Magnetron leak detector

Abstract

The invention relates to the technical field of magnetron leak detection machines, and particularly discloses a magnetron leak detection machine which comprises a tool table, a helium release mechanism, an exhaust pipe, a vacuum pump and a helium detector. The tool table comprises a detection table, a lifting mounting plate and a positioning sealing mechanism, and a first lifting air cylinder is arranged on the detection table; the positioning and sealing mechanism comprises a pressing sleeve and an elastic sealing piece; a negative pressure detection tube is arranged on the detection table; the helium releasing mechanism comprises a lifting driving mechanism, a lifting seat and a helium releasing cover, the lifting driving mechanism comprises a sliding rail, a sliding block and a second lifting air cylinder, and the lifting seat is arranged on the sliding block; the helium releasing cover is provided with a gas inlet end. By the adoption of the device and method, the magnetron butt joint, helium release and leakage detection procedures can be automatically completed, the detection efficiency is high, manual intervention is not needed in the detection process, and the automation degree is high.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetron leak detectors, and particularly to a magnetron leak detector. Background Art

[0002] During the production process of a magnetron, it is necessary to detect the leak of the magnetron housing by means of vacuum pumping. The magnetron housing mainly includes a main cavity and an antenna tube communicating with the main cavity. The existing leak detection equipment mainly uses a vacuum suction pipe to connect to the antenna tube, extract the air inside the main cavity and the antenna tube, and then maintain the pressure for a predetermined time. If the pressure holding is successful, it means that the magnetron has no leakage. However, in the above method, workers need to connect the antenna tube of the magnetron to the vacuum joint, and after detection, they need to pull out the magnetron from the vacuum joint with force, and the operation is relatively cumbersome. Moreover, only one magnetron can be detected at a time, and each detection requires a pressure holding time, so the efficiency is low.

[0003] In addition, during the production process of a magnetron, the strong penetration ability of helium is often used to detect whether there are defects in the welding of its housing. To ensure the reliable use of helium, during detection, it is necessary to cover the magnetron with a sleeve and then introduce helium into the sleeve. In the existing tester, the sleeve is fixed in the lifting mechanism, and the sleeve is driven to lift and lower by the lifting mechanism, so as to cover the magnetron below. Since the existing tester mainly relies on manual placement and removal of the magnetron, during the process of the lifting mechanism driving the sleeve to descend, it is possible to crush the worker.

[0004] The top of the existing sleeve is connected to a helium gas pipe. During the test, helium gas sprays from the top of the sleeve to the top of the magnetron, and after filling the top of the sleeve, it gradually descends. Since the density of helium is much smaller than that of air under standard atmospheric pressure, helium will accumulate upward, and more helium and time are required to reliably detect the entire surface of the magnetron, resulting in low detection efficiency and high cost. Summary of the Invention

[0005] In order to solve the defects of the prior art, the present invention provides a magnetron leak detector, which can automatically complete the docking, helium release and leak detection procedures of the magnetron, with high detection efficiency, no manual intervention required during the detection process, and high automation degree.

[0006] In order to solve the above technical problems, an embodiment of the present invention provides a magnetron leak detector, including a tooling table, a helium release mechanism, an exhaust pipe, a vacuum pump and a helium gas detector;

[0007] The tooling table includes a detection table, a lifting mounting plate and a positioning and sealing mechanism,

[0008] A first lifting cylinder is provided on the detection table, and the lifting mounting plate is connected to the first lifting cylinder;

[0009] The positioning and sealing mechanism includes a pressing sleeve and an elastic seal; a negative pressure detection tube is provided on the detection table, and the negative pressure detection tube is opposite to the pressing sleeve; the elastic seal is arranged between the pressing sleeve and the negative pressure detection tube;

[0010] The helium release mechanism includes a lifting drive mechanism, a lifting seat and a helium release cover,

[0011] The lifting drive mechanism includes a slide rail vertically arranged on the tooling table, a slider slidably arranged on the slide rail, and a second lifting cylinder for driving the lifting seat to lift, and the lifting seat is arranged on the slider; the helium release cover is provided with an air inlet end;

[0012] The negative pressure detection tube, the helium detector and the vacuum pump are sequentially connected through the suction pipe.

[0013] As an improvement of the above solution, the elastic seal has a through hole, the lifting mounting plate is provided with a mounting hole, and the pressing sleeve is arranged in the mounting hole and extends towards the detection table.

[0014] As an improvement of the above solution, the elastic seal includes a first sealing ring, a metal ring and a second sealing ring which are arranged in sequence from top to bottom.

[0015] As an improvement of the above solution, the negative pressure detection tube is provided with a guiding cavity, the bottom of the guiding cavity is provided with a support ring, and the elastic seal is supported on the support ring.

[0016] As an improvement of the above solution, the outer wall of the pressing sleeve has a pressure-bearing ring, the upper end of the pressure-bearing ring has a first installation pipe section for extending into the installation hole; the inner wall of the first installation pipe section is provided with a first conical surface.

[0017] As an improvement of the above solution, the lifting mounting plate is further provided with a guiding head, and the inner wall of the guiding head is provided with a second conical surface.

[0018] As an improvement of the above solution, the diameter of the opening at the top of the second conical surface is larger than the diameter of the installation hole.

[0019] As an improvement of the above solution, the top of the helium release cover is provided with a connecting rod, the lifting seat is provided with a through hole, and the connecting rod passes through the through hole; a limiting block is fixedly arranged on the upper part of the connecting rod, and the distance between the limiting block and the helium release cover is greater than the length of the through hole.

[0020] As an improvement of the above solution, the air inlet end includes an upper air inlet end and a side air inlet end, the connecting rod has an air passage, one end of the air passage communicates with the top of the inner cavity of the helium release cover, and the other end is connected with the upper air inlet end; the side air inlet end communicates with the side part of the inner cavity of the helium release cover.

[0021] As an improvement to the above solution, the helium release cover includes an outer shell and an inner liner. The inner liner is disposed within the outer shell, and there is a ventilation gap between the inner liner and the outer shell. A first air outlet is provided at the top of the inner liner, and a second air outlet is provided on the lower side surface.

[0022] As an improvement to the above solution, the connecting rod is directly connected to the first air outlet, and the side air inlet end is communicated with the ventilation gap.

[0023] As an improvement to the above solution, a sealing gasket is provided in the bottom area between the outer shell and the inner liner.

[0024] Implementing the embodiments of the present invention has the following beneficial effects:

[0025] This leak detector has a tooling table and a helium release mechanism. Workers can use the above tooling table to fix the antennas of multiple magnetrons and connect them to the exhaust pipe. Use the helium release cover of the helium release mechanism to cover the remaining parts of the magnetron and release helium. Then, the vacuum pump evacuates the inside of the magnetron through the exhaust pipe, and a helium detector is used to detect whether there is helium outside the magnetron entering the exhaust pipe, thereby detecting whether the magnetron has leaks. With the above structure, the docking, helium release, and leak detection procedures of the magnetron can be automatically completed, with high detection efficiency, no manual intervention required during the detection process, and high automation degree. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is the overall structural schematic diagram of a magnetron leak detector of the present invention;

[0027] Figure 2 is the overall structural schematic diagram of the tooling table according to an embodiment of the present invention;

[0028] Figure 3 is the structural schematic diagram of another perspective of the tooling table according to an embodiment of the present invention;

[0029] Figure 4 is the cross-sectional view of the tooling table according to an embodiment of the present invention;

[0030] Figure 5 is the overall structural schematic diagram of the helium release mechanism according to an embodiment of the present invention;

[0031] Figure 6 is the structural schematic diagram of another perspective of the helium release mechanism according to an embodiment of the present invention;

[0032] Figure 7 is the cross-sectional view of the helium release cover according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] To make the objectives, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below with reference to the accompanying drawings. It is hereby declared that the orientation terms such as up, down, left, right, front, back, inside and outside that appear or will appear in the text of the present invention are only based on the accompanying drawings of the present invention, and they do not specifically limit the present invention.

[0034] As Figures 1 - 7 shown, a specific embodiment of the present invention provides a magnetron leak detector, which includes a tooling table 1, a helium release mechanism 2, an exhaust pipe 3, a vacuum pump 4 and a helium detector 5. The tooling table 1 includes a detection table 11, a lifting mounting plate 12 and a positioning and sealing mechanism. A first lifting cylinder 13 is provided on the detection table 11, and the lifting mounting plate 12 is connected to the first lifting cylinder 13. The positioning and sealing mechanism includes a pressing sleeve 14 and an elastic seal 15; a negative pressure detection pipe 16 is provided on the detection table 11, and the negative pressure detection pipe 16 is opposite to the pressing sleeve 14; the elastic seal 15 is provided between the pressing sleeve 14 and the negative pressure detection pipe 16. The helium release mechanism 2 includes a lifting drive mechanism, a lifting seat 21 and a helium release cover 22. The lifting drive mechanism includes a slide rail 23 vertically provided on the tooling table 1, a slider 24 slidably provided on the slide rail 23, and a second lifting cylinder 25 for driving the lifting seat 21 to lift. The lifting seat 21 is provided on the slider 24; the helium release cover 22 is provided with an air inlet end 26. The negative pressure detection pipe 16, the helium detector 5 and the vacuum pump 4 are sequentially connected through the exhaust pipe 3.

[0035] This leak detector has a tooling table 1 and a helium release mechanism 2. Workers can use the above tooling table 1 to fix the antennas of multiple magnetrons and connect them to the exhaust pipe 3, use the helium release cover 22 of the helium release mechanism 2 to cover the remaining parts of the magnetron and release helium, and then the vacuum pump 4 evacuates the inside of the magnetron through the exhaust pipe 3, and detects whether the helium outside the magnetron enters the exhaust pipe 3 through the helium detector 5, so as to detect whether the magnetron has leakage. With the above structure, the docking, helium release and leakage detection procedures of the magnetron can be automatically completed, the detection efficiency is high, the detection process does not require manual intervention, and the degree of automation is high.

[0036] Among them, the elastic seal 15 has a through hole. An installation hole 121 is provided on the lifting mounting plate 12. The pressing sleeve 14 is arranged in the installation hole 121 and extends towards the inspection table 11. The elastic seal 15 includes a first sealing ring 151, a metal ring 152, and a second sealing ring 153 arranged in sequence from top to bottom. The negative pressure detection tube 16 is provided with a guiding cavity 161. A support ring 162 is provided at the bottom of the guiding cavity 161. The elastic seal 15 is supported on the support ring 162. During detection, the antenna of the magnetron to be detected can extend into the through hole. The pressing sleeve 14 applies pressure downward from the top of the elastic seal 15 to keep the outer wall of the antenna sealed with the support ring 162.

[0037] It should be noted that the metal ring 152 allows the antenna to pass through and positions the first sealing ring 151 above it and the second sealing ring 153 below it. When the pressing sleeve 14 is pressed downward, the first sealing ring 151 and the second sealing ring 153 extend radially to fix and double-seal the outer wall of the antenna, facilitating subsequent tests such as vacuum leak detection and helium leak detection. With the above structure, workers can easily install the magnetron to be detected into the pressing sleeve 14. Then, the lifting mounting plate 12 drives the negative pressure detection tube 16 to descend. Since the negative pressure detection tube 16 is directly opposite to the pressing sleeve 14, it can dock the antenna of the magnetron with the negative pressure detection tube 16, and use the elastic seal 15 to form a sealed connection between the antenna of the magnetron and the negative pressure detection tube 16, so that the negative pressure mechanism connected to the negative pressure detection tube 16 can extract the air inside the magnetron and perform tests such as pressure holding detection. After the test is completed, the lifting mounting plate 12 rises, and the elastic seal 15 uses its own elasticity to reset and automatically release the magnetron to be detected. Workers can conveniently take out the magnetron and perform the detection work on another batch of magnetrons. The work intensity of workers is low and the detection efficiency is high.

[0038] To improve the maintenance convenience of this tooling platform, the outer wall of the pressing sleeve 14 has a pressure-bearing ring 141. The upper end of the pressure-bearing ring 141 has a first installation pipe section 142 for extending into the installation hole 121. The pressing sleeve 14 is limited and guided by the installation hole 121 and can axially move within a certain range. When maintenance is required, only the bolt 131 connecting the telescopic rod of the first lifting cylinder 13 needs to be loosened, and the lifting mounting plate 12 can be removed. The pressing sleeve 14 automatically separates from the lifting mounting plate 12, and the disassembly and assembly are convenient.

[0039] When the worker places the magnetron into the lifting mounting plate 12, the antenna of the magnetron first contacts the middle channel of the pressing sleeve 14, which is prone to rigid collision, resulting in pits at the end of the antenna of the magnetron and affecting the quality of the finished product. To solve the above problems, a first conical surface 143 is provided on the inner wall of the first mounting pipe section 142 in this embodiment. When the magnetron is inserted into the pressing sleeve 14, it first contacts the first conical surface 143, and reaches the vertical state and extends into the middle channel of the pressing sleeve 14 under the guiding action of the first conical surface 143.

[0040] Preferably, a guiding head 17 is further provided on the lifting mounting plate 12, and a second conical surface 171 is provided on the inner wall of the guiding head 17. The guiding head 17 has a second mounting pipe section 172, and the mounting hole 121 is threadedly connected to the second mounting pipe section 172; the first mounting pipe section 142 is sleeved in the second mounting pipe section 172. The guiding head 17 can be screwed into the mounting hole 121 from above the lifting mounting plate 12 through the thread on the outside of the second mounting pipe section 172, and the lifting mounting plate 12 can be disassembled wirelessly to disassemble and assemble the guiding head 17.

[0041] More preferably, the diameter of the top opening of the second conical surface 171 is set to be larger than the diameter of the mounting hole 121 to provide a larger tolerance space, and the worker can insert the magnetron within a larger fluctuation range. The antenna of the magnetron first moves through the first conical surface 143 to the bottom end of the guiding head 17, then contacts the second conical surface 171, enters the middle cavity of the pressing sleeve 14 with a diameter slightly larger than that of the antenna, and finally passes through the first sealing ring 151, the metal ring 152 and the second sealing ring 153. At this time, the bottom surface of the magnetron body contacts the first conical surface 143, and the magnetron is fixed on the first conical surface 143 for subsequent vacuum detection operations.

[0042] Preferably, a connecting rod 27 is provided at the top of the helium release cover 22, and a through hole 211 is provided on the lifting seat 21, and the connecting rod 27 passes through the through hole 211; a limiting block 28 is fixedly provided on the upper part of the connecting rod 27, and the distance between the limiting block 28 and the helium release cover 22 is greater than the length of the through hole 211. The distance between the limiting block 28 and the helium release cover 22 is greater than the length of the through hole 211, thus leaving an activity space for the helium release cover 22 relative to the lifting seat 21. During the working process, the magnetron can be placed on the tooling table 1 directly below the helium release cover 22, and the lifting seat 21 is driven by the second lifting cylinder 25 to descend. The helium release cover 22 covers the corresponding magnetron by its own weight to release helium around the magnetron, cooperate with an additional air extraction mechanism to extract the gas inside the magnetron, and use a helium detection device to detect the extracted gas. If the helium content in the gas exceeds the set value, it is considered that the magnetron has leakage.

[0043] With the above structure, when the helium release cover 22 is blocked by foreign objects during the descending process, the corresponding helium release cover 22 will immediately stop descending. At this time, a relative displacement occurs between the helium release cover 22 and the lifting seat 21, preventing the operator's hand from being accidentally crushed by the descending helium release cover 22.

[0044] In order to improve the detection speed and reduce the helium consumption, the air inlet end 26 includes an upper air inlet end 261 and a side air inlet end 262. The connecting rod 27 has an air duct 271. One end of the air duct 271 communicates with the top of the inner cavity of the helium release cover 22, and the other end is connected to the upper air inlet end 261. The side air inlet end 262 communicates with the side of the inner cavity of the helium release cover 22. The helium release cover 22 includes a housing 221 and an inner liner 222. The inner liner 222 is disposed in the housing 221, and a ventilation gap is provided between the inner liner 222 and the housing 221. A first air outlet hole 223 is provided at the top of the inner liner 222, and a second air outlet hole 224 is provided on the lower side surface. The connecting rod 27 is directly connected to the first air outlet hole 223, and the side air inlet end 262 communicates with the ventilation gap. It should be noted that during the detection process, helium gas is directly ejected from the top of the magnetron through the first air outlet hole 223. At the same time, the helium gas introduced from the side air inlet end 262 flows into the ventilation gap and is ejected from the second air outlet hole 224 located on the lower side surface of the inner liner 222 towards the lower side surface of the magnetron, so that the periphery of the magnetron is quickly wrapped by helium gas. If the magnetron leaks, the detection device can quickly identify it, reducing the detection time and also reducing the helium consumption.

[0045] Based on the above design, the helium release cover 22 of this embodiment only abuts against the surface of the tooling for placing the magnetron by its own weight. To separate the gas outside and inside the helium release cover 22 to the greatest extent, a sealing gasket 225 is provided in the bottom area between the housing 221 and the inner liner 222. When the helium release cover 22 descends to the proper position, the sealing gasket 225 contacts the working surface for placing the magnetron.

[0046] Preferably, the lifting seat 21 includes a flat plate portion 212 provided with the through hole 211, and a vertical plate portion 213 vertically extending upward from the edge of the flat plate portion 212. The vertical plate portion 213 is connected to the slider 24. A lifting drive block 214 is provided on the back surface of the vertical plate portion 213. The second lifting cylinder 25 is vertically disposed on the tooling table 1, and the piston rod of the second lifting cylinder 25 is connected to the lifting drive block 214.

[0047] It should be noted that the lifting seat 21 is designed as a combination of a flat plate portion 212 and a vertical plate portion 213, which can be used to install multiple helium release covers 22 on the flat plate portion 212 to drive the helium release covers 22 to lift and lower synchronously. The vertical plate portion 213 is connected to the slider 24. By using its relatively large area, two sets of slide rails 23 with a relatively large distance apart can be provided, and in cooperation with the slider 24 sliding on the slide rails 23, the lifting seat 21 can lift and lower smoothly. A lifting drive block 214 is provided on the back of the vertical plate portion 213, and the second lifting cylinder 25 is vertically provided on the tooling table 1. The piston rod of the second lifting cylinder 25 is connected to the lifting drive block 214, which can make full use of the space between the vertical plate portion 213 and the tooling table 1, avoid interference with the lifting trajectory of the lifting seat 21, and the overall structure is more compact and the structural design is neat and reasonable.

[0048] Preferably, the limiting block 28 is disc-shaped. The disc-shaped limiting block 28 can ensure that the helium release cover 22 can be stably suspended on the flat plate portion 212, avoiding the swing of the helium release cover 22.

[0049] In order to improve the detection efficiency, two or more groups of the lifting mounting plates 12 can be arranged side by side on the detection table 11. In this embodiment, five groups of the lifting mounting plates 12 are arranged side by side on the detection table 11. In cooperation with a row of five corresponding helium release covers 22, workers can load five magnetrons onto the corresponding lifting mounting plates 12 at one time and perform the leak detection operation on five magnetrons at one time.

[0050] The above is the preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements are also regarded as the protection scope of the present invention.

Claims

1. A magnetron leak detector, characterized in that, It includes a tooling table, a helium release mechanism, an exhaust pipe, a vacuum pump and a helium detector; The tooling table includes a detection table, a lifting mounting plate and a positioning and sealing mechanism, A first lifting cylinder is provided on the detection table, and the lifting mounting plate is connected to the first lifting cylinder; The positioning and sealing mechanism includes a pressing sleeve and an elastic seal; a negative pressure detection pipe is provided on the detection table, and the negative pressure detection pipe is opposite to the pressing sleeve; the elastic seal is arranged between the pressing sleeve and the negative pressure detection pipe; The helium release mechanism includes a lifting drive mechanism, a lifting seat and a helium release cover, The lifting drive mechanism includes a slide rail vertically arranged on the tooling table, a slider slidably arranged on the slide rail, and a second lifting cylinder for driving the lifting seat to lift, and the lifting seat is arranged on the slider; the helium release cover is provided with an air inlet end; The negative pressure detection pipe, the helium detector and the vacuum pump are sequentially connected through the exhaust pipe.

2. The magnetron leak detector according to claim 1, characterized in that, The elastic seal has a through hole, an installation hole is provided on the lifting mounting plate, and the pressing sleeve is arranged in the installation hole and extends towards the detection table.

3. The magnetron leak detector according to claim 2, wherein, The elastic seal includes a first sealing ring, a metal ring and a second sealing ring arranged in sequence from top to bottom.

4. The magnetron leak detector according to claim 2 or 3, characterized in that, The negative pressure detection pipe is provided with a guiding cavity, a support ring is arranged at the bottom of the guiding cavity, and the elastic seal is supported on the support ring.

5. The magnetron leak detector according to claim 2, characterized in that, The outer wall of the pressing sleeve has a pressure-bearing ring, and the upper end of the pressure-bearing ring has a first installation pipe section for extending into the installation hole; a first conical surface is arranged on the inner wall of the first installation pipe section.

6. The magnetron leak detector according to claim 5, characterized in that, A guiding head is further provided on the lifting mounting plate, and a second conical surface is arranged on the inner wall of the guiding head.

7. The magnetron leak detector according to claim 6, wherein, The diameter of the opening at the top of the second conical surface is larger than the diameter of the installation hole.

8. The magnetron leak detector according to claim 1, characterized in that, A connecting rod is provided at the top of the helium release cover, a through hole is provided on the lifting seat, and the connecting rod passes through the through hole; a limiting block is fixedly arranged on the upper part of the connecting rod, and the distance between the limiting block and the helium release cover is greater than the length of the through hole.

9. The magnetron leak detector according to claim 8, wherein, The air inlet end includes an upper air inlet end and a side air inlet end, the connecting rod has an air channel, one end of the air channel communicates with the top of the inner cavity of the helium release cover, and the other end is connected to the upper air inlet end; the side air inlet end communicates with the side part of the inner cavity of the helium release cover.

10. The magnetron leak detector according to claim 9, characterized in that, The helium release cover includes a shell and an inner liner, the inner liner is arranged in the shell, and a ventilation gap is arranged between the inner liner and the shell; a first air outlet hole is provided at the top of the inner liner, and a second air outlet hole is provided on the lower side surface.

11. The magnetron leak detector according to claim 10, characterized in that, The connecting rod is directly connected to the first air outlet hole, and the side air inlet end communicates with the ventilation gap.

12. The magnetron leak detector according to claim 10 or 11, characterized in that, A sealing gasket is arranged in the bottom area between the shell and the inner liner.

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