Multi-parameter synchronous calibration device and method for torque and rotating speed sensor

Abstract

The invention discloses a torque and rotating speed sensor multi-parameter synchronous calibration device and method. The device comprises a driving motor, a multi-dimensional force sensor group, a tachometer, a first flexible coupling, a multi-degree-of-freedom displacement table, a second flexible coupling and a simulated load. The simulation load is used for generating a torque load; the rotating speed of the driving motor measured by the tachometer is used as a standard value and is compared with the rotating speed value output by the measured torque rotating speed sensor, so that the calibration of the rotating speed value is realized; the multi-dimensional force sensor group measures the static torque of the stator of the driving motor, and the static torque measured by the multi-dimensional force sensor group is taken as a standard value and is compared with the torque value output by the measured sensor, so that the calibration of the torque value is realized; the multi-degree-of-freedom displacement platform can adjust the spatial pose of the measured sensor according to the output of the multi-dimensional force sensor group, thereby achieving the adjustment of a poor dynamic balance state and a poor installation posture. According to the invention, high-precision synchronous calibration of the torque and rotating speed parameters of the torque and rotating speed sensor can be realized.

Description

Technical Field

[0001] The present invention belongs to the technical field of torque and speed calibration, and particularly relates to a multi-parameter synchronous calibration device and method for a torque and speed sensor. Background Art

[0002] Torque and speed sensors are used for synchronous measurement of torque and speed, and can directly output power parameters, which are widely used in fields such as motor experiments and power tests. In the synchronous calibration of torque and torque parameters of torque and speed sensors, existing technologies all use analog loads or standard torque and speed sensors to generate standard torque values. However, in the case of using an analog load, the analog load needs to generate a high-accuracy torque, but the analog load has poor metrology, high cost, and great design difficulty; in the case of using a standard torque and speed sensor to generate a standard torque value, the traceability problem of the standard torque sensor cannot be solved, that is, the torque index of the standard torque and speed sensor is measured by a static torque machine, and there is no way to ensure the accuracy of the output of this sensor in the rotating state, resulting in the problem of using static calibration for dynamic operation. Moreover, the calibration devices of existing technologies can only measure dynamic balance by attaching dynamic balance test equipment, which puts forward high requirements for the quality of operators and test equipment; these devices also cannot eliminate the shafting vibration problems introduced by factors such as misalignment caused by installation and clamping, resulting in the inability to achieve high-precision calibration of torque and speed sensors. Summary of the Invention

[0003] The purpose of the present invention is to provide a multi-parameter synchronous calibration device and method for a torque and speed sensor to achieve high-precision synchronous calibration of the torque and speed parameters of the torque and speed sensor in view of the problems existing in the prior art.

[0004] One aspect of the present invention provides a multi-parameter synchronous calibration device for a torque and speed sensor, including a driving motor, a multi-dimensional force sensor group, a tachometer, a first flexible coupling, a multi-degree-of-freedom displacement stage, a second flexible coupling, and an analog load. The torque and speed sensor to be measured is connected to the output shaft of the driving motor through the first flexible coupling and is connected to the analog load through the second flexible coupling. The driving motor is used to drive the torque and speed sensor to be measured to rotate through the first flexible coupling, applying a speed parameter to the torque and speed sensor to be measured. The tachometer is used to measure the speed of the driving motor, and taking the speed measured by the tachometer as the standard value, comparing it with the speed value output by the torque and speed sensor to be measured to achieve calibration of the speed value of the torque and speed sensor to be measured. The simulated load is used to generate a torque load. The torque load is transmitted to the torque and rotational speed sensor under test through the second flexible coupling, applying torque parameters to the torque and rotational speed sensor under test. The torque and rotational speed sensor under test transmits the torque load to the rotor of the drive motor through the first flexible coupling, and the drive motor converts the torque load into a static torque. The multi-dimensional force sensor group is fixedly connected to the stator of the drive motor and is used to measure the static torque of the stator. Taking the static torque measured by the multi-dimensional force sensor group as the standard value, it is compared with the torque value output by the torque and rotational speed sensor under test to achieve calibration of the torque value of the torque and rotational speed sensor under test; The torque and rotational speed sensor under test is placed on a multi-degree-of-freedom displacement table. The multi-degree-of-freedom displacement table can adjust the spatial pose of the torque and rotational speed sensor under test according to the output of the multi-dimensional force sensor group, so as to achieve adjustment of poor dynamic balance state and poor installation posture.

[0005] Another aspect of the present invention provides a method for synchronously calibrating multiple parameters of a torque and rotational speed sensor, using the above device to calibrate the torque and rotational speed parameters of the torque and rotational speed sensor, including: Connect the torque and rotational speed sensor under test to the output shaft of the drive motor through the first flexible coupling and connect it to the simulated load through the second flexible coupling; The drive motor drives the torque and rotational speed sensor under test to rotate through the first flexible coupling. Taking the rotational speed measured by the tachometer as the standard value, it is compared with the rotational speed value output by the torque and rotational speed sensor under test to achieve calibration of the rotational speed value of the torque and rotational speed sensor under test; The simulated load generates a torque load. The torque load is transmitted to the torque and rotational speed sensor under test through the second flexible coupling. Taking the static torque measured by the multi-dimensional force sensor group as the standard value, it is compared with the torque value output by the torque and rotational speed sensor under test to achieve calibration of the torque value of the torque and rotational speed sensor under test.

[0006] According to the torque and rotational speed sensor multi-parameter synchronous calibration device and method of the above aspect of the present invention, high-precision synchronous calibration of the torque and rotational speed parameters of the torque and rotational speed sensor can be achieved. Description of the Drawings

[0007] In order to more clearly illustrate the technical solutions of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts: Figure 1 It is a schematic structural diagram of a torque and rotational speed sensor multi-parameter synchronous calibration device according to an embodiment of the present invention; Figure 2Schematic diagram of the structure of a multi-degree-of-freedom displacement stage according to an embodiment of the present invention; Figure 3 Schematic layout diagram of a multi-dimensional force sensor group according to an embodiment of the present invention. Detailed implementation manners

[0008] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are only a part rather than all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without any creative efforts shall fall within the protection scope of the present invention.

[0009] An embodiment of the present invention provides a multi-parameter synchronous calibration device for a torque and speed sensor, as Figure 1 shown. The multi-parameter synchronous calibration device for a torque and speed sensor according to the embodiment of the present invention includes a driving motor 1, a multi-dimensional force sensor group 2, a tachometer 3, a first flexible coupling 4, a multi-degree-of-freedom displacement stage 6, a second flexible coupling 7, and a simulated load 8. In the figure, 5 represents the torque and speed sensor to be measured.

[0010] The torque and speed sensor 5 to be measured is connected to the output shaft of the driving motor 1 through the first flexible coupling 4 and is connected to the simulated load 8 through the second flexible coupling 7. The driving motor 1 is used to drive the torque and speed sensor 5 to rotate through the first flexible coupling 4, so as to apply a speed parameter to the torque and speed sensor 5 to be measured. The tachometer 3 is used to measure the speed of the driving motor 1. Taking the speed measured by the tachometer 3 as the standard value, it is compared with the speed value output by the torque and speed sensor 5 to be measured, so as to calibrate the speed value of the torque and speed sensor 5 to be measured. Using the tachometer 3 for speed measurement can effectively improve the speed measurement accuracy.

[0011] The simulated load 8 is used to generate a torque load. The torque load is transmitted to the torque and speed sensor 5 to be measured through the second flexible coupling 7, so as to apply a torque parameter to the torque and speed sensor 5 to be measured. The torque and speed sensor 5 to be measured transmits the torque load to the rotor of the driving motor 1 through the first flexible coupling 4, and the driving motor 1 converts the torque load into a static torque. The multi-dimensional force sensor group 2 is fixedly connected to the stator of the driving motor 1 and is used to measure the static torque of the stator. Taking the static torque measured by the multi-dimensional force sensor group 2 as the standard value, it is compared with the torque value output by the torque and speed sensor 5 to be measured, so as to calibrate the torque value of the torque and speed sensor 5 to be measured.

[0012] The torque and speed sensor 5 to be measured is placed on the multi-degree-of-freedom displacement stage 6. The multi-degree-of-freedom displacement stage 6 has the ability to generate spatial six-degree-of-freedom postures and can adjust the spatial posture state of the torque and speed sensor to be measured according to the multi-dimensional force value load output by the multi-dimensional force sensor group 2, so as to achieve precise adjustment of unbalanced dynamic balance states and poor installation postures such as non-coaxiality and misalignment. Thus, it can rely on the multi-dimensional force sensor group 2 to complete the adjustment of the shafting dynamic balance, compensation and elimination of non-axial vibrations, improve the experimental efficiency, reduce the test risk, and improve the multi-parameter synchronous calibration accuracy of the torque and speed sensor.

[0013] Since the present invention does not use an analog load end to measure torque, the analog load 8 can be selected in various forms such as a pumping analog load, a clutch analog load, etc. Regardless of the form, whether a cooling mechanism is provided, or what form of contact is made with the outside world, it does not affect the calibration of the torque and speed sensor.

[0014] In one embodiment, as Figure 2 shown, the multi-degree-of-freedom displacement stage 6 is of a double-layer structure, including an upper flat plate 6-1, a lower flat plate 6-5, a fixing block 6-2, a horizontal displacement generating system 6-3, and a vertical displacement generating system 6-4, and can achieve movement in the X, Y, and Z axis directions in space and rotation around the three axes. When the multi-dimensional force sensor group 2 generates an additional vibration output with a load, the posture of the sensor to be measured can be adjusted through the horizontal and vertical displacements between the upper flat plate 6-1 and the lower flat plate 6-5 until the additional vibration output with a load is zero, eliminating the influence on torque measurement.

[0015] The multi-parameter synchronous calibration device for the torque and speed sensor in the embodiment of the present invention may further include a support mechanism 9 and a base 10. The support mechanism 9 is used to support the analog load 8, and the multi-degree-of-freedom displacement stage 6, the multi-dimensional force sensor group 2, the tachometer 3, and the support mechanism 9 are arranged on the base 10.

[0016] The embodiment of the present invention also provides a method for multi-parameter synchronous calibration of a torque and speed sensor, which uses the multi-parameter synchronous calibration device for the torque and speed sensor in the above embodiment of the present invention to calibrate the torque and speed parameters of the torque and speed sensor, including the following steps S1 to S3.

[0017] In step S1, the torque and speed sensor 5 to be measured is respectively connected to the output shaft of the drive motor 1 and the analog load 8 through a first flexible coupling 4 and a second flexible coupling 7.

[0018] In step S2, the drive motor 1 starts to operate and drives the torque and speed sensor 5 to be measured to rotate through the first flexible coupling 4, applying a speed parameter to the torque and speed sensor 5 to be measured.

[0019] The direction of speed transmission is: the drive motor 1 generates speedn , the rotation speed of the torque and rotational speed sensor under test 5 is driven by the first flexible coupling 4 n 1. The torque and rotational speed sensor under test 5 transmits the rotational speed to the simulated load 8 through the second flexible coupling 7, and the shafting of the simulated load 8 rotates to generate rotational speed n 2. The tachometer 3 measures the rotational speed generated by the drive motor 1 through non-contact measurement, and the output is n 3. Since the above rotational speeds are all transmitted through the shafting, the rotational speeds of all components are equal, and there is

[0020] Taking the rotational speed n measured by the tachometer 3 as the standard value, and comparing it with the rotational speed output by the torque and rotational speed sensor under test 5, the calibration of the rotational speed value of the torque and rotational speed sensor under test 5 can be realized.

[0021] In step S3, a torque load is generated by the simulated load 8. When the simulated load 8 rotates, a braking load is applied to its internal shafting through electromagnetic force, friction force or other forms. At this time, the internal shafting will be subjected to a torque load in the rotating state T , this load is transmitted to the torque and rotational speed sensor under test 5 through the second flexible coupling 7, and the torque load received by the torque and rotational speed sensor under test 5 is T 1. The torque and rotational speed sensor under test 5 transmits the torque load to the drive motor 1 through the first flexible coupling 4, and the torque load received by the drive motor rotor shafting is T 2. The torque load received by the drive motor stator shafting is T 3. The drive motor stator is fixed on the multi-dimensional force sensor group 2 and the multi-dimensional force sensor group 2 provides a reaction force to balance the torque load received by the drive motor stator shafting. This torque load is T 4.

[0022] Since the simulated load 8, the drive motor 1, the second flexible coupling 7, the torque and rotational speed sensor under test 5, and the first flexible coupling 4 are connected through the shafting, the torques of all components are equal, and there is:

[0023] The torque received by the rotor of the drive motor 1 under the rotating condition T 2. This load is applied to the stator of the drive motor 1 through the electromagnetic force inside the drive motor, and the stator does not rotate. The torque is converted into a static torque through the electromagnetic force T 3. The loads received by the rotor and the stator are equal, and there is:

[0024] The stator of the drive motor 1 is fixedly supported on the multi-dimensional force sensor group 2, and all the loads received by the drive motor are transmitted to the multi-dimensional force sensor group 2. There are:

[0025] This system converts the rotational torque into a static torque. The torque measured by the multi-dimensional force sensor group 2 is used as the standard value, and by comparing it with the torque value output by the torque and speed sensor 5 to be measured, the calibration of the torque value of the torque and speed sensor 5 to be measured can be completed.

[0026] The multi-dimensional force sensor group 2 can be selected in various forms such as one six-dimensional force sensor, two six-dimensional force sensors, three three-dimensional force sensors, four three-dimensional force sensors, six three-dimensional force sensors, etc. Here, referring to Figure 3 , the torque value measurement method of the multi-dimensional force sensor group 2 is described for the case of using four three-dimensional force sensors.

[0027] Four three-dimensional force sensors 2-1, 2-2, 2-3, and 2-4 are arranged between the drive motor 1 and the base 10. Each three-dimensional force sensor can output the force value loads in the X, Y, and Z axis directions. For each sensor, the direction perpendicular to the base 10 and pointing to the base is defined as the positive direction of the Z axis, and the direction parallel to the axis of the torque and speed sensor 5 to be measured and pointing to the torque and speed sensor 5 to be measured is defined as the positive direction of the X axis. The coordinate system is established according to the right-hand rule and the positive direction of the Y axis is defined. The distances between the sensors in the Y-axis and X-axis directions are respectively l 1 and l 2. When the stator of the drive motor 1 receives the torque transmitted by the rotor of the drive motor 1, the torque is applied to the four three-dimensional force sensors. The outputs of the four three-dimensional force sensors 2-1, 2-2, 2-3, and 2-4 in the Z axis direction are respectively , , , , and the torque value received by the stator of the drive motor 1 can be calculated as:

[0028] According to the shaft torque balance principle, the standard torque received by the torque and speed sensor 5 to be measured can be obtained, and the calibration of the torque and speed sensor 5 to be measured is completed.

[0029] In order to realize the adjustment of the unbalanced dynamic state and the poor installation attitude and improve the calibration accuracy, the multi-parameter synchronous calibration method of the torque and speed sensor in the embodiment of the present invention may further include the adjustment of the unbalanced dynamic state and the adjustment of the poor installation attitude.

[0030] Let the outputs of the four three-dimensional force sensors 2-1, 2-2, 2-3, and 2-4 in the X axis direction be respectively , , , , the outputs of the four three-dimensional force sensors 2-1, 2-2, 2-3, and 2-4 in the Y-axis direction are respectively , , , . When the calibration state is that the dynamic balance state of the torque and speed sensor 5 under test is good and the shafting installation state is good, the output state of the multi-dimensional force sensor group 2 in the Z-axis direction is:

[0031] The output state of the multi-dimensional force sensor group 2 in the X-axis direction is:

[0032] The output state of the multi-dimensional force sensor group 2 in the Y-axis direction is:

[0033] When the dynamic balance state of the torque and speed sensor 5 under test is poor, the output states of the four sensors in the multi-dimensional force sensor group 2 in the Z-axis direction are respectively a group of sine curves, and the peak-to-peak value and the peak-to-valley value of the curves are equal in magnitude and opposite in direction. The output states of the four sensors in the Y-axis direction are respectively a group of sine curves, and the peak-to-peak value and the peak-to-valley value of the curves are equal in magnitude and opposite in direction. The output states of the four sensors in the X-axis direction are respectively a group of sine curves, and the peak-to-peak value and the peak-to-valley value of the curves are equal in magnitude and opposite in direction. Through this criterion, the monitoring of the dynamic balance state can be realized. When the dynamic balance state is poor, the dynamic balance state of the torque and speed sensor 5 under test can be adjusted by means of weight addition, posture adjustment using the multi-degree-of-freedom displacement stage 6, etc. to adjust the dynamic balance state to good. After each adjustment of the state, the multi-dimensional force sensor group 2 can be used to monitor the adjustment effect, and multiple adjustments are made until the calibration requirements are met.

[0034] When the installation state of the shafting is poor, the output states of the four sensors in the multi-dimensional force sensor group 2 in the Z-axis direction are respectively a group of sine curves, and the peak-to-peak values and peak-to-valley values of the curves are not equal. The output states of the four sensors in the Y-axis direction are respectively a group of sine curves, and the peak-to-peak values and peak-to-valley values of the curves are not equal. The output states of the four sensors in the X-axis direction are respectively a group of sine curves, and the peak-to-peak values and peak-to-valley values of the curves are not equal. Through this criterion, the monitoring of the installation state can be realized. When the installation state is poor, the posture can be adjusted by using the multi-degree-of-freedom displacement stage 6 to adjust the installation state of the torque and speed sensor 5 to be measured. The adjustment method is as follows. When the outputs in the X-axis and Y-axis directions are large, it is necessary to judge the main problems of the installation state according to the output phase, and stop the rotation of the drive motor 1 to disassemble and assemble the coupling and the sensor to be measured for adjustment. When the direction output is not large, send a signal of a micro-displacement along the X+ direction to the multi-degree-of-freedom displacement stage 6 to make the multi-degree-of-freedom displacement stage 6 drive the torque and speed sensor 5 to be measured to generate a displacement along the X+ direction. If the outputs in the X and Y axes become smaller, continue to move until the outputs in the X and Y axes show an increasing trend. If the outputs in the X and Y axes become larger, send a signal of a micro-displacement along the X- direction to the multi-degree-of-freedom displacement stage 6 to make the multi-degree-of-freedom displacement stage 6 drive the torque and speed sensor 5 to be measured to generate a displacement along the X- direction. If the outputs in the X and Y axes become smaller, continue to move until the outputs in the X and Y axes show an increasing trend. If the outputs in the X and Y axes show an increasing trend regardless of whether the multi-degree-of-freedom displacement stage 6 drives the torque and speed sensor 5 to generate a displacement along the X+ or X- direction, do not use the multi-degree-of-freedom displacement stage 6 to drive the torque and speed sensor 5 to generate a displacement along the X-axis direction. Use the same method to test and adjust the Y and Z axes and the directions of rotation along the X, Y, and Z axes until the outputs in the X and Y axes are reduced to the extent that the installation state has no influence on the calibration result (meeting the calibration requirements).

[0035] The high-precision torque and speed sensor multi-parameter synchronous calibration device of the embodiment of the present invention has the following beneficial effects: 1. Use the multi-dimensional force sensor group to measure the torque under the rotating state of the torque and speed sensor, convert the measurement problem of the torque under the rotating state into a static force measurement problem, and do not use the load reproduced by the simulated load as the standard torque value, which can effectively solve the problem of inaccurate torque measurement caused by insufficient torque accuracy of the simulated load. At the same time, it can significantly reduce the difficulty of the design, processing, manufacturing, and debugging of the simulated load, and there is no requirement for the generation principle of the simulated load. And a cooling mechanism can be installed at the simulated load end, without worrying about the influence of installing cooling, support and other mechanisms at the simulated load on the torque generation accuracy; 2. Use the multi-dimensional force sensor group to measure other direction loads except torque during the calibration process of the torque and speed sensor, which can be used for the adjustment of dynamic balance, and there is no need to separately add dynamic balance test equipment; 3. The multi-dimensional force sensor group is used to measure the loads in other directions except for the torque during the calibration process of the torque and speed sensor, which can be used to control the attitude of the workpiece to be measured by adjusting the multi-degree-of-freedom displacement stage during the calibration process, eliminate the vibration problems of the workpiece to be measured caused by non-coaxiality introduced by factors such as dynamic balance, installation, and clamping, and improve the measurement accuracy.

[0036] Only some exemplary embodiments of the present invention have been described by way of illustration above. Undoubtedly, for those of ordinary skill in the art, without departing from the spirit and scope of the present invention, the described embodiments can be modified in various different ways. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A multi-parameter synchronous calibration device for a torque and speed sensor, characterized in that, It includes a driving motor, a multi-dimensional force sensor group, a tachometer, a first flexible coupling, a multi-degree-of-freedom displacement stage, a second flexible coupling, and a simulated load. The torque and speed sensor under test is connected to the output shaft of the driving motor through the first flexible coupling and is connected to the simulated load through the second flexible coupling. The driving motor is used to drive the torque and speed sensor under test to rotate through the first flexible coupling, applying a speed parameter to the torque and speed sensor under test. The tachometer is used to measure the speed of the driving motor. Taking the speed measured by the tachometer as the standard value, it is compared with the speed value output by the torque and speed sensor under test to achieve the calibration of the speed value of the torque and speed sensor under test. The simulated load is used to generate a torque load. The torque load is transmitted to the torque and speed sensor under test through the second flexible coupling, applying a torque parameter to the torque and speed sensor under test. The torque and speed sensor under test transmits the torque load to the rotor of the driving motor through the first flexible coupling, and the driving motor converts the torque load into a static torque. The multi-dimensional force sensor group is fixedly connected to the stator of the driving motor and is used to measure the static torque of the stator. Taking the static torque measured by the multi-dimensional force sensor group as the standard value, it is compared with the torque value output by the torque and speed sensor under test to achieve the calibration of the torque value of the torque and speed sensor under test. The torque and speed sensor under test is placed on the multi-degree-of-freedom displacement stage. The multi-degree-of-freedom displacement stage can adjust the spatial pose of the torque and speed sensor under test according to the output of the multi-dimensional force sensor group, thereby realizing the adjustment of the unbalanced dynamic state and the incorrect installation posture.

2. The device according to claim 1, characterized in that, It also includes a support mechanism and a base. The support mechanism is used to support the simulated load. The multi-degree-of-freedom displacement stage, the multi-dimensional force sensor group, the tachometer, and the support mechanism are arranged on the base.

3. The device according to claim 1 or 2, characterized in that, The multi-degree-of-freedom displacement stage includes an upper plate, a lower plate, a horizontal displacement generating system, and a vertical displacement generating system arranged between the upper plate and the lower plate, and can realize the movement in the X, Y, and Z axis directions and the rotation around the three axes, thereby adjusting the spatial pose of the torque and speed sensor under test.

4. A multi-parameter synchronous calibration method for a torque and speed sensor, characterized in that, Using the device according to any one of claims 1-3 for calibrating the torque and speed parameters of the torque and speed sensor includes: Connecting the torque and speed sensor under test to the output shaft of the driving motor through the first flexible coupling and connecting it to the simulated load through the second flexible coupling; The driving motor drives the torque and speed sensor under test to rotate through the first flexible coupling. Taking the speed measured by the tachometer as the standard value, it is compared with the speed value output by the torque and speed sensor under test to achieve the calibration of the speed value of the torque and speed sensor under test; The simulated load generates a torque load. The torque load is transmitted to the torque and speed sensor under test through the second flexible coupling. Taking the static torque measured by the multi-dimensional force sensor group as the standard value, it is compared with the torque value output by the torque and speed sensor under test to achieve the calibration of the torque value of the torque and speed sensor under test.

5. The method according to claim 4, wherein It also includes: When judging that the dynamic balance state is poor, use a multi-degree-of-freedom displacement stage to adjust the spatial attitude of the torque and speed sensor under test, adjust the dynamic balance state to good, and use a multi-dimensional force sensor group to monitor the adjustment effect after each adjustment state. Adjust multiple times until the calibration requirements are met.

6. The method according to claim 5, wherein Four three-dimensional force sensors are used as the multi-dimensional force sensor group. When the output states of the four three-dimensional force sensors in the X, Y, or Z-axis directions are respectively a group of sine curves and the peak-to-peak value and the peak-to-valley value of the curves are equal in magnitude and opposite in direction, it is judged that the dynamic balance state is poor.

7. The method according to any one of claims 4 to 6, characterized in that Four three-dimensional force sensors are used as the multi-dimensional force sensor group. The method further includes: When judging that the installation state is poor, make the multi-degree-of-freedom displacement stage drive the torque and speed sensor under test to move in the direction where the outputs of the four three-dimensional force sensors in the X, Y, or Z-axis directions first decrease and then show an increasing trend until the calibration requirements are met.

8. The method according to claim 7, wherein When the output states of the four three-dimensional force sensors in the X, Y, or Z-axis directions are respectively a group of sine curves and the peak-to-peak value and the peak-to-valley value of the curves are not equal in magnitude, it is judged that the installation state is poor.

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