High-temperature ion source ion sampling interface with built-in phase change working medium heat convection system

Abstract

The invention discloses a high-temperature ion source ion sampling interface with a built-in phase change working medium heat convection system, and relates to the technical field of high-temperature plasma source and ion or atom detection interface application. The orifice is formed in the center of the interface main body and is used for accessing high-temperature plasma; the interface center edge part is arranged on the periphery of the orifice and is used for being in direct contact with high-temperature plasma; the invention relates to a phase-change heat exchanger which comprises a connector center edge part, a heat convection system is arranged on the periphery edge part of the periphery of the connector center edge part, the heat convection system comprises one or more closed-loop cavities, the closed-loop cavities are filled with filler, and phase-change working media are injected into the closed-loop cavities. The invention aims to solve the problems of difficulty in heat dissipation, limited material selection and the like of the ion sampling interface of the high-temperature ion source.

Description

Technical Field

[0001] The present invention relates to the technical field of high-temperature plasma source and ion or atom detection interface applications, and particularly relates to a high-temperature ion source ion sampling interface with an internal phase change working fluid heat convection system. Background Art

[0002] Most existing high-temperature plasma source interfaces adopt a solid metal cone structure. Its tip penetrates into the high-temperature part of the flame, and heat conduction principle is utilized to conduct heat from the tip to the base for heat dissipation. However, the working temperature at the interface part is extremely high, up to several thousand K. Heat conduction alone is not sufficient for effective heat dissipation. Therefore, a water cooling system is usually combined to reduce the interface temperature to protect the interface device and prevent problems such as thermal deformation, stress deformation, aggravated overheating corrosion or damage.

[0003] Due to the high working temperature and the need to withstand a complex working environment, the requirements for the raw materials of the interface and the materials of the rear-end vacuum seal are extremely harsh, which greatly limits the range of material selection. To ensure the durability of the interface, platinum and nickel with strong corrosion resistance are often selected for the existing solid metal cone structure, and at the same time, the water cooling efficiency needs to be enhanced.

[0004] As an important channel for the ion source target to enter the detector, the performance of the interface cone is directly related to the detection performance of the instrument. And it is in a complex working environment for a long time and is prone to wear, which leads to frequent maintenance of the instrument and thus high instrument maintenance costs. Summary of the Invention

[0005] Aiming at the problems of difficult heat dissipation and limited material selection of the high-temperature ion source ion sampling interface in the prior art, the present invention provides a high-temperature ion source ion sampling interface with an internal phase change working fluid heat convection system, in which a heat convection system of the phase change working fluid is arranged inside the high-temperature ion source ion sampling interface, and the characteristics of the phase change working fluid and the heat convection principle are utilized to cool the interface.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A high-temperature ion source ion sampling interface, comprising:

[0008] An interface body;

[0009] An orifice provided at the center of the interface body, the orifice being used for accessing high-temperature plasma;

[0010] An interface center edge part provided on the outer periphery of the orifice, the interface center edge part being used for directly contacting high-temperature plasma;

[0011] A peripheral edge portion disposed around the outer periphery of the central edge portion of the interface, wherein a heat convection system is built into the central edge portion of the interface that extends to the peripheral edge portion, and the heat convection system includes one or more closed-loop cavities filled with a filler and injected with a phase change working fluid.

[0012] For the high-temperature ion source ion sampling interface as described above, further, a step is provided at the edge of the peripheral edge portion.

[0013] For the high-temperature ion source ion sampling interface as described above, further, the heat convection system is a plurality of radiation-type linear closed-loop cavities, or the heat convection system is one and only one annular closed-loop cavity, or the heat convection system is a plurality of radiation-type horn-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type spiral sealed cavities, or the heat convection system is a plurality of radiation-type water-drop-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type necklace-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type lightning-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type serpentine sealed cavities, or the heat convection system is a plurality of radiation-type concentric-circle closed-loop cavities.

[0014] For the high-temperature ion source ion sampling interface as described above, further, the central edge portion of the interface, the peripheral edge portion, and the step are all made of metal or non-metal materials. The metal materials include one of tungsten, platinum, gold, copper, silver, nickel, aluminum, or an alloy thereof, and the non-metal materials include one of alumina or aluminum nitride, and an alloy oxide thereof.

[0015] For the high-temperature ion source ion sampling interface as described above, further, the filler includes one of high-temperature resistant powder or fiber materials.

[0016] For the high-temperature ion source ion sampling interface as described above, further, the phase change working fluid includes an inorganic liquid or an organic liquid single substance or mixture. Among them, the inorganic liquid includes deionized water, and the organic liquids include one or more of methanol, ethanol, acetone, naphthalene, propylene glycol, glycerol, menthol, polyethylene glycol solution, polyvinyl alcohol solution, HFE7X00, R113, R134a, R1233zd, and R1336mzz.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: The prior art uses circulating water cooling and heat conduction between working fluids to cool the interface. The circulating water takes away heat, and the working fluid transfers the heat of the interface through heat conduction. However, this method has limited effects when facing the thousands of K high temperature of high-temperature plasma, and it also causes great limitations on the selection of interface raw materials and the materials of the rear-end vacuum seals. Because it is necessary to take into account high-temperature resistance, corrosion resistance, etc., the material selection range is narrow and the cost is high.

[0018] The present invention constructs a thermal convection system inside the interface, utilizing the characteristics of a phase-change medium. When the interface is heated, the phase-change medium absorbs heat and undergoes a phase change, changing from liquid to gas. The volume expansion causes it to flow from the high-temperature area to the low-temperature area in the cavity, forming thermal convection. The gaseous medium releases heat in the low-temperature area and turns back into liquid, and returns to the high-temperature area with the help of capillary action. This cycle continues, quickly conducting the heat of the interface along the temperature gradient. Compared with simple heat conduction of solid metal materials, thermal convection has a better thermal conductivity and can dissipate heat more efficiently.

[0019] Due to the high heat dissipation efficiency of the present invention, the requirements for high temperature resistance and corrosion resistance of the interface material are relatively reduced. Expensive and limited materials such as platinum and nickel, which are often relied on in the prior art, are no longer the only choice. More types of materials can be selected, including some low-cost metals, alloys, etc., which broadens the selection range of raw materials and reduces material costs while ensuring interface performance.

[0020] The present invention can more quickly reduce the temperature of the high-temperature ion source ion sampling interface, avoid thermal deformation, stress deformation and overheating corrosion of the interface due to high temperature, and effectively extend the service life of the interface. This reduces the loss and replacement frequency of the interface, reduces the maintenance cost of the instrument, and improves the use efficiency of the instrument, achieving cost reduction and efficiency improvement. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 This is a side view of the high temperature ion source ion sampling interface of Example 1 of the present invention, and the components include: 1. Interface body; 2. Orifice; 3. Center edge portion of the interface; 5. Peripheral edge portion; 6. Step.

[0023] Figure 2 The cross-sectional view (left) and sectional view (right) of the high-temperature ion source ion sampling interface of Example 1 of the present invention, the component reference numerals in the figure include: 1. Interface body; 2. Orifice; 3. Center edge portion of the interface; 4. Radiant linear thermal convection system; 5. Surrounding edge portion; 6. Step.

[0024] Figure 3 This is a front view of the high-temperature ion source ion sampling interface of Example 2 of the present invention, and the component reference numerals in the figure include: 1. interface body; 2. orifice; 3. central edge of the interface; 5. peripheral edge; 6. step.

[0025] Figure 4Cross-sectional view (left) and sectional view (right) of the high-temperature ion source ion sampling interface for Embodiment 2 of the present invention. The reference numerals of the components in the figure include: 1. Interface body; 2. Orifice; 3. Interface center edge; 5. Peripheral edge part; 16. Annular heat convection system.

[0026] Figure 5 Rear view of the high-temperature ion source ion sampling interface for Embodiment 2 of the present invention. The reference numerals of the components in the figure include: 1. Interface body; 2. Orifice; 5. Peripheral edge part; 6. Step.

[0027] Figure 6 Schematic diagram of the horn-shaped closed-loop cavity for Embodiment 3 of the present invention. The reference numerals of the components in the figure include: 8. Phase change working fluid; 9. Horn-shaped channel; 10. Cavity; 18. Horn-shaped closed-loop cavity.

[0028] Figure 7 Planar schematic diagram of the radiative horn-shaped heat convection system for Embodiment 3 of the present invention. The reference numerals of the components in the figure include: 8. Phase change working fluid; 9. Horn-shaped channel; 10. Cavity; 17. Radiative horn-shaped heat convection system; 18. Horn-shaped closed-loop cavity.

[0029] Figure 8 Schematic diagram of the spiral-shaped sealed cavity for Embodiment 4 of the present invention. The reference numerals of the components in the figure include: 8. Phase change working fluid; 10. Cavity; 11. Spiral-shaped channel.

[0030] Figure 9 Schematic diagram of the water-drop-shaped closed-loop cavity for Embodiment 5 of the present invention. The reference numerals of the components in the figure include: 12. Water-drop-shaped channel; 21. Water-drop-shaped closed-loop cavity.

[0031] Figure 10 Schematic diagram of the necklace-shaped closed-loop cavity for Embodiment 6 of the present invention. The reference numerals of the components in the figure include: 8. Phase change working fluid; 16. Necklace-shaped channel; 20. Necklace-shaped closed-loop cavity.

[0032] Figure 11 Schematic diagram of the lightning-shaped heat convection system for Embodiment 7 of the present invention. The reference numerals of the components in the figure include: 8. Phase change working fluid; 13. Lightning-shaped channel; 22. Lightning-shaped closed-loop cavity.

[0033] Figure 12 Schematic diagram of the snake-shaped sealed cavity for Embodiment 8 of the present invention. The reference numerals of the components in the figure include: 8. Phase change working fluid; 10. Cavity; 14. Snake-shaped channel; 23. Snake-shaped sealed cavity.

[0034] Figure 13 Schematic diagram of the concentric-circle closed-loop cavity for Embodiment 9 of the present invention. The reference numerals of the components in the figure include: 15. Concentric-circle channel; 24. Concentric-circle closed-loop cavity. Detailed implementation manners

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application.

[0036] Embodiment:

[0037] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned accompanying drawings are used to distinguish similar objects, and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present invention described here can be implemented in an order other than those illustrated or described here. In addition, the terms "comprising" and "having" in the embodiments of the present invention and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0038] In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In addition, unless otherwise clearly specified and defined, the terms "mounted", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] A high-temperature ion source ion sampling interface provided by an embodiment of the present invention includes:

[0040] An interface body;

[0041] An orifice provided at the center of the interface body, and the orifice is used to access high-temperature plasma; specifically, the orifice is located at the center of the interface body and is a channel for the ion source target to enter. Its thickness is between 0.01 nm and 20 mm, and the size between two points on the edge is between 0.1 nm and 10 mm. Such a size design is related to the transmission characteristics of high-temperature plasma, ensuring the smooth passage of the target while also affecting heat transfer.

[0042] The interface center edge part is arranged on the outer periphery of the orifice, and the interface center edge part is used to directly contact the high-temperature plasma; specifically, the outer periphery of the orifice is the interface center edge part, which directly contacts the high-temperature plasma and receives a large amount of heat.

[0043] The peripheral edge part is arranged on the outer periphery of the interface center edge part. The interface center edge part extends to the peripheral edge part where a heat convection system is built in. The heat convection system includes one or more closed-loop cavities, and the inside of the closed-loop cavities is filled with packing and a phase change working fluid is injected. Specifically, the peripheral edge part around the interface center edge part is used for heat dissipation. Steps can be selectively provided or not provided at the edge of the peripheral edge part, and the presence or absence of the steps may affect the connection method and stability between the interface and other components. The heat convection system is located at the part where the interface center edge part extends to the peripheral edge part and includes one or more closed-loop cavities. These cavities can be independent or work independently of each other. The cavity structures are diverse, such as spiral structures, horn-shaped structures, etc. Different structural designs will affect the efficiency and uniformity of heat convection to adapt to different working scenarios and heat dissipation requirements. The closed-loop cavity can be used as a buffer cavity or filled with packing and a phase change working fluid can be injected inside. The packing is selected from high-temperature resistant powder or fiber materials, and its porous structure has a capillary effect. Preferred materials such as quartz wool, metals, inorganic compounds, and polymer polymers can assist the phase change working fluid to infiltrate back to the orifice in the cavity. The phase change working fluid is divided into inorganic liquids and organic liquid elements or mixtures. Deionized water is the preferred inorganic liquid, and organic liquids such as methanol, ethanol, acetone, naphthalene, propylene glycol, glycerol, menthol, polyethylene glycol solution, polyvinyl alcohol solution, HFE7X00, R113, R134a, R1233zd, and R1336mzz are also widely used. They achieve efficient heat dissipation during the phase change process of absorbing and releasing heat. The interface center edge part, the peripheral edge part, and the steps are all made of metal materials and non-metal materials. The metal materials cover various metals such as tungsten, platinum, and gold, and the non-metal materials include metal oxides (such as alumina and aluminum nitride) and various alloy oxides. These materials have good high-temperature resistance and corrosion resistance, can meet the working requirements of the interface in the high-temperature plasma environment, and can be prepared by existing processes, reducing the production difficulty and cost.

[0044] The working principle of a high-temperature ion source ion sampling interface provided by the embodiment is introduced below:

[0045] When the high-temperature plasma is working, since the interface center directly faces the high-temperature plasma, it receives more heat than the peripheral edge part, which results in the temperature of the interface center being significantly higher than that of the peripheral edge part, thus generating a large temperature difference between the center and the peripheral edge part.

[0046] After the phase change working fluid filled inside the interface absorbs a large amount of heat at the center of the interface, it will undergo a phase change, transforming from a liquid state to a gaseous state. This phase change process requires the absorption of a large amount of heat, thereby achieving the effect of evaporation refrigeration. Due to factors such as density changes, the gaseous phase change working fluid will flow from the interface center with a high temperature to the surrounding edge parts with a low temperature. During this process, heat is rapidly conducted to the surrounding edge parts along with the flow of the phase change working fluid, effectively reducing the temperature of the interface center.

[0047] At the surrounding edge parts, the gaseous phase change working fluid will release heat through phase change and re-transform into a liquid state due to the decrease in temperature. The liquid phase change working fluid infiltrates back to the orifice through a specific structure (such as a channel filled with a material having capillary effect) by means of capillary action. The liquid phase change working fluid returning to the orifice can absorb the heat at the interface center again, starting a new round of phase change, heat conduction, and infiltration process. Thus, a stable heat convection system is formed, continuously dissipating the heat at the interface center and achieving the function of rapid heat dissipation.

[0048] Example 1

[0049] As Figure 1 and Figure 2 shown, in Example 1, the heat convection system is a number of radiation-type linear closed-loop cavities. Specifically, the high-temperature ion source ion sampling interface of this example includes an interface body 1, an orifice 2, an interface center edge part 3, a radiation-type linear heat convection system 4, a surrounding edge part 5, and a step 6.

[0050] The center of the interface body 1 is the orifice 2. The periphery of the orifice 2 is the interface center edge part 3. The periphery of the interface center edge part 3 is the surrounding edge part 5. Steps 6 may or may not be provided at the edge of the surrounding edge part 5.

[0051] The interface center edge part 3, the surrounding edge part 5, and the step 6 are all made of metal materials. The surrounding edge part 5 and the step 6 are made of the same metal material and non-metal material. The metal materials include one or various alloys of tungsten, platinum, gold, copper, silver, nickel, and aluminum. The various alloys refer to substances with metal properties that contain at least one of the above metal materials. The non-metal materials include one of aluminum oxide or aluminum nitride and one of various alloy oxides. The thickness of the orifice 2 is 0.01 nm to 20 mm, and the dimension between two points on the orifice edge is 0.1 nm to 10 mm.

[0052] In this embodiment, a radiation-type linear heat convection system 4 is built in the peripheral edge part 5. The radiation-type linear heat convection system 4 has a number of radiation-type linear closed-loop cavities, and the cavities are filled with packing materials and injected with phase change working fluids. The packing materials are high-temperature resistant powder or fiber materials, which are porous structures and have capillary effects. Quartz wool, metal, inorganic compounds, and polymer polymers are preferred materials. The phase change working fluids are inorganic liquids or organic liquid elements or mixtures. Among them, deionized water is the preferred material for inorganic liquids, and one or more of methanol, ethanol, acetone, naphthalene, propylene glycol, glycerol, menthol, polyethylene glycol solution, polyvinyl alcohol solution, HFE7X00, R113, R134a, R1233zd, and R1336mzz are the preferred materials for organic liquids. In the radiation-type linear heat convection system 4, the linear sealed cavities are independent of each other.

[0053] Embodiment 2

[0054] As Figures 3 to 5 shown, in Embodiment 2, the heat convection system is a single annular closed-loop cavity. Specifically, compared with Embodiment 1, the high-temperature ion source ion sampling interface of this embodiment is only different in that the annular heat convection system 16 in this embodiment replaces the radiation-type linear heat convection system 4 in Embodiment 1. Here, only the different features will be described.

[0055] In this embodiment, an annular heat convection system 16 is built in the peripheral edge part 5. The annular heat convection system 16 has a single annular closed-loop cavity, and the cavity is filled with an appropriate amount of packing material and injected with an appropriate amount of phase change working fluid.

[0056] Embodiment 3

[0057] As Figure 6 and Figure 7 shown, in Embodiment 3, the heat convection system is a number of horn-shaped closed-loop cavities. Specifically, compared with Embodiment 1, the high-temperature ion source ion sampling interface of this embodiment is only different in that the radiation-type horn-shaped heat convection system 17 in this embodiment replaces the radiation-type linear heat convection system 4 in Embodiment 1. Here, only the different features will be described.

[0058] In this embodiment, a radiation-type horn-shaped heat convection system 17 is built in the peripheral edge part 5. As Figure 7 shown, the radiation-type horn-shaped heat convection system 17 is composed of a number of horn-shaped closed-loop cavities 18, and is arranged radially around the peripheral part 3 of the interface center in the manner of Figure 7 . The structure of the horn-shaped closed-loop cavity 18 is as Figure 6As shown, packing is filled in the horn-shaped channel 9 of the horn-shaped closed-loop cavity 18, a phase change working fluid 8 is filled in the narrow-mouth part of the horn-shaped closed-loop cavity 18, a cavity 10 is provided in the wide-mouth part of the horn-shaped closed-loop cavity 18 and serves as a pneumatic buffer zone; the horn-shaped channel 9, the filled phase change working fluid 8 and the cavity 10 communicate with each other. Among the horn-shaped closed-loop cavities 18 in the radiation-type horn-shaped heat convection system 17, each is independent of the others.

[0059] Embodiment 4

[0060] As Figure 8 shown, in Embodiment 4, the heat convection system is a plurality of spiral sealed cavities. Specifically, compared with Embodiment 3, the high-temperature ion source ion sampling interface of this embodiment is only different in that, in this embodiment, the spiral sealed cavity 19 replaces the horn-shaped closed-loop cavity 18 of Embodiment 3. Here, only the different characteristics are described in detail.

[0061] In this embodiment, a radiation-type spiral heat convection system is built in the peripheral edge part 5. The radiation-type spiral heat convection system is composed of a plurality of spiral sealed cavities 19 and is arranged around the peripheral edge part 3 of the interface center in a radiation manner with reference to Figure 7 the method. The structure of the spiral sealed cavity 19 is as Figure 8 shown. In the spiral channel 11 of the spiral sealed cavity 19, packing is filled, a phase change working fluid 8 is filled at the central end of the spiral channel 11, and a cavity 10 is provided at the other end and serves as a pneumatic buffer zone; the spiral channel 11, the filled phase change working fluid 8 and the cavity 10 communicate with each other.

[0062] Embodiment 5

[0063] As Figure 9 shown, in Embodiment 5, the heat convection system is a plurality of water-drop-shaped closed-loop cavities. Specifically, compared with Embodiment 3, the high-temperature ion source ion sampling interface of this embodiment is only different in that, in this embodiment, the water-drop-shaped closed-loop cavity 21 replaces the horn-shaped closed-loop cavity 18 of Embodiment 3. Here, only the different characteristics are described in detail.

[0064] In this embodiment, a radiation-type water-drop-shaped heat convection system is built in the peripheral edge part 5. The radiation-type water-drop-shaped heat convection system is composed of a plurality of water-drop-shaped closed-loop cavities 21 and is arranged around the peripheral edge part 3 of the interface center in a radiation manner with reference to Figure 7 the method. The structure of the water-drop-shaped closed-loop cavity 21 is as Figure 9 shown. The water-drop-shaped channel 12 inside the cavity is filled with packing and injected with a phase change working fluid. Among the water-drop-shaped channels with different diameters in the water-drop-shaped closed-loop cavity 21, each is independent of the others.

[0065] Embodiment 6

[0066] AsFigure 10 As shown in the figure, in Embodiment 6, the heat convection system is a number of necklace-shaped closed-loop cavities. Specifically, compared with the high-temperature ion source ion sampling interface in Embodiment 3, the difference is only that in this embodiment, the necklace-shaped closed-loop cavity 16 replaces the horn-shaped closed-loop cavity 18 in Embodiment 3. Here, only the characteristics of the difference will be described.

[0067] In this embodiment, a radiation-type water-drop-shaped heat convection system is built in the peripheral edge part 5. The radiation-type necklace-shaped heat convection system is composed of a number of necklace-shaped closed-loop cavities 20, and is arranged around the central edge part 3 of the interface in a radiation manner with reference to Figure 7 the method shown in the figure. The structure of the necklace-shaped closed-loop cavity 16 is as Figure 10 shown in the figure. The necklace-shaped channel 16 of the necklace-shaped closed-loop cavity 20 is filled with packing, the pendant part of the necklace is filled with a phase change working fluid 8, and the necklace-shaped channel 16 communicates with the phase change working fluid 8 filled.

[0068] Embodiment 7

[0069] As Figure 11 shown in the figure, in Embodiment 7, the heat convection system is a number of lightning-shaped closed-loop cavities. Specifically, compared with the high-temperature ion source ion sampling interface in Embodiment 3, the difference is only that in this embodiment, the lightning-shaped closed-loop cavity 22 replaces the horn-shaped closed-loop cavity 18 in Embodiment 3. Here, only the characteristics of the difference will be described.

[0070] In this embodiment, a radiation-type lightning-shaped heat convection system is built in the peripheral edge part 5. The radiation-type lightning-shaped heat convection system is composed of a number of lightning-shaped closed-loop cavities 22, and is arranged around the central edge part 3 of the interface in a radiation manner with reference to Figure 7 the method shown in the figure. The structure of the lightning-shaped closed-loop cavity 22 is as Figure 11 shown in the figure. The lightning-shaped channel 13 of the lightning-shaped closed-loop cavity 220 is filled with packing, the tip part of the lightning-shaped closed-loop cavity is filled with a phase change working fluid 8, and the necklace-shaped channel 12 communicates with the phase change working fluid 8 filled.

[0071] Embodiment 8

[0072] As Figure 12 shown in the figure, in Embodiment 8, the heat convection system is a number of snake-shaped sealed cavities. Specifically, compared with the high-temperature ion source ion sampling interface in Embodiment 4, the difference is only that in this embodiment, the snake-shaped closed-loop cavity 23 replaces the spiral sealed cavity 19 in Embodiment 4. Here, only the characteristics of the difference will be described.

[0073] In this embodiment, a radiation-type snake-shaped heat convection system is built in the peripheral edge part 5. The radiation-type snake-shaped heat convection system is composed of a number of snake-shaped sealed cavities 23, and is arranged with reference to Figure 7They are arranged radially around the peripheral part 3 of the interface center in the following manner. The structure of the serpentine sealing cavity 23 is as Figure 11 shown. The serpentine channel 14 of the serpentine sealing cavity 23 is filled with packing material. The head of the serpentine sealing cavity 23 is filled with the phase change working fluid 8, and a cavity 10 is provided at the tail as a pneumatic buffer zone. The serpentine channel 14, the phase change working fluid 8 filled therein, and the cavity 10 communicate with each other.

[0074] Embodiment 9

[0075] As Figure 13 shown, in Embodiment 9, the heat convection system is a plurality of concentric circular closed cavities. Specifically, compared with Embodiment 3, the high-temperature ion source ion sampling interface in this embodiment is only different in that, in this embodiment, the concentric circular closed cavity 24 replaces the horn-shaped closed cavity 18 in Embodiment 3. Here, only the different features will be described in detail.

[0076] In this embodiment, a radially arranged concentric circular heat convection system is built in the peripheral edge part 5. The radially arranged concentric circular heat convection system is composed of a plurality of concentric circular closed cavities 24, and is arranged radially around the peripheral part 3 of the interface center with reference to Figure 7 the following manner. The structure of the concentric circular closed cavity 24 is as Figure 13 shown. The concentric circular channels 15 inside the cavity are filled with an appropriate amount of packing material and an appropriate amount of phase change working fluid 8 is injected. The concentric circles with different diameters in the concentric circular closed cavity 24 are independent of each other.

[0077] It should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0078] In the present invention, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature may mean that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0079] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0080] The above embodiments are only for illustrating the technical concept and characteristics of the present invention, and the purpose is to enable ordinary technicians in the art to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. All equivalent changes or modifications made according to the essence of the content of the present invention should be covered within the protection scope of the present invention.

Claims

1. A high-temperature ion source ion sampling interface, characterized in that Comprising: An interface body; An orifice disposed at the center of the interface body, the orifice being used for accessing high-temperature plasma; An interface center edge portion disposed on the outer periphery of the orifice, the interface center edge portion being used for directly contacting high-temperature plasma; A peripheral edge portion disposed on the outer periphery of the interface center edge portion, a heat convection system being built in the interface center edge portion extending to the peripheral edge portion, the heat convection system comprising one or more closed-loop cavities, and a filler being filled in the closed-loop cavities and a phase change working fluid being injected.

2. The high-temperature ion source ion sampling interface according to claim 1, characterized in that A step is provided at the edge of the peripheral edge portion.

3. The high-temperature ion source ion sampling interface according to claim 1, characterized in that The heat convection system is a plurality of radiation-type linear closed-loop cavities, or the heat convection system is one and only one annular closed-loop cavity, or the heat convection system is a plurality of radiation-type horn-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type spiral sealed cavities, or the heat convection system is a plurality of radiation-type water-drop-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type necklace-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type lightning-shaped closed-loop cavities, or the heat convection system is a plurality of radiation-type serpentine sealed cavities, or the heat convection system is a plurality of radiation-type concentric-circle closed-loop cavities.

4. The high-temperature ion source ion sampling interface according to claim 2, characterized in that, The interface center edge portion, the peripheral edge portion and the step are all made of a metal material or a non-metal material. The metal material includes one of tungsten, platinum, gold, copper, silver, nickel, aluminum or one of various alloys, and the non-metal material includes one of aluminum oxide or aluminum nitride and one of various alloy oxides.

5. The high-temperature ion source ion sampling interface according to claim 1, characterized in that, The filler includes one of high-temperature resistant powder or fiber materials.

6. The high-temperature ion source ion sampling interface according to claim 1, wherein The phase change working fluid includes an inorganic liquid or an organic liquid simple substance or a mixture. Among them, the inorganic liquid includes deionized water, and the organic liquid includes one or more of methanol, ethanol, acetone, naphthalene, propylene glycol, glycerol, menthol, polyethylene glycol solution, polyvinyl alcohol solution, HFE7X00, FR113, R134a, R1233zdfFR1336mzz.

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