Waste stripping liquid recycling device for semiconductor manufacturing
Through the device integrating ultrasonic instrument, scraper film evaporator, adsorption tank and distillation tower, combined with filler components and process integration, the component separation problem in waste stripping liquid distillation recovery is solved, and efficient and low-cost waste stripping liquid recycling and treatment is achieved.
Patent Information
- Application Number
- CN202510651376.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-20
- Publication Date
- 2025-07-08
AI Technical Summary
In the prior art, the interaction between the components during the distillation and recycling of waste peeling liquid is complex, making it difficult to separate accurately, and the mist entrainment is difficult to control, resulting in low separation efficiency, high energy consumption, poor product quality, and affecting the yield rate of electronic products.
The recycling and processing device consisting of an ultrasonic device, a scraper film evaporator, an adsorption tank and a distillation tower is adopted. Combined with the filler assembly, a limiting mechanism, a transmission mechanism and a driving mechanism, the design and process integration of the filler assembly can achieve uniform distribution of the gas and liquid phases, reduce mist entrainment, and combine the film evaporation, adsorption and distillation processes to achieve efficient separation.
It significantly improves the mass transfer efficiency, reduces mist entrainment, improves product quality and separation effect, meets environmental protection standards, simplifies process flow, and reduces costs.
Smart Images
Figure CN120268076A_ABST
Abstract
Description
Technical Field
[0001] Embodiments of the present disclosure relate to the technical field of waste stripping liquid recovery and treatment, and in particular, to a waste stripping liquid recovery and treatment device for semiconductor manufacturing. Background Art
[0002] With the continuous expansion of the scale of electronic industry production, a large amount of waste stripping liquid will be generated in the production process of electronic semiconductors, liquid crystal displays, printed circuit boards and other industries, which brings severe challenges to enterprises and the environment. Waste stripping liquid usually contains a variety of organic components, such as alcohols, ketones, esters, etc., and may also contain a small amount of metal ions, such as copper, aluminum, iron, etc. In the existing waste stripping liquid distillation recovery process, due to the similar boiling points of the components in the waste stripping liquid and the problem of mist entrainment, it is difficult to achieve complete separation of certain key components in the distillation process. At the same time, the recovered product often contains a certain amount of impurities and metal ions. Mist entrainment will not only reduce the separation efficiency of the distillation tower, but also increase the pressure drop in the tower, increase energy consumption, and reduce production efficiency. The presence of impurities poses a potential threat to product quality in the subsequent electronic production process, resulting in a decrease in the yield rate of electronic products. The existence of these problems has seriously restricted the efficient operation and further promotion and application of the waste stripping liquid distillation recovery process, and it is urgent to solve; As an efficient separation technology, the adsorption distillation recovery process plays a key role in the field of waste stripping liquid treatment. First, through the adsorption process, the metal ions can be efficiently removed, and then the organic components are separated into high-purity products and recyclable materials through distillation. When the stripping liquid is distilled and recovered, due to the complex interactions between the components, the control effect of the filler on the gas and liquid may be affected, making it difficult to accurately achieve effective separation of the components, and the entrainment of mist and foam is also more difficult to control, making the effect of the entire distillation recovery process fall short of expectations. Summary of the invention
[0003] In order to overcome the above-mentioned defects, an embodiment of the present disclosure provides a waste stripping liquid recovery and processing device for semiconductor manufacturing, which is used to solve the technical problem in the prior art that when the stripping liquid is distilled and recovered, the complex interactions between the components may affect the regulating effect of the filler on the gas and liquid, making it difficult to accurately achieve effective separation of the components, and the entrainment of mist and foam is also more difficult to control, so that the effect of the entire distillation recovery process does not meet the expected technical problems.
[0004] According to one aspect, at least one embodiment of the present disclosure provides a waste stripping solution recovery and treatment device for semiconductor manufacturing, including an ultrasonic instrument, a wiped film evaporator, an adsorption tank, and a rectifying column. The upper side of the outer surface of the ultrasonic instrument is communicated with a liquid inlet pipe. The lower side of the ultrasonic instrument is communicated with the upper side of the wiped film evaporator through a connecting pipe. The lower side of the wiped film evaporator is communicated with the upper side of the adsorption tank through a connecting pipe. The lower side of the adsorption tank is communicated with the middle part of the outer surface of the rectifying column through a connecting pipe. It further includes: The packing component is arranged inside the rectifying column and is used for regulating gas-liquid two-phase. The protective shell is installed outside the rectifying column. The limiting mechanism is arranged inside the protective shell. The transmission mechanism is arranged on the limiting mechanism and can move horizontally along the limiting mechanism. The transmission mechanism is used to drive the structure inside the packing component to move. The driving mechanism is arranged inside the protective shell and is used to drive the transmission mechanism to move. The limiting mechanism is used to limit the transmission mechanism and the driving mechanism. The protective shell is used to shield and protect the limiting mechanism, the transmission mechanism, and the driving mechanism.
[0005] The packing component includes that a plurality of the metal corrugated sheets are arranged inside the rectifying column. The metal corrugated sheets can move horizontally inside the rectifying column. A plurality of the vertical grids are installed on the metal corrugated sheets. The vertical grids move synchronously with the metal corrugated sheets.
[0006] The limiting mechanism includes that the mounting plate is installed inside the protective shell. Two of the guide posts are installed on one side of the two sides of the mounting plate. The slide rail is installed on the other side of the two sides of the mounting plate.
[0007] The transmission mechanism includes that the transmission plate is sleeved on the guide posts and can move horizontally along the guide posts. A plurality of the transmission rods are installed on one side of the two sides of the transmission rod. The transmission rods move synchronously with the transmission plate. The plurality of transmission rods are respectively connected to the corresponding metal corrugated sheets. Two of the moving seats are installed on the other side of the two sides of the transmission plate. The moving seats move synchronously with the transmission plate. The spring is sleeved on the moving seat. The two ends of the spring are respectively connected to the mounting plate and the transmission plate. The spring is used to drive the transmission mechanism to return to its position.
[0008] The driving mechanism includes a crank rocker rotatably installed inside the protective housing. A driving member for driving the crank rocker to rotate is provided on the protective housing. The driving member is a forward and reverse motor. The collision plate is slidably connected to the slide rail. Two U-shaped rods are installed on one of the two sides of the collision plate. The U-shaped rods are hinged to the crank rocker through connecting plates. The two sides of the connecting plate are respectively sleeved on the crank rocker and the U-shaped rods. When the collision plate and the U-shaped rods rotate following the crank rocker through the connecting plates, they move horizontally synchronously.
[0009] As a preferred embodiment of the waste stripping liquid recovery and treatment device for semiconductor manufacturing according to the present invention, in order to drive the metal corrugated sheet to move without affecting the normal operation of the rectification column, a plurality of moving through holes are provided on the outer side of the rectification column. The inner diameter of the moving through hole is adapted to the outer diameter of the transmission rod. When the transmission rod moves synchronously with the transmission plate, it always blocks at the moving through hole.
[0010] As a preferred embodiment of the waste stripping liquid recovery and treatment device for semiconductor manufacturing according to the present invention, in order to realize the sliding limit of the collision plate and ensure the stability of the collision plate during sliding, the number of slide rails is two, and the shape of the slide rail is an I-shaped.
[0011] As a preferred embodiment of the waste stripping liquid recovery and treatment device for semiconductor manufacturing according to the present invention, in order to make the two moving seats move synchronously and avoid direct collision contact between the moving seats and the collision plate, a connecting plate is installed inside the two moving seats, and buffer pads are provided on the side of the moving seats away from the transmission plate on both sides.
[0012] The beneficial effects of the embodiments of the present disclosure are as follows: In the present disclosure, the packing assembly can play a certain guiding role in the flow directions of the gas flow and the liquid flow, prompting the gas-liquid two-phase to be more evenly distributed in the packing layer, thereby significantly improving the mass transfer efficiency and effectively reducing the occurrence of entrainment. The 30-degree inclination angle of the packing enables the liquid to flow smoothly and evenly downward along the corrugated sheet, and can be orderly distributed at different positions of the entire packing layer, avoiding the situation of excessive or insufficient liquid in local areas, creating favorable conditions for the uniform contact of the gas-liquid two-phase. A number of parallel spaced vertical gratings can guide the liquid to spread more evenly on the entire corrugated sheet, allowing the liquid to flow through each part of the corrugated sheet, and then achieving uniform distribution in the entire packing layer. The corrugation directions of adjacent two corrugated sheets are opposite. By continuously changing the flow direction, the liquid can be more evenly dispersed in the entire packing layer, fully mixed with the gas, strengthening the contact effect between the gas and the liquid, and improving the mass transfer efficiency. In the present disclosure, through the combined application of the limiting mechanism, the transmission mechanism, and the driving mechanism, the metal corrugated sheet and the vertical grille inside the packing component can be driven to move reciprocally, so that the gas-liquid two-phase can be more evenly distributed in the packing layer, further improving the mass transfer efficiency, effectively reducing the occurrence of entrainment of mists and droplets, and improving the recovery and treatment effect of the device on the waste stripping liquid; In the present disclosure, by deeply integrating the thin-film evaporation process, the adsorption process, and the rectification process, an integrated waste stripping liquid recovery and treatment system is constructed. In the system, the thin-film evaporation first realizes the preliminary separation of the solvent and the solute, the adsorption process removes metal ions, and then the organic solvent is precisely purified through rectification. Each technical unit cooperates with each other to ensure the high quality of the recovered product; In the present disclosure, the adsorption and rectification separation coupling process has many significant advantages compared with traditional treatment methods. The adsorption separation method can efficiently and selectively adsorb target metal ions. Even when the concentration of metal ions is low, it can still show excellent removal effects, reducing the concentration of metal ions in the wastewater to an extremely low level to meet the increasingly strict environmental protection discharge standards. Secondly, this process is easy to operate, without complex equipment and cumbersome process flows, and is easy to be popularized and applied in industrial production, effectively saving labor and material costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure, the following will briefly introduce the drawings required to be used in the description of the embodiments of the present disclosure. Obviously, the drawings in the following description are only some exemplary embodiments of the present disclosure. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the exemplary embodiments of the present disclosure and these drawings.
[0014] Figure 1 is a schematic structural diagram of the whole invention; Figure 2 is a cross-sectional schematic diagram of the internal structure of the rectification tower and the protective shell in the present invention; Figure 3 is an enlarged schematic diagram of the structure of the anti-entrainment structured packing in the present invention; Figure 4 is a schematic diagram of the structural composition of the limiting mechanism in the present invention; Figure 5 is a schematic diagram of the structural composition of the transmission mechanism in the present invention; Figure 6 is a schematic diagram of the structural composition of the driving mechanism in the present invention; Figure 7 For the present invention Figure 1 is an enlarged schematic diagram of the structure at position A in the present invention.
[0015] In the figure: 1. Ultrasonic instrument; 2. Scraped thin-film evaporator; 3. Adsorption tank; 4. Rectifying column; 5. Protective shell; 6. Opening and closing plate; 7. First connecting piece; 8. Second connecting piece; 101. Metal corrugated sheet; 102. Vertical grid; 201. Mounting plate; 202. Guide post; 203. Slide rail; 301. Transmission plate; 302. Transmission rod; 303. Moving seat; 304. Spring; 401. Crank rocker; 402. Collision plate; 403. U-shaped rod; 404. Connecting plate. Specific embodiments
[0016] The present disclosure will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present disclosure, rather than limiting the present disclosure.
[0017] For the sake of simplicity of the drawings, only the parts related to the disclosure are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, for the sake of simplicity and understanding of the drawings, in some figures, parts with the same structure or function are only schematically shown for one of them, or only one of them is marked. In this article, "one" not only means "only this one", but also means "more than one" situation, and "several" includes "two" and "more than two".
[0018] In this article, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific situations.
[0019] In the present disclosure, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but through other features between them. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or only indicating that the first feature is at a higher horizontal height than the second feature. The first feature being "below", "beneath" and "under" the second feature includes the first feature being directly below and obliquely below the second feature, or only indicating that the first feature is at a lower horizontal height than the second feature.
[0020] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "left", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operations, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present disclosure.
[0021] In addition, in the description of this application, the terms "first", "second", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.
[0022] Such as Figures 1 to 7As shown, it shows a waste stripping liquid recovery and treatment device for semiconductor manufacturing in an embodiment of the present disclosure, including an ultrasonic instrument 1, a wiped film evaporator 2, an adsorption tank 3, and a rectification tower 4. It also includes a packing component, a protective shell 5, a limiting mechanism, a transmission mechanism, and a driving mechanism. Comparing with the prior art in the rectification and recovery of stripping liquid, due to the complex interaction between components, it may affect the regulation effect of the packing on gas-liquid, resulting in difficulty in accurately achieving the effective separation of each component, and it is more difficult to control the entrainment of mist and foam. As a result, the effect of the entire rectification and recovery process fails to meet the expected technical problems. In this embodiment, the packing component can play a certain guiding role in the flow directions of the gas flow and liquid flow, prompting the gas-liquid two-phase to achieve a more uniform distribution in the packing layer, thereby significantly improving the mass transfer efficiency and effectively reducing the occurrence of entrainment of mist and foam. The 30-degree inclination angle of the packing enables the liquid to flow smoothly and evenly along the corrugated sheet downward, and can be orderly distributed at different positions of the entire packing layer, avoiding the situation of excessive or insufficient local liquid, creating favorable conditions for the uniform contact of the gas-liquid two-phase. A number of parallel spaced vertical grids can guide the liquid to spread more evenly on the entire corrugated sheet, allowing the liquid to flow through each part of the corrugated sheet, and then achieving a uniform distribution within the entire packing layer. The corrugation directions of adjacent two sheets are opposite. By constantly changing the flow direction, the liquid can be more evenly dispersed within the entire packing layer, fully mixed with the gas, strengthening the contact effect between the gas and liquid, and improving the mass transfer efficiency. Through the combined application of the limiting mechanism, the transmission mechanism, and the driving mechanism, it can drive the metal corrugated sheet 101 and the vertical grid 102 inside the packing component to move reciprocally, thereby enabling the gas-liquid two-phase to be more evenly distributed in the packing layer, further improving the mass transfer efficiency, being able to more effectively reduce the occurrence of entrainment of mist and foam, and improving the recovery and treatment effect of the device on the waste stripping liquid. By deeply integrating the thin film evaporation process, the adsorption process, and the rectification process, an integrated waste stripping liquid recovery and treatment system is constructed. In the system, the thin film evaporation first realizes the preliminary separation of the solvent and the solute, the adsorption process removes metal ions, and subsequently the organic solvent is precisely purified through rectification. Each technical unit cooperates with each other to ensure the high quality of the recovered product. The adsorption and rectification separation coupling process has many significant advantages compared with traditional treatment methods. The adsorption separation method can efficiently and selectively adsorb target metal ions. Even when the concentration of metal ions is relatively low, it can still show excellent removal effects, and can reduce the concentration of metal ions in the wastewater to an extremely low level, meeting the increasingly strict environmental protection emission standards. Secondly, this process is easy to operate, without complex equipment and cumbersome process flows, and is easy to promote and apply in industrial production, being able to effectively save labor and material costs.
[0023] As Figure 1 and Figure 2As shown in the figure, a liquid inlet pipe is connected to the upper side of the outer surface of the ultrasonic instrument 1. The lower side of the ultrasonic instrument 1 is connected to the upper side of the scraping thin-film evaporator 2 through a connecting pipe. The lower side of the scraping thin-film evaporator 2 is connected to the upper side of the adsorption tank 3 through a connecting pipe. The lower side of the adsorption tank 3 is connected to the middle part of the outer surface of the rectifying column 4 through a connecting pipe. A packing component is arranged inside the rectifying column 4. The packing component includes metal corrugated sheets 101 and vertical grids 102. The scraping thin-film evaporator 2 is equipped with a scraper and a distributor inner member with a special structure to ensure that the material forms a uniform film on the heating wall surface, reduce local dry wall and overheating phenomena, and improve the heat transfer efficiency and evaporation stability. The adsorption selective ion exchange resin adsorbent can remove charged impurities such as metal ions in the waste stripping solution through ion exchange. The functional groups of the ion exchange resin show a strong affinity for the metal ions in the waste stripping solution. Through mechanisms such as ion exchange, the metal ions are captured from the main body of the solution and enriched on the surface of the adsorbent. This not only effectively reduces the concentration of metal ions in the waste stripping solution but also improves the treatment efficiency of the overall process. For example Figure 3 As shown in the figure, the packing in the rectifying column 4 is a demisting entrainment type structured packing. The demisting entrainment type structured packing includes metal corrugated sheets 101. A number of parallel spaced vertical grids 102 are provided on the metal corrugated sheets 101 every 1.7 millimeters. The present invention adopts a new type of recovery and treatment device and high-efficiency packing materials, which significantly improves the product quality while effectively removing metal ions in the waste stripping solution; For example Figure 1 And Figure 2 As shown in the figure, a protective shell 5 is installed outside the rectifying column 4. A limiting mechanism is arranged inside the protective shell 5. A transmission mechanism is arranged on the limiting mechanism. A driving mechanism is arranged inside the protective shell 5. For example Figure 4 As shown in the figure, the limiting mechanism includes a mounting plate 201, guide posts 202 and slide rails 203. The number of slide rails 203 is two, and the shape of the slide rails 203 is I-shaped. As Figure 5 shown in the figure, the transmission mechanism includes a transmission plate 301, transmission rods 302, moving seats 303 and springs 304. A connecting plate is installed inside the two moving seats 303. Buffer pads are arranged on the sides of the moving seats 303 away from the transmission plate 301. A plurality of moving through holes are formed on the outer side of the rectifying column 4. The inner diameter of the moving through holes is adapted to the outer diameter of the transmission rods 302. When the transmission rods 302 move, they will move inside the moving through holes. As Figure 6As shown in the figure, the driving mechanism includes a crank rocker 401, a collision plate 402, a U-shaped rod 403 and a connecting plate 404. When the collision plate 402 slides, it slides along the slide rail 203. The slide rail 203 can limit the sliding of the collision plate 402, thus ensuring the stability of the collision plate 402 during sliding. When the collision plate 402 drives the moving seat 303 to move by collision, the buffer gasket can buffer between the moving seat 303 and the collision plate 402, thus avoiding direct contact between the moving seat 303 and the collision plate 402, and extending the service life of the device. When the driving mechanism operates, it can drive the metal corrugated sheet 101 and the vertical grille 102 to move reciprocally through the transmission mechanism, thus realizing the movement of the metal corrugated sheet 101 and the vertical grille 102, and enabling the gas-liquid two-phase in the packing component to be more evenly distributed in the packing layer, thereby enhancing the treatment effect on the waste stripping liquid; As Figure 1 and Figure 7 shown in the figure, the upper side of the protective shell 5 is hinged with an opening and closing plate 6 through a hinge. The upper side of the opening and closing plate 6 is provided with a handle and a first connecting member 7. The upper side of the protective shell 5 is provided with a second connecting member 8. Magic tapes are provided on both the first connecting member 7 and the second connecting member 8. The staff can open and close the opening and closing plate 6 through the handle, and the opened opening and closing plate 6 can be kept in a vertical state for a long time by the adhesion of the first connecting member 7 and the second connecting member 8.
[0024] Working principle: The waste stripping liquid enters the interior of the ultrasonic instrument 1 through the liquid inlet pipe. The ultrasonic instrument 1 shatters the large impurities in the waste stripping liquid. Then, the waste stripping liquid enters the interior of the scraper thin-film evaporator 2 through the connecting pipe. The scraper thin-film evaporator 2 removes the solid impurities and large particulate matter therein. The treated waste stripping liquid enters the adsorption tank 3 through the connecting pipe. The adsorption tank 3 uses ion exchange resin as an adsorbent to remove impurities such as metal ions in the waste stripping liquid. The waste stripping liquid after adsorption treatment enters the distillation column 4 for separation. The anti-foam entrainment type structured packing assembly inside the distillation column 4 has been processed and manufactured. The inclination angle of the upper corrugation direction of the metal corrugated sheet 101 with respect to the tower axis is 30 degrees. A number of parallel spaced vertical gratings 102 are provided on the metal corrugated sheet 101 every 1.7 mm. The gas-liquid two-phase is evenly distributed in the packing layer for mass transfer. During the mass transfer process, the positive and reverse motor is started. The positive and reverse motor drives the crank rocker 401 to rotate. During the rotation of the crank rocker 401, the collision plate 402 is driven to slide along the slide rail 203 through the U-shaped rod 403 and the connecting plate 404. When the collision plate 402 slides towards the moving seat 303, it will impact the moving seat 303, causing the moving seat 303 to move. The moving seat 303 drives the transmission plate 301 to move. During the movement of the transmission plate 301, the spring 304 will be stretched. The transmission plate 301 drives the metal corrugated sheet 101 and the vertical grating 102 to move through the transmission rod 302. When the collision plate 402 slides along the slide rail 203 towards the direction of the crank rocker 401, the transmission plate 301 will move back to its original position under the action of the spring 304. The transmission plate 301 drives the metal corrugated sheet 101 and the vertical grating 102 to return to their original positions through the transmission rod 302, so as to be able to drive the metal corrugated sheet 101 and the vertical grating 102 to move reciprocally, thereby making the gas-liquid two-phase more evenly distributed in the packing layer.
[0025] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present disclosure and are not restrictive. Although the present disclosure has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present disclosure can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present disclosure, and they should all be covered within the scope of the claims of the present disclosure.
Claims
1. A waste stripping liquid recovery and treatment device for semiconductor manufacturing, comprising an ultrasonic instrument (1), a scraping thin-film evaporator (2), an adsorption tank (3) and a rectifying column (4), characterized in that, Further included are: a packing component which is arranged inside the rectification column (4) and is used for regulating gas-liquid two-phase; a protective shell (5) which is installed outside the rectification column (4); a limiting mechanism which is arranged inside the protective shell (5); a transmission mechanism which is arranged on the limiting mechanism and can horizontally move along the limiting mechanism, and the transmission mechanism is used for driving the structure inside the packing component to move; a driving mechanism which is arranged inside the protective shell (5) and is used for driving the transmission mechanism to move, and the limiting mechanism is used for limiting the transmission mechanism and the driving mechanism.
2. The waste stripping liquid recovery and treatment device for semiconductor manufacturing according to claim 1, wherein, The packing component includes: metal corrugated sheets (101), a plurality of the metal corrugated sheets (101) are arranged inside the rectification column (4), and the metal corrugated sheets (101) can horizontally move inside the rectification column (4); vertical gratings (102), a plurality of the vertical gratings (102) are installed on the metal corrugated sheets (101), and the vertical gratings (102) move synchronously with the metal corrugated sheets (101).
3. The waste stripping liquid recovery and treatment device for semiconductor manufacturing according to claim 2, characterized in that, The limiting mechanism includes: a mounting plate (201) which is installed inside the protective shell (5); guide posts (202), two of the guide posts (202) are installed on one side of the two sides of the mounting plate (201); a slide rail (203) which is installed on the other side of the two sides of the mounting plate (201).
4. A waste stripping solution recycling and treatment device for semiconductor manufacturing according to claim 3, characterized in that, The transmission mechanism includes: a transmission plate (301) which is sleeved on the guide posts (202) and can horizontally move along the guide posts (202); transmission rods (302), a plurality of the transmission rods (302) are installed on one side of the two sides of the transmission rod (302), the transmission rods (302) move synchronously with the transmission plate (301), and the plurality of transmission rods (302) are respectively connected to the corresponding metal corrugated sheets (101); moving seats (303), two of the moving seats (303) are installed on the other side of the two sides of the transmission plate (301), and the moving seats (303) move synchronously with the transmission plate (301); springs (304) which are sleeved on the moving seats (303), and two ends of the springs (304) are respectively connected to the mounting plate (201) and the transmission plate (301), and the springs (304) are used for driving the transmission mechanism to return to its original position.
5. A waste stripping liquid recovery and treatment device for semiconductor manufacturing according to claim 3, characterized in that, The driving mechanism includes: a crank rocker (401) which is rotatably installed inside the protective shell (5), and a driving member for driving the crank rocker (401) to rotate is arranged on the protective shell (5); a collision plate (402) which is slidably connected to the slide rail (203); U-shaped rod (403), two of the U-shaped rods (403) are installed on one of the two sides of the collision plate (402), the U-shaped rod (403) is hinged to the crank rocker (401) through a connecting plate (404), both sides of the connecting plate (404) are sleeved on the crank rocker (401) and the U-shaped rod (403) respectively, and when the collision plate (402) and the U-shaped rod (403) rotate following the crank rocker (401) through the connecting plate (404), they move horizontally synchronously.
6. A waste stripping solution recycling and treatment device for semiconductor manufacturing according to claim 4, characterized in that, A plurality of moving through holes are formed on the outer side of the rectification tower (4), the inner diameter of the moving through hole is adapted to the outer diameter of the transmission rod (302), and the transmission rod (302) always blocks at the moving through hole when moving synchronously with the transmission plate (301).
7. A waste stripping solution recycling and treatment device for semiconductor manufacturing according to claim 3, characterized in that, The number of the slide rails (203) is two, and the shape of the slide rail (203) is an I-shaped.
8. A waste stripping solution recycling and treatment device for semiconductor manufacturing according to claim 4, characterized in that, A connecting plate is installed on the inner sides of the two moving seats (303), and buffer gaskets are arranged on one side of the two sides of the moving seat (303) away from the transmission plate (301).