Monitoring piece changing structure and direct type optical film thickness monitoring system

Abstract

The invention discloses a monitoring piece changing structure and a direct type optical film thickness monitoring system. The monitoring piece changing structure comprises a bottom support, an upper cover, a rotating part and a driven deflector rod. Wherein an annular monitoring piece is placed on the bottom support; the upper cover is connected to the top end of the bottom support, is of an annular structure and is matched with the bottom support to form a containing space for containing the annular monitoring piece, and a plurality of monitoring holes are formed in the upper cover in the circumferential direction of the upper cover. The rotating part rotationally penetrates through the inner ring of the upper cover to be connected with the annular monitoring piece in a matched mode and is rotationally arranged on the upper cover, and the rotating part can drive the annular monitoring piece to rotate in the containing space when rotating; the driven deflector rod is arranged at the top end of the rotating part. The whole annular monitoring piece is arranged between the upper cover and the bottom support, it can be guaranteed that the monitoring piece is located at the same horizontal height as much as possible before and after rotation, the tolerance during rotation is improved, and the situation that the monitoring piece stops at the plated monitoring piece or the position without the monitoring piece when rotation is not in place is prevented.

Description

Technical Field

[0001] The invention relates to the technical field of optical film preparation instruments, and in particular to a monitoring film changing structure and a direct optical film thickness monitoring system. Background Art

[0002] There are many factors that affect the spectral performance of thin films, among which the optical thickness largely determines the spectral quality of the film. The optical film thickness monitoring system is a device used to accurately control the optical thickness, and its monitoring accuracy has a great influence on the preparation of thin films. Optical film thickness monitoring systems can be divided into transmission type and reflection type. The transmission type usually performs direct monitoring. Although this method is more accurate, it may cause error accumulation when the number of monitoring layers increases.

[0003] In the prior art, in order to eliminate the error accumulation in direct optical film thickness monitoring and improve the monitoring accuracy, the method of replacing the monitoring film is usually adopted. In the absence of a film replacement mechanism to perform the monitoring film replacement operation, it is necessary to restore the vacuum degree inside the coating machine to the atmospheric state, and then open the chamber door to manually replace the monitoring film. This process may not only cause the lens to be contaminated, but also the exhaust and re-vacuuming operation time is too long, thereby reducing production efficiency.

[0004] Based on this, a new technical solution is needed. Summary of the invention

[0005] In view of this, the embodiments of the present invention provide a monitoring film changing structure and a direct optical film thickness monitoring system to at least solve the problem in the prior art that manual film changing may cause lens contamination.

[0006] The embodiment of the present invention provides the following technical solutions:

[0007] An embodiment of the present invention provides a monitoring chip replacement structure, including:

[0008] A base, on which a ring-shaped monitoring sheet is placed;

[0009] An upper cover, which is connected to the top of the base and is an annular structure, and cooperates with the base to form a storage space for the annular monitoring sheet, and the upper cover is provided with a plurality of monitoring holes along its circumference;

[0010] A rotating part, the rotating part rotates through the inner ring of the upper cover to be matched with the annular monitoring piece and is rotatably arranged on the upper cover, and the rotating part can drive the annular monitoring piece to rotate in the accommodating space when rotating;

[0011] The driven lever is arranged at the top end of the rotating part and is used for driving the rotating part to rotate when being driven by the active lever.

[0012] Furthermore, the rotating part includes:

[0013] An extension rod that passes through the inner ring of the upper cover, and its end is cooperatively connected to the inner ring of the annular monitoring piece through a driving disk;

[0014] A rotating shaft that is coaxially arranged with the extension rod, and its top is used for installing the driven lever.

[0015] Furthermore, the driving disk is provided with a limiting bump, and a limiting groove is opened on the inner ring wall of the annular monitoring piece;

[0016] When the limiting bump enters the limiting groove, the driving disk is limited to the inner ring wall of the annular monitoring piece.

[0017] Furthermore, a rotating bearing is built in the inner ring of the upper cover, and the extension rod of the rotating part passes through the rotating bearing and is cooperatively connected to the annular monitoring piece.

[0018] Furthermore, the driven lever includes:

[0019] A connecting rod that is arranged parallel to the upper cover, and one end of it is connected to the top end of the rotating part;

[0020] A driven rod that is connected to the other end of the connecting rod, and the driven rod is inclined away from the rotating direction of the rotating part.

[0021] Furthermore, a plurality of limiting grooves are arranged along the circumferential direction of the connecting rod, and each limiting groove is arranged along the axial direction of the connecting rod;

[0022] The monitoring piece film changing structure further includes:

[0023] A spring that faces the connecting rod, and the end away from the connecting rod is fixedly arranged;

[0024] A bearing bracket that is connected to the end of the spring close to the connecting rod;

[0025] A limiting bearing that is installed at the end of the bearing bracket away from the spring, and the limiting bearing can enter the corresponding limiting groove when the connecting rod rotates to limit the connecting rod.

[0026] Furthermore, the monitoring piece film changing structure further includes:

[0027] A shaft sleeve, one end of which is fixed on the upper cover, the shaft sleeve is a hollow structure, the spring and the bearing bracket are both installed in the shaft sleeve, and one end of each is abutted by the side wall of the shaft sleeve, and the limit bearing installed at one end of the bearing bracket extends out of the hollow structure of the shaft sleeve and abuts against the connecting rod.

[0028] Furthermore, an annular sleeve is provided at the other end of the shaft sleeve, and the annular sleeve is sleeved on the connecting rod and communicated with the hollow structure of the shaft sleeve.

[0029] The present invention also provides a direct optical film thickness monitoring system, comprising:

[0030] Coating machine chamber;

[0031] A workpiece disk, the workpiece disk is rotatably suspended in the coating machine cavity through a workpiece disk rotating unit, and corresponding slots are provided on the workpiece disk;

[0032] The monitoring film changing structure according to any one of claims 1 to 8, wherein the monitoring film changing structure is fixedly installed in the corresponding slot through a base and / or an upper cover;

[0033] An active lever is installed in the coating machine cavity through a lever motion structure, and is used to drive the driven lever of the monitoring film changing mechanism to rotate.

[0034] Furthermore, the direct optical film thickness monitoring system further includes an encoder, and the encoder is used to detect the rotation angle of the workpiece disk.

[0035] Compared with the prior art, the at least one technical solution adopted in the embodiment of the present invention can achieve the following beneficial effects:

[0036] A monitoring film changing structure of the present invention ensures that the monitoring film is heated evenly by arranging a through hole of the same size as the monitoring film on the upper cover, and by arranging a whole annular monitoring film between the upper cover and the bottom support, it can ensure that the monitoring film is at the same level as much as possible before and after rotation, and improve the tolerance during rotation to prevent the monitoring film from stopping at a position where a monitoring film has been plated or there is no monitoring film when the rotation is not in place. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0038] Figure 1 A schematic diagram of a monitoring chip replacement structure according to an embodiment of the present invention;

[0039] Figure 2 Cross-sectional view of a film-changing structure for a monitoring film according to an embodiment of the present invention;

[0040] Figure 3 Assembly drawing of the rotating part and the driven lever in a film-changing structure for a monitoring film according to an embodiment of the present invention;

[0041] Figure 4 Bottomless bottom view of a film-changing structure for a monitoring film according to an embodiment of the present invention;

[0042] Figure 5 Side view of a direct optical film thickness monitoring system according to an embodiment of the present invention;

[0043] Figure 6 Partial schematic diagram of a direct optical film thickness monitoring system according to an embodiment of the present invention.

[0044] 1. Film-changing structure for monitoring film; 10. Bottom tray; 11. Upper cover; 111. Monitoring hole; 12. Rotating part; 121. Extension rod; 122. Driving disc; 123. Rotating shaft; 124. Limiting convex block; 125. Limiting groove; 13. Driven lever; 131. Connecting rod; 132. Driven rod; 14. Rotating bearing; 15. Spring; 16. Bearing bracket; 17. Limiting bearing; 18. Bushing;

[0045] 2. Ring-shaped monitoring film; 21. Limiting groove; 3. Coating machine cavity; 4. Workpiece tray; 41. Workpiece tray rotating unit; 5. Active lever; 51. Lever movement structure; 6. Encoder. Specific embodiments

[0046] The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0047] The following specific examples illustrate the implementation manners of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope protected by the present application.

[0048] Note that the following describes various aspects of embodiments within the scope of the appended claims. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement an apparatus and / or practice a method. Additionally, this apparatus and / or method can be implemented using other structures and / or functionality in addition to one or more of the aspects set forth herein.

[0049] It should also be noted that the drawings provided in the following embodiments only schematically illustrate the basic concept of this application. The components shown in the drawings only relate to those in this application and are not drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0050] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that these examples can be practiced without these specific details.

[0051] Optical thin films are increasingly widely used and are involved in multiple fields such as optical fiber communication, autonomous driving, military equipment, and infrared temperature measurement. There are various factors affecting the spectral performance of thin films. Among them, the optical thickness largely determines the spectral quality of the thin film. The optical film thickness monitoring system is a device for precisely controlling it, and the monitoring accuracy of this device has a profound impact on the preparation of thin films. The optical film thickness monitoring system is divided into transmissive and reflective types. The transmissive type is generally direct monitoring, which is more accurate, but there is error accumulation when monitoring multiple layers. The reflective type is generally indirect monitoring, with relatively lower monitoring accuracy compared to the direct type and a relatively more complex structure than the direct type.

[0052] To eliminate error accumulation in direct optical film thickness monitoring and improve monitoring accuracy, the method of replacing the monitoring film is adopted. Without a film-changing mechanism device to change the monitoring film, it is necessary to restore the internal vacuum of the coating machine to the atmospheric state, open the chamber door, and manually replace the monitoring film. This process may not only cause the lens to be contaminated, but also the exhaust and vacuum pumping make the operation time too long, reducing production efficiency. Therefore, through the film-changing mechanism, it is possible to replace the monitoring film mechanically without opening the chamber door while the coating machine is in a high vacuum state, improving the coating efficiency, eliminating cumulative errors, and improving monitoring accuracy.

[0053] The existing film changing mechanism is mainly divided into three parts: the cylinder shifting mechanism, the workpiece plate 4 rotation positioning mechanism, and the film changing mechanism. It can realize the replacement of the monitoring film in a short time without exhausting, and supports the replacement of a total of 4 films.

[0054] The existing film changing mechanism has the following shortcomings: (1) The monitoring film used is an independent round film with a small tolerance range. (2) The lever is upright and has a large resistance when it is moved. (3) The rotating main shaft has no bearing and has a large rotation resistance.

[0055] Based on this, this specification embodiment proposes a processing solution: Figure 1 As shown, a monitoring film changing structure of the present invention utilizes an active lever 5 to move a driven lever 13 so that the rotating portion 12 rotates a fixed angle to achieve replacement of the monitoring film during the coating process, thereby eliminating the accumulated errors in the monitoring process, improving the monitoring accuracy and number of monitoring layers of the direct film thickness monitor, and reducing the difficulty of finding a suitable monitoring wavelength.

[0056] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0057] Example 1

[0058] like Figures 1 to 4 As shown, the present invention provides a monitoring film changing structure 1, comprising a bottom bracket 10, an upper cover 11, a rotating part 12 and a driven lever 13. Among them, an annular monitoring film 2 is placed on the bottom bracket 10; the upper cover 11 is connected to the top of the bottom bracket 10, which is an annular structure, and cooperates with the bottom bracket 10 to form a receiving space for the annular monitoring film 2, and the upper cover 11 is provided with a plurality of monitoring holes 111 along its circumference; the rotating part 12 rotates through the inner ring of the upper cover 11 to cooperate with the annular monitoring film 2, and is rotatably arranged on the upper cover 11, and the rotating part 12 can drive the annular monitoring film 2 to rotate in the receiving space when rotating; the driven lever 13 is arranged at the top of the rotating part 12, and is used to drive the rotating part 12 to rotate when being toggled by the active lever 5.

[0059] The base 10 is used to support the annular monitoring piece 2 .

[0060] The upper cover 11 is used to cooperate with the bottom bracket 10 to fix the annular monitoring piece 2 .

[0061] The monitoring hole 111 on the upper cover 11 can expose part of the annular monitoring piece 2 , and the part of the annular monitoring piece 2 in the monitoring hole 111 can function as a complete monitoring piece.

[0062] For example, the number of monitoring holes 111 on the upper cover 11 can be four, and only part of the annular monitoring piece 2 in one monitoring hole 111 is used for operation at a time. When the monitoring piece needs to be replaced, the monitoring pieces in other monitoring holes 111 can be rotated to the working position.

[0063] The rotating part 12 is used to drive the annular monitoring piece 2 to rotate, so that different positions of the annular monitoring piece 2 are rotated to designated positions.

[0064] The driven lever 13 is used to drive the rotating part 12 to rotate under the action of the active lever 5 .

[0065] Specifically, when the driven lever 13 is moved by the active lever 5 , the driven lever 13 can drive the rotating part 12 to rotate, and the rotating part 12 drives the annular monitoring piece 2 to rotate, so as to achieve piece changing.

[0066] The present invention provides a plurality of monitoring holes 111 on the upper cover 11, thereby ensuring that the portion of the annular monitoring piece 2 in the monitoring hole 111 is heated evenly, and when the annular monitoring piece 2 rotates, it can ensure that the monitoring piece is at the same level as much as possible before and after the rotation, so as to improve the tolerance during rotation.

[0067] Furthermore, the rotating part 12 includes an extension rod 121 and a rotating shaft 123. The extension rod 121 passes through the inner ring of the upper cover 11 and is connected to the inner ring of the annular monitoring plate 2 through the driving disk 122; the rotating shaft 123 is coaxially arranged with the extension rod 121, and the top thereof is used to install the driven lever 13.

[0068] The extension rod 121 is used to provide a sufficient connection length so that the rotating part 12 can pass through the inner ring of the upper cover 11, so that the driving disk 122 is connected with the annular monitoring plate 2, and the rotating shaft 123 is used to install the driven lever 13.

[0069] Furthermore, a limiting protrusion 124 is provided on the driving disk 122 , and a limiting groove 21 is provided on the inner ring wall of the annular monitoring piece 2 ; when the limiting protrusion 124 enters the limiting groove 21 , the extension rod 121 is limited to the inner ring wall of the annular monitoring piece 2 .

[0070] When the extension rod 121 rotates, under the action of the limiting protrusion 124 and the limiting groove 21 , the annular monitoring piece 2 can rotate along with the extension rod 121 .

[0071] For example, the limiting protrusion 124 may be a C-shaped or U-shaped structure.

[0072] Furthermore, a rotary bearing 14 is built into the inner ring of the upper cover 11 , and the extension rod 121 of the rotating part 12 passes through the rotary bearing 14 and is connected with the annular monitoring piece 2 .

[0073] The extension rod 121 is installed on the upper cover 11 via the rotary bearing 14 , which can reduce the difficulty of rotating the extension rod 121 , prevent the extension rod 121 from being stuck during use, and reduce the difficulty of rotating the extension rod 121 .

[0074] Furthermore, the driven lever 13 includes a connecting rod 131 and a driven rod 132, wherein the connecting rod 131 is arranged parallel to the upper cover 11, and one end thereof is connected to the top end of the rotating part 12; the driven rod 132 is connected to the other end of the connecting rod 131, and the driven rod 132 is inclined in the rotation direction away from the rotating part 12.

[0075] By tilting the driven rod 132 away from the rotation direction of the rotating part 12, the vertical intersection between the driven rod 132 and the active lever 5 can be changed to an inclined intersection, so that the single X or Y direction force is decomposed into X and Y direction forces when in contact.

[0076] Furthermore, a plurality of limiting grooves 125 are arranged on the connecting rod 131 along its circumference, and each limiting groove 125 is arranged along the axial direction of the connecting rod 131; the monitoring film changing structure 1 also includes a spring 15, a bearing bracket 16 and a limiting bearing 17. Among them, the spring 15 is arranged toward the connecting rod 131, and the end away from the connecting rod 131 is fixedly arranged; the bearing bracket 16 is connected to the end of the spring 15 close to the connecting rod 131; the limiting bearing 17 is installed at the end of the bearing bracket 16 away from the spring 15, and the limiting bearing 17 can enter the corresponding limiting groove 125 when the connecting rod 131 rotates, so as to limit the connecting rod 131.

[0077] Among them, when the limit groove 125 on the connecting rod 131 rotates to correspond to the limit bearing 17, the limit bearing 17 can enter the limit groove 125 under the action of the spring 15 to limit the connecting rod 131, so that when working, the connecting rod 131 rotates to cause the annular monitoring plate 2 to rotate.

[0078] Furthermore, the monitoring film changing structure 1 also includes a sleeve 18, one end of which is fixed on the upper cover 11, and the sleeve 18 is a hollow structure. The spring 15 and the bearing bracket 16 are both installed in the sleeve 18, and one end of each is supported by the side wall of the sleeve 18. The limit bearing 17 installed at one end of the bearing bracket 16 extends out of the hollow structure of the sleeve 18 and abuts against the connecting rod 131.

[0079] Among them, after the bearing bracket 16 is installed in the hollow structure of the sleeve 18, the hollow structure of the sleeve 18 can limit the bearing bracket 16 to a certain extent to prevent the bearing bracket 16 and the spring 15 from being thrown out when the workpiece disk 4 rotates.

[0080] Among them, the bushing 18 is used to provide an installation position for the spring 15 and the bearing bracket 16, position the bearing bracket 16, and protect the spring 15 and the bearing bracket 16 to fix and limit the limit bearing 17.

[0081] Specifically, after the driven lever 13 is stressed, it drives the rotating shaft 123, the extension rod 121, the driving disk 122, and the monitoring piece to rotate. At this time, after the limit bearing 17 is stressed, the too yellow rolls from the limit groove 125 on the rotating shaft 123 to the protruding part on the rotating shaft 123. As the driven lever 13 continues to rotate, the limit bearing 17 abuts against the lowest point of the next limit groove 125 to ensure that the monitoring piece can rotate to the specified position during each rotation.

[0082] Furthermore, an annular sleeve is provided at the other end of the bushing 18. The annular sleeve is sleeved on the connecting rod 131 and communicates with the hollow structure of the bushing 18 to prevent the limit bearing 17 from being exposed.

[0083] In this embodiment, by adding the rotary bearing 14, the friction can be reduced, jamming can be prevented, mechanical failures can be eliminated, and the monitoring piece is designed as an annular shape to increase the tolerance during the rotation process and prevent the problem of light blocking due to incomplete rotation. The driven lever 13 is set to have a certain inclination angle, so that the driving lever 5 can more easily toggle the driven lever 13.

[0084] When there are certain requirements for the monitoring accuracy in the present invention, the cumulative error in the direct optical film thickness monitoring system is eliminated by replacing the monitoring piece, the number of monitored layers is increased, and the monitoring accuracy is improved to achieve precise film thickness control.

[0085] In this embodiment, by optimizing the film changing structure, the stability of the film changing structure is improved. By involving the rotary bearing 14 and the limit bearing 17, the rotation resistance can be reduced, and the success rate of rotation can be improved. The monitoring piece is set as an annular shape, which can also ensure that the monitoring piece in the monitoring hole 111 is at the same horizontal height before and after rotation to increase the tolerance during rotation and prevent stopping at the position of the monitored film that has been coated or the position without a monitoring piece when the rotation is not in place.

[0086] Embodiment 2

[0087] As Figures 5 to 6 shown, this embodiment also provides a direct optical film thickness monitoring system, including a coating machine cavity 3, a workpiece disk 4, the monitoring piece changing structure 1 as described in Embodiment 1, and a driving lever 5. Among them, the workpiece disk 4 is rotatably suspended in the coating machine cavity 3 through a workpiece disk rotating unit 41, and corresponding slots are provided on the workpiece disk 4; the monitoring piece changing structure 1 is fixedly installed in the corresponding slots through a bottom bracket 10 and / or an upper cover 11; the driving lever 5 is installed in the coating machine cavity 3 through a lever movement structure 51 and is used to drive the driven lever 13 of the monitoring film changing mechanism to rotate.

[0088] The lever motion structure 51 is a motion component, which can extend up and down or its output shaft can rotate to drive the active lever 5 to rotate. For example, the motion component can be a rotary cylinder.

[0089] During the coating process, the active lever 5 can move upward to the side wall of the cavity without interfering with the rotation of the workpiece disk 4 .

[0090] Among them, the upper cover 11 of the monitoring plate changing structure 1 can be fixed on the co-construction disk by screws, and the rotating part 12, the driving disk 122, etc. are connected together by screws.

[0091] Furthermore, the direct optical film thickness monitoring system further includes an encoder 6 , and the encoder 6 is used to detect the rotation angle of the workpiece disk 4 .

[0092] Among them, the workpiece disk rotating unit 41 is set at the top center of the coating machine cavity 3, the encoder 6 is synchronized with the workpiece disk rotating unit 41, and the workpiece disk 4 is connected to the monitoring film changing structure 1 inside the cavity through screws.

[0093] Among them, when changing the disc, the workpiece disc 4 is first decelerated to a safe speed, and then rotated to the specified position through the encoder 6, and the workpiece disc rotation unit 41 drives the workpiece disc 4 to rotate a certain angle again, so that the active lever 5 and the driven lever 13 overlap, and the annular monitoring disc 2 is driven to rotate through the active lever 5 and the lever motion structure 51 to complete the replacement of the monitoring disc point.

[0094] In this embodiment, the rotating cylinder drives the driven lever 13, combined with the workpiece disk 4 rotating at a fixed angle, so that the film changing mechanism on the workpiece disk 4 can change the position of the monitoring film.

[0095] By installing a sheet changing structure, this embodiment can realize the replacement of the monitoring sheet under high vacuum conditions, thereby improving the coating efficiency and the accuracy of direct optical film thickness monitoring.

[0096] The working process of the present invention is as follows:

[0097] When the monitoring piece needs to be replaced, the workpiece disk 4 gradually reduces the rotation speed and stops at the specified position through the encoder 6;

[0098] Control the moving parts at the top of the cavity to move the active lever 5 to a specified position so that the active lever 5 and the driven lever 13 are in an interference state;

[0099] The workpiece plate 4 rotation system controls the workpiece plate 4 to rotate a certain angle, and the active lever 5 will shift the driven lever 13 and drive the driven lever 13 to rotate a certain angle;

[0100] After the driven lever 13 rotates, it drives the rotating part 12 and the annular monitoring piece 2 to rotate, so as to realize the rotary replacement of the monitoring piece;

[0101] The moving part controls the driving lever 5 to return to the initial position;

[0102] Restart the rotation speed of the workpiece disk 4, and detect whether the optical control signal is normal. If it is normal, the film replacement is completed.

[0103] In this specification, for the same or similar parts among the various embodiments, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the descriptions are relatively simple, and the relevant parts can refer to the partial descriptions of the system embodiments.

[0104] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present application should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A monitoring film changing structure, characterized in that, include: A base, on which a ring-shaped monitoring sheet is placed; An upper cover, which is connected to the top of the base and is an annular structure, and cooperates with the base to form a storage space for the annular monitoring sheet, and the upper cover is provided with a plurality of monitoring holes along its circumference; A rotating part, the rotating part rotates through the inner ring of the upper cover to be matched with the annular monitoring piece and is rotatably arranged on the upper cover, and the rotating part can drive the annular monitoring piece to rotate in the accommodating space when rotating; The driven lever is arranged at the top end of the rotating part and is used for driving the rotating part to rotate when being driven by the active lever.

2. The film-changing structure of the monitoring film according to claim 1, wherein The rotating part comprises: An extension rod, the extension rod is arranged through the inner ring of the upper cover, and an end of the extension rod is matched and connected with the inner ring of the annular monitoring plate through a driving disk; A rotating shaft is coaxially arranged with the extension rod, and a top of the rotating shaft is used for mounting the driven lever.

3. The film-changing structure of the monitoring film according to claim 2, wherein The driving disc is provided with a limiting protrusion, and the inner ring wall of the annular monitoring sheet is provided with a limiting groove; When the limiting protrusion enters the limiting groove, the driving disk is limited to the inner ring wall of the annular monitoring plate.

4. The film-changing structure of the monitoring film according to claim 2, wherein, A rotary bearing is built into the inner ring of the upper cover, and the extension rod of the rotating part passes through the rotary bearing and is matched and connected with the annular monitoring piece.

5. The film-changing structure of the monitoring film according to any one of claims 1 to 4, characterized in that, The driven lever comprises: A connecting rod, the connecting rod is arranged parallel to the upper cover, and one end of the connecting rod is connected to the top end of the rotating part; A driven rod is connected to the other end of the connecting rod, and the driven rod is inclined in a rotation direction away from the rotating part.

6. The film-changing structure of the monitoring film according to claim 2, wherein, The connecting rod is provided with a plurality of limiting grooves along its circumference, and each of the limiting grooves is arranged along the axial direction of the connecting rod; The monitoring film changing structure also includes: A spring, wherein the spring is arranged toward the connecting rod and one end of the spring away from the connecting rod is fixedly arranged; A bearing bracket, the bearing bracket is connected to one end of the spring close to the connecting rod; A limit bearing is installed at the end of the bearing bracket away from the spring, and the limit bearing can enter the corresponding limit groove when the connecting rod rotates to limit the connecting rod.

7. The film changing structure of the monitoring film according to claim 6, characterized in that, Also includes: A shaft sleeve, one end of which is fixed on the upper cover, the shaft sleeve is a hollow structure, the spring and the bearing bracket are both installed in the shaft sleeve, and one end of each is abutted by the side wall of the shaft sleeve, and the limit bearing installed at one end of the bearing bracket extends out of the hollow structure of the shaft sleeve and abuts against the connecting rod.

8. The film-changing structure of the monitoring film according to claim 7, characterized in that, An annular sleeve is provided at the other end of the shaft sleeve, and the annular sleeve is sleeved on the connecting rod and communicated with the hollow structure of the shaft sleeve.

9. A direct optical film thickness monitoring system, characterized in that, include: Coating machine chamber; A workpiece disk, the workpiece disk is rotatably suspended in the coating machine cavity through a workpiece disk rotating unit, and corresponding slots are provided on the workpiece disk; The monitoring film changing structure according to any one of claims 1 to 8, wherein the monitoring film changing structure is fixedly installed in the corresponding slot through a base and / or an upper cover; An active lever is installed in the coating machine cavity through a lever motion structure, and is used to drive the driven lever of the monitoring film changing mechanism to rotate.

10. The direct optical film thickness monitoring system according to claim 9, wherein It further includes an encoder for detecting the rotation angle of the workpiece disk.

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