip members 93a, 93b so as to ensure a fluid seal and / or to securely attach the sub-strip members 93a, 93b to the support flanges 67a, 67b.

[0064] From Figure 7C it can be seen that each strip member 92a, 92b comprises a plurality of nozzles 131 arranged in respective arrays 130a, 130b extending along the array direction 10. In this embodiment, the strip members 92a, 92b each comprise a single sub-strip member 93a, 93b, but this is by no means limiting and in other arrangements, each strip member 92 may have two or more sub-strip members 93, as described above. The strip members 92a, 92b are spaced apart by a spacing distance Sd in the spacing direction 5. In this embodiment, the spacing direction 5 is perpendicular to the array direction 10, but this is by no means limiting and in other arrangements, two or more strip members 92 may be arranged spaced apart from each other in the spacing direction 5, where the spacing direction 5 is at a non-parallel angle to the array direction 10.

[0065] Now turning to Figure 8A and Figure 8B , in this embodiment, similar to Figure 7C the embodiment of, there is an outer frame 75 which for each outer opening 76 comprises a stepped portion which defines the support flanges 67a, 67b. The support flanges 67a, 67b are configured to be located beneath corresponding edge portions of the respective sub-strip members 93a, 93b and thus the strip members 92a, 92b, where the frame 60 is formed in the gap between the outer opening 76 and the sub-strip members 93a, 93b so as to surround the sub-strip members 93a, 93b. The frame 60 may comprise an elastic material, which may be beneficial if the coefficient of thermal expansion of the strip members 92a, 92b is different from that of the frame 60 and / or the outer frame 75. Alternatively, there may be additional elastic filler material placed between the frame 60 and the strip members 92a, 92b to form an interface region between the strip members 92a, 92b and the frame 60. Similarly, if the coefficients of thermal expansion of the frame 60 and the outer frame 75 are different, there may be elastic filler material positioned to form an interface region between the frame 60 and the outer frame 75.

[0066] As described herein, any one of the nozzle plates 170-870 can be assembled into a droplet ejection head. The droplet ejection head can include one or more nozzle plates 170-870 and one or more fluid chambers as described herein, wherein the fluid chambers are fluidly connected to one or more of the droplet ejection nozzles 131. The fluid chambers can include an actuator that can be actuated to eject fluid droplets from one of the one or more droplet ejection nozzles 131 in response to an ejection command. The fluid chambers can include an actuator associated with each fluid chamber, and the actuator can be actuated to eject droplets via one or more nozzles 131 associated with the corresponding fluid chamber. For example, one or more of the walls of the fluid chamber can be actuated to eject fluid droplets via one or more nozzles. In some cases, one or more side walls of each fluid chamber can include a material exhibiting piezoelectric properties and a suitable drive electrode arrangement, or the fluid chamber can include a roof-mode actuator arrangement. However, it can be understood that other forms of actuators can also be used as long as they are adapted to cause fluid ejection from a separate fluid chamber via the corresponding nozzle 131 in response to an ejection command. The droplet ejection device can include one or more droplet ejection heads. The droplet ejection head can include one or more nozzle plates as described herein.

[0067] Manufacturing method

[0068] Now turning to Figure 9A - Figure 9E , these figures summarize the main steps in a method for manufacturing a nozzle plate for a droplet ejection head as described herein. These figures are based on the nozzle plate 170, such as Figure 1A the nozzle plate shown, but it can be understood that the method can be appropriately adjusted to produce other embodiments of the nozzle plates of the present invention. The method involves using a frame 60 that surrounds the bar-shaped member 92 and / or the sub-bar-shaped member 93 to hold them firmly in place with high precision, where the frame 60 can grow or be formed around the bar-shaped member 92 and / or the sub-bar-shaped member 93. For example, the frame 60 can be grown or formed using, for example, electroforming or other suitable processes known in the art. The main steps are as follows:

[0069] 1) As Figure 9A seen in, the substrate 99 can be used as a support on which the nozzle plates 170-870 are built. The substrate 99 can be reusable. The substrate 99 can include glass or silicon. The substrate 99 can be large enough to hold more than one nozzle plate 170-870.

[0070] 2) As Figure 9BAs can be seen, the release layer 100 can be disposed on the top surface of the substrate 99. This can be, for example, a barrier layer, which can be disposed at an early stage and then removed at a later stage (e.g., by dissolving it or using a peelable barrier) to separate from the substrate 99. The barrier layer can be similar to a photoresist, which can be a substance that can be cured to form a polymer film. Alternatively, a substrate 99 having suitable properties or surface properties or coatings / processes can be used to facilitate the separation of the nozzle plates 170 - 870 from the substrate 99. The substrate 99 can be glass or silicon or any suitable material.

[0071] 3) Now turning to Figure 9C , Figure 9C shows a seed layer 101 that can be used as a starting point for growing the frame 75. For example, the seed layer 101 can be a seed layer for an electrophoresis process (such as an electroplating process). The seed layer 101 can be disposed on top of the release layer 100. Regions 102, 103 that can be slightly smaller than the sub - strip members 93 and / or the strip members 92 can be kept free of the seed layer 101 to avoid unwanted metal deposition and prevent metal from growing into the nozzles themselves, and / or prevent contamination of the nozzle plates 170 - 870 at the vicinity of the nozzles 131. For example, regions 102, 103 can be kept free of the seed layer 101 by using a suitable mask. The seed layer 101 can be deposited by sputtering or by electroless plating, etc. For example, a shadow mask or a mask that can be removed by etching or using plasma in a subsequent step to remove a metal mask can be used.

[0072] 4) Figure 9D shows two strip members 92a, 92b, each of the strip members 92a, 92b respectively includes a single sub - strip member 93a, 93b, which can be placed on the seed layer 101 with high precision and can be arranged to cover regions 102, 103. The sub - strip members 93a, 93b can include one or more nozzles 131; the sub - strip members 93a, 93b can include a plurality of nozzles 131. The sub - strip members 93a, 93b can be temporarily held in place, for example, using a removable adhesive. Figure 9D Also shown are the anchors 95 (in Figure 9D they are the anchors 95a_i1 and the anchors 95b_i2) disposed on the outer peripheral edges 94 of the respective sub - strip members 93a, 93b, however, as previously mentioned, this is by no means necessary. Furthermore, it can be understood that in the case where one or more of the sub - strip members 93 include two or more stepped portions 97, the step of placing the sub - strip members 93 can include: arranging two or more sub - strip members 93 such that two of the stepped portions 97 are arranged adjacent to each other on the facing sides of the sub - strip members 93. For example, as Figure 5As can be seen, 97bii_1 and 97bi_2 are arranged adjacent to each other, and 97bi_4 and 97ai_3 are arranged adjacent to each other. It can also be understood that the nozzle 131 can be formed in the strip members 92a, 92b before the strip members 92a, 92b are placed on the seed layer 101, or the nozzle 131 can be formed as a subsequent step after the strip members 92a, 92b are placed in position.

[0073] It can be understood that in the case where there are a plurality of sub-strip members 93 arranged in one or more strip members 92, the sub-strip members 93a, 93b can be arranged such that the nozzles 131 in a given strip member 92 are aligned to form one or more arrays 130 extending along the array direction 10. In addition, the sub-strip members 93a, 93b in adjacent strip members 92a, 92b can be respectively arranged such that one or more arrays 130a, 130b are respectively parallel to each other. For example, the strip members 92 can be aligned such that the droplet ejection nozzles 131 are arranged in one or more nozzle arrays 130 extending along the array direction 10.

[0074] 5) Now turning to Figure 9E , the frame 60 has grown around the sub-strip members 93a, 93b, thereby fixing the positions of the sub-strip members 93a, 93b relative to each other. It can be seen that in the case where the anchor members 95 are present on one or more of the sub-strip members 93a, 93b, the step of forming one or more frames 60 around one or more of the sub-strip members 93a, 93b can include: forming a frame material in and / or around one or more of the anchor members 95. The method of growing the frame 60 can include, for example, using an electrophoresis process, electroplating, electroforming, electrodeposition. For example, for a metal layer, depending on the thickness of the layer, one or more frames 60 can include electroformed material. Alternatively, any other suitable method known in the art can be used. One or more frames 60 can include metal. For example, one or more frames 60 can include nickel. Alternatively, a suitable polymer can be used, which can be deposited using an electrophoresis process or any other suitable method known in the art.

[0075] 6) Finally, as Figure 9F shown, the nozzle plate 170 - 870 can be peeled off from the substrate 99, for example, by dissolving or otherwise removing the release layer 100. Optionally, the method can further include removing the seed layer 101 from the nozzle plate 170 - 870 (as Figure 1A shown) after the step of peeling off the nozzle plate 170 - 870 from the substrate 99. Alternatively, the seed layer 101 can be retained.

[0076] In summary, a method of manufacturing a nozzle plate 170 - 870 for a droplet ejection head can include:

[0077] - Form a release layer 100 on the top surface of the substrate 99;

[0078] - Form a seed layer 101 on top of the release layer 100;

[0079] - Place one or more sub-bar elements 93 on the seed layer 101 and optionally hold the one or more sub-bar elements 93 in place using a temporary adhesive;

[0080] - Form one or more frames 60 around the one or more sub-bar elements 93; such that each of the one or more sub-bar elements 93 fits within a corresponding opening 61 in the one or more frames 60 (in other words, such that the one or more sub-bar elements 93 are surrounded by the openings 61 in the frames 60 and wherein each of the openings 61 is arranged adjacent to the outer peripheral edge 94 of one of the sub-bar elements 93); and

[0081] - Peel the nozzle plate 170 - 870 from the substrate 99.

[0082] It will be appreciated that the nozzle 131 may be formed in the sub-bar element 93 before placing the sub-bar element 93 on the seed layer 101, or the nozzle 131 may be formed at a suitable stage in the manufacture of the nozzle plate 170 - 870.

[0083] The manufacturing method may further include removing the temporary adhesive after the step of peeling the nozzle plate 170 - 870 from the substrate 99.

[0084] The frame 60 may be formed using an electroplating process, for example, such that the step of forming the one or more frames 60 includes an electroplating process. The method may include electroplating nickel to form the one or more frames 60. Alternatively, depending on the material used for the frame 60, the method may include electrophoresis, electroforming, or electrodeposition.

[0085] For embodiments such as Figure 3 or Figure 4 where there is an outer frame 75, the method may further include forming the outer frame 75 before the step of forming the one or more frames 60. For example, the outer frame 75 may include a polymer. It will be appreciated that the method of manufacturing the nozzle plate 170 - 870 may include forming the outer frame 75, for example, by spin - coating and photolithography. This step may be performed before placing the sub-bar element 93 on the seed layer 101. A suitable mask may be used such that the outer frame 75 is formed in the desired location. Alternatively, the outer frame 75 may be formed after placing the sub-bar element 93 on the seed layer 101, in which case the sub-bar element 93 may be appropriately masked while forming the outer frame 75.

[0086] Alternatively, the outer frame 75 can be a preformed component made of any suitable material, which can be placed on the seed layer 101 during step 4), and can be arranged to surround the position of the sub-bar 93, while leaving a gap between the position of the outer frame 75 and the position of the sub-bar 93. The sub-bar 93 may have been placed in position or may be placed after the outer frame 75 is placed in position. In this manufacturing method, one or more cuts can be preformed in the preformed component before being attached to the seed layer 101 for forming the external opening 76. Further, in this manufacturing method, the outer frame 75 can be temporarily held in position, for example, using a removable adhesive. The outer frame 75 can include glass or ceramic. The outer frame 75 can include a polymer. Using a cheaper material such as glass or ceramic or polymer for the outer frame 75 may be beneficial for reducing the total cost of the nozzle plate 170-870.

[0087] Whether the outer frame 75 is manufactured on-site or includes a preformed component placed in position, step 5) can then include forming one or more frames 60 around one or more sub-bars 93, wherein one or more sub-bars 93 are surrounded by openings 61 in the frame 60, and wherein each of the openings 61 is arranged adjacent to the outer peripheral edge 94 of one of the sub-bars 93. Forming the frame 60 also includes: forming one or more frames 60 within the outer frame 75 such that the frame 60 fills the space or gap between the outer frame 75 and the sub-bar 93. For example, the method of manufacturing the nozzle plate 170-870 can include filling the space or gap between the outer frame 75 and the sub-bar 93. In the case where there are two or more sub-bars 93 spaced apart by a spacing distance Sd and a bridging portion 81 is formed between the sub-bars 93, the manufacturing method can include masking the bridging portion using a suitable mask while forming the outer frame 75. Then, when forming one or more frames 60, the bridging portion 81 can be formed, for example, by electroplating or electroforming one or more frames 60 and the bridging portion 81 (if present). In the case where there is one or more bridging portions 81, the width of the bridging portion 81 can be appropriately adjusted such that the material filling the bridging portion 81 grows at the same rate as the frame 60 filling the space or gap between the outer frame 75 and the sub-bar 93.

[0088] An alternative method of manufacturing a nozzle plate 170-870 for a droplet ejection head, for example Figure 7A - Figure 7C and Figure 8A - Figure 8B the method of, can include:

[0089] - forming frames 60, 75;

[0090] - Form one or more openings 61a, 61b, 76a, 76b in the frames 60, 75 such that a support flange 67a, 67b is present in each of the openings 61a, 61b, 76a, 76b (see for example Figure 7A and Figure 7B );

[0091] - Place an adhesive on the support flanges 67a, 67b and / or a part of the boundary edges 64a, 64b of the openings in the openings 61a, 61b, 76a, 76b;

[0092] - Place one or more sub - strip members 93 in each of the openings 61a, 61b, 76a, 76b such that a part of the sub - strip member 93 is supported by the support flanges 67a, 67b; and

[0093] - Cure the adhesive to attach the sub - strip member 93 to the frames 60, 75.

[0094] As Figure 8B seen, in the method which includes: placing the sub - strip member 93 in the openings 61a, 61b, 76a, 76b such that the sub - strip member 93 is supported by the support flanges, an adhesive or filler can be placed around the sub - strip member 93 such that the gap between the sub - strip member 93 and the openings 61a, 61b, 76a, 76b is filled. In other words, the manufacturing method can include: forming one or more frames 60 around one or more sub - strip members 93 such that each of the one or more sub - strip members 93 fits within a corresponding opening 61 in the one or more frames 60.

[0095] For some arrangements, the method of manufacturing the nozzle plate 170 - 870 as described herein can include the step of forming the one or more openings 61a, 61b, 76a, 76b in the frame 60 and / or the outer frame 75 using etching or sandblasting. In some manufacturing methods, one or more actuator components can be attached to one or more of the sub - strip members 93 before the step of placing the sub - strip members 93 in the openings 61a, 61b, 76a, 76b. The nozzle plate 170 - 870 can include an arrangement where the boundary edges 64 of one or more openings 61 are formed around the shape of the outer peripheral edge 94 during manufacturing.

[0096] General considerations

[0097] Typically, a nozzle plate 170 - 870 as described herein may include: one or more bar members 92, which include one or more sub - bar members 93, where the one or more sub - bar members 93 include one or more droplet ejection nozzles 131; and one or more frames 60, which include one or more openings 61; wherein each of the one or more sub - bar members 93 is fitted within a corresponding opening 61 of the one or more frames 60; such that the one or more bar members 92a, 92b and the one or more frames 60 together present the media - facing surface 118 of the nozzle plate 170 - 870.

[0098] In other words, each of the one or more sub - bar members 93 is surrounded by one of the one or more openings 61, and each of the openings 61 is arranged adjacent to the outer perimeter edge 94 of one of the sub - bar members 93, such that the one or more bar members 92 and the one or more frames 60 together present the media - facing surface 118 of the nozzle plate 170 - 870. In the case where the one or more frames 60 are surrounded by an outer frame 75, the media - facing surface 118 of the nozzle plate 170 - 870 may further include the outer frame 75. It will be appreciated that the media - facing surface 118 formed by the one or more bar members 92 (each including one or more sub - bar members 93), the one or more frames 60, and the one or more outer frames 75 (if present) may be planar. It will be appreciated that in the case where the nozzle plate 170 - 870 includes a single bar member 92, there is no spacing distance Sd, and the y - direction indicates a direction perpendicular to the array direction 10 and the ejection direction 15.

[0099] It will be appreciated that the nozzle plate 170 - 870 may include one or more nozzle arrays 130, where the droplet ejection nozzles 131 are arranged in a repeating pattern. The nozzle plate 170 - 870 may include droplet ejection nozzles 131 arranged in a staggered pattern.

[0100] The present invention provides one or more bar members 92, which may include one or more sub-bar members 93 and means for mounting the bar members in a frame 60, where the frame 60 is formed of a lower-cost material and constitutes the remaining surface of the nozzle plate 170-870. This arrangement provides the desired durability near the nozzle, but at a reduced cost compared to an entire durable nozzle plate (such as a silicon nozzle plate). This reduced cost is possible because a greater number of smaller bar members can be made from, for example, a standard 6-inch silicon wafer, and the entire surface of the nozzle plate 170-870 does not need to be made of silicon or other such expensive materials. However, when placing individual bar members (for a droplet ejection head having more than one row of nozzles, or for manufacturing a longer row of nozzles), it is important but also difficult to maintain a permanent high positioning tolerance relative to each other. The present invention proposes means for positioning the bar members relative to each other with a tolerance high enough.

[0101] It will generally be understood that in the case where the respective bar member 92 comprises a single sub-bar member 93, as Figure 1A to Figure 1B , Figure 3 , Figure 4 , Figure 7C , Figure 8A to Figure 8B , Figure 9F shown, then such a sub-bar member 93 may include one or more staggered edge portions 97, which are arranged at one or more positions on the outer peripheral edge 94 of the bar member 92 (i.e., if the bar member 92 is generally rectangular in shape, arranged on one or more sides) so as to assist in the alignment and positioning of the respective bar member 92 relative to the adjacent frame 60. This may be the same as or alternative to the anchor member 95 as described above. For example, one or more staggered edge portions 97 may be provided at one or both ends along the array direction 10, or one or more staggered edge portions 97 may be provided along one or both sides parallel to the array direction 10. As described herein, the nozzle plate 170-870 may include three or more sub-bar members 93, where at least two of the sub-bar members are arranged adjacent to each other in the nozzle array direction 10, and at least two of the sub-bar members 93 are arranged adjacent to each other in the spacing direction 5. In such a nozzle plate 170-870, the staggered edge portions 97 allow three or more sub-bar members 93 to be aligned in a mosaic relationship.

[0102] The fluid chambers 121 described herein may include an actuator associated with each fluid chamber 121, and the actuator may be actuated to eject droplets via one or more nozzles 131 associated with the respective fluid chamber 121. For example, one or more of the walls of the fluid chamber 121 may be actuatable to eject fluid droplets via one or more nozzles 131. For example, one or more sidewalls of each fluid chamber 121 may include a material exhibiting piezoelectric properties and a suitable drive electrode arrangement, or the fluid chamber 121 may include a roof-mode actuator arrangement. However, it will be understood that other forms of actuators may also be used, provided that they are adapted to cause fluid ejection from the individual fluid chambers 121 via the respective nozzles 131 in response to ejection instructions.

Claims

1. A nozzle plate for a droplet ejection head, the nozzle plate comprising: One or more strip members (92), which include one or more sub-strip members (93), wherein the one or more sub-strip members (93) include one or more droplet ejection nozzles (131); and One or more frames (60), which include one or more openings (61); Wherein each of the one or more sub-strip members (93) is fitted within a corresponding opening (61) of the one or more frames (60), and Wherein the one or more strip members (92a, 92b) and the one or more frames (60) together present the medium-facing surface (118) of the nozzle plate.

2. The nozzle plate according to claim 1, wherein, Each of the one or more sub-strip members (93) is surrounded by one of the one or more openings (61); and Wherein each of the openings (61) is arranged adjacent to an outer peripheral edge (94) of one of the sub-strip members (93).

3. The nozzle plate according to claim 1 or claim 2, wherein, A boundary edge (64) of the one or more openings (61) is consistent with the shape of the outer peripheral edge (94).

4. The nozzle plate according to any one of the preceding claims, wherein, The strip members (92) are aligned such that the droplet ejection nozzles (131) are arranged in one or more nozzle arrays (130) extending in an array direction (10).

5. The nozzle plate according to any one of the preceding claims, comprising two or more strip members (92), wherein, Adjacent strip members (92) are offset by a spacing distance (Sd) in a spacing direction (5).

6. The nozzle plate according to any one of the preceding claims, wherein, The one or more frames (60) include an electrophoretic material.

7. The nozzle plate according to any one of the preceding claims, wherein, The one or more frames (60) include a metal.

8. The nozzle plate according to claim 7, wherein, The one or more frames (60) include nickel.

9. The nozzle plate according to any one of claims 1 to 5, wherein, The one or more frames (60) include glass or ceramic.

10. The nozzle plate according to any one of claims 1 to 5, wherein, The one or more frames (60) include a polymer.

11. The nozzle plate according to any one of the preceding claims, wherein, The sub-strip members (93) include one or more anchoring members (95) for anchoring the one or more sub-strip members (93) within the one or more frames (60).

12. The nozzle plate according to claim 11, wherein, The anchoring members (95) are arranged on the outer peripheral edge (94) of the sub-strip members (93).

13. The nozzle plate according to claim 11 or claim 12, wherein, The anchoring members (95) are protrusions and / or depressions.

14. The nozzle plate according to any one of the preceding claims, wherein, The one or more frames (60) include a stepped portion defining a support flange (67), and the support flange (67) is configured to be located below a corresponding edge portion of the sub-strip member (93).

15. The nozzle plate according to any one of the preceding claims, wherein, The sub-strip members (93) include one or more staggered edge portions (97) on the outer peripheral edge (94).

16. The nozzle plate according to any one of the preceding claims, wherein, Each of the sub-strip members (93) includes a plurality of staggered edge portions (97), and the staggered edge portions (97) are each arranged on opposite edges of the sub-strip member (93).

17. The nozzle plate according to any one of the preceding claims, wherein, The sub-strip members (93) have the same shape.

18. The nozzle plate according to any one of the preceding claims, wherein, Each of the sub-strip members (93) includes four or more staggered edge portions (97) arranged in two pairs (97a, 97b), and each pair is located on opposite edges of the sub-strip member (93).

19. The nozzle plate according to any one of the preceding claims, comprising two or more sub-strip members (93), wherein, The staggered edge portion (97i_2) on the first sub-bar-shaped member among the sub-bar-shaped members (93i) is arranged in an inlay relationship adjacent to and facing the corresponding staggered edge portion (97ii_1) on the second sub-bar-shaped member among the two or more sub-bar-shaped members (93ii).

20. The nozzle plate according to any one of the preceding claims, comprising three or more sub-strip members (93), wherein, At least two of the sub-bar-shaped members (93) are arranged adjacent to each other in an inlay relationship in the nozzle array direction (10), and at least two of the sub-bar-shaped members are arranged adjacent to each other in an inlay relationship in the spacing direction (5), and wherein the step portion (97) allows the three or more sub-bar-shaped members (93) to be aligned in an inlay relationship.

21. The nozzle plate according to any one of the preceding claims, comprising two or more strip-shaped members (92) arranged spaced apart from each other in the spacing direction (5), wherein, The spacing direction (5) is at a non-parallel angle to the array direction (10).

22. The nozzle plate according to claim 21, comprising a bridging portion (81) that extends in the spacing direction (5) and is arranged between adjacent spaced-apart bar-shaped members (92) to control the distance between the bar-shaped members (92).

23. The nozzle plate according to claim 22, wherein, The frame (60) comprises the bridging portion (81) formed of the same material as the frame (60).

24. The nozzle plate according to claim 22 or claim 23, wherein, The bridging portion (81) is connected to the one or more frames (60).

25. The nozzle plate according to any one of the preceding claims, comprising one or more outer frames (75) arranged adjacent to and surrounding the outer perimeter of the one or more frames (60), and when dependent on any one of claims 22 to 24, the one or more outer frames (75) are arranged adjacent to and surrounding one or more outer edges of the bridging portion (81).

26. The nozzle plate according to claim 25, wherein, The one or more outer frames (75) comprise a polymer.

27. A droplet ejection head comprising one or more nozzle plates according to any one of the preceding claims, and one or more fluid chambers (121) fluidly connected to one or more of the droplet ejection nozzles (131); wherein the fluid chamber (121) comprises an actuator that can be actuated to eject a fluid droplet from one of the one or more droplet ejection nozzles (131) in response to an ejection instruction.

28. A droplet ejection device comprising one or more droplet ejection heads according to claim 27.

29. A method of manufacturing a nozzle plate for a droplet ejection head, the method comprising: forming a release layer (100) on the top surface of a substrate (99); forming a seed layer (101) on top of the release layer (100); placing one or more sub-bar-shaped members (93) on the seed layer (101) and using a temporary adhesive to hold the one or more sub-bar-shaped members (93); forming one or more frames (60) around the one or more sub-bar-shaped members (93), wherein each of the one or more sub-bar-shaped members (93) fits within a corresponding opening (61) in the one or more frames (60); and peeling the nozzle plate from the substrate (99).

30. The method according to claim 29, comprising: After the step of peeling the nozzle plate from the substrate (99), the seed layer (101) is removed from the nozzle plate.

31. The method according to claim 29 or claim 30, comprising: After the step of peeling the nozzle plate from the substrate (99), the temporary adhesive is removed.

32. The method according to any one of claims 29 to 31, wherein, The step of forming the one or more frames (60) includes an electroplating process.

33. The method according to any one of claims 29 to 32, wherein The anchor (95) is disposed on the outer peripheral edge (94) of one or more of the sub-bar members (93), and the step of forming one or more frames (60) around the one or more sub-bar members (93) includes: forming frame material in and / or around the one or more anchors (95).

34. The method according to any one of claims 29 to 33, wherein, The outer frame (75) is formed before the step of forming the one or more frames (60).

35. The method according to claim 34, wherein, The outer frame (75) is a polymer outer frame (75) formed by spin coating and lithography.

36. The method according to claim 34 or claim 35, wherein, The method includes filling a gap between the outer frame (65) and the sub-bar members (93).

37. The method according to any one of claims 29 to 36, wherein The method includes electroplating nickel.

38. The method according to any one of claims 29 to 37, wherein Two or more sub-bar members (93) are spaced apart by a spacing distance (Sd), and a bridging portion (81) is formed between the sub-bar members (93).

39. The method according to any one of claims 29 to 38, wherein The one or more sub-bar members (93) include two or more stepped portions (97), and the step of placing the sub-bar members (93) includes: arranging two or more sub-bar members (93) such that two of the stepped portions (97) are arranged adjacent to each other on opposite sides of the sub-bar members (93).

40. A method of manufacturing a nozzle plate for a droplet ejection head, the method comprising: forming a frame (60); forming one or more openings (61) in the frame (60) such that a support flange (67a, 67b) is present in each of the openings (61); placing an adhesive on a part of the support flange (67a, 67b) in the opening (61) and / or on the boundary edge (64a, 64b) of the opening; placing one or more sub-bar members (93) in each of the openings (61) such that a part of the sub-bar member (93) is supported by the support flange; and curing the adhesive to attach the sub-bar member (93) to the frame (60).

41. The method according to claim 40, wherein The step of forming the one or more openings (61) includes etching or sandblasting.

42. The method according to claim 40 or claim 41, wherein, Before the step of placing the sub-bar members (93) in the openings (61), an actuator member is attached to one or more of the sub-bar members (93).

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