Thin film evaporation device of thin film capacitor

Abstract

The invention discloses a thin film evaporation device of a thin film capacitor, which relates to the technical field of thin film capacitor processing and comprises an evaporation box, a substrate is fixed at the bottom end in the evaporation box, and caulking grooves are symmetrically distributed on two sides of the central axis of the substrate. In the using process, under the rotary driving of a winding motor at the top of the cooling box to a metal foil winding roller, a film material is unwound outside a metal foil unwinding roller at the top of the cleaning box, passes through a first traction wheel on the outer side of the cleaning box and then is introduced into the cleaning box, and the film material machining face is attached to three cleaning rollers arranged in the mounting plate side by side; the three cleaning rollers are driven to rotate under the action of friction force, the lower surfaces of the cleaning rollers are tightly attached to the water absorption sponge, and the cleaning liquid in the cleaning liquid cavity is immersed in the porous structure of the water absorption sponge, so that the cleaning rollers clean oil stains and impurities on the film material processing surface in the rotating process; and oil stains and impurities on the surface of the film material are prevented from evaporating in vacuum to influence the purity and binding force of the film layer.

Description

Technical Field

[0001] The present invention relates to the technical field of thin film capacitor processing, and specifically to a thin film evaporation coating device for thin film capacitors. Background Technique

[0002] A thin film capacitor is an electronic component that has characteristics such as high capacitance density, small size, and high-frequency response, and is widely used in fields such as televisions, mobile phones, computers, and automobiles. It consists of an insulating thin film separated between two electrodes (usually metals). Metallized thin films are used as the core group materials in thin film capacitors, including ordinary metallized films and metallized safety films. Evaporation coating is a method of heating materials in a vacuum environment to vaporize them and deposit them on a substrate to obtain thin film materials, also known as vacuum evaporation coating or vacuum plating.

[0003] When processing existing thin film capacitors, it is necessary to perform evaporation coating on the internal thin film to form a metallized thin film, so as to ensure that the characteristics of the thin film meet the production requirements of thin film capacitors. When the traditional evaporation coating device performs evaporation coating on the thin film, on the one hand, the film material is unevenly heated in the evaporation source. One of the reasons is that the current or power distribution in the heating area of the evaporation source is uneven, which will cause local temperatures to be too high or too low, and during the evaporation coating process, it is necessary to frequently add evaporation coating materials, delaying the production progress. On the other hand, during the evaporation coating process, it is necessary to go through the complete processes of substrate cleaning, substrate preheating, chamber vacuum pumping, and film material evaporation coating. However, the existing evaporation coating chamber has a low degree of process integration. The substrate needs to be pretreated and then sent to the evaporation coating chamber for thin film evaporation coating. There is a risk of secondary contamination during the transfer of the substrate, affecting the film layer purity and film-substrate bonding strength. Summary of the Invention

[0004] The purpose of the present invention is to provide a thin film evaporation coating device for thin film capacitors to solve the problems raised in the above background technique.

[0005] To achieve the above object, the present invention provides the following technical solution: A thin film evaporation device for a thin film capacitor, including an evaporation chamber. At the bottom end inside the evaporation chamber, a substrate is fixed, and on both sides of the central axis of the substrate, embedding grooves are symmetrically distributed. A sequential opening component is nested inside the substrate. The sequential opening component includes evaporation sources, which are symmetrically embedded on both sides of the substrate. The evaporation sources are hollow cavity structures made of heat-conducting metal materials, and a film material cavity is opened inside the evaporation sources. And the film material cavity is filled with film materials to be heated and vaporized. At one end close to the central axis of the substrate at the top opening of the film material cavity, a box cover is rotatably installed through a hinge. And a driven pin is integrally fixed at the rear end of the box cover. And when the box cover is in a vertical state, it is tightly fitted with the top opening of the film material cavity. Between the opposite evaporation sources, a rotating shaft is rotatably installed. And at the middle of the rotating shaft, three driving blocks are coaxially fixed. The three driving blocks are located between the opposite three groups of evaporation sources, and the three driving blocks are all in a fan-shaped structure. The rotating motor is fixed outside the evaporation chamber, and the rotating shaft is fixed to the output end of the rotating motor through a coupling. At the end of the substrate, a heating module is fixed, and the heating module is externally connected with a control circuit. The control circuit is electrically connected with a heating coil through a sliding rheostat, and the heating coil surrounds the outside of the evaporation source and conducts heat to vaporize the film material in the film material cavity.

[0006] Further, a box door is rotatably installed through a hinge at the front opening of the evaporation chamber, and brackets are symmetrically fixed on both sides of the evaporation chamber.

[0007] Further, a vacuum pump is fixed on the top of the evaporation chamber, and adjustable metal masks are arranged on both sides inside the evaporation chamber. Guide wheels are correspondingly arranged above both sides of the metal masks, and a drying plate is arranged above the right metal mask.

[0008] Further, a cleaning component is arranged on the right side of the evaporation chamber. The cleaning component includes a cleaning box, a metal foil unwinding roller, a first strip groove, and a first traction wheel. The cleaning box is fixedly installed on one side of the evaporation chamber. A metal foil unwinding roller is rotatably installed through a bushing at the top of the cleaning box, and first strip grooves are symmetrically opened on both sides of the cleaning box. A first traction wheel is rotatably installed on the outer wall of the right side of the cleaning box, and the first traction wheel is located outside the right first strip groove.

[0009] Further, the cleaning component further includes a mounting plate and a cleaning roller. A mounting plate is fixed in the middle inside the cleaning box, and three cleaning rollers are rotatably installed in parallel in the middle of the mounting plate.

[0010] Further, the cleaning component further includes a water-absorbing sponge and a cleaning liquid cavity. The water-absorbing sponge is located below the mounting plate, and the lower surface of the cleaning roller is in close contact with the water-absorbing sponge. A cleaning liquid cavity is opened in the cavity of the cleaning box below the water-absorbing sponge, and the cleaning liquid in the cleaning liquid cavity submerges the inside of the porous structure of the water-absorbing sponge.

[0011] Further, a cooling component is fixedly installed on the left side of the evaporation chamber. The cooling component includes a cooling box, a metal foil winding roller, and a winding motor. The cooling box is fixedly installed on the other side of the evaporation chamber. The metal foil winding roller is rotatably installed on the top of the cooling box through a bushing, and the metal foil winding roller is rotationally connected to the winding motor through an air shaft.

[0012] Further, the cooling component further includes a second strip groove and a second traction wheel. The second strip grooves are symmetrically formed on both sides of the cooling box. The second strip grooves are flush with the first strip grooves and communicate with the inner cavity of the evaporation chamber. The second traction wheel is rotatably installed on the outer wall of the left side of the cooling box. The second traction wheel is located outside the left second strip groove. The second traction wheel, the first traction wheel, and the two guide wheels are all on the same horizontal line.

[0013] Further, the cooling component further includes a perforated plate, a wind cavity, a blower, and a transmission belt. The perforated plate is fixedly installed in the middle of the interior of the cooling box. The wind cavity is formed in the cavity of the cooling box below the perforated plate. The blower is fixedly installed at the bottom of the cooling box. The wind output by the blower is dispersed by the porous structure of the perforated plate after entering the wind cavity. The impeller inside the blower is coaxial with the transmission belt, and the transmission belt is sleeved on the end of the output shaft of the winding motor.

[0014] The present invention provides a thin film evaporation device for thin film capacitors, having the following beneficial effects: 1. During the use of the present invention, the opening sequence of the evaporation sources in this application is designed as a U-shaped path from the upper left to the upper right and then turning to the lower right and directly reaching the lower left. During the process of turning from the upper right to the lower right, the rotation motor controls the rotation shaft to change from counterclockwise rotation to clockwise rotation to realize the sequential opening of the evaporation sources on the other side. It is worth noting that when the lid of this application is in a vertical state, the driven pin is tightly fitted with the top opening of the film material cavity, so that the lid of the evaporation source with the consumed film material remains open. This not only facilitates adding materials while mastering the consumption degree of the film material, but also avoids the movement interference of the driven pin during the process of the rotation shaft turning from counterclockwise to clockwise rotation. Through the design of the sequential opening component in this application, multiple groups of film materials are available for continuous consumption at the same time, without the need to frequently add film materials, so that the continuous working time of the evaporation chamber in this application is greatly extended. And the structural design that the heating coil conducts heat to the film material in it through the evaporation source made of heat-conducting metal material makes the film material evenly heated, and a better evaporation effect can be obtained.

[0015] 2. During the use of the present invention, under the rotational drive of the winding motor at the top of the cooling box on the metal foil winding roller, the film material is unwound from the metal foil unwinding roller at the top of the cleaning box, passes through the cleaning box through the first traction wheel on the outside of the cleaning box, and the processing surface of the film material is attached to three cleaning rollers arranged in parallel within the mounting plate. Driven by the frictional force, the three cleaning rollers rotate. The lower surface of the cleaning roller in this application is closely attached to the water-absorbing sponge, and the cleaning liquid in the cleaning liquid chamber is immersed in the porous structure of the water-absorbing sponge, so that the cleaning roller can clean the oil stains and impurities on the processing surface of the film material during rotation, preventing the oil stains and impurities on the surface of the film material from evaporating in a vacuum, thereby affecting the purity and bonding strength of the film layer.

[0016] 3. During the use of the present invention, the heating module not only controls the sequential heating of different evaporation sources through the heating coil, but also powers on the drying plate through the control circuit to make it heat up, heating the processing surface of the film material to remove the moisture remaining in the previous cleaning process to enhance the film-substrate bonding strength. During the evaporation plating process, the adjustable metal masks on both inner walls of the evaporation plating box can block the areas of the substrate that do not need to be evaporated plated and direct the deposition onto the areas that need to be coated. After the coating is completed, the substrate passes through the second strip groove into the cooling box. On the one hand, the winding motor in this application drives the metal foil winding roller to rotate for winding operations, and on the other hand, the winding motor drives the impeller in the blower to rotate through the transmission belt, so that the wind output by the blower is dispersed by the porous structure of the hole plate after passing through the air cavity, cooling the processing surface of the film material. After cooling, the film material is wound on the metal foil winding roller through the second traction wheel to complete the complete process flow. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the external structure of the device of the present invention; Figure 2 is a schematic diagram of the internal structure of the device of the present invention; Figure 3 is a schematic diagram of the cleaning component structure of the present invention; Figure 4 is a schematic diagram of the cooling component structure of the present invention; Figure 5 is a schematic diagram of the substrate structure of the present invention; Figure 6 is a schematic diagram of the sequential opening component structure of the present invention.

[0018] In the figure: 1. Evaporation chamber; 2. Chamber door; 3. Bracket; 4. Vacuum pump; 5. Metal mask; 6. Guide wheel; 7. Drying plate; 8. Cleaning assembly; 801. Cleaning tank; 802. Metal foil unwinding roller; 803. First slot; 804. First traction wheel; 805. Mounting plate; 806. Cleaning roller; 807. Water-absorbing sponge; 808. Cleaning liquid chamber; 9. Cooling assembly; 901. Cooling tank; 902. Metal foil winding roller; 903. Winding motor; 904. Second slot; 905. Second traction wheel; 906. Orifice plate; 907. Air cavity; 908. Blower; 909. Transmission belt; 10. Substrate; 11. Heating module; 12. Control circuit; 13. Heating coil; 14. Sequential opening assembly; 1401. Evaporation source; 1402. Membrane material chamber; 1403. Chamber cover; 1404. Driven pin; 1405. Rotating shaft; 1406. Driving block; 1407. Rotating motor. Detailed implementation manner

[0019] The following further describes in detail the implementation manner of the present invention in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0020] Please refer to Figures 1 to 6, the present invention provides a technical solution: a thin film evaporation device for a thin film capacitor, including an evaporation chamber 1. At the bottom end inside the evaporation chamber 1, a substrate 10 is fixed, and grooves are symmetrically distributed on both sides of the central axis of the substrate 10. A sequential opening component 14 is nested inside the substrate 10. The sequential opening component 14 includes an evaporation source 1401, a film material chamber 1402, a box cover 1403, a driven pin 1404, a rotating shaft 1405, a driving block 1406, and a rotating motor 1407. The evaporation source 1401 is a hollow cavity structure made of a heat-conducting metal material, and a film material chamber 1402 is provided inside the evaporation source 1401. The film material to be heated and vaporized is filled inside the film material chamber 1402. One end of the top opening of the film material chamber 1402 close to the central axis of the substrate 10 is rotatably installed with a box cover 1403 through a hinge, and a driven pin 1404 is integrally fixed at the rear end of the box cover 1403. When the box cover 1403 is in a vertical state, the driven pin 1404 is tightly fitted with the top opening of the film material chamber 1402. A rotating shaft 1405 is rotatably installed between the opposite evaporation sources 1401, and three driving blocks 1406 are coaxially fixed in the middle of the rotating shaft 1405. The three driving blocks 1406 are located between the opposite three groups of evaporation sources 1401, and the angles of the three driving blocks 1406 deviating from the central axis of the substrate 10 gradually decrease from front to back. The rotating shaft 1405 is fixed to the output end of the rotating motor 1407 through a coupling, and the rotating motor 1407 is fixed outside the evaporation chamber 1. A heating module 11 is fixed at the end of the substrate 10, and a control circuit 12 is externally connected to the heating module 11. The control circuit 12 is electrically connected to a heating coil 13 through a sliding rheostat, and the heating coil 13 surrounds the outside of the evaporation source 1401 and conducts heat to vaporize the film material in the film material chamber 1402; The specific operation is as follows. Use a vacuum pump 4 to evacuate the evaporation chamber to an appropriate vacuum degree. The heating module 11 supplies electricity with a relatively low power to the heating coil 13 at the head of the substrate 10 through the control circuit 12, so that the film material in the corresponding evaporation source 1401 is preheated or pre-melted. At this time, to prevent evaporation onto the substrate, the lid 1403 is in a closed state. After the preheating is completed, supply electricity with a larger power to heat the film material to the evaporation temperature, and activate the rotating motor 1407 to drive the rotating shaft 1405 to rotate counterclockwise. The driving block 1406 at the head of the rotating shaft 1405 contacts and presses the driven pin 1404 on the top lid 1403 of the corresponding evaporation source 1401. After the lid 1403 is opened, the film material vaporizes and adheres to the film material processing surface to complete evaporation coating. As the film material in the evaporation source 1401 at the upper left corner of the substrate 10 is exhausted, at this time, the heating module 11 supplies electricity to the next heating coil 13 through the control circuit 12, so that the film material in the next evaporation source 1401 is preheated to prepare for replacement. At this time, the rotating motor 1407 controls the rotating shaft 1405 to continue rotating counterclockwise, and the driving block 1406 in the middle of the rotating shaft 1405 contacts and presses the driven pin 1404 on the top lid 1403 of the next evaporation source 1401 to realize the opening operation of the next evaporation source 1401.

[0021] In this application, the opening sequence of the evaporation source 1401 is designed as a U-shaped path from the upper left to the upper right and then turning to the lower right and directly reaching the lower left. During the process of turning from the upper right to the lower right, the rotating motor 1407 controls the rotating shaft 1405 to change from counterclockwise rotation to clockwise rotation to realize the sequential opening of the evaporation source 1401 on the other side. It should be noted that in this application, when the lid 1403 is in a vertical state, the driven pin 1404 is tightly fitted with the top opening of the film material cavity 1402, so that the lid 1403 of the evaporation source 1401 with exhausted film material remains in an open state. This not only facilitates adding materials and mastering the consumption degree of the film material, but also avoids the movement interference of the driven pin 1404 during the process of the rotating shaft 1405 rotating from counterclockwise to clockwise. Through the design of the sequential opening component 14 in this application, there are multiple groups of film materials for continuous consumption at the same time, and there is no need to frequently add film materials. After all the film materials are exhausted, open the box door 2 to realize manual replenishment, so that the continuous working duration of the evaporation coating box 1 in this application is greatly extended. Moreover, the structural design in which the heating coil 13 conducts heat to the film material in the evaporation source 1401 made of a heat-conducting metal material makes the film material evenly heated, and a better evaporation coating effect can be obtained; Please refer to Figure 3, the front opening of the evaporation chamber 1 is rotatably provided with a chamber door 2 through a hinge, and brackets 3 are symmetrically fixed on both sides of the evaporation chamber 1. A vacuum pump 4 is fixed on the top of the evaporation chamber 1, and adjustable metal masks 5 are arranged on both sides inside the evaporation chamber 1. Guide wheels 6 are correspondingly arranged above the metal masks 5 on both sides, and a drying plate 7 is arranged above the metal mask 5 on the right side. A cleaning assembly 8 is arranged on the right side of the evaporation chamber 1. The cleaning assembly 8 includes a cleaning box 801, a metal foil unwinding roller 802, a first strip groove 803, and a first traction wheel 804. The metal foil unwinding roller 802 is rotatably arranged on the top of the cleaning box 801 through a bushing. First strip grooves 803 are symmetrically formed on both sides of the cleaning box 801, and a first traction wheel 804 is arranged in parallel outside the first strip groove 803 on the right side. The cleaning assembly 8 further includes a mounting plate 805 and a cleaning roller 806. The mounting plate 805 is fixed in the middle inside the cleaning box 801, and three cleaning rollers 806 are rotatably arranged in parallel in the middle of the mounting plate 805. The cleaning assembly 8 further includes a water-absorbing sponge 807 and a cleaning liquid chamber 808. The lower surface of the cleaning roller 806 is closely attached to the water-absorbing sponge 807, and the water-absorbing sponge 807 is located below the mounting plate 805. A cleaning liquid chamber 808 is formed below the water-absorbing sponge 807, and the cleaning liquid in the cleaning liquid chamber 808 submerges the inside of the porous structure of the water-absorbing sponge 807; The specific operation is as follows. Driven by the rotation of the metal foil winding roller 902 by the winding motor 903 on the top of the cooling box 901, the film material is unwound from the metal foil unwinding roller 802 on the top of the cleaning box 801, passes through the first traction wheel 804 outside the cleaning box 801, and then enters the inside of the cleaning box 801. The processing surface of the film material is attached to the three cleaning rollers 806 arranged in parallel inside the mounting plate 805, and drives the three cleaning rollers 806 to rotate under the action of friction. In the present application, the lower surface of the cleaning roller 806 is closely attached to the water-absorbing sponge 807, and the cleaning liquid in the cleaning liquid chamber 808 submerges the inside of the porous structure of the water-absorbing sponge 807, so that the cleaning roller 806 cleans the oil stains and impurities on the processing surface of the film material during rotation, preventing the oil stains and impurities on the surface of the film material from evaporating in a vacuum, thereby affecting the purity and bonding force of the film layer; Please refer to Figure 4, a cooling component 9 is fixed on the left side of the evaporation plating box 1. The cooling component 9 includes a cooling box 901, a metal foil winding roller 902, and a winding motor 903. The metal foil winding roller 902 is rotatably arranged on the top of the cooling box 901 through a bushing, and the metal foil winding roller 902 is rotationally and drivingly connected to the winding motor 903 through an air shaft. The cooling component 9 further includes a second strip groove 904 and a second traction wheel 905. Second strip grooves 904 are symmetrically arranged on both sides of the cooling box 901, and the second strip groove 904 is flush with the first strip groove 803 and communicates with the inner cavity of the evaporation plating box 1. A second traction wheel 905 is arranged in parallel on the outer side of the left second strip groove 904, and the second traction wheel 905, the first traction wheel 804, and the two guide wheels 6 are all on the same horizontal line. The cooling component 9 further includes a perforated plate 906, a wind cavity 907, a blower 908, and a transmission belt 909. A perforated plate 906 is fixed in the middle of the interior of the cooling box 901, and a wind cavity 907 is arranged below the perforated plate 906. A blower 908 is fixed at the bottom of the cooling box 901, and the wind output by the blower 908 is dispersed by the porous structure of the perforated plate 906 after passing into the wind cavity 907. The impeller inside the blower 908 is coaxial with a transmission belt 909, and the transmission belt 909 is sleeved on the output end of the winding motor 903; The specific operation is as follows. The heating module 11 not only controls the sequential heating of different evaporation sources 1401 through the heating coil 13, but also energizes the drying plate 7 through the control circuit 12 to make it heat up, heating the film material processing surface to remove the moisture remaining in the previous cleaning process to enhance the film-substrate bonding force. During the evaporation plating process, the adjustable metal masks 5 on both inner walls of the evaporation plating box 1 can block the areas of the substrate that do not need to be evaporated plated and direct the deposition on the areas that need to be coated. After the coating is completed, the substrate passes into the interior of the cooling box 901 through the second strip groove 904. On the one hand, the winding motor 903 of the present application drives the metal foil winding roller 902 to rotate for winding operation. On the other hand, the winding motor 903 rotationally drives the impeller in the blower 908 through the transmission belt 909, so that the wind output by the blower 908 is dispersed by the porous structure of the perforated plate 906 after passing into the wind cavity 907 to cool the film material processing surface. The cooled film material is wound on the metal foil winding roller 902 after passing through the second traction wheel 905 to complete the complete process flow.

[0022] In summary, for the thin film evaporation device of the thin film capacitor, during use, first, under the rotational drive of the winding motor 903 on the top of the cooling box 901 for the metal foil winding roller 902, the film material is unwound from the metal foil unwinding roller 802 at the top of the cleaning box 801, passes through the first traction wheel 804 outside the cleaning box 801, and then enters the inside of the cleaning box 801. The processing surface of the film material is attached to the three cleaning rollers 806 arranged in parallel within the mounting plate 805, and drives the three cleaning rollers 806 to rotate under the action of friction. The lower surface of the cleaning roller 806 in this application is closely attached to the water-absorbing sponge 807, and the cleaning liquid in the cleaning liquid cavity 808 is immersed in the internal porous structure of the water-absorbing sponge 807, so that the cleaning roller 806 cleans the oil stains and impurities on the processing surface of the film material during rotation, preventing the oil stains and impurities on the surface of the film material from evaporating in a vacuum, thereby affecting the purity and bonding force of the film layer.

[0023] Secondly, use a vacuum pump 4 to evacuate the evaporation chamber to an appropriate vacuum degree. The heating module 11 supplies electricity with a lower power to the heating coil 13 located at the upper left corner of the substrate 10 through the control circuit 12, so that the film material in the corresponding evaporation source 1401 is preheated or pre-melted. At this time, to prevent evaporation onto the substrate, the chamber lid 1403 is in a closed state. After the preheating is completed, supply electricity with a larger power to heat the film material to the evaporation temperature, and activate the rotation motor 1407 to drive the rotating shaft 1405 to rotate counterclockwise. The driving block 1406 at the head end of the rotating shaft 1405 contacts and presses the driven pin 1404 on the top chamber lid 1403 of the corresponding evaporation source 1401. After the chamber lid 1403 is opened, the film material vaporizes and adheres to the film material processing surface to complete evaporation coating. As the film material in the evaporation source 1401 at the upper left corner of the substrate 10 is exhausted, at this time, the heating module 11 supplies electricity to the next heating coil 13 through the control circuit 12, so that the film material in the next evaporation source 1401 is preheated to prepare for taking over. At this time, the rotation motor 1407 controls the rotating shaft 1405 to continue rotating counterclockwise. The driving block 1406 in the middle of the rotating shaft 1405 contacts and presses the driven pin 1404 on the top chamber lid 1403 of the next evaporation source 1401 to realize the opening operation of the next evaporation source 1401. In this application, the opening sequence of the evaporation source 1401 is designed as a U-shaped path from the upper left to the upper right and then turning to the lower right and directly reaching the lower left. During the process of turning from the upper right to the lower right, the rotation motor 1407 controls the rotating shaft 1405 to change from counterclockwise rotation to clockwise rotation to realize the sequential opening of the evaporation source 1401 on the other side. It should be noted that in this application, when the chamber lid 1403 is in a vertical state, the driven pin 1404 is tightly fitted with the top opening of the film material cavity 1402, so that the chamber lid 1403 of the evaporation source 1401 with exhausted film material remains in an open state. This not only facilitates adding materials and mastering the consumption degree of the film material, but also avoids the movement interference of the driven pin 1404 during the process of the rotating shaft 1405 rotating from counterclockwise to clockwise. Through the design of the sequential opening component 14 in this application, there are multiple groups of film materials for continuous consumption at the same time, eliminating the need for frequent addition of film materials, greatly extending the continuous working duration of the evaporation coating box 1 in this application, and the structural design of the heating coil 13 realizing heat conduction to the film material in the evaporation source 1401 made of a heat-conducting metal material makes the film material evenly heated, and a better evaporation coating effect can be obtained.

[0024] Finally, the heating module 11 not only controls the sequential heating of different evaporation sources 1401 through the heating coil 13, but also energizes the drying plate 7 through the control circuit 12 to make it heat up, heating the film material processing surface to remove the moisture remaining in the previous cleaning process, so as to enhance the film-substrate bonding force. During the evaporation process, the adjustable metal masks 5 on both inner walls of the evaporation chamber 1 can block the areas of the substrate that do not need to be evaporated and direct the deposition onto the areas that need to be coated. After the coating is completed, the substrate passes through the second slot 904 into the cooling chamber 901. On the one hand, the winding motor 903 of the present application drives the rotation of the metal foil winding roller 902 for winding operation. On the other hand, the winding motor 903 drives the rotation of the impeller in the blower 908 through the transmission belt 909, so that the wind output by the blower 908 is dispersed by the porous structure of the orifice plate 906 after entering the air cavity 907, cooling the film material processing surface. After cooling, the film material passes through the second traction wheel 905 and is wound on the metal foil winding roller 902 to complete the complete process flow.

[0025] It should be noted that in this text, the terms "including", "comprising" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device.

[0026] Specific examples are used in this article to elaborate on the principles and implementation manners of the present invention. The description of the above examples is only used to help understand the method and its core idea of the present invention. The above are only the preferred implementation manners of the present invention. It should be pointed out that due to the limited nature of written expression and the objectively infinite specific structures, for those of ordinary skill in the art in this technical field, without departing from the principle of the present invention, several improvements, refinements or changes can be made, or the above technical features can be combined in an appropriate manner; these improvements, refinements, changes or combinations, or directly applying the concept and technical solution of the invention to other occasions without improvement, shall all be regarded as the protection scope of the present invention.

Claims

1. A thin film evaporation coating device for a thin film capacitor, comprising an evaporation coating box (1), characterized in that, A substrate (10) is fixed to the inner bottom end of the evaporation chamber (1), and embedding grooves are symmetrically distributed on both sides of the central axis of the substrate (10). A sequential opening component (14) is nested inside the substrate (10). The sequential opening component (14) includes an evaporation source (1401). The evaporation sources (1401) are symmetrically embedded on both sides of the substrate (10). The evaporation source (1401) is a hollow cavity structure made of heat-conducting metal material, and a film material cavity (1402) is formed inside the evaporation source (1401). The film material to be heated and vaporized is filled inside the film material cavity (1402). A box cover (1403) is rotatably installed at the opening at the top of the film material cavity (1402) near one end of the central axis of the substrate (10) through a hinge. A driven pin (1404) is integrally fixed to the rear end of the box cover (1403). When the box cover (1403) is in a vertical state, it is tightly fitted with the opening at the top of the film material cavity (1402). A rotating shaft (1405) is rotatably installed between the opposite evaporation sources (1401). Three driving blocks (1406) are coaxially fixed in the middle of the rotating shaft (1405). The three driving blocks (1406) are located between the opposite three groups of evaporation sources (1401), and the three driving blocks (1406) are all in a fan-shaped structure. A rotating motor (1407) is fixed outside the evaporation chamber (1), and the rotating shaft (1405) is fixed to the output end of the rotating motor (1407) through a coupling. A heating module (11) is fixed to the end of the substrate (10), and a control circuit (12) is externally connected to the heating module (11). The control circuit (12) is electrically connected to a heating coil (13) through a sliding rheostat. The heating coil (13) surrounds the outside of the evaporation source (1401) and conducts heat to vaporize the film material in the film material cavity (1402).

2. The thin film evaporation coating device for a thin film capacitor according to claim 1, characterized in that, A box door (2) is rotatably connected to the front opening of the evaporation chamber (1) through a hinge, and brackets (3) are symmetrically fixed on both sides of the evaporation chamber (1).

3. The thin film evaporation device for a thin film capacitor according to claim 2, characterized in that, A vacuum pump (4) is fixed to the top of the evaporation chamber (1), and adjustable metal masks (5) are arranged on both sides inside the evaporation chamber (1). Guide wheels (6) are correspondingly arranged above both sides of the metal masks (5), and a drying plate (7) is arranged above the right metal mask (5).

4. The thin film evaporation coating device for a thin film capacitor according to claim 3, characterized in that, A cleaning component (8) is arranged on the right side of the evaporation chamber (1). The cleaning component (8) includes a cleaning box (801), a metal foil unwinding roller (802), a first strip groove (803), and a first traction wheel (804). The cleaning box (801) is fixedly installed on one side of the evaporation chamber (1). The metal foil unwinding roller (802) is rotatably installed on the top of the cleaning box (801) through a bushing. First strip grooves (803) are symmetrically formed on both sides of the cleaning box (801). A first traction wheel (801) is rotatably installed on the outer wall of the right side of the cleaning box (801), and the first traction wheel (801) is located outside the right first strip groove (803).

5. The thin film evaporation coating device for a thin film capacitor according to claim 4, characterized in that, The cleaning assembly (8) further includes a mounting plate (805) and cleaning rollers (806). A mounting plate (805) is fixed in the middle inside the cleaning box (801), and three cleaning rollers (806) are rotatably mounted in parallel in the middle of the mounting plate (805).

6. The thin film evaporation coating device for a thin film capacitor according to claim 5, characterized in that, The cleaning assembly (8) further includes a water-absorbing sponge (807) and a cleaning liquid chamber (808). The water-absorbing sponge (807) is located below the mounting plate (805), and the lower surface of the cleaning roller (806) is in close contact with the water-absorbing sponge (807). A cleaning liquid chamber (808) is formed in the cavity of the cleaning box (801) below the water-absorbing sponge (807), and the cleaning liquid in the cleaning liquid chamber (808) submerges the inside of the porous structure of the water-absorbing sponge (807).

7. The thin film evaporation coating device for a thin film capacitor according to claim 6, characterized in that, A cooling assembly (9) is fixed on the left side of the evaporation plating box (1). The cooling assembly (9) includes a cooling box (901), a metal foil winding roller (902) and a winding motor (903). The cooling box (901) is fixedly installed on the other side of the evaporation plating box (1). A metal foil winding roller (902) is rotatably mounted on the top of the cooling box (901) through a bushing, and the metal foil winding roller (902) is rotationally driven and connected to the winding motor (903) through an air shaft.

8. The thin film evaporation coating device for a thin film capacitor according to claim 7, characterized in that, The cooling assembly (9) further includes a slot two (904) and a traction wheel two (905). Slots two (904) are symmetrically formed on both sides of the cooling box (901), and the slot two (904) is flush with the slot one (803) and communicates with the inner cavity of the evaporation plating box (1). A traction wheel two (905) is rotatably mounted on the outer wall of the left side of the cooling box (901), and the traction wheel two (905) is located outside the left slot two (904), and the traction wheel two (905), the traction wheel one (804) and the two guide wheels (6) are all on the same horizontal line.

9. The thin film evaporation device for a thin film capacitor according to claim 8, characterized in that, The cooling assembly (9) further includes a hole plate (906), a wind chamber (907), a blower (908) and a transmission belt (909). A hole plate (906) is fixed in the middle inside the cooling box (901), and a wind chamber (907) is formed in the cavity of the cooling box (901) below the hole plate (906). A blower (908) is fixed at the bottom of the cooling box (901), and the wind output by the blower (908) is dispersed by the porous structure of the hole plate (906) after passing into the wind chamber (907). An impeller inside the blower (908) is coaxial with a transmission belt (909), and the transmission belt (909) is sleeved on the end of the output shaft of the winding motor (903).

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