Full-automatic electro-deposition perovskite solar cell preparation device and method

Abstract

The invention discloses a full-automatic electro-deposition perovskite solar cell preparation device and method, and belongs to the technical field of solar cell preparation devices. Comprising a base, a control module, and a motion sliding table assembly, a mechanical claw assembly, a power supply assembly, a reaction chamber, a liquid injection assembly, a liquid discharge assembly, an air blowing assembly and a liquid level detector which are respectively connected with the control module. According to the device, the electrochemical deposition time and conditions can be conveniently selected, perovskite solar cells with different areas can be prepared by changing the size of the reaction chamber, and the device is easy to operate, simple in structure, low in manufacturing cost, high in full-automation degree and suitable for large-scale production. The method is very suitable for preparing the large-area perovskite solar cell, and promotes the development of the large-area low-sinking full-automatic perovskite solar cell preparation technology.

Description

Technical Field

[0001] The present invention belongs to the technical field of solar cell preparation devices, and specifically relates to a fully automatic electrodeposition perovskite solar cell preparation device and method. Background Art

[0002] Perovskite solar cells have the advantages of high photoelectric conversion efficiency, low cost and flexible processing. In recent years, they have developed rapidly in the field of solar cells. The efficiency of single-junction solar cells has surpassed that of single-junction silicon solar cells and is gradually developing towards commercial applications. In order to realize the commercial application of perovskite solar cells, it is urgent to develop low-cost large-area perovskite solar cell preparation equipment. In addition, the preparation of perovskite solar cells in the laboratory currently lacks the application of automated equipment, resulting in a low preparation repetition rate and unstable performance of perovskite solar cells. Electrodeposition preparation of perovskite solar cells has the advantages of low cost, simple process, and large-area preparation. It shows certain application prospects in the large-area preparation of perovskite solar cells. However, the current electrodeposition preparation of perovskite solar cells is still manually operated, which limits its further development. Therefore, it is very necessary to develop a fully automatic electrodeposition perovskite solar cell preparation device to promote the commercial application and development of perovskite solar cells.

[0003] In addition, the R&D, design, production, manufacturing, packaging and testing of solar cells all place great demands on talents. At present, some domestic colleges and universities and some vocational and technical schools have opened courses related to the design, preparation and R&D of solar cells. However, due to the high cost and large footprint of the equipment related to the production and manufacturing of solar cells in the industry, many colleges and universities cannot allow students to conduct experimental teaching close to the industrial production of solar cells. Therefore, the development of a low-cost, simple-structured, small-footprint fully automatic electrodeposition perovskite solar cell preparation device can also be used for students' experimental teaching and popular science explanations, making up for the shortcomings of the existing perovskite solar cell preparation devices.

[0004] In view of the above-mentioned shortcomings, the present invention proposes a fully automatic electrodeposition perovskite solar cell preparation device and a use method thereof to solve the above-mentioned problems. Summary of the invention

[0005] The present invention provides a fully automatic electrodeposition perovskite solar cell preparation device and method, which aims to complete the electrochemical deposition step and the soaking step in the perovskite cell preparation process in the same device, and can independently select parameters such as electrochemical deposition time, deposition voltage, deposition current and soaking time. The device is simple to operate, simple in structure and low in cost, and is suitable for preparing perovskite solar cells of multiple components based on electrochemical deposition method, and promoting its commercial application.

[0006] The present invention provides a fully automatic preparation device for perovskite solar cells by electrodeposition. The technical solution adopted is as follows, including: A base, on which a reaction chamber is provided; A control module; A motion stage assembly, a mechanical claw assembly, a power supply assembly, a liquid injection assembly, a liquid drainage assembly, a blowing assembly, and a liquid level detector connected to the control module; The motion stage assembly includes an X / Y / Z three-axis motion platform composed of a plurality of lead screw stage modules driven by motors; The mechanical claw assembly is fixed on the Z-axis motion platform of the motion stage assembly and is used to grasp and move the substrate; Each reaction chamber is provided with the liquid injection assembly, the liquid drainage assembly, and the liquid level detector; The blowing assembly includes an intake pipe, an exhaust valve, and an exhaust port. The intake pipe is arranged below the base and is controlled by the exhaust valve, and the exhaust port is fixed on the mechanical claw assembly; The liquid injection assembly includes a liquid inlet pipeline, a liquid inlet valve, and a liquid outlet. The liquid inlet pipeline is arranged outside the reaction chamber and is controlled by the liquid inlet valve, and the liquid outlet is arranged inside the reaction chamber; The liquid drainage assembly includes a liquid drainage pipeline, a liquid drainage valve, and a liquid extraction pump. The liquid extraction port of the liquid drainage pipeline is arranged at the bottom of the reaction chamber, and the liquid drainage port extends outside the reaction chamber and is externally connected to the liquid extraction pump through the liquid drainage valve; The liquid level detector is used to monitor the liquid level height in the reaction chamber; The power supply assembly includes an adjustable regulated DC power supply, a power switch, an anode interface, and a cathode interface. The anode interface is connected to the mechanical claw assembly, and the cathode interface is connected inside the reaction chamber to form an electric current loop for electrochemical deposition.

[0007] Furthermore, the control module includes a total control module, a motor drive module, a power control module, a liquid injection and drainage control module, and a blowing control module. The total control module is used to centrally control the motor drive module, the power control module, the liquid injection and drainage control module, and the blowing control module. The motor control drive module controls the movement of the motion stage assembly and the opening and closing of the mechanical claw assembly. The power control module is used to control the on / off of the power supply assembly. The liquid injection and drainage module controls the liquid injection assembly and the liquid drainage assembly based on the liquid level detector. The blowing control module is used to control the blowing of the blowing assembly.

[0008] Furthermore, the lead screw stage module includes a lead screw and a stage. The stage is screwed onto the lead screw, the lead screw is connected to the output end of the motor, and a position detection sensor is arranged on the stage.

[0009] Further, the mechanical claw assembly includes a driving component and a clamping claw component. The clamping claw component is made of a conductive, acid-resistant and antioxidant material and is electrically connected to the anode interface of the power supply component.

[0010] Further, the liquid level detector is installed on the side wall of the reaction chamber and its height is adjustable. A detachable platinum electrode is provided below it, and the platinum electrode is electrically connected to the cathode interface of the power supply component; the liquid injection component and the liquid discharge component are respectively arranged on the side wall and the bottom of the reaction chamber.

[0011] Further, the air blowing component blows inert gas onto the surface of the substrate clamped by the mechanical claw before electrochemical deposition or after cleaning until there is no liquid residue on the substrate surface.

[0012] Further, the base is provided with a plurality of reaction chamber installation grooves and a liquid discharge channel corresponding to the liquid extraction port for adapting to reaction chambers of different sizes; a plurality of installation holes are also provided on the base for installing the moving slide assembly.

[0013] Further, a usage method of a fully automatic device for preparing perovskite solar cells by electrodeposition includes the following steps: S1. When preparing the perovskite battery, the control module controls the moving slide assembly to move the mechanical claw assembly to the feeding area of the base and controls the mechanical claw assembly to clamp the substrate to be processed. S2. After clamping, the control module controls the air blowing component to perform the pre-cleaning step on the substrate surface. S3. After the pre-cleaning is completed, the grabbed substrate is moved into the reaction chamber for electrochemical deposition by moving the mechanical claw assembly. The control module controls the liquid injection component to inject the electrodeposition solution and controls the power supply component to perform the electrochemical deposition step. S4. When the electrochemical deposition ends, the control module controls the substrate to move into the reaction chamber for cleaning and performs the cleaning step. S5. After the cleaning is completed, the control module controls the air blowing component to remove the cleaning solution on the substrate surface. S6. When the cleaning step ends, the control module controls the substrate to move into the reaction chamber for soaking and performs the soaking step. After reaching the preset soaking time, the cleaning step is performed. S7. After the cleaning is completed, the perovskite thin film generated by the reaction is moved into the reaction chamber for soaking conductive carbon paste by the mechanical claw. S8. After the soaking ends, the sample is then moved to the annealing table for annealing. After the annealing is completed, the preparation of the perovskite solar cell based on electrochemical deposition is completed. Then, the control module controls the liquid discharge component to perform liquid discharge until it is emptied.

[0014] Advantages of the present invention: 1. The present invention coordinates various components through a control module to achieve fully automated operations of process steps such as electro - deposition, cleaning, soaking, and purging, significantly improving production efficiency and consistency.

[0015] 2. The liquid - level detector, combined with the interlocking control of the liquid injection / drainage components, ensures that the reaction liquid - level height is accurately maintained within the set range, avoiding liquid overflow or shortage and guaranteeing the quality of thin - film deposition.

[0016] 3. The adjustable regulated DC power supply and the position feedback system of the three - axis motion platform achieve precise control of deposition voltage, current, and mechanical positioning, optimizing the uniformity and optoelectronic performance of perovskite thin - films.

[0017] 4. The device provided by the present invention can conveniently realize electro - deposition and soaking operations during the preparation of perovskite cells based on the electrochemical deposition method, and can conveniently and accurately complete the preparation of perovskite thin - films according to the needs of teaching experiments.

[0018] 5. The device provided by the present invention is simple in operation, concise in structure, and controllable in volume compared with the devices used in the current industrial production process of perovskite cells. More importantly, it can complete the full - automatic one - stop production of perovskite thin - films and can also be used for teaching experiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] For ease of explanation, the present invention is described in detail by the following specific embodiments and the accompanying drawings.

[0020] Figure 1 is the structural schematic diagram of the present invention; Figure 2 is the internal structural schematic diagram of the reaction chamber of the present invention; Figure 3 is the schematic diagram of the control module of the present invention.

[0021] In the figure: 1. Moving slide - table assembly; 2. Reaction chamber; 3. Base; 4. Mechanical claw assembly; 5. Exhaust valve; 6. Intake pipeline; 7. Exhaust port; 8. Liquid - level detector; 9. Liquid injection assembly; 10. Liquid drainage assembly; 11. Claw component; 12. Slide. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The following are specific embodiments of the present invention in combination with the accompanying drawings to further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments; in the following description, specific details such as specific configurations and components are provided only to help a comprehensive understanding of the embodiments of the present invention. Therefore, those skilled in the art should clearly understand that various changes and modifications can be made to the embodiments described here without departing from the scope and spirit of the present invention. Additionally, descriptions of known functions and structures are omitted for clarity and conciseness.

[0023] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0024] As Figures 1 to 2 shown in a specific embodiment of a fully automatic device for preparing perovskite solar cells, which includes: a base 3, a control module, and a moving stage assembly 1, a mechanical claw assembly 4, a power supply assembly, a reaction chamber 2, a liquid injection assembly 9, a liquid discharge assembly 10, a blowing assembly, and a liquid level detector 8 that are respectively connected to the control module.

[0025] Specifically, the base 3 is provided with a plurality of reaction chamber 2 installation slots and a liquid discharge channel corresponding to the liquid extraction port for adapting to reaction chambers 2 of different sizes; the base 3 is also provided with a plurality of installation holes for installing the moving stage assembly 1.

[0026] Specifically, the moving stage assembly 1 includes an X / Y / Z three-axis moving platform composed of a plurality of lead screw stage modules driven by motors. The lead screw stage module includes a lead screw and a stage 12. The stage is screwed onto the lead screw, and the lead screw is connected to the output end of the motor. A position detection sensor is arranged on the stage 12. The X-axis moving platform is composed of two lead screw stage modules, and both the Y-axis moving platform and the Z-axis moving platform are composed of one lead screw stage module. The Y-axis moving platform is fixed on the two stages 12 of the X-axis moving platform to realize synchronous X-axis movement; the Z-axis moving platform is fixed on the stage 12 of the Y-axis moving platform to realize Y-axis movement; the mechanical claw assembly 4 is fixed on the stage 12 of the Z-axis moving platform to realize Z-axis movement.

[0027] Specifically, the mechanical claw assembly 4 is fixed on the Z-axis moving platform of the moving stage assembly 1, realizing three-axis movement. The three-axis moving platform drives the mechanical claw assembly to accurately position in three-dimensional space based on the feedback information of the position sensor.

[0028] Specifically, each reaction chamber 2 is provided with a liquid injection assembly 9, a liquid discharge assembly 10, and a liquid level detector 8. Different liquids are injected into the reaction chamber 2 through the liquid injection assembly 9 to realize reaction chambers with different functions.

[0029] Specifically, the blowing assembly includes an intake pipe 6, an exhaust valve 5, and an exhaust port 7. The intake pipe 6 is arranged below the base 3 and is controlled by the exhaust valve 5. The exhaust port 7 is fixed on the mechanical claw assembly 4; the blowing assembly blows inert gas onto the surface of the substrate clamped by the mechanical claw assembly 4 before electrochemical deposition or after cleaning until there is no liquid residue on the surface of the substrate.

[0030] Specifically, the liquid injection assembly 9 includes a liquid inlet pipeline, a liquid inlet valve, and a liquid outlet. The liquid inlet pipeline is arranged outside the reaction chamber and is controlled by the liquid inlet valve. The liquid outlet is arranged inside the reaction chamber. One end of the liquid inlet pipeline is connected to the liquid outlet, and the other end is connected to a liquid source.

[0031] Specifically, the liquid discharging assembly 10 includes a liquid discharging pipeline, a liquid discharging valve and a liquid pumping pump. The liquid discharging pipeline includes a liquid pumping port and a liquid discharging port. The liquid pumping port of the liquid discharging pipeline is arranged at the bottom of the reaction chamber 2, and the liquid discharging port extends to the outside of the reaction chamber 2 and is externally connected to the liquid pumping pump through the liquid discharging valve. By starting the liquid pumping pump and opening the liquid discharging valve, the liquid inside the reaction chamber 2 is evacuated through the liquid pumping port.

[0032] Specifically, the liquid level detector 8 is used to monitor the liquid level height in the reaction chamber 2, and the amount of injected liquid of the liquid injection assembly 9 is controlled by the liquid level detector 8.

[0033] Specifically, the power supply assembly includes an adjustable regulated DC power supply, a power switch, an anode interface and a cathode interface. The anode interface is connected to the mechanical claw assembly 4, and the cathode interface is connected inside the reaction chamber 2. When the mechanical claw assembly 4 clamps the substrate into the reaction chamber 2, the power switch is started through the control module, forming a current loop composed of the power supply anode, the mechanical claw assembly 4, the substrate, the reaction solution, the reaction chamber 2, and the power supply cathode. The deposition voltage and deposition time of the electrochemistry deposition step are controlled by the control module.

[0034] Specifically, as Figure 3 shown, the control module includes a total control module, a motor drive module, a power supply control module, a liquid injection and discharging control module, and a blowing control module. The total control module is used to centrally control the motor drive module, the power supply control module, the liquid injection and discharging control module, and the blowing control module. The motor control drive module is electrically connected to the motor and the drive component, and controls the movement of the moving slide assembly 1 by controlling the rotation of the motor and controls the opening and closing of the clamping jaw component 11 by controlling the drive component of the mechanical claw assembly 4; the power supply control module is electrically connected to the power switch and is used to control the on and off of the power supply assembly; the liquid injection and discharging module is electrically connected to the liquid inlet valve, the liquid discharging valve and the liquid pumping pump, and controls the operation of the liquid injection assembly 9 and the liquid discharging assembly 10 based on the data of the liquid level detector 8; the blowing control module is electrically connected to the exhaust valve 5 and is used to control the blowing of the blowing assembly.

[0035] In other preferred embodiments, the mechanical claw assembly 4 includes a drive component and a clamping jaw component 11. The material of the clamping jaw component is a conductive, acid-resistant and antioxidant material and is electrically connected to the anode interface of the power supply assembly.

[0036] Specifically, the clamping jaw component 11 directly serves as the anode, eliminating the need for an additional independent electrode, reducing the complexity of the equipment, and avoiding current fluctuations caused by poor electrode contact.

[0037] Specifically, the clamping jaw component 11 is in direct physical contact with the substrate (instead of indirectly conducting electricity through the solution), ensuring the shortest current transmission path and the smallest resistance, and improving the electro-deposition efficiency.

[0038] Specifically, the jaw component 11 is in long-term contact with the acidic electroplating solution. The acid-resistant material can prevent corrosion and avoid the dissolution of metal ions to contaminate the reaction solution. The antioxidant property prevents the jaw component 11 from being oxidized and passivated during the electrochemical reaction, maintaining long-term conductive stability and extending the service life.

[0039] In other preferred embodiments, the liquid level detector 8 is installed on the side wall of the reaction chamber 2 and its height is adjustable. A detachable platinum sheet electrode is provided below it, and the platinum sheet electrode is electrically connected to the cathode interface of the power supply assembly; the liquid injection assembly 9 and the liquid discharge assembly 10 are respectively arranged on the side wall and the bottom of the reaction chamber.

[0040] Specifically, the total control module controls the power control module to turn on the power switch, forming a current loop consisting of the power anode, the jaw component of the mechanical claw assembly 4, the substrate, the reaction solution, the platinum sheet electrode, and the power cathode. The deposition voltage and deposition time of the electrochemical deposition step are controlled by the control module.

[0041] Specifically, injecting liquid from the side wall can avoid directly impacting the surface of the substrate with the liquid, preventing the formed film from being damaged by the water flow impact and improving the yield.

[0042] Specifically, the bottom liquid extraction port combined with the liquid extraction pump can quickly empty the reaction waste liquid, reducing the interference of the residual liquid on the subsequent steps and ensuring process consistency.

[0043] Specifically, by adjusting the height of the liquid level detector 8, the injection amount of the reaction solution can be accurately controlled to adapt to substrates of different sizes or the capacity of the reaction chamber, meeting diverse preparation requirements.

[0044] Specifically, the platinum sheet has strong corrosion resistance and is suitable for acidic or oxidizing reaction environments, and can work stably for a long time; its detachable design facilitates regular maintenance or replacement, avoiding performance degradation caused by electrode loss.

[0045] A method for using a fully automatic device for preparing perovskite solar cells includes the following steps: S1. When preparing the perovskite cell, the control module controls the motion stage assembly 1 to move the mechanical claw assembly 4 to the feeding area of the base 3, and controls the mechanical claw assembly 4 to clamp the substrate to be processed; S2. After clamping the substrate, the control module controls the blowing assembly to perform the pre-cleaning step on the surface of the substrate; S3. After the pre-cleaning is completed, the grabbed substrate is moved into the reaction chamber 2 for electrochemical deposition by moving the mechanical claw assembly 4. The control module controls the liquid injection assembly 9 to inject the electroplating solution, and controls the power supply assembly to perform the electrochemical deposition step; S4. After the electrochemical deposition is completed, the control module controls the substrate to move into the reaction chamber 2 for cleaning (the reaction chamber into which the cleaning solution is injected through the liquid injection assembly) to perform the cleaning step; S5. After the cleaning is completed, control the air blowing component to remove the cleaning liquid on the substrate surface; S6. When the cleaning step ends, the control module controls the substrate to move to the reaction chamber 2 for soaking (the reaction chamber into which the soaking liquid is injected through the liquid injection component) to perform the soaking step. After reaching the preset soaking time, the cleaning step is carried out; S7. After the cleaning is completed, move the perovskite thin film generated by the reaction to the reaction chamber 2 for soaking the conductive carbon paste through the mechanical claw component 4; S8. After the soaking ends, then move the sample to the annealing table for annealing. After the annealing is completed, the preparation of the perovskite solar cell based on electrochemical deposition is completed. Then, control the drainage component to drain the liquid through the control module until it is emptied.

[0046] Specifically, in an embodiment of a perovskite MAPbI3 solar cell produced based on this device: S1. Place the transparent conductive ITO substrate with the SnO2 thin film on the feeding area of the base. At the same time, the liquid injection components 9 in each reaction chamber 2 start to inject the reaction liquid until it reaches the height set by the liquid level detector 8; S2. Control the mechanical claw component 4 to move to the feeding area and clamp the substrate; then the air blowing component blows out the inert gas to remove the dust on the substrate surface. The gas pressure is 0.3 Mpa and the time is 3 s; S3. After the air blowing is completed, the mechanical claw component 4 carries the substrate to move to the reaction chamber 2 for electroplating to perform the electroplating PbO2 thin film step. The plating solution is an acidic aqueous solution mixed with Pb(CH3COO)2 and NaNO3. The electroplating voltage is set to 1.8 V and the plating time is 18 s; S4. After the electroplating is completed, start the first cleaning step of the thin film. The mechanical claw component 4 moves above the reaction chamber 2 for cleaning and moves up and down repeatedly to remove the residual plating solution on the surface of the PbO2 thin film. The cleaning liquid is deionized water. S5. The air blowing component blows out the inert gas to remove the residual cleaning liquid on the thin film surface. The gas pressure is 0.3 Mpa and the air blowing time is 5 s. After the air blowing ends, the first thin film cleaning ends; S6. Further, move the deposited PbO2 thin film to the reaction chamber 2 for soaking through the mechanical claw component 4 to perform the soaking step. The soaking solution is the MAI solution, the solvent is isopropanol, the concentration is 60 mg / ml, and the soaking time is 7 min. After the soaking ends, move above the reaction chamber 2 for cleaning to perform the second cleaning step of the thin film. The cleaning liquid is isopropanol, the gas pressure is 0.1 Mpa, and the air blowing time is 8 s; S7. After the second cleaning is completed, the MAPbI3 film generated by the reaction is moved to the reaction chamber 2 for soaking by the mechanical claw assembly 4. The soaking step is carried out, and the soaking solution is conductive carbon paste, and the soaking time is 30 s.

[0047] S8. After the soaking is completed, the mechanical claw assembly 4 moves above the reaction chamber 2 for soaking, and then the inert gas is blown out by the gas blowing assembly to slowly dry the carbon paste. The gas pressure is 0.1 Mpa, and the blowing time is 2 min. After the blowing is completed, all the preparation steps are completed. Subsequently, the substrate is moved to the annealing table by the mechanical claw assembly 4 and annealed at a temperature of 70 °C for 3 min to obtain the perovskite MAPbI3 solar cell. After the steps are completed, the liquid injection and drainage module 10 is controlled by the total control module to open the drain valve and the liquid extraction pump for drainage until it is emptied.

[0048] Specifically, the device provided by the present invention can realize the electrochemical deposition and soaking operations in the process of preparing perovskite batteries based on the electrochemical deposition method. The deposition voltage, deposition current and deposition time required during the electrochemical deposition process, and the soaking time during the soaking process can all be accurately controlled by the control module of the device. The device provided by the present invention is simple in operation, concise in structure, low in cost compared with the devices used in the industrial production process of perovskite batteries. More importantly, it can complete the one-stop preparation of perovskite solar cells, and is very suitable for the preparation of large-area perovskite solar cells and teaching experiments.

[0049] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or their combinations.

[0050] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0051] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0052] Those skilled in the art to which the present invention pertains can make various modifications, supplements, or use similar means of substitution to the described specific embodiments, but will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

Claims

1. An apparatus for preparing a fully automatic electrodeposited perovskite solar cell, characterized in that, Comprising: A base, on which a reaction chamber is provided; A control module; A moving stage assembly, a mechanical claw assembly, a power supply assembly, a liquid injection assembly, a liquid discharge assembly, a blowing assembly and a liquid level detector connected to the control module; The moving stage assembly includes an X / Y / Z three-axis moving platform composed of a plurality of lead screw stage modules driven by motors; The mechanical claw assembly is fixed on the Z-axis moving platform of the moving stage assembly and is used for grasping and moving the substrate; Each reaction chamber is provided with the liquid injection assembly, the liquid discharge assembly and the liquid level detector; The blowing assembly includes an intake pipe, an exhaust valve and an exhaust port. The intake pipe is arranged under the base and is controlled by the exhaust valve, and the exhaust port is fixed on the mechanical claw assembly; The liquid injection assembly includes a liquid inlet pipeline, a liquid inlet valve and a liquid outlet. The liquid inlet pipeline is arranged outside the reaction chamber and is controlled by the liquid inlet valve, and the liquid outlet is arranged inside the reaction chamber; The liquid discharge assembly includes a liquid discharge pipeline, a liquid discharge valve and a liquid extraction pump. The liquid extraction port of the liquid discharge pipeline is arranged at the bottom of the reaction chamber, and the liquid discharge port extends outside the reaction chamber and is externally connected to the liquid extraction pump through the liquid discharge valve; The liquid level detector is used for monitoring the liquid level height in the reaction chamber; The power supply assembly includes an adjustable regulated DC power supply, a power switch, an anode interface and a cathode interface. The anode interface is connected to the mechanical claw assembly, and the cathode interface is connected inside the reaction chamber to form an electric current loop for electrochemical deposition.

2. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, wherein, The control module includes a total control module, a motor drive module, a power supply control module, a liquid injection and discharge control module and a blowing control module. The total control module is used to centrally control the motor drive module, the power supply control module, the liquid injection and discharge control module and the blowing control module. The motor control drive module controls the movement of the moving stage assembly and the opening and closing of the mechanical claw assembly. The power supply control module is used to control the on / off of the power supply assembly. The liquid injection and discharge module controls the liquid injection assembly and the liquid discharge assembly based on the liquid level detector. The blowing control module is used to control the blowing of the blowing assembly.

3. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, characterized in that, The lead screw stage module includes a lead screw and a stage. The stage is screwed on the lead screw. The lead screw is connected to the motor output end, and a position detection sensor is arranged on the stage.

4. The preparation device of a fully automatic electrodeposited perovskite solar cell according to claim 1, characterized in that, The mechanical claw assembly includes a driving component and a jaw component. The jaw component is made of a conductive, acid-resistant and antioxidant material and is electrically connected to the anode interface of the power supply assembly.

5. The preparation device of a fully automatic electrodeposited perovskite solar cell according to claim 1, characterized in that The liquid level detector is installed on the side wall of the reaction chamber and is height-adjustable. A detachable platinum sheet electrode is arranged below it, and the platinum sheet electrode is electrically connected to the cathode interface of the power supply assembly; the liquid injection assembly and the liquid discharge assembly are respectively arranged on the side wall and the bottom of the reaction chamber.

6. The preparation device of a fully automatic electrodeposited perovskite solar cell according to claim 1, wherein, The blowing assembly blows an inert gas onto the surface of the substrate held by the mechanical claw before electrochemical deposition or after cleaning until there is no liquid residue on the surface of the substrate.

7. An apparatus for preparing a fully automatic electrodeposited perovskite solar cell according to claim 1, characterized in that, The base is provided with a plurality of reaction chamber installation grooves and a liquid discharge channel corresponding to the liquid extraction port for adapting to reaction chambers of different sizes; a plurality of installation holes are also provided on the base for installing the moving stage assembly.

8. The usage method of a fully automatic electro-deposition perovskite solar cell preparation device according to any one of claims 1-7, characterized in that, Including the following steps: S1. When preparing the perovskite battery, the control module controls the moving slide table assembly to move the mechanical claw assembly to the feeding area of the base and controls the mechanical claw assembly to clamp the substrate to be processed; S2. After clamping, the control module controls the blowing assembly to perform the pre-cleaning step on the surface of the substrate; S3. After the pre-cleaning is completed, the grabbed substrate is moved to the reaction chamber for electrochemical deposition by moving the mechanical claw assembly. The control module controls the liquid injection assembly to inject the electroplating solution and controls the power supply assembly to perform the electrochemical deposition step; S4. When the electrochemical deposition ends, the control module controls the substrate to move to the reaction chamber for cleaning to perform the cleaning step; S5. After the cleaning is completed, the blowing assembly is controlled to remove the cleaning solution on the surface of the substrate; S6. After the cleaning step ends, the control module controls the substrate to move to the reaction chamber for soaking to perform the soaking step. After reaching the preset soaking time, the cleaning step is performed; S7. After the cleaning is completed, the perovskite thin film generated by the reaction is moved to the reaction chamber for soaking the conductive carbon paste by the mechanical claw; S8. After the soaking ends, the sample is then moved to the annealing table for annealing. After the annealing is completed, the preparation of the perovskite solar cell based on electrochemical deposition is completed. Then, the control module controls the liquid drainage assembly to drain the liquid until it is emptied.

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