Resistor substrate double-station integrated clamping device and detection equipment

Abstract

The invention discloses a resistor substrate double-station integrated clamping device and detection equipment. The resistor substrate double-station integrated clamping device comprises a substrate, two sets of adsorption platform assemblies, two sets of X-direction pneumatic clamping assemblies and two sets of Y-direction pneumatic clamping assemblies, wherein the two sets of adsorption platform assemblies, the two sets of X-direction pneumatic clamping assemblies and the two sets of Y-direction pneumatic clamping assemblies are connected to the substrate; side positioning bearings are arranged on the Y-direction front sides of the two adsorption platform assemblies correspondingly, and a side positioning bearing is arranged between the two adsorption platform assemblies; the first X-direction pneumatic clamping assembly is arranged on the X-direction left side of the first adsorption platform assembly, the first Y-direction pneumatic clamping assembly is arranged on the Y-direction rear side of the first adsorption platform assembly, the second X-direction pneumatic clamping assembly is arranged on the X-direction right side of the second adsorption platform assembly, and the second Y-direction pneumatic clamping assembly is arranged on the Y-direction rear side of the second adsorption platform assembly. All the pneumatic clamping assemblies are independently controlled. According to the device, double-station clamping can be provided, two resistor substrates of the same specification or different specifications can be clamped at the same time, and the working efficiency and the device compatibility are improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of resistor substrate clamping devices, and particularly relates to a dual-station integrated clamping device for resistor substrates and a detection device including the device. Background Art

[0002] Surface mount resistors, abbreviated as SMD Resistors in English, also known as Chip Fixed Resistors, are a type of metal glaze resistors. They are made by mixing metal powder and glass glaze powder and printing them on a substrate using screen printing method. They have the advantages of light weight, small size, stable electrical performance, high reliability, low assembly cost and high mechanical strength, and are widely used in various fields, especially in mobile phones, computers, audio equipment, automobiles and other fields.

[0003] With the rapid development of electronic devices towards miniaturization and high integration, the size of surface mount resistors has been continuously reduced, and it has generally reached 01005 (0.4mm × 0.2mm) or even smaller specifications. Such resistor substrates are usually as thin as less than 0.1mm, and the substrate specifications are diverse (such as ranging from 50mm × 60mm to 74mm × 65mm). However, the existing automated measurement devices for resistor substrates have significant deficiencies in the clamping and positioning links. For example, rigid clamping is likely to cause deformation or rupture of ultra-thin substrates; the design of the vacuum adsorption system is single, unable to flexibly adapt to substrates with or without holes, and the adsorption stability is poor; only one single resistor substrate of one specification can be clamped at a time, unable to meet the requirement of parallel detection of multiple specifications, resulting in reduced detection efficiency, etc. Therefore, there is an urgent need for a solution that combines high precision, multi-specification compatibility and protective clamping to meet the requirements of efficient and non-destructive detection of resistor substrates in the electronic industry. Summary of the Invention

[0004] In order to solve the above problems existing in the prior art, the present invention provides a dual-station integrated clamping device for resistor substrates and a detection device, which can provide dual-station clamping, can clamp two resistor substrates of the same specification or different specifications simultaneously, improves the working efficiency and device compatibility, and also provides a resistor substrate detection device including the clamping device.

[0005] The object of the present invention is achieved through the following technical solutions, in combination with the attached drawings:

[0006] As an aspect of the present invention, there is provided a double-station integrated clamping device for a resistive substrate, including a substrate 3, a first adsorption platform assembly 1, a second adsorption platform assembly 2, a first X-direction pneumatic clamping assembly 5, a first Y-direction pneumatic clamping assembly 6, a second X-direction pneumatic clamping assembly 7, and a second Y-direction pneumatic clamping assembly 8 connected to the substrate 3; the first adsorption platform assembly 1 and the second adsorption platform assembly 2 are fixed side by side on the substrate 3 along the X direction; edge positioning bearings 4 are respectively arranged on the front sides in the Y direction of the first adsorption platform assembly 1 and the second adsorption platform assembly 2 for respectively providing edge positioning in the Y direction for the resistive substrates placed on the first adsorption platform assembly 1 and the second adsorption platform assembly 2, and an edge positioning bearing 4 is arranged in the middle of the first adsorption platform assembly 1 and the second adsorption platform assembly 2 and this edge positioning bearing 4 is in contact with both the first adsorption platform assembly 1 and the second adsorption platform assembly 2 simultaneously for providing edge positioning in the X direction for the resistive substrates placed on the first adsorption platform assembly 1 and the second adsorption platform assembly 2; the first X-direction pneumatic clamping assembly 5 is arranged on the left side in the X direction of the first adsorption platform assembly 1, and the first Y-direction pneumatic clamping assembly 6 is arranged on the rear side in the Y direction of the first adsorption platform assembly 1, and the resistive substrate is driven by the first X-direction pneumatic clamping assembly 5 and the first Y-direction pneumatic clamping assembly 6 to realize the clamping and positioning of the resistive substrate; the second X-direction pneumatic clamping assembly 7 is arranged on the right side in the X direction of the second adsorption platform assembly 2, and the second Y-direction pneumatic clamping assembly 8 is arranged on the rear side in the Y direction of the second adsorption platform assembly 2, and the resistive substrate is driven by the second X-direction pneumatic clamping assembly 7 and the second Y-direction pneumatic clamping assembly 8 to realize the clamping and positioning of the resistive substrate; each of the above pneumatic clamping assemblies is controlled independently.

[0007] Preferably, 2 edge positioning bearings 4 are respectively arranged on the front sides in the Y direction of the first adsorption platform assembly 1 and the second adsorption platform assembly 2, and the 2 edge positioning bearings are both in contact with the corresponding adsorption platform assembly, and the edge positioning bearings 4 are fixed on the substrate 3.

[0008] Furthermore, the structures of the first adsorption platform assembly 1 and the second adsorption platform assembly 2 are the same; the first adsorption platform assembly 1 includes a platform body 11 and an adsorption panel 12, the adsorption panel 12 is snap-connected to the top of the platform body 11 and a cavity is formed between the two; an air duct 115 is communicated between the platform body 11 and the cavity, and the air duct 115 is connected to a vacuum pump; through holes communicated with the cavity are arranged in an array on the adsorption panel 12.

[0009] Preferably, the platform body 11 is of an integral structure, a receiving groove 111 is provided on the top surface of the platform body 11, a step 114 is provided on the side wall of the receiving groove 111, and the adsorption panel 12 is snap-connected to the step 114 so that the cavity is formed between the top surface of the receiving groove 111 and the adsorption panel 12.

[0010] Preferably, a central ventilation hole 112 is provided in the middle of the accommodation groove 111 of the platform body 11. The central ventilation hole 112 is connected to the vacuum joint 113 through the air duct 115 opened in the platform body 11, and the vacuum joint 113 is connected to a vacuum pump.

[0011] Preferably, positioning holes 116 are provided at the bottom of the platform body 11. The adsorption platform assembly is connected and positioned on the substrate 3 through the cooperation of the positioning holes 116 and the positioning bosses 31 provided on the substrate 3.

[0012] Further, the structures of the first X-direction pneumatic clamping assembly 5, the first Y-direction pneumatic clamping assembly 6, the second X-direction pneumatic clamping assembly 7, and the second Y-direction pneumatic clamping assembly 8 are the same; the first X-direction pneumatic clamping assembly 5 includes a mounting plate 51, a driving arm 52, a driving cylinder 53, a ball bearing 54, and a preloading spring 55; the mounting plate 51 is connected to the substrate 3; the driving arm 52 is slidably connected to the mounting plate 51 and linearly moves relative to the mounting plate 51 under the action of the driving cylinder 53; the driving cylinder 53 is fixed on the mounting plate 51 and is connected to a gas supply device through an air pipe joint 531 to supply gas to the driving cylinder 53; the rolling bearing 54 is fixed at one end of the driving arm 52 close to the adsorption platform assembly for contacting and pushing the resistor substrate; the preloading spring 55 is connected between the mounting plate 51 and the driving arm 52 to provide a preloading force for the driving arm 52 toward the adsorption platform assembly.

[0013] Preferably, a spring connecting rod 551 is provided on one side of the driving arm, and a spring guide rod 552 is provided on the mounting plate 51. The two ends of the preloading spring 55 are respectively connected to the spring connecting rod 551 and the spring guide rod 552.

[0014] As another aspect of the present invention, a detection device is provided, which includes a resistor substrate double-station integrated clamping device of the present invention.

[0015] Preferably, the detection device is any one of an electrostatic detection device, an overload detection device, and a resistance value detection device.

[0016] The resistor substrate double-station integrated clamping device and the detection device proposed by the present invention have the following beneficial effects:

[0017] Double-station efficient operation: Through the first and second adsorption platform assemblies arranged side by side, two resistor substrates of the same or different specifications can be clamped simultaneously, significantly improving the detection efficiency.

[0018] Flexible pneumatic clamping to protect the substrate: The pneumatic clamping assemblies (X / Y directions) use ball bearings to contact the substrate and cooperate with the preloading spring to control the clamping force, avoiding deformation or damage caused by rigid clamping; the pneumatic components of each station are independently controlled, supporting different clamping requirements and having strong compatibility.

[0019] Adaptive vacuum adsorption system: The adsorption platform assembly is combined with the porous adsorption panel through a vacuum pump to stably adsorb the substrate; the cavity can be designed as an independent partition to adapt to the perforated substrate and avoid air leakage problems.

[0020] Precise positioning and quick switching: The edge positioning bearings achieve X / Y two-way mechanical positioning to ensure the position accuracy of the substrate; the positioning holes and bosses are designed in cooperation to support the quick replacement of the adsorption platform and meet the detection requirements of different specifications of substrates.

[0021] Multifunctional detection integration: This clamping device can be integrated into electrostatic detection, overload detection, and resistance detection equipment to meet the full-scenario requirements of the electronics industry for efficient and non-destructive detection. Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings to be used in the description of the embodiments of the present invention. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present invention and these drawings.

[0023] Figure 1 Schematic diagram of the overall structure of a double-station integrated clamping device for a resistor substrate described in Embodiment 1 of the present invention;

[0024] Figure 2 Schematic diagram of the structure of a double-station integrated clamping device for a resistor substrate described in Embodiment 1 of the present invention after removing two groups of adsorption platform components;

[0025] Figure 3 Schematic diagram of the structure of the adsorption platform assembly described in Embodiment 1 of the present invention;

[0026] Figure 4 Cross-sectional view of the platform body structure of the adsorption platform assembly described in Embodiment 1 of the present invention;

[0027] Figure 5 Schematic diagram of the back structure of the platform body of the adsorption platform assembly described in Embodiment 1 of the present invention;

[0028] Figure 6 Schematic diagram of the structure of the first X-direction pneumatic clamping assembly described in Embodiment 1 of the present invention;

[0029] In the figure:

[0030] 1 - The first adsorption platform assembly; 2 - The second adsorption platform assembly; 3 - The substrate; 4 - The edge positioning bearing; 5 - The first X-direction pneumatic clamping assembly; 6 - The first Y-direction pneumatic clamping assembly; 7 - The second X-direction pneumatic clamping assembly; 8 - The second Y-direction pneumatic clamping assembly;

[0031] 11 - Platform body; 111 - Accommodating groove; 112 - Ventilation hole; 113 - Vacuum joint; 114 - Step; 115 - Air passage; 12 - Adsorption panel; 31 - Positioning boss; 51 - Mounting plate; 52 - Driving arm; 53 - Driving cylinder; 531 - Pipe joint; 54 - Ball bearing; 55 - Pre - tightening spring; 551 - Spring connecting rod; 552 - Spring guide rod. Detailed implementation mode

[0032] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. In addition, it should be noted that for the convenience of description, only the parts related to the present invention are shown in the drawings, rather than all the structures.

[0033] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral body. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0034] In the description of this embodiment, the orientation or positional relationship such as "front", "rear", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be understood as a limitation to the present invention. In addition, the terms "No. 1" and "No. 2" are only used for distinction in description and have no special meaning.

[0035] Embodiment 1

[0036] This embodiment is a dual - station integrated clamping device for a resistor substrate, as Figure 1 , Figure 2As shown in the figure, it includes a substrate 3 and a first adsorption platform assembly 1, a second adsorption platform assembly 2, a first X-direction pneumatic clamping assembly 5, a first Y-direction pneumatic clamping assembly 6, a second X-direction pneumatic clamping assembly 7, and a second Y-direction pneumatic clamping assembly 8 connected to the substrate 3; the first adsorption platform assembly 1 and the second adsorption platform assembly 2 are fixed side by side on the substrate 3 along the X direction; edge positioning bearings 4 are respectively arranged on the front side in the Y direction of the first adsorption platform assembly 1 and the second adsorption platform assembly 2, which are used to respectively provide edge positioning in the Y direction for the resistor substrates placed on the first adsorption platform assembly 1 and the second adsorption platform assembly 2. An edge positioning bearing 4 is arranged between the first adsorption platform assembly 1 and the second adsorption platform assembly 2, and this edge positioning bearing 4 is in contact with both the first adsorption platform assembly 1 and the second adsorption platform assembly 2 simultaneously, which is used to provide edge positioning in the X direction for the resistor substrates placed on the first adsorption platform assembly 1 and the second adsorption platform assembly 2; the first X-direction pneumatic clamping assembly 5 is arranged on the left side in the X direction of the first adsorption platform assembly 1, and the first Y-direction pneumatic clamping assembly 6 is arranged on the rear side in the Y direction of the first adsorption platform assembly 1. The resistor substrate is driven by the first X-direction pneumatic clamping assembly 5 and the first Y-direction pneumatic clamping assembly 6 to realize the clamping and positioning of the resistor substrate; the second X-direction pneumatic clamping assembly 7 is arranged on the right side in the X direction of the second adsorption platform assembly 2, and the second Y-direction pneumatic clamping assembly 8 is arranged on the rear side in the Y direction of the second adsorption platform assembly 2. The resistor substrate is driven by the second X-direction pneumatic clamping assembly 7 and the second Y-direction pneumatic clamping assembly 8 to realize the clamping and positioning of the resistor substrate; each of the above pneumatic clamping assemblies is controlled independently.

[0037] Preferably, 2 edge positioning bearings 4 are respectively arranged on the front side in the Y direction of the first adsorption platform assembly 1 and the second adsorption platform assembly 2, and both of the 2 edge positioning bearings are in contact with the corresponding adsorption platform assembly. The edge positioning bearings 4 are fixed on the substrate 3.

[0038] As a preferred implementation of this embodiment, the edge positioning bearing and the ball bearing are made of insulating materials, and polyurethane bearings are used in this implementation.

[0039] Furthermore, the structures of the first adsorption platform assembly 1 and the second adsorption platform assembly 2 are the same; as Figures 2 to 5 shown, the first adsorption platform assembly 1 includes a platform body 11 and an adsorption panel 12. The adsorption panel 12 is snap-connected to the top of the platform body 11, and a cavity is formed between them; an air passage 115 is communicated between the platform body 11 and the cavity, and the air passage 115 is connected to a vacuum pump; through holes communicated with the cavity are arranged in an array on the adsorption panel 12.

[0040] Preferably, as Figures 2 to 4As shown, the platform body 11 is of an integral structure. A receiving groove 111 is provided on the top surface of the platform body 11, and a step 114 is provided on the side wall of the receiving groove 111. The adsorption panel 12 is snap-fitted on the step 114, so that a cavity is formed between the top surface of the receiving groove 111 and the adsorption panel 12.

[0041] Preferably, as Figure 3 , Figure 4 shown, a central vent hole 112 is provided in the middle of the receiving groove 111 of the platform body 11. The central vent hole 112 is connected to a vacuum joint 113 through an air passage 115 opened in the platform body 11, and the vacuum joint 113 is connected to a vacuum pump.

[0042] As another implementation, a plurality of rib plates are provided in the receiving groove 111 on the top surface of the platform body 11, and the cavity between the receiving groove 111 and the adsorption panel 12 is divided into a plurality of independent cavities. Each independent cavity is respectively connected to a vacuum pump through an air passage, so that each cavity is independently supplied with gas.

[0043] Preferably, as Figure 5 shown, positioning holes 116 are provided at the bottom of the platform body 11. The adsorption platform assembly is matched with positioning bosses 31 provided on the substrate 3 through the positioning holes 116 to realize the connection and positioning of the adsorption platform assembly on the substrate 3.

[0044] Furthermore, the structures of the first X-direction pneumatic clamping assembly 5, the first Y-direction pneumatic clamping assembly 6, the second X-direction pneumatic clamping assembly 7, and the second Y-direction pneumatic clamping assembly 8 are the same; as Figure 6 shown, the first X-direction pneumatic clamping assembly 5 includes a mounting plate 51, a driving arm 52, a driving cylinder 53, a ball bearing 54, and a pre-tightening spring 55; the mounting plate 51 is connected to the substrate 3; the driving arm 52 is slidably connected to the mounting plate 51 and linearly moves relative to the mounting plate 51 under the action of the driving cylinder 53; the driving cylinder 53 is fixed on the mounting plate 51 and is connected to a gas supply device through an air pipe joint 531 to supply gas to the driving cylinder 53; the rolling bearing 54 is fixed at one end of the driving arm 52 close to the adsorption platform assembly and is used to contact and push the resistor substrate; the pre-tightening spring 55 is connected between the mounting plate 51 and the driving arm 52 to provide a pre-tightening force for the driving arm 52 toward the adsorption platform assembly.

[0045] Preferably, a spring connecting rod 551 is provided on one side of the driving arm, and a spring guide rod 552 is provided on the mounting plate 51. The two ends of the pre-tightening spring 55 are respectively connected to the spring connecting rod 551 and the spring guide rod 552.

[0046] The working principle of this embodiment is briefly introduced as follows:

[0047] 1. Preparation stage:

[0048] The driving cylinders of the first X-direction pneumatic clamping assembly 5, the first Y-direction pneumatic clamping assembly 6, the second X-direction pneumatic clamping assembly 7, and the second Y-direction pneumatic clamping assembly 8 extend, pushing the driving arms away from the adsorption platform assembly.

[0049] 2. Clamping and positioning the resistor substrate:

[0050] Manually or through a manipulator, place the resistor substrate on the adsorption panel of the adsorption platform assembly; in this embodiment, two resistor substrates can be clamped simultaneously, and since the pneumatic clamping assemblies provided on the outside of each group of adsorption platform assemblies are independently controlled, the specifications and dimensions of the two resistor substrates can be different;

[0051] The driving cylinders of the first X-direction pneumatic clamping assembly 5 and the first Y-direction pneumatic clamping assembly 6 retract, and the driving arms return towards the adsorption panel under the action of the pre-tightening springs, causing the ball bearings to contact the resistor substrate and retracting the resistor substrate until it contacts the edge positioning bearings arranged in the X-direction and Y-direction, completing the clamping and positioning of the resistor substrate on the first adsorption platform assembly 1.

[0052] The driving cylinders of the second X-direction pneumatic clamping assembly 7 and the second Y-direction pneumatic clamping assembly 8 retract, and the driving arms return towards the adsorption panel under the action of the pre-tightening springs, causing the ball bearings to contact the resistor substrate and retracting the resistor substrate until it contacts the edge positioning bearings arranged in the X-direction and Y-direction, completing the clamping and positioning of the resistor substrate on the second adsorption platform assembly 2.

[0053] This embodiment is a dual-station design and can clamp two resistor substrates simultaneously. In addition, since the pneumatic clamping assemblies provided on the outside of each group of adsorption platform assemblies are independently controlled, the specifications and dimensions of the resistor substrates at the two stations can be different.

[0054] 3. Vacuum adsorption of the resistor substrate:

[0055] Respectively, through the vacuum pumps connecting the first adsorption platform assembly 1 and the second adsorption platform assembly 2, provide a vacuum adsorption force to the cavity. Since there are air holes on the adsorption panel, the resistor substrate is adsorbed on the adsorption panel under the action of the adsorption force;

[0056] When the vacuum value reaches a certain set value, the driving cylinders in each group of pneumatic clamping cylinder assemblies are pushed out again to release the clamping force, completing the fixation of the resistor substrate.

[0057] 4. Releasing the resistor substrate:

[0058] After the resistor substrate is completed with detection, input compressed air into the cavity of the adsorption platform assembly to break the vacuum, so that the resistor substrate is released from the adsorbed state, facilitating the removal of the resistor substrate.

[0059] Embodiment 2

[0060] This embodiment is a detection device including the dual-station integrated clamping device for the resistance substrate described in Embodiment 1.

[0061] Preferably, the detection device is any one of an electrostatic detection device, an overload detection device, and a resistance value detection device.

[0062] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A dual-station integrated clamping device for a resistor substrate, characterized in that, It includes a substrate (3), a first adsorption platform assembly (1), a second adsorption platform assembly (2), a first X-direction pneumatic clamping assembly (5), a first Y-direction pneumatic clamping assembly (6), a second X-direction pneumatic clamping assembly (7), and a second Y-direction pneumatic clamping assembly (8) connected to the substrate (3); the first adsorption platform assembly (1) and the second adsorption platform assembly (2) are fixed side by side on the substrate (3) along the X direction; edge positioning bearings (4) are respectively arranged on the front sides in the Y direction of the first adsorption platform assembly (1) and the second adsorption platform assembly (2) to respectively provide edge positioning in the Y direction for the resistor substrates placed on the first adsorption platform assembly (1) and the second adsorption platform assembly (2), and an edge positioning bearing (4) is arranged between the first adsorption platform assembly (1) and the second adsorption platform assembly (2) and this edge positioning bearing (4) is in contact with both the first adsorption platform assembly (1) and the second adsorption platform assembly (2) at the same time to provide edge positioning in the X direction for the resistor substrates placed on the first adsorption platform assembly (1) and the second adsorption platform assembly (2); the first X-direction pneumatic clamping assembly (5) is arranged on the left side in the X direction of the first adsorption platform assembly (1), and the first Y-direction pneumatic clamping assembly (6) is arranged on the rear side in the Y direction of the first adsorption platform assembly (1), and the resistor substrate is driven by the first X-direction pneumatic clamping assembly (5) and the first Y-direction pneumatic clamping assembly (6) to realize the clamping and positioning of the resistor substrate; the second X-direction pneumatic clamping assembly (7) is arranged on the right side in the X direction of the second adsorption platform assembly (2), and the second Y-direction pneumatic clamping assembly (8) is arranged on the rear side in the Y direction of the second adsorption platform assembly (2), and the resistor substrate is driven by the second X-direction pneumatic clamping assembly (7) and the second Y-direction pneumatic clamping assembly (8) to realize the clamping and positioning of the resistor substrate; each of the above pneumatic clamping assemblies is controlled separately.

2. The dual-station integrated clamping device for a resistor substrate according to claim 1, wherein, Two edge positioning bearings (4) are respectively arranged on the front sides in the Y direction of the first adsorption platform assembly (1) and the second adsorption platform assembly (2), and both of the two edge positioning bearings are in contact with the corresponding adsorption platform assembly, and the edge positioning bearings (4) are fixed on the substrate (3).

3. The dual-station integrated clamping device for a resistor substrate according to claim 1, wherein, The structures of the first adsorption platform assembly (1) and the second adsorption platform assembly (2) are the same; the first adsorption platform assembly (1) includes a platform body (11) and an adsorption panel (12), the adsorption panel (12) is snap-connected to the top of the platform body (11) and a cavity is formed between the two; an air channel (115) is communicated between the platform body (11) and the cavity, and the air channel (115) is connected to a vacuum pump; through holes communicated with the cavity are arranged in an array on the adsorption panel (12).

4. The dual-station integrated clamping device for a resistor substrate according to claim 3, wherein, The platform body (11) is an integral structure, a receiving groove (111) is arranged on the top surface of the platform body (11), a step (114) is arranged on the side wall of the receiving groove (111), and the adsorption panel (12) is snap-connected to the step (114) so that a cavity is formed between the top surface of the receiving groove (111) and the adsorption panel (12).

5. The dual-station integrated clamping device for a resistor substrate according to claim 4, characterized in that, A central vent hole (112) is provided in the middle of the accommodation groove (111) of the platform body (11). The central vent hole (112) is connected to a vacuum joint (113) through an air passage opened in the platform body (11), and the vacuum joint (113) is connected to a vacuum pump.

6. The dual-station integrated clamping device for a resistor substrate according to claim 3, wherein Positioning holes (116) are provided at the bottom of the platform body (11). The adsorption platform assembly is matched with the positioning bosses provided on the substrate (3) through the positioning holes (116) to realize the connection and positioning of the adsorption platform assembly on the substrate (3).

7. The dual-station integrated clamping device for a resistor substrate according to claim 1, wherein, The structures of the first X-direction pneumatic clamping assembly (5), the first Y-direction pneumatic clamping assembly (6), the second X-direction pneumatic clamping assembly (7), and the second Y-direction pneumatic clamping assembly (8) are the same. The first X-direction pneumatic clamping assembly (5) includes a mounting plate (51), a driving arm (52), a driving cylinder (53), a ball bearing (54), and a pre-tightening spring (55). The mounting plate (51) is connected to the substrate (3). The driving arm (52) is slidably connected to the mounting plate (51) and linearly moves relative to the mounting plate (51) under the action of the driving cylinder (53). The driving cylinder (53) is fixed on the mounting plate (51). The rolling bearing 54 is fixed at one end of the driving arm (52) close to the adsorption platform assembly for contacting and pushing the resistor substrate. The pre-tightening spring (55) is connected between the mounting plate (51) and the driving arm (52) to provide a pre-tightening force for the driving arm (52) towards the adsorption platform assembly.

8. The dual-station integrated clamping device for a resistor substrate according to claim 7, characterized in that A spring connecting rod (551) is provided on one side of the driving arm, and a spring guide rod (552) is provided on the mounting plate (51). The two ends of the pre-tightening spring (55) are respectively connected to the spring connecting rod (551) and the spring guide rod (552).

9. A detection device, characterized in that, It includes a double-station integrated clamping device for a resistor substrate as described in claim 1.

10. A detection device according to claim 9, characterized in that, The detection device is any one of an electrostatic detection device, an overload detection device, and a resistance value detection device.

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