A fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide

Abstract

The present invention relates to the technical field of fluorine-lined tanks, and specifically to a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, comprising a supporting frame and a fluorine-lined tank body, and further comprising: a plurality of internal wave-breaking plates fixedly arranged inside the fluorine-lined tank body, wherein a central through hole is opened on the internal wave-breaking plates; a heat-conducting cavity plate connected and arranged on the internal wave-breaking plates, for accelerating the heat conduction of hydrogen peroxide; through the cooperation of a power matching component and a flow component, water waves generated by the shaking of hydrogen peroxide impact the rotating plate, so that the smooth protrusion block on the connecting disc pushes the third shaking plate, and smoothly drives the second shaking plate and the third shaking plate to move synchronously, realizing osmotic flow, and this process accelerates the convection of cooling water in the heat-conducting cavity plate and the internal wave-breaking plates, making the cooling water flow more intense, significantly enhancing the convective heat exchange effect with the inner wall, accelerating the transfer of heat from the internal wave-breaking plates and the heat-conducting cavity plate to the cooling water, and effectively improving the overall cooling efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of fluorine-lined tanks, in particular to a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide. Background Art

[0002] Electronic-grade hydrogen peroxide is a high-purity solution primarily used in cleaning and etching processes for semiconductors, solar cells, LEDs, LCDs, and other electronics industries. It is extremely sensitive to temperature fluctuations. During transportation, existing fluorine-lined tanks are typically equipped with wave-breaking panels to physically reduce the sloshing of hydrogen peroxide within the tank, ensuring stability during transportation to a certain extent. Traditional tanks lack effective heat dissipation structures and are unable to promptly dissipate the heat generated by ambient temperature fluctuations, sloshing, and friction. This causes the temperature within the tank to rise, which in turn triggers the decomposition of hydrogen peroxide. This not only results in reduced product quality and material waste, but also poses a safety hazard and fails to meet the stringent transportation temperature requirements for electronic-grade hydrogen peroxide. Summary of the Invention

[0003] The object of the present invention is to provide a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above-mentioned object, the present invention provides the following technical solution: a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, comprising a supporting frame and a fluorine-lined tank body, and further comprising:

[0005] A plurality of internal wave-breaking plates are fixedly arranged inside the fluorine-lined tank body, and a central through hole is opened on the internal wave-breaking plates;

[0006] The heat-conducting cavity sheet is connected to the internal anti-wave plate to accelerate the heat conduction of hydrogen peroxide;

[0007] A cooling device is provided on the supporting frame and is in communication with the heat-conducting cavity sheet, the cooling device comprising a water receiving tank, a first cold water tank and a second cold water tank, the first cold water tank and the second cold water tank alternately supplying cooling water;

[0008] The power matching component is arranged in the middle through hole and is driven by the water waves generated by the shaking of hydrogen peroxide;

[0009] The flow component is arranged inside the heat-conducting cavity sheet and is driven by the power matching component to accelerate the convection of cooling water between the heat-conducting cavity sheet and the internal wave-breaking plate.

[0010] Preferably, the power matching assembly includes a rotating connecting rod rotatably arranged on the internal wave-breaking plate, and a portion of the rotating connecting rod located inside the central through hole is fixedly provided with a plurality of rotating plates.

[0011] Preferably, both ends of the rotating connecting rod are fixedly connected to a connecting disc, smooth protrusions are symmetrically arranged on the connecting disc, and a recessed groove is provided on the rotating plate. When the connecting disc rotates, the smooth protrusion contacts the third shaking plate in the flow component and pushes its linear displacement.

[0012] Preferably, the flow component includes a first shaking plate, a second shaking plate and a third shaking plate which are sequentially arranged inside the heat-conducting cavity sheet, the first shaking plate is slidably connected to a sliding support rod, the sliding support rod is laterally fixed in the heat-conducting cavity sheet, and a plurality of connecting springs are arranged between the first shaking plate and the inner wall of the heat-conducting cavity sheet.

[0013] Preferably, the two ends of the connecting spring are fixedly connected to the heat-conducting cavity plate and the first shaking plate respectively, the first shaking plate and the second shaking plate are fixedly connected by a first connecting block, and the second shaking plate and the third shaking plate are fixedly connected by a second connecting block, and the first shaking plate, the second shaking plate and the third shaking plate are all provided with a plurality of through holes.

[0014] Preferably, the cooling device further comprises a water outlet connecting pipe, a connecting short pipe and a water inlet connecting pipe, wherein the water outlet connecting pipe and the connecting short pipe are used to guide the cooling water in the heat-conducting cavity sheet into the water receiving tank.

[0015] Preferably, the lower end of the water receiving tank is connected to a first connecting conduit and a second connecting conduit, the first connecting conduit and the second connecting conduit are respectively connected to a first cold water tank and a second cold water tank, the first connecting conduit and the second connecting conduit are respectively provided with a first solenoid valve and a second solenoid valve, and the lower ends of the first cold water tank and the second cold water tank are connected by a three-way connecting pipe.

[0016] Preferably, solenoid valve 1 and solenoid valve 2 are provided on the three-way connecting pipe, solenoid valve 1 is used to control the water outlet of the first cold water tank, and solenoid valve 2 is used to control the water outlet of the second cold water tank, and refrigeration equipment is provided on the first cold water tank and the second cold water tank.

[0017] Preferably, a water pump is provided between the water inlet pipe and the three-way pipe, and the water pump is used to pump the cooled water into the internal wave-breaking plate, and by controlling the switching states of the first solenoid valve, the second solenoid valve, solenoid valve one and solenoid valve two, the first cold water tank and the second cold water tank are alternately supplied with cooling water.

[0018] Preferably, the inner wave-breaking plate is further provided with an upper through hole and a bottom connecting hole.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. By installing a temperature sensor and a controller, when the temperature of the hydrogen peroxide in the fluorine-lined tank rises, the cooling mechanism can be quickly triggered. The controller accurately controls the water pump to transport cold water through the water inlet pipe to the internal wave-breaking plate and heat-conducting cavity plate, so as to carry out heat exchange in time and avoid the risk of hydrogen peroxide decomposition due to excessive temperature, providing reliable protection for the safe transportation of electronic-grade hydrogen peroxide.

[0021] 2. During transportation, through the cooperation of the power matching component and the flow component, the water waves generated by the shaking of the hydrogen peroxide impact the rotating plate, which can realize the smooth protrusion block on the connecting disc to push the third shaking plate, and smoothly drive the second shaking plate and the third shaking plate to move synchronously to achieve infiltration and push flow. This process accelerates the convection of cooling water in the heat-conducting cavity plate and the internal wave-breaking plate, making the cooling water flow more intense, significantly enhancing its convection heat exchange effect with the inner wall, and accelerating the heat transfer from the internal wave-breaking plate and the heat-conducting cavity plate to the cooling water, effectively improving the overall cooling efficiency.

[0022] 3. By providing a cooling device, the first cold water tank and the second cold water tank can alternately supply cold water, ensuring the continuous low temperature of the cooling water. When one of the water tanks provides low-temperature cooling water for the system, the other water tank receives the return water after heat exchange and uses the refrigeration equipment to quickly cool it down, avoiding the accumulation and temperature increase of the water after heat exchange in the water tank, and always maintaining the low temperature state of the cooling water in the water tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0024] Figure 2 This is a structural schematic diagram from another perspective of the present invention.

[0025] Figure 3 This is a schematic diagram of the main structure of the fluorine-lined tank of the present invention.

[0026] Figure 4 This is a schematic diagram of the internal structure of the fluorine-lined tank body of the present invention.

[0027] Figure 5 Schematic diagram of the internal wave-breaking plate structure of the present invention.

[0028] Figure 6 Schematic diagram of the internal structure of the internal wave-breaking plate of the present invention.

[0029] Figure 7 Schematic diagram of the internal structure of the heat-conducting cavity sheet of the present invention.

[0030] Figure 8 This is a schematic diagram of the position structure of the flow components of the present invention.

[0031] Figure 9 It is a schematic diagram of the structure of the power matching component of the present invention.

[0032] Figure 10 Schematic diagram of the flow component structure of the present invention.

[0033] Figure 11 It is a schematic structural diagram of the cooling device of the present invention.

[0034] Figure 12 It is a schematic structural diagram of the cold water tank of the present invention.

[0035] Figure 13 It is a structural schematic diagram of the present invention.

[0036] In the figure: 1, support frame; 2, fluorine-lined tank body; 3, cooling device; 4, internal wave-proof plate; 5, heat-conducting cavity plate; 6, power matching component; 7, flow component; 8, middle through hole; 9, upper through hole; 10, bottom connecting hole; 31, water outlet pipe; 32, connecting short pipe; 33, water receiving box; 34, first connecting conduit; 35, first solenoid valve; 36, first cold water tank; 37, second connecting conduit; 38, second solenoid valve; 39, second Cold water tank; 310, three-way connecting pipe; 311, solenoid valve 1; 312, solenoid valve 2; 313, water pump; 314, water inlet connecting pipe; 61, rotating plate; 62, recessed groove; 63, rotating connecting rod; 64, connecting disc; 65, smooth raised block; 71, sliding support rod; 72, first shaking plate; 73, connecting spring; 74, first connecting block; 75, second shaking plate; 76, second connecting block; 77, third shaking plate; 78, through-hole. DETAILED DESCRIPTION

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0038] See also Figures 1 to 13The present invention provides a technical solution: a fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, comprising a support frame 1 and a fluorine-lined tank body 2, and further comprising: a plurality of internal wave-breaking plates 4, fixedly arranged inside the fluorine-lined tank body 2, with a central through hole 8 opened on the internal wave-breaking plates 4; a heat-conducting cavity sheet 5, connected to the internal wave-breaking plates 4, for accelerating the heat conduction of hydrogen peroxide; a cooling device 3, arranged on the support frame 1 and connected to the heat-conducting cavity sheet 5, the cooling device 3 comprising a water receiving tank 33, a first cold water tank 36 and a second cold water tank 39, the first cold water tank 36 and the second cold water tank 39 alternately supply cooling water; the power matching component 6 is arranged in the middle through hole 8 and is driven by the water waves generated by the shaking of the hydrogen peroxide; the flow component 7 is arranged inside the heat-conducting cavity sheet 5 and is driven by the power matching component 6 to accelerate the convection of the cooling water in the heat-conducting cavity sheet 5 and the internal anti-wave plate 4. By providing a temperature sensor and a controller, when the temperature of the hydrogen peroxide in the fluorine-lined tank body 2 rises, the cooling mechanism can be quickly triggered, and the controller accurately controls the water pump 313 to transport the cold water through the water inlet pipe 314 to the internal anti-wave plate 4 and the heat-conducting cavity sheet 5. Heat exchange is carried out in time inside the heat cavity sheet 5 to avoid the risk of hydrogen peroxide decomposition caused by excessive temperature, providing reliable protection for the safe transportation of electronic-grade hydrogen peroxide. During transportation, through the cooperation of the power matching component 6 and the flow component 7, the water waves generated by the shaking of the hydrogen peroxide impact the rotating sheet 61, which can realize the smooth protrusion block 65 on the connecting disc 64 to push the third shaking plate 77, and smoothly drive the second shaking plate 75 and the third shaking plate 77 to move synchronously to realize osmotic flow. This process accelerates the convection of cooling water in the heat-conducting cavity sheet 5 and the internal anti-wave plate 4, so that the cooling water The flow is more intense, which significantly enhances the convective heat exchange effect with the inner wall, accelerates the heat transfer from the internal wave-breaking plate 4 and the heat-conducting cavity plate 5 to the cooling water, and effectively improves the overall cooling efficiency. By providing a cooling device 3, the first cold water tank 36 and the second cold water tank 39 are alternately supplied with cold water, ensuring the continuous low temperature of the cooling water. When one of the water tanks provides low-temperature cooling water for the system, the other water tank receives the return water after heat exchange and uses the refrigeration equipment to quickly cool it down, avoiding the accumulation and temperature increase of the water after heat exchange in the water tank, and always maintaining the low temperature state of the cooling water in the water tank.

[0039] like Figure 7 as well as Figure 9As shown, the power matching component 6 includes a rotating connecting rod 63 rotatably arranged on the internal wave-breaking plate 4, and the part of the rotating connecting rod 63 located inside the central through hole 8 is fixedly provided with a plurality of rotating plates 61. Both ends of the rotating connecting rod 63 are fixedly connected to a connecting disc 64, and smooth protrusions 65 are symmetrically provided on the connecting disc 64. A recessed groove 62 is provided on the rotating plate 61. When the connecting disc 64 rotates, the smooth protrusions 65 contact the third shaking plate 77 in the flow component 7 and push its linear displacement. During transportation, the driving of the vehicle will cause the hydrogen peroxide to shake, and the shaking of the hydrogen peroxide will generate waves, which will impact the rotating plate 61. Since the rotating plate 61 is arranged in the central through hole 8 of the internal wave-breaking plate 4 and has a recessed groove 62 on the edge, the shaking hydrogen peroxide will push the rotating plate 61 to rotate with the rotating connecting rod 63. The rotation of the rotating plate 61 drives the connecting disc 64 to rotate through the rotating connecting rod 63, and the smooth protrusions 65 on the connecting disc 64 will push the third shaking plate 77.

[0040] like Figure 12 As shown, by providing the cooling device 3, the first cold water tank 36 and the second cold water tank 39 are alternately supplied with cold water, ensuring the continuous low temperature of the cooling water. When one of the water tanks provides low-temperature cooling water for the system, the other water tank receives the return water after heat exchange and uses the refrigeration equipment to quickly cool it down, avoiding the accumulation and temperature increase of the water after heat exchange in the water tank, and always maintaining the low temperature state of the cooling water in the water tank. During transportation, Figures 7 to 10 As shown, through the cooperation of the power matching component 6 and the flow component 7, the water waves generated by the shaking of the hydrogen peroxide impact the rotating plate 61, which can realize the smooth protrusion block 65 on the connecting disc 64 to push the third shaking plate 77, and smoothly drive the second shaking plate 75 and the third shaking plate 77 to move synchronously to realize osmotic flow. This process accelerates the convection of cooling water in the heat-conducting cavity plate 5 and the internal wave-breaking plate 4, making the cooling water flow more intense, significantly enhancing the convection heat exchange effect with the inner wall, and accelerating the heat transfer from the internal wave-breaking plate 4 and the heat-conducting cavity plate 5 to the cooling water, effectively improving the overall cooling efficiency. By providing a temperature sensor and a controller, when the temperature of the hydrogen peroxide in the fluorine-lined tank body 2 rises, the cooling mechanism can be quickly triggered, and the controller accurately controls the water pump 313 to transport cold water through the water inlet pipe 314 to the internal wave-breaking plate 4 and the heat-conducting cavity plate 5, so as to carry out heat exchange in time and avoid the risk of hydrogen peroxide decomposition due to excessive temperature, thereby providing reliable protection for the safe transportation of electronic-grade hydrogen peroxide.

[0041] like Figure 8 as well as Figure 10As shown, the flow component 7 includes a first shaking plate 72, a second shaking plate 75 and a third shaking plate 77 which are sequentially arranged inside the heat-conducting cavity sheet 5. The first shaking plate 72 is slidably connected to a sliding support rod 71, and the sliding support rod 71 is transversely fixed in the heat-conducting cavity sheet 5. A plurality of connecting springs 73 are provided between the first shaking plate 72 and the inner wall of the heat-conducting cavity sheet 5. The two ends of the connecting spring 73 are respectively fixedly connected to the heat-conducting cavity sheet 5 and the first shaking plate 72. The first shaking plate 72 and the second shaking plate 75 are fixedly connected by a first connecting block 74. The second shaking plate 75 and the third shaking plate 77 are fixedly connected by a second connecting block 76. The first shaking plate 72, the second shaking plate 75 and the third shaking plate 77 are fixedly connected by a second connecting block 76. 7 are provided with a plurality of through holes 78, and the smooth protrusion block 65 on the connecting disc 64 will push the third rocking plate 77, thereby making the first rocking plate 72 slide on the sliding support rod 71. When the first rocking plate 72 slides, it drives the connecting spring 73 to deform, thereby realizing the penetration and pushing flow of the first rocking plate 72, the second rocking plate 75 and the third rocking plate 77, thereby accelerating the convection of water inside the heat-conducting cavity sheet 5 and the internal wave-breaking plate 4, and making the cooling water flow more intense, thereby enhancing the convection heat exchange effect between the cooling water and the inner wall of the internal wave-breaking plate 4 and the heat-conducting cavity sheet 5, and helping to transfer heat from the internal wave-breaking plate 4 and the heat-conducting cavity sheet 5 to the cooling water faster, thereby improving the overall cooling efficiency.

[0042] like Figures 11 to 13As shown, the cooling device 3 also includes a water outlet pipe 31, a connecting short pipe 32 and a water inlet pipe 314. The water outlet pipe 31 and the connecting short pipe 32 are used to guide the cooling water in the heat-conducting cavity sheet 5 into the water receiving tank 33. The lower end of the water receiving tank 33 is connected with a first connecting pipe 34 and a second connecting pipe 37. The first connecting pipe 34 and the second connecting pipe 37 are respectively connected with a first cold water tank 36 and a second cold water tank 39. The first connecting pipe 34 and the second connecting pipe 37 are respectively provided with a first solenoid valve 35 and a second solenoid valve 38. The first cold water tank 36 and the second cold water tank 39 are respectively provided with a first solenoid valve 35 and a second solenoid valve 38. The lower end of the box 39 is connected to a three-way connecting pipe 310, and a solenoid valve 1 311 and a solenoid valve 2 312 are provided on the three-way connecting pipe 310. The solenoid valve 1 311 is used to control the water outlet of the first cold water tank 36, and the solenoid valve 2 312 is used to control the water outlet of the second cold water tank 39. The first cold water tank 36 and the second cold water tank 39 are both provided with refrigeration equipment. The refrigeration equipment, temperature sensor and controller are all mature existing technologies and are not described here. A water pump 313 is provided between the water inlet pipe 314 and the three-way connecting pipe 310. The water pump 313 is used to pump the cooled water into the internal wave-breaking plate 4. By controlling the switching states of the first solenoid valve 35, the second solenoid valve 38, the solenoid valve 1 311 and the solenoid valve 2 312, the first cold water tank 36 and the second cold water tank 39 are alternately supplied with cooling water. In order to ensure the continuous low temperature of the cooling water, the solenoid valve 2 312 and the solenoid valve 1 311 are alternately opened and closed. When the solenoid valve 2 312 is opened, the solenoid valve 1 311 and the second solenoid valve 38 are closed, the second cold water tank 39 realizes the supply of cold water, the first solenoid valve 35 is opened, and the water after heat exchange in the water receiving tank 33 flows into the first cold water tank. In the box 36, the first cold water tank 36 is quickly filled with water. After the water is filled, the first solenoid valve 35 is closed and the water in the first cold water tank 36 is cooled by the refrigeration equipment; when the solenoid valve 1 311 is open, the solenoid valve 2 312 and the first solenoid valve 35 are in a closed state, the first cold water tank 36 realizes the supply of cold water, and the second cold water tank 39 is in a state of storing water and cooling the water therein, so that the first cold water tank 36 and the second cold water tank 39 alternately supply cooling water, avoiding the accumulation and heating of water in the water tank after heat exchange, and always maintaining the low temperature state of the cooling water in the water tank.

[0043] like Figure 5 As shown, the inner wave-breaking plate 4 is further provided with an upper through hole 9 and a bottom communicating hole 10 .

[0044] In actual use, when the temperature sensor in the fluorine-lined tank body 2 detects that the temperature of the hydrogen peroxide is high, the signal is transmitted to the controller, and the controller controls the water pump 313 to transport cold water to the water inlet pipe 314. The cold water enters the internal wave-breaking plate 4 and the heat-conducting cavity sheet 5 through the water inlet pipe 314, and finally flows into the water receiving box 33 from the water outlet pipe 31 and the connecting short pipe 32. The heat exchange area is increased by providing the heat-conducting cavity sheet 5. During transportation, the driving of the vehicle will cause the hydrogen peroxide to shake, and the shaking of the hydrogen peroxide will generate water waves, which will impact the rotating sheet 61. Since the rotating sheet 61 is arranged There is a recessed groove 62 in the middle through hole 8 and on the edge. The shaking hydrogen peroxide will push the rotating piece 61 to rotate together with the rotating connecting rod 63. The rotation of the rotating piece 61 drives the connecting disc 64 to rotate through the rotating connecting rod 63. The smooth protrusion block 65 on the connecting disc 64 will push the third shaking plate 77 to move, thereby driving the first shaking plate 72 to slide on the sliding support rod 71. When the first shaking plate 72 slides, it drives the connecting spring 73 to deform. Under the elastic action of the connecting spring 73, the first shaking plate 72, the second shaking plate 75 and the third shaking plate 77 are penetrated and pushed, thereby accelerating the The convection of water inside the heat-conducting cavity sheet 5 and the internal anti-wave plate 4 can make the cooling water flow more intense, thereby enhancing the convection heat exchange effect between the cooling water and the internal anti-wave plate 4 and the inner wall of the heat-conducting cavity sheet 5, and helping to transfer heat from the internal anti-wave plate 4 and the heat-conducting cavity sheet 5 to the cooling water more quickly, thereby improving the overall cooling efficiency. In order to ensure the continuous low temperature of the cooling water, the solenoid valve 2 312 and the solenoid valve 1 311 are alternately opened and closed. When the solenoid valve 2 312 is opened, the solenoid valve 1 311 and the second solenoid valve 38 are in the closed state, and the second cold water tank 39 realizes the supply of cold water. When the first solenoid valve 35 is in the open state, the water after heat exchange in the water receiving tank 33 flows into the first cold water tank 36, so that the first cold water tank 36 can quickly store water. After the water is filled, the first solenoid valve 35 is closed and the water in the first cold water tank 36 is cooled by the refrigeration equipment; when the solenoid valve 1 311 is in the open state, the solenoid valve 2 312 and the first solenoid valve 35 are in the closed state, the first cold water tank 36 realizes the supply of cold water, the second cold water tank 39 is in the water storage state and the water therein is cooled by the refrigeration equipment, so that the first cold water tank 36 and the second cold water tank 39 alternately supply cooling water.

[0045] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide, comprising a supporting frame and a fluorine-lined tank body, characterized in that: Also includes: A plurality of internal wave-breaking plates are fixedly arranged inside the fluorine-lined tank body, and a central through hole is opened on the internal wave-breaking plates; The heat-conducting cavity sheet is connected to the internal anti-wave plate to accelerate the heat conduction of hydrogen peroxide; A cooling device is provided on the supporting frame and is in communication with the heat-conducting cavity sheet, the cooling device comprising a water receiving tank, a first cold water tank and a second cold water tank, the first cold water tank and the second cold water tank alternately supplying cooling water; The power matching component is arranged in the middle through hole and is driven by the water waves generated by the shaking of hydrogen peroxide; The flow component is arranged inside the heat-conducting cavity sheet and is driven by the power matching component to accelerate the convection of cooling water between the heat-conducting cavity sheet and the internal wave-breaking plate; The power matching assembly includes a rotating connecting rod rotatably arranged on the internal wave-breaking plate, and a portion of the rotating connecting rod located inside the central through hole is fixedly provided with a plurality of rotating pieces; Both ends of the rotating connecting rod are fixedly connected to a connecting disc, smooth protrusions are symmetrically arranged on the connecting disc, and a concave groove is opened on the rotating piece; When the connecting disc rotates, the smooth protrusion contacts the third shaking plate in the flow assembly and pushes it to linear displacement; The flow assembly includes a first shaking plate, a second shaking plate and a third shaking plate which are sequentially arranged inside the heat-conducting cavity sheet; The first shaking plate is slidably connected to a sliding support rod, the sliding support rod is transversely fixed in the heat-conducting cavity sheet, and a plurality of connecting springs are provided between the first shaking plate and the inner wall of the heat-conducting cavity sheet; The two ends of the connecting spring are fixedly connected to the heat-conducting cavity sheet and the first shaking plate respectively, and the first shaking plate and the second shaking plate are fixedly connected via a first connecting block; The second shaking plate and the third shaking plate are fixedly connected via a second connecting block, and a plurality of through holes are provided on the first shaking plate, the second shaking plate and the third shaking plate.

2. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 1, characterized in that: The cooling device further comprises a water outlet connecting pipe, a connecting short pipe and a water inlet connecting pipe, wherein the water outlet connecting pipe and the connecting short pipe are used to guide the cooling water in the heat-conducting cavity sheet into the water receiving box.

3. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 2, characterized in that: The lower end of the water receiving tank is connected to a first connecting conduit and a second connecting conduit, and the first connecting conduit and the second connecting conduit are respectively connected to a first cold water tank and a second cold water tank.

4. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 3, characterized in that: The first and second communicating conduits are provided with a first and second solenoid valves, respectively. The lower ends of the first and second cold water tanks are connected with a three-way connecting pipe.

5. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 4, characterized in that: The three-way connecting pipe is provided with a solenoid valve 1 and a solenoid valve 2. The solenoid valve 1 is used to control the water outlet of the first cold water tank, and the solenoid valve 2 is used to control the water outlet of the second cold water tank. Both the first cold water tank and the second cold water tank are provided with refrigeration equipment.

6. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 5, characterized in that: A water pump is provided between the water inlet connecting pipe and the three-way connecting pipe, and the water pump is used to pump the cooled water into the internal wave-breaking plate; By controlling the switching states of the first solenoid valve, the second solenoid valve, the first solenoid valve and the second solenoid valve, the first cold water tank and the second cold water tank can alternately supply cooling water.

7. The fluorine-lined tank structure for transporting electronic-grade hydrogen peroxide according to claim 1, characterized in that: The inner wave-breaking plate is also provided with an upper through hole and a bottom communicating hole.

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