Fine metal mask stretching machine
By designing a tensioning machine suitable for new photomasks and adopting an air-floating platform and welding workbench, efficient fixing of the photomask to the photomask frame was achieved, solving the problems of insufficient domestic photomask raw materials and high maintenance costs, and improving production efficiency and positioning accuracy.
Patent Information
- Application Number
- CN202510488664.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-18
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2045-04-18
AI Technical Summary
In the current technology, domestic manufacturers cannot provide mask raw materials that meet the length requirements of the G8.6FMM production line, and strip masks have low yield and high maintenance costs. Existing screen stretching machines are not suitable for the screen stretching method of the new mask plates.
A screen stretching machine suitable for a new type of mask plate was designed. It adopts an air-floating platform, a welding worktable and a screen stretching worktable. The individual panel masks are arranged in rows and welded to the mask frame by a gripping mechanism. The positioning accuracy is ensured by a camera component and a clamping mechanism.
This technology enables efficient fixing of the mask and mask frame, improves production efficiency, reduces production and maintenance costs, breaks the foreign blockade on raw materials, and ensures the positioning accuracy of the mask and frame.
Smart Images

Figure CN120286907B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of display technology, and in particular to the design of a screen stretching machine for fine metal masks. Background Technology
[0002] The core structure of an OLED (Organic Light Emitting Diode) device consists of an anode, an organic light-emitting layer, and a cathode stacked sequentially on a substrate. During its fabrication, a vacuum evaporation process is used to precisely deposit each layer of material onto the surface of the array substrate. For the light-emitting layer, the OLED material is placed in a vacuum chamber and heated to a gaseous sublimation state, allowing it to pass through micron-sized pixel openings in a fine metal mask (FMM) and deposited at designated locations on the substrate to form a thin film. The FMM, as a key tooling element, controls material distribution through its opening pattern, directly determining the pixel geometry and resolution.
[0003] FMM consists of a mask frame and a mask sheet. The manufacturing of FMM requires loading the frame onto the support platform using the transfer device of a screen stretching machine, stretching the sheet to the design position using the grippers of the screen stretching machine, and then welding the sheet to the frame using laser welding.
[0004] The existing technology has the following problems:
[0005] The 1680mm mask raw materials required for the G8.6FMM production line can only be provided by DNP. Domestic raw materials cannot meet the length requirements of the production line. In terms of width, domestic raw materials can only meet the width requirements of masks with a width of 330mm or less.
[0006] Furthermore, existing strip masks have multiple panels, requiring all panels on the entire mask to meet quality standards, resulting in a low yield for ultra-wide strip masks and significant delivery and cost pressures.
[0007] Furthermore, if one of the panels of the strip mask is damaged, the entire strip mask needs to be replaced during repair, resulting in high maintenance costs for the precision metal mask.
[0008] Therefore, our company has improved the structure of the mask and the connection method between the mask and the mask frame. The mask is processed into a mask with only a single panel. Then, based on the size of the mask frame, the number of masks with only a single panel required along the length of the mask frame is calculated. Based on the calculated number, multiple masks are arranged in a row. Then, the row of masks is transferred as a whole to the mask frame and welded and fixed. Through the above improvements, the requirements of higher-generation OLED product lines for mask materials are reduced, thereby reducing the production cost of the mask and the subsequent maintenance cost. This breaks the requirements of the strip mask in the existing technology on the length and width of the mask, and breaks the blockade and restriction of foreign raw material resources.
[0009] Existing screen stretching machines are not suitable for this new type of mask and the screen stretching method for the mask plate. Therefore, our company has designed a screen stretching machine suitable for the new type of mask. Summary of the Invention
[0010] This invention designs a fine metal mask stretching machine suitable for novel masks and novel mask stretching methods.
[0011] The technical solution of the present invention is as follows:
[0012] A screen-stretching machine for fine metal masks used in OLED display panels is characterized by: an air-floating platform disposed on the ground; a welding worktable and a screen-stretching worktable sequentially arranged along the length of the air-floating platform; and second supports located at both ends of the air-floating platform in the width direction, with the lower ends of the second supports disposed on the ground. A first crossbeam and a second crossbeam are disposed between the two second supports, and the first and second crossbeams are movable along the length of the second supports. The first crossbeam is equipped with a first moving mechanism and a second moving mechanism, and the second crossbeam is equipped with a third moving mechanism and a fourth moving mechanism. Both the third and fourth moving mechanisms are equipped with gripping mechanisms, and the second and fourth moving mechanisms are equipped with welding mechanisms. The mesh-stretching worktable is used to carry several masks arranged in a row, and also includes a transfer component. The gripping mechanisms of the first and second crossbeams grip both ends of the transfer component and move it above the mesh-stretching worktable. The transfer component adsorbs the masks arranged in a row on the mesh-stretching worktable. The first and second crossbeams move to move the transfer component above the welding worktable. The gripping mechanism releases and places the transfer component on the welding worktable. The first and second crossbeams drive the welding mechanism to move and weld the masks and mask frames located on the welding worktable.
[0013] Furthermore, a third support is provided on the air-floating platform at both ends of the width direction of the welding workbench, and a third crossbeam is also provided. The third crossbeam is connected to the third support and can move along the length direction of the third support. A fifth moving mechanism is provided on the third crossbeam, and at least one camera component is provided on the fifth moving mechanism. The camera component is used for positioning and calibrating the mask on the welding workbench.
[0014] Furthermore, guide rails are provided on the air-floating platforms at both ends of the welding workbench along its length. Movable auxiliary support frames are provided on the guide rails, and clamping mechanisms are provided on the upper surface of the auxiliary support frames. The clamping mechanisms are used to support and clamp the two ends of the transfer assembly.
[0015] Furthermore, the screen making worktable includes a first screen and a second screen that can move towards each other on the air flotation platform. Several grippers are symmetrically arranged on the first screen and the second screen. The grippers are used to clamp the two ends of the mask. An arrangement gap is formed between the first screen and the second screen. The masks are arranged in rows within the arrangement gap and their two ends are clamped by the grippers.
[0016] Furthermore, the first and second net platforms are provided with net-laying guide rails along their length, and the grippers are mounted on the net-laying guide rails.
[0017] In summary, the present invention has the following beneficial effects:
[0018] This invention designs a screen-stretching machine for fine metal masks suitable for a new screen-stretching method. The new method improves upon the existing strip-shaped mask by breaking it down into smaller parts. A new mask with only a single panel is designed, and multiple newly designed masks can be arranged to form a screen. This breaks through the existing requirements on the width of strip-shaped masks and overcomes foreign restrictions on raw material resources. The screen-stretching machine of this invention has a welding worktable and a screen-stretching worktable on its air-floating platform. The screen-stretching worktable is used to clamp the single-panel mask and achieve multiple screens. The masks are arranged in a row, and then the gripping mechanisms on the first and second crossbeams drive the transfer assembly to the top of the screen-stretching worktable. The transfer assembly adsorbs the masks arranged in a row on the screen-stretching worktable and transfers the row of masks from the screen-stretching worktable to the welding worktable. The gripping mechanism releases the transfer assembly, and then the first and second crossbeams move to drive the welding mechanism to weld the masks and mask frames, thereby fixing the masks and mask frames. This invention provides a screen-stretching machine suitable for a new screen-stretching method, meeting the needs of new production processes, and improving production efficiency through overall transfer, while also ensuring the positioning accuracy of the masks and mask frames. Attached Figure Description
[0019] Figure 1 This is a three-dimensional schematic diagram of the net-stretching machine of the present invention;
[0020] Figure 2 This is a three-dimensional schematic diagram of the net-stretching machine of the present invention from another perspective;
[0021] Figure 3 for Figure 2 Enlarged view of point A in the middle;
[0022] Figure 4 This is a schematic diagram of the first crossbeam, the second crossbeam, and the transfer assembly of the present invention on the tensioning workbench;
[0023] Figure 5 This is a schematic diagram of the first crossbeam, the second crossbeam, and the transfer assembly of the present invention on the welding workbench;
[0024] Figure 6 This is a three-dimensional schematic diagram of the wire mesh tensioning workbench of the present invention;
[0025] 1 in the figure is an air flotation platform.
[0026] 10 is a welding workbench.
[0027] 11 is the wire mesh working table, 12 is the third support, 13 is the third crossbeam, 130 is the fifth moving mechanism, 131 is the camera assembly, 14 is the guide rail, 15 is the auxiliary support frame, and 150 is the clamping mechanism.
[0028] 2 is the second support, 20 is the first crossbeam, 21 is the second crossbeam, 201 is the first moving mechanism, 202 is the second moving mechanism, 211 is the third moving mechanism, and 212 is the fourth moving mechanism.
[0029] 3 is the capturing mechanism.
[0030] 4 represents the welding mechanism.
[0031] 5 is the transfer component.
[0032] 110 is the first netting platform, 111 is the second netting platform, 112 is the gripper, 113 is the arrangement gap, and 114 is the netting guide rail. Detailed Implementation
[0033] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments described are not intended to limit the present invention.
[0034] It should be noted that when a component is referred to as being "set on" or "fixed to" another component, it can be directly on the other component or there may be an intermediate component. When a component is referred to as being "fixed to" another component, or "fixedly connected" to another component, the fixing method can be detachable or non-detachable. When a component is considered to be "connected" or "rotatably connected" to another component, it can be directly connected to the other component or there may be an intermediate component. The terms "vertical," "horizontal," "left," "right," "upper," "lower," and similar expressions used are for illustrative purposes only and do not represent the only possible implementation.
[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0036] In this invention, terms such as "first," "second," and "third" are used not to represent specific quantities or orders, but merely to distinguish names.
[0037] See Figure 1As shown, a fine metal mask stretching machine, used for OLED display panels, includes an air-floating platform 1, which is set on the ground. Along its length, the air-floating platform 1 has a welding worktable 10 and a stretching worktable 11. It also includes second supports 2 located at both ends of the air-floating platform in the width direction, with their lower ends set on the ground. A first crossbeam 20 and a second crossbeam 21 are positioned between the two second supports 2. The first and second crossbeams 20 and 21 can move along the length of the second supports. Their movement is achieved through a linear drive mechanism, such as a servo screw mechanism or a linear guide mechanism, to meet the required precision. All mechanisms can be used in this invention. The first crossbeam 20 is provided with a first moving mechanism 201 and a second moving mechanism 202, and the second crossbeam 21 is provided with a third moving mechanism 211 and a fourth moving mechanism 212. The first, second, third, and fourth moving mechanisms are linear motion mechanisms. The first moving mechanism 201 and the third moving mechanism 211 are each provided with a gripping mechanism 3. The gripping mechanism is a pneumatic or hydraulic drive unit and a gripping jaw connected to and driven by the pneumatic or hydraulic drive unit. The gripping mechanism is used to achieve picking and putting. The second moving mechanism 202 and the fourth moving mechanism 212 are provided with a welding mechanism 4. The welding mechanism is a laser welding device used for welding masks. The two ends of the membrane are welded together to connect the mask to the mask frame. The mesh-stretching worktable 11 is used to support several masks arranged in a row. It also includes a transfer component 5. The gripping mechanism 3 of the first and second crossbeams grips the two ends of the transfer component and moves it above the mesh-stretching worktable. The transfer component adsorbs the masks arranged in a row on the mesh-stretching worktable. Specifically, the transfer component can be an electrostatic adsorption, vacuum adsorption, or magnetic adsorption transfer mechanism, which is used to adsorb the masks arranged in a row on the mesh-stretching worktable. The adsorbed masks can move with the transfer component, and the connection between the mask and the transfer component is stable and reliable during the movement. The movement of the first and second crossbeams moves the transfer component above the welding worktable, and the gripping mechanism releases the transfer component. The transfer component is placed on the welding worktable. The gripping component is specifically used to pick up and place the transfer component. First, the transfer component is picked up, and then the first and second crossbeams move to move the transfer component to the mesh stretching worktable. The transfer component adsorbs the masks arranged on the mesh stretching worktable. Then, the first and second crossbeams move to above the welding worktable. After positioning, the gripping mechanism lowers the transfer component. The first and second crossbeams drive the welding mechanism to weld the masks and mask frames located on the welding worktable. This invention designs a novel mesh stretching machine. On the one hand, the mesh stretching worktable enables the masks to be arranged in rows. The two ends of the masks are clamped by the mesh stretching worktable, which helps to ensure the consistency of the masks on the mesh stretching worktable. On the other hand...The synchronous transfer of multiple masks arranged in a row can be achieved through the first crossbeam, the second crossbeam, and the transfer assembly, ensuring work efficiency and the consistency of each mask after transfer. Furthermore, the first and second crossbeams are mounted on a second support, which has no physical connection to the air-float platform. This reduces the impact of the first and second crossbeams on the air-float platform during movement, ensuring its stability and reliability.
[0038] A third support 12 is provided on the air-floating platform 1 at both ends of the width direction of the welding workbench, and a third crossbeam 13 is also provided. The third crossbeam 13 is connected to the third support 12 and can move along the length direction of the third support. A fifth moving mechanism 130 is provided on the third crossbeam 13. At least one camera component 131 is provided on the fifth moving mechanism. The camera component is used for positioning and calibrating the mask on the welding workbench. After the mask is transferred to the mask frame, it is necessary to ensure the accuracy of the mask's position on the mask frame. The camera component is moved by the third crossbeam and the fifth moving component on the third crossbeam. The position of the mask is positioned and calibrated by comparing images through the camera component.
[0039] Guide rails 14 are provided on the air-floating platforms 1 at both ends of the welding workbench along its length. Movable auxiliary support frames 15 are provided on the guide rails 14, and clamping mechanisms 150 are provided on the upper surface of the auxiliary support frames 15. The clamping mechanisms 150 are used to support and clamp the two ends of the transfer assembly. Furthermore, the added auxiliary support frames support the transfer assembly and fix its two ends using the clamping mechanisms, ensuring a fixed and reliable position between the transfer assembly and the auxiliary support frames. Since the auxiliary support frames can move on the guide rails, combined with the aforementioned camera assembly, when the camera assembly detects an error in the mask's positioning, the mask's position can be corrected by adjusting the position of the auxiliary support frames on the guide rails, thereby better ensuring the positioning accuracy between the mask and the mask frame. In this invention, the clamping mechanism uses a pneumatic or hydraulic drive unit to clamp and fix the two ends of the transfer assembly, making the transfer assembly and the auxiliary support frames a single unit, resulting in better accuracy for subsequent mask position correction.
[0040] The screen-stretching worktable 11 includes a first screen platform 110 and a second screen platform 111 that can move towards each other on an air-float platform. A plurality of grippers 112 are symmetrically arranged on the first screen platform 110 and the second screen platform 111. The grippers 112 are used to clamp the two ends of the mask. An arrangement gap 113 is formed between the first screen platform 110 and the second screen platform 111. The masks are arranged in rows within the arrangement gap, with both ends clamped by the grippers. The structure of the screen-stretching worktable is defined here, including the first screen platform and the second screen platform, and both can move on the air-float platform, thereby achieving adjustment of the distance between them to meet the needs of masks of varying lengths. The different mask lengths are due to the varying sizes of individual panels, and the corresponding mask sizes also vary. The adjustable distance between the first screen platform and the second screen platform better suits various application scenarios.
[0041] The first screen 110 and the second screen 111 are provided with screen guide rails 114 along the length direction. The grippers 112 are arranged on the screen guide rails 114. Through the above structure, the grippers can move on the screen guide rails, thereby adjusting the distance between two adjacent grippers. When the width of the mask changes, the distance between adjacent grippers can be adjusted, which can better hold the mask and improve the applicability of the equipment.
[0042] In summary, the present invention has the following beneficial effects:
[0043] This invention designs a screen-stretching machine for fine metal masks suitable for a new screen-stretching method. The new method improves upon the existing strip-shaped mask by breaking it down into smaller parts. A new mask with only a single panel is designed, and multiple newly designed masks can be arranged to form a screen. This breaks through the existing requirements on the width of strip-shaped masks and overcomes foreign restrictions on raw material resources. The screen-stretching machine of this invention has a welding worktable and a screen-stretching worktable on its air-floating platform. The screen-stretching worktable is used to clamp the single-panel mask and achieve multiple screens. The masks are arranged in a row, and then the gripping mechanisms on the first and second crossbeams drive the transfer assembly to the top of the screen-stretching worktable. The transfer assembly adsorbs the masks arranged in a row on the screen-stretching worktable and transfers the row of masks from the screen-stretching worktable to the welding worktable. The gripping mechanism releases the transfer assembly, and then the first and second crossbeams move to drive the welding mechanism to weld the masks and mask frames, thereby fixing the masks and mask frames. This invention provides a screen-stretching machine suitable for a new screen-stretching method, meeting the needs of new production processes, and improving production efficiency through overall transfer, while also ensuring the positioning accuracy of the masks and mask frames.
[0044] Based on the described embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
Claims
1. A screen stretching machine for a fine metal mask used in OLED display panels, characterized in that: The system includes an air-floating platform, which is set on the ground. Along its length, the air-floating platform is sequentially equipped with a welding worktable and a mesh-stretching worktable. It also includes second supports located at both ends of the air-floating platform in the width direction, with their lower ends set on the ground. Between the two second supports are a first crossbeam and a second crossbeam, which can move along the length of the second supports. The first crossbeam is equipped with a first moving mechanism and a second moving mechanism, while the second crossbeam is equipped with a third moving mechanism and a fourth moving mechanism. Both the first and third moving mechanisms have gripping mechanisms, and the second and fourth moving mechanisms have welding mechanisms. The mesh-stretching worktable is used to support several masks arranged in a row. The system also includes a transfer assembly, and the first and second crossbeams... The beam gripping mechanism grips both ends of the transfer component and moves it above the mesh tensioning worktable. The transfer component adsorbs the masks arranged in rows on the mesh tensioning worktable. The first and second crossbeams move to move the transfer component above the welding worktable. The gripping mechanism releases and places the transfer component on the welding worktable. The first and second crossbeams drive the welding mechanism to weld the masks and mask frames located on the welding worktable. The mesh tensioning worktable includes a first mesh tensioning platform and a second mesh tensioning platform that can move towards each other on the air flotation platform. Several grippers are symmetrically arranged on the first and second mesh tensioning platforms. The grippers are used to clamp the two ends of the masks. An arrangement gap is formed between the first and second mesh tensioning platforms. The masks are arranged in rows within the arrangement gap and their two ends are clamped by the grippers.
2. The screen stretching machine for a fine metal mask according to claim 1, characterized in that: A third support is provided on the air-floating platform at both ends of the width direction of the welding workbench, and a third crossbeam is also provided. The third crossbeam is connected to the third support and can move along the length direction of the third support. A fifth moving mechanism is provided on the third crossbeam, and at least one camera component is provided on the fifth moving mechanism. The camera component is used for positioning and calibrating the mask on the welding workbench.
3. The screen stretching machine for a fine metal mask according to claim 1, characterized in that: Guide rails are provided on the air-floating platforms at both ends of the welding workbench along its length. Movable auxiliary support frames are provided on the guide rails. Clamping mechanisms are provided on the upper surface of the auxiliary support frames. The clamping mechanisms are used to support and clamp the two ends of the transfer assembly.
4. The screen stretching machine for a fine metal mask according to claim 1, characterized in that: The first and second net platforms are provided with net-laying guide rails along their length, and the grippers are set on the net-laying guide rails.
Citation Information
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