Fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide

Abstract

The invention relates to the technical field of fluorine-lined tanks, in particular to a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, which comprises a support fixing frame and a fluorine-lined tank body, and further comprises a plurality of internal wave-proof plates fixedly arranged in the fluorine-lined tank body, and middle through holes are formed in the internal wave-proof plates; the heat conduction cavity sheet is arranged on the internal wave-proof plate in a communicating manner and is used for accelerating heat conduction of hydrogen peroxide; through cooperation of a power cooperation assembly and a flowing assembly, water waves generated by shaking of hydrogen peroxide impact a rotating piece, a smooth protruding block on a connecting disc can push a third shaking plate, a second shaking plate and the third shaking plate are smoothly driven to synchronously move, and permeation flow pushing is achieved; in the process, convection of cooling water in the heat conduction cavity piece and the inner wave-proof plate is accelerated, so that the cooling water flows more violently, the convection heat exchange effect between the cooling water and the inner wall is remarkably enhanced, heat is accelerated to be transferred to the cooling water from the inner wave-proof plate and the heat conduction cavity piece, and the overall cooling efficiency is effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of fluorine-lined tanks, and particularly to a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide. Background Art

[0002] Electronic-grade hydrogen peroxide is a high-purity hydrogen peroxide, mainly used for cleaning and etching processes in the electronics industries such as semiconductors, solar cells, LEDs, and LCDs. It is extremely sensitive to temperature fluctuations. During transportation, existing fluorine-lined tanks for transportation usually set up anti-surge plates to reduce the sloshing of hydrogen peroxide in the tank by physical barriers, ensuring the stability of the transportation process to a certain extent; traditional tanks lack effective heat dissipation structures and cannot timely dissipate the heat generated by hydrogen peroxide due to environmental temperature changes, sloshing friction, etc., resulting in an increase in the temperature inside the tank, which in turn causes the decomposition of hydrogen peroxide, not only causing a decline in product quality and material waste, but also posing a safety hazard and unable to meet the strict requirements of electronic-grade hydrogen peroxide for transportation temperature. Summary of the Invention

[0003] The purpose of the present invention is to provide a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide to solve the problems raised in the above background art.

[0004] To achieve the above purpose, the present invention provides the following technical solution: A fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, including a support fixing frame and a fluorine-lined tank body, and further including: A plurality of internal anti-surge plates, fixedly arranged inside the fluorine-lined tank body, and a central through hole is opened on the internal anti-surge plate; A heat-conducting cavity sheet, communicated and arranged on the internal anti-surge plate for accelerating the heat conduction of hydrogen peroxide; A cooling device, arranged on the support fixing frame and communicated with the heat-conducting cavity sheet, the cooling device includes a water receiving tank, a first cold water tank and a second cold water tank, and the first cold water tank and the second cold water tank alternately supply cooling water; A power cooperation component, arranged in the central through hole and driven by the water wave generated by the sloshing of hydrogen peroxide; A flow component, arranged inside the heat-conducting cavity sheet and driven by the power cooperation component to accelerate the convection of the cooling water in the heat-conducting cavity sheet and the internal anti-surge plate.

[0005] Preferably, the power cooperation component includes a rotating connecting rod rotatably arranged on the internal anti-surge plate, and a plurality of rotating sheets are fixedly arranged on the part of the rotating connecting rod located inside the central through hole.

[0006] Preferably, both ends of the rotating connecting rod are fixedly connected with connecting discs, and smooth convex blocks are symmetrically arranged on the connecting discs. Concave grooves are formed on the rotating pieces. When the connecting discs rotate, the smooth convex blocks contact and push the third shaking plate in the flow component to linearly displace.

[0007] Preferably, the flow component includes a first shaking plate, a second shaking plate, and a third shaking plate that are sequentially arranged inside the heat-conducting cavity plate. A sliding support rod is slidably connected to the first shaking plate, and the sliding support rod is horizontally fixed inside the heat-conducting cavity plate. A plurality of connecting springs are arranged between the first shaking plate and the inner wall of the heat-conducting cavity plate.

[0008] Preferably, both ends of the connecting spring are fixedly connected with the heat-conducting cavity plate and the first shaking plate respectively. The first shaking plate and the second shaking plate are fixedly connected through a first connecting block, and the second shaking plate and the third shaking plate are fixedly connected through a second connecting block. A plurality of through holes are arranged on the first shaking plate, the second shaking plate, and the third shaking plate.

[0009] Preferably, the cooling device further includes an outlet connecting pipe, a connecting short pipe, and an inlet connecting pipe. The outlet connecting pipe and the connecting short pipe are used to introduce the cooling water in the heat-conducting cavity plate into the receiving water tank.

[0010] Preferably, a first communicating conduit and a second communicating conduit are communicated at the lower end of the receiving water tank. The first communicating conduit and the second communicating conduit are respectively communicated with a first cold water tank and a second cold water tank. A first solenoid valve and a second solenoid valve are respectively arranged on the first communicating conduit and the second communicating conduit. The lower ends of the first cold water tank and the second cold water tank are communicated with a three-way connecting pipe.

[0011] Preferably, a solenoid valve one and a solenoid valve two are arranged on the three-way connecting pipe. The solenoid valve one is used to control the water outlet of the first cold water tank, and the solenoid valve two is used to control the water outlet of the second cold water tank. Refrigeration devices are arranged on both the first cold water tank and the second cold water tank.

[0012] Preferably, a water pump is arranged between the inlet connecting pipe and the three-way connecting pipe. The water pump is used to pump the cooled water into the internal anti-wave plate. By controlling the opening and closing states of the first solenoid valve, the second solenoid valve, the solenoid valve one, and the solenoid valve two, the first cold water tank and the second cold water tank alternately supply the cooling water.

[0013] Preferably, upper through holes and bottom communicating holes are further arranged on the internal anti-wave plate.

[0014] Compared with the prior art, the beneficial effects of the present invention are: 1. By setting a temperature sensor and a controller, when the temperature of hydrogen peroxide in the fluorine-lined tank body rises, the cooling mechanism can be quickly triggered. The controller precisely controls the water pump to transport cold water through the inlet connecting pipe to the inside of the internal anti-surge plate and the heat conduction cavity sheet, and timely conducts heat exchange to avoid the risk of hydrogen peroxide decomposition caused by excessive temperature, providing a reliable guarantee for the safe transportation of electronic-grade hydrogen peroxide.

[0015] 2. During transportation, through the cooperation of the power matching component and the flow component, the water wave impact generated by the shaking of hydrogen peroxide impacts the rotating piece, enabling the smooth convex block on the connecting disc to push the third shaking plate, and smoothly driving the synchronous movement of the second shaking plate and the third shaking plate to achieve permeation and pushing flow. This process accelerates the convection of the cooling water in the heat conduction cavity sheet and the internal anti-surge plate, makes the cooling water flow more violently, significantly enhances its convective heat transfer effect with the inner wall, and accelerates the transfer of heat from the internal anti-surge plate and the heat conduction cavity sheet to the cooling water, effectively improving the overall cooling efficiency.

[0016] 3. By setting a cooling device, the first cold water tank and the second cold water tank supply cold water alternately, ensuring the continuous low temperature of the cooling water. When one of the water tanks provides low-temperature cooling water for the system, the other water tank receives the return water after heat exchange and quickly cools it using the refrigeration equipment, avoiding the accumulation and temperature rise of the water after heat exchange in the water tank, and always maintaining the low temperature state of the cooling water in the water tank. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0017] Figure 2 It is a schematic diagram of the structure of another perspective of the present invention.

[0018] Figure 3 It is a schematic diagram of the structure of the fluorine-lined tank body of the present invention.

[0019] Figure 4 It is a schematic diagram of the internal structure of the fluorine-lined tank body of the present invention.

[0020] Figure 5 It is a schematic diagram of the structure of the internal anti-surge plate of the present invention.

[0021] Figure 6 It is a schematic diagram of the internal structure of the internal anti-surge plate of the present invention.

[0022] Figure 7 It is a schematic diagram of the internal structure of the heat conduction cavity sheet of the present invention.

[0023] Figure 8 It is a schematic diagram of the position structure of the flow component of the present invention.

[0024] Figure 9 It is a schematic diagram of the structure of the power matching component of the present invention.

[0025] Figure 10 Schematic diagram of the flow component structure of the present invention.

[0026] Figure 11 Schematic diagram of the cooling device structure of the present invention.

[0027] Figure 12 Schematic diagram of the cold water tank structure of the present invention.

[0028] Figure 13 Schematic diagram of the structure of the present invention.

[0029] In the figure: 1, support fixing frame; 2, fluorine-lined tank body; 3, cooling device; 4, internal anti-wave plate; 5, heat conduction cavity sheet; 6, power matching component; 7, flow component; 8, middle through hole; 9, upper through hole; 10, bottom communication hole; 31, water outlet connecting pipe; 32, connecting short pipe; 33, connecting water tank; 34, first communication conduit; 35, first solenoid valve; 36, first cold water tank; 37, second communication conduit; 38, second solenoid valve; 39, second cold water tank; 310, three-way connecting pipe; 311, solenoid valve one; 312, solenoid valve two; 313, water pump; 314, water inlet connecting pipe; 61, rotating sheet; 62, concave groove; 63, rotating connecting rod; 64, connecting disc; 65, smooth convex block; 71, sliding support rod; 72, first shaking plate; 73, connecting spring; 74, first connecting block; 75, second shaking plate; 76, second connecting block; 77, third shaking plate; 78, through hole. Specific embodiments

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] Please refer to Figures 1 to 13, the present invention provides a technical solution: a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, including a support fixing frame 1 and a fluorine-lined tank body 2, further comprising: a plurality of internal anti-surge plates 4 fixedly arranged inside the fluorine-lined tank body 2, with a central through-hole 8 formed on the internal anti-surge plate 4; a heat-conducting cavity sheet 5 communicatively arranged on the internal anti-surge plate 4 for accelerating the heat conduction of hydrogen peroxide; a cooling device 3 arranged on the support fixing frame 1 and communicatively connected to the heat-conducting cavity sheet 5, the cooling device 3 includes a water receiving tank 33, a first cold water tank 36 and a second cold water tank 39, and the first cold water tank 36 and the second cold water tank 39 alternately supply cooling water; a power cooperation component 6 arranged inside the central through-hole 8, driven by the water waves generated by the sloshing of hydrogen peroxide; a flow component 7 arranged inside the heat-conducting cavity sheet 5, driven by the power cooperation component 6 to accelerate the convection of the cooling water inside the heat-conducting cavity sheet 5 and the internal anti-surge plate 4. By providing a temperature sensor and a controller, when the temperature of the hydrogen peroxide inside the fluorine-lined tank body 2 rises, the cooling mechanism can be quickly triggered, and the controller precisely controls the water pump 313 to transport cold water through the water inlet connecting pipe 314 to the inside of the internal anti-surge plate 4 and the heat-conducting cavity sheet 5 for timely heat exchange, avoiding the risk of hydrogen peroxide decomposition caused by excessive temperature, and providing a reliable guarantee for the safe transportation of electronic-grade hydrogen peroxide. During transportation, through the cooperation of the power cooperation component 6 and the flow component 7, the water waves generated by the sloshing of hydrogen peroxide impact the rotating piece 61, and the smooth convex block 65 on the connecting disc 64 can push the third sloshing plate 77, smoothly driving the synchronous movement of the second sloshing plate 75 and the third sloshing plate 77 to achieve permeating push flow. This process accelerates the convection of the cooling water inside the heat-conducting cavity sheet 5 and the internal anti-surge plate 4, making the cooling water flow more violently, significantly enhancing its convective heat transfer effect with the inner wall, accelerating the transfer of heat from the internal anti-surge plate 4 and the heat-conducting cavity sheet 5 to the cooling water, and effectively improving the overall cooling efficiency. By providing the cooling device 3, the first cold water tank 36 and the second cold water tank 39 alternately supply cold water, ensuring the continuous low temperature of the cooling water. When one of the water tanks provides low-temperature cooling water for the system, the other water tank receives the return water after heat exchange and quickly cools it using a refrigeration device, avoiding the accumulation and temperature rise of the water after heat exchange in the water tank, and always maintaining the low temperature state of the cooling water in the water tank.

[0032] Such as Figure 7 and Figure 9As shown, the power matching component 6 includes a rotating connecting rod 63 rotatably arranged on the internal wave-breaking plate 4, and a plurality of rotating plates 61 are fixedly arranged on the part of the rotating connecting rod 63 located inside the middle through hole 8. Both ends of the rotating connecting rod 63 are fixedly connected with connecting discs 64, and smooth protrusion blocks 65 are symmetrically arranged on the connecting disc 64. A recessed groove 62 is provided on the rotating plate 61. When the connecting disc 64 rotates, the smooth protrusion blocks 65 contact the third shaking plate 77 in the flow component 7 and promote its linear displacement. During transportation, the driving of the vehicle will cause the hydrogen peroxide to shake, and the shaking of the hydrogen peroxide will generate water waves, which will impact the rotating plate 61. Since the rotating plate 61 is arranged in the middle through hole 8 of the internal wave-breaking plate 4 and has a recessed groove 62 on the edge, the shaking hydrogen peroxide will push the rotating plate 61 to rotate with the rotating connecting rod 63. The rotation of the rotating plate 61 drives the connecting disc 64 to rotate through the rotating connecting rod 63, and the smooth protrusion blocks 65 on the connecting disc 64 will push the third shaking plate 77.

[0033] like Figure 12 As shown, by providing the cooling device 3, the first cold water tank 36 and the second cold water tank 39 are alternately supplied with cold water, ensuring the continuous low temperature of the cooling water. When one of the water tanks provides low-temperature cooling water for the system, the other water tank receives the return water after heat exchange and uses the refrigeration equipment to quickly cool it down, avoiding the accumulation and temperature rise of the water after heat exchange in the water tank, and always maintaining the low temperature state of the cooling water in the water tank. During transportation, Figures 7 to 10 As shown, through the cooperation of the power matching component 6 and the flow component 7, the water waves generated by the shaking of the hydrogen peroxide impact the rotating plate 61, which can realize the smooth protrusion block 65 on the connecting disk 64 to push the third shaking plate 77, and smoothly drive the second shaking plate 75 and the third shaking plate 77 to move synchronously to realize the penetration flow. This process accelerates the convection of the cooling water in the heat-conducting cavity plate 5 and the internal wave-breaking plate 4, making the cooling water flow more violent, significantly enhancing the convection heat exchange effect with the inner wall, and accelerating the heat transfer from the internal wave-breaking plate 4 and the heat-conducting cavity plate 5 to the cooling water, effectively improving the overall cooling efficiency. By providing a temperature sensor and a controller, when the temperature of the hydrogen peroxide in the fluorine-lined tank body 2 rises, the cooling mechanism can be quickly triggered, and the controller accurately controls the water pump 313 to transport cold water to the internal wave-breaking plate 4 and the heat-conducting cavity plate 5 through the water inlet connecting pipe 314, so as to carry out heat exchange in time, avoid the risk of hydrogen peroxide decomposition caused by excessive temperature, and provide reliable guarantee for the safe transportation of electronic-grade hydrogen peroxide.

[0034] like Figure 8 as well as Figure 10As shown, the flow component 7 includes a first shaking plate 72, a second shaking plate 75, and a third shaking plate 77 that are sequentially arranged inside the heat-conducting cavity sheet 5. A sliding support rod 71 is slidably connected to the first shaking plate 72. The sliding support rod 71 is horizontally fixed inside the heat-conducting cavity sheet 5. A plurality of connecting springs 73 are arranged between the first shaking plate 72 and the inner wall of the heat-conducting cavity sheet 5. Both ends of the connecting spring 73 are fixedly connected to the heat-conducting cavity sheet 5 and the first shaking plate 72 respectively. The first shaking plate 72 and the second shaking plate 75 are fixedly connected through a first connecting block 74. The second shaking plate 75 and the third shaking plate 77 are fixedly connected through a second connecting block 76. A plurality of through holes 78 are provided on the first shaking plate 72, the second shaking plate 75, and the third shaking plate 77. The smooth convex block 65 on the connecting disc 64 will push the third shaking plate 77, thereby causing the first shaking plate 72 to slide on the sliding support rod 71. When the first shaking plate 72 slides, it drives the connecting spring 73 to deform, thereby realizing the penetration and pushing flow of the first shaking plate 72, the second shaking plate 75, and the third shaking plate 77, thus accelerating the convection of the water inside the heat-conducting cavity sheet 5 and the internal anti-wave plate 4, making the cooling water flow more violently, enhancing the convective heat transfer effect between the cooling water and the inner wall of the internal anti-wave plate 4 and the heat-conducting cavity sheet 5, helping to transfer heat from the internal anti-wave plate 4 and the heat-conducting cavity sheet 5 to the cooling water faster, and thus improving the overall cooling efficiency.

[0035] As Figures 11 to 13As shown in the figure, the cooling device 3 further includes a water outlet connecting pipe 31, a connecting short pipe 32, and a water inlet connecting pipe 314. The water outlet connecting pipe 31 and the connecting short pipe 32 are used to introduce the cooling water in the heat conduction cavity sheet 5 into the water receiving tank 33. A first communication conduit 34 and a second communication conduit 37 are connected and arranged at the lower end of the water receiving tank 33. A first cold water tank 36 and a second cold water tank 39 are respectively connected and arranged to the first communication conduit 34 and the second communication conduit 37. A first solenoid valve 35 and a second solenoid valve 38 are respectively arranged on the first communication conduit 34 and the second communication conduit 37. A tee connecting pipe 310 is connected to the lower ends of the first cold water tank 36 and the second cold water tank 39. A solenoid valve one 311 and a solenoid valve two 312 are arranged on the tee connecting pipe 310. The solenoid valve one 311 is used to control the water outlet of the first cold water tank 36, and the solenoid valve two 312 is used to control the water outlet of the second cold water tank 39. Refrigeration devices are arranged on both the first cold water tank 36 and the second cold water tank 39. The refrigeration device, the temperature sensor, and the controller are all mature existing technologies and will not be elaborated here. A water pump 313 is arranged between the water inlet connecting pipe 314 and the tee connecting pipe 310. The water pump 313 is used to pump the cooled water into the internal anti-wave plate 4. By controlling the on-off states of the first solenoid valve 35, the second solenoid valve 38, the solenoid valve one 311, and the solenoid valve two 312, the first cold water tank 36 and the second cold water tank 39 alternately supply the cooling water. In order to ensure the continuous low temperature of the cooling water, the solenoid valve two 312 and the solenoid valve one 311 are alternately opened and closed. When the solenoid valve two 312 is opened, the solenoid valve one 311 and the second solenoid valve 38 are in the closed state. The second cold water tank 39 supplies cold water. The first solenoid valve 35 is in the open state. The water after heat exchange in the water receiving tank 33 flows into the first cold water tank 36, realizing the rapid water storage of the first cold water tank 36. After the water tank is full, the first solenoid valve 35 is closed and the water in the first cold water tank 36 is cooled by the refrigeration device; when the solenoid valve one 311 is opened, the solenoid valve two 312 and the first solenoid valve 35 are in the closed state. The first cold water tank 36 supplies cold water. The second cold water tank 39 is in the state of storing water and cooling the water therein, realizing the alternate supply of cooling water by the first cold water tank 36 and the second cold water tank 39, avoiding the accumulation and temperature rise of the water after heat exchange in the water tank, and always maintaining the low temperature state of the cooling water in the water tank.

[0036] As Figure 5 shown, the internal anti-wave plate 4 is further provided with an upper through hole 9 and a bottom communication hole 10.

[0037] In actual use, when the temperature sensor in the fluorine-lined tank body 2 detects that the temperature of hydrogen peroxide is relatively high, it transmits a signal to the controller. The controller controls the water pump 313 to deliver cold water into the water inlet connecting pipe 314. The cold water enters the internal anti-wave plate 4 and the heat conduction cavity sheet 5 through the water inlet connecting pipe 314, and finally flows into the water receiving tank 33 from the water outlet connecting pipe 31 and the connecting short pipe 32. By providing the heat conduction cavity sheet 5, the heat exchange area is increased. During transportation, the driving of the vehicle will cause the hydrogen peroxide to shake, and the shaking of the hydrogen peroxide generates water waves, which will impact the rotating piece 61. Since the rotating piece 61 is arranged in the middle through hole 8 and there is a concave groove 62 at the edge, the shaking hydrogen peroxide will push the rotating piece 61 to rotate together with the rotating connecting rod 63. The rotation of the rotating piece 61 drives the connecting disc 64 to rotate through the rotating connecting rod 63. The smooth convex block 65 on the connecting disc 64 will push the third shaking plate 77 to move, thereby driving the first shaking plate 72 to slide on the sliding support rod 71. When the first shaking plate 72 slides, it drives the connecting spring 73 to deform. Under the elastic action of the connecting spring 73, the penetration and pushing flow of the first shaking plate 72, the second shaking plate 75, and the third shaking plate 77 are realized, thereby accelerating the convection of the water inside the heat conduction cavity sheet 5 and the internal anti-wave plate 4, making the cooling water flow more violently, enhancing the convective heat transfer effect between the cooling water and the inner wall of the internal anti-wave plate 4 and the heat conduction cavity sheet 5, helping to transfer heat from the internal anti-wave plate 4 and the heat conduction cavity sheet 5 to the cooling water faster, and thus improving the overall cooling efficiency. To ensure the continuous low temperature of the cooling water, the second solenoid valve 312 and the first solenoid valve 311 are alternately opened and closed. When the second solenoid valve 312 is opened, the first solenoid valve 311 and the second solenoid valve 38 are in the closed state. The second cold water tank 39 supplies cold water. The first solenoid valve 35 is in the open state, and the water after heat exchange in the water receiving tank 33 flows into the first cold water tank 36, realizing the rapid water storage of the first cold water tank 36. After the water tank is full, the first solenoid valve 35 is closed and the water in the first cold water tank 36 is cooled by the refrigeration device. When the first solenoid valve 311 is opened, the second solenoid valve 312 and the first solenoid valve 35 are in the closed state. The first cold water tank 36 supplies cold water. The second cold water tank 39 is in the process of water storage and the water in it is cooled by the refrigeration device, realizing the alternate supply of cooling water by the first cold water tank 36 and the second cold water tank 39.

[0038] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, comprising a support fixing frame and a fluorine-lined tank body, characterized in that, It also includes: A plurality of internal anti-wave plates are fixedly arranged inside the fluorine-lined tank body, and a central through-hole is formed on the internal anti-wave plate; A heat-conducting cavity sheet is connected and arranged on the internal anti-wave plate for accelerating the heat conduction of hydrogen peroxide; A cooling device is arranged on the support fixing frame and communicated with the heat-conducting cavity sheet. The cooling device includes a water receiving tank, a first cold water tank and a second cold water tank, and the first cold water tank and the second cold water tank alternately supply cooling water; A power matching component is arranged in the central through-hole and is driven to operate by the water waves generated by the shaking of hydrogen peroxide; A flow component is arranged inside the heat-conducting cavity sheet and is driven by the power matching component to accelerate the convection of the cooling water in the heat-conducting cavity sheet and the internal anti-wave plate.

2. The lining fluorine tank structure for transporting electronic-grade hydrogen peroxide according to claim 1, characterized in that: The power matching component includes a rotating connecting rod rotatably arranged on the internal anti-wave plate, and a plurality of rotating sheets are fixedly arranged on the part of the rotating connecting rod located inside the central through-hole.

3. The lining fluorine tank structure for transporting electronic-grade hydrogen peroxide according to claim 2, characterized in that: Both ends of the rotating connecting rod are fixedly connected with connecting discs, and smooth convex blocks are symmetrically arranged on the connecting discs, and concave grooves are formed on the rotating sheets; When the connecting disc rotates, the smooth convex block contacts the third shaking plate in the flow component and pushes it to linearly displace.

4. The lining fluorine tank structure for transporting electronic-grade hydrogen peroxide according to claim 3, characterized in that: The flow component includes a first shaking plate, a second shaking plate and a third shaking plate sequentially arranged inside the heat-conducting cavity sheet; A sliding support rod is slidably connected to the first shaking plate, the sliding support rod is horizontally fixed inside the heat-conducting cavity sheet, and a plurality of connecting springs are arranged between the first shaking plate and the inner wall of the heat-conducting cavity sheet.

5. The lining fluorine tank structure for transporting electronic-grade hydrogen peroxide according to claim 4, characterized in that: Both ends of the connecting spring are fixedly connected with the heat-conducting cavity sheet and the first shaking plate respectively, and the first shaking plate and the second shaking plate are fixedly connected through a first connecting block.

6. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 5, characterized in that: The second shaking plate and the third shaking plate are fixedly connected through a second connecting block, and a plurality of through-holes are formed on the first shaking plate, the second shaking plate and the third shaking plate.

7. The lining fluorine tank structure for transporting electronic-grade hydrogen peroxide according to claim 1, characterized in that: The cooling device also includes an outlet connecting pipe, a connecting short pipe and an inlet connecting pipe. The outlet connecting pipe and the connecting short pipe are used to introduce the cooling water in the heat-conducting cavity sheet into the water receiving tank.

8. An inner fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 7, characterized in that: A first communicating conduit and a second communicating conduit are connected and arranged at the lower end of the water receiving tank, and the first communicating conduit and the second communicating conduit are respectively connected and arranged with a first cold water tank and a second cold water tank.

9. The lining fluorine tank structure for transporting electronic-grade hydrogen peroxide according to claim 8, characterized in that: A first solenoid valve and a second solenoid valve are respectively arranged on the first communicating conduit and the second communicating conduit, and a tee connecting pipe is connected to the lower ends of the first cold water tank and the second cold water tank.

10. The lining fluorine tank structure for transporting electronic-grade hydrogen peroxide according to claim 9, characterized in that: A solenoid valve one and a solenoid valve two are arranged on the tee connecting pipe. The solenoid valve one is used to control the water outlet of the first cold water tank, the solenoid valve two is used to control the water outlet of the second cold water tank, and refrigeration devices are arranged on both the first cold water tank and the second cold water tank.

11. A fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 10, characterized in that: A water pump is arranged between the inlet connecting pipe and the tee connecting pipe, and the water pump is used to pump the cooled water into the internal anti-wave plate; By controlling the on-off states of the first solenoid valve, the second solenoid valve, the solenoid valve one and the solenoid valve two, the first cold water tank and the second cold water tank alternately supply cooling water.

12. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 1, wherein: Upper through-holes and bottom communicating holes are also arranged on the internal anti-wave plate.

Images