Flexible substrate composite material preparation device with efficient cooling function

Abstract

The flexible substrate composite material preparation device with the efficient cooling function comprises a PVD main platform, a flexible material winding and unwinding system and a vacuum obtaining system, the right side of the PVD main platform is connected with a metal vaporization system, and a movable platform capable of moving is installed below the right side of a vacuum cabin; and a flexible material folding and unfolding system is arranged on the outer side of the upper end of the movable platform. The invention belongs to the technical field of preparation of flexible substrate composite materials, and aims to solve the problems that when an existing flexible composite material is used for preparing a functional layer with the thickness exceeding hundreds of nm, the preparation process is too long, quality control is difficult, the loss rate of finished products is high, and labor and energy cost is too high. The method has the technical effects that the problems that the preparation process for preparing the flexible substrate composite material with the thickness exceeding hundreds of nanometers is too long, quality control is difficult, the loss rate of finished products is high, and the labor and energy cost is too high are solved.

Description

Technical Field

[0001] The present invention belongs to the technical field of the preparation of flexible substrate composite materials, and particularly relates to a device for preparing flexible substrate composite materials with efficient cooling. Background Art

[0002] As an important means for preparing flexible substrate composite materials, the PVD material preparation technology overcomes some of the disadvantages of traditional methods to a certain extent. Its basic principle is that in a vacuum environment, by heating the metal vaporization source material, its atoms or molecules obtain sufficient energy to break away from the surface, forming a gas-phase atomic flow, and then depositing a thin film on the substrate surface. This technology has the advantages of simple operation, fast film formation rate, and the ability to prepare thin films of various materials, so it has been widely used in industrial production processes.

[0003] However, a mainstream technical route for preparing flexible substrate composite materials on the current market is PVD material preparation. Most of the current PVD material preparation devices on the market are for single-station single-sided material preparation or double-station double-sided material preparation (i.e., one station for each of the A and B sides). The thickness of the material prepared in a single startup is relatively thin. For individual materials, the maximum thickness of a single-layer film is 400 nm. Taking the packaging film as an example, only a single-sided thin film needs to be prepared, and the thickness is only a few dozen nm. For the special industry requirements, the market demands that the thickness of each side of the double-layer film reaches 1000 to 1500 nm, or even higher thickness. This requirement greatly increases the risks of belt breakage and thermal shrinkage deformation of the flexible material during heating in the material preparation process. Therefore, most flexible substrate composite material preparation devices generally adopt repeated startup for multiple times of material preparation and material preparation with surface replacement, resulting in too long a process for preparing metal vaporization materials, making quality control difficult, leading to a high finished product loss rate, and too high labor and energy costs. Summary of the Invention

[0004] Therefore, the present invention provides a device for preparing flexible substrate composite materials with efficient cooling to solve the problems of too long PVD material preparation process, difficult quality control, high finished film loss rate, and too high labor and energy costs when preparing functional layers with a thickness exceeding several hundred nm in the existing composite material preparation.

[0005] In order to achieve the above object, the present invention provides the following technical solutions: A device for preparing flexible substrate composite materials with efficient cooling, including a PVD main platform, a flexible material winding and unwinding system, and a vacuum acquisition system. The right side of the PVD main platform is connected with a metal vaporization system, and a vacuum chamber is arranged on the right side of the metal vaporization system. A movable mobile platform is installed below the right side of the vacuum chamber; On the outer side of the upper end of the mobile platform, a flexible material winding and unwinding system is provided. On the right side of the flexible material winding and unwinding system, a mobile vehicle is connected, and on the outer side of the mobile vehicle, a cryogenic circulation system for cooling is connected. At the rear side of the vacuum chamber, a vacuum acquisition system is installed through a pump assembly.

[0006] Furthermore, the pump assembly connected to the vacuum acquisition system consists of a vacuum mechanical pump, a Roots pump, a diffusion pump, a molecular pump, valves, pipelines, and instruments. On the outer side of the vacuum acquisition system, a second control system is provided.

[0007] Furthermore, the flexible material winding and unwinding system includes a vacuum housing, a film unwinding roll, an internally cooled insulating roller, a metal vaporization source, and a temperature monitoring system. In the middle of the right side of the vacuum housing, a hole structure for evacuating is provided. Inside the left side of the vacuum housing, a film unwinding roll is arranged. Inside the vacuum housing, four groups of internally cooled insulating rollers are arranged.

[0008] Furthermore, two groups of the internally cooled insulating rollers are arranged flush with each other at the lower part inside the vacuum housing, and the other two groups of the internally cooled insulating rollers are arranged flush with each other at the upper part inside the vacuum housing. Right below each group of the internally cooled insulating rollers, a metal vaporization source is provided, and on the right side of the metal vaporization source, a temperature monitoring system is provided.

[0009] Furthermore, the flexible material winding and unwinding system also includes conductive guide rollers, internally cooled conductive auxiliary rollers, a cryogenic system, and an on-line film thickness monitoring system. Inside the vacuum housing, multiple groups of conductive guide rollers are arranged. Among them, one group of the conductive guide rollers is located obliquely above one group of the internally cooled insulating rollers at the lower left side of the vacuum housing, and internally cooled conductive auxiliary rollers are arranged obliquely above the other three groups of the internally cooled insulating rollers.

[0010] Furthermore, inside the right side of the vacuum housing, a cryogenic system is installed. Obliquely above the cryogenic system, an on-line film thickness monitoring system is provided. Above the on-line film thickness monitoring system, an on-line film temperature monitoring system, which is also inside the vacuum housing, is provided.

[0011] Furthermore, the flexible material winding and unwinding system also includes an arch roller. The arch roller is installed at the upper right inside the vacuum housing. Inside the upper left of the vacuum housing, a swing system is provided, and above the swing system, a film winding roll is provided.

[0012] Furthermore, on the outer side of the vacuum housing, a first control system is provided. Inside the vacuum housing, an ion source for eliminating static electricity on the film is also provided.

[0013] Compared with the prior art, the present invention has the following advantages: 1. There are four groups of inner-cooling insulating rollers arranged on the inner side of the vacuum housing. Two of the inner-cooling insulating rollers are arranged flush at the lower part of the inner side of the vacuum housing, and the other two inner-cooling insulating rollers are arranged flush at the upper part of the inner side of the vacuum housing, which is convenient to play the role of realizing the preparation of materials at four stations on both sides in a single startup through the inner-cooling insulating rollers. It can vaporize the same or different metals at one time, and at the same time, the electrostatic adsorption technology is added to tightly wrap the film around the cooling roller, so as to increase the heat accumulation of the cooling roller during the heating and deposition processes of the flexible film. It can realize the preparation of double-sided ultra-thick film layers in a single startup. The thickness of a single-sided film layer can reach 2000 nm in a single time, and the finished product can meet the requirements of films for special industries. The process route is short, the material preparation work can be completed in a single startup, and the labor and energy costs are low. 2. The two inner-cooling insulating rollers arranged on both sides of the lower part of the inner side of the vacuum housing play the role of preparing the A side of the material twice, and the two inner-cooling insulating rollers on the upper part of the inner side of the vacuum housing play the role of preparing the B side of the material twice. The two ion sources are respectively located in front of the preparation of the A side and in front of the preparation of the B side. The one in front of the preparation of the A side plays the role of cleaning the A side of the film, increasing the adhesion of the film layer, and eliminating the static electricity on the film. Before the preparation of the B side, the B side of the film is cleaned, the adhesion of the film layer is increased, and the residual potential on the film is eliminated. Description of the Drawings

[0014] To more intuitively illustrate the prior art and the present application, the following exemplary drawings are given. It should be understood that the specific shapes and structures shown in the drawings generally should not be regarded as limiting conditions when implementing the present application; for example, those skilled in the art are capable of making routine adjustments or further optimizations to the addition / deletion / attribution division of certain units (components), specific shapes, positional relationships, connection methods, dimensional ratio relationships, etc. based on the technical concept disclosed in the present application and the exemplary drawings.

[0015] Figure 1 It is the front view of a flexible substrate composite material preparation device with efficient cooling provided by some embodiments of the present invention.

[0016] Figure 2 It is the top view of the connection between the vacuum chamber and the vacuum acquisition system of a flexible substrate composite material preparation device with efficient cooling provided by some embodiments of the present invention.

[0017] Figure 3 It is the front sectional view of the flexible material winding and unwinding system of a flexible substrate composite material preparation device with efficient cooling provided by some embodiments of the present invention.

[0018] Description of the Reference Numerals: 1. PVD main platform; 2. Metal vaporization system; 3. Vacuum chamber; 4. Mobile platform; 5. Flexible material winding and unwinding system; 51. Vacuum housing; 52. Film unwinding roll; 53. Internally cooled insulating roll; 54. Conductive guide roll; 55. Metal vaporization source; 56. Internally cooled conductive auxiliary roll; 57. Cryogenic system; 58. Online film thickness monitoring system; 59. Online film temperature monitoring system; 510. Bow roll; 511. Temperature monitoring system; 512. Oscillation system; 513. Film winding roll; 514. Ion source; 515. First control system; 6. Mobile cart; 7. Cryogenic circulation system; 8. Vacuum acquisition system; 9. Second control system. Detailed implementation manners

[0019] The following further details the present application through specific embodiments in conjunction with the accompanying drawings.

[0020] As Figures 1 to 3 shown, a flexible substrate composite material preparation device with efficient cooling in an embodiment of the present invention includes: a PVD main platform 1, a flexible material winding and unwinding system 5, and a vacuum acquisition system 8. A metal vaporization system 2 is connected to the right side of the PVD main platform 1, and a vacuum chamber 3 is arranged on the right side of the metal vaporization system 2. A movable mobile platform 4 is installed below the right side of the vacuum chamber 3; Among them, the PVD main platform 1 can move left and right as a whole, and the metal vaporization system 2 and the power supply components are mechanically moved to realize the functions of the metal vaporization system 2 entering and exiting the vacuum housing 51. Four sets of metal vaporization sources 55 and power supplies are integrally installed to ensure the programmed heating and temperature control of the metal vaporization source 55 after the chamber is closed; after the chamber is opened, the metal vaporization system 2 can be cleaned and maintained by multiple groups of personnel.

[0021] The metal vaporization system 2 has four sets of independent metal vaporization components, configured with metal vaporization boats, metal vaporization crucibles, power input busbars, covers, temperature control instruments, etc., and independently perform heating and cooling functions according to the program. The cover can be independently opened, which is convenient for the process control at the start and end of the preparation, and also convenient for maintenance after the chamber is opened.

[0022] When the metal vaporization system 2 works, first evacuate the environment where the metal vaporization system 2 is located, and then put the material to be prepared into the metal vaporization crucible. The power input busbar is energized and heated by resistance to provide energy for the metal vaporization boat and the metal vaporization crucible, and the temperature control instrument monitors the temperature of each set of components in real time to ensure accurate temperature control. The metal vaporization crucible melts the high-melting-point material, and then the metal vaporization boat is used for fine metal vaporization. During the metal vaporization process, the cover is opened to heat and melt the material in the metal vaporization boat and vaporize the metal, and the metal gas flows towards the substrate and deposits on the surface of the substrate to form a thin film.

[0023] Meanwhile, the metal vaporization system 2 is also provided with an on-line feeding component, which is configured with a wire feeding roller, a servo drive wheel set, a wire straightening wheel set and a wire feeding protection tube. Among them, the wire feeding roller is connected to the output end of the drive motor and is used to drive the wire feeding to rotate, so as to achieve precise wire feeding through the servo drive wheel set and the wire straightening wheel set. Moreover, the shape of the wire feeding protection tube coincides with the straightening center of the servo drive wheel set and the wire straightening wheel set to achieve smooth feeding without jamming. At the same time, the servo motor can be driven through an external control interface to realize the variable speed regulation of the wire material and match the precise feeding of various metal raw materials.

[0024] On the outer side of the upper end of the mobile platform 4, a flexible material winding and unwinding system 5 is provided. On the right side of the flexible material winding and unwinding system 5, a mobile vehicle 6 is connected, and on the outer side of the mobile vehicle 6, a cryogenic circulation system 7 for cooling is connected; Among them, the mobile platform 4 mainly plays a supporting role. When the equipment is started, when the flexible material winding and unwinding system 5 moves out to a certain position, the mobile platform 4 moves towards the inner side of the vacuum chamber. When the equipment is working, when the rollers move to the guide rails in the chamber, the mobile platform 4 moves outwards.

[0025] The flexible material winding and unwinding system 5 is the carrier of the vacuum PVD process environment and also the structural support for the combined operation of the metal vaporization system 2, the flexible material winding and unwinding system 5, etc. The flexible material winding and unwinding system 5 is composed of a winding and unwinding reel and each roller system. The flexible film material is wound and unwound through the roller system, and functions such as flattening and cooling the film material are carried out during the preparation process.

[0026] The mobile vehicle 6 can move left and right as a whole, and mechanically move with the flexible material winding and unwinding system 5 and the cryogenic circulation system 7 to realize the function of the flexible material winding and unwinding system 5 entering and exiting the vacuum housing 51. It realizes the functions of opening the chamber for cleaning, loading and unloading film rolls, and maintenance. After closing the chamber, it combines with the metal vaporization system 2 to prepare the film material.

[0027] The cryogenic circulation system 7 can cool the internal cooling insulating roller 53 to realize the preparation of the film material at a specified temperature. Cooling the thin film can improve the working efficiency of the vacuum pumping system 8.

[0028] Among them, two sets of cryogenic circulation systems 7 are provided. One set is used to cool the internal cooling insulating roller 53, and the working temperature is controlled below -30 °C to facilitate the preparation of the film material at a specified temperature. The other set is used to cool the thin film, and the working temperature is controlled between -160 °C and -180 °C. It can quickly cool down after one-sided preparation of the thin film, so as to ensure that the surface temperature of the thin film is always within the controllable range, ensuring layer uniformity and adhesion. The two sets of systems work together to provide a reliable low-temperature guarantee for the preparation process.

[0029] The vacuum acquisition system 8 is installed at the rear side of the vacuum chamber 3 through a pump assembly. The pump assembly connected to the vacuum acquisition system 8 consists of a vacuum mechanical pump, a Roots pump, a diffusion pump, a molecular pump, valves, pipes, and instruments. A second control system 9 is arranged outside the vacuum acquisition system 8.

[0030] Among them, the vacuum acquisition system 8 can provide the equipment with a vacuum condition from the atmosphere to 10-4 Pa through the pump assembly, so as to achieve the purpose of realizing the automatic control function.

[0031] The flexible material winding and unwinding system 5 includes a vacuum housing 51, a film unwinding roll 52, an internally cooled insulating roller 53, a metal vaporization source 55, and a temperature monitoring system 511. A hole structure for vacuum pumping is provided in the middle of the right side of the vacuum housing 51, and a film unwinding roll 52 is arranged inside the left side of the vacuum housing 51. Four groups of internally cooled insulating rollers 53 are arranged inside the vacuum housing 51.

[0032] Among them, when preparing composite materials, the vacuum chamber 3 and the cryogenic circulation system 7 can be combined with the flexible material winding and unwinding system 5, and are sealed through a sealing structure during combination. Sealing rings are arranged on the end face flanges of the three systems, which facilitates keeping the inside of the vacuum housing 51 in a vacuum environment during preparation.

[0033] Two groups of internally cooled insulating rollers 53 are arranged flush with each other at the lower part inside the vacuum housing 51, and the other two groups of internally cooled insulating rollers 53 are arranged flush with each other at the upper part inside the vacuum housing 51. A metal vaporization source 55 is arranged directly below each group of internally cooled insulating rollers 53, and a temperature monitoring system 511 is arranged on the right side of the metal vaporization source 55.

[0034] Among them, the internally cooled insulating rollers 53 play a role in cooling the film layer metal and the substrate for continuously preparing the A side and the B side. The two groups of internally cooled insulating rollers 53 arranged on both sides of the lower part inside the vacuum housing 51 play a role in preparing the A side twice, and the two groups of internally cooled insulating rollers 53 at the upper part inside the vacuum housing 51 play a role in preparing the B side twice.

[0035] Under vacuum, the metal vaporization source 55 can sublime or melt materials through heating to form gaseous atoms, providing raw materials for material preparation. At the same time, the temperature monitoring system 511 plays a role in real-time detecting the temperature of the metal vaporization source 55 to ensure that the metal vaporization source 55 works within the optimal temperature range.

[0036] The flexible material winding and unwinding system 5 further includes conductive guide rollers 54, internally cooled conductive auxiliary rollers 56, a cryogenic system 57, and an on-line film thickness monitoring system 58. Multiple groups of conductive guide rollers 54 are arranged inside the vacuum housing 51, and one group of conductive guide rollers 54 is located obliquely above one group of internally cooled insulating rollers 53 on the lower left side of the vacuum housing 51, and internally cooled conductive auxiliary rollers 56 are arranged obliquely above the other three groups of internally cooled insulating rollers 53.

[0037] On the right side inside the vacuum housing 51, a cryogenic system 57 is installed. Above the cryogenic system 57 at an oblique angle, a film thickness on-line monitoring system 58 is provided. Above the film thickness on-line monitoring system 58, a film temperature on-line monitoring system 59 which is also located inside the vacuum housing 51 is provided.

[0038] Among them, the conductive guide roller 54 is connected to a high-voltage power supply, and the power supply voltage does not exceed 600V. As part of the electrode, a uniform electrostatic field is formed on the surface of the substrate. By adjusting the voltage of the conductive guide roller 54, the electrostatic intensity on the surface of the substrate can be controlled, thereby optimizing the adsorption efficiency of the vapor deposition particles.

[0039] During material preparation, the cryogenic system 57 is located behind two groups of internal cooling insulating rollers 53 provided on both sides of the lower part inside the vacuum housing 51. The cooling medium is at -100 to -160 °C. It cools the film layer metal and the substrate on the A side through short-distance thermal radiation, laying the foundation for the preparation of the B side. During material preparation, the film temperature and the temperature value of the metal vaporization source 55 determine the quality of the film layer. If the temperature is too high after the preparation of the A side, it will affect the quality of the B side material preparation.

[0040] During material preparation, film temperature on-line monitoring systems 59 are respectively arranged before and after the process of the cryogenic system 57. The film temperature on-line monitoring systems 59 and the cryogenic system 57 form a closed-loop control. By adjusting the temperature of the cryogenic system 57 and the area of the cooling medium passing through the area of the cryogenic system 57, the temperature parameters before the preparation of the B side material are ensured to be consistent. The joint control ensures the matching between the substrate and the plating material during the material preparation process, and reduces the internal stress at the contact surface between the plating material and the substrate.

[0041] At the same time, the film thickness on-line monitoring systems 58 are respectively located at the rear sides of the two groups of internal cooling insulating rollers 53. During material preparation, they respectively play the role of real-time monitoring of the film thickness values on both sides of the film, and the signal values are fed back to the PLC to adjust the power of the metal vaporization source 55 and the film running speed online, and the film thickness values on both sides are controlled by closed-loop adjustment.

[0042] The flexible material winding and unwinding system 5 further includes an arc-shaped roller 510. The arc-shaped roller 510 is installed in the upper right part inside the vacuum housing 51. Inside the vacuum housing 51, a swing system 512 is provided in the upper left part, and above the swing system 512, a film winding roll 513 is provided. The rotation direction of the film winding roll 513 is opposite to the rotation direction of the swing system 512.

[0043] Among them, the arc-shaped roller 510 can be used in cooperation with the conductive guide roller 54 to form a non-uniform electric field through a curved surface electrode. The electric field intensity is enhanced in the edge area of the substrate to compensate for the weakening of the adsorption force caused by the edge effect, thereby improving the deposition uniformity of the film edge.

[0044] A first control system 515 is provided on the outside of the vacuum housing 51, and an ion source 514 for eliminating static electricity on the film is also provided inside the vacuum housing 51.

[0045] Among them, two groups of ion sources 514 are respectively located in front of the preparation surface A and in front of the preparation surface B. In front of the preparation surface A, it is used to clean the surface A of the film, increase the adhesion of the film layer, and eliminate the static electricity on the film. In front of the preparation surface B, it cleans the surface B of the film, increases the adhesion of the film layer, and eliminates the residual potential on the film.

[0046] In the vacuum PVD technology, the film thickness is correlated with the metal vaporization temperature of the metal vaporization source 55, the vacuum degree, the film running line speed, etc. The film layer quality is correlated with the temperature stability of the metal vaporization source 55, the purity of the film material, the flatness of the film material preparation area, the cooling stability of the film material preparation area, and its own temperature, etc. The first control system 515 can respectively perform closed-loop parameter real-time acquisition and optimization adjustment for the film materials on the preparation surfaces A and B, set independent algorithms for different substrates and different film thicknesses, and perform optimization and closed-loop control in real time through the host computer to achieve intelligent control of the film thickness and the film layer quality.

[0047] When preparing materials by PVD, the composite preparation of the same metal or different metals can be realized at one time. For example, metal material one is loaded into the metal vaporization source 55 under the inner cooling insulating roller 53 on the lower left side, and metal material two is loaded into the metal vaporization source 55 under the inner cooling insulating roller 53 on the lower right side. At the end of the preparation, a combination of substrate + metal material one + metal material two will appear in one preparation.

[0048] By setting the parameters of different vaporization sources, the preparation of materials with different local thicknesses can be realized. For example, metal material one is loaded into the metal vaporization source 55 under the inner cooling insulating roller 53 on the lower left side, and at this time, the temperature of the metal vaporization source 55 is controlled at 1000 °C. Then, the temperature of the metal vaporization source 55 under the inner cooling insulating roller 53 on the lower right side is 1100 °C, so that the metal vaporization material received by the inner cooling insulating roller 53 on the lower left side is less than that received by the inner cooling insulating roller 53 on the lower right side, so as to control the bonding force between the substrate and the metal.

[0049] Such as Figure 3 As shown, the film is threaded according to the film threading method in the figure. The film roll 52 unwinds the film and finally the film roll 513 winds the film; the two sides of the film are prepared in one startup of the film. The lower inner cooling insulating roller 53 and the metal vaporization source 55 prepare the surface A twice, and then are transmitted to the upper inner cooling insulating roller 53 and the metal vaporization source 55 through the roller system to prepare the surface B twice; finally, it swings into the film roll 513 through the swing system 512 until the entire film roll is completely prepared. Thus, it plays the role of realizing double-sided four-station preparation in one startup, that is, two stations for each of the surfaces A and B, can realize the metal vaporization of the same or different metals at one time, and at the same time increase the electrostatic adsorption technology, realize the preparation of double-sided ultra-thick film layers in one startup. The single-sided film layer thickness can reach 2000 nm at one time, and the finished product meets the requirements of special industry films. The process route is short, the preparation work is completed in one startup, and the labor and energy costs are low.

[0050] The technical features of the above embodiments can be combined arbitrarily (as long as there is no conflict in the combination of these technical features). For the sake of concise description, all possible combinations of the technical features in the above embodiments are not described; these embodiments that are not explicitly written should also be considered to be within the scope described in this specification.

Claims

1. A preparation device for a flexible substrate composite material with efficient cooling, comprising a PVD main platform (1), a flexible material winding and unwinding system (5) and a vacuum acquisition system (8), characterized in that, The right side of the PVD main platform (1) is connected to a metal vaporization system (2), and a vacuum chamber (3) is arranged on the right side of the metal vaporization system (2). A movable mobile platform (4) is installed below the right side of the vacuum chamber (3); A flexible material winding and unwinding system (5) is arranged on the outer side of the upper end of the mobile platform (4). The right side of the flexible material winding and unwinding system (5) is connected to a mobile vehicle (6), and a cryogenic circulation system (7) for cooling is connected to the outer side of the mobile vehicle (6); A vacuum acquisition system (8) is installed at the rear side of the vacuum chamber (3) through a pump assembly.

2. The preparation device of a flexible substrate composite material with efficient cooling according to claim 1, characterized in that The pump assembly connected to the vacuum acquisition system (8) consists of a vacuum mechanical pump, a Roots pump, a diffusion pump, a molecular pump, valves, pipelines and instruments. A second control system (9) is arranged on the outer side of the vacuum acquisition system (8).

3. The preparation device of a flexible substrate composite material with high-efficiency cooling according to claim 2, characterized in that, The flexible material winding and unwinding system (5) includes a vacuum housing (51), a film unwinding roll (52), an internally cooled insulating roller (53), a metal vaporization source (55) and a temperature monitoring system (511). A hole structure for vacuum pumping is arranged in the middle of the right side of the vacuum housing (51), and a film unwinding roll (52) is arranged inside the left side of the vacuum housing (51). Four groups of internally cooled insulating rollers (53) are arranged inside the vacuum housing (51).

4. The preparation device of a flexible substrate composite material with efficient cooling according to claim 3, characterized in that Two groups of the internally cooled insulating rollers (53) are arranged flush with each other at the lower part inside the vacuum housing (51), and the other two groups of the internally cooled insulating rollers (53) are arranged flush with each other at the upper part inside the vacuum housing (51). A metal vaporization source (55) is arranged directly below each group of the internally cooled insulating rollers (53), and a temperature monitoring system (511) is arranged on the right side of the metal vaporization source (55).

5. The device for preparing a flexible substrate composite material with high-efficiency cooling according to claim 3, characterized in that, The flexible material winding and unwinding system (5) further includes conductive guide rollers (54), internally cooled conductive auxiliary rollers (56), a cryogenic system (57) and an on-line film thickness monitoring system (58). Multiple groups of conductive guide rollers (54) are arranged inside the vacuum housing (51), and one group of the conductive guide rollers (54) is located obliquely above one group of the internally cooled insulating rollers (53) at the lower left side of the vacuum housing (51). Internally cooled conductive auxiliary rollers (56) are arranged obliquely above the other three groups of the internally cooled insulating rollers (53).

6. The device for preparing a flexible substrate composite material with high-efficiency cooling according to claim 5, characterized in that, A cryogenic system (57) is installed on the right side inside the vacuum housing (51), and an on-line film thickness monitoring system (58) is arranged obliquely above the cryogenic system (57). An on-line film temperature monitoring system (59) which is also located inside the vacuum housing (51) is arranged above the on-line film thickness monitoring system (58).

7. The preparation device of a flexible substrate composite material with efficient cooling according to claim 1, characterized in that, The flexible material winding and unwinding system (5) further includes an arc-shaped roller (510). The arc-shaped roller (510) is installed at the upper right inside the vacuum housing (51). A swing system (512) is arranged at the upper left inside the vacuum housing (51), and a film winding roll (513) is arranged above the swing system (512).

8. The device for preparing a flexible substrate composite material with high-efficiency cooling according to claim 3, characterized in that A first control system (515) is arranged on the outer side of the vacuum housing (51), and an ion source (514) for eliminating static electricity on the film is also arranged inside the vacuum housing (51).

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