Single crystal furnace heat exchange system and single crystal furnace equipment

Abstract

The invention discloses a single crystal furnace heat exchange system and single crystal furnace equipment, and relates to the technical field of wafer manufacturing equipment.The single crystal furnace heat exchange system comprises a rack, a first furnace body fixedly installed on the rack, a second furnace body movably installed on the rack, a lifting plate connected to the rack in a sliding mode and a conveying structure used for conveying a cooling medium, the conveying structure has a first state and a second state; the linkage structure can control the conveying structure to be switched between the first state and the second state after being driven by the lifting plate, in the furnace disassembling process of the second furnace body, the cooling target of a cooling medium is passively switched, cooling of the first furnace body is switched to cooling of the second furnace body during crystal bar production, and the cooling efficiency of the second furnace body is improved. In this way, the cooling effect of the second furnace body is accelerated, meanwhile, the first furnace body stops cooling and is in the heat preservation state, and heat loss of the first furnace body is reduced while the cooling efficiency of the second furnace body is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer manufacturing equipment, and particularly to a heat exchange system for a single crystal furnace and a single crystal furnace device. Background Art

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon with a graphite heater in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals by the Czochralski method. During the preparation process of the single crystal furnace, silicon raw materials are placed in a quartz crucible in the furnace body for high-temperature melting (above 1450 °C). Under low vacuum and argon protection, after a seed crystal is inserted into the silicon melt, a supercooled state is formed around the seed crystal and regular growth occurs. By gradually raising the height of the seed crystal to the secondary furnace chamber, a single crystal rod is formed.

[0003] During the growth process of the crystal rod, the temperature of the molten liquid contained in the crucible in the main furnace chamber is above 1450 degrees, and a large amount of radiant heat generated is transferred to the furnace body of the main furnace chamber. Currently, heat exchange is used to reduce the temperature of the furnace body to avoid excessive furnace body temperature. After the crystal rod grows to the set length, the crystal rod is completely lifted into the secondary furnace chamber, and the valve between the main furnace chamber and the secondary furnace chamber is closed. At this time, new materials are added to the main furnace body through the feeding port, and heating is stopped, and only the waste heat is used to heat the new materials. The feeding of the crystal rod requires waiting for the temperature in the secondary furnace chamber to drop to the set value before the furnace can be disassembled. The furnace is disassembled by lifting the secondary furnace chamber upward to separate it from the main furnace chamber, and after rotating a certain angle, the crystal lifting motor located at the top of the secondary furnace chamber controls the crystal rod to descend to achieve the separation of the crystal rod from the secondary furnace chamber. Currently, the secondary furnace chamber is in a connected state with the main furnace chamber during the crystal pulling process, so its temperature is also much higher than the set disassembly temperature. Therefore, long-term heat dissipation will inevitably lead to more heat loss in the main furnace chamber and increased energy consumption during continuous production. Summary of the Invention

[0004] The purpose of the present invention is to provide a heat exchange system for a single crystal furnace and a single crystal furnace device to solve the deficiencies in the above-mentioned prior art.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A single crystal furnace device includes a frame, a first furnace body fixedly installed on the frame, a second furnace body movably installed on the frame, and a lifting plate slidably connected to the frame. The lifting plate has a first position, a second position, and a third position in its moving stroke. It further includes:

[0006] A conveying structure for conveying a cooling medium, and the conveying structure has a first state and a second state;

[0007] Linkage structure, after receiving the drive of the lifting plate, the linkage structure can control the conveying structure to switch between the first state and the second state. When the conveying structure is in the first state, the first furnace body and the second furnace body are connected, and the conveying structure conveys the cooling medium into the first furnace body. At the second position, the first furnace body and the second furnace body are sealed, and the conveying structure conveys the cooling medium into the second furnace body;

[0008] Disassembly part, after receiving the drive of the lifting plate, the disassembly part controls the second furnace body to deflect to separate from the conveying structure.

[0009] Preferably, the linkage structure includes a function plate, an inclined groove, a fixing plate and a pull rod. The function plate is fixedly installed on the lifting plate, the inclined groove is formed on the function plate, one end of the fixing plate is installed on the conveying structure, the pull rod is fixedly installed on the fixing plate, and the end of the pull rod is slidably connected to the inner wall of the inclined groove.

[0010] Preferably, a heat dissipation channel is provided inside the first furnace body, a furnace cover is fixedly installed on the upper part of the first furnace body, and a pair of diversion holes are provided inside the furnace cover. The lower end of one of the diversion holes is connected to one end of the heat dissipation channel, and the other diversion hole is connected to the other end of the heat dissipation channel.

[0011] Preferably, the conveying structure includes a housing and a valve flap. The housing is installed on the top of the furnace cover. A crystal rod through hole penetrating up and down is provided in the middle of the housing. Through holes penetrating up and down are provided on both sides of the middle of the housing. The lower ends of a pair of the through holes are respectively connected to a pair of diversion holes. An avoidance hole is provided inside the valve flap. Conveying holes are provided on both sides of the valve flap. The upper part of the conveying hole is connected to a first overflow hole, and the lower part of the conveying hole is connected to a second overflow hole. In the first state, the first overflow hole is connected to the through hole, and the crystal rod through hole and the avoidance hole are concentric. In the second state, the second overflow hole is connected to the through hole, and the valve flap blocks the crystal rod through hole.

[0012] Preferably, the second furnace body includes a first pipe fitting, a second pipe fitting, a conduit, a partition plate and a falling hole. The first pipe fitting is sleeved outside the second pipe fitting. The partition plate is arranged between the first pipe fitting and the second pipe fitting. The falling hole is provided on the partition plate. The conduit is fixedly installed on the partition plate, and the lower end of the conduit is connected to one of the through holes.

[0013] Preferably, a mounting seat is slidably connected to the frame. A central shaft is rotatably connected to the mounting seat. A connecting rod is fixedly installed on the central shaft, and the other end of the connecting rod is fixedly installed on the second furnace body.

[0014] Preferably, the disassembly part includes a cylinder, a cross bar, a T-shaped block, a limiting plate, and a protruding rod. The cylinder is fixedly installed on the upper part of the central shaft. A guiding groove is provided on the cylinder. The cross bar is fixedly installed on the frame. The T-shaped block is slidably inserted on the cross bar. The limiting plate is fixedly installed on the lower part of the T-shaped block. The protruding rod is fixedly installed on the lower part of the limiting plate. One end of the protruding rod extends into the guiding groove.

[0015] Preferably, a first clamping groove is provided in the upper part of the guiding groove, and a second clamping groove is provided in the lower part of the guiding groove. In the first state, the protruding rod is located in the upper part of the guiding groove and is embedded in the first clamping groove. In the second state, the protruding rod is located in the lower part of the guiding groove and is embedded in the second clamping groove.

[0016] Preferably, it further includes a power unit for driving the lifting plate to displace in the vertical direction.

[0017] A heat exchange system for a single crystal furnace, which is used to convey a cooling medium to the single crystal furnace equipment, includes a heat exchange device. The heat exchange device is connected to the single crystal furnace equipment through a hose.

[0018] In the above technical solution, for a heat exchange system for a single crystal furnace and a single crystal furnace equipment provided by the present invention, after the crystal rod is generated, the lifting plate rises to drive the linkage structure to control the switching of the conveying structure, so that the first furnace body and the second furnace body are sealed, and the cooling medium is switched from cooling the first furnace body during crystal rod production to cooling the second furnace body. In this way, the cooling effect of the second furnace body is accelerated, and at the same time, it is ensured that the first furnace body stops cooling and is in a heat preservation state. After the cooling is completed, the lifting plate continues to move to the third position to turn over the second furnace body to facilitate the crystal rod unloading. In this way, while improving the cooling efficiency of the second furnace body, the heat loss of the first furnace body is reduced. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings.

[0020] Figure 1 It is a schematic diagram of the overall structure of a heat exchange system for a single crystal furnace and a single crystal furnace equipment of the present invention;

[0021] Figure 2 It is a schematic diagram of the structure when in the second position of a heat exchange system for a single crystal furnace and a single crystal furnace equipment of the present invention;

[0022] Figure 3Schematic diagram of the structure when the second furnace body of a heat exchange system and a single crystal furnace equipment of the present invention is lifted;

[0023] Figure 4 Schematic diagram of the structure at the third position of a heat exchange system and a single crystal furnace equipment of the present invention;

[0024] Figure 5 For an attachment of a heat exchange system and a single crystal furnace equipment of the present invention Figure 2 Schematic diagram of the enlarged structure at point A in the figure;

[0025] Figure 6 For an attachment of a heat exchange system and a single crystal furnace equipment of the present invention Figure 4 Schematic diagram of the enlarged structure at point B in the figure;

[0026] Figure 7 Cross-sectional view of the first furnace body of a heat exchange system and a single crystal furnace equipment of the present invention;

[0027] Figure 8 Schematic diagram of the structure of the first state of the conveying structure of a heat exchange system and a single crystal furnace equipment of the present invention.

[0028] Figure 9 Schematic diagram of the structure of the conveying structure of a heat exchange system and a single crystal furnace equipment of the present invention in the second state;

[0029] Figure 10 For an attachment of a heat exchange system and a single crystal furnace equipment of the present invention Figure 8 Schematic diagram of the enlarged structure at point D in the figure;

[0030] Figure 11 For an attachment of a heat exchange system and a single crystal furnace equipment of the present invention Figure 8 Schematic diagram of the enlarged structure at point E in the figure;

[0031] Figure 12 For an attachment of a heat exchange system and a single crystal furnace equipment of the present invention Figure 9 Schematic diagram of the enlarged structure at point C in the figure;

[0032] Figure 13 Schematic diagram of the structure of the linkage structure of a heat exchange system and a single crystal furnace equipment of the present invention in the first state;

[0033] Figure 14 Schematic diagram of the structure of the linkage structure of a heat exchange system and a single crystal furnace equipment of the present invention in the second state;

[0034] Figure 15 Schematic diagram of the column structure of a heat exchange system and a single crystal furnace equipment of the present invention.

[0035] Description of the reference numerals in the drawings:

[0036] 1. Frame; 2. First furnace body; 21. Heat dissipation channel; 22. Furnace lid; 23. Flow guiding hole; 3. Mounting seat; 4. Central shaft; 41. Connecting rod; 5. Second furnace body; 51. First pipe fitting; 52. Second pipe fitting; 53. Conduit; 54. Partition plate; 541. Drop hole; 6. Conveying structure; 61. Housing; 611. Through hole; 612. Crystal bar through hole; 62. Valve flap; 621. Conveying hole; 622. Second overflow hole; 623. First overflow hole; 624. Avoidance hole; 7. Lifting plate; 8. Linkage structure; 81. Function plate; 82. Inclined groove; 83. Fixed plate; 84. Pull rod; 9. Dismantling part; 91. Cylinder; 92. Guide groove; 921. First clamping groove; 922. Second clamping groove; 93. Cross bar; 94. T-shaped block; 95. Limiting plate; 96. Protruding rod; 10. Lead screw; 11. Heat exchange device. Detailed implementation manners

[0037] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further introduced in detail below with reference to the accompanying drawings.

[0038] Please refer to Figures 1-15 , a single crystal furnace heat exchange system and a single crystal furnace device provided by an embodiment of the present invention, a single crystal furnace device, including a frame 1, a first furnace body 2 fixedly installed on the frame 1, a second furnace body 5 movably installed on the frame 1, and a lifting plate 7 slidably connected to the frame 1. There are a first position, a second position, and a third position on the moving stroke of the lifting plate 7. It further includes:

[0039] A conveying structure 6 for conveying a cooling medium, and the conveying structure 6 has a first state and a second state;

[0040] A linkage structure 8, after being driven by the lifting plate 7, the linkage structure 8 can control the conveying structure 6 to switch between the first state and the second state. At the first position, the conveying structure 6 is in the first state. At this time, the first furnace body 2 and the second furnace body 5 are communicated, and the conveying structure 6 conveys the cooling medium into the first furnace body 2. At the second position, the first furnace body 2 and the second furnace body 5 are sealed, and the conveying structure 6 conveys the cooling medium into the second furnace body 5;

[0041] A dismantling part 9, after being driven by the lifting plate 7, the dismantling part 9 controls the second furnace body 5 to deflect to achieve separation from the conveying structure 6.

[0042] The shape of the frame 1 is set to an L shape. The first furnace body 2 is installed at the lower part of the frame 1, while the lifting plate 7 is slidably connected to the vertical section of the frame 1. The lifting plate 7 can change its height along the frame 1 in the vertical direction. During the moving stroke of the lifting plate 7, there are a first position, a second position, and a third position. At the first position, the first furnace body 2 and the second furnace body 5 are in a communicating state. At this time, the crystal pulling state is in progress. The first furnace body 2 is at a high temperature. A seed crystal is inserted into the silicon melt in the first furnace body 2, and the seed crystal is gradually rotated and lifted by the crystal pulling motor provided in the second furnace body 5 to form a supercooled state around the seed crystal and grow regularly. By gradually raising the height of the seed crystal into the second furnace body 5, a single crystal rod is formed (the principle of the single crystal furnace is prior art, and the specific technical solutions and principles of the single crystal furnace will not be elaborated here). When the lifting plate 7 moves from the first position to the second position, the linkage structure 8 will perform corresponding actions. At the second position, the linkage structure 8 will drive the conveying structure 6 to switch its state. At the first position, the conveying structure 6 is in the first state. In the first state, the first furnace body 2 and the second furnace body 5 are connected through the conveying structure 6 to enable smooth crystal pulling. During the crystal pulling process, the melt contained in the crucible in the first furnace body 2, and a large amount of radiant heat generated by the melt will be transferred to the first furnace body 2 in the main furnace chamber. Cooling medium can be conveyed into the first furnace body 2 through the conveying structure 6 to cool the outer wall of the first furnace body 2, avoiding the overheating of the first furnace body 2, protecting the first furnace body 2 and external electromechanical equipment. After the crystal pulling is completed and the crystal rod completely enters the second furnace body 5, at this time, the lifting plate 7 moves towards the second position, and the lifting plate 7 will drive the linkage structure 8 to move. The linkage structure 8 will drive the conveying structure 6 to switch from the first state to the second state. In the second state, the conveying structure 6 blocks the connection between the first furnace body 2 and the second furnace body 5, and at the same time, the conveying structure 6 will cut off the cooling medium flowing to the first furnace body 2, and the cooling medium will flow into the second furnace body 5. Through the circulation of the cooling medium, the heat in the second furnace body 5 can be quickly absorbed, enabling the second furnace body 5 to quickly reduce the demolding temperature. In this way, it has the following effects. At the first position, by conveying the cooling medium into the first furnace body 2 through the conveying structure 6, the furnace wall of the first furnace body 2 can be cooled, avoiding the overheating of the first furnace body 2 caused by high-temperature radiation, effectively isolating the heat generated by the melt contained in the crucible in the first furnace body 2, and protecting the safety of the external electromechanical equipment of the first furnace body 2. When the lifting plate 7 moves upward, the connection between the first furnace body 2 and the second furnace body 5 is blocked by the conveying structure 6. At this time, the first furnace body 2 and the second furnace body 5 are in a mutually independent state, and the cooling medium will be conveyed into the second furnace body 5. The cooling medium comes from the same input source. At this time, the second furnace body 5 is quickly cooled. And because the connection between the first furnace body 2 and the second furnace body 5 is blocked, the blockage plays a role in insulating the first furnace body 2 at this time. The first furnace body 2 and the second furnace body 5 use the same input source, depending on the different preparation processes of the crystal rod,Separate cooling is performed on the first furnace body 2 and the second furnace body 5, which firstly improves the production efficiency of the crystal bar and reduces the temperature loss in the first furnace body 2, playing a certain energy-saving role;

[0043] After the second furnace body 5 is cooled to the demoulding temperature, it continues to move upward through the lifting plate 7. The lifting plate 7 will be linked with the disassembly part 9, and the disassembly part 9 will control the angle deflection of the second furnace body 5, so that the second furnace body 5 and the first furnace body 2 are staggered, facilitating the unloading of the crystal bar in the second furnace body 5. It has the following beneficial effects: the switching of the cooling source of the conveying structure 6 and the offset of the second furnace body 5 are both realized through the displacement of the lifting plate 7, reducing the use of electromechanical equipment of the equipment.

[0044] In another embodiment of the present invention, the linkage structure 8 includes a function plate 81, an inclined groove 82, a fixing plate 83 and a pull rod 84. The function plate 81 is fixedly installed on the lifting plate 7, the inclined groove 82 is opened on the function plate 81, one end of the fixing plate 83 is installed on the conveying structure 6, the pull rod 84 is fixedly installed on the fixing plate 83, and the end of the pull rod 84 is slidably connected to the inner wall of the inclined groove 82.

[0045] Refer to Figure 13 、 Figure 14 The function plate 81 is fixed on one side of the lifting plate 7. In this way, when the lifting plate 7 moves in the vertical direction, it can drive the function plate 81 to move synchronously. The inclined groove 82 is opened on the function plate 81. In the vertical direction of the inclined groove 82, the opening direction faces the lifting plate 7 until it reaches the position of the lifting plate 7 and then vertically downward. The pull rod 84 is slidably connected to the inner wall of the inclined groove 82, and the fixing plate 83 is connected to the conveying structure 6. When the lifting plate 7 moves towards the second position, the lifting plate 7 will move upward. When the lifting plate 7 moves upward, the pull rod 84 is subjected to the pressure of the inclined groove 82, and the pull rod 84 will drive the fixing plate 83 to move horizontally, so that the fixing plate 83 pulls the conveying structure 6 to switch from the first state to the second state.

[0046] In another embodiment of the present invention, a heat dissipation channel 21 is opened inside the first furnace body 2, a furnace cover 22 is fixedly installed on the upper part of the first furnace body 2, and a pair of diversion holes 23 are opened inside the furnace cover 22. The lower end of one of the diversion holes 23 is connected to one end of the heat dissipation channel 21, and the other diversion hole 23 is connected to the other end of the heat dissipation channel 21.

[0047] Refer to Figure 7, a heat dissipation channel 21 is provided in the first furnace body 2. The heat dissipation channel 21 is spirally provided in the furnace wall of the first furnace body 2. A furnace cover 22 is provided at the upper part of the first furnace body 2. The furnace cover 22 reduces the diameter of the first furnace body 2, and a diversion hole 23 is provided in the furnace cover 22. The two diversion holes 23 are respectively connected to both ends of the heat dissipation channel 21. The cooling medium can flow into the heat dissipation channel 21 from one end. After circulating in the first furnace body 2 for one week, it will flow into the heat dissipation channel 21 from the other end and be discharged from the heat dissipation channel 21 through the other diversion hole 23. In this way, by continuously circulating the cooling medium, the purpose of cooling the first furnace body 2 can be achieved.

[0048] In another embodiment of the present invention, the conveying structure 6 includes a housing 61 and a valve flap 62. The housing 61 is installed on the top of the furnace cover 22. A crystal rod through hole 612 that penetrates up and down is provided in the middle of the housing 61. Through holes 611 that penetrate up and down are provided on both sides of the middle of the housing 61. The lower ends of a pair of through holes 611 are respectively connected to a pair of diversion holes 23. An avoidance hole 624 is provided in the valve flap 62. Conveying holes 621 are provided on both sides of the valve flap 62. A first overflow hole 623 is connected to the upper part of the conveying hole 621, and a second overflow hole 622 is connected to the lower part of the conveying hole 621. In the first state, the first overflow hole 623 is connected to the through hole 611, and the crystal rod through hole 612 and the avoidance hole 624 are concentric. In the second state, the second overflow hole 622 is connected to the through hole 611, and the valve flap 62 blocks the crystal rod through hole 612.

[0049] Please refer to Figures 8-12 , the housing 61 is installed on the upper part of the furnace cover 22. Through the crystal rod through hole 612 provided on the housing 61, it can be used for the smooth penetration of the crystal rod during the crystal pulling operation. Attached Figure 8 is the positional relationship between the valve flap 62 and the housing 61 in the first state. At this time, it is in the crystal pulling state. Therefore, the avoidance hole 624 and the crystal rod through hole 612 are concentric, so as to ensure the smooth passage of the crystal rod. Moreover, a pair of conveying holes 621 are distributed on both sides of the valve flap 62. The conveying holes 621 are connected to the external cooling medium. The cooling medium can be injected into one of the conveying holes 621, and the other conveying hole 621 establishes a circuit with the external cooling medium conveying equipment. The cooled cooling medium is discharged through one of the conveying holes 621. In the first state, at this time, the lower part of the first overflow hole 623 is communicated with the through hole 611, and the lower part of the through hole 611 is connected to the diversion hole 23. The cooling medium can smoothly enter the diversion hole 23 through the conveying of the conveying hole 621 and enter the first furnace body 2 through the diversion hole 23. In this way, during the crystal pulling process, the second furnace body 2 is continuously cooled to avoid damage to the furnace body caused by high temperature. In the second state, such as Figure 9As shown, at this time, the valve flap 62 blocks the crystal rod through-hole 612. In the second state, correspondingly, the crystal pulling ends. At this time, the crystal rod completely enters the second furnace body 5. At this time, the valve flap 62 isolates between the first furnace body 2 and the second furnace body 5. At this time, since the position of the valve flap 62 changes, the delivery of the corresponding cooling medium will also change synchronously. At this time, as Figure 12 shown, under the pulling force of the linkage structure 8, the valve flap 62 is pulled outwards. The valve flap 62 blocks the crystal rod through-hole 612. At this time, the second overflow hole 622 will be linked to the upper part of the through-hole 611, while the first overflow hole 623 is in a closed state. The through-hole 611 is connected to the second furnace body 5. In this way, the cooling medium conveyed by the conveying hole 621 will enter the second furnace body 5 to cool the second furnace body 5, so as to quickly reach the furnace removal temperature and improve the production efficiency of the crystal rod. The first furnace body 2 and the second furnace body 5 are blocked by the valve flap 62. At this time, the blockage plays a role in heat preservation for the first furnace body 2. There is still molten liquid in the crucible in the first furnace body 2, and new materials can be added to the molten liquid to absorb the high temperature in the crucible. The first furnace body 2 and the second furnace body 5 can automatically distribute the cooling medium according to the crystal rod production process. The first furnace body 2 and the second furnace body 5 dissipate heat independently, reducing the temperature influence between the two and reducing energy consumption.

[0050] The second furnace body 5 includes a first pipe fitting 51, a second pipe fitting 52, a conduit 53, a partition plate 54 and a falling hole 541. The first pipe fitting 51 is sleeved outside the second pipe fitting 52. The partition plate 54 is arranged between the first pipe fitting 51 and the second pipe fitting 52. The falling hole 541 is opened on the partition plate 54. The conduit 53 is fixedly installed on the partition plate 54. The lower end of the conduit 53 is connected to one of the through-holes 611.

[0051] Please refer to Figure 8 、 Figure 9 、 Figure 11 、 Figure 12 , in the first state, the second furnace body 5 covers the crystal rod through-hole 612 and makes the first furnace body 5 and the crystal rod through-hole 612 concentric to ensure the smooth progress of crystal pulling. In the second state, the valve flap 62 blocks the crystal rod through-hole 612, and the lower part of the conduit 53 is connected to the through-hole 611. The cooling medium is conveyed to the conduit 53 through the through-hole 611. The conduit 53 conveys the cooling medium above the partition plate 54. A cavity is formed between the partition plate 54, the first pipe fitting 51 and the second pipe fitting 52. The cooling medium is conveyed into this cavity. A falling hole 541 is opened on the partition plate 54. The cooling medium falls through the falling hole 541. During the falling process of the cooling medium, it can dissipate heat from the first pipe fitting 51 and the second pipe fitting 52. When the cooling medium falls to the bottom, it can be discharged through the through-hole 611 provided on the other side. In this way, the cooling medium circulation can be completed.

[0052] In another embodiment of the present invention, a mounting base 3 is slidably connected to the frame 1, a central shaft 4 is rotatably connected to the mounting base 3, a connecting rod 41 is fixedly mounted on the central shaft 4, and the other end of the connecting rod 41 is fixedly mounted on the second furnace body 5.

[0053] The mounting seat 3 is slidably connected to the frame 1, and the frame 1 can change its height in the vertical direction. The central shaft 4 can rotate on the mounting seat 3, and the central shaft 4 can change its height in the vertical direction along with the mounting seat 3. The central shaft 4 is connected to the second furnace body 5 through a connecting rod 41, so that when the central shaft 4 rotates, it can drive the second furnace body 5 to swing, so that the second furnace body 5 and the first furnace body 2 can be staggered with each other. The lifting plate 7 is arranged below the mounting seat 3. When the lifting plate 7 moves from the second position to the third position, the lifting plate 7 squeezes the mounting seat 3, so that the mounting seat 3 can be raised in height in the vertical direction along with the lifting plate 7, so that the second furnace body 5 can be raised in height and the second furnace body 5 and the conveying structure 6 can be separated.

[0054] The disassembly portion 9 includes a column 91, a cross bar 93, a T-shaped block 94, a limit plate 95, and a protruding rod 96. The column 91 is fixedly mounted on the upper part of the central axis 4, and a guide groove 92 is provided on the column 91. The cross bar 93 is fixedly mounted on the frame 1, and the T-shaped block 94 is slidably inserted on the cross bar 93. The limit plate 95 is fixedly mounted on the lower part of the T-shaped block 94, and the protruding rod 96 is fixedly mounted on the lower part of the limit plate 95, and one end of the protruding rod 96 extends into the guide groove 92.

[0055] The disassembly part 9 is used to passively drive the second furnace body 5 to make a flipping action during the upward movement on the mounting base 3, so as to ensure that after the second furnace body 5 rises to a certain height, it will flip at a certain angle to realize the staggering of the second furnace body 5 and the first furnace body 2, so as to ensure that the ingots in the second furnace body 5 can be unloaded smoothly. During the movement of the lifting plate 7 from the second position to the third position, the lifting plate 7 drives the mounting base 3 to move upward, the upward movement of the mounting base 3 drives the second furnace body 5 to move upward, and the upward movement of the mounting base 3 will drive the column body 91 to move upward. When the column body 91 moves upward, a thrust is applied to the convex rod 96, and the convex rod 96 drives the limiting plate 95 and the T-shaped block 94 to move upward. After moving upward a certain height, the limiting plate 95 will abut against the cross bar 93, and the limiting plate 95 cannot continue to move. At this time, the mounting base 3 continues to drive the column body 91 to move upward, and in this way, the convex rod 96 squeezes the guide groove 92. When the convex rod 96 squeezes the guide groove 92, the column body 91 will be subjected to a rotational force, and the column body 91 will continue to move upward and rotate during the upward movement, so that the position of the convex rod 96 in the guide groove 92 changes. Since the column body 91 is installed on the central shaft 4, therefore, the rotation of the column body 91 can drive the central shaft 4 to rotate, and correspondingly, the second furnace body 5 can be driven to swing. In this way, during the upward movement of the mounting base 3, the second furnace body 5 is passively driven to swing to realize the staggering of the second furnace body 5 and the first furnace body 2, so as to facilitate the unloading of the ingots after the furnace is disassembled.

[0056] In another embodiment of the present invention, a first card slot 921 is provided in the upper part of the guide groove 92, and a second card slot 922 is provided in the lower part of the guide groove 92. In the first state, the convex rod 96 is located in the upper part of the guide groove 92 and is embedded in the first card slot 921. In the second state, the convex rod 96 is located in the lower part of the guide groove 92 and is embedded in the second card slot 922. By respectively providing the first card slot 921 and the second card slot 922 in the upper and lower parts of the guide groove 92, in this way, a locking effect on the column body 91 can be realized. In the first state, the convex rod 96 is clamped in the first card slot 921. At this time, under the restriction of the convex rod 96, the column body 91 cannot rotate, and the column body 91 is accurately positioned, so as to ensure the accurate docking of the second furnace body 5 and the first furnace body 2. After the furnace is disassembled, the convex rod 96 is clamped in the second card slot 922, and the rotation of the column body 91 can also be restricted. At this time, the second furnace body 5 and the first furnace body 2 are staggered, so as to improve the stability of the second furnace body 5 during ingot blanking.

[0057] It further includes a power unit, which is used to drive the lifting plate 7 to displace in the vertical direction. The power unit includes a lead screw 10 and a motor. The lead screw 10 is threadedly connected to the lifting plate 7, and the motor is used to drive the lead screw 10 to rotate. When the lead screw 10 rotates, it can drive the lifting plate 7 to displace in the vertical direction.

[0058] Refer to Figure 1, in another embodiment of the present invention, a heat exchange system for a single crystal furnace is provided, which is used to convey a cooling medium to the single crystal furnace equipment. The heat exchange system includes a heat exchange device 11, and the heat exchange device 11 is connected to the single crystal furnace equipment through a hose. The heat exchange device 11 is respectively connected to a conveying structure 6 through a pair of hoses. The heat exchange device 11 conveys a cooling medium with a lower temperature into the conveying structure 6 through one of the hoses. After circulating and absorbing heat in the first furnace body 2 or the second furnace body 5, it will be re-conveyed back into the heat exchange device 11 through the other hose. The heat exchange device 11 cools the cooling medium and then re-conveys it into the conveying structure 6.

[0059] Only some exemplary embodiments of the present invention have been described by way of illustration above. Undoubtedly, for those of ordinary skill in the art, the described embodiments can be modified in various different ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A single crystal furnace device, comprising a frame (1), a first furnace body (2) fixedly installed on the frame (1), a second furnace body (5) movably installed on the frame (1), and a lifting plate (7) slidably connected to the frame (1), characterized in that, There are a first position, a second position, and a third position on the moving stroke of the lifting plate (7), and it further includes: A conveying structure (6) for conveying a cooling medium, and the conveying structure (6) has a first state and a second state; A linkage structure (8) that can control the conveying structure (6) to switch between the first state and the second state after being driven by the lifting plate (7). At the first position, the conveying structure (6) is in the first state. At this time, the first furnace body (2) and the second furnace body (5) are connected, and the conveying structure (6) conveys the cooling medium into the first furnace body (2). At the second position, the first furnace body (2) and the second furnace body (5) are sealed, and the conveying structure (6) conveys the cooling medium into the second furnace body (5); A disassembly part (9) that controls the second furnace body (5) to deflect to separate from the conveying structure (6) after being driven by the lifting plate (7).

2. The single crystal furnace device according to claim 1, characterized in that The linkage structure (8) includes a function plate (81), an inclined slot (82), a fixing plate (83), and a pull rod (84). The function plate (81) is fixedly installed on the lifting plate (7), the inclined slot (82) is opened on the function plate (81), one end of the fixing plate (83) is installed on the conveying structure (6), the pull rod (84) is fixedly installed on the fixing plate (83), and the end of the pull rod (84) is slidably connected to the inner wall of the inclined slot (82).

3. A single crystal furnace device according to claim 1, characterized in that A heat dissipation channel (21) is opened inside the first furnace body (2), a furnace cover (22) is fixedly installed on the upper part of the first furnace body (2), and a pair of diversion holes (23) are opened inside the furnace cover (22). The lower end of one of the diversion holes (23) is connected to one end of the heat dissipation channel (21), and the other diversion hole (23) is connected to the other end of the heat dissipation channel (21).

4. A single crystal furnace device according to claim 3, characterized in that The conveying structure (6) includes a housing (61) and a valve flap (62). The housing (61) is installed on the top of the furnace cover (22). A crystal rod through hole (612) that penetrates up and down is opened in the middle of the housing (61). Through holes (611) that penetrate up and down are opened on both sides of the middle of the housing (61). The lower ends of a pair of the through holes (611) are respectively connected to a pair of diversion holes (23). An avoidance hole (624) is opened inside the valve flap (62). Conveying holes (621) are opened on both sides of the valve flap (62). A first overflow hole (623) is connected to the upper part of the conveying hole (621), and a second overflow hole (622) is connected to the lower part of the conveying hole (621). In the first state, the first overflow hole (623) is connected to the through hole (611), and the crystal rod through hole (612) and the avoidance hole (624) are concentric. In the second state, the second overflow hole (622) is connected to the through hole (611), and the valve flap (62) blocks the crystal rod through hole (612).

5. A single crystal furnace device according to claim 4, characterized in that, The second furnace body (5) includes a first pipe fitting (51), a second pipe fitting (52), a conduit (53), a partition plate (54), and a falling hole (541). The first pipe fitting (51) is sleeved outside the second pipe fitting (52). The partition plate (54) is disposed between the first pipe fitting (51) and the second pipe fitting (52). The falling hole (541) is formed in the partition plate (54). The conduit (53) is fixedly installed on the partition plate (54), and the lower end of the conduit (53) is connected to one of the through holes (611).

6. A single crystal furnace device according to claim 1, characterized in that, A mounting seat (3) is slidably connected to the frame (1). A central shaft (4) is rotatably connected to the mounting seat (3). A connecting rod (41) is fixedly installed on the central shaft (4), and the other end of the connecting rod (41) is fixedly installed on the second furnace body (5).

7. A single crystal furnace device according to claim 6, characterized in that, The disassembly part (9) includes a cylinder body (91), a cross bar (93), a T-shaped block (94), a limiting plate (95), and a protruding rod (96). The cylinder body (91) is fixedly installed on the upper part of the central shaft (4). A guiding groove (92) is formed in the cylinder body (91). The cross bar (93) is fixedly installed on the frame (1). The T-shaped block (94) is slidably inserted into the cross bar (93). The limiting plate (95) is fixedly installed on the lower part of the T-shaped block (94). The protruding rod (96) is fixedly installed on the lower part of the limiting plate (95), and one end of the protruding rod (96) extends into the guiding groove (92).

8. A single crystal furnace device according to claim 7, characterized in that, A first card slot (921) is provided in the upper part of the guiding groove (92), and a second card slot (922) is provided in the lower part of the guiding groove (92). In the first state, the protruding rod (96) is located in the upper part of the guiding groove (92) and is embedded in the first card slot (921). In the second state, the protruding rod (96) is located in the lower part of the guiding groove (92) and is embedded in the second card slot (922).

9. A single crystal furnace device according to claim 1, characterized in that, It further includes a power unit for driving the lifting plate (7) to displace in the vertical direction.

10. A heat exchange system for a single crystal furnace, which is used to convey a cooling medium to the single crystal furnace equipment according to any one of claims 1-9, characterized in that, It includes a heat exchange device (11), and the heat exchange device (11) is connected to the single crystal furnace device through a hose.

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