Power generation glass laser scribing equipment and power generation glass light-transmitting line scribing method

Abstract

The invention belongs to the technical field of power generation glass production, and particularly relates to power generation glass laser scribing equipment and a power generation glass light-transmitting line scribing method. The first laser system is composed of a green-light picosecond laser, a beam expander, a plurality of total reflection mirrors, a DOE shaper, a high-speed galvanometer and a focusing lens. The first laser system is used for conducting light-transmitting line scribing on a film layer. The second laser system is composed of an ultraviolet nanosecond laser, a beam expander, a total reflection mirror and a condensing lens, and the second laser system is used for scribing an insulation line of a film layer; the method comprises the following steps: 1) detecting warping of a glass substrate, and dynamically adjusting the position of a laser spot; and 2) performing deformation monitoring on the optical element, and compensating the light spot position by adjusting a galvanometer. The scribing precision of the light-transmitting line of the power generation glass is improved, and the forming effect of the light-transmitting line groove is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of power generation glass production, and particularly relates to a laser scribing device for power generation glass and a scribing method for light transmission lines of power generation glass. Background Art

[0002] Currently, laser scribing technology is generally used for thin-film solar power generation glass. The thin-film layer of the whole power generation glass is divided into sub-cells with equal widths, and at the same time, the sub-cells are connected in series by combining a coating process. The scribed lines for dividing the sub-cells are called sub-cell scribed lines.

[0003] When power generation glass is used as building glass, certain light transmittance is often required. Then, light transmission line scribing also needs to be carried out on the power generation glass. In the light transmission line scribing process, green femtosecond laser with high material absorption efficiency is currently used for light transmission line scribing. The opaque material absorbs the laser energy and then instantly sublimates at high temperature, leaving only the TCO transparent conductive layer. The direction of laser scribing is perpendicular to the direction of sub-cell scribed lines. When laser scribing, the laser spots emitted at high frequency are controlled to ablate the power generation material, so as to form light transmission grooves on the surface of the power generation glass.

[0004] The existing light transmission line scribing process for power generation glass has the following defects: 1) Due to the uncontrollability of the heat affected zone (HAZ) of the power generation material layer of the power generation glass, when traditional green femtosecond laser scribes insulating lines, HAZ > 20μm, the material sublimates instantly, and it is very difficult to accurately control the laser irradiation time. If the spot irradiation time is slightly longer, cracks are very likely to appear on both sides of the light transmission groove, causing micro-cracks in the back electrode layer and electrical performance attenuation; if the spot irradiation time is short, the film cannot be completely removed, and short circuits are likely to occur between adjacent sub-cells, seriously affecting the function of the power generation glass.

[0005] 2) In the existing technology, the spots of the scribing laser are mostly circular spots. If the scribing speed is increased, the overlapping rate of the front and rear circular spots is insufficient when the spot moving speed is relatively fast, and there are burrs on the groove; if the groove forming effect is to be improved, it needs to be repeatedly scanned 2 - 3 times to complete scribing, which will greatly affect the production rhythm.

[0006] 3) Borosilicate glass is a commonly used base material for making power generation glass. When attaching a film to its surface, the glass plate is driven to move by rollers. Inevitably, the rollers will contact the unfried film layer material, causing damage to the film layer. The damage to the film layer causes the sub-cells in this area to fail. In the existing technology, the roller mark damage is often ignored during light transmission line scribing, resulting in large-area material waste. Another approach is to cut off the roller mark damage, making the size of the power generation glass smaller, which increases the difficulty during construction.

[0007] 4) When the float glass deposits the absorption layer, the production temperature is between 400 - 500 °C. Immediately after depositing the absorption layer, the film layer needs to be cooled. During the heating and cooling process of the glass, about 2 mm of deformation occurs, resulting in warping. The existing production equipment is a static processing platform, and the distance between the instant scribing laser and the processing fixed platform is fixed. The warping of the glass causes the focus to not accurately fall on the film layer, resulting in unclean scribing of the light-transmitting lines, large deviation in light transmittance, and a decrease in the yield rate. Summary of the Invention

[0008] The technical problem to be solved by the present invention is the problem of poor forming effect of the light-transmitting line grooves produced by the scribing process of the light-transmitting lines of the existing power generation glass.

[0009] To solve the above problems, the technical solution adopted by the present invention is as follows: A power generation glass laser scribing device for scribing light-transmitting lines on a power generation glass substrate. The glass substrate is composed of a glass base layer and a film layer. The film layer includes a TCO light-transmitting conductive layer, an absorption layer, a Buffer layer, and a back electrode layer from the surface of the glass base layer upward; the scribing device includes: A base, including a front wall and a rear wall. An interval is provided between the front wall and the rear wall to form a feeding port at the left end and a discharging port at the right end. A Y-axis linear motor is installed on the tops of the front wall and the rear wall, and a clamp for clamping the edge of the glass substrate is installed on the moving block surface of the Y-axis linear motor; A substrate positioning unit, installed in the base, which includes: A feeding module for supporting the middle part of the glass substrate and adjusting the position of the glass substrate; A scribing fixing module for fixing the glass substrate during the scribing of the light-transmitting lines; A discharging module for guiding the scribed glass substrate out of the scribing fixing module; A scribing unit, passing through the base and arranged on the lower side of the glass substrate for scribing the light-transmitting film layer of the glass substrate; A dust removal unit, arranged on the upper side of the glass substrate, arranged opposite to the scribing unit and moving synchronously; The scribing unit includes a first laser system and a second laser system, The first laser system is composed of a green picosecond laser, a beam expander, several total reflection mirrors, a DOE shaper, a high-speed galvanometer, and a focusing lens. The first laser system is used for scribing the light-transmitting lines on the film layer; The second laser system is composed of an ultraviolet nanosecond laser, a beam expander, a total reflection mirror, and a focusing lens. The second laser system is used for scribing the insulating lines on the film layer.

[0010] The present invention with the above structure, compared with the prior art, has the following beneficial effects: The present invention etches the grooves of the power generation glass using two types of lasers, thereby reducing the power and irradiation time of the green picosecond laser, reducing the uncontrollable damage to the back electrode caused by the heat affected zone, solving the problem of more cracks in the back electrode during the etching of the light transmission line using only green laser, and improving the groove forming effect. By using the ultraviolet laser to perform secondary scribing at the bottom of the light transmission groove, on the one hand, it further removes the residual of the opaque layer, and on the other hand, it cuts off the TCO transparent conductive layer to avoid short circuits between sub-cells.

[0011] Preferably, a further technical solution of the above structure is: For the green picosecond laser, the peak power ≥ 80W, the pulse width < 15ps; the beam expander has an adjustable lens with a magnification of 2 - 8 times; the DOE shaper generates a uniform square spot with a size of 0.3mm² × 0.3mm²; the deflection speed of the high-speed galvanometer ≥ 30m / s, and the focal length of the focusing lens is 254mm; for the ultraviolet nanosecond laser, the average power ≥ 10W, the pulse width is 10ns - 100ns, and the pulse energy is 0.1mJ - 1mJ; the focal length of the focusing lens is 100mm, the focal spot diameter is 15μm, and the spot is a Gaussian spot.

[0012] The beneficial effects obtained from the above features: In this example, by reasonably setting the working parameters of the laser, the cracks at the edges of the light transmission grooves are reduced. By using a square spot for the light transmission line scribing, the serrations at the edges of the grooves are avoided, and the forming effect of the light transmission line is improved.

[0013] The scribing unit further includes: an assembly platform for assembling the optical elements of the first laser system and the second laser system; an X-axis linear motor disposed in the culverts at the bottoms of the front wall and the rear wall. A Z-axis linear motor is installed on the moving block of the X-axis linear motor, and the moving block of the Z-axis linear motor is fixedly connected to the side wall of the assembly platform; a laser rangefinder installed on the assembly platform for detecting the distance to the glass substrate film layer, and the laser rangefinder is associated with the displacement stroke control of the Z-axis moving block.

[0014] The beneficial effects obtained from the above features: In this solution, the scribing unit is added with a Z-axis motion structure, and together with the laser rangefinder, the focus position is further compensated, greatly improving the accuracy of the spot position and the etching cleanliness of the light transmission groove.

[0015] A temperature sensor for detecting the ambient temperature of the assembly platform is also provided on the assembly platform, and the temperature sensor is associated with the control of the high-speed galvanometer.

[0016] The beneficial effects obtained from the above features: In this example, the temperature sensor compensates for the laser deviation caused by the fluctuation of the working environment temperature of the laser optical path system, ensuring the straightness of the light transmission line.

[0017] The gripper consists of a fixed seat, a sliding seat, a fixed-push cylinder and a chuck. The fixed seat is fixedly connected to the moving block of the Y-axis linear motor. The sliding seat is slidably connected to the fixed seat. The fixed-push cylinder is arranged at the rear side of the sliding seat and its piston head is connected to the rear end of the sliding seat. The chuck is installed at the front end of the sliding seat. The chuck includes a support plate, and the front side wall of the support plate is installed with upper and lower fingers that can move relative to each other.

[0018] The beneficial effects obtained from the above features: The gripper provided in this example fixes the edge of the glass substrate and drives the glass substrate to move stably throughout the production equipment. The gripper is telescopic and the fingers are movable, which is suitable for the production of power generation glass with different thicknesses.

[0019] The feeding module includes: conveyor belts, which are arranged at intervals in the feeding module and extend from the left end to the right end of the feeding module. The surface belt of the conveyor belt contacts the glass substrate and drives the glass substrate to move through friction; supporting bars, which are staggered between the conveyor belts, and the top surface thereof is provided with universal ball seats and suction cups, and the suction cups are connected to a negative pressure device; a lifting device, which is arranged under the conveyor belt and drives the conveyor belt to perform lifting movement up and down at the elevation of the supporting bars; a hard limit block, which is arranged at the rear end of the feeding module and includes a positioning seat fixed to the base frame of the feeding module, and a guide wheel is installed on the top surface of the positioning seat; an elastic limit block, which is arranged on the opposite side of the hard limit block and includes a connecting seat fixed to the base frame of the feeding module, an L-shaped slider is slidably installed on the connecting seat, a push-pull cylinder is connected to the back side of the horizontal part of the L-shaped slider, and a pushing wheel is installed on the top surface of the vertical part of the L-shaped slider; a CCD alignment device, which includes an industrial camera and is arranged on one side of the hard limit block in the feeding module for detecting the dynamic position of the glass substrate, and is associated with the telescopic stroke control of the push-pull cylinder of the elastic limit block; an AOI camera, which is arranged at the right end of the feeding module for detecting the position and range of roller marks on the glass substrate, and the AOI camera is associated with the control of the scribing unit.

[0020] The beneficial effects obtained from the above features: This example automatically corrects the position of the glass, identifies the film layer defect situation through the AOI camera, provides conditions for optimizing the design of the light transmission line and the insulation line. This solution aims to isolate the roller area from the power generation battery area, avoid the influence of the film layer defect position on the performance of the power generation glass, maintain the integrity of the whole power generation glass, and facilitate the installation and construction of the power generation glass.

[0021] To solve the above problems, the present invention also provides a method for scribing the light transmission line of power generation glass, using the above-mentioned power generation glass laser scribing equipment. The specific working process is as follows: In the first step, according to the size of the glass substrate to be produced, scribing data is designed. The scribing data at least includes the starting position, ending position, line width and transmittance of the light transmission line; the starting position, ending position and line width of the insulation line; Step 2: After the glass substrate is fed, its position and orientation are corrected. Then, the glass substrate is grasped by the gripper and driven to move linearly along the Y-axis to the scribing and fixing module. Step 3: The gripper moves and positions according to the scribing data, and the scribing and fixing module fixes the entire glass substrate. Step 4: The scribing unit moves along the X-axis to scribe the glass substrate; the dust removal unit moves along the X-axis synchronously with the scribing unit to suck up the debris generated during the scribing of the glass substrate. Step 5: The gripper drives the glass substrate to move to the discharging module.

[0022] Among them, in Step 4, for the grooves designed with both light transmission lines and insulation lines at the same time, the specific operation process is as follows: S1: Start the laser rangefinder. Drive the assembly platform to move the entire X-axis through the X-axis linear motor. The laser rangefinder evenly takes points on the glass substrate to measure the distance from the laser rangefinder to the film layer of the glass substrate, and obtain d1 to d n ; Utilize d1 to d n to obtain the bending curve of the glass substrate; S2: According to the suction range of the suction hood of the dust removal unit, divide the glass substrate into multiple BOX areas along the X-axis, and synchronously move the dust removal unit and the scribing unit to locate to the first BOX area; S3: Collect all d values in this BOX area, obtain the moving stroke of the Z-axis moving block through calculation, and adjust the laser focus to the position where the height difference between the highest point elevation and the lowest point elevation in this BOX area is centered. The moving stroke formula of the Z-axis moving block is: , where is the measuring point position, is at the distance value at the position, and h is the local height deviation; S4: Start the first laser system, and scribe the light transmission lines in the first BOX area according to the scribing data determined in the first step, so as to form the first groove on the upper surface of the glass substrate; S5: Start the second laser system, and scribe along the first groove according to the scribing data determined in the first step to form the second groove at the bottom of the first groove. The second groove cuts off the TCO transparent conductive layer, and the second groove is the insulation line.

[0023] During the scribing of the glass substrate by the first laser system: P1: The detection temperature sensor detects the ambient temperature of the assembly platform; P2: Predict the offset of the green picosecond laser according to the measured ambient temperature value; P3: Correct the deflection angle of the high-speed galvanometer according to the obtained offset so that the light spot falls on the accurate position. The correction formula for the deflection angle of the high-speed galvanometer is , where is the coefficient of thermal expansion, / °C, is the temperature change, is the overall optical path length of the scribing laser beam.

[0024] The present invention adopting the above method, compared with the prior art, has the beneficial effects as follows: This method uses two lasers to scribe the light-transmitting lines of the power generation glass, reducing the cracks of the back electrode; uses purple laser to perform secondary scribing at the bottom of the light-transmitting line groove. On the one hand, it further removes the residue of the light-blocking layer, and on the other hand, it cuts off the TCO light-transmitting conductive layer, which can not only isolate the damaged area of the film layer, but also avoid the short-circuit situation between the sub-cells, reducing the influence of the damage of the glass substrate film layer on the functionality of the power generation glass, isolating the damaged area, and retaining the effective area of the power generation film layer to the greatest extent while keeping the size of the original glass; adding a Z-axis movement adjustment amount to the scribing unit, detecting the warping situation of the glass through laser ranging, and adjusting the spot position according to the warping situation to avoid the problem of large local groove etching errors and improve the accuracy of light transmittance control; compensating for the etching deviation caused by environmental temperature fluctuations through temperature detection to improve the etching accuracy.

[0025] Before designing the scribing data in the first step, A1: Monitor the overall position of the glass substrate through a CCD alignment device, correct the position and direction of the glass substrate according to the CCD alignment device, and make the glass substrate parallel to the Y-axis; A2: Detect the position and range of the roller marks on the glass substrate through an AOI camera; A3: Design insulating lines on both sides of the roller marks to isolate the roller mark area from the battery area circuit, and then determine the positions of other insulating lines based on the position rules of this insulating line.

[0026] The beneficial effects obtained from the above features: reducing the influence of the damage of the glass substrate film layer on the functionality of the power generation glass, isolating the damaged area, and retaining the effective area of the power generation film layer to the greatest extent while keeping the size of the original glass. Brief Description of the Drawings

[0027] Figure 1 is the structural diagram of the equipment for scribing the light-transmitting lines in the production of the power generation glass of the present invention; Figure 2 is the displacement driving structure of the assembly platform of the present invention; Figure 3 is the structural diagram of the scribing unit of the present invention; Figure 4 is the schematic diagram of the optical path structure of the first laser system of the present invention; Figure 5 is the schematic diagram of the optical path structure of the second laser system of the present invention; Figure 6It is a schematic diagram of the shapes of the first and second grooves of the present invention; Figure 7 It is a schematic diagram of the BOX partition of the present invention; Figure 8 It is a schematic diagram of the high-speed galvanometer controlling the refraction of green laser and performing multi-transparent line scribing in the BOX partition; Figure 9 It is a schematic diagram of the glass substrate warpage detection by the laser rangefinder of the present invention; Figure 10 It is a schematic diagram of the scribing laser dynamically adjusting its position according to the detection structure of the laser rangefinder of the present invention; Figure 11 It is a structural diagram of the jaw embodiment of the present invention; Figure 12 It is the structure of the feeding module of the present invention Figure 1 ; Figure 13 It is the structure of the feeding module of the present invention Figure 2 ; Figure 14 It is a schematic diagram of the structure of the opposite hard limit block and elastic limit block in the feeding module; Figure 15 It is a structural diagram of the scribing fixing module of the present invention; Figure 16 It is a structural diagram of the discharging module of the present invention; Figure 17 It is a schematic diagram of the AOI camera of the present invention performing roller mark image processing; Figure 18 It is a schematic diagram of the insulation wire planning according to the roller mark of the present invention.

[0028] In the figure: 1, base; 101, front wall; 102, rear wall; 2, Y-axis linear motor; 3, jaw; 301, fixed push cylinder; 302, fixed seat; 303, sliding seat; 304, support plate; 305, chuck; 4, X-axis linear motor; 5, dust suction hood; 6, feeding module; 601, CCD alignment device; 602, supporting bar; 603, conveyor belt; 604, hard limit block; 605, elastic limit block; 606, AOI camera; 6041, positioning seat; 6042, guide wheel; 6051, connecting seat; 6052, push-pull cylinder; 6053, L-shaped slider; 6054, driving wheel; 7, scribing fixing module; 701, supporting plate; 702, scribing interval; 703, universal ball seat; 704, suction cup; 8. Discharging module; 9. Z-axis linear motor; 901. Z-axis moving block; 10. Assembly platform; 11. Focusing lens; 12. Condensing lens; 13. Laser rangefinder; 14. Green light picosecond laser; 15. Total reflection mirror; 16. Beam expander; 17. DOE shaper; 18. High-speed galvanometer; 19. UV nanosecond laser; 20. Glass base layer; 21. Film layer; 22. Transparent light line; 23. Insulating wire; 24. BOX area; 25. Roller printing. DETAILED DESCRIPTION

[0029] The present invention will be further described below in conjunction with embodiments, the purpose of which is only to provide a better understanding of the content of the present invention. Therefore, the examples given do not limit the protection scope of the present invention.

[0030] The present invention provides a power generation glass laser scribing device for scribing a transparent line 22 of a power generation glass substrate. The glass substrate is composed of a glass base layer 20 and a film layer 21. The film layer 21 includes a TCO transparent conductive layer, an absorption layer, a buffer layer and a back electric layer from the surface of the glass base layer 20 upward.

[0031] See also Figures 1 to 6 , the scoring equipment includes: The base 1 includes a front wall 101 and a rear wall 102. A gap is set between the front wall 101 and the rear wall 102 to form a material inlet at the left end and a material outlet at the right end. A Y-axis linear motor 2 is installed on the top of the front wall 101 and the rear wall 102. A clamping claw 3 for clamping the edge of the glass substrate is installed on the surface of the moving block of the Y-axis linear motor 2. The substrate positioning unit is installed in the base 1, and the substrate positioning unit includes: A feeding module 6 is used to support the middle of the glass substrate and adjust the position of the glass substrate; A scribing and fixing module 7 is used to fix the glass substrate during the scribing of the transmission line 22 on the glass substrate; The discharging module 8 guides the scribed glass substrate out of the scribed fixing module 7; A scribing unit, which passes through the base 1 and is disposed on the lower side of the glass substrate, and performs light-transmitting scribing on the film layer 21 of the glass substrate; The dust removal unit is arranged on the upper side of the glass substrate, and is arranged opposite to the scribing unit and moves synchronously.

[0032] The scribing unit comprises a first laser system and a second laser system. The first laser system is used to scribble the transmissive line 22, and the first laser system is used to scribble the insulating line on the basis of the transmissive line groove.

[0033] See also Figure 3 , Figure 4, The first laser system consists of a green picosecond laser 14, a beam expander 16, several total reflection mirrors 15, a DOE shaper 17, a high-speed galvanometer 18, and a focusing lens 11. The first laser system is used to engrave the light transmission line 22 on the film layer 21.

[0034] Preferably, the output wavelength of the green picosecond laser 14 is 532 nm. In this solution, its peak power is set to ≥80 W and the pulse width is <15 ps. The green picosecond laser 14 outputs laser light, and the light beam enters the total reflection mirror ① at an incident angle of 45°. The total reflection mirror ① turns the laser beam by 90 degrees and outputs it to the beam expander 16. The beam expander 16 expands the beam diameter by 2 - 8 times. Then, according to the structural requirements, the total reflection mirror ②, the total reflection mirror ③, and the total reflection mirror ④ are used to redirect the beam in the horizontal and vertical directions. The laser beam is delivered to the engraving head. A DOE shaper 17 is arranged inside the engraving head to adjust the laser spot into a square shape, with a specific size of 0.3×0.3 mm². A high-speed galvanometer 18 is arranged below the DOE shaper 17. The high-speed galvanometer 18 is a high lens. By adjusting its deflection angle, the refraction angle of the laser is adjusted. After each movement and positioning, multiple parallel light transmission lines 22 can be engraved respectively. When the first laser system moves once along the X-axis, the engraving of multiple light transmission lines 22 is completed. The deflection speed of the high-speed galvanometer 18 is ≥30 m / s. Below the high-speed galvanometer 18 is the focusing lens 11, and the focal length of the focusing lens 11 is 254 mm.

[0035] The laser irradiates from the glass side to remove the film layer 21. The laser can easily pass through the glass. After passing through the glass, the laser pulse energy is absorbed at the interface between the glass substrate 20 and the first layer of the film layer, causing the first layer to vaporize. Then, the generated plasma flow separates the entire film layer 21.

[0036] See Figure 3 , Figure 5 ; The second laser system consists of an ultraviolet nanosecond laser 19, a beam expander 16, a total reflection mirror 15, and a focusing lens 12.

[0037] The output wavelength of the ultraviolet nanosecond laser 19 is 355 nm. In this solution, its average power is set to ≥10 W, the pulse width is 10 ns - 100 ns, and the pulse energy is 0.1 mJ - 1 mJ, which is adjustable at a rate of 0.01 mJ per step, so as to be applicable to different film layer 21 thicknesses (the thickness of the TCO transparent conductive layer is 0.2 μm - 0.8 μm). The ultraviolet nanosecond laser 19 outputs laser light towards the beam expander 16. The beam expander 16 expands the beam diameter by 10 - 20 times. Then, it is output to the focusing lens 12 through the total reflection mirror 15 (which is not the same lens as the total reflection mirror in the first laser system). The focal length of the focusing lens 12 is 100 mm. The second laser system uses a circular Gaussian beam spot, and the focal spot diameter is 15 μm.

[0038] As an option, see Figure 2 ,Figure 3 , the scribing unit of the present invention further includes: An assembly platform 10 for assembling the optical elements of the first laser system and the second laser system; An X-axis linear motor 4 is arranged in the bottom culvert of the front wall 101 and the rear wall 102. A Z-axis linear motor 9 is installed on the moving block of the X-axis linear motor 4, and the moving block of the Z-axis linear motor 9 is fixedly connected to the side wall of the assembly platform 10; A laser rangefinder 13 is installed on the assembly platform 10 for detecting the distance to the film layer of the glass substrate. The laser rangefinder 13 is associated with the displacement stroke control of the Z-axis moving block 901.

[0039] Due to warping deformation, the glass substrate cannot be completely attached to the processing platform plane. In the prior art, the scribing head of the scribing equipment is installed on the moving block of the X-axis linear motor 4, and its height is fixed after debugging according to the position of the processing platform plane and the focal length data. The position where the warping occurs is far from the laser focus, resulting in incomplete removal of the film layer 21 by the laser, and there is film layer residue in the light transmission line 22, causing the light transmittance of the power generation glass to not meet the design requirements, and the light transmittance error > ±5%, and the qualified products become defective products. After testing, within the range of ±1 mm above and below the focus, the film layer 21 can be completely removed. In this solution, the combination of the Z-axis linear motor 9 and the laser rangefinder 13 realizes dynamic adjustment of the height of the scribing head, thereby compensating for the focal length; the specific compensation method is to scan the glass substrate through the laser rangefinder 13, construct the bending curve of the glass substrate using multiple laser ranging data, and then drive the Z-axis moving block 901. The Z-axis moving block 901 drives the assembly platform 10, and the assembly platform 10 drives the first laser system or the second laser system, so that the focus of the green light or the purple light falls on the middle height of the bending curve amplitude, and both the highest point and the lowest point of the glass are within the range of ±1 mm above and below the laser spot, improving the cleanliness of the light transmission line 22.

[0040] In this solution, the stroke of the Z-axis moving block 901 is ±25 mm, and the response speed of 1 ms fully meets the requirements. The focusing lens 11 of the first laser system and the focusing lens 12 of the second laser system are both fixed structures relative to the assembly platform 10. Therefore, adjusting the Z-axis height of the assembly platform 10 is to adjust the height of the focusing lens 11 head.

[0041] The base 1 of the present invention is made of marble material. Marble has a very low coefficient of thermal expansion and the ability to absorb vibration, and is the best material for eliminating external thermal and mechanical influences on the axis.

[0042] The dust removal unit includes a negative pressure device, a multi-stage filter, a dust suction pipe, and a dust suction hood 5. The dust suction hood 5 is connected to the dust suction pipe, the dust suction pipe is connected to the multi-stage filter, and the multi-stage filter is connected to the negative pressure device. It also includes a support frame located above the base 1. A sliding beam is installed at the top of the support frame, and the dust suction pipe is slidably connected to the sliding beam. The dust suction hood 5 is arranged above the glass substrate, and the opening of the dust suction hood 5 can suck the debris of multiple light transmission lines 22. Refer to Figure 7 , in this solution, according to the size of the dust suction hood 5, the glass substrate is divided into multiple BOX areas 24 along the X-axis. The dust suction hood 5 moves synchronously with the scribing unit and stops at each BOX area 24. The first laser system adjusts the angle of the laser through the high-speed galvanometer 18 and scribes all the light transmission lines 22 in one BOX area 24. After scribing one BOX area 24, it moves to the next BOX area 24.

[0043] Both the first laser system and the second laser system are optical systems. When the ambient temperature fluctuates, the glass material deforms to a certain extent on the surface due to thermal expansion, the optical path changes, and ultimately the position of the focus is affected. To further improve the accuracy of laser scribing, the present invention also provides a solution for correcting the deflection angle of the high-speed galvanometer 18. Specifically, a temperature sensor (not shown) for detecting the ambient temperature of the assembly platform 10 is also provided on the assembly platform 10, and the accuracy of this temperature sensor is ±0.1°C; the temperature sensor is control-related to the high-speed galvanometer 18. By compensating the laser deflection angle, the straightness of the light transmission line 22 and the insulating line 23 is ensured during temperature fluctuations, especially when moving to the next BOX area for scribing, to avoid misalignment in the connection of the same light transmission line 22 before and after.

[0044] Refer to Figure 11 , the clamping jaw 3 of the present invention is composed of a fixed seat 302, a sliding seat 303, a fixed push cylinder 301, and a chuck 305. The fixed seat 302 is fixedly connected to the moving block of the Y-axis linear motor 2. The sliding seat 303 is slidably connected to the fixed seat 302. The fixed push cylinder 301 is arranged at the rear side of the sliding seat 303 and its piston head is connected to the rear end of the sliding seat 303. The chuck 305 is installed at the front end of the sliding seat 303. The chuck 305 includes a support plate 304, and an upper clamping finger and a lower clamping finger that can move relative to each other are installed on the front side wall of the support plate 304. At least one of the upper clamping finger and the lower clamping finger is movably arranged.

[0045] As an option, refer to Figures 12 to 14 , the feeding module 6 includes: A conveyor belt 603, which is arranged at intervals in the feeding module 6. The conveyor belt 603 extends from the left end to the right end of the feeding module 6, and the surface belt thereof contacts the glass substrate and drives the glass substrate to move through friction; Supporting bars 602, which are arranged alternately between the conveyor belts 603. Universal ball seats 703 and suction cups 704 are arranged on the top surface thereof, and the suction cups 704 are connected to the negative pressure device; A lifting device is arranged under the conveyor belt 603 and drives the conveyor belt 603 to move up and down at the elevation of the supporting bar 602. A hard limit block 604 is arranged at the rear end of the feeding module 6, including a positioning seat 6041 fixed to the base frame of the feeding module 6, and a guide wheel 6042 is installed on the top surface of the positioning seat 6041. An elastic limit block 605 is arranged on the opposite side of the hard limit block 604, including a connecting seat 6051 fixed to the base frame of the feeding module 6. An L-shaped slider 6053 is slidably installed on the connecting seat 6051. A push-pull cylinder 6052 is connected to the back side of the horizontal part of the L-shaped slider 6053, and a pushing wheel 6054 is installed on the top surface of the vertical part of the L-shaped slider 6053. A CCD alignment device 601 is a 5-million-pixel industrial camera with a field of view ≥ 5×5 mm², which is used to detect the dynamic position of the glass substrate. The positioning accuracy is ±2 μm through the edge detection algorithm (Sobel operator), and it is associated with the telescopic stroke control of the push-pull cylinder 6052 of the elastic limit block 605. An AOI camera 606 is arranged at the right end of the feeding module 6 and is used to detect the position and range of the roller marks 25 on the glass substrate. The AOI camera 606 is associated with the control of the scribing unit.

[0046] The glass substrate is introduced into the feeding module through the conveyor belt 603 and is stopped by the hard limit block 604; the other side of the glass substrate is pushed by the elastic limit block 605 to adjust the glass substrate; the conveyor belt 603 is controlled to descend by the lifting device 604 so that the glass substrate falls on the supporting bar 602. The CCD alignment device 601 is used to monitor the position and tilt state when the glass substrate enters, and judges whether to push the glass substrate straight by using part or all of the elastic limit blocks 605 through visual analysis.

[0047] See Figure 17 , the AOI camera 606 dynamically collects the images of the roller marks 25 on the surface of the glass substrate, and dynamically calculates the center offset of the insulating wire 23 according to the position of the transmitted light 22. The offset formula is: , is the width of the transmitted light; is the offset coefficient, ; is the position error of the roller mark 25.

[0048] See Figure 18, the detection structure of the AOI camera 606 is transmitted to the control system of the scribing unit. The control system of the scribing unit sets two insulating lines 23 on both sides according to the position of the roller mark 25, and isolates the area of the roller mark 25 from the power generation area through these two insulating lines 23. After determining these two insulating lines 23, the control system of the scribing unit sets the positions of other insulating lines 23 at a reasonable spacing according to the design and requirements. In this solution, the insulating line 23 is used on the one hand to isolate the roller mark 25, and on the other hand to avoid short circuits between sub-cells.

[0049] See Figure 15 , the scribing fixing module 7 includes a supporting plate 701, on which universal ball seats 703 and suction cups 704 are uniformly and staggeredly arranged. There is a scribing interval 702 in the middle of the supporting plate 701, and the scribing unit moves along this scribing interval 702. The scribing fixing module 7 forms a sliding surface for supporting the glass substrate through the universal ball seats 703, and sucks and stabilizes the glass substrate through the suction cups 704.

[0050] See Figure 16 , the discharging module 8 includes a supporting bar 602 and a conveyor belt 603, and the structures and arrangements of the supporting bar 602 and the conveyor belt 603 are the same as those of the feeding module 6.

[0051] The scribing method for the light-transmitting lines of the power generation glass provided by the present invention uses the above-mentioned power generation glass laser scribing equipment, and the specific working process is as follows: The first step is to design scribing data according to the size of the glass substrate to be produced. The scribing data includes at least the starting position, ending position, line width, and transmittance of the light-transmitting line 22; the starting position, ending position, and line width of the insulating line 23; The second step: After the glass substrate is fed, its position and orientation are corrected, and then the glass substrate is grabbed by the clamp 3 and driven to move linearly along the Y-axis to the scribing fixing module 7; The third step: The clamp 3 moves and positions according to the scribing data, and the scribing fixing module 7 fixes the whole glass substrate; The fourth step: The scribing unit moves along the X-axis to scribe the glass substrate; the dust removal unit moves along the X-axis synchronously with the scribing unit to suck the debris generated during the scribing process of the glass substrate; The fifth step: The clamp 3 drives the glass substrate to move to the discharging module 8.

[0052] Among them, in the fourth step, for the grooves designed with both light-transmitting lines and insulating lines, the specific operation process is shown in Figures 7 to 10 : S1: Start the laser rangefinder 13, drive the assembly platform 10 to move the full length along the X-axis through the X-axis linear motor 4. The laser rangefinder 13 uniformly takes points on the glass substrate, measures the distance from the laser rangefinder 13 to the film layer 21 of the glass substrate, and obtains d1 to dn ; Utilize d1 to d n to obtain the bending curve of the glass substrate; S2: Divide the glass substrate into multiple BOX areas 24 along the X-axis according to the suction range of the dust removal unit suction hood 5. Synchronously move the dust removal unit and the scribing unit to locate to the first BOX area 24; S3: Collect all d values within this BOX area 24, and obtain the moving stroke of the Z-axis moving block 901 through calculation, that is, sum up and take the average of each d value, perform an operation on this average value and the deviation coefficient to obtain the moving stroke of the Z-axis moving block 901, and adjust the laser focus to the position where the height difference between the highest point elevation and the lowest point elevation within this BOX area 24 is centered. Specifically, the moving stroke formula of the Z-axis moving block 901 is: , where is the measuring point position, is at the distance value at the position, and h is the local height deviation; S4: Start the first laser system, and scribe the light transmission line 22 within the first BOX area 24 according to the scribing data determined in the first step, so as to form a first groove on the upper surface of the glass substrate, and the first groove is the light transmission line 22; S5: Start the second laser system, and scribe along the first groove according to the scribing data determined in the first step to form a second groove at the bottom of the first groove, and the second groove cuts off the TCO transparent conductive layer to be the insulating line 23.

[0053] During the process of scribing the glass substrate by the first laser system: P1: The detection temperature sensor detects the ambient temperature of the assembly platform 10; P2: Calculate the offset of the green picosecond laser according to the measured ambient temperature value; P3: Correct the deflection angle of the high-speed galvanometer 18 according to the obtained offset to make the focus return to the designed position. The deflection angle correction formula of the high-speed galvanometer 18 is: , where is the expansion coefficient, / °C; is the temperature change amount, is the overall optical path length from the laser to the focusing lens 11.

[0054] Furthermore, the above scribing method further includes: before designing the scribing data in the first step, A1: Monitor the overall position of the glass substrate through the CCD alignment device 601, and correct the position and direction of the glass substrate according to the CCD alignment device 601 to make the glass substrate parallel to the Y-axis; A2: Detect the position and range of the roller marks 25 on the glass substrate through the AOI camera 606; A3: Design insulating lines 23 on both sides of the roller mark 25 to isolate the area of the roller mark 25 from the battery area circuit; then determine the positions of other insulating lines 23 based on the position rule of this insulating line 23.

[0055] The beneficial effects of the present invention are as follows: 1) This method uses two lasers to scribe the light transmission lines of the power generation glass, which can reduce the power and irradiation time of the green picosecond laser, thereby reducing the uncontrollable damage (cracks) caused by the thermal affected zone to the back electrode; 2) Through secondary scribing of the bottom of the light transmission line groove by the purple laser, on the one hand, it further removes the residue of the opaque layer, and on the other hand, it cuts off the TCO transparent conductive layer, which can not only isolate the damaged area of the film layer, but also avoid the short - circuit situation between sub - batteries, reduce the influence of the damage of the glass substrate film layer on the functionality of the power generation glass, isolate the damaged area, and retain the effective area of the power generation film layer to the greatest extent while keeping the size of the original glass material; 3) By using a square light spot, the flatness of the edge of the light transmission line groove is improved, and the generation of sawteeth in the groove is avoided; 4) Increase the Z - axis movement adjustment amount for the scribing unit, detect the warping situation of the glass through laser ranging, dynamically adjust the focal position according to the warping situation, improve the clarity of the light transmission line, and improve the control accuracy of the light transmittance; 5) Compensate for the scribing deviation caused by environmental temperature fluctuations through temperature detection, and improve the straightness of the light transmission line.

[0056] The above are only the preferred and feasible embodiments of the present invention, and do not limit the scope of the rights of the present invention. Any equivalent changes made by using the content of the specification and drawings of the present invention are included in the scope of the rights of the present invention.

Claims

1. A power generation glass laser scribing device, used for scribing a power generation glass substrate along a transparent line, wherein the glass substrate comprises a glass substrate (20) and a film layer (21), wherein the film layer (21) comprises a TCO light-transmitting conductive layer, an absorption layer, a buffer layer and a back electric layer from the surface of the glass substrate (20) upward; the scribing device comprises: The base (1) comprises a front wall (101) and a rear wall (102); a gap is provided between the front wall (101) and the rear wall (102) to form a material inlet at the left end and a material outlet at the right end; a Y-axis linear motor (2) is installed on the top of the front wall (101) and the rear wall (102); a clamping claw (3) for clamping the edge of the glass substrate is installed on the surface of the moving block of the Y-axis linear motor (2); A substrate positioning unit is installed in the base (1), and the substrate positioning unit includes: A feeding module (6) is used to support the middle of the glass substrate and to adjust the position of the glass substrate; A scribing and fixing module (7) for fixing the glass substrate during the scribing process of the transmission line (22); A discharging module (8) is used to guide the scribed glass substrate out of the scribed fixing module (7); A scribing unit, which passes through the base (1) and is disposed on the lower side of the glass substrate, and performs light-transmitting scribing on the film layer (21) of the glass substrate; The dust removal unit is arranged on the upper side of the glass substrate, and is arranged opposite to the scribing unit and moves synchronously; Features: The scribing unit comprises a first laser system and a second laser system, The first laser system is composed of a green picosecond laser (14), a beam expander (16), a plurality of total reflection mirrors (15), a DOE shaper (17), a high-speed galvanometer (18) and a focusing lens (11), and is used to scribe the film layer (21) with a transmission light (22); The second laser system is composed of an ultraviolet nanosecond laser (19), a beam expander (16), a total reflection mirror (15) and a focusing lens (12), and is used to scribe the insulating line (23) of the film layer (21).

2. The laser scribing device for power generation glass according to claim 1, wherein , the green light picosecond laser (14) has a peak power of ≥80W and a pulse width of <15ps; the beam expander (16) is a 2-8 times adjustable lens; the DOE shaper (17) generates a uniform square spot with a spot size of 0.3 mm²×0.3 mm²; the high-speed galvanometer (18) has a deflection speed of ≥30m / s, and the focal length of the focusing lens (11) is 254mm; The ultraviolet nanosecond laser (19) has an average power of ≥10W, a pulse width of 10ns-100ns, and a pulse energy of 0.1mJ-1mJ; the focusing lens (12) has a focal length of 100mm, a focal point diameter of 15μm, and a Gaussian spot.

3. The laser scribing device for power generation glass according to claim 1, characterized in that , the marking unit also includes: An assembly platform (10) for assembling optical elements of the first laser system and the second laser system; An X-axis linear motor (4) is disposed in a culvert at the bottom of the front wall (101) and the rear wall (102); a Z-axis linear motor (9) is mounted on a moving block of the X-axis linear motor (4); and a moving block of the Z-axis linear motor (9) is fixedly connected to a side wall of the assembly platform (10); The laser rangefinder (13) is installed on the assembly platform (10) and is used to detect the distance to the film layer of the glass substrate. The laser rangefinder (13) is associated with the displacement stroke control of the Z-axis moving block (901).

4. The laser scribing device for power generation glass according to claim 3, characterized in that , A temperature sensor for detecting the ambient temperature of the assembly platform (10) is also provided on the assembly platform (10), and the temperature sensor is associated with the control of the high-speed galvanometer (18).

5. The laser scribing device for power generation glass according to claim 1, characterized in that , The gripper (3) consists of a fixed seat (302), a sliding seat (303), a fixed push cylinder (301) and a chuck (305). The fixed seat (302) is fixedly connected to the moving block of the Y-axis linear motor (2). The sliding seat (303) is slidably connected to the fixed seat (302). The fixed push cylinder (301) is arranged at the rear side of the sliding seat (303) and its piston head is connected to the rear end of the sliding seat (303). The chuck (305) is installed at the front end of the sliding seat (303). The chuck (305) includes a support plate (304), and the front side wall of the support plate (304) is installed with upper and lower fingers that can move relative to each other.

6. The laser scribing device for power generation glass according to claim 1, wherein , The feeding module (6) includes: The conveyor belt (603) is arranged at intervals in the feeding module (6). The conveyor belt (603) extends from the left end to the right end of the feeding module (6), and the surface belt thereof contacts the glass substrate and drives the glass substrate to move through friction; The supporting strips (602) are arranged alternately between the conveyor belts (603), and universal ball seats (703) and suction cups (704) are arranged on the top surfaces thereof. The suction cups (704) are connected to a negative pressure device; The lifting device is arranged below the conveyor belt (603), and drives the conveyor belt (603) to perform lifting movement up and down at the elevation of the supporting strips (602); The hard limit block (604) is arranged at the rear end of the feeding module (6), and includes a positioning seat (6041) fixed to the base frame of the feeding module (6). A guide wheel (6042) is installed on the top surface of the positioning seat (6041); The elastic limit block (605) is arranged on the opposite side of the hard limit block (604), and includes a connecting seat (6051) fixed to the base frame of the feeding module (6). An L-shaped slider (6053) is slidably installed on the connecting seat (6051). The back side of the horizontal part of the L-shaped slider (6053) is connected to a push-pull cylinder (6052), and a pushing wheel (6054) is installed on the top surface of the vertical part of the L-shaped slider (6053); The CCD alignment device (601) includes an industrial camera and is arranged on one side of the hard limit block (604) in the feeding module (6) for detecting the dynamic position of the glass substrate, and is associated with the telescopic stroke control of the push-pull cylinder (6052) of the elastic limit block (605); The AOI camera (606) is arranged at the right end of the feeding module (6) for detecting the position and range of the roller marks (25) on the glass substrate. The AOI camera (606) is associated with the control of the scribing unit.

7. The laser scribing device for power generation glass according to claim 1, wherein The scribing and fixing module (7) includes a supporting plate (701), and universal ball seats (703) and suction cups (704) are uniformly arranged alternately on the supporting plate (701). A scribing interval (702) is provided in the middle of the supporting plate (701).

8. The laser scribing device for power generation glass according to claim 6, wherein : The discharging module (8) includes a supporting strip (602) and a conveyor belt (603), and the structures and arrangements of the supporting strip (602) and the conveyor belt (603) are the same as those of the feeding module (6).

9. A method for scribing light transmission lines on power generation glass, characterized in that, Using the laser scribing device for power generation glass according to any one of claims 1-8, the specific working process is as follows: In the first step, according to the size of the glass substrate to be produced, scribing data is designed, and the scribing data includes at least the starting position, ending position, line width, and transmittance of the light transmission line (22); the starting position, ending position, and line width of the insulating line (23); In the second step: after the glass substrate is fed, its position and orientation are corrected, and then the glass substrate is grabbed by the gripper (3) and driven to move linearly along the Y-axis to the scribing and fixing module (7); In the third step: the gripper (3) moves and positions according to the scribing data, and the scribing and fixing module (7) fixes the whole glass substrate; In the fourth step: the scribing unit moves along the X-axis to scribe the glass substrate; the dust removal unit moves along the X-axis synchronously with the scribing unit to suck the debris generated during the scribing of the glass substrate; In the fifth step: the gripper (3) drives the glass substrate to move to the discharging module (8); Among them, in the fourth step, for the grooves designed with both the light transmission line (22) and the insulating line (23) at the same time, the specific operation process is as follows: S1: Start the laser rangefinder (13), drive the assembly platform (10) to move the full length of the X-axis through the X-axis linear motor (4), the laser rangefinder (13) uniformly takes points on the glass substrate, and measures the distance from the laser rangefinder (13) to the film layer (21) of the glass substrate to obtain d1 to d n ; Utilize d1 to d n to obtain the bending curve of the glass substrate; S2: According to the suction range of the suction hood (5) of the dust removal unit, the glass substrate is divided into multiple BOX areas (24) along the X-axis, and the dust removal unit and the scribing unit are moved synchronously to locate the first BOX area (24); S3: Collect all d values within the BOX area (24), calculate the moving stroke of the Z-axis moving block (901) through operations, and adjust the laser focus to the position where the height difference between the highest point elevation and the lowest point elevation within the BOX area (24) is centered. The moving stroke formula of the Z-axis moving block (901) is: , where is the measuring point position, is at the distance value at the position, and h is the local height deviation; S4: Start the first laser system, and scribe the light transmission line (22) in the first BOX area (24) according to the scribing data determined in the first step, so as to form a first groove on the upper surface of the glass substrate; S5: Start the second laser system, and scribe along the first groove according to the scribing data determined in the first step to form a second groove at the bottom of the first groove. The second groove cuts off the TCO transparent conductive layer, and the second groove is the insulating line (23); During the scribing of the glass substrate by the first laser system: P1: The detection temperature sensor detects the ambient temperature of the assembly platform (10); P2: Predict the offset of the green picosecond laser according to the measured ambient temperature value; P3: Correct the deflection angle of the high-speed galvanometer (18) according to the obtained offset so that the light spot falls on the precise position. The deflection angle correction formula of the high-speed galvanometer (18) is , where is the expansion coefficient,[ / °C,[ is the temperature change,[ is the overall optical path length of the scribing laser beam.[ 10. The method for scribing light transmission lines of a power generation glass according to claim 9, characterized in that, The scribing data design steps include: A1: Monitor the overall position of the glass substrate, correct the position and orientation of the glass substrate, and make the glass substrate parallel to the Y-axis; A2: Detect the position and range of the roller marks (25) on the glass substrate; A3: Design insulating lines on both sides of the roller marks (25) to isolate the roller mark (25) area from the battery area circuit; A4: Design the positions of other insulating lines based on the positions of the insulating lines on both sides of the roller marks (25).

Images