Error feature decoupling-based variable-angle and variable-pressing-amount collaborative air bag polishing method

Abstract

The invention discloses a variable angle-variable pressing amount collaborative air bag polishing method based on error feature decoupling. The method comprises the following steps: acquiring surface shape error data of an optical element; constructing a polishing head angle model of the airbag polishing process, and adaptively adjusting the step length of a grating track to generate an optimized grating path; establishing a pressing amount partitioning rule for the surface shape error data, implementing a stepped pressing amount increasing strategy for an error gradient abrupt change region, and starting a pressing amount amplitude limiting mechanism for an error low point region so as to determine the pressing amount constraint of the surface of the optical element; and solving the optimal parameter combination by adopting a preset optimization algorithm, and performing variable angle-variable pressing amount collaborative airbag polishing on the optical element according to the optimal parameter combination of the airbag polishing process. The method aims at achieving synchronous optimization of medium-high frequency error suppression and gradient error rapid correction, and the machining efficiency and machining precision of high-precision polishing of the optical element are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of polishing of high-precision optical elements, and particularly relates to a variable-angle - variable-downpressure collaborative airbag polishing method based on error feature decoupling. Background Art

[0002] With the continuous increase in the application requirements of high-precision optical elements in advanced optical systems, the airbag polishing technology has become an important means of precision polishing due to its flexible contact characteristics. However, the traditional airbag polishing process faces double bottlenecks in the mid-high frequency error suppression and surface shape convergence efficiency in the fine polishing stage of optical elements. Due to the combination of fixed polishing head angle and constant downpressure parameters, the spatial adaptability of the material removal function is severely limited: the fixed angle results in insufficient frequency domain bandwidth of the removal function, unable to dynamically match the mid-high frequency error characteristics of different curvature regions (such as the banded periodic residues caused by the grating path), and the constant downpressure forces the high and low error regions to bear the same pressure, causing insufficient removal in the high error region and requiring multiple iterations, while over-polishing in the low error region exacerbates the surface shape distortion. Especially when there are steep gradient errors in the element, due to the lack of a parameter dynamic regulation mechanism in the traditional process, it has to rely on multiple rounds of "detection - correction" cycles, resulting in the processing efficiency decaying exponentially with the number of iterations. The defects of the existing technology are concentrated in three aspects: First, the fixed angle causes the mismatch between the removal function and the error spatial frequency, and the mid-high frequency errors remain repeatedly; Second, the uniform downpressure distribution ignores the non-uniform characteristics of the error distribution, and the material removal rates in the high and low regions are unbalanced; Third, the strong coupling between the angle and the downpressure is not decoupled, and it is difficult to achieve precise collaborative correction of the error-sensitive regions with the empirical trial-and-error method for parameter setting. These problems seriously restrict the large-scale and efficient preparation of high-precision optical elements. Summary of the Invention

[0003] The technical problem to be solved by the present invention: Aiming at the above problems of the existing technology, a variable-angle - variable-downpressure collaborative airbag polishing method based on error feature decoupling is provided. The present invention aims to synchronously optimize the mid-high frequency error suppression and the rapid correction of gradient errors, and improve the processing efficiency and processing accuracy of high-precision polishing of optical elements.

[0004] To solve the above technical problems, the technical solution adopted by the present invention is as follows: A variable-angle - variable-downpressure collaborative airbag polishing method based on error feature decoupling, comprising the following steps: obtaining the surface shape error data of the optical element ; performing multi-scale decomposition on the surface shape error data to extract the mid-high frequency error features and the low-frequency gradient error features ; based on the mid-high frequency error features and the low-frequency gradient error features to construct the polishing head angle of the airbag polishing process Model, combined with the polishing head angle The model adaptively adjusts the step size of the grating trajectory ; combined with the step size of the grating trajectory and the polishing head angle of the airbag polishing process The model generates an optimized grating path; for the surface shape error data Establish the downward pressure Partition rule, implement a stepped downward pressure increasing strategy for the area with steep error gradient change, and activate the downward pressure limiting mechanism for the low error area, so as to determine the downward pressure constraint on the surface of the optical element; according to the determined polishing head angle Model, optimized grating path and downward pressure constraint on the surface of the optical element, use a preset optimization algorithm to solve the process parameters of the airbag polishing process to obtain the optimal parameter combination of the airbag polishing process, and perform variable angle-variable downward pressure coordinated airbag polishing on the optical element according to the optimal parameter combination of the airbag polishing process

[0005] Optionally, the multi-scale decomposition of the surface shape error data Refers to decomposing the surface shape error data According to the set error threshold, perform multi-scale decomposition of the surface shape error, take the surface shape error greater than or equal to the set error threshold as the low-frequency error, and the surface shape error less than the set error threshold as the medium-high frequency error

[0006] Optionally, the extraction of medium-high frequency error features And low-frequency gradient error features Include: obtaining medium-high frequency error features by using a filter for the medium-high frequency error ; obtaining low-frequency error features by using a filter for the low-frequency error , calculating the gradient of the low-frequency error feature To obtain the low-frequency gradient error feature .

[0007] Optionally, the function expression of the polishing head angle Model is: , Among them, Is the angle of the polishing head at Location, Reference angle, Is the high-frequency error feature, Is the low-frequency gradient error feature, , Are frequency response coefficients

[0008] Optionally, the model that adaptively adjusts the step size of the grating trajectory by combining the polishing head angle ​ The function expression is: , where, is the initial step size, is the step size compensation factor, is the allowable angle change range, and are the maximum and minimum polishing head angles on the grating path, respectively.

[0009] Optionally, the function expression for calculating the maximum and minimum polishing head angles on the grating path is: , where, and represent the maximum and minimum polishing head angles of the k-th grating band, respectively, and represent the maximum and minimum polishing head angles of the (k - 1)-th grating band, respectively, is the real-time polishing head angle at the polishing point based on the error spectrum, and N is the number of polishing points in the k-th grating band. Optionally, when establishing the zoning rule for the downward pressure with respect to the surface shape error data , the function expression of the established zoning rule for the downward pressure is: , where, is the reference downward pressure, is the gradient sensitivity coefficient, is the gradient of the surface shape error data , is the error amplitude attenuation factor, is the maximum surface shape error.

[0010] Optionally, when implementing the stepped downward pressure increment strategy for the region with steep error gradient change, the region with steep error gradient change refers to the region where the norm of the gradient of the surface shape error data on the surface of the optical element is greater than the preset threshold, and the function expression of the stepped downward pressure increment strategy is: , where, and are the downward pressure adjustment values of the n-th and (n - 1)-th polishing points, respectively, is the gradient change response rate, is the amount of change in the error gradient between adjacent points; when the pressure limit mechanism is activated for the error low point area, the error low point area refers to the surface shape error data on the surface of the optical element Less than the preset threshold The area where the pressure is limited is the area where the polishing point is in the error low point area. The pressure limit mechanism is activated to limit the pressure of the polishing point in the error low point area to the preset safe pressure amplitude. Within.

[0011] Optionally, the polishing head angle determined according to The model is used to optimize the grating path and the pressure constraint on the optical element surface. The preset optimization algorithm is used to solve the process parameters of the airbag polishing process to obtain the optimal parameter combination of the airbag polishing process, including: establishing a material removal rate database containing historical processing data, and obtaining the removal depth through nonlinear regression fitting. Angle with polishing head , downward pressure The removal rate response surface model: , in, , , is the fitting coefficient calibrated by the least squares method; the constraints shown in the following formula are established: , in, To remove the depth, is the surface error data, is the preset number of iterations; solve the removal depth based on the above constraints Angle with polishing head , downward pressure The removal rate response surface model is used to find the polishing head angle that minimizes the total processing time. , downward pressure The parameter combination is taken as the optimal parameter combination of the airbag polishing process.

[0012] Optionally, after performing variable angle-variable downward pressure coordinated airbag polishing on the optical element according to the optimal parameter combination of the airbag polishing process, it also includes detecting the surface accuracy of the optical element to determine whether the surface accuracy of the optical element meets the standard. If it meets the standard, the polishing is terminated and exited, otherwise, the next round of processing is re-entered.

[0013] Compared with the prior art, the present invention can mainly achieve the following beneficial effects: The variable-angle and variable-downpressure collaborative airbag polishing method based on error feature decoupling of the present invention includes obtaining the surface shape error data of an optical element; constructing a polishing head angle model for the airbag polishing process, adaptively adjusting the step size of the grating trajectory to generate an optimized grating path; establishing a zoning rule for the downpressure amount for the surface shape error data, implementing a stepped downpressure amount increasing strategy for the regions with steep error gradients, and initiating a downpressure amount limiting mechanism for the low-error regions, thereby determining the downpressure amount constraint on the surface of the optical element; using a preset optimization algorithm to solve the optimal parameter combination, and performing variable-angle and variable-downpressure collaborative airbag polishing on the optical element according to the optimal parameter combination of the airbag polishing process, which can realize the synchronous optimization of medium-high frequency error suppression and rapid correction of gradient errors, decouple the angle and the downpressure amount to achieve precise collaborative correction of error-sensitive regions, and thus improve the processing efficiency and processing accuracy of high-precision polishing of optical elements. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 FIG. is a schematic diagram of the basic process of the method according to an embodiment of the present invention.

[0015] Figure 2 FIG. is a schematic diagram of variable angles in an embodiment of the present invention, where the angle in (a) is 0° and the angle in (b) is 30°.

[0016] Figure 3 FIG. is a schematic diagram of variable downpressure amounts in an embodiment of the present invention, where the angle in (a) is Δz1 and the angle in (b) is Δz2.

[0017] Figure 4 FIG. is a comparison diagram of measurement results in an embodiment of the present invention, where (a) is the surface shape after conventional processing, and (b) is the surface shape processed by this method. (c) is the residual surface shape obtained by subtracting the standard pattern surface shape from the surface shape after conventional processing, and (d) is the residual surface shape processed by the method of the present invention.

[0018] Figure 5 FIG. is a comparison diagram of medium-high frequency filtering in an embodiment of the present invention, where (a) is the medium-high frequency residual surface shape of the conventional method, (b) is the medium-high frequency surface shape of the method of the present invention, (c) is the residual gradient error after conventional processing, and (d) is the residual gradient error processed by the method of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The core of the variable-angle and variable-downpressure collaborative airbag polishing method based on error feature decoupling of the present invention lies in establishing the spatial motion parameters of the polishing head (angle , downpressure amount The mapping relationship with the spatial frequency components of the surface shape error realizes the synchronous optimization of medium and high frequency error suppression and rapid correction of gradient error through dynamic parameter combination. To enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions of the present invention will be further described in detail below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0020] As Figure 1 shown, the variable angle-variable down pressure collaborative airbag polishing method based on error feature decoupling in this embodiment includes the following steps: obtaining the surface shape error data of the optical element ; performing multi-scale decomposition of the surface shape error data to extract medium and high frequency error features and low frequency gradient error features ; constructing a polishing head angle model for the airbag polishing process based on the medium and high frequency error features and the low frequency gradient error features, and adaptively adjusting the step size of the grating trajectory in combination with the polishing head angle (tilt angle) model ; generating an optimized grating path in combination with the step size of the grating trajectory and the polishing head angle model of the airbag polishing process; establishing a zoning rule for the down pressure on the surface shape error data , implementing a stepped down pressure increasing strategy for the regions with steep error gradients, and starting a down pressure limiting mechanism for the regions with low error points, so as to determine the down pressure constraint on the surface of the optical element; according to the determined polishing head angle model, the optimized grating path and the down pressure constraint on the surface of the optical element, using a preset optimization algorithm to solve the process parameters of the airbag polishing process to obtain the optimal parameter combination of the airbag polishing process, and performing variable angle-variable down pressure collaborative airbag polishing on the optical element according to the optimal parameter combination of the airbag polishing process. In this embodiment, the multi-scale decomposition of the surface shape error data

[0021] refers to performing multi-scale decomposition of the surface shape error data according to the set error threshold, taking the surface shape error greater than or equal to the set error threshold as the low frequency error, and taking the surface shape error less than the set error threshold as the medium and high frequency error. For example, as an optional implementation method, the error threshold value in this embodiment is 10 mm, taking the surface shape error greater than or equal to 10 mm as the low frequency error, and taking the surface shape error less than 10 mm as the medium and high frequency error. In this embodiment, the extraction of medium and high frequency error features

[0022] and low frequency gradient error features ​ Including: obtaining medium and high frequency error features by using a filter for medium and high frequency errors ; obtaining low frequency error features by using a filter for low frequency errors , calculating the low frequency error features to obtain low frequency gradient error features by calculating the gradient . By setting different cut-off frequencies for the filter, it is possible to filter out low frequency error features to obtain medium and high frequency error features , and filter out medium and high frequency error features to obtain low frequency error features .

[0023] In this embodiment, the function expression of the polishing head angle model is: , wherein, is the angle of the polishing head at , is the reference angle, is the high frequency error feature, is the low frequency gradient error feature, , are the frequency response coefficients.

[0024] In this embodiment, the function expression for adaptively adjusting the step size of the grating track by combining the polishing head angle model is: , wherein, is the initial step size, is the step size compensation factor, is the allowable angle change range, and are the maximum and minimum polishing head angles on the grating path respectively.

[0025] In this embodiment, the function expression for calculating the maximum and minimum polishing head angles on the grating path is: , wherein, and respectively represent the maximum and minimum polishing head angles of the k-th grating band, and respectively represent the maximum and minimum polishing head angles of the (k - 1)-th grating band, is the real-time polishing head angle at the polishing point based on the error spectrum, and N is the number of polishing points in the k-th grating band. In this embodiment, for the surface shape error data establish the pressing amount When establishing the partition rule for the amount of downward pressure The functional expression of the partition rule is: , Wherein, is the reference downward pressure, is the gradient sensitivity coefficient, is the surface shape error data of the gradient, is the error amplitude attenuation factor, is the maximum surface shape error.

[0026] In this embodiment, when implementing the stepped downward pressure increasing strategy for the region with steep change in error gradient, the region with steep change in error gradient refers to the region where the norm of the gradient of the surface shape error data on the surface of the optical element is greater than the preset threshold. The functional expression of the stepped downward pressure increasing strategy is: , Wherein, and are respectively the downward pressure adjustment values of the nth and (n - 1)th polishing points, is the gradient change response rate, is the change amount of the error gradient between adjacent points; when starting the downward pressure limiting mechanism for the low error region, the low error region refers to the region where the surface shape error data on the surface of the optical element is less than the preset threshold . Starting the downward pressure limiting mechanism means forcibly limiting the downward pressure of the polishing points in the low error region within the preset safe downward pressure amplitude

[0027] to avoid over-polishing, and at the same time reallocating the saved process time to the high error region. Figure 1 As shown, in this embodiment, according to the determined polishing head angle model, optimized grating path and downward pressure constraint on the surface of the optical element, a preset optimization algorithm is used to solve the process parameters of the airbag polishing process to obtain the optimal parameter combination of the airbag polishing process, including: establishing a material removal rate database containing historical processing data, and obtaining the removal depth through non-linear regression fitting and the removal rate response surface model of the polishing head angle , Wherein, , , is the fitting coefficient calibrated by the least squares method; the following constraint conditions are established: , wherein, is the removal depth, is the surface shape error data, is the preset number of iterations; based on the above constraint conditions, solve for the removal depth and the polishing head angle , the downward pressure to find the polishing head angle and the downward pressure of the removal rate response surface model that minimizes the total processing time as the optimal parameter combination of the airbag polishing process.

[0028] wherein, the calculation function expression of the total processing time is: , wherein, is the total processing time, is the accumulation of the discrete point positions of the dwell time distribution calculated in each iteration process, which is determined by the basic formula of optical manufacturing (the convolution of the removal function and the dwell time is equal to the material removal amount): , wherein, is the material removal amount distribution, is the removal function, is the dwell time distribution, and the time of each polishing point in the dwell time distribution is which is .

[0029] As Figure 1 shown, in this embodiment, after performing variable-angle - variable downward pressure collaborative airbag polishing on the optical element according to the optimal parameter combination of the airbag polishing process, it further includes detecting the surface accuracy of the optical element, determining whether the surface accuracy of the optical element meets the standard. If it meets the standard, the polishing is ended and exited, otherwise, it re-enters the next round of processing.

[0030] Figure 2 is the schematic diagram of the variable angle in this embodiment, wherein the angle in (a) is 0°, and 90° refers to the processing angle between the symmetry axis of the removal function and the path, (b) is 30°, and 60° refers to the processing angle between the symmetry axis of the removal function and the path. In conventional processing, the symmetry axis of the removal function forms a 90° angle with the path, which is equivalent to the symmetry axis rotating 0°. By adjusting the polishing head angle , when the symmetry axis forms a 60° angle with the path, it is equivalent to the symmetry axis rotating 30° to the right. Figure 3Schematic diagram of variable downward pressure in this embodiment, where the angle in (a) is Δz1 and that in (b) is Δz2. Combining with the adjustment of the polishing head angle and the adjustment of the downward pressure Δz, synchronous optimization of medium-high frequency error suppression and rapid correction of gradient error can be achieved, improving the processing efficiency and processing accuracy of high-precision polishing of optical elements.

[0031] To verify the variable-angle - variable-downward pressure collaborative airbag polishing method based on error feature decoupling in this embodiment, an experiment was conducted on an etched pattern of fused quartz with a diameter of 100 mm. The experiment was carried out using two options, namely the traditional constant angle plus a constant downward pressure of 0.3 mm and variable angle and variable downward pressure according to the surface shape. After the experiment, a wavefront interferometer combined with a moving platform was used to measure the CPP, and the measurement results are as Figure 4 shown. Among them, (a) is the surface shape after conventional processing, and (b) is the surface shape after processing by this method. (c) is the residual surface shape obtained by subtracting the standard pattern surface shape from the surface shape after conventional processing, and (d) is the residual surface shape after processing by the method of the present invention. From Figure 4 it can be seen that the residual surface shape of 4.997 nm using the method of the present invention has decreased by 30% compared with the residual surface shape of 7.133 nm of the traditional method, and at the same time, the processing time has also been significantly shortened. Medium-high frequency filtering was performed, with a threshold of 10 mm, Figure 5 which is a comparison diagram of medium-high frequency filtering in this embodiment. (a) is the medium-high frequency residual surface shape of the conventional method, and (b) is the medium-high frequency surface shape of the method of the present invention. From Figure 5 the (a) and (b) in it, it can be seen that by using the method of the present invention compared with the conventional method, the rms of the medium-high frequency residual surface shape has decreased from 1.175 nm to 0.492 nm, a decrease of 58%. (c) is the residual gradient error after conventional processing, and (d) is the residual gradient error after processing by the method of the present invention. From Figure 5 the (c) and (d) in it, it can be seen that by using the method of the present invention compared with the conventional method, the residual gradient error after processing has decreased from 1.1 to 0.4, a decrease of 63%. It can be seen that the variable-angle - variable-downward pressure collaborative airbag polishing method based on error feature decoupling in this embodiment can achieve synchronous optimization of medium-high frequency error suppression and rapid correction of gradient error, realize decoupling of the angle and the downward pressure to achieve precise collaborative correction of error-sensitive regions, and thus can improve the processing efficiency and processing accuracy of high-precision polishing of optical elements.

[0032] The above are only the preferred embodiments of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions falling within the idea of the present invention belong to the protection scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and retouches should also be regarded as within the protection scope of the present invention.

Claims

1. A variable-angle and variable-downward pressure collaborative airbag polishing method based on error feature decoupling, characterized in that The steps include: obtaining surface error data of the optical element ; For the surface error data Perform multi-scale decomposition of surface error and extract mid- and high-frequency error features and low frequency gradient error characteristics ; Based on the mid- and high-frequency error characteristics and low frequency gradient error characteristics Polishing head angle for constructing airbag polishing process Model, combined with polishing head angle Model adaptively adjusts the step size of the grating trajectory ; Combined with the step size of the grating track Polishing head angle for airbag polishing process Model generation optimizes grating path; surface error data Establishing the amount of pressure According to the partitioning rules, a step-by-step pressure increase strategy is implemented for the area with steep error gradient, and a pressure limit mechanism is activated for the area with low error points, thereby determining the pressure constraint on the surface of the optical element; according to the determined polishing head angle The model is constructed, the grating path and the downward pressure constraints on the optical element surface are optimized, and a preset optimization algorithm is used to solve the process parameters of the airbag polishing process to obtain the optimal parameter combination of the airbag polishing process. According to the optimal parameter combination of the airbag polishing process, variable angle-variable downward pressure coordinated airbag polishing is performed on the optical element.

2. The variable-angle variable-downward pressure collaborative airbag polishing method based on error feature decoupling according to claim 1, wherein The said surface shape error data Performing multi-scale decomposition of the surface shape error means performing multi-scale decomposition on the surface shape error data Performing multi-scale decomposition of the surface shape error according to the set error threshold, taking the surface shape error greater than or equal to the set error threshold as the low-frequency error, and taking the surface shape error less than the set error threshold as the medium-high frequency error.

3. The variable-angle variable-downward pressure collaborative airbag polishing method based on error feature decoupling according to claim 2, characterized in that The extraction of medium and high frequency error features and low frequency gradient error features include: obtaining medium and high frequency error features by using a filter for medium and high frequency errors ; obtaining low frequency error features by using a filter for low frequency errors , calculating the gradient of the low frequency error features to obtain low frequency gradient error features .

4. The variable-angle and variable-downward pressure collaborative airbag polishing method based on error feature decoupling according to claim 1, characterized in that The angle of the polishing head The functional expression of the model is as follows: ， Wherein, is the angle of the polishing head at , is the reference angle, is the high-frequency error feature, is the low-frequency gradient error feature, and are the frequency response coefficients.

5. The variable-angle and variable-downward-pressure collaborative airbag polishing method based on error feature decoupling according to claim 1, wherein The combined polishing head angle The model adaptively adjusts the step size of the grating trajectory The function expression is as follows: ， Among them, is the initial step size, is the step size compensation factor, is the allowable angle change range, and are the maximum and minimum polishing head angles on the grating path, respectively.

6. The variable-angle variable-downward pressure collaborative airbag polishing method based on error feature decoupling according to claim 5, characterized in that The calculation function expressions for the maximum and minimum polishing head angles on the grating path are as follows: ， Among them, and respectively represent the maximum and minimum polishing head angles of the k-th grating band, and respectively represent the maximum and minimum polishing head angles of the (k - 1)-th grating band, is the real-time polishing head angle at the polishing point based on the error spectrum, and N is the number of polishing points within the k-th grating band.

7. The variable-angle and variable-downward-pressure collaborative airbag polishing method based on error feature decoupling according to claim 1, wherein The opposite surface form error data Establish the press-down amount When establishing the zoning rule of the press-down amount The functional expression of the zoning rule of the press-down amount is as follows: ， Among them, is the reference downward displacement amount, is the gradient sensitivity coefficient, is the surface shape error data gradient, is the error amplitude attenuation factor, is the maximum surface shape error.

8. The variable angle-variable down pressure collaborative airbag polishing method based on error feature decoupling according to claim 1, characterized in that, When implementing the stepped downward pressure increment strategy for the steep change region of the error gradient, the steep change region of the error gradient refers to the surface shape error data on the surface of the optical element of the norm of the gradient of the region where the value is greater than a preset threshold. The functional expression of the stepped downward pressure increment strategy is: ， Wherein, and are the adjustment values of the downward pressure for the nth and (n - 1)th polishing points respectively, is the gradient change response rate, is the change amount of the error gradient between adjacent points; when starting the downward pressure limiting mechanism for the low error point area, the low error point area refers to the area where the surface shape error data is less than the preset threshold starting the downward pressure limiting mechanism means forcibly limiting the downward pressure of the polishing points in the low error point area within the preset safe downward pressure amplitude inside.

9. The variable-angle and variable-downward pressure collaborative airbag polishing method based on error feature decoupling according to claim 1, characterized in that According to the determined polishing head angle Model, optimize the raster path and the downward pressure constraint on the optical element surface, and use a preset optimization algorithm to solve the process parameters of the airbag polishing process to obtain the optimal parameter combination of the airbag polishing process, including: establishing a material removal rate database containing historical processing data, and obtaining the removal depth through non-linear regression fitting and the polishing head angle , downward pressure of the removal rate response surface model: ， Among them, , , are fitting coefficients calibrated by the least squares method; establish the constraint conditions shown in the following formula: , Among them, is the removal depth, is the surface form error data, is the preset number of iterations; Solve the removal depth and the angle of the polishing head , the down pressure The removal rate response surface model of finds the polishing head angle that minimizes the total processing time , the down pressure The parameter combination of is used as the optimal parameter combination of the airbag polishing process.

10. The variable-angle and variable-downward pressure collaborative airbag polishing method based on error feature decoupling according to claim 1, characterized in that After performing variable-angle and variable-downward pressure collaborative airbag polishing on the optical element according to the optimal parameter combination of the airbag polishing process, it further includes detecting the surface accuracy of the optical element, determining whether the surface accuracy of the optical element meets the standard. If it meets the standard, the polishing is ended and exited; otherwise, it re-enters the next round of processing.

Images