Mechanical device capable of realizing three-dimensional motion of magnetic array of vacuum internal undulator

Abstract

The invention discloses a mechanical device capable of realizing three-dimensional motion of a magnetic array of a vacuum internal undulator, and the mechanical device comprises a layered supporting structure which comprises an upper-layer mounting plate and a lower-layer mounting plate which are superposed through an orthogonal linear guide rail; the three-dimensional movement mechanism comprises an x-direction movement mechanism, a y-direction movement mechanism and a z-direction movement mechanism; the anti-interference mechanism is used for separating the x-direction motion path from the z-direction motion path through sliding connection; the copper foil dynamic connecting mechanism is used for realizing continuous electric connection between the moving magnetic array and the static flange plate; wherein motion decoupling is achieved through the anti-interference mechanism, and the mechanical device can achieve linear motion of the magnetic array in the x direction, the y direction and the z direction. Through the three-dimensional motion mechanism, the anti-interference mechanism and the copper foil dynamic connection mechanism, the problems that a traditional undulator magnetic array is single in motion and copper foil is prone to breakage are solved, the adaptability, stability and precision of equipment are remarkably improved, and the undulator has important engineering application value.

Description

Technical Field

[0001] The present invention relates to the field of vacuum undulator devices, and more particularly to a mechanical mechanism capable of realizing three-dimensional movement of a magnetic array in a vacuum undulator. Background Art

[0002] A vacuum undulator is a key device for synchrotron radiation light sources and free-electron lasers. The X-rays generated when an electron beam passes through the center of the undulator magnetic array have extremely important applications in many fields such as physics, chemistry, and materials. Currently, the magnetic array of a vacuum undulator can only move in the vertical direction, i.e., the y-direction, to adjust the gap between the upper magnetic array and the lower magnetic array. As Figure 1 shown, the upper magnetic array 1' and the lower magnetic array 2' are located in the vacuum chamber 3', symmetrically installed with respect to the XOZ horizontal plane. The outer contour of the magnetic array is rectangular, generally within 4 meters in length, and several tie rods 4' are used to pull the magnetic array to move in the y-direction.

[0003] According to the requirements of physical design, strip-shaped copper foils 5' with a thickness of about 40 - 50 microns need to be laid on the surfaces of the upper and lower magnetic arrays from beginning to end. As Figure 1 shown, the copper foils are adsorbed on the surface of the magnetic array under the action of magnetic force. The head and tail ends of the copper foils need to be connected to the vacuum chamber flange to form a path, so as to achieve the purpose of reducing impedance. For the currently y-direction-only moving magnetic array, a dynamic copper foil connection mechanism can connect the static vacuum chamber flange to the copper foil on the surface of the moving magnetic array. As Figure 2 shown, the copper foils 5' adsorbed on the surfaces of the upper magnetic array 1' and the lower magnetic array 2' are connected to the copper plates 6' at the end faces. The copper plates 6' are connected to the copper sheets 7'. The thickness of the copper sheets 7' is about a few millimeters, and the surface is bent into an arc shape and can be bent and straightened within a certain range. The other end of the copper sheet 7' is connected to the vacuum chamber flange 8'. In this way, when the upper and lower magnetic arrays move in the vertical direction, the copper sheet 7' can be switched between the bent and straightened states to connect the moving magnetic array to the static vacuum chamber flange.

[0004] However, the fact that the magnetic array can only move in the y-direction can no longer meet the current usage requirements of the undulator. The magnetic array also needs to add movements in the horizontal direction (x-direction) and the electron beam direction (z-direction). At the same time, the dynamic copper foil connection mechanism also needs to be improved to be coordinated with the three-direction movement of the magnetic array.

[0005] Therefore, it is necessary to develop a mechanical mechanism capable of realizing three-dimensional movement of a magnetic array in a vacuum undulator. Summary of the Invention

[0006] The purpose of the present invention is to provide a mechanical device capable of realizing three-dimensional movement of a magnetic array in a vacuum undulator, so as to solve the problem that the magnetic array of the vacuum undulator in the prior art can only move in the y-direction and cannot meet the current requirements.

[0007] To solve the above problems, the present invention adopts the following technical solutions:

[0008] Provide a mechanical device capable of realizing three-dimensional motion of a magnetic array in a vacuum. The mechanical device includes: a layered support structure, which includes an upper mounting plate and a lower mounting plate that form a sliding foundation in the x-z plane by being stacked through orthogonal linear guide rails; a three-dimensional motion mechanism, which includes: an x-direction motion mechanism, a y-direction motion mechanism, and a z-direction motion mechanism, used to realize the x-direction, y-direction, and z-direction motion of the magnetic array; an anti-interference mechanism, which is installed on the layered support structure and separates the x-direction and z-direction motion paths through a sliding connection; and a copper foil dynamic connection mechanism to realize continuous electrical connection between the moving magnetic array and the stationary flange. Among them, motion decoupling is realized through the anti-interference mechanism, the x-direction, y-direction, and z-direction motions of the three-dimensional motion mechanism are independent of each other, and the mechanical device can realize the linear motion of the magnetic array along the x, y, and z directions respectively.

[0009] Preferably, in the layered support structure, the upper mounting plate and the lower mounting plate are stacked in parallel and are slidably connected through x-direction linear guide rails arranged along the x-axis direction, and the magnetic array is fixed to the lower surface of the lower mounting plate.

[0010] Preferably, the y-direction motion mechanism includes: a y-direction servo motor located outside the vacuum chamber; and a pull rod connected to the y-direction servo motor, and the pull rod passes through the vacuum chamber and is connected to the upper mounting plate and the lower mounting plate. When the y-direction servo motor drives the pull rod, it can drive the upper mounting plate, the lower mounting plate, and the magnetic array to perform linear motion along the y-direction.

[0011] Preferably, the z-direction motion mechanism includes: a z-direction transmission rack installed on one side surface of the upper mounting plate along the length direction; a z-direction transmission gear meshing with the z-direction transmission rack, and its gear shaft extends outside the vacuum chamber; and a z-direction linear guide rail fixed to the upper surface of the upper mounting plate to guide the upper mounting plate to slide along the z-axis direction.

[0012] Preferably, the x-direction motion mechanism includes: an x-direction transmission rack installed on the upper surface of the lower mounting plate, whose installation direction is parallel to the x-direction linear guide rail and its end extends outside the lower mounting plate; and an x-direction transmission gear meshing with the x-direction transmission rack, and its gear shaft extends out of the vacuum chamber from inside the vacuum chamber.

[0013] Preferably, the anti-interference mechanism includes: a crossbeam assembly fixed on the movable slider of the z-direction linear guide; a pair of anti-interference x-direction linear guides, whose static rails are installed on the crossbeam assembly, and the movable slider is fixedly connected to the x-direction transmission rack; a connecting plate connecting the x-direction transmission rack and the movable slider of the anti-interference x-direction linear guide to keep the x-direction transmission rack stationary when the magnetic array moves along the z-direction; an anti-interference z-direction linear guide, whose static rail is installed on the long side of the lower mounting plate, and the connecting plate is also installed on the movable slider of the anti-interference z-direction linear guide; when the z-direction motion mechanism drives the upper mounting plate to move along the z-axis, the x-direction transmission rack is kept stationary by the anti-interference z-direction linear guide to avoid interfering with the z-direction movement.

[0014] Preferably, the copper foil dynamic connection mechanism includes: a rolling shaft, whose outer surface is wrapped with a strip of copper foil, and spiral springs are installed at both ends to maintain tension; a rolling shaft guide rail, which is installed on the upper mounting plate, and whose movable slider is fixedly connected to the bracket of the rolling shaft, guiding the rolling shaft to slide along the z-axis direction; a spring, one end of which is connected to the rolling shaft bracket and the other end is fixed to the upper mounting plate, providing a pulling force to make the strip of copper foil contact with the end copper plate of the magnetic array; a torsion spring assembly, connecting the rolling shaft and the end copper plate of the magnetic array, compensating for the displacement of the copper foil when the magnetic array moves; a transition copper plate, welded between the strip of copper foil and the copper foil on the surface of the magnetic array, to form a smooth electrical connection.

[0015] Preferably, the strip copper foil is dynamically connected with the vacuum chamber flange and the magnetic array through a rolling shaft, a scroll spring, a spring, a torsion spring, a magnetic array end copper plate and a transition copper plate to ensure that the passage is maintained during three-dimensional movement.

[0016] Preferably, the x-axis transmission gear and the z-axis transmission gear are respectively connected to the servo motor to achieve precise control of the movement of the magnetic array.

[0017] Preferably, the copper foil and the copper foil on the surface of the magnetic array are made of highly conductive copper material with a thickness of 40-50 microns to ensure low-impedance electrical connection.

[0018] According to the present invention, a mechanical device capable of realizing three-dimensional motion of a magnetic array of an intra-vacuum undulator is provided. On the basis of the existing intra-vacuum undulator device, an anti-interference mechanism and a copper foil dynamic connection mechanism are additionally provided through ingenious structural design. The anti-interference mechanism is used to separate the motion paths in the x-direction and the z-direction. The copper foil dynamic connection mechanism is used to connect the magnetic array moving in three directions and a stationary vacuum chamber flange, thereby realizing the linear motion of the magnetic array of the intra-vacuum undulator in three directions, namely, the x-direction, the y-direction and the z-direction, and realizing the connection between the copper foil adsorbed on the surface of the magnetic array and the stationary vacuum chamber flange.

[0019] Compared with the existing technology, the present invention has the following significant beneficial effects:

[0020] 1) Through the design of the anti-interference mechanism, three-dimensional independent movement of the magnetic array is achieved. Breaking through the limitation of traditional technology that can only move in the vertical direction (y-direction), three-dimensional linear movement of the magnetic array in the horizontal direction (x-direction), vertical direction (y-direction), and electron beam direction (z-direction) is realized, meeting the requirements of modern synchrotron radiation light sources and free electron laser devices for multi-dimensional adjustment of the magnetic array.

[0021] 2) Provide a highly stable dynamic connection mechanism for copper foil. The strip-shaped copper foil forms a dynamic connection with the vacuum chamber flange and the magnetic array through a rolling shaft, a volute spring, a spring, a torsion spring, the end copper plate of the magnetic array, and a transition copper plate, ensuring a continuous path during three-dimensional movement. When the magnetic array moves, the strip-shaped copper foil can be automatically stretched or wound, ensuring close contact and avoiding impedance problems. At the same time, the torsion spring and the spring work together to make the copper foil in dynamic contact with the end copper plate of the magnetic array. Even when the magnetic array moves horizontally in the x-direction, the copper foil can still maintain the connection through elastic deformation, solving the limitation that traditional copper sheets can only adapt to vertical movement.

[0022] 3) Compact structure and space optimization. The upper and lower mounting plates are used to carry the magnetic array and the guide rail in layers, effectively utilizing the space inside the vacuum chamber.

[0023] 4) High precision and high flexibility. The three-dimensional motion mechanism can achieve high-precision positioning of the magnetic array, especially suitable for scientific research scenarios that require complex magnetic field adjustment (such as materials science, medical imaging, etc.).

[0024] A mechanical device for realizing three-dimensional motion of the undulator magnetic array in vacuum according to the present invention solves the problems of single motion of the traditional undulator magnetic array and easy fracture of the copper foil through a three-dimensional motion mechanism, an anti-interference mechanism, and a dynamic connection mechanism for copper foil, significantly improving the adaptability, stability, and precision of the device, and having important engineering application value. Description of the Drawings

[0025] Figure 1 It is a schematic structural diagram of the magnetic array of the undulator in vacuum moving in the y-direction in the prior art;

[0026] Figure 2 It is a schematic connection structure diagram of the magnetic array of the undulator in vacuum and the vacuum chamber flange in the prior art;

[0027] Figure 3 It is a schematic diagram of the layered support structure and the anti-interference mechanism of the present invention. Among them, A and B are separate schematic diagrams of the anti-interference mechanism, and C and D are structural diagrams of the layered support structure and the anti-interference mechanism assembled together;

[0028] Figure 4Schematic diagram of the external structure of the magnetic array of the present invention assembled together with the x-direction motion mechanism, y-direction motion mechanism, and z-direction motion mechanism in a vacuum chamber;

[0029] Figure 5 Schematic diagram of the structure of the y-direction motion mechanism of the present invention;

[0030] Figure 6 Schematic diagram of the structure of the z-direction motion mechanism of the present invention, where A is the top view and B is the bottom view;

[0031] Figure 7 Schematic diagram of the structure of the x-direction motion mechanism of the present invention;

[0032] Figure 8 Schematic diagram of the copper foil dynamic connection mechanism of the present invention. The left figure is the overall external shape diagram of the copper foil dynamic connection mechanism, and the right figure is its partial enlarged view;

[0033] Figure 9 Schematic diagram of the structure of the magnetic array, x-direction, y-direction, z-direction motion mechanisms, layered support structure, anti-interference mechanism, and copper foil dynamic connection mechanism of the present invention all integrated on the undulator;

[0034] Among them, the meanings of the reference numerals are as follows:

[0035] 1': upper magnetic array; 2': lower magnetic array; 3': vacuum chamber; 4': tie rod; 5': copper foil; 6': copper plate; 7': copper sheet; 8': vacuum chamber flange; 1: upper magnetic array; 3: vacuum chamber; 10: x-direction motion mechanism; 20: y-direction motion mechanism; 30: z-direction motion mechanism; 40: layered support structure; 50: anti-interference mechanism; 60: copper foil dynamic connection mechanism; 70: magnetic array; 11: x-direction drive rack; 12: x-direction drive gear; 13: gear shaft of the x-direction drive gear; 21: tie rod; 31: z-direction drive rack; 32: z-direction drive gear, 33: gear shaft of the z-direction drive gear; 34: z-direction linear guide; 41: upper mounting plate; 42: lower mounting plate; 43: x-direction linear guide; 51, 51': cross beam; 52: anti-interference x-direction linear guide; 53: connecting plate; 54: anti-interference z-direction linear guide; 61: rolling shaft; 62: rolling shaft guide; 63: spring; 64: strip-shaped copper foil; 65: scroll spring; 66: copper plate at the end face of the magnetic array; 67: torsion spring; 68: copper plate at the bottom of the rotating shaft; 69: copper foil on the surface of the magnetic array. Detailed implementation manners

[0036] The present invention will be further described below in conjunction with specific embodiments. It should be understood that the following embodiments are only used to illustrate the present invention and not to limit the scope of the present invention. Unless otherwise specified, the technical means used in the embodiments are conventional operations in the art or experimental methods recommended by instrument and equipment manufacturers. The reagents and materials used in the embodiments can be obtained from commercial sources unless otherwise specified.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0038] According to the present invention, a mechanical device capable of realizing three-dimensional movement of a magnetic array in a vacuum is provided. The mechanical device mainly includes: an x-direction movement mechanism 10, a y-direction movement mechanism 20, a z-direction movement mechanism 30, a layered support structure 40, an anti-interference mechanism 50, and a copper foil dynamic connection mechanism 60. The details are as follows:

[0039] As Figure 3 shown in C and D of

[0040] As Figure 4 shown, it is a schematic external structure diagram of the x-direction movement mechanism 10, the y-direction movement mechanism 20, and the z-direction movement mechanism 30 assembled outside the vacuum chamber 3. The vacuum chamber 3 is stationary. The four pull rods 21 on the upper mounting plate, the gear shaft 13 of the x-direction transmission gear 12, and the upper ends of the gear shafts 33 of the z-direction transmission gears 32 all extend outside the vacuum chamber 3, and the axial center positions of the six shafts remain unchanged.

[0041] Combined withFigure 4 , Figure 5 As shown in Figure 5 , the y-direction motion mechanism 20 includes: a y-direction servo motor located outside the vacuum chamber; and a pull rod 21 connected to the y-direction servo motor. The pull rod 21 passes through the vacuum chamber 3 and is connected to the moving slider of the z-direction linear guide 34 on the upper mounting plate 41. The axial position of the pull rod 21 remains unchanged all the time. When the y-direction servo motor drives the pull rod, it can drive the upper mounting plate 41, the lower mounting plate 42, and the magnetic array below to move linearly in the y-direction. Four pull rods are shown in the figure, but it should be understood that this is only an example here and not a limitation, and the quantity can be adjusted according to the actual situation.

[0042] When the magnetic array needs to move in the vertical direction (y-direction), the pull rod 21 extending outside the vacuum chamber moves in the vertical direction driven by the servo motor and the lead screw nut transmission mechanism. Subsequently, the pull rod 21 drives the z-direction linear guide 34, the upper mounting plate 41, the x-direction linear guide 43, and the lower mounting plate 42 below to move together in the y-direction, and the magnetic array mounted on the lower surface of the lower mounting plate 42 can thus achieve movement in the y-direction.

[0043] As Figure 6 shown in Figure 6 , the z-direction motion mechanism 30 includes: a z-direction transmission rack 31 mounted on the side surface of the upper mounting plate 41 along the length direction; a z-direction transmission gear 32 meshing with the z-direction transmission rack 31, whose gear shaft 33 extends out of the vacuum chamber from the vacuum chamber and is driven by a servo motor to drive the z-direction transmission gear 32 to rotate; and a z-direction linear guide 34 fixed on the upper surface of the upper mounting plate 41 to guide the upper mounting plate to slide in the z-axis direction. Among them, the installation direction of the z-direction transmission rack 31 is parallel to the z-direction linear guide 34, the rack length depends on the stroke range of the magnetic array moving in the z-direction, the z-direction transmission gear 32 meshes with the z-direction transmission rack 31, and the central axis of the gear is parallel to the y-axis.

[0044] As Figure 7 shown in Figure 7 , the x-direction motion mechanism 10 includes: an x-direction transmission rack 11 mounted on the upper surface of the lower mounting plate 42; and an x-direction transmission gear 12 meshing with the x-direction transmission rack 11, whose gear shaft 13 extends out of the vacuum chamber from the vacuum chamber and is driven by a servo motor to drive the x-direction transmission gear 12 to rotate. Among them, the installation direction of the x-direction transmission rack 11 is parallel to the x-direction linear guide 43, and the x-direction transmission rack 11 does not contact the upper mounting plate 41. The end of the x-direction transmission rack needs to extend to the outside of the lower mounting plate 42 to ensure that it can mesh with the x-direction transmission gear 12 located outside the lower mounting plate. The central axis of the x-direction transmission gear is parallel to the y-axis. The x-direction transmission gear 12 and the z-direction transmission gear 32 are respectively located on the opposite sides of the layered support structure 40 along the length direction to avoid interference.

[0045] It should be understood that the movements of the magnetic array in the x, y, and z directions should be independent of each other and not affect each other. However, if the above-mentioned x-direction movement mechanism, y-direction movement mechanism, and z-direction movement mechanism are simply integrated together, when the magnetic array moves in the z direction, the x-direction transmission rack and the x-direction transmission gear will separate or collide, which is not allowed to occur in practical applications. Therefore, in order to make the x-direction movement mechanism and the z-direction movement mechanism independent of each other and their movements do not interfere with each other, a anti-interference mechanism needs to be specially designed.

[0046] Return to Figure 3 As shown. The anti-interference mechanism 50 includes: a set of cross beams 51, 51' arranged relatively parallel to each other, which are respectively fixed on the moving sliders of the z-direction linear guide 34; a pair of anti-interference x-direction linear guides 52, the static rails of which are installed on the cross beams 51, 51', and the moving sliders are fixedly connected to the x-direction transmission rack 11; a connecting plate 53 for connecting the x-direction transmission rack 11 and the moving slider of the anti-interference x-direction linear guide 52 to keep the x-direction transmission rack 11 stationary when moving in the z direction; an anti-interference z-direction linear guide 54, and the connecting plate 53 is also installed on the moving slider of the anti-interference z-direction linear guide 54. When the z-direction movement mechanism drives the upper mounting plate 41 to move along the z-axis, the x-direction transmission rack 11 remains stationary through the anti-interference z-direction linear guide 54, avoiding interference with the z-direction movement.

[0047] Specifically, the x-direction transmission rack 11 is installed on the anti-interference mechanism through two anti-interference x-direction linear guides 52, and the connecting plate 53 is connected to both the x-direction transmission rack 11 and the anti-interference x-direction linear guide 52 at the same time. The end of the x-direction transmission rack 11 is integrally connected to the connecting plate 53, and the back of the x-direction transmission rack 11 is installed on a moving slider of the anti-interference x-direction linear guide 52 ( Figure 3 as shown by the red circle in A of Figure 3 ), and the left and right ends of the connecting plate 53 are installed on the moving sliders of the anti-interference x-direction linear guide 52 ( Figure 3 as shown by the green circle in A of

[0048] ). The static rails of the anti-interference x-direction linear guide 52 are installed on the lower mounting plates of the two cross beams ( Figure 3 as shown by the blue circle in B of

[0048] ).

[0049] As Figure 3As shown in A, when the lower mounting plate 42 and the magnetic array (shown as green circles) move along the z direction, the static rail of the anti-interference z-direction linear guide 54 connected to the lower mounting plate 42 moves along the z direction together. However, the cross beams 51 and 51' are mounted on the four moving sliders ( Figure 3 shown as black circles in C) of the z-direction linear guide 34. The four moving sliders do not move. Therefore, only the static rail of the anti-interference z-direction linear guide 54 moves along the z direction, and all other parts remain stationary, including the moving slider of the anti-interference z-direction linear guide 54 which also remains stationary, and the x-direction transmission rack 11 also remains stationary. In this way, the z-direction movement will not affect the normal meshing of the x-direction transmission rack 11 and the x-direction transmission gear 12. In short, this anti-interference mechanism is to prevent the situation where the x-direction transmission rack 1 and the x-direction transmission gear are either separated or collided when the magnetic array moves along the z direction.

[0050] When the magnetic array moves along the x direction, only the lower mounting plate 42 moves, and the upper mounting plate 41 remains stationary. The z-direction transmission rack 12 is fixed on the upper mounting plate 41. Whether there is an anti-interference mechanism or not, the x-direction movement will not affect the meshing of the z-direction transmission gear and the z-direction transmission rack. Therefore, the anti-interference mechanism is only designed to prevent the movement of the magnetic array along the z direction from affecting the meshing of the x-direction gear rack.

[0051] As described in the background art part of the present invention, the moving magnetic array is connected to the stationary vacuum chamber flange. When the magnetic array adds movements along the horizontal direction (x direction) and the electron beam direction (z direction), it is also necessary to develop an improved copper foil dynamic connection mechanism to be coordinated with the movements of the magnetic array in three directions.

[0052] The copper foil dynamic connection mechanism 60 is installed at the end faces of the magnetic array and the upper and lower mounting plates, as Figure 8 shown. The left figure is the overall external shape diagram of the copper foil dynamic connection mechanism, and the right figure is its partial enlarged view. Each of the upper and lower magnetic arrays is equipped with a set of copper foil dynamic connection mechanisms to connect the moving magnetic array and the stationary vacuum chamber flange. Since the copper foil dynamic connection mechanisms of the upper magnetic array and the lower magnetic array are symmetrically installed along the horizontal plane XOZ, only the copper foil dynamic connection mechanism installed on the upper magnetic array will be described here. It should be understood that for the lower magnetic array, an identical set of copper foil dynamic connection mechanisms needs to be installed separately, one set for each of the upper and lower, and installed in a mirror-symmetrical manner.

[0053] One end of the strip-shaped copper foil 64 is wound around the rolling shaft 61, and the other end is fixed on the vacuum chamber flange. The two ends of the rolling shaft 61 are installed with volute springs 65. The volute springs 65 apply reverse torques to keep the strip-shaped copper foil 64 always in a tightened state. The bracket supporting the rolling shaft 61 is installed on the rolling shaft guide 62 (as Figure 8On the moving slider (shown by the green circle in the figure), the rolling shaft 61 can move freely along the electron beam direction (z direction); the static rail of the rolling shaft guide 62 is installed on the upper mounting plate 41. A spring 63 is connected to the right side surface of the moving slider of the rolling shaft guide 62, and at the same time, the spring 63 is fixed on the upper mounting plate 41. The spring 63 is always in a stretched working state, so that the spring 63 can always provide a pulling force, enabling the strip copper foil 64 wound around the rolling shaft 61 to keep in close contact with the magnetic array end face copper plate 66. A torsion spring 67 is installed between the rolling shaft 61 and the magnetic array. The two claws of the torsion spring 67 are respectively welded to the magnetic array end face copper plate 66 and the rotating shaft bottom copper plate 68. The magnetic array end face copper plate 66 is fixed on the magnetic array end face. Under the torque action of the torsion spring 67, the rotating shaft bottom copper plate 68 always keeps in contact with the strip copper foil 64 on the rolling shaft 61. In this way, the copper foil 69 on the magnetic array surface, the rotating shaft bottom copper plate 68, and the strip copper foil 64 are connected in series to form a circuit, and finally connected to the vacuum chamber flange. It should be understood that the rotating shaft bottom copper plate 68 is pressed against the strip copper foil 64 under the action of the torsion spring 67, and the strip copper foil 64 and the rotating shaft bottom copper plate 68 can slide relative to each other, which belongs to dynamic friction contact. If the strip copper foil 64 is welded to the rotating shaft bottom copper plate 68, the strip copper foil 64 wound around the rolling shaft cannot be pulled out or retracted; and the copper foil 69 on the magnetic array surface is welded to the tail of the rotating shaft bottom copper plate 68; the functions of the rotating shaft bottom copper plate 68, the strip copper foil 64, and the copper foil 69 on the magnetic array surface are the same, all for connecting the circuit, and the circuit needs to be continuous and smoothly transitioned without gaps in the middle, which is equivalent to three sections in series; only the copper foil 69 on the magnetic array surface is a stationary part among these three sections, and the strip copper foil 64 is a moving part that can be pulled out and retracted into the rolling shaft 61. When the strip copper foil 64 is wound into the rolling shaft 61, the outer diameter of the rolling shaft will increase, then the rotating shaft bottom copper plate 68 attached to the strip copper foil 64 will increase the opening angle (i.e., the torsion angle) of the torsion spring 67. Conversely, when the strip copper foil 64 is pulled out from the rolling shaft 61, the outer diameter of the rolling shaft 61 will decrease, and the opening angle of the torsion spring 67 will decrease. Therefore, during the movement of the magnetic array, the opening angle of the torsion spring 67 is constantly changing, but the change amount is very small.

[0054] When the upper magnetic array moves vertically upward along the y direction, the state of the copper foil dynamic connection mechanism: When controlling the upper magnetic array to move vertically upward along the y direction, Figure 8All components move upward. Since the left end of the strip-shaped copper foil 64 is fixed to the vacuum chamber flange, during the upward movement of the rolling shaft 61, as the distance between the vacuum chamber flange and the rolling shaft 61 increases, the strip-shaped copper foil 64 on the rolling shaft 61 will be pulled out. At this time, the number of turns of the strip-shaped copper foil 64 wound around the rolling shaft 61 decreases, and the diameter of the outermost copper foil will decrease. To prevent a gap from appearing between the copper foil wound on the rolling shaft 61 and the end face copper plate 66 of the magnetic array, under the pulling force of the spring 63, the support frame of the rolling shaft 61 moves along the rolling shaft guide rail 62 towards the end face copper plate 66 of the magnetic array, so as to ensure that the copper foil on the rolling shaft 61 is always in close contact with the end face copper plate 66 of the magnetic array. When the lower magnetic array moves vertically downward along the y direction, the state of the copper foil dynamic connection mechanism is the same as the above situation.

[0055] When the upper magnetic array moves vertically downward along the y direction, the state of the copper foil dynamic connection mechanism: When controlling the upper magnetic array to move vertically downward along the y direction, Figure 8 All components move downward. As the distance between the vacuum chamber flange and the rolling shaft 61 decreases, the strip-shaped copper foil 64 pulled out on the rolling shaft 61 may have a problem of not being able to be straightened. At this time, the volute spring 65 will apply a reverse torque to drive the rolling shaft 61 to rotate, and rewind the too long strip-shaped copper foil 64 into the rolling shaft 61 until the torque jointly acting on the rolling shaft 61 by the strip-shaped copper foil 64 and the volute spring 65 reaches equilibrium. Here, the frictional torque between the strip-shaped copper foil and the end face copper plate 66 of the magnetic array and the frictional torque between the strip-shaped copper foil and the bottom copper plate 68 of the rotating shaft are ignored, and the rolling shaft 61 stops rotating. As the number of turns of the strip-shaped copper foil 64 wound around the rolling shaft 61 increases, the diameter of the outermost copper foil will increase. At this time, the fixed end face copper plate 66 of the magnetic array will squeeze the rolling shaft 61, and under the thrust of the end face copper plate 66 of the magnetic array, the support frame of the rolling shaft 61 moves along the rolling shaft guide rail 62 until the thrust of the end face copper plate 66 of the magnetic array on the rolling shaft 61 is equal to the reverse pulling force of the spring 63, and the rolling shaft 61 stops moving. When the lower magnetic array moves vertically upward along the y direction, the state of the copper foil dynamic connection mechanism is the same as the above situation.

[0056] As Figure 6 shown, when the magnetic array needs to move along the electron beam direction (z direction), the z-direction transmission gear 32 extending out of the vacuum chamber rotates under the drive of the servo motor. The rotating z-direction transmission gear 32 then drives the z-direction transmission rack 31 and the upper mounting plate 1 fixed together with the z-direction transmission rack 31 to move along the z-direction linear guide rail 34. The upper mounting plate 41 then drives the lower x-direction linear guide rail 43, the lower mounting plate 42 and the magnetic array to move along the z direction together, so as to finally realize the movement of the magnetic array along the z direction. During this process, the pull rod 21 always remains stationary.

[0057] When the magnetic array moves along the z direction, the state of the copper foil dynamic connection mechanism: When the magnetic array moves away from the vacuum chamber flange along the z direction, the state of the copper foil dynamic connection mechanism is the same as that when the upper magnetic array moves vertically upward along the y direction, that is, the distance between the vacuum chamber flange and the rolling shaft increases, which is achieved by pulling out the copper foil on the rolling shaft, and will not be elaborated here. When the magnetic array moves closer to the vacuum chamber flange along the z direction, the state of the copper foil dynamic connection mechanism is the same as that when the upper magnetic array moves vertically downward along the y direction, that is, the distance between the vacuum chamber flange and the rolling shaft decreases, which is achieved by winding the copper foil on the rolling shaft into the rolling shaft, and will not be elaborated here either.

[0058] As Figure 7 shown, when the magnetic array needs to move horizontally (x direction), the x-direction transmission gear 12 extending out of the vacuum chamber rotates under the drive of the servo motor, and the rotating x-direction transmission gear 12 then drives the x-direction transmission rack 11, the lower mounting plate 42 connected to the x-direction transmission rack 11, and the magnetic array to move along the x-direction linear guide 43. During this process, the upper mounting plate 41 and all components above it always remain stationary.

[0059] Figure 9 Figure is a structural diagram in which the x-direction motion mechanism 10, y-direction motion mechanism 20, z-direction motion mechanism 30, layered support structure 40, anti-interference mechanism 50, and copper foil dynamic connection mechanism 60 are all integrated on the undulator. A is a top view and B is a bottom view. After adding the anti-interference mechanism, the magnetic array can move independently in the x, y, and z directions without interference from each other.

[0060] When the magnetic array needs to move along the electron beam direction (z direction), the z-direction transmission gear 6 extending out of the vacuum chamber rotates under the drive of the servo motor, and the rotating z-direction transmission gear 32 drives the z-direction transmission rack 31 to move along the z-direction linear guide 34. At this time, the upper mounting plate 41, the x-direction linear guide 43, and the lower mounting plate 42 all move along the z direction, while the static rail of the anti-interference z-direction linear guide 54 moves along the z direction together with the lower mounting plate 42, the moving slider of the anti-interference z-direction linear guide 54 and the anti-interference mechanism remain stationary, and the x-direction transmission rack 11 fixed on the anti-interference mechanism also remains stationary and still maintains a correct meshing state with the x-direction transmission gear 12, without being affected by the movement of the magnetic array along the z direction.

[0061] When the control magnetic array moves horizontally in the x direction, the upper mounting plate 41 is stationary. Therefore, the copper foil dynamic connection mechanism fixed on the upper mounting plate 41 also remains stationary, while the copper plate 66 at the end face of the magnetic array and the copper plate 68 at the bottom of the rotating shaft move along the x direction together with the magnetic array. The copper plate 66 at the end face of the magnetic array and the copper plate 68 at the bottom of the rotating shaft will have a horizontal misalignment with the strip-shaped copper foil 64 on the stationary rolling shaft 61. However, under the action of the spring 63 and the torsion spring 67, the copper plate 66 at the end face of the magnetic array and the copper plate 68 at the bottom of the rotating shaft always remain in contact with the strip-shaped copper foil 64 on the rolling shaft 61 and will not separate.

[0062] The above are only the preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various changes can be made to the above embodiments of the present invention. Any simple, equivalent changes and modifications made according to the claims and the content of the specification of the present invention application shall fall within the scope of protection of the claims of the present invention patent. Those not described in detail in the present invention are all conventional technical contents.

Claims

1. A mechanical device capable of realizing three-dimensional motion of a magnetic array in a vacuum, characterized in that The mechanical device includes: A layered support structure, which includes an upper mounting plate and a lower mounting plate that are stacked through orthogonal linear guides to form a sliding foundation in the x-z plane; A three-dimensional drive system, which includes an x-direction motion mechanism, a y-direction motion mechanism, and a z-direction motion mechanism for realizing the x-direction, y-direction, and z-direction motions of the magnetic array; An anti-interference mechanism, which is installed on the layered support structure and separates the x-direction and z-direction motion paths of the magnetic array through a sliding connection; and A copper foil dynamic connection mechanism for realizing the continuous electrical connection between the moving magnetic array and the stationary flange; Wherein, motion decoupling is achieved through the anti-interference mechanism, the x-direction, y-direction, and z-direction motions of the three-dimensional motion mechanism are independent of each other, and the mechanical device can realize the linear motion of the magnetic array along the x, y, and z directions respectively.

2. The mechanical device capable of realizing three-dimensional motion of the magnetic array in a vacuum according to claim 1, characterized in that, In the layered support structure, the upper mounting plate and the lower mounting plate are stacked in parallel and are slidably connected through x-direction linear guides arranged along the x-axis direction, and the magnetic array is fixed to the lower surface of the lower mounting plate.

3. The mechanical device capable of realizing three-dimensional motion of the undulator magnetic array in vacuum according to claim 2, wherein, The y-direction motion mechanism includes: A y-direction servo motor located outside the vacuum chamber; and A pull rod connected to the y-direction servo motor, and the pull rod passes through the vacuum chamber and is connected to the upper mounting plate; When the y-direction servo motor drives the pull rod, it can drive the upper mounting plate, the lower mounting plate, and the magnetic array to perform linear motion in the y-direction.

4. The mechanical device capable of realizing three-dimensional motion of the magnetic array of the undulator in vacuum according to claim 3, characterized in that, The z-direction motion mechanism includes: A z-direction transmission rack installed on one side surface of the upper mounting plate along the length direction; A z-direction transmission gear meshing with the z-direction transmission rack, and its gear shaft extends outside the vacuum chamber; and A z-direction linear guide fixed to the upper surface of the upper mounting plate and guiding the upper mounting plate to slide along the z-axis direction.

5. The mechanical device capable of realizing three-dimensional motion of the undulator magnetic array in vacuum according to claim 4, wherein The x-direction motion mechanism includes: An x-direction transmission rack installed on the upper surface of the lower mounting plate, whose installation direction is parallel to the x-direction linear guide, and its end extends outside the lower mounting plate; and An x-direction transmission gear meshing with the x-direction transmission rack, and its gear shaft extends outside the vacuum chamber from inside the vacuum chamber.

6. The mechanical device capable of realizing three-dimensional motion of the undulator magnetic array in vacuum according to claim 5, wherein, The anti-interference mechanism includes: A crossbeam assembly fixed to the moving slider of the z-direction linear guide; A pair of anti-interference x-direction linear guides, whose static rails are installed on the crossbeam assembly, and the moving slider is fixedly connected to the x-direction transmission rack; A connecting plate connecting the x-direction transmission rack and the moving slider of the anti-interference x-direction linear guide to keep the x-direction transmission rack stationary when the magnetic array moves in the z-direction; An anti-interference z-direction linear guide, whose static rail is installed on the long side surface of the lower mounting plate, and the connecting plate is also installed on the moving slider of the anti-interference z-direction linear guide; When the z-direction motion mechanism drives the upper mounting plate to move along the z-axis, the x-direction transmission rack remains stationary through the anti-interference z-direction linear guide to avoid interference with the z-direction motion.

7. The mechanical device capable of realizing three-dimensional motion of the magnetic array of the undulator in vacuum according to claim 6, characterized in that, The copper foil dynamic connection mechanism includes: A rolling shaft, whose outer surface is wound with a strip-shaped copper foil, and scroll springs are installed at both ends to maintain tension; A rolling shaft guide installed on the upper mounting plate, whose moving slider is fixedly connected to the bracket of the rolling shaft to guide the rolling shaft to slide along the z-axis direction; A spring, with one end connected to the rolling shaft bracket and the other end fixed to the upper mounting plate, provides a pulling force to make the strip copper foil contact the copper plate on the end face of the magnetic array; A torsion spring assembly is connected between the rolling shaft and the copper plate on the end face of the magnetic array to compensate for the displacement of the copper foil during the movement of the magnetic array; A transition copper plate is welded between the strip copper foil and the copper foil on the surface of the magnetic array to form a smooth electrical connection.

8. The mechanical device capable of realizing three-dimensional motion of the undulator magnetic array in vacuum according to claim 7, characterized in that, The strip copper foil is dynamically connected to the vacuum chamber flange and the magnetic array through the rolling shaft, the volute spring, the spring, the torsion spring, the copper plate on the end face of the magnetic array, and the transition copper plate to ensure a continuous path during three-dimensional movement.

9. The mechanical device capable of realizing three-dimensional motion of the magnetic array of the undulator in vacuum according to claim 5, characterized in that, The x-direction drive gear and the z-direction drive gear are respectively connected to the servo motor for transmission to achieve precise control of the movement of the magnetic array.

10. The mechanical device capable of realizing three-dimensional motion of the undulator magnetic array in vacuum according to claim 7, characterized in that, The strip copper foil and the copper foil on the surface of the magnetic array are made of highly conductive copper with a thickness of 40-50 microns to ensure a low-impedance electrical connection.

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