Molecular air chamber leak rate detection method, electronic equipment and detection system

Abstract

The invention provides a molecular air chamber leakage rate detection method, electronic equipment and a detection system, and the method comprises the steps: testing the spectrum data of a to-be-detected molecular air chamber; calculating the full width at half maximum of the wave spectrum data according to the wave spectrum data; and determining the leak rate of the molecular air chamber to be detected based on the full width at half maximum obtained at multiple times. According to the method, the degree of purity in the molecular air chamber cannot be affected under the condition that the leak rate detection precision of the molecular air chamber is better guaranteed.

Description

Technical Field

[0001] This application relates to the technical field of clock detection. Specifically, it relates to a method for detecting the leakage rate of a molecular gas chamber, an electronic device, and a detection system. Background Art

[0002] Sealing detection technology has an important position in the vacuum field. Some vacuum components or devices need to be used under a certain vacuum degree.

[0003] In the field of molecular clocks, the sealing of the molecular gas chamber of the molecular clock and the filling of polar gases are carried out simultaneously. Currently, the backpressure method is usually used to detect the leakage rate of the gas chamber in the molecule. However, there are the following deficiencies when using the backpressure method to test the leakage rate: The residual helium gas in the molecular gas chamber affects the gas purity in the molecular gas chamber, thereby affecting the performance of the molecular clock. Summary of the Invention

[0004] The purpose of this application is to provide a method for detecting the leakage rate of a molecular gas chamber, an electronic device, and a detection system, which can better ensure the detection accuracy of the molecular gas chamber without affecting the purity of the molecular gas chamber.

[0005] In a first aspect, an embodiment of this application provides a method for detecting the leakage rate of a molecular gas chamber, including: testing the spectral data of the molecular gas chamber to be tested; calculating the full width at half maximum (FWHM) of the spectral data according to the spectral data; and determining the leakage rate of the molecular gas chamber to be tested based on the FWHM obtained at multiple times.

[0006] In the above implementation, the detection of the sealing performance of the molecular gas chamber can be achieved without filling other gases into the molecular gas chamber, thereby better ensuring the purity of the molecular gas chamber. Further, since no additional equipment other than the equipment required for the operation of the molecular clock is needed to participate in the determination of the leakage rate, the difficulty of determining the molecular gas chamber of the molecular clock can also be reduced.

[0007] In an optional embodiment, the determining the leakage rate of the molecular gas chamber to be tested based on the FWHM obtained at multiple times includes: constructing a first variation law of the FWHM with time based on the FWHM obtained at multiple times; and determining the leakage rate of the molecular gas chamber to be tested based on the first variation law and a preset variation relationship; where the preset variation relationship represents the relationship between the change rate of the FWHM and the leakage rate of the molecular gas chamber to be tested, and the preset variation relationship is a pre-calibrated value.

[0008] In an optional implementation manner, the method for determining the preset variation relationship includes: constructing a first variation relationship of the air pressure in the to-be-tested molecular gas chamber changing with time; constructing a second variation relationship of the full width at half maximum of the to-be-tested molecular gas chamber changing with time; and determining the preset variation relationship based on the first variation relationship and the second variation relationship.

[0009] In an optional implementation manner, the preset variation relationship is expressed by the following formula: ; where represents the leakage rate after encapsulating the to-be-tested molecular gas chamber; represents the volume of the to-be-tested molecular gas chamber; represents the speed of light; represents the standard atmospheric pressure; represents when OCS gas absorbs near the full width at half maximum of the Lorentz wavenumber of impurity air; represents the rate of change of the full width at half maximum with time.

[0010] In the above implementation manner, the relationship between the leakage rate after encapsulating the molecular gas chamber and the rate of change of the full width at half maximum with time is converted into the relatively simple formula representation above, so that it can be simpler to determine the leakage rate based on the rate of change of the full width at half maximum with time, and the calculation amount required for determining the leakage rate can also be reduced.

[0011] In an optional implementation manner, the spectral data includes a spectral change trend; testing the spectral data of the to-be-tested molecular gas chamber includes: testing the to-be-tested molecular gas chamber to determine the power at multiple different frequencies; and performing curve fitting based on the power at the multiple different frequencies to obtain the spectral change trend of the to-be-tested molecular gas chamber.

[0012] In the above implementation manner, based on curve fitting, the spectral change trend can be understood more coherently and completely, so that it can be simpler and more intuitive to determine the full width at half maximum based on the spectral change trend.

[0013] In an optional implementation manner, calculating the full width at half maximum of the spectral data according to the spectral data includes: determining a first position and a second position at the half-wave peak in the spectral change trend; and obtaining the full width at half maximum of the spectral data based on the first position and the second position.

[0014] In an optional implementation manner, testing the spectral data of the to-be-tested molecular gas chamber includes: testing the spectral data of the to-be-tested molecular gas chamber according to a set time rule, where the set time rule includes any one of a specified time node, at the same time interval, and at a set time gradient.

[0015] In the above implementation, the spectral data can also be tested based on a set time pattern. Further, the set time pattern can incorporate multiple adjustable methods, such as: specified time nodes, at the same time interval, at a set time gradient, so as to improve the flexibility of the method or logic for determining spectral data, better adapt to the test requirements of spectral data in different situations, and thus be able to better find out the variation law of the full width at half maximum in various situations.

[0016] In an alternative implementation, the method further includes: determining the pressure change in the molecular gas chamber to be measured based on the leakage rate of the molecular gas chamber; obtaining the lifespan of the molecular gas chamber according to the pressure change.

[0017] In the above implementation, the lifespan of the molecular gas chamber can also be determined based on the leakage rate of the molecular gas chamber. Based on this determination of the lifespan, the usage cycle of the product can be better predicted.

[0018] In a second aspect, an embodiment of the present application provides an electronic device, including: a processor and a memory. The memory stores machine-readable instructions executable by the processor. When the electronic device runs, the machine-readable instructions are executed by the processor to perform the steps of the above method.

[0019] In a third aspect, an embodiment of the present application provides a detection system, including: a transmitter, a receiver, a spectrometer, and a processing unit; the transmitter is configured to transmit a signal to the molecular gas chamber to be measured; the receiver is configured to receive the signal output by the molecular gas chamber to be measured; the spectrometer is configured to construct the spectral data of the molecular gas chamber to be measured based on the signal output by the receiver; the processing unit is configured to perform the steps of the above method to determine the leakage rate of the molecular gas chamber to be measured.

[0020] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium, on which a computer program is stored. When the computer program is run by a processor, it performs the steps of the above method.

[0021] In a fifth aspect, an embodiment of the present application provides a computer program product, including a computer-readable storage medium storing program code. The instructions included in the program code can be used to perform the steps of the method for detecting the leakage rate of the molecular gas chamber described in the above method embodiment. Description of the Drawings

[0022] To more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings required for the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other relevant drawings can also be obtained based on these drawings.

[0023] Figure 1 Schematic diagram of the operating environment of the detection system provided by the embodiment of the present application; Figure 2 Block diagram of the electronic device provided by the embodiment of the present application; Figure 3 Flowchart of the method for detecting the leakage rate of the molecular gas chamber provided by the embodiment of the present application; Figure 4 Partial flowchart of the method for detecting the leakage rate of the molecular gas chamber provided by the embodiment of the present application. Detailed implementation manners

[0024] The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings in the embodiments of the present application.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of the present application, terms such as "first" and "second" are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0026] Some vacuum devices need to be used under a certain vacuum degree. Assuming that the vacuum degree of the vacuum device does not meet the working condition requirements after a certain time at a certain leakage rate, there may be a risk of failure. Therefore, before the vacuum device is put into use, it is an indispensable step in the production of vacuum devices to detect the leakage rate of the vacuum device by using leak detection technology.

[0027] Some common vacuum leak detection technologies include the bubble method, the ionization method, etc. These methods can qualitatively judge whether the device leaks air and can find the leak point. However, this method can only be used when the leakage rate is relatively large and has great limitations. Later, with the development of vacuum leak detection technology, the helium mass spectrometer leak detector has been applied in the leak detection method. After a long time of development, the helium mass spectrometer leak detector can usually reach of the detection sensitivity, and even devices with a detection sensitivity of have been developed.

[0028] Inside a helium mass spectrometer leak detector, the gas is ionized into ions, which enter the magnetic analyzer at a certain speed under the action of the internal electric field. Under the action of a uniform magnetic field, there is a Lorentz force, which causes the movement path to be a circular trajectory. The deflection radius is related to the mass of the ions. At the end of the path that helium particles can pass through, there is a device that can detect the amount of helium gas, so that the amount of helium gas entering the helium mass spectrometer leak detector through the sample can be measured, and then the leak rate of the sample can be calculated. Generally, the methods used for the helium mass spectrometer leak detector to detect the leak rate include the direct helium spraying method, the helium covering method, and the backpressure method, etc.

[0029] During the productization process of the molecular clock, a certain amount of polar molecular clock gas needs to be filled into the molecular gas chamber to ensure that it can absorb terahertz microwaves, so as to achieve clock locking. Therefore, it is extremely important to keep the pressure in the molecular gas chamber stable during this process. The stability of the pressure in the molecular gas chamber is related to the airtightness. Assume that the volume of the molecular gas chamber is , the leak rate of the molecular gas chamber , the air pressure increases which is considered a failure. Then the lifespan: That is, the lifespan is 11.6 days, which is too short for the molecular clock product and is relatively limited in the application in the molecular clock field.

[0030] In the field of molecular clocks, the sealing of the molecular gas chamber of the molecular clock and the filling of polar gas are carried out simultaneously. Therefore, currently only the backpressure method can be used to measure the leak rate. However, there are the following deficiencies when using the backpressure method to measure the leak rate: 1) The backpressure method test will cause some helium gas to remain in the molecular gas chamber of the molecular clock, which affects the gas purity in the molecular gas chamber and thus affects the performance of the molecular clock. 2) When using the backpressure method to measure the leak rate, the measurement accuracy is usually only in the order of magnitude (it is impossible to fill to one atmosphere), and the molecular clock is a small-sized device with a long lifespan requirement. Therefore, it cannot meet the test production requirements. 3) When using the backpressure method to measure the leak rate for ultra-small volume devices, even if the leak rate of the device is large, during the longest waiting inspection time, the measured leak rate of the device will rapidly decrease, and the device will still be regarded as hermetically qualified and enter the next production stage, resulting in a low reliability of the detection result.

[0031] Based on the above research and analysis, the embodiments of the present application can provide a method for detecting the leak rate of a molecular gas chamber, an electronic device, and a detection system, which can improve the detection accuracy and reliability of the molecular gas chamber. The following combines some examples to introduce the method for detecting the leak rate of the molecular gas chamber provided by the present application.

[0032] To facilitate the understanding of this embodiment, first, the operating environment for implementing a method for detecting the leak rate of a molecular gas chamber disclosed in the embodiments of the present application is introduced.

[0033] Such as Figure 1As shown, it is an interaction schematic diagram of the detection system provided by an embodiment of the present application. The detection system may include: a transmitter 120, a receiver 130, a spectrometer 140, and a processing unit 110.

[0034] The transmitter 120 is used to transmit a signal to the molecular gas chamber 200 to be measured, and the receiver 130 is used to receive the signal output by the molecular gas chamber to be measured. Both the transmitter 120 and the receiver 130 may include a microwave source, and the microwave source may be a module or a signal source.

[0035] Optionally, the transmitter 120 may be used to transmit the terahertz microwave required by the molecular gas chamber 200 to the molecular gas chamber 200. The transmitter 120 may be a terahertz transmitter 120, and the receiver 130 may be a terahertz receiver 130. The receiver 130 may further include a frequency conversion module. The frequency conversion module may perform down-conversion to convert the unprocessable high-frequency terahertz to a low-frequency that can be processed.

[0036] The spectrometer 140 is used to construct the spectral data of the molecular gas chamber 200 to be measured based on the signal received by the receiver 130. Exemplarily, the spectrometer 140 may be a device capable of detecting the power of a specific frequency band, and the spectrometer 140 may include a detector and a voltage detection device. For example, after the receiver 130 performs frequency conversion on the microwave signal, the power can be converted into a voltage signal by the detector of the spectrometer 140, and then voltage detection devices such as the analog-to-digital converter (ADC) and digital multimeter of the spectrometer 140 can be used to detect the voltage signal.

[0037] The processing unit 110 is used to execute each step in the method for detecting the molecular gas chamber 200 to determine the leak rate of the molecular gas chamber 200 to be measured. Exemplarily, the processing unit 110 may be used to process and calculate the spectral data obtained by the spectrometer 140 to determine the leak rate of the molecular gas chamber 200 to be measured.

[0038] The processing unit 110 may be connected to a group of transmitters 120 and receivers 130. The processing unit 110 may also be connected to multiple groups of transmitters 120 and receivers 130. Each group of transmitters 120 and receivers 130 may be used to perform measurements for one molecular gas chamber 200.

[0039] The processing unit 110 can be used to control the transmitter 120 to transmit signals to the molecular gas chamber 200. The processing unit 110 can determine the timing of controlling the transmitter 120 to transmit signals to the molecular gas chamber 200 based on a preset test rule. The test rule can include test time, data selection for testing, etc. For example, the test time can include the selected time interval for testing, the time node for testing, etc. For example, the data selection for testing can include the acquisition method of spectral data, etc. The acquisition method of spectral data can include determining the spectral curve based on the power at multiple frequencies.

[0040] The processing unit 110 can be Figure 2 the electronic device with computing power as shown. The processing unit 110 can be a personal computer (PC), a tablet computer, a smart phone, a personal digital assistant (PDA), etc. The processing unit 110 can also be a chip with processing capabilities. It can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components. It can implement or execute the various methods, steps, and logic block diagrams disclosed in the embodiments of the present application. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc.

[0041] As Figure 2 shown, it is a block diagram of an electronic device. The electronic device 300 can include a memory 311 and a processor 313. Those of ordinary skill in the art can understand that Figure 2 the structure shown is only illustrative and does not limit the structure of the electronic device 300. For example, the electronic device 300 can also include more or fewer components than Figure 2 shown, or have a different configuration from Figure 2 shown.

[0042] The above-mentioned components of the memory 311 and the processor 313 are electrically connected to each other directly or indirectly to achieve data transmission or interaction. For example, these components can be electrically connected to each other through one or more communication buses or signal lines. The above-mentioned processor 313 is used to execute the executable module stored in the memory.

[0043] Among them, the memory 311 can be, but is not limited to, a random access memory (Random Access Memory, abbreviated as RAM), a read-only memory (Read Only Memory, abbreviated as ROM), a programmable read-only memory (Programmable Read-Only Memory, abbreviated as PROM), an erasable programmable read-only memory (Erasable Programmable Read-Only Memory, abbreviated as EPROM), an electrically erasable programmable read-only memory (Electric Erasable Programmable Read-Only Memory, abbreviated as EEPROM), etc. Among them, the memory 311 is used to store a program. After receiving an execution instruction, the processor 313 executes the program. The method executed by the electronic device 300 defined by the process disclosed in any embodiment of the present application can be applied to the processor 313 or implemented by the processor 313.

[0044] The above-mentioned processor 313 may be an integrated circuit chip with signal processing capabilities. The above-mentioned processor 313 can be a general-purpose processor, including a central processing unit (Central Processing Unit, abbreviated as CPU), a network processor (Network Processor, abbreviated as NP), etc.; it can also be a digital signal processor (digital signal processor, abbreviated as DSP), an application-specific integrated circuit (Application Specific Integrated Circuit, abbreviated as ASIC), a field programmable gate array (Field Programmable Gate Array, abbreviated as FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components. It can implement or execute the various methods, steps, and logic block diagrams disclosed in the embodiments of the present application. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc.

[0045] Based on different actual usage scenarios, the electronic device 300 may further include more components. In one usage scenario, during the detection process of the molecular gas chamber, it is necessary to view the relevant detected data in real time. For example, it is necessary to display the spectrum, the change of the full width at half maximum, etc. during the detection process. The electronic device 300 may further include a display unit for displaying the relevant data detected during the detection process of the molecular gas chamber. In one usage scenario, it is necessary to detect molecular gas chambers at multiple different positions. To facilitate understanding the source positions of each group of data, the electronic device 300 may further include a positioning unit for positioning the electronic device 300.

[0046] Among them Figure 1 The electronic device in the detection system shown may include Figure 2 The components of the electronic device shown.

[0047] The electronic device 300 in this embodiment may be used to execute each step in the various methods provided in the embodiments of the present application. The implementation process of the molecular gas chamber leak rate detection method will be described in detail through several embodiments below.

[0048] Please refer to Figure 3 , which is a flowchart of the molecular gas chamber leak rate detection method provided by the embodiments of the present application. The molecular gas chamber leak rate detection method provided by the embodiments of the present application may be applied to an electronic device, and the steps in the molecular gas chamber leak rate detection method are executed through the electronic device. The following will elaborate in detail on Figure 3 The specific process shown.

[0049] Step 410, test the spectral data of the molecular gas chamber to be measured.

[0050] Optionally, when it is necessary to test the spectral data, the electronic device may send a control instruction to the transmitter to control the transmitter to send a signal to the molecular gas chamber; the receiver can then receive it. Optionally, the transmitter may also automatically send a signal to the molecular gas chamber, and the receiver can receive the signal output by the molecular gas chamber.

[0051] In some usage scenarios, it is also possible to measure the gas chamber of the atomic clock. The spectral data of the atomic gas chamber can be tested in this step.

[0052] For each test of the spectral data, multiple powers can be measured based on signals of multiple different frequencies. Based on the powers obtained at multiple different frequencies, the spectral data obtained from one test can be obtained. Exemplarily, curve fitting can be performed based on the powers obtained at multiple different frequencies, and the spectral data can be represented in the form of a curve.

[0053] Exemplarily, the frequency of the signal output by the transmitter can be controlled by an electronic device. Regarding the selection of multiple different frequencies, it can be based on the number and magnitude settings of the different frequencies actually required, and the embodiments of the present application are not limited to the selection of different frequencies.

[0054] Step 420, calculate the full width at half maximum (FWHM) of the spectral data according to the spectral data.

[0055] Taking the obtained spectral data as the spectral curve as an example, the value of the peak can be determined first. Based on this peak value, the value at half height can be determined. Then, the position of the value at half height in the curve can be found in the curve, and the full width at half maximum can be determined based on the position of the value at half height in the curve. For example, on both sides of the peak value, two points with the value at half height can be determined, and the distance between the two points can be determined as the full width at half maximum.

[0056] Optionally, the half height in the full width at half maximum can represent the height of half of the power peak in the spectral data. On both sides of the peak value, two points with the half height can be determined, and the distance between the two points with the half height can be determined as the full width at half maximum.

[0057] Step 430, determine the leak rate of the molecular gas chamber to be measured based on the full width at half maximum obtained at multiple times.

[0058] From the full width at half maximum obtained at multiple times, the law of the full width at half maximum changing with time is determined. Through research, it is known that considering the influence of the leak rate of the molecular gas chamber on the law of the full width at half maximum changing with time, based on this, the leak rate of the molecular gas chamber can be determined based on the law of the full width at half maximum changing with time.

[0059] Optionally, a set of correlation data between the change of the full width at half maximum with time and the leak rate of the molecular gas chamber can also be calibrated in advance. The leak rate of the molecular gas chamber to be measured can be found and determined by the change of the full width at half maximum determined.

[0060] Through the above steps, the leak rate of the molecular gas chamber can be tested without filling other gases into the molecular gas chamber, and the leak rate of the molecular gas chamber can be tested while reducing the influence on the molecular gas chamber.

[0061] In one implementation, the above step 430 may include the following steps 431 to 432.

[0062] Step 431, construct the first change law of the full width at half maximum changing with time based on the full width at half maximum obtained at multiple times.

[0063] The multiple times can be determined based on the time law when testing the spectral data. For example, if the time law used for testing the spectral data is to test once every 10 hours, the full width at half maximum obtained at multiple times may include the full width at half maximum with a time interval of 10 hours measured currently.

[0064] The first variation law can be a linear law or a non - linear law.

[0065] Optionally, the full width at half maximum obtained at multiple times can also be the full width at half maximum at two times. The first variation law can also be the difference between the full widths at half maximum obtained at two times, or the change value of the full width at half maximum obtained at two times. The change value may be caused by the pressure change in the molecular gas chamber, and the pressure change in the molecular gas chamber is caused by a certain leakage rate in the molecular gas chamber.

[0066] Step 432: Determine the leakage rate of the molecular gas chamber to be measured based on the first variation law and the preset variation relationship.

[0067] Among them, the preset variation relationship represents the relationship between the change rate of the full width at half maximum and the leakage rate of the molecular gas chamber to be measured, and the preset variation relationship is a pre - calibrated value.

[0068] The preset variation relationship can be determined by analyzing the determination method of the full width at half maximum of the molecular gas chamber, the relationship between the full width at half maximum of the molecular gas chamber and the pressure in the molecular gas chamber, and the relationship between the pressure in the molecular gas chamber and the leakage rate of the molecular gas chamber.

[0069] The following takes the full width at half maximum in the Lorentz frequency domain as an example to describe the determination process of the preset variation relationship. The full width at half maximum (FMHW) of the molecular clock spectrum is related to the gas pressure in the molecular gas chamber and the volume mixing ratio of the molecular gas chamber under certain conditions. Based on this relationship, a preset variation relationship can be constructed. Optionally, as Figure 4 shown, the determination method of the preset variation relationship includes the following steps 510 to 530.

[0070] Step 510: Construct a first variation relationship of the gas pressure of the molecular gas chamber to be measured changing with time.

[0071] When there is a certain leakage rate in one - time encapsulation, the gas pressure in the molecular gas chamber will increase with time, and the volume mixing ratio will decrease with time. The first variation relationship of the gas pressure changing with time can be expressed as: ; Among them, represents the standard atmospheric leakage rate of one - time encapsulation; represents the volume of the molecular gas chamber to be measured; represents the standard atmospheric pressure.

[0072] When the gas pressure in the molecular gas chamber is small (for example, within), that is, much less than the standard atmospheric pressure , the air pressure varies linearly with time, and the first variation relationship can be expressed as: .

[0073] Volume mixing ratio varies as an inverse proportional function of time and can be expressed as: .

[0074] Step 520, construct a second variation relationship of the full width at half maximum of the molecule cell to be measured varying with time.

[0075] In a molecular clock, the full width at half maximum of the spectrum can be determined by the following two equations: ; ; wherein, represents the full width at half maximum of the wave number in the Lorentz spectrum of the molecular clock, and respectively represent the full width at half maximum of the Lorentz wave numbers of air impurities and carbonyl sulfide molecules; represents the full width at half maximum in the frequency domain. The wave number unit here is .

[0076] The full width at half maximum in the frequency domain is equal to the product of the full width at half maximum of the wave number and the speed of light . To unify to the International System of Units, in the above example, multiply 100 after the formula for calculating the full width at half maximum in the frequency domain.

[0077] At this time, the full width at half maximum of Lorentz in the frequency domain is expressed as a function of time, and the second variation relationship: .

[0078] Step 530, based on the first variation relationship and the second variation relationship, determine a preset variation relationship.

[0079] The rate of change of the full width at half maximum of Lorentz in the frequency domain with time, that is, the above preset variation relationship can be expressed as: ; wherein, represents the leakage rate of the molecule cell to be measured after encapsulation; represents the volume of the molecule cell to be measured; represents the speed of light; represents the standard atmospheric pressure; represents that when OCS gas absorbs near , the full width at half maximum of the Lorentz wave number of impurity air; Indicates the rate of change of the full width at half maximum with time.

[0080] As can be seen from the above formula, the rate of change of the full width at half maximum in the frequency domain is a constant related to the leakage rate of the molecular cell. Based on this, when the change of the full width at half maximum of the spectrum of the molecular clock obtained by testing with time in the frequency domain, the leakage rate of the encapsulated molecular cell can be calculated based on the change of the full width at half maximum with time.

[0081] In this embodiment, for the detection requirements of the same molecular cell, before performing the detections in steps 410 to 430, the above steps 510 to 530 can be used to determine the preset change relationship first. After the preset change relationship is determined, this preset change relationship can be used for the detection of the molecular cell, and there is no need to repeat the above steps to determine the preset change relationship every time the molecular cell is tested.

[0082] In this embodiment, the spectral data may include the spectral change trend. The above step 410 may include step 411 and step 412.

[0083] Step 411, test the molecular cell to be measured to determine the power at multiple different frequencies.

[0084] The multiple different frequencies may also be multiple pre-set frequencies. Based on the habits of different users or the requirements of the actual scenario, the different frequencies can be set as needed.

[0085] Step 412, perform curve fitting based on the powers at multiple different frequencies to obtain the spectral change trend of the molecular cell to be measured.

[0086] The spectral change trend can be represented by a continuous curve.

[0087] Exemplarily, the above step 420 may include step 421 and step 422.

[0088] Step 421, determine the first position and the second position at the half-wave peaks in the spectral change trend.

[0089] Wherein, the first position and the second position are respectively located on both sides of the wave peak.

[0090] Taking the spectral change trend curve as a curve of frequency and power, where the abscissa is the frequency and the ordinate can be the power. The first position and the second position can be positions on the curve where the power is half of the wave peak value and the frequencies are different.

[0091] Step 422, obtain the full width at half maximum of the spectral data based on the first position and the second position.

[0092] Exemplarily, based on the distance between the first position and the second position on the abscissa, this distance is determined as the full width at half maximum (FWHM) of the spectral data.

[0093] To obtain the variation law of the full width at half maximum with time, multiple sets of spectral data can be obtained. Each set of spectral data can be used to determine the full width at half maximum at a certain time, and multiple sets of spectral data can obtain the full widths at half maximum at multiple times.

[0094] The above step 410 may include: testing the spectral data of the molecular gas chamber to be measured according to a set time rule.

[0095] Among them, the set time rule includes any one of a specified time node, at equal time intervals, and at a set time gradient.

[0096] Among them, the specified time node, time interval, and time gradient can all be set according to actual needs. For example, if a denser number of full widths at half maximum needs to be obtained, the selected time nodes can be denser, or the time interval can be shorter, or the time intervals determined in the time gradient can also be shorter.

[0097] Optionally, the above set time rule can be set on the electronic device side. After setting, the electronic device can control the transmission of the transmitter according to the set time rule. Optionally, before entering the detection, the electronic device can also be configured with a default set time rule. Optionally, the set time rule can also be adjustable. In the case where the set time rule needs to be adjusted, the electronic device can display an adjustment window to receive the required set time rule input by the user through this adjustment window.

[0098] Next, taking the data in an example as an example, the leakage rate and lifetime of the molecular clock are determined based on the example data. In an example, if the volume of the molecular gas chamber of the molecular clock is , atmospheric pressure , the speed of light , at normal temperature when the temperature control system is working, the initial full width at half maximum , the full width at half maximum rises to , then the current encapsulation leakage rate of the molecular gas chamber can be calculated based on the above formula as . Further, if it is preset that the air pressure in the molecular gas chamber increases by , then it is determined that the molecular gas chamber fails, and the lifetime of the molecular gas chamber can be determined as: , that is can represent the effective time of the molecular gas chamber of the molecular clock, that is, the lifetime of the molecular gas chamber of the molecular clock. That is, the lifetime of the molecular gas chamber in the above example is 133 days.

[0099] In the method provided by the embodiments of the present application, since there is no need to fill other gases, such as helium, into the molecular gas chamber, there will be no residual test gas in the molecular gas chamber, which can better protect the purity of the gas in the molecular gas chamber. Therefore, the detection of the leakage rate of the molecular gas chamber will not affect the performance of the molecular clock. In addition, through the leakage rate detection implemented by the detection method provided by the embodiments of the present application, the measurement accuracy can reach a higher level. Further, the present application is based on the research and analysis of the correlation between the full width at half maximum, the pressure of the molecular gas chamber, and the change over time, and it is understood that there is a certain relationship between the change of the full width at half maximum over time and the air pressure, i.e., the volume mixing ratio, and there is a certain relationship between the change of the volume mixing ratio and the air pressure and the leakage rate of the packaged molecular gas chamber. Based on a comprehensive analysis, it can be determined to calculate the leakage rate of the packaged molecular gas chamber by the relationship between the change of the measured full width at half maximum over time.

[0100] In addition, the embodiments of the present application also provide a computer-readable storage medium, on which a computer program is stored. When the computer program is run by a processor, it executes the steps of the molecular gas chamber leakage rate detection method described in the above method embodiments.

[0101] The computer program product of the molecular gas chamber leakage rate detection method provided by the embodiments of the present application includes a computer-readable storage medium storing program code. The instructions included in the program code can be used to execute the steps of the molecular gas chamber leakage rate detection method described in the above method embodiments. For details, please refer to the above method embodiments and will not be elaborated here.

[0102] In several embodiments provided by the present application, it should be understood that the disclosed method can also be implemented in other ways. The method embodiments described above are only illustrative. For example, the flowcharts and block diagrams in the drawings show the possible architectures, functions, and operations of the methods and computer program products according to multiple embodiments of the present application. In this regard, each block in the flowchart or block diagram may represent a module, a program segment, or a part of code, and the module, program segment, or part of code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in the reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and the combination of blocks in the block diagram and / or flowchart, can be implemented by a dedicated hardware-based system for performing the specified functions or actions, or can be implemented by a combination of dedicated hardware and computer instructions.

[0103] In addition, in each embodiment of the present application, each method step may be executed by being integrated together to form an independent part, or each method step may be executed by a separate module, or two or more steps may be executed by being integrated to form an independent part.

[0104] If the above-mentioned functions are implemented in the form of software function modules and sold or used as an independent product, they can be stored in a computer-readable storage medium. Based on such an understanding, the technical solution of the present application, in essence, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in each embodiment of the present application. The foregoing storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROMs), random access memories (RAMs), magnetic disks, or optical discs that can store program codes. It should be noted that in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprises", "comprising", or any other variation thereof is intended to cover a non-exclusive inclusion, such that a process, method, article, or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or device. Without further limitation, the elements defined by the statement "comprising..." do not exclude the presence of additional identical elements in the process, method, article, or device comprising the said elements. The foregoing is only the preferred embodiment of the present application and is not used to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application. It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0105] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present application, and all should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A method for detecting the leakage rate of a molecular gas chamber, characterized in that, Including: Testing the spectral data of the gas chamber of the molecule to be measured; Calculating the full width at half maximum (FWHM) of the spectral data according to the spectral data; Determining the leakage rate of the gas chamber of the molecule to be measured based on the FWHM obtained at multiple times.

2. The method according to claim 1, wherein The determining the leakage rate of the gas chamber of the molecule to be measured based on the FWHM obtained at multiple times includes: Constructing a first variation law of the FWHM with time based on the FWHM obtained at multiple times; Determining the leakage rate of the gas chamber of the molecule to be measured based on the first variation law and a preset variation relationship; wherein, the preset variation relationship represents the relationship between the variation rate of the FWHM and the leakage rate of the gas chamber of the molecule to be measured, and the preset variation relationship is a pre-calibrated value.

3. The method according to claim 2, wherein The determining method of the preset variation relationship includes: Constructing a first variation relationship of the air pressure of the gas chamber of the molecule to be measured with time; Constructing a second variation relationship of the FWHM of the gas chamber of the molecule to be measured with time; Determining the preset variation relationship based on the first variation relationship and the second variation relationship.

4. The method according to claim 3, wherein, The preset variation relationship is expressed by the following formula: ； Among them, represents the leak rate after encapsulation of the molecular chamber to be measured; represents the volume of the molecular chamber to be measured; represents the speed of light; represents the standard atmospheric pressure; represents when the OCS gas absorbs near the full width at half maximum of the Lorentz wavenumber of the impurity air; represents the rate of change of the full width at half maximum with time.

5. The method according to any one of claims 1-4, characterized in that The spectral data includes a spectral variation trend; The testing the spectral data of the gas chamber of the molecule to be measured includes: Testing the power determined at multiple different frequencies of the gas chamber of the molecule to be measured; Performing curve fitting based on the power at the multiple different frequencies to obtain the spectral variation trend of the gas chamber of the molecule to be measured.

6. The method according to claim 5, wherein The calculating the FWHM of the spectral data according to the spectral data includes: Determining a first position and a second position at the half-wave peak in the spectral variation trend; Obtaining the FWHM of the spectral data based on the first position and the second position.

7. The method according to claim 1, wherein The testing the spectral data of the gas chamber of the molecule to be measured includes: Testing the spectral data of the gas chamber of the molecule to be measured according to a set time rule, wherein the set time rule includes any one of a specified time node, at the same time interval, and at a set time gradient.

8. The method according to claim 1, characterized in that The method further includes: Determining the pressure change in the gas chamber of the molecule to be measured based on the leakage rate of the gas chamber; Obtaining the life of the gas chamber according to the pressure change.

9. An electronic device, characterized in that, Including: A processor and a memory, the memory stores machine-readable instructions executable by the processor, and when the electronic device runs, the machine-readable instructions are executed by the processor to execute the steps of the method according to any one of claims 1 to 8.

10. A detection system, characterized in that, Including: A transmitter, a receiver, a spectrometer, and a processing unit; The transmitter is used to transmit a signal to the gas chamber of the molecule to be measured; The receiver is used to receive the signal output by the gas chamber of the molecule to be measured; The spectrometer is used to construct the spectral data of the gas chamber of the molecule to be measured based on the signal output by the receiver; The processing unit is used to execute the steps of the method according to any one of claims 1 to 8 to determine the leakage rate of the gas chamber of the molecule to be measured.

Images