Photoacoustic detection method and related equipment

Abstract

The embodiment of the invention discloses a photoacoustic detection method and related equipment, which are used for ensuring the stability and the measurement precision of photoacoustic detection. The method provided by the embodiment of the invention comprises the following steps: acquiring initial power of an initial light beam and current system light transmittance on an excitation light path and a detection light path; in response to a photoacoustic detection instruction, based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system light transmittance on an excitation light path and the current system light transmittance on a detection light path, determining a first emergent proportion of the light intensity adjusting assembly and a second emergent proportion of the light splitting assembly, the first emergent proportion is the ratio of the adjusted optical power of the initial light beam to the optical power of the initial light beam, the second emergent proportion is the ratio of the optical power of the first type of light to the adjusted optical power of the initial light beam, and the first type of light is probe light or excitation light; and performing photoacoustic detection on the sample based on the first emission ratio and the second emission ratio.

Description

Technical Field

[0001] Embodiments of the present application relate to the field of photoacoustic detection, and in particular, to photoacoustic detection methods and related devices. Background Art

[0002] Photoacoustic detection technology is a detection method for detecting the thickness and internal properties of thin films or wafers. The basic principle is as follows: Use ultrashort pulsed lasers as the probe light and the excitation light respectively. The excitation light is used to irradiate the surface of the sample. After the sample absorbs the laser energy, it generates a thermal deformation, thereby generating acoustic waves propagating inside and on the surface of the solid. At the same time, another probe light is used to irradiate the surface of the sample. When the acoustic wave propagates in the sample, two effects can occur: First, the reflectivity of the sample surface changes; Second, the surface of the sample generates a deformation, causing the reflection direction of the reflected probe light to deflect or the wavefront to change; By detecting the intensity change of the probe light generated due to the change in reflectivity or the reflection deflection of the light beam by the detector, the film thickness and internal physical properties of the sample can be obtained.

[0003] For the film thickness detection of specific metal or dielectric thin films, in order to obtain a measurement signal with a high signal-to-noise ratio, the excitation light and the probe light incident on the sample need to be accurately set to specific powers. However

[0004] However, during long-term use, the components of the photoacoustic detection system will experience a certain degree of loss or component replacement. The losses include, but are not limited to: the initial power of the laser light emitted by the laser decreases, and the reflectivity of the mirror decreases. Therefore, the changes (such as losses or replacements) of the components of the photoacoustic detection system make the actual powers of the excitation light and / or the probe light irradiated on the sample according to the user settings inconsistent with the expected powers, affecting the stability and detection accuracy of the final detection. Summary of the Invention

[0005] Embodiments of the present application provide a photoacoustic detection method and related devices for ensuring the stability and measurement accuracy of photoacoustic detection.

[0006] A first aspect of the embodiments of the present application provides a photoacoustic detection method,

[0007] applied to a detection system, the detection system including a laser, an optical intensity adjustment component, a beam splitting component, and a second detection component. The optical intensity adjustment component is used to adjust the optical power of the initial light beam emitted by the laser and make the adjusted initial light beam reach the beam splitting component. The beam splitting component is used to split the adjusted initial light beam into excitation light and probe light. The second detection component is used to receive the signal light generated after the probe light reaches the sample;

[0008] The photoacoustic detection method includes:

[0009] Obtain the initial power of the initial light beam emitted by the laser, the current system transmittance on the excitation light path in the detection system, and the current system transmittance on the detection light path;

[0010] In response to a photoacoustic detection instruction, based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path, determine the first emission ratio of the light intensity adjustment component and the second emission ratio of the beam splitting component. The first emission ratio is the ratio between the optical power of the adjusted initial light beam and the optical power of the initial light beam. The second emission ratio is the ratio between the optical power of the first type of light and the optical power of the adjusted initial light beam, where the first type of light is the detection light or the excitation light;

[0011] Perform photoacoustic detection on the sample based on the first emission ratio and the second emission ratio.

[0012] In a specific implementation, the obtaining of the current system transmittance on the excitation light path and the current system transmittance on the detection light path in the detection system includes:

[0013] Obtain calibration data, which includes the calibration power of the calibration light beam emitted by the laser, the third emission ratio of the light intensity adjustment component, and the fourth emission ratio of the beam splitting component. The third emission ratio is the ratio between the optical power of the calibration light beam adjusted by the light intensity adjustment component and the optical power of the calibration light beam. The second emission ratio is the ratio between the optical power of the second type of light and the optical power of the adjusted calibration light beam. The beam splitting component is also used to divide the adjusted calibration light beam into calibration excitation light and calibration detection light, and the second type of light is the calibration detection light or the calibration excitation light;

[0014] Obtain the detection power of the calibration detection light incident on the sample and the excitation power of the calibration excitation light incident on the sample;

[0015] Based on the calibration data, determine the expected power of the calibration excitation light incident on the sample and the expected power of the calibration detection light incident on the sample;

[0016] Based on the quotient between the expected power of the calibration excitation light incident on the sample and the excitation power, determine the current system transmittance on the excitation light path; based on the quotient between the expected power of the calibration detection light incident on the sample and the detection power, determine the current system transmittance on the detection light path.

[0017] In a specific implementation manner, determining the expected power of the excitation light incident on the sample and the expected power of the detection light incident on the sample based on the calibration data includes:

[0018] Determine the fifth output ratio of the calibration excitation light based on the fourth output ratio, where the fifth output ratio is the ratio of the optical power of the calibration excitation light to the optical power of the adjusted calibration light beam;

[0019] Determine the product of the calibration power, the third output ratio, and the fifth output ratio as the expected power of the excitation light incident on the sample;

[0020] Determine the sixth output ratio of the calibration detection light based on the fourth output ratio, where the sixth output ratio is the ratio of the optical power of the calibration detection light to the optical power of the adjusted calibration light beam;

[0021] Determine the product of the calibration power, the third output ratio, and the sixth output ratio as the expected power of the excitation light incident on the sample.

[0022] In a specific implementation manner, the first type of light is the excitation light. Determining the first output ratio of the light intensity adjustment component and the second output ratio of the beam splitting component based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path includes:

[0023] Determine the product of the first output ratio and the second output ratio based on the following formula:

[0024]

[0025] where P pump is the expected power of the excitation light, P0 is the initial power, A1 is the current system transmittance on the excitation light path, R1 is the first output ratio, and R2 is the second output ratio;

[0026] Determine the difference between 1 and the second output ratio as the seventh output ratio, where the seventh output ratio is the ratio of the optical power of the detection light to the optical power of the adjusted initial light beam;

[0027] Determine the product of the first output ratio and the seventh output ratio based on the following formula:

[0028]

[0029] where P probeis the expected power of the detection light, A2 is the current system transmittance on the optical path of the detection light, and (1 - R2) is the seventh output ratio;

[0030] Based on the product of the first output ratio and the seventh output ratio, and the product of the first output ratio and the second output ratio, determine the first output ratio and the second output ratio.

[0031] In a specific implementation manner, the photoacoustic detection instruction includes a first expected output ratio and a second expected output ratio. The first expected output ratio is the expected ratio between the optical power of the adjusted initial light beam and the optical power of the initial light beam. The second expected output ratio is the expected ratio between the optical power of the first type of light and the optical power of the adjusted initial light beam. The method further includes:

[0032] Determine the expected power of the excitation light as the product of the initial power, the first expected output ratio, and the second expected output ratio;

[0033] Determine the expected power of the detection light as the product of the initial power, the first expected output ratio, and the third expected output ratio; the third expected output ratio is the difference between 1 and the second expected output ratio.

[0034] A second aspect of the embodiments of the present application provides a photoacoustic detection system, including:

[0035] A laser for emitting a light beam;

[0036] An optical intensity adjustment component for adjusting the output ratio of the light beam emitted by the laser;

[0037] A beam splitting component that divides the output light of the optical intensity adjustment component into two types of light according to a ratio;

[0038] A second detection component for receiving the signal light formed after the detection light reaches the sample;

[0039] A first detection component for obtaining the optical power of each type of light incident on the sample;

[0040] A processing module for determining the current system transmittance on the optical path of each type of light based on the optical power of each type of light, and executing the photoacoustic detection method according to any one of the preceding claims 1 to 5.

[0041] In a specific implementation manner, the first detection component includes a detector and a turning element that makes the two types of light incident on the detector.

[0042] A third aspect of the embodiments of the present application provides a computer device, which is applied to a detection system. The detection system includes a laser, an optical intensity adjustment component, a beam splitting component, and a second detection component. The optical intensity adjustment component is configured to adjust the optical power of the initial beam emitted by the laser and make the adjusted initial beam reach the beam splitting component. The beam splitting component is configured to split the adjusted initial beam into an excitation light and a detection light. The second detection component is configured to receive the signal light generated after the detection light reaches the sample;

[0043] The computer device includes:

[0044] An acquisition unit, configured to acquire the initial power of the initial beam emitted by the laser, the current system transmittance on the excitation light path in the detection system, and the current system transmittance on the detection light path;

[0045] A determination unit, configured to, in response to a photoacoustic detection instruction, determine a first output ratio of the optical intensity adjustment component and a second output ratio of the beam splitting component based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path. The first output ratio is the ratio between the optical power of the adjusted initial beam and the optical power of the initial beam. The second output ratio is the ratio between the optical power of a first type of light and the optical power of the adjusted initial beam. The first type of light is the detection light or the excitation light;

[0046] A detection unit, configured to perform photoacoustic detection on the sample based on the first output ratio and the second output ratio.

[0047] In a specific implementation manner, the acquisition unit is specifically configured to acquire calibration data, where the calibration data includes the calibration power of the calibration beam emitted by the laser, a third output ratio of the optical intensity adjustment component, and a fourth output ratio of the beam splitting component. The third output ratio is the ratio between the optical power of the calibration beam adjusted by the optical intensity adjustment component and the optical power of the calibration beam. The second output ratio is the ratio between the optical power of a second type of light and the optical power of the adjusted calibration beam. The beam splitting component is further configured to split the adjusted calibration beam into a calibration excitation light and a calibration detection light. The second type of light is the calibration detection light or the calibration excitation light;

[0048] Acquire the detection power of the calibration detection light incident on the sample and the excitation power of the calibration excitation light incident on the sample;

[0049] Based on the calibration data, determine the expected power of the calibration excitation light incident on the sample and the expected power of the calibration detection light incident on the sample;

[0050] Determine the current system light transmittance on the excitation light path based on the quotient between the expected power of the calibration excitation light incident on the sample and the excitation power; determine the current system light transmittance on the detection light path based on the quotient between the expected power of the calibration detection light incident on the sample and the detection power.

[0051] In a specific implementation manner, the obtaining unit is specifically configured to determine a fifth emission ratio of the calibration excitation light based on the fourth emission ratio, where the fifth emission ratio is the ratio of the optical power of the calibration excitation light to the optical power of the adjusted calibration light beam;

[0052] Determine the product of the calibration power, the third emission ratio, and the fifth emission ratio as the expected power of the excitation light incident on the sample;

[0053] Determine a sixth emission ratio of the calibration detection light based on the fourth emission ratio, where the sixth emission ratio is the ratio of the optical power of the calibration detection light to the optical power of the adjusted calibration light beam;

[0054] Determine the product of the calibration power, the third emission ratio, and the sixth emission ratio as the expected power of the excitation light incident on the sample.

[0055] In a specific implementation manner, the first type of light is excitation light, and the determining unit is specifically configured to determine the product of the first emission ratio and the second emission ratio based on the following formula:

[0056]

[0057] where P pump is the expected power of the excitation light, P0 is the initial power, A1 is the current system light transmittance on the excitation light path, R1 is the first emission ratio, and R2 is the second emission ratio;

[0058] Determine the difference between 1 and the second emission ratio as the seventh emission ratio, where the seventh emission ratio is the ratio of the optical power of the detection light to the optical power of the adjusted initial light beam;

[0059] Determine the product of the first emission ratio and the seventh emission ratio based on the following formula:

[0060]

[0061] where P probe is the expected power of the detection light, A2 is the current system light transmittance on the detection light path, and (1 - R2) is the seventh emission ratio;

[0062] Determine the first output ratio and the second output ratio based on the product of the first output ratio and the seventh output ratio, and the product of the first output ratio and the second output ratio.

[0063] In a specific implementation manner, the photoacoustic detection instruction includes a first expected output ratio and a second expected output ratio. The first expected output ratio is the expected ratio between the optical power of the adjusted initial light beam and the optical power of the initial light beam, and the second expected output ratio is the expected ratio between the optical power of the first type of light and the optical power of the adjusted initial light beam. The method further includes:

[0064] The determining unit is further configured to determine the product of the initial power, the first expected output ratio, and the second expected output ratio as the expected power of the excitation light;

[0065] The determining unit is further configured to determine the product of the initial power, the first expected output ratio, and a third expected output ratio as the expected power of the detection light; the third expected output ratio is the difference between 1 and the second expected output ratio.

[0066] A fourth aspect of the embodiments of the present application provides a computer device, including:

[0067] A central processing unit, a memory, and an input / output interface;

[0068] The memory is a transient storage memory or a persistent storage memory;

[0069] The central processing unit is configured to communicate with the memory and execute the instruction operations in the memory to execute the method described in the first aspect.

[0070] A fifth aspect of the embodiments of the present application provides a computer program product including instructions, which when run on a computer, cause the computer to execute the method described in the first aspect.

[0071] A sixth aspect of the embodiments of the present application provides a computer storage medium storing instructions, which when executed on a computer, cause the computer to execute the method described in the first aspect.

[0072] As can be seen from the above technical solutions, the embodiments of the present application have the following advantages: The changes of all components on the excitation light path in the optical detection system are abstracted into the system light transmittance on the excitation light path; and the changes of all components on the detection light path in the optical detection system are abstracted into the system light transmittance on the detection light path. Then, based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system light transmittance on the excitation light path, and the current system light transmittance on the detection light path, the first emission ratio and the second emission ratio are determined. Finally, photoacoustic detection is performed on the sample based on the first emission ratio and the second emission ratio, which can ensure that the power of the excitation light irradiated on the sample surface is equal to the expected power of the excitation light, and the power of the detection light irradiated on the sample surface is equal to the expected power of the detection light, thereby ensuring the stability of the final measurement and the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0073] Figure 1 FIG. is a schematic structural diagram of a photoacoustic measurement system disclosed in an embodiment of the present application;

[0074] Figure 2 FIG. is a schematic flowchart of a photoacoustic detection method disclosed in an embodiment of the present application;

[0075] Figure 3 FIG. is a schematic structural diagram of a computer device disclosed in an embodiment of the present application;

[0076] Figure 4 FIG. is another schematic structural diagram of a computer device disclosed in an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0077] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0078] The embodiments of the present application provide a photoacoustic detection method and related devices for ensuring the stability and measurement accuracy of photoacoustic detection.

[0079] To better implement the photoacoustic detection method of the embodiments of the present application, the embodiments of the present application provide as Figure 1The optical path diagram of the photoacoustic detection system shown. Among the two paths of light emitted from the beam splitting component, the solid line represents the excitation light optical path, and the dashed line represents the detection light. The photoacoustic detection system at least includes: a laser, an optical intensity adjustment component, a beam splitting component, a second detection component, a sample, and a first detection component. Among them, the optical intensity adjustment component is used to adjust the emission ratio of the beam emitted by the laser (such as the initial beam and the calibration beam) (that is, the quotient of the power of the emitted light of the optical intensity adjustment component and the power of the incident light of the optical intensity adjustment component); the beam splitting component is used to adjust the proportion of the optical power of different types of emitted light in the total power of the emitted light; the second detection component is used to obtain the actual power of the excitation light incident on the sample and the actual power of the detection light incident on the sample, and determine the current system transmittance on the excitation light optical path and the current system transmittance on the detection light optical path based on the above two; the first detection component is used to receive the signal light formed after the detection light reaches the sample.

[0080] In practical applications, in order to add a second detection component to an existing photoacoustic measurement system (including but not limited to a laser, an optical intensity adjustment component, a beam splitting component, a sample, and a first detection component) at a lower cost, a steering element can be set before the excitation light and the detection light are incident on the sample (that is, Figure 1 the steering element of the second detection component in Figure 1 ), and the excitation light and the detection light are incident on the detector through the steering element to obtain their powers, which are used as the actual powers irradiated on the sample. Among them,

[0081] In addition to the above components, as Figure 1 shown in Figure 1 , in order to more compactly implement the deployment of the optical detection system, the optical detection system further includes components such as a linear displacement stage, a plurality of steering elements, a modulator, and a focusing element (mainly used to make the detection light and the excitation light incident on the same position on the surface of the sample). It should be noted that

[0082] The placement positions of the components of the photoacoustic detection system shown are all placement methods in a specific scenario, and do not substantially limit the positions of the components of the photoacoustic detection system of the present application. Except for the placement positions between some components clearly described in the present application being limited, the placement of other components can be set as needed.

[0082] It should be noted that during the process of photoacoustic detection, the direction of the steering element in the second detection component can be adjusted so that the excitation light and the detection light can be directly incident on the focusing element without passing through it, reducing power attenuation.

[0083] Based on the above optical detection system, please refer to Figure 2 , the embodiments of the present application provide a photoacoustic detection method, including the following steps:

[0084] 201. Obtain the initial power of the initial light beam emitted by the laser, and detect the current system transmittance on the excitation light path and the current system transmittance on the detection light path in the system.

[0085] In order to accurately calculate the first emission ratio that should be set when the excitation light irradiated on the sample is the corresponding expected power and the detection light irradiated on the sample is the corresponding expected power, and the second emission ratio that should be set for any type of light, under the premise that each component has changed compared with the initial state (such as when leaving the factory or during the first detection), it is necessary to obtain the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path.

[0086] Among them, in the embodiments of the present application, the changes of all components on the excitation light path in the optical detection system are abstracted as the system transmittance on the excitation light path; and the changes of all components on the detection light path in the optical detection system are abstracted as the system transmittance on the detection light path. Specifically, in the embodiments of the present application, the system transmittance on the excitation light path refers to the system attenuation of all components (including the laser, the light intensity adjustment component, and the beam splitting component, etc.) that the excitation light passes through before the initial light beam is emitted to the excitation light and incident on the sample; the system transmittance on the detection light path refers to the system attenuation of all components (including the laser, the light intensity adjustment component, and the beam splitting component, etc.) that the detection light passes through before the initial light beam is emitted to the detection light and incident on the sample. Among them, the system attenuation refers to other attenuations generated except for the attenuation set for each component (that is, the emission ratio corresponding to different components).

[0087] It should be noted that the emission ratio of any component referred to in the foregoing and subsequent embodiments of the present application refers to the ratio of the optical power of the emitted light of the component (any type) to the optical power of the corresponding incident light, and will not be elaborated hereinafter.

[0088] 202. In response to the photoacoustic detection instruction, based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path, determine the first emission ratio of the light intensity adjustment component and the second emission ratio of the beam splitting component. The first emission ratio is the ratio between the optical power of the adjusted initial light beam and the optical power of the initial light beam, and the second emission ratio is the ratio between the optical power of the first type of light and the optical power of the adjusted initial light beam. The first type of light is the detection light or the excitation light.

[0089] It can be understood that the factors affecting the actual power of the excitation light and the detection light irradiated on the sample include: the initial power of the initial light beam emitted by the laser, the first emission ratio, the second emission ratio, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path.

[0090] Therefore, based on the aforementioned system transmittance and other physical quantities, embodiments of the present application can calculate the required first emission ratio and second emission ratio. It should be noted that the sum of the emission ratios of the two types of light after the beam splitting component is 1. Therefore, based on the second emission ratio of the first type of light, the emission ratio of the other type of light from the beam splitting component can be calculated. Among them, the first type of light is the detection light or the excitation light, the other type of light is the detection light or the excitation light, and the first type of light is different from the other type of light.

[0091] 203. Perform photoacoustic detection on the sample based on the first emission ratio and the second emission ratio.

[0092] Adjust the angle between the light intensity adjustment component and the optical axis of the initial light beam based on the first emission ratio, so that the quotient of the power of the light emitted by the light intensity adjustment component and the power of the incident light of the light intensity adjustment component is the first emission ratio, that is, the emission ratio of the light intensity adjustment component is the first emission ratio; adjust the angle between the beam splitting component and the optical axis of the initial light beam based on the second emission ratio, so that the emission ratio of the beam splitting component is the second emission ratio.

[0093] Based on the foregoing, it can be known that after adjusting the light intensity adjustment component based on the first emission ratio and the beam splitting component based on the second emission ratio, it can be ensured that the power of the excitation light irradiated on the sample surface is equal to the expected power of the excitation light, and the power of the detection light irradiated on the sample surface is equal to the expected power of the detection light, ensuring the accuracy rate of photoacoustic measurement of the sample.

[0094] In the embodiments of the present application, the changes of all components on the excitation light path in the optical detection system are abstracted as the system transmittance on the excitation light path; and the changes of all components on the detection light path in the optical detection system are abstracted as the system transmittance on the detection light path. Then, based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path, the first emission ratio and the second emission ratio are determined. Finally, performing photoacoustic detection on the sample based on the first emission ratio and the second emission ratio can ensure that the power of the excitation light irradiated on the sample surface is equal to the expected power of the excitation light, and the power of the detection light irradiated on the sample surface is equal to the expected power of the detection light, thereby ensuring the stability of the final measurement and the detection accuracy.

[0095] On the basis of the foregoing embodiments, the following describes how to determine the first emission ratio and the second emission ratio.

[0096] First, in the embodiments of the present application, it is assumed that the output power of the laser is P0, the output ratio of the light intensity adjustment component is R1, the ratio of the excitation light in the output light of the beam splitting component is R2, and the ratio of the detection light in the output light of the beam splitting component is 1 - R2. Among them, R1 can be controlled by adjusting the angle between the light intensity adjustment component and the optical axis of the initial light beam, and R2 can be controlled by adjusting the angle between the beam splitting component and the optical axis of the initial light beam. Then, the actual power of the excitation light incident on the sample should be P0×A1×R1×R2, and the actual power of the detection light incident on the sample should be P0×A2×R1×(1 - R2). Wherein, A1 is the current system light transmittance on the excitation light path, and A2 is the current system light transmittance on the detection light path.

[0097] In step 202 of the embodiments of the present application, it is known that the optical power P0 of the initial light beam emitted by the laser, the expected power P of the excitation light incident on the sample pump and the expected power P of the detection light incident on the sample probe as well as A1 and A2. What needs to be solved is the first output ratio R1, the second output ratio R2, and the seventh output ratio (1 - R2). Therefore, if the first type of light is the excitation light, based on the aforementioned actual power calculation formulas for the excitation light and the detection light, the following expressions can be transformed: and Wherein, the physical quantities on the right side of the two equalities here are all known quantities. Therefore, the embodiments of the present application can obtain the specific values of R1×R2 and R1×(1 - R2), and further can determine the unique first output ratio R1 and the second output ratio R2.

[0098] In practical applications, considering that the light beam emitted by the laser will be attenuated multiple times before reaching the sample, in order to ensure that the power of the excitation light incident on the sample and the power of the detection light incident on the sample meet the detection requirements of the user. Generally, the user can directly set the power of the required excitation light and the power of the required detection light. If the user does not directly set the power, the user can also set the first expected output ratio of the light intensity adjustment component and the second expected output ratio of the beam splitting component. Based on the two set output ratios, the power required for each type of light can also be calculated. Specifically, the first expected output ratio and the second expected output ratio can be included in the photoacoustic detection instruction. The first expected output ratio is the expected ratio between the optical power of the adjusted initial light beam and the optical power of the initial light beam, and the second expected output ratio is the expected ratio between the optical power of the first type of light and the optical power of the adjusted initial light beam.

[0099] Continuing based on the aforementioned actual power calculation formulas for the excitation light and the detection light, the following can be transformed: P pump = P0×A1×R1′×R2′ and P probe= P0 × A2 × R1′ × (1 - R2′), where R1′ is the first expected output ratio of the light intensity adjustment component (set by the user), and R2′ is the second expected output ratio of the beam splitting component (set by the user). Since the first type of light is the excitation light, that is, the second expected output ratio refers to the expected output ratio of the excitation light in the output light of the beam splitting component, then when obtaining P pump and P probe After that, based on the expressions: and The unique R1 and R2 can be determined.

[0100] To more clearly illustrate the technical solution of the embodiments of the present application, in the stage of photoacoustic detection based on the current system light transmittance on the excitation light path and the detection light path: the output light of the laser is called the initial beam, the output light of the light intensity adjustment component is called the adjusted initial beam, and the two types of light output by the beam splitting component are called the excitation light and the detection light; in the stage of determining the current system light transmittance on the excitation light path and the detection light path: the output light of the laser is called the calibration beam, the output light of the light intensity adjustment component is called the adjusted calibration beam, and the two types of (calibration) light output by the beam splitting component are called the calibration excitation light and the calibration detection light.

[0101] Based on the foregoing embodiments, the following describes the specific determination method of the current system light transmittance on the excitation light path and the detection light path: Obtain calibration data, where the calibration data includes the calibration power of the calibration beam emitted by the laser, the third output ratio of the light intensity adjustment component, and the fourth output ratio of the beam splitting component. The third output ratio is the ratio of the optical power of the calibrated beam adjusted by the light intensity adjustment component to the optical power of the calibration beam, and the second output ratio is the ratio of the optical power of the second type of light to the optical power of the adjusted calibration beam. The beam splitting component is further configured to divide the adjusted calibration beam into a calibration excitation light and a calibration detection light, and the second type of light is the calibration detection light or the calibration excitation light; obtain the detection power of the calibration detection light incident on the sample, and the excitation power of the calibration excitation light incident on the sample; determine the expected power of the calibration excitation light incident on the sample and the expected power of the calibration detection light incident on the sample based on the calibration data; determine the current system light transmittance on the excitation light path based on the quotient between the expected power of the calibration excitation light incident on the sample and the excitation power; determine the current system light transmittance on the detection light path based on the quotient between the expected power of the calibration detection light incident on the sample and the detection power.

[0102] Specifically, the second detection component is used to obtain the detection power of the calibration detection light incident on the sample and the excitation power of the calibration excitation light incident on the sample. On this basis, based on the physical quantities in the calibration data, the expected power of the calibration detection light incident on the sample and the expected power of the calibration excitation light incident on the sample can be calculated. Finally, taking the second type of light as an example of the excitation light, when the user sets the expected power, the current system transmittance on the excitation light path is not considered, that is, the user believes that the expected power of the excitation light incident on the sample should be p0×r1×r2. However, after the current system transmittance A1 on the excitation light path is introduced in the embodiments of the present application, the embodiments of the present application believe that the actual excitation power of the excitation light incident on the sample is p0×A1×r1×r2. Wherein, p0 is the calibration power, A1 is the current system transmittance on the excitation light path, r1 is the third emission ratio, and r2 is the emission ratio of the calibration excitation light (i.e., the fifth emission ratio described later). It can be seen that the quotient between the expected power and the excitation power of the calibration excitation light incident on the sample is the current system transmittance on the excitation light path. Similarly, it can be known that the quotient between the expected power and the detection power of the calibration detection light incident on the sample is the current system transmittance on the detection light path.

[0103] In practical applications, in order to measure the current system transmittance on the excitation light path and the current system transmittance on the detection light path more accurately, the embodiments of the present application obtain multiple groups of calibration data, and the calibration power, the third emission ratio, and the fourth emission ratio included in any two groups of calibration data are not completely the same. Combining the foregoing embodiments, the quotient between the expected power and the excitation power of the calibration excitation light incident on the sample under different calibration data is used as the alternative system transmittance on the excitation light path, and the quotient between the expected power and the detection power of the calibration detection light incident on the sample is used as the alternative system transmittance on the detection light path. Finally, the current system transmittance on the excitation light path can be the average value of the sum of the alternative system transmittances on each excitation light path. Similarly, the current system transmittance on the detection light path can be the average value of the sum of the alternative system transmittances on each detection light path.

[0104] It should be noted that the step of "determining the current system transmittance on the excitation light path and the current system transmittance on the detection light path" in the embodiments of the present application can be executed regularly (specifically, it can be set as needed every week or month) or triggered by a transmittance update instruction to update the current system transmittance on the excitation light path and the detection light path in a timely manner, and improve the accuracy of photoacoustic detection.

[0105] Further, considering that the method of directly taking the average of the sum of the light transmittances of each alternative system as the light transmittance of the current system has limited accuracy, therefore, a linear regression method is used to determine the light transmittance A1 of the current system on the excitation light path and the light transmittance A2 of the current system on the detection light path. Specifically, taking the second type of light as the excitation light as an example, based on the formula p pump = p0 × A1 × r1 × r2, it can be seen that when performing linear regression, the excitation frequency corresponding to each set of calibration data (such as p pump ) is determined as the first dependent variable, and the product of the third emission ratio of the light intensity adjustment component and the fourth emission ratio of the beam splitting component in the calibration data is determined as the first independent variable (such as r1 × r2). Based on multiple sets of data on p pump - p0 × r1 × r2, the light transmittance A1 of the current system on the excitation light path can be obtained through linear regression. The calculation method of the light transmittance A2 of the current system on the detection light path of the excitation light here is the same and will not be elaborated here.

[0106] Further, the step of "determining the expected power of the excitation light incident on the sample and the expected power of the detection light incident on the sample based on the calibration data" can be implemented according to the following method: Determine the fifth emission ratio of the calibrated excitation light based on the fourth emission ratio. The fifth emission ratio is the ratio between the optical power of the calibrated excitation light and the optical power of the adjusted calibrated light beam; Determine the product of the calibration power, the third emission ratio, and the fifth emission ratio as the expected power of the excitation light incident on the sample; Determine the sixth emission ratio of the calibrated detection light based on the fourth emission ratio. The sixth emission ratio is the ratio between the optical power of the calibrated detection light and the optical power of the adjusted calibrated light beam; Determine the product of the calibration power, the third emission ratio, and the sixth emission ratio as the expected power of the excitation light incident on the sample.

[0107] Specifically, according to the content, when the user sets the expected power, the light transmittance of the current system on the excitation light path is not considered, that is, the user believes that the expected power of the excitation light incident on the sample should be p0 × r1 × r2. That is to say, the expected power of the excitation light = p0 × r1 × r2; Similarly, the expected power of the detection light = p0 × r1 × (1 - r2), where (1 - r2) is the emission ratio of the calibrated detection light, that is, the sixth emission ratio. In addition, it can be understood that after the adjusted calibrated light beam is incident on the beam splitting component, the sum of the emission ratios of the calibrated excitation light and the calibrated detection light emitted by the beam splitting component is 1. Therefore, if the second type of light is the excitation light, the fifth emission ratio is equal to the fourth emission ratio, and the sixth emission ratio is equal to (1 - the fourth emission ratio); if the second type of light is the detection light, the fifth emission ratio is equal to (1 - the fourth emission ratio), and the sixth emission ratio is equal to the fourth emission ratio.

[0108] Please refer to Figure 3, an embodiment of the present application provides a computer device, which is applied to a detection system. The detection system includes a laser, an optical intensity adjustment component, a beam splitting component, and a second detection component. The optical intensity adjustment component is used to adjust the optical power of the initial beam emitted by the laser and make the adjusted initial beam reach the beam splitting component. The beam splitting component is used to split the adjusted initial beam into an excitation light and a detection light. The second detection component is used to receive the signal light generated after the detection light reaches the sample;

[0109] The computer device includes:

[0110] An acquisition unit 301, configured to acquire the initial power of the initial beam emitted by the laser, the current system transmittance on the excitation light path in the detection system, and the current system transmittance on the detection light path;

[0111] A determination unit 302, configured to, in response to a photoacoustic detection instruction, determine a first output ratio of the optical intensity adjustment component and a second output ratio of the beam splitting component based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path. The first output ratio is the ratio between the optical power of the adjusted initial beam and the optical power of the initial beam. The second output ratio is the ratio between the optical power of the first type of light and the optical power of the adjusted initial beam. The first type of light is the detection light or the excitation light;

[0112] A detection unit 303, configured to perform photoacoustic detection on the sample based on the first output ratio and the second output ratio.

[0113] In a specific implementation manner, the acquisition unit 301 is specifically configured to acquire calibration data, where the calibration data includes the calibration power of the calibration beam emitted by the laser, the third output ratio of the optical intensity adjustment component, and the fourth output ratio of the beam splitting component. The third output ratio is the ratio between the optical power of the calibration beam adjusted by the optical intensity adjustment component and the optical power of the calibration beam. The second output ratio is the ratio between the optical power of the second type of light and the optical power of the adjusted calibration beam. The beam splitting component is further configured to split the adjusted calibration beam into a calibration excitation light and a calibration detection light. The second type of light is the calibration detection light or the calibration excitation light;

[0114] Acquire the detection power of the calibration detection light incident on the sample and the excitation power of the calibration excitation light incident on the sample;

[0115] Determine, based on the calibration data, the expected power of the calibration excitation light incident on the sample and the expected power of the calibration detection light incident on the sample;

[0116] Determine the current system transmittance on the excitation light path based on the quotient between the expected power of the calibration excitation light incident on the sample and the excitation power; determine the current system transmittance on the detection light path based on the quotient between the expected power of the calibration detection light incident on the sample and the detection power.

[0117] In a specific implementation, the obtaining unit 301 is specifically configured to determine a fifth emission ratio of the calibration excitation light based on a fourth emission ratio, where the fifth emission ratio is the ratio between the optical power of the calibration excitation light and the optical power of the adjusted calibration light beam.

[0118] Determine the product of the calibration power, the third emission ratio, and the fifth emission ratio as the expected power of the excitation light incident on the sample.

[0119] Determine a sixth emission ratio of the calibration detection light based on the fourth emission ratio, where the sixth emission ratio is the ratio between the optical power of the calibration detection light and the optical power of the adjusted calibration light beam.

[0120] Determine the product of the calibration power, the third emission ratio, and the sixth emission ratio as the expected power of the excitation light incident on the sample.

[0121] In a specific implementation, when the first type of light is the excitation light, the determining unit 302 is specifically configured to determine the product of the first emission ratio and the second emission ratio based on the following formula:

[0122]

[0123] where P pump is the expected power of the excitation light, P0 is the initial power, A1 is the current system transmittance on the excitation light path, R1 is the first emission ratio, and R2 is the second emission ratio.

[0124] Determine the difference between 1 and the second emission ratio as the seventh emission ratio, where the seventh emission ratio is the ratio between the optical power of the detection light and the optical power of the adjusted initial light beam.

[0125] Determine the product of the first emission ratio and the seventh emission ratio based on the following formula:

[0126]

[0127] where P probe is the expected power of the detection light, A2 is the current system transmittance on the detection light path, and (1 - R2) is the seventh emission ratio.

[0128] Determine the first emission ratio and the second emission ratio based on the product of the first emission ratio and the seventh emission ratio, and the product of the first emission ratio and the second emission ratio.

[0129] In a specific implementation manner, the photoacoustic detection instruction includes a first expected emission ratio and a second expected emission ratio. The first expected emission ratio is the expected ratio between the optical power of the adjusted initial light beam and the optical power of the initial light beam. The second expected emission ratio is the expected ratio between the optical power of the first type of light and the optical power of the adjusted initial light beam. The method further includes:

[0130] The determining unit 302 is further configured to determine the product of the initial power, the first expected emission ratio, and the second expected emission ratio as the expected power of the excitation light;

[0131] The determining unit 302 is further configured to determine the product of the initial power, the first expected emission ratio, and the third expected emission ratio as the expected power of the detection light; the third expected emission ratio is the difference between 1 and the second expected emission ratio.

[0132] Figure 4 FIG. 10 is a schematic structural diagram of a computer device provided by an embodiment of the present application. The computer device 400 may include one or more central processing units (CPUs) 401 and a memory 405. One or more application programs or data are stored in the memory 405.

[0133] Among them, the memory 405 may be volatile storage or persistent storage. The program stored in the memory 405 may include one or more modules, and each module may include a series of instruction operations on the computer device. Further, the central processing unit 401 may be configured to communicate with the memory 405 and execute a series of instruction operations in the memory 405 on the computer device 400.

[0134] The computer device 400 may further include one or more power supplies 402, one or more wired or wireless network interfaces 403, one or more input / output interfaces 404, and / or one or more operating systems, such as Windows ServerTM, Mac OS XTM, UnixTM, LinuxTM, FreeBSDTM, etc.

[0135] The central processing unit 401 may execute the operations performed by the computer device in the foregoing Figures 1 to 3 illustrated embodiments, which will not be elaborated herein specifically.

[0136] It should be noted that although the steps in the flowcharts involved in each embodiment are drawn in sequence according to the arrows, unless there is a clear description in this article, the execution of these steps is not strictly limited in order, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in each embodiment may include multiple steps or multiple stages. These steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be executed alternately or in turn with at least a part of other steps or steps or stages in other steps.

[0137] Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, devices, and units described above can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0138] In several embodiments provided in the present application, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed couplings or direct couplings or communication connections to each other can be indirect couplings or communication connections through some interfaces, devices, or units, and can be in electrical, mechanical, or other forms.

[0139] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0140] In addition, in each embodiment of the present application, the functional units can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above integrated units can be implemented in the form of hardware or in the form of software functional units.

[0141] When the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to enable a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of this application. The foregoing storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROM, read-only memory), random access memories (RAM, random access memory), magnetic disks, or optical discs that can store program codes.

[0142] An embodiment of this application also provides a computer program product containing instructions. When the computer program product runs on a computer, it enables the computer to execute the photoacoustic detection method as described above.

Claims

1. A photoacoustic detection method, characterized in that Applied to a detection system, the detection system includes a laser, an optical intensity adjustment component, a beam splitting component, and a second detection component. The optical intensity adjustment component is used to adjust the optical power of the initial beam emitted by the laser and make the adjusted initial beam reach the beam splitting component. The beam splitting component is used to split the adjusted initial beam into an excitation light and a detection light. The second detection component is used to receive the signal light generated after the detection light reaches the sample; The photoacoustic detection method includes: Obtaining the initial power of the initial beam emitted by the laser, the current system transmittance on the excitation light path in the detection system, and the current system transmittance on the detection light path; In response to a photoacoustic detection instruction, based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path in the detection system, determining a first output ratio of the optical intensity adjustment component and a second output ratio of the beam splitting component. The first output ratio is the ratio between the optical power of the adjusted initial beam and the optical power of the initial beam. The second output ratio is the ratio between the optical power of a first type of light and the optical power of the adjusted initial beam. The first type of light is the detection light or the excitation light; Performing photoacoustic detection on the sample based on the first output ratio and the second output ratio.

2. The method according to claim 1, characterized in that The obtaining of the current system transmittance on the excitation light path and the current system transmittance on the detection light path in the detection system includes: Obtaining calibration data, where the calibration data includes the calibration power of the calibration beam emitted by the laser, a third output ratio of the optical intensity adjustment component, and a fourth output ratio of the beam splitting component. The third output ratio is the ratio between the optical power of the calibration beam adjusted by the optical intensity adjustment component and the optical power of the calibration beam. The second output ratio is the ratio between the optical power of a second type of light and the optical power of the adjusted calibration beam. The beam splitting component is further used to split the adjusted calibration beam into a calibration excitation light and a calibration detection light. The second type of light is the calibration detection light or the calibration excitation light; Obtaining the detection power of the calibration detection light incident on the sample and the excitation power of the calibration excitation light incident on the sample; Based on the calibration data, determining the expected power of the calibration excitation light incident on the sample and the expected power of the calibration detection light incident on the sample; Based on the quotient between the expected power of the calibration excitation light incident on the sample and the excitation power, determining the current system transmittance on the excitation light path; based on the quotient between the expected power of the calibration detection light incident on the sample and the detection power, determining the current system transmittance on the detection light path.

3. The method according to claim 2, wherein The determining, based on the calibration data, of the expected power of the excitation light incident on the sample and the expected power of the detection light incident on the sample includes: Based on the fourth output ratio, determining a fifth output ratio of the calibration excitation light. The fifth output ratio is the ratio between the optical power of the calibration excitation light and the optical power of the adjusted calibration beam; Determine the product of the calibration power, the third output ratio, and the fifth output ratio as the expected power of the excitation light incident on the sample; Determine the sixth output ratio of the calibrated detection light based on the fourth output ratio, where the sixth output ratio is the ratio between the optical power of the calibrated detection light and the optical power of the adjusted calibration light beam; Determine the product of the calibration power, the third output ratio, and the sixth output ratio as the expected power of the excitation light incident on the sample.

4. The method according to claim 1, characterized in that, The first type of light is excitation light. Determining the first output ratio of the light intensity adjustment component and the second output ratio of the beam splitting component based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system transmittance on the excitation light path, and the current system transmittance on the detection light path includes: Determine the product of the first output ratio and the second output ratio based on the following formula: where P pump is the expected power of the pumping light, P0 is the initial power, A1 is the current system light transmittance on the pumping light path, R1 is the first output ratio, and R2 is the second output ratio; Determine the difference between 1 and the second output ratio as the seventh output ratio, where the seventh output ratio is the ratio between the optical power of the detection light and the optical power of the adjusted initial light beam; Determine the product of the first output ratio and the seventh output ratio based on the following formula: where P probe is the expected power of the detection light, A2 is the current system transmittance on the optical path of the detection light, and (1 - R2) is the seventh output ratio; Determine the first output ratio and the second output ratio based on the product of the first output ratio and the seventh output ratio, and the product of the first output ratio and the second output ratio.

5. The method according to claim 4, characterized in that, The photoacoustic detection instruction includes a first expected output ratio and a second expected output ratio. The first expected output ratio is the expected ratio between the optical power of the adjusted initial light beam and the optical power of the initial light beam, and the second expected output ratio is the expected ratio between the optical power of the first type of light and the optical power of the adjusted initial light beam. The method further includes: Determine the product of the initial power, the first expected output ratio, and the second expected output ratio as the expected power of the excitation light; Determine the product of the initial power, the first expected output ratio, and the third expected output ratio as the expected power of the detection light; the third expected output ratio is the difference between 1 and the second expected output ratio.

6. A photoacoustic detection system, characterized in that, Includes: A laser for emitting a light beam; A light intensity adjustment component for adjusting the output ratio of the light beam emitted by the laser; A beam splitting component that divides the output light of the light intensity adjustment component into two types of light according to a ratio; A first detection component for receiving the signal light formed after the detection light reaches the sample; A second detection component for obtaining the optical power of each type of light incident on the sample; A processing module for determining the current system transmittance on the optical path of each type of light based on the optical power of each type of light and performing the photoacoustic detection method according to any one of the preceding claims 1 to 5.

7. The photoacoustic detection system according to claim 6, characterized in that, The second detection component includes a detector and a steering element that makes the two types of light incident on the detector.

8. A computer device, characterized in that, Applied to a detection system, the detection system includes a laser, an optical intensity adjustment component, a beam splitting component, and a second detection component. The optical intensity adjustment component is used to adjust the optical power of the initial beam emitted by the laser and make the adjusted initial beam reach the beam splitting component. The beam splitting component is used to split the adjusted initial beam into an excitation light and a detection light. The second detection component is used to receive the signal lights generated after the excitation light and the detection light reach the sample respectively; The computer device includes: An acquisition unit, configured to acquire the initial power of the initial beam emitted by the laser, the current system light transmittance on the excitation light path in the detection system, and the current system light transmittance on the detection light path; A determination unit, configured to, in response to a photoacoustic detection instruction, determine a first output ratio of the optical intensity adjustment component and a second output ratio of the beam splitting component based on the expected power of the excitation light, the expected power of the detection light, the initial power, the current system light transmittance on the excitation light path, and the current system light transmittance on the detection light path. The first output ratio is the ratio between the optical power of the adjusted initial beam and the optical power of the initial beam. The second output ratio is the ratio between the optical power of a first type of light and the optical power of the adjusted initial beam, and the first type of light is the detection light or the excitation light; A detection unit, configured to perform photoacoustic detection on the sample based on the first output ratio and the second output ratio.

9. A computer device, characterized in that, Includes: A central processing unit, a memory, and an input / output interface; The memory is a transient storage memory or a persistent storage memory; The central processing unit is configured to communicate with the memory and execute the instruction operations in the memory to execute the method according to any one of claims 1 to 5.

10. A computer storage medium, characterized in that, Instructions are stored in the computer storage medium. When the instructions are executed on a computer, the computer is caused to execute the method according to any one of claims 1 to 5.

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