Method and system for detecting production quality of stepped niobium target tube

Abstract

The invention relates to the field of stepped niobium target tube production quality data detection, and particularly discloses a stepped niobium target tube production quality detection method and system, and the method comprises the steps: S1, presetting a plurality of contact starting points of a forming device and region images corresponding to the plurality of contact starting points according to forming conditions; s2, acquiring a pipe wall stress distribution diagram corresponding to each area image according to a forming control process of each historical contact starting point, and acquiring a pipe wall thickness value and a pipe wall stress value of a vertical section of a pipe orifice position where the area image is located; s3, performing machine model training on the real-time initial pipe wall thickness values and initial pipe wall stress values of different contact starting points based on a metal pipe incremental forming principle, setting a grid unit specification, and performing single-point incremental forming analogue simulation analysis on the inner and outer pipe walls after the grid unit specification is set; and S4, judging the uniformity of increment change of the inner and outer pipe walls according to a single-point increment forming analogue simulation analysis result, and obtaining a production quality detection result.

Description

Technical Field

[0001] The present invention relates to the field of production quality data detection of stepped niobium target tubes, and specifically relates to a production quality detection method and system for stepped niobium target tubes. Background Art

[0002] With the continuous progress of technology, the preparation technology of target materials is also constantly developing. For example, processes such as high-temperature sintering and hot isostatic pressing can improve the density and purity of target materials, thereby improving the performance of target materials. At the same time, by optimizing the composition and structure of target materials, the sputtering efficiency and film quality of target materials can be further improved.

[0003] The stepped target material is a special-shaped target material with a stepped structure on its surface. This structure can increase the surface area of the target material, improve the sputtering efficiency, and also improve the uniformity and adhesion of the film. Stepped target materials are usually used to prepare high-quality films, such as semiconductor devices, optical films, etc.

[0004] In the existing production control process for stepped niobium target tubes, there is a lack of a method for analyzing the energy distribution during the forming process of different contact points, and there are also no measures to optimize the production quality detection process of stepped niobium target tubes. Summary of the Invention

[0005] The purpose of the present invention is to provide a production quality detection method and system for stepped niobium target tubes, and solve the following technical problems: How to achieve the goal of precise production quality detection by optimizing the production forming process of stepped niobium target tubes.

[0006] The purpose of the present invention can be achieved through the following technical solutions: A production quality detection method for stepped niobium target tubes, the tube wall of the stepped niobium target tube includes a stepped wall and an inner tube wall; the stepped wall includes a first stepped tube wall and a second stepped tube wall; the inner tube wall includes an outer wall of the inner tube and an inner wall of the inner tube; The method includes: S1. Preset multiple contact starting points of the forming device according to the forming conditions: Respectively obtain the regional images corresponding to the first contact starting point of the first stepped tube wall, the second contact starting point of the second stepped tube wall, and the third contact starting point of the inner tube wall of the historical stepped niobium target tube; S2. Obtain the tube wall stress distribution diagrams corresponding to the regional images according to the forming control process of each historical contact starting point, and obtain the tube wall thickness value and tube wall stress value of the vertical cross-section at the position of the tube orifice where the regional image is located; the tube wall stress value includes the inner wall stress value of the tube and the outer wall stress value of the tube; S3. Based on the principle of incremental forming of metal tubes, conduct machine training on the numerical values of the real-time initial wall thickness and the initial wall stress values at different contact starting points, set the grid cell specifications, and perform single-point incremental forming simulation analysis on the inner and outer tube walls after setting the grid cell specifications; S4. Based on the results of the single-point incremental forming simulation analysis, judge the uniformity of the incremental changes in the inner and outer tube walls, and obtain the production quality inspection results.

[0007] Preferably, the principle of incremental forming of metal tubes includes: Based on the forming device, perform the first feed forming extrusion on the specified contact starting point at the set radial feed speed and axial feed speed to obtain the forming radial distance and the forming axial distance; The forming radial distance includes the inner tube forming incremental radius and the outer tube forming incremental radius; the inner tube forming incremental radius is the value obtained by subtracting the initial radius distance of the inner tube from the distance from the inner vertex to the axis; the outer tube forming incremental radius is the value obtained by subtracting the initial radius distance of the inner tube and the wall thickness numerical value from the distance from the outer vertex to the axis; the forming axial distance is the axial deformation region distance; and based on the first feed forming extrusion, perform the second feed and then form the tube wall along the spiral trajectory to complete the tube incremental forming process.

[0008] Preferably, it further includes: Accumulate multiple feed formings to obtain the pipe fittings meeting the process requirements; count the cumulative number of formings, the cumulative value of the forming radial distance, and the cumulative value of the forming axial distance; Take the historically statistical cumulative number of formings, the cumulative value of the forming radial distance, and the cumulative value of the forming axial distance as the initial samples and input them into the machine model for learning to construct the metal incremental forming theoretical model; Input the numerical values of the real-time initial wall thickness and the initial wall stress values marked with different contact starting points into the metal incremental forming theoretical model to output the forming force and the wall thickness thinning amount in the deformation region during the single-point incremental forming of the metal tube.

[0009] Preferably, in S3, it includes: S31. Obtain the width of the arc of the outer tube wall in the cross-section and the forming contact area. When the width is less than the preset threshold, perform the single-point incremental forming simulation analysis in step S32; otherwise, generate a warning signal; S32. Obtain the equivalent stress distribution nephogram of the forming force and the wall thickness thinning amount in the deformation zone during the single-point incremental forming at different contact starting points under different completion ratios; S33. Collect the energy values of the equivalent stress distribution nephogram and judge the high energy value distribution within the grid cells: If the high energy value distribution exceeds the preset interval, generate a warning signal; If the high energy value distribution is less than the preset interval, continue the simulation.

[0010] Preferably, the width of the arc of the outer tube wall section in contact with the forming area is obtained as follows: According to the relationship between the wall thickness change during tube incremental forming: The amount of wall thickness reduction: Since 、 The values are very small, then is: When : Wherein, ; The width of the arc of the outer tube wall section in contact with the forming area is: Wherein, is the wall thickness change ratio; is the axis rotation radius of the forming device; is the initial radius of the inner tube; is the axis rotation angle of the forming device; is the axis rotation angle of the inner tube; is the initial wall thickness; is the wall thickness at the vertex of the arc; is the amount of wall thickness reduction; is the wall thickness deviation value.

[0011] Preferably, the calculation process of the ratio of the forming force and the wall thickness reduction amount in the deformation area during single-point incremental forming is: Wherein, is the single-point incremental forming ratio coefficient; is the ratio of the wall thickness reduction amount to the initial wall thickness; Among the three-directional component forces on the contact surface between the tube wall and the tool wheel directional component force; Among the three-directional component forces on the contact surface between the tube wall and the tool wheel directional component force; Among the three-directional component forces on the contact surface between the tube wall and the tool wheel directional component force; The wall thickness reduction amounts at different contact starting points of the tube wall material in the deformation area.

[0012] Preferably, the energy value of the equivalent stress distribution nephogram is obtained as follows: Obtain the single-point incremental forming ratio coefficient At the set values , , , , the equivalent stress distribution nephogram of the lower tube wall forming area; where < < < ; Based on the energy balance equation, obtain the equivalent stress values in different grid cells, and obtain the RGB color area and color interval for displaying the equivalent stress values; Collect the mean value of the red components , the mean value of the green components , and the mean value of the blue components of each pixel point in each grid cell in the RGB color area; ; According to , , and , judge the energy value interval of the deformation area based on the numerical values and the variation law of the color intervals.

[0013] Preferably, judge the distribution of high energy values in the grid cells: Count the red components in , , in the deformation area, the mean value of the green components , , in grid cells, and , , the mean value of the blue components in grid cells; where , ∈ ; Each color in the deformation area corresponds to a combination of intervals of , , and each color corresponds to an energy range; According to , , and , determine the color distribution of the deformation area based on the color interval combination where the numerical values are located, and determine the high energy values according to the color distribution of the deformation area that exceeds the combination of this interval.

[0014] A production quality detection system for a stepped niobium target tube, used to detect the production quality of the stepped niobium target tube. The system includes: An image acquisition module, used to preset multiple contact starting points of the forming device according to the forming conditions: Respectively obtain the regional images corresponding to the first contact starting point of the first step tube wall, the second contact starting point of the second step tube wall, and the third contact starting point of the inner tube wall of the historical stepped niobium target tube; An image analysis module, which is used to obtain the tube wall stress distribution diagrams corresponding to the regional images according to the forming control processes of the historical contact starting points, and obtain the tube wall thickness values and tube wall stress values of the vertical cross-section at the nozzle position where the regional image is located; the tube wall stress values include the inner tube wall stress value and the outer tube wall stress value; A model simulation module, which is used to perform machine training on the real-time initial tube wall thickness values and initial tube wall stress values of different contact starting points based on the principle of incremental forming of metal tubes, set the grid cell specifications, and perform single-point incremental forming simulation analysis on the inner and outer tube walls after setting the grid cell specifications; A result detection module, which is used to judge the uniformity of the incremental changes of the inner and outer tube walls according to the results of the single-point incremental forming simulation analysis, and obtain the production quality detection results.

[0015] Advantages of the present invention: (1) Based on the principle of incremental forming of metal tubes, the present invention performs machine training model analysis on the real-time initial tube wall thickness values and initial tube wall stress values of different contact starting points, retains the original relative motion relationship between the tube material and the tool wheel during the forming process through machine training, simplifies part of the forming device, trains and constructs a geometric model of single-point incremental forming of metal tubes; and by setting the grid cell specifications and using solid elements for calculation, it ensures the stress and the range of the stress action area obtained by subsequent simulation.

[0016] (2) The present invention performs single-point incremental forming simulation analysis on the inner and outer tube walls after setting the grid cell specifications; judges the uniformity of the incremental changes of the inner and outer tube walls according to the results of the single-point incremental forming simulation analysis, and can improve the timely judgment of the forming completion degree of the production quality detection according to the energy changes of the incremental changes of the inner and outer tube walls, ensuring the accurate acquisition of the production quality detection results; realizes the accurate production quality detection goal by optimizing the production forming process of the stepped niobium target tube.

[0017] Of course, it is not necessary for any product implementing the present invention to achieve all the above-described advantages simultaneously. Description of the Drawings

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1 It is a process step diagram for the production quality inspection of a stepped niobium target tube of the present invention; Figure 2 It is a system diagram for the production quality inspection of a stepped niobium target tube of the present invention; Figure 3 It is a structural diagram of a stepped niobium target tube of the present invention; Figure 4 It is a distribution diagram of the first, second, and third contact starting points in the forming process of a stepped niobium target tube of the present invention; Figure 5 It is a process step diagram of the single-point incremental forming simulation analysis in step S3 of the production quality inspection method of a stepped niobium target tube of the present invention.

[0020] Reference numerals: 1. First stepped tube wall; 2. Second stepped tube wall; 3. Inner tube wall; 11. First contact starting point; 21. Second contact starting point; 31. Outer wall of the inner tube; 32. Inner wall of the inner tube; 33. Third contact starting point. Detailed implementation manners

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts belong to the scope of protection of the present invention.

[0022] Please refer to Figure 1 、 3 -4, the present invention is a production quality inspection method for a stepped niobium target tube. The tube wall of the stepped niobium target tube includes a stepped wall and an inner tube wall 3; the stepped wall includes a first stepped tube wall 1 and a second stepped tube wall 2; the inner tube wall 3 includes an outer wall 31 of the inner tube and an inner wall 32 of the inner tube; The method includes: S1. Preset multiple contact starting points of the forming device according to the forming conditions: Respectively obtain the regional images corresponding to the first contact starting point 11 of the first stepped tube wall 1, the second contact starting point 21 of the second stepped tube wall 2, and the third contact starting point 33 of the inner tube wall 3 of the historical stepped niobium target tube; S2. Obtain the tube wall stress distribution diagrams corresponding to the regional images according to the forming control processes of the historical contact starting points, and obtain the tube wall thickness values and tube wall stress values of the vertical cross-section at the pipe orifice position where the regional image is located; the tube wall stress values include the inner wall stress value and the outer wall stress value of the tube; S3. Based on the principle of incremental forming of metal tubes, a machine training model is carried out on the real-time initial wall thickness values and initial wall stress values at different contact starting points, and the grid cell specifications are set. Then, single-point incremental forming simulation analysis is carried out on the inner and outer tube walls after setting the grid cell specifications; S4. According to the results of the single-point incremental forming simulation analysis, judge the uniformity of the incremental changes of the inner and outer tube walls, and obtain the production quality inspection results.

[0023] In the above technical solution, the stepped niobium target tube usually consists of a target tube and a step. Therefore, the tube wall of the stepped niobium target tube usually includes a stepped wall and an inner tube wall 3. It is divided into a first stepped wall 1 and a second stepped wall 2 according to the number of steps of the stepped wall; and the inner tube wall 3 includes an outer wall 31 of the inner tube and an inner wall 32 of the inner tube. The forming tool controls the forming process of the inner and outer walls of the target tube and the step. The specific process of the production quality inspection method is as follows: First, a plurality of contact starting points of the forming device are preset according to the forming conditions; the plurality of contact starting points include contact points respectively distributed at the positions of the first stepped wall, the second stepped wall and the inner tube wall 3. The design of the present invention is to set three contact starting points, namely the first contact starting point 11, the second contact starting point 21 and the third contact starting point 33. In actual production, the contact starting points of the forming tool can be set with multiple contact starting points according to design requirements. In this embodiment, in order to better distinguish different positions, the area images corresponding to the first contact starting point 11 of the first stepped tube wall 1, the second contact starting point 21 of the second stepped tube wall 2 and the third contact starting point 33 of the inner tube wall 3 of the historical stepped niobium target tube are respectively obtained; Then, a digital camera is used to obtain the historical area images of each contact starting point, and the stress distribution area of the tube wall is obtained through the historical forming control process and finite element simulation analysis. The tube wall stress distribution includes internal and external ones. Therefore, the thickness value of the tube wall and the stress value of the tube wall can be obtained. The stress value of the tube wall includes the inner wall stress value and the outer wall stress value of the tube.

[0024] Next, based on the principle of incremental forming of metal tubes, a machine training model analysis is carried out on the real-time initial wall thickness values and initial wall stress values at different contact starting points. The model is a common basic geometric model. By means of machine training, the original relative motion relationship between the tube material and the tool wheel during the forming process is retained, and part of the forming device is simplified. A geometric model of single-point incremental forming of metal tubes is trained and constructed; and by setting the grid cell specifications and using solid elements for calculation, it is ensured that the stress and the range of the stress action area can be obtained in the subsequent simulation. Single-point incremental forming simulation analysis is carried out on the inner and outer tube walls after setting the grid cell specifications; finally, according to the results of the single-point incremental forming simulation analysis, judge the uniformity of the incremental changes of the inner and outer tube walls. According to the energy changes of the incremental changes of the inner and outer tube walls, the timely judgment of the forming completion degree of the production quality inspection can be improved, and it is ensured to accurately obtain the production quality inspection results; realizing the accurate production quality inspection goal by optimizing the production forming process of the stepped niobium target tube.

[0025] As an embodiment of the present invention, the principle of incremental forming of metal tubes includes: Based on the forming device, the first feed forming extrusion is carried out on the specified contact starting point at a set radial feed speed and axial feed speed to obtain the forming radial distance and the forming axial distance; The forming radial distance includes the inner tube forming incremental radius and the outer tube forming incremental radius; the inner tube forming incremental radius is the value obtained by subtracting the initial radius distance of the inner tube from the distance from the inner vertex to the axis; the outer tube forming incremental radius is the value obtained by subtracting the initial radius distance of the inner tube and the wall thickness value from the distance from the outer vertex to the axis; the forming axial distance is the distance of the axial deformation region; And based on the first feed forming extrusion, after the second feed, the tube wall is formed along a spiral trajectory to complete the tube incremental forming process.

[0026] As an embodiment of the present invention, it further includes: Accumulate multiple feed forming to obtain the pipe fittings required by the process requirements; count the cumulative value of the cumulative forming times and the forming radial distance and the cumulative value of the forming axial distance; Take the historically statistically cumulative forming times, the cumulative value of the forming radial distance, and the cumulative value of the forming axial distance as the initial samples and input them into the machine model for learning to construct a metal incremental forming theoretical model; Input the real-time initial wall thickness value and the initial wall stress value marked with different contact starting points into the metal incremental forming theoretical model to output the forming force and the wall thickness thinning amount in the deformation region during the single-point incremental forming of the metal tube.

[0027] As an embodiment of the present invention, please refer to Figure 5 As shown, S3 includes: S31. Obtain the width of the arc of the outer tube wall of the cross-section and the forming contact area. When the width is less than the preset threshold, perform the single-point incremental forming simulation analysis in step S32; otherwise, generate a warning signal; S32. Obtain the equivalent stress distribution nephogram of the forming force and the wall thickness thinning amount in the deformation zone during the single-point incremental forming with different contact starting points at different completion ratios; S33. Collect the energy value of the equivalent stress distribution nephogram and judge the high energy value distribution in the grid unit: If the high energy value distribution exceeds the preset interval, generate a warning signal; If the high energy value distribution is less than the preset interval, continue the simulation.

[0028] In the above technical solution, by further refining the process of single-point incremental forming simulation analysis in step S3, first, the width of the arc of the outer wall of the cross-section in contact with the forming contact area is obtained through theoretical calculation of the contact area between the pipe wall and the forming device contact tool. When it is determined that the width is less than the preset threshold, the next step of single-point incremental forming simulation analysis is carried out; otherwise, a warning signal is generated. Then, the equivalent stress distribution cloud diagrams of the forming force and the wall thickness thinning amount in the deformation zone during single-point incremental forming with different contact starting points at different completion ratios are obtained, and energy value analysis is performed based on the equivalent stress distribution cloud diagrams to ensure further processing according to the distribution of high energy values in the energy values. The specific judgment is as follows: If the distribution of high energy values exceeds the preset interval, a warning signal is generated; if the distribution of high energy values is less than the preset interval, the simulation is continued.

[0029] As an implementation mode of the present invention, the method for obtaining the width of the arc of the outer wall of the cross-section in contact with the forming contact area is as follows: According to the relationship between the wall thickness change during pipe incremental forming: Wall thickness thinning amount: Since 、 The values of are very small, then is: When : Wherein, ; The width of the arc of the outer wall of the cross-section in contact with the forming contact area is: Wherein, is the wall thickness change ratio; is the rotational radius of the forming device shaft; is the initial radius of the inner pipe; is the rotational angle of the forming device shaft; is the rotational angle of the inner pipe shaft; is the initial wall thickness; is the wall thickness at the vertex of the arc; is the wall thickness thinning amount; is the wall thickness deviation value.

[0030] In the above technical solution, the width of the circular arc of the outer pipe wall and the forming contact area of the cross-section is obtained by theoretically calculating the contact area between the pipe wall and the forming device tool, the deformation range of the pipe wall during the forming process is determined, and further the deformation area range of the forming device tool contacting the tool is determined.

[0031] As an implementation manner of the present invention, the calculation process of the forming force and the ratio of the wall thickness reduction amount in the deformation area during single-point incremental forming is as follows: Wherein, is the single-point incremental forming ratio coefficient; is the ratio of the wall thickness reduction amount to the initial wall thickness; Among the three-directional component forces on the contact surface between the pipe wall and the tool wheel, the component force in the direction; the component force in the direction among the three-directional component forces on the contact surface between the pipe wall and the tool wheel; the component force in the direction;

[0032] As an implementation manner of the present invention, the energy value acquisition method of the equivalent stress distribution nephogram is as follows: Obtain the single-point incremental forming ratio coefficient Respectively at the set values , , , obtain the equivalent stress distribution nephograms of the pipe wall forming area; where < < < ; Based on the energy balance equation, obtain the equivalent stress values in different grid cells, and obtain the RGB color area and color interval where the equivalent stress values are displayed; Collect the average value of the red components , the average value of the green components and the average value of the blue components of each pixel point in the RGB color area; According to , and the numerical values and the change rules of the color intervals, judge the energy value interval of the deformation area.

[0033] In the above technical solution, the energy balance equation is obtained by using the meshed finite element analysis model: The total energy generated by the model is , the work done by the external force is , the internal energy generated by elastic and plastic strains is , the kinetic energy is , the energy absorbed by frictional dissipation is , the energy absorbed by viscous dissipation is ; First, obtain the single-point incremental forming ratio coefficient At the set values , , , respectively, obtain the equivalent stress distribution nephogram of the lower pipe wall forming area; where < < < ; Then, according to the total energy setting in the model, obtain the equivalent stress values in different grid cells, and relate the energy and equivalent stress results. Generally, the greater the stress, the higher the energy. The energy can better reflect the differences in the pipe wall changes. Therefore, display the RGB color area and color interval according to the obtained equivalent stress values.

[0034] According to the mean value of the red components of pixels in each grid cell (the area of the grid cell is determined) in the collected RGB color area , the mean value of the green components and the mean value of the blue components , and ; And judge the energy value interval of the deformation area according to the numerical values and color interval change rules of

[0035] As an implementation manner of the present invention, judge the distribution of high energy values in the grid cell: Count the red components in grid cells in the deformation area , , Count the green components in grid cells , Count the blue components in grid cells ; where , , ∈ ; Each color in the deformation area corresponds to , interval combinations, and each color corresponds to an energy range; According to , and the color interval combination where the numerical values are located to determine the color distribution of the deformed area, and if the color distribution of the deformed area exceeds the combination of this interval, it is determined as a high energy value.

[0036] In the above technical solution, when the colors of the deformed area fall into the corresponding intervals in the red component, green component, and blue component respectively, since each color corresponds to an interval range of set energy values (generally, the redder the color, the higher the energy value of the area; the bluer the color, the lower the energy value of the area; green indicates that the energy value of the area is in the normal range), therefore, through the combination of intervals, the state with the highest RGB color ratio can be obtained, and then the corresponding energy range under this color can be obtained, that is, according to , and the interval combination where the numerical values are located to determine the color of the tube wall deformation area after meshing, and determine the corresponding energy range according to the color of the tube wall deformation area after meshing. Obviously, in this embodiment, through the division of color component intervals and the method of interval combination, the determination of the tolerance range for the production quality inspection of the tube wall can be significantly improved through the energy color range. Compared with only distinguishing through the color distribution area of the stress nephogram force, the change is more specific. Specifically, when it is judged that the color in the tube wall grid of the detection changes within the color difference range, the simulation of the energy range corresponding to the color change can be obtained through the method in this embodiment, thereby improving the accuracy of the material deformation simulation.

[0037] A production quality inspection system for a stepped niobium target tube, please refer to Figure 2 as shown; used to inspect the production quality of the stepped niobium target tube, the system includes: An image acquisition module, used to preset multiple contact starting points of the forming device according to the forming conditions: Respectively obtain the regional images corresponding to the contact starting point 11 of the first stepped tube wall 1, the contact starting point 21 of the second stepped tube wall 2, and the contact starting point 31 of the inner tube wall 3 of the historical stepped niobium target tube; An image analysis module, used to obtain the tube wall stress distribution map corresponding to each regional image according to the forming control process of each historical contact starting point, and obtain the tube wall thickness value and tube wall stress value of the vertical cross-section at the pipe orifice position where the regional image is located; the tube wall stress value includes the inner tube wall stress value and the outer tube wall stress value; A model simulation module for machine training a model of real-time initial wall thickness values and initial wall stress values of different contact starting points based on the principle of incremental forming of metal tubes, setting the grid cell specifications, and performing single-point incremental forming simulation analysis on the inner and outer walls after setting the grid cell specifications; A result detection module for judging the uniformity of incremental changes in the inner and outer walls according to the results of single-point incremental forming simulation analysis and obtaining the production quality detection results.

[0038] Each embodiment in this specification is described in a progressive manner. For the same or similar parts among the embodiments, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the embodiments of the device, equipment, and non-volatile computer storage medium, since they are basically similar to the method embodiments, the description is relatively simple, and reference can be made to the partial description of the method embodiments for the relevant parts.

[0039] The above describes specific embodiments of this specification. Other embodiments are within the scope of the appended documents. In some cases, the actions or steps recorded in this application can be executed in a different order from that in the embodiments and still achieve the desired results. Additionally, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In certain embodiments, multi-tasking and parallel processing are also possible or may be advantageous.

[0040] The above content is only an example and illustration of the concept of the present invention. Those skilled in the art of this technology can make various modifications, supplements, or use similar methods to replace the specific embodiments described, as long as they do not deviate from the concept of the invention or exceed the scope defined in this application, they should fall within the protection scope of the present invention.

Claims

1. A production quality inspection method for a stepped niobium target tube, the tube wall of the stepped niobium target tube includes a stepped wall and an inner tube wall (3); the stepped wall includes a first stepped tube wall (1) and a second stepped tube wall (2); the inner tube wall (3) includes an outer wall of the inner tube (31) and an inner wall of the inner tube (32); characterized in that: The method includes: S1. Preset multiple contact starting points of the forming device according to the forming conditions: Respectively obtain the regional images corresponding to the first contact starting point (11) of the first stepped tube wall (1), the second contact starting point (21) of the second stepped tube wall (2), and the third contact starting point (33) of the inner tube wall (3) of the historical stepped niobium target tube; S2. Obtain the pipe wall stress distribution maps corresponding to the regional images according to the forming control processes of the historical contact starting points, and obtain the pipe wall thickness values and pipe wall stress values of the vertical cross-section at the pipe orifice position where the regional image is located; the pipe wall stress values include the inner pipe wall stress value and the outer pipe wall stress value; S3. Based on the principle of incremental forming of metal tubes, perform machine training on the real-time initial pipe wall thickness values and initial pipe wall stress values of different contact starting points, set the grid cell specifications, and perform single-point incremental forming simulation analysis on the inner and outer pipe walls after setting the grid cell specifications; S4. Judge the uniformity of the incremental changes of the inner and outer pipe walls according to the results of the single-point incremental forming simulation analysis, and obtain the production quality inspection results.

2. The production quality inspection method of a stepped niobium target tube according to claim 1, characterized in that The principle of incremental forming of metal tubes includes: Based on the forming device, perform the first feed forming extrusion on the specified contact starting point at the set radial feed speed and axial feed speed to obtain the forming radial distance and the forming axial distance; The forming radial distance includes the inner tube forming incremental radius and the outer tube forming incremental radius; the inner tube forming incremental radius is the value obtained by subtracting the initial radius distance of the inner tube from the distance from the inner vertex to the axis; the outer tube forming incremental radius is the value obtained by subtracting the initial radius distance of the inner tube and the pipe wall thickness value from the distance from the outer vertex to the axis; The forming axial distance is the axial deformation region distance; and based on the first feed forming extrusion, perform the second feed and then form the pipe wall along the spiral trajectory to complete the pipe incremental forming process.

3. The production quality inspection method of a stepped niobium target tube according to claim 2, characterized in that, It also includes: Accumulate multiple feed forming to obtain the pipe fittings meeting the process requirements; Statistically accumulate the number of forming times, the cumulative value of the forming radial distance, and the cumulative value of the forming axial distance; Take the historically statistically accumulated number of forming times, the cumulative value of the forming radial distance, and the cumulative value of the forming axial distance as the initial samples and input them into the machine model for learning to construct a metal incremental forming theoretical model; Input the real-time initial pipe wall thickness values and initial pipe wall stress values marked with different contact starting points into the metal incremental forming theoretical model to output the forming force and the pipe wall thickness reduction amount in the deformation region during the single-point incremental forming of the metal tube.

4. The production quality inspection method of a stepped niobium target tube according to claim 3, characterized in that, In the said S3, it includes: S31. Obtain the width of the arc of the outer pipe wall of the cross-section in contact with the forming area. When the width is less than the preset threshold, perform the single-point incremental forming simulation analysis in step S32; otherwise, generate a warning signal; S32. Obtain the equivalent stress distribution nephograms of the forming force and the pipe wall thickness reduction amount in the deformation region during the single-point incremental forming of different contact starting points at different completion ratios; S33. Collect the energy value of the equivalent stress distribution nephogram and judge the high-energy value distribution within the grid cell: If the high-energy value distribution exceeds the preset interval, a warning signal is generated; If the high-energy value distribution is less than the preset interval, continue the simulation.

5. The production quality inspection method of a stepped niobium target tube according to claim 4, characterized in that, The method for obtaining the width of the arc of the outer pipe wall of the cross-section in contact with the forming area is as follows: According to the relationship between the wall thickness changes during the tube incremental forming process: The wall thickness reduction amount: Since , has a very small value, then is:[[]] When : Among them, ; The width of the arc of the outer pipe wall of the cross-section in contact with the forming area is: Among them, is the change ratio of the wall thickness of the tube wall; is the rotation radius of the forming device shaft; is the initial radius of the inner tube; is the rotation angle of the forming device shaft; is the rotation angle of the inner tube shaft; is the initial wall thickness; is the wall thickness at the vertex of the arc; is the wall thickness reduction; is the wall thickness deviation value.

6. The production quality inspection method of a stepped niobium target tube according to claim 5, characterized in that, The calculation process of the ratio of the forming force and the wall thickness reduction amount in the deformation area during single-point incremental forming is: Among them, is the single-point incremental forming proportionality coefficient; is the ratio of the wall thickness reduction to the initial wall thickness; the component force in the three-dimensional component forces on the contact surface between the pipe wall and the tool wheel; the component force in the three-dimensional component forces on the contact surface between the pipe wall and the tool wheel; the component force in the three-dimensional component forces on the contact surface between the pipe wall and the tool wheel; the wall thickness reduction at different contact starting points of the pipe wall material in the deformation zone.

7. The production quality inspection method of a stepped niobium target tube according to claim 6, characterized in that, The method for obtaining the energy value of the equivalent stress distribution nephogram is: Obtain the single-point incremental forming ratio coefficient At the set values respectively , , , The equivalent stress distribution nephogram of the lower pipe wall forming area; among them < < < ; Based on the energy balance equation, obtain the equivalent stress values in different grid cells, and obtain the RGB color area and color interval for displaying the equivalent stress values; Collect the average value of the red components of the pixel points within each grid cell in the RGB color area , the average value of the green components and the average value of the blue components ; According to , and Determine the energy value range of the deformation area based on the numerical value and color range change rules 8. A production quality inspection method for a stepped niobium target tube according to claim 7, characterized in that, The judgment of the high-energy value distribution within the grid cell: Statistically within the deformed area the red components within 、 、 , the green components within 、 、 , the blue components within 、 、 ; among which, , , ∈ ; Each color in the deformation region corresponds to , interval combination, and each color corresponds to an energy range; According to , and the color distribution of the deformation region is determined according to the combination of color intervals where the numerical values are located, and the combination where the color distribution of the deformation region exceeds the interval is determined as a high energy value.

9. A production quality inspection system for a stepped niobium target tube, characterized in that, For implementing the production quality inspection method of a stepped niobium target tube according to any one of claims 1-8, the system includes: An image acquisition module, configured to preset multiple contact starting points of the forming device according to the forming conditions: Respectively obtain the regional images corresponding to the first contact starting point (11) of the first stepped pipe wall (1), the second contact starting point (21) of the second stepped pipe wall (2), and the third contact starting point (33) of the inner pipe wall (3) of the historical stepped niobium target tube; An image analysis module, configured to obtain the pipe wall stress distribution diagram corresponding to each regional image according to the forming control process of each historical contact starting point, and obtain the pipe wall thickness value and the pipe wall stress value of the vertical cross-section at the pipe orifice position where the regional image is located; the pipe wall stress value includes the pipe inner wall stress value and the pipe outer wall stress value; A model simulation module, configured to perform machine training on the real-time initial pipe wall thickness values and initial pipe wall stress values of different contact starting points based on the principle of metal tube incremental forming, set the grid cell specifications, and perform single-point incremental forming simulation analysis on the inner and outer pipe walls after setting the grid cell specifications; A result detection module, configured to judge the uniformity of the incremental changes of the inner and outer pipe walls according to the single-point incremental forming simulation analysis result, and obtain the production quality inspection result.

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