Optical glass hydrogen-oxygen catalytic bonding performance testing system and method

Abstract

The present invention relates to the technical field of optical precision instrument design, and in particular to a system and method for testing the hydrogen-oxygen catalytic bonding performance of optical glass. The system determines multiple bonding parameters when a sample to be bonded undergoes hydrogen-oxygen catalytic bonding; changes one of the bonding parameters while keeping the other bonding parameters unchanged, and uses a performance testing system consisting of a bonding solution preparation unit, an optical element surface measurement unit, a light spot position monitoring unit, a constant temperature heating unit, and a bonding strength testing unit to measure the bonding time and bonding strength of the currently bonded sample to obtain the effect of the changed bonding parameters on the bonding time or bonding strength; and replaces the changed bonding parameters to obtain the effect of each bonding parameter on the bonding time or bonding strength. The present invention performs cyclic testing and data analysis on different bonding parameters when the sample to be bonded undergoes hydrogen-oxygen catalytic bonding under the same experimental system to comprehensively evaluate the effect on bonding time and bonding strength.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical precision instrument design, and in particular relates to a system and method for testing the hydrogen-oxygen catalytic bonding performance of optical glass. Background Art

[0002] In space gravitational wave detection missions, the ultra-stable optical bench (USOB) is a key component for achieving high-precision optical measurements. Its primary mission is to ensure precise measurement of extremely low noise and minute displacements (on the order of pm) in harsh environments, such as the vibrations and temperature fluctuations generated during space launches. Traditional USOB solutions often utilize metal support structures, but metal materials exhibit defects such as thermal expansion and contraction and inherent noise, resulting in high overall noise levels and making it difficult to meet the ultra-low noise and high stability requirements of next-generation space gravitational wave detection. Consequently, fully glass-clad designs are gaining increasing attention. The key lies in achieving low-stress, high-precision, and durable, reliable bonding between optical components.

[0003] Hydroxide Catalysis Bonding (HCB) technology has become a key process for constructing fully vitrified, ultra-stable optical platforms because it forms a strong Si-O-Si covalent bond between oxide glasses such as silica, without the introduction of additional fillers and resulting in extremely low stress. This process utilizes trace amounts of aqueous hydroxide solution to first generate hydroxyl structures on the glass surface, which then form strong siloxane bonds through polymerization. Finally, the process dehydrates and solidifies at room temperature, gradually building stable bonding strength. While HCB technology has shown great potential both theoretically and practically, its bonding performance is subject to instability, placing stringent demands on process optimization and reliable application.

[0004] The existing hydrogen-oxygen catalytic bonding performance test still has the following problems:

[0005] (1) Fragmented experimental procedures and inconsistent data processing methods: In existing technologies, studies on hydrogen-oxygen catalytic bonding often use fragmented experimental steps, failing to form a complete closed-loop process of "preparation-testing-analysis-optimization". The test methods and data processing standards used by each laboratory vary, resulting in a lack of comparability between results and difficulty in providing unified process parameter guidance for actual engineering applications.

[0006] (2) Lack of a multi-parameter comprehensive analysis system: Current research typically only examines the effects of single factors such as solution molar ratio, solution addition amount, or optical component surface shape on bonding performance, but fails to establish a comprehensive analysis method covering multiple key parameters (including molar ratio, addition amount, component surface shape error, heating temperature and heating time, etc.). This makes it impossible to systematically evaluate and optimize bonding performance when facing the application requirements of ultra-stable optical platforms on actual space platforms, resulting in instability and insufficient repeatability of bonding results. Summary of the Invention

[0007] In view of this, the present invention aims to provide a system and method for testing the hydrogen-oxygen catalytic bonding performance of optical glass, which performs cyclic testing and data analysis on different bonding parameters during hydrogen-oxygen catalytic bonding of the samples to be bonded under the same experimental system, so as to comprehensively evaluate the impact on bonding time and bonding strength.

[0008] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0009] An optical glass hydrogen-oxygen catalytic bonding performance testing system includes:

[0010] A bonding solution preparation unit, used for preparing hydrogen-oxygen catalytic bonding solutions with different molar ratios;

[0011] Optical element surface measurement unit, used for measuring the surface of the sample to be bonded;

[0012] The light spot position monitoring unit irradiates the sample group to be bonded with the hydrogen-oxygen catalytic bonding solution dripped thereon with laser light, and collects the light spot position data of the light spot generated by the sample group to be bonded in real time, and obtains the initial bonding time when the sample group to be bonded becomes the initial bonding sample;

[0013] The constant temperature heating unit provides a heating environment for the preliminary bonding sample, completes the hydrogen-oxygen catalytic bonding of the sample to be bonded, and obtains the bonded sample;

[0014] The bonding strength testing unit applies force to the bonding sample to cause the bonding sample to bend, and collects the bonding strength of the bonding sample in real time.

[0015] Furthermore, the bonding solution preparation unit includes:

[0016] A balance is used to weigh the corresponding mass of NaOH powder according to the set molar ratio;

[0017] Measuring cup, used to mix NaOH powder and deionized water to obtain the hydrogen-oxygen catalytic bonding solution;

[0018] A thermometer, used to measure the ambient temperature of the hydrogen-oxygen catalytic bonding solution in real time;

[0019] A constant temperature water bath is used to ensure that the preparation process of the hydrogen-oxygen catalytic bonding solution is always at a constant temperature.

[0020] Furthermore, the optical element surface measurement unit includes:

[0021] an interferometer for emitting interference light toward the surface of the sample to be bonded and / or the bonding surface, and receiving reflected light from the sample to be bonded and / or the bonding sample;

[0022] A displacement adjustment table, used for placing and adjusting the position of the sample to be bonded and / or the bonded sample;

[0023] The surface data acquisition system receives the reflected light information emitted by the interferometer and obtains the surface shape of the sample to be bonded and / or the bonding surface based on the reflected light information.

[0024] Furthermore, the light spot position monitoring unit includes:

[0025] A laser generator irradiates the laser to the sample group to be bonded;

[0026] The three-finger adjustment mechanism limits the position of the sample group to be bonded and drives the sample group to be bonded to move;

[0027] a detector for receiving laser light reflected from different positions of the sample group to be bonded;

[0028] The light spot data acquisition system receives and obtains the light spot position data based on the detection signal generated by the detector, and then calculates the preliminary bonding time based on the light spot position data. The process includes:

[0029] When the light spot data acquisition system detects that the change in the light spot position is lower than a preset threshold, the light spot data acquisition system records the current moment as the preliminary bonding time.

[0030] Furthermore, the spot position monitoring unit also includes a six-legged adjustment mechanism and a fiber optic coupler; wherein: the output laser of the laser generator is coupled by the fiber optic coupler and irradiated onto the sample group to be bonded; the six-legged adjustment mechanism includes six independently retractable and parallel-connected drive rods, and the six drive rods are connected between the upper and lower platforms to form a spatial rigid body structure; according to the desired position or posture changes of the six drive rods, the specific displacement required for each drive rod to be retracted and extended is calculated in combination with the inverse kinematics algorithm.

[0031] Furthermore, the constant temperature heating unit includes:

[0032] A constant temperature box is used to heat the preliminary bonding sample according to the target temperature, and the preliminary bonding sample is accelerated by heating to obtain a bonding sample;

[0033] The temperature control module adjusts the temperature in the constant temperature box from -10°C to 250°C, and the control accuracy of the temperature control module is ±0.5°C;

[0034] The temperature display module is used to display the temperature inside the constant temperature box in real time.

[0035] Furthermore, the bonding strength testing unit includes:

[0036] A force-applying device, using a three-point test method or a four-point bending test method, applies a force to the bonded sample that produces bending deformation;

[0037] Displacement sensor, which measures the displacement change of the force application point on the bonding sample in real time;

[0038] The force data acquisition system draws the force-displacement curve of the bonding sample during the force-bearing process based on the displacement change and force collected by the displacement sensor, and derives the bonding strength based on the force-displacement curve.

[0039] A method for testing the hydrogen-oxygen catalytic bonding performance of optical glass, comprising:

[0040] S1: determining multiple bonding parameters for hydrogen-oxygen catalytic bonding of the sample to be bonded;

[0041] S2: changing at least one bonding parameter in step S1, while keeping the other bonding parameters unchanged, and measuring the bonding time and bonding strength of the bonded sample obtained by the current bonding using the optical glass hydrogen-oxygen catalytic bonding performance testing system provided by the present invention;

[0042] S3: Repeat step S2 at least three times to obtain multiple sets of varying bonding parameters, bonding strengths, and bonding times; and determine the effects of varying the bonding parameters on bonding time or bonding strength based on the data distribution of the bonding parameters, the bonding strength, and the bonding time.

[0043] S4: changing the bonding parameters and repeating steps S2 to S3 to obtain the influence of each bonding parameter on the bonding time or bonding strength, and screening out the best bonding parameter combination.

[0044] Furthermore, the bonding parameters in step S1 include: the molar ratio concentration of the hydrogen-oxygen catalytic bonding solution, the amount of the hydrogen-oxygen catalytic bonding solution added, the surface shape error of the sample to be bonded, the heating temperature and heating time during the hydrogen-oxygen catalytic bonding, and the effective bonding area.

[0045] Furthermore, step S2 includes:

[0046] S21: setting the specific value of each bonding parameter in step S1;

[0047] S22: using a bonding solution preparation unit to prepare a hydrogen-oxygen catalytic bonding solution according to the data in step S21;

[0048] S23: Using an optical element surface measurement unit to measure the surface of the sample to be bonded, and cleaning the surface to be bonded after the measurement;

[0049] S24: using a pipette, drop the hydrogen-oxygen catalytic bonding solution prepared in step S22 onto the surface to be bonded in step S23, and gently place another sample to be bonded onto the surface to be bonded with the hydrogen-oxygen catalytic bonding solution. The other sample to be bonded adheres to the sample to be bonded with the hydrogen-oxygen catalytic bonding solution under the action of its own weight, and the hydrogen-oxygen catalytic bonding solution is evenly covered on the bonding interface, thereby forming a sample group to be bonded;

[0050] S25: Using a light spot position monitoring unit, measure the light spot position of the sample group to be bonded obtained in step S24, and obtain a preliminary bonding time;

[0051] S26: using a constant temperature heating unit to heat the preliminary bonding sample according to the data in step S21 to obtain a bonding sample;

[0052] S27: Using a bonding strength testing unit to test the bonding strength of the bonding sample obtained in step S26.

[0053] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0054] (1) The present invention creates a system and method for testing the hydrogen-oxygen catalytic bonding performance of optical glass. Under the same experimental system, the system conducts a multi-dimensional analysis of the key factors in hydrogen-oxygen catalytic bonding of the samples to be bonded through cyclic testing. Unlike the existing technology that only conducts scattered tests on a single parameter, the present invention establishes a unified "preparation-testing-analysis-optimization" closed-loop process, which can fully reveal the interaction between various parameters and provide complete data support and theoretical basis for process optimization. It can then quickly screen out the best process parameter combination to guide the optimization of subsequent bonding processes, thereby achieving the technical effect of reducing the number of trial and error, improving bonding performance and preparation efficiency;

[0055] (2) The optical glass hydrogen-oxygen catalytic bonding performance testing system and method created by the present invention can be iterated cyclically and the data comparison is sufficient. The cyclic process design is adopted. After completing the test of a parameter combination, the key parameters (such as molar ratio, addition amount, surface shape combination or heating conditions) can be flexibly adjusted and the experiment can be repeated to generate a large amount of comparable data. This not only improves the repeatability and comparability of the experimental data, but also makes the optimal process parameter combination more accurate, providing clear guidance for practical engineering applications;

[0056] (3) The optical glass hydrogen-oxygen catalytic bonding performance testing system and method described in the present invention records the changes in the light spot displacement during the bonding process in real time through a light spot position monitoring platform, accurately obtaining the initial bonding time. At the same time, a bending strength testing platform is used to perform three-point or four-point bending tests on fully cured samples to accurately calculate the bonding strength. Combined with unified data processing and visual analysis methods, the influence trend of different parameter combinations on bonding performance can be intuitively displayed, providing a reliable basis for subsequent process improvements.

[0057] (4) Through systematic process design and multi-parameter cyclic testing, the present invention can quickly screen out the optimal process parameter combination under laboratory conditions, reduce the number of repeated experiments and resource waste, thereby reducing R&D costs and production costs, improving overall process efficiency, and providing an economical and reliable technical solution for large-scale engineering applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0059] Figure 1 A schematic diagram of an optical element surface measurement unit according to an embodiment of the present invention;

[0060] Figure 2 A schematic diagram of a light spot position monitoring unit according to an embodiment of the present invention;

[0061] Figure 3 A schematic diagram of a constant temperature heating unit according to an embodiment of the present invention;

[0062] Figure 4 A schematic diagram of an adhesive strength testing unit according to an embodiment of the present invention;

[0063] Figure 5 A flow chart of a method for testing the hydrogen-oxygen catalytic bonding performance of optical glass according to an embodiment of the present invention;

[0064] Figure 6 This is a flowchart of a method for testing the hydrogen-oxygen catalytic bonding performance of optical glass according to an embodiment of the present invention;

[0065] Figure 7 A graph showing the relationship between the molar ratio concentration and the bonding time described in the embodiments of the present invention;

[0066] Figure 8 This is a graph showing the relationship between the amount of solution added and the bonding strength described in the embodiments of the present invention;

[0067] Figure 9 This is a relationship diagram between the surface error and the bonding strength described in the embodiment of the present invention.

[0068] Description of reference numerals:

[0069] 1. Interferometer; 2. Displacement adjustment table; 3. Surface data acquisition system; 4. Sample to be bonded; 5. Laser generator; 6. Three-finger adjustment mechanism; 7. Detector; 8. Spot data acquisition system; 9. Sample group to be bonded; 10. Hexapod adjustment mechanism; 11. Fiber coupler; 12. Constant temperature chamber; 13. Temperature control module; 14. Temperature display module; 15. Preliminary bonding sample; 16. Force application device; 17. Displacement sensor; 18. Force data acquisition system; 19. Bonding sample; 20. Limiting structure. DETAILED DESCRIPTION

[0070] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0071] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0072] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0073] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0074] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0075] The optical glass hydrogen-oxygen catalytic bonding performance testing system described in the embodiment of the present invention includes a bonding solution preparation unit, an optical element surface measurement unit, a light spot position monitoring unit, a constant temperature heating unit, and a bonding strength testing unit. Among them, the bonding solution preparation unit is used to prepare hydrogen-oxygen catalytic bonding solutions of different molar ratios; the optical element surface measurement unit is used to measure the surface shape of the surface of the sample to be bonded; the light spot position monitoring unit irradiates a laser onto the sample group to be bonded with the hydrogen-oxygen catalytic bonding solution, and collects the light spot position data of the light spot generated by the sample group to be bonded in real time to obtain the initial bonding time when the sample group to be bonded becomes a preliminary bonding sample; the constant temperature heating unit provides a heating environment for the preliminary bonding sample, completes the hydrogen-oxygen catalytic bonding of the sample to be bonded, and obtains a bonding sample; the bonding strength testing unit applies force to the bonding sample to cause the bonding sample to bend, and collects the bonding strength of the bonding sample in real time.

[0076] In some embodiments, the bonding solution preparation unit includes a balance, a measuring cup, a thermometer, and a constant-temperature water bath. The balance is used to weigh the corresponding mass of NaOH powder according to a set molar ratio; the measuring cup is used to mix the NaOH powder with deionized water to obtain the hydrogen-oxygen catalytic bonding solution; the thermometer is used to measure the ambient temperature during the preparation of the hydrogen-oxygen catalytic bonding solution in real time; and the constant-temperature water bath is used to maintain a constant temperature throughout the preparation of the hydrogen-oxygen catalytic bonding solution. The thermometer and constant-temperature water bath ensure that the solution maintains a stable temperature during preparation and storage, preventing changes in solution concentration or properties due to environmental fluctuations.

[0077] In an embodiment of the present invention, in the bonding solution preparation unit, a ZW1035N precision balance with an accuracy of 0.01 mg is used to weigh the corresponding mass of NaOH powder according to the set molar ratio in a constant temperature environment at 20°C. The NaOH powder is then mixed with deionized water in a measuring cup according to the desired proportion and stirred to ensure a uniform solution. The resulting hydrogen-oxygen catalytic bonding solution is stored in a dedicated container to ensure the purity and stability of the solution. A constant temperature water tank and heater are used to heat the measuring cup and the solution inside in a water bath, and a thermometer is used to measure the temperature at all times.

[0078] In some embodiments, the optical element surface measurement unit is as follows Figure 1 As shown, the system comprises an interferometer 1, a displacement adjustment stage 2, and a surface shape data acquisition system 3. The interferometer 1 emits interference light toward the surface of the sample 4 to be bonded and / or the bonding surface; the displacement adjustment stage 2 is used to place and adjust the position of the sample 4 to be bonded and / or the bonding sample; the interferometer 1 receives reflected light from the sample to be bonded and transmits the reflected light information to the surface shape data acquisition system 3. The surface shape data acquisition system 3 derives the surface shape of the sample 4 to be bonded and / or the bonding surface based on the reflected light information, records its surface shape parameters (RMS values), and ensures that the preset surface shape requirements are met.

[0079] In this embodiment of the present invention, the optical component surface measurement unit utilizes a Daheng Optoelectronics model GCM901602M displacement adjustment stage 2, also performing sample surface measurements under constant temperature conditions to ensure data accuracy and repeatability, providing a precise surface parameter reference for the subsequent bonding process. Furthermore, this embodiment utilizes a ZYGO interferometer model GPI / XP, and the surface data acquisition system 3 is MetroPro, the accompanying software for the ZYGO interferometer.

[0080] In some embodiments, the light spot position monitoring unit is constructed based on a three-coordinate measuring machine, such as Figure 2 As shown, the system includes a laser generator 5, a three-finger adjustment mechanism 6, a detector 7, and a spot data acquisition system 8. The laser generator 5 irradiates laser light toward the sample group 9 to be bonded; the three-finger adjustment mechanism 6 limits the position of the sample group 9 to be bonded and drives the sample group 9 to move; the detector 7 receives laser light reflected from different positions of the sample group 9 to be bonded; and the spot data acquisition system 8 receives and obtains spot position data based on the detection signal generated by the detector 7. Based on this spot position data, the system then determines the preliminary bonding time. The process of obtaining the preliminary bonding time includes the following steps: when the spot data acquisition system 8 detects that the change in spot position is below a preset threshold, the system records the current moment as the preliminary bonding time.

[0081] In this embodiment of the present invention, the three-finger adjustment mechanism 6 consists of three independent and evenly distributed support / limiting fingers, each of which can be individually fine-tuned. Nano- and micro-level adjustment is typically achieved using differential screws, elastic limiters, or piezoelectric micro-actuators (PZT actuators). Specifically, this embodiment uses a Newport PZA12 piezoelectric micro-actuator with a precision of 30 nm. The three fingers are made of a hard material, such as a ruby ​​ball, to ensure extremely high surface hardness, low wear, and high stability, making them particularly suitable for optical precision contact. The three points of the three-finger adjustment mechanism 6 define a plane, providing very stable support for the sample to be tested / bonded. This allows for subtle adjustments to the sample in three dimensions, precisely controlling its initial position and posture. Furthermore, the three-finger adjustment mechanism 6 provides positional protection for the sample assembly 9 during the bonding process. Specifically, during hydrogen-oxygen catalytic bonding, this prevents the sample from shifting due to external forces or its own weight, ensuring stable position during bond formation. In addition, the three-finger adjustment mechanism 6 prevents pressure on the bonding surface. The three-finger flexible limiter prevents stress concentration or damage on the bonding surface due to excessive constraints. The three-finger adjustment mechanism 6 limits the sample group to be bonded and advances the sample group 9 by 5μm every 10 seconds, ensuring that subtle differences in the spot position change are captured while maintaining data acquisition stability. When the spot displacement change is detected to be below a preset threshold, it indicates that the bond has formed and has achieved initial strength. The system then records this moment as the initial bonding time. The entire monitoring process ensures accurate collection of bonding time data, providing a key parameter for subsequent process analysis. The spot data acquisition system 8 used in this embodiment of the present invention is a beam quality analyzer (OphirSP90608) and its accompanying software, BeamMic. The preset threshold in this embodiment of the present invention is selected to be below the system noise level, thereby ensuring sufficient sensitivity to determine the initial stable formation of the bonding interface. Specifically, the spot position change threshold is set to 10μm.

[0082] In some embodiments, the spot position monitoring unit further includes a hexapod adjustment mechanism 10 and a fiber optic coupler 11. The output laser of the laser generator 5 is coupled by the fiber optic coupler 11 and irradiated onto the sample group 9 to be bonded. The hexapod adjustment mechanism 10 is composed of six independently retractable and parallel-connected drive rods, which are connected between the upper and lower platforms to form a spatial rigid body structure. According to the desired position or posture changes of the six drive rods, the specific displacement amount of each drive rod that needs to be retracted is calculated in combination with the inverse kinematics algorithm to ensure that the platform can achieve smooth, continuous, and error-free movement in three-dimensional space, thereby achieving six-degree-of-freedom precision displacement and posture adjustment, namely: linear movement in the X, Y, and Z directions in the spatial coordinate system, and rotation around the X, Y, and Z directions.

[0083] The six drive rods are connected in parallel. The extension or retraction of any one of them affects the platform's position and posture, requiring real-time coordinated control of the six rod lengths to achieve the desired motion. The drive rods typically utilize high-precision motorized lead screws or piezoelectric drive units. The preferred drive unit in this embodiment is the PIH-825.G2A, which enables high-resolution position and angle control at the micron or even nanometer level.

[0084] In some embodiments, a constant temperature heating unit such as Figure 4 As shown, the system includes a constant temperature chamber 12, a temperature control module 13, and a temperature display module 14. The constant temperature chamber 12 heats the preliminary bonding sample 15 to the target temperature, accelerating bonding or strengthening the bonding and curing process, ensuring a solidified bonding interface and producing a bonded sample. The temperature control module 13 regulates the temperature within the constant temperature chamber 12 from -10°C to 250°C, with a control accuracy of ±0.5°C. The temperature display module 14 displays the temperature within the constant temperature chamber 12 in real time. The constant temperature heating unit provides a stable and reliable foundation for subsequent bonding strength testing.

[0085] In an embodiment of the present invention, the temperature control module 13 is a bidirectional regulation system for heating and cooling. In the heating part of the temperature control module 13, rapid temperature rise is achieved through built-in electric heating elements (such as resistance heating wires, ceramic heating modules). In the cooling part of the temperature control module 13, semiconductor refrigeration plates or mechanical compressor refrigeration systems are used to quickly cool down to a low temperature area (around -10°C) when needed. The temperature control module 13 is also provided with a high-precision temperature sensor feedback loop, and a high-sensitivity platinum resistance temperature sensor (PT100, PT1000) or a high-precision thermocouple is configured inside the loop to achieve a control accuracy of ±0.5°C. In addition, a temperature sensor is also provided in the temperature control module 13, which collects temperature data inside the constant temperature box in real time and feeds it back to the temperature control module.

[0086] In some embodiments, the structure of the bonding strength testing unit is as follows: Figure 5 As shown, the apparatus includes a force-applying device 16, a displacement sensor 17, and a force data acquisition system 18. The force-applying device 16 applies a bending force to the bonding sample 19 using a three-point test method or a four-point bending test method. The displacement sensor 17 measures the displacement change at the force-applying point on the bonding sample 19 in real time. The force data acquisition system 18 plots a force-displacement curve for the bonding sample 19 during the force-applying process based on the displacement change and force detected by the displacement sensor 17, and derives the bonding strength from the force-displacement curve.

[0087] In this embodiment of the present invention, the bonded sample 19 is placed on a restraining structure 20 to prevent movement during the stress test. The force-applying device 16, model DDL10, includes a high-precision electric linear actuator utilizing linear motor drive technology to achieve stable, controllable linear loading. Specifically, during the bending strength test of the bonded sample 19, a constant and controllable force is applied downward at a set loading rate (1.0 mm / min). A closed-loop position and velocity control system ensures smooth motion during the loading process, avoiding any velocity fluctuations or impact loads. The loading process can be automatically controlled by a pre-set program, including initial zero-point positioning, uniform loading, real-time force feedback adjustment, and automatic stop upon reaching the breaking force. The force-applying device 16 utilizes a modular design, including a replaceable force-applying head and support structure, supporting different force-applying modes (e.g., three-point bending and four-point bending). By adjusting the positions of the force-applying and support points, flexible switching between different test standards and sample sizes is possible. The three-point test method in the embodiment of the present invention involves positioning two fixed support points of the force-applying device 16 below the ends of the sample, and a force-applying head of the force-applying device 16 directly above the midpoint of the sample. Force is applied to the bonded sample 19 at these three locations. The four-point test method in the embodiment of the present invention involves positioning two fixed support points of the force-applying device 16 below the ends of the sample, and the force-applying head of the force-applying device 16 is divided into two loading points, evenly distributed above the midsection of the sample. Two identical downward forces are applied to the bonded sample 19 at these four locations. During the experiment, the force sensor and displacement sensor in the force-applying device 16 respectively collect data pairs of applied load and corresponding displacement in real time. A computer, via a data acquisition system, synchronously receives and records this data. A force-displacement curve is then plotted with force (N) as the ordinate and displacement (mm) as the abscissa. Based on this curve, the point of maximum load (i.e., the point where the curve reaches its highest point) can be identified. This maximum load, combined with sample dimensional parameters (such as span, width, and thickness), is used to calculate the flexural strength of the bonding interface according to the flexural strength calculation formula, serving as a quantitative indicator of bonding performance.

[0088] The present invention also provides a method for testing the hydrogen-oxygen catalytic bonding performance of optical glass. Figure 6 As shown, including:

[0089] S1: Determine multiple bonding parameters when performing hydrogen-oxygen catalytic bonding on the bonded samples.

[0090] In some embodiments, multiple bonding parameters include: the molar ratio concentration of the hydrogen-oxygen catalytic bonding solution, the amount of hydrogen-oxygen catalytic bonding solution added, the surface shape error of the sample to be bonded, the heating temperature and heating time during hydrogen-oxygen catalytic bonding, and the effective bonding area. Among them, the molar ratio concentration of the hydrogen-oxygen catalytic bonding solution is, the ratio of NaOH to deionized water controls the concentration molar ratio of the bonding solution; the amount of hydrogen-oxygen catalytic bonding solution added is, and the amount of hydrogen-oxygen catalytic bonding solution added is accurately controlled by a pipette to ensure that the solution is evenly distributed at the bonding interface; due to differences in manufacturing or processing technology of different optical elements, the surface shape errors of the sample to be bonded are different, which will directly affect the bonding efficiency and bonding quality; the heating temperature and heating time during hydrogen-oxygen catalytic bonding are different, which will affect the curing speed and final strength of the bonding layer in the bonded sample. The present invention measures the bonding time and bonding strength under the required parameters through a cyclic testing method for the above-mentioned multiple bonding parameter combinations, and records the comparison results to form a complete and unified data matrix, providing an accurate and quantitative basis for subsequent process optimization.

[0091] In the embodiment of the present invention, a laboratory standard micropipette device is used, specifically an Eppendorf Researchplus series pipette, which has a range of 0.1–10 μL, a system error of ≤±1%, and a repeatability error of ≤±0.5%, which can meet the requirements for precise control of the solution volume during hydrogen-oxygen catalytic bonding.

[0092] S2: changing at least one bonding parameter in step S1, while keeping the other bonding parameters unchanged, and measuring the bonding time and bonding strength of the bonding sample obtained by the current bonding using the optical glass hydrogen-oxygen catalytic bonding performance testing system provided by the present invention.

[0093] In some embodiments, step S2 includes:

[0094] S21: setting the specific value of each bonding parameter in step S1;

[0095] S22: using a bonding solution preparation unit to prepare a hydrogen-oxygen catalytic bonding solution according to the data in step S21;

[0096] S23: Using an optical element surface measurement unit to measure the surface of the sample to be bonded, and cleaning the surface to be bonded after the measurement;

[0097] S24: using a pipette, drop the hydrogen-oxygen catalytic bonding solution prepared in step S22 onto the surface to be bonded in step S23, and gently place another sample to be bonded onto the surface to be bonded with the hydrogen-oxygen catalytic bonding solution. The other sample to be bonded adheres to the sample to be bonded with the hydrogen-oxygen catalytic bonding solution under the action of its own weight, and the hydrogen-oxygen catalytic bonding solution is evenly covered on the bonding interface, thereby forming a sample group to be bonded;

[0098] S25: Using a light spot position monitoring unit, measure the light spot position of the sample group to be bonded obtained in step S24, and obtain a preliminary bonding time;

[0099] S26: using a constant temperature heating unit to heat the preliminary bonding sample according to the data in step S21 to obtain a bonding sample;

[0100] S27: Using a bonding strength testing unit to test the bonding strength of the bonding sample obtained in step S26.

[0101] S3: Repeat step S2 no less than three times to obtain multiple sets of varying bonding parameters, bonding strengths, and bonding times; and determine the effect of varying bonding parameters on bonding time or bonding strength based on the data distribution of the bonding parameters, bonding strength, and bonding time. The present invention performs multiple measurements per test for variations in the same parameter, thereby improving the stability and authenticity of the data.

[0102] S4: changing the bonding parameters and repeating steps S2 to S3 to obtain the influence of each bonding parameter on the bonding time or bonding strength, and screening out the best bonding parameter combination.

[0103] To clearly illustrate the method for testing the hydrogen-oxygen catalytic bonding performance of optical glass provided by the present invention, test procedures are provided for determining the effects of different molar ratios of hydrogen-oxygen catalytic bonding solutions, the amount of hydrogen-oxygen catalytic bonding solution added, and the surface shape errors of different bonded samples on bonding time or bonding strength. Three experiments were conducted in three separate sessions, with one bonding parameter adjusted in each experiment:

[0104] The first experimental analysis is as follows:

[0105] In the first experiment, we analyzed the effects of different molar ratios of hydrogen-oxygen catalytic bonding solutions on bonding time under the following conditions: fixed bonding solution volume (0.8 μL), fixed surface error of the sample to be bonded (0.1λ), fixed effective bonding area (10 mm × 20 mm), fixed heating temperature (20°C), and fixed heating time (4 weeks). The specific steps are as follows:

[0106] A1: Initially set the molar ratio to concentration of 1:25, the solution addition volume to 0.8μL, the surface shape error requirement for the sample to be bonded to 0.1λ, the effective bonding area to 10mm×20mm, the temperature control heating condition to 20°C, and the curing time to 4 weeks. This step provides the initial parameter foundation for the entire process and ensures that subsequent experiments are conducted under uniform conditions.

[0107] A2: Using the bonding solution preparation unit, prepare a hydrogen-oxygen catalytic bonding solution in a clean environment by mixing sodium hydroxide and deionized water at a predetermined molar ratio of 1:25. Stir thoroughly to ensure a uniform solution. After preparation, store the solution in a clean container to ensure purity and stability in subsequent experiments.

[0108] A3: Use the optical component surface measurement unit to measure the surface of the optical component to be bonded and record its RMS value (required to be 0.1λ). Then use wet alcohol wiping or ultrasonic cleaning methods to thoroughly clean the component surface to ensure that there is no dust and oil on the interface before bonding, thus providing a good foundation for the bonding process.

[0109] A4: On the premise of ensuring the surface of the component is clean, use a high-precision micropipette to accurately control and add a preset volume of bonding solution (0.8μL) to the surface of the sample to be bonded. Then, gently place the other sample to be bonded under its own weight to ensure that the bonding solution is evenly distributed on the bonding interface. No additional external force is required to ensure the uniformity of the initial bonding of the sample to be bonded.

[0110] A5: At room temperature, the spot position monitoring unit is used to observe the displacement changes of the light spot in real time during the bonding process. When the detected spot displacement change is lower than the preset threshold, this moment is recorded as the initial bonding time, indicating the formation of initial bonding strength, and the initial bonding sample is obtained;

[0111] A6: Transfer the preliminarily bonded sample to a constant temperature heating unit and heat it at a set temperature (e.g. 20°C) for 4 weeks to achieve a certain degree of curing.

[0112] A7: After the sample is cured, a three-point or four-point bending test is performed on the sample using a bonding strength test unit. The force-displacement curve is recorded and the bonding strength is calculated to quantitatively evaluate the mechanical properties and reliability of the bonding interface.

[0113] A8: Record all parameters in this experiment (molar ratio, solution addition amount, surface error, temperature, heating time) and the corresponding bonding time data. If needed, adjust the molar ratio parameters in A1 (such as 1:40, 1:75, 1:200, 1:400) and repeat the entire steps A2 to A8 to obtain complete data distribution under different conditions and form a unified data matrix for comparative analysis and process optimization. Systematically record and organize all parameters set in this experiment and the data for preliminary bonding time that need to be studied, and obtain the following: Figure 7 The bonding time corresponding to different molar ratios of concentrations is shown when the solution addition amount is 0.8 μL. Figure 7It can be seen that with the increase of the molar ratio of NaOH to deionized water (from about 0.003 to 0.04, where 0.04 is the molar ratio of NaOH to deionized water of 1:25, and 0.003 is the molar ratio of NaOH to deionized water of 1:300), the bonding time (unit: seconds) shows a trend of gradual increase: when the molar ratio is low (about 0.003), the bonding time is short, about 150-200 seconds; as the concentration increases, the bonding time gradually increases, and the maximum can reach nearly 600 seconds. This change occurs because, in the hydrogen-oxygen catalyzed bonding reaction, NaOH solution acts as a catalyst, and its concentration directly affects the rate of interfacial hydrolysis and condensation reactions; at low molar ratios (dilute solutions), the OH in the solution - The low ion concentration and moderate reaction activity are conducive to the rapid formation of Si-O-Si bonds, thereby achieving initial bonding quickly; at high molar concentrations (concentrated solutions), the OH - A significant increase in concentration increases the reaction rate in a localized area, but the excessively alkaline environment can easily lead to: excessive surface etching (microscopic surface roughening), making it difficult to quickly seal the interface; side reactions (such as excessive dissolution) during the reaction, which delay the nucleation and growth of the overall bonding layer; and an increase in the thickness of the interfacial water film, which increases the time required for the syneresis process. As a result, the time required to complete bonding actually increases with increasing NaOH concentration.

[0114] The second experimental analysis is as follows:

[0115] In the second experiment, the main focus was on analyzing the effect of different solution addition amounts on bonding strength under the conditions of a fixed hydrogen-oxygen catalytic bonding solution molar ratio (1:200), a fixed surface error of the bonded sample (0.1λ), a fixed effective bonding area (10mm×20mm), a fixed heating temperature (20°C), and a fixed heating time (4 weeks). The specific steps are as follows:

[0116] B1: Initially set the molar ratio to a concentration of 1:200, the initial solution volume to 0.2 μL, the surface shape error requirement for the bonded sample to 0.1λ, the effective bonding area to 10 mm × 20 mm, the temperature control heating condition to 20°C, and the curing time to 4 weeks. This step ensures that the entire experiment is conducted under uniform and reproducible conditions.

[0117] B2: Using the bonding solution preparation unit, prepare a hydrogen-oxygen catalytic bonding solution in a clean environment by mixing sodium hydroxide and deionized water at a predetermined molar ratio of 1:200. Stir thoroughly to ensure a homogeneous solution. After preparation, store the solution in a clean container to ensure its purity and stability in subsequent experiments.

[0118] B3: Use the optical component surface measurement unit to measure the surface of the optical component to be bonded and record its RMS value (required to be 0.1λ). Then, use wet alcohol wiping or ultrasonic cleaning methods to thoroughly clean the component surface to remove dust and oil, providing ideal interface conditions for subsequent bonding;

[0119] B4: Use a micropipette to precisely control the amount of solution added and drop the bonding solution onto the surface of the sample to be bonded. Then, allow the other sample to be bonded to adhere under its own weight, thereby achieving uniform spreading of the bonding solution on the interface.

[0120] B5: At room temperature, use the spot position monitoring unit to observe the displacement changes of the light spot in real time during the bonding process. When the spot displacement change falls below the preset threshold, this moment is recorded as the initial bonding time, indicating the formation of initial bonding strength, and the initial bonding sample is obtained;

[0121] B6: Transfer the preliminarily bonded sample to a constant temperature heating unit and heat it at a set temperature (e.g., 20°C) for 4 weeks to achieve a certain degree of curing.

[0122] B7: After the sample is cured, a three-point or four-point bending test is performed using a bonding strength test unit. The force-displacement curve is recorded and the bonding strength is calculated to quantitatively evaluate the mechanical properties and reliability of the bonding interface.

[0123] B8: Record all parameters in this experiment (molar ratio, solution addition amount, surface error, temperature, heating time) and the corresponding bonding strength. If needed, adjust the solution addition amount in B1 (such as 0.4μL, 0.6μL, 0.8μL and 1.0μL) and repeat the entire steps B2 to B8 to obtain complete data distribution under different conditions and form a unified data matrix for comparative analysis and process optimization. Systematically record and organize all parameters set in this experiment and the data on the preliminary bonding time that needs to be studied to obtain the following Figure 8 The bonding strengths corresponding to different solution addition amounts are shown in the figure under the condition of 1:200 molar ratio concentration. Figure 8It can be seen that with the increase in the amount of solution added, the bonding strength (MPa) shows an overall upward trend: when the amount of solution added is small (such as 0.2μL), the bonding strength is obviously low, only about 3–4MPa; as the addition amount gradually increases to 0.4–1.0μL, the bonding strength gradually increases and tends to stabilize. When the addition amount is 0.8–1.0μL, the bonding strength reaches the highest level, about 8–9MPa. This change occurs because, at low addition amounts (such as 0.2 μL), the hydrogen-oxygen catalytic bonding solution does not adequately cover the bonding interface, resulting in uneven local reactions at the interface, forming microvoids or inadequately reacted areas, and thus reducing the bonding strength. As the amount of solution added increases, the solution distribution on the bonding interface becomes more uniform, the catalytic reaction becomes more complete, and the formation of silicon-oxygen bonds (Si–O–Si) on a large scale is promoted, making the interface more compact and the bonding strength significantly improved. When the addition amount reaches a certain level (such as 0.8–1.0 μL), the solution can fully cover the bonding interface, and the strength-enhancing effect of continuing to increase the addition amount tends to be saturated, so the bonding strength curve tends to be stable in the high addition amount section.

[0124] The third experimental analysis is as follows:

[0125] In the third experiment, we analyzed the effect of surface shape errors of different bonded samples on bonding strength under the following conditions: a fixed hydrogen-oxygen catalytic bonding solution molar ratio (1:300), a fixed solution addition volume (0.8 μL), a fixed effective bonding area (10 mm × 20 mm), a fixed heating temperature (20°C), and a fixed heating time (4 weeks). The specific steps are as follows:

[0126] C1: Initially set the molar ratio to 1:300, the solution volume to 0.8 μL, the surface shape error of both samples to be bonded to 0.1λ, the effective bonding area to 10 mm × 20 mm, the temperature control heating condition to 20°C, and the curing time to 4 weeks. This step ensures that the entire experiment is conducted under uniform and reproducible conditions.

[0127] C2: Using the bonding solution preparation unit, in a clean environment, sodium hydroxide and deionized water are mixed at a predetermined molar ratio of 1:300 to create a hydrogen-oxygen catalytic bonding solution. The solution is stirred thoroughly to ensure uniformity. After preparation, the solution is stored in a clean container to ensure purity and stability in subsequent experiments.

[0128] C3: Use the optical component surface measurement unit to measure the surfaces of the two optical components to be bonded and record their RMS values ​​(the initial requirement is 0.1λ). Subsequently, use wet alcohol wiping or ultrasonic cleaning to thoroughly clean the component surfaces to remove dust and oil, providing ideal interface conditions for subsequent bonding.

[0129] C4: Use a micropipette to accurately add the amount of solution, drop the bonding solution onto the surface of the sample to be bonded, and then allow the other sample to be bonded to adhere under the action of its own weight, so as to achieve uniform spreading of the bonding solution on the interface;

[0130] C5: At room temperature, the spot position monitoring unit is used to observe the displacement of the light spot during the bonding process in real time. When the spot displacement change falls below a preset threshold, this moment is recorded as the initial bonding time, indicating the formation of initial bonding strength, and a preliminary bonding sample is obtained;

[0131] C6: Transfer the preliminarily bonded sample to a constant temperature heating unit and keep it at a set temperature (e.g., 20°C) for 4 weeks to achieve a certain degree of curing;

[0132] C7: After the sample is cured, a three-point or four-point bending test is performed using a bonding strength test unit. The force-displacement curve is recorded and the bonding strength is calculated to quantitatively evaluate the mechanical properties and reliability of the bonding interface.

[0133] C8: Record all parameters in this experiment (molar ratio, solution addition amount, surface shape error, temperature, heating time) and the corresponding bonding strength. If needed, the surface shape errors of the two samples to be bonded in C1 can be adjusted (such as 0.1λ and 0.2λ, 0.1λ and 0.3λ, 0.1λ and 0.4λ, 0.1λ and 0.5λ, 0.1λ and 0.6λ), and the entire steps C2 to C8 can be repeated to obtain complete data distribution under different conditions and form a unified data matrix for comparative analysis and process optimization. Systematically record and organize all the parameters set in this experiment and the data on the preliminary bonding time that needs to be studied, and obtain the following: Figure 9 The bond strength data shown. Figure 9As the surface error (measured in wavelength λ @ 632.8nm) of the bonded samples increases from 0.1λ to 0.6λ, the bond strength (MPa) shows a significant downward trend. When the surface error is small (0.1λ), the bond strength is high, approximately 9–10 MPa. As the surface error increases (0.2λ, 0.3λ, 0.4λ, and 0.5λ), the bond strength decreases continuously. When the surface error reaches 0.6λ, the bond strength drops significantly to approximately 2–3 MPa. This change is due to the fact that during hydrogen-oxygen catalytic bonding, the degree of microscopic interfacial contact plays a decisive role in the ultimate bond strength. Smaller surface errors (flatter surfaces) allow for more atomic-scale direct contact between the two sample surfaces, promoting the formation of more Si–O–Si bonds, resulting in a denser interface and higher ultimate bond strength. Larger surface errors (rougher surfaces) lead to more microscopic gaps or localized discrete regions at the bonding interface, reducing the effective contact area. Local stress concentration can easily lead to the formation of unbonded areas or microcracks during the bonding process, reducing overall mechanical strength. Solution can also remain in larger microscopic gaps, affecting the uniformity of the catalytic reaction and further weakening the bonding quality.

[0134] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.

[0135] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A system for testing the hydrogen-oxygen catalytic bonding performance of optical glass, characterized in that: include: A bonding solution preparation unit, used for preparing hydrogen-oxygen catalytic bonding solutions with different molar ratios; Optical element surface measurement unit, used for measuring the surface of the sample to be bonded; a light spot position monitoring unit, which irradiates a laser onto the sample group to be bonded on which the hydrogen-oxygen catalytic bonding solution is dropped, and collects in real time light spot position data of the light spot generated by the sample group to be bonded, and obtains a preliminary bonding time when the sample group to be bonded becomes a preliminary bonding sample. This process includes: when the light spot position monitoring unit detects that the light spot displacement change is lower than a preset threshold, this time is the preliminary bonding time, and the preset threshold is selected based on a criterion that it is lower than the system noise level; The light spot position monitoring unit includes a three-finger adjustment mechanism, wherein the three fingers of the three-finger adjustment mechanism are made of hard material and the three-finger adjustment mechanism adopts three-finger flexible limit to limit and protect the sample group to be bonded. The three-finger adjustment mechanism drives the sample group to be bonded to advance by 5 μm every 10 seconds; a constant temperature heating unit, providing a heating environment for the preliminary bonding sample, completing hydrogen-oxygen catalytic bonding of the sample to be bonded, and obtaining a bonded sample; The bonding strength testing unit applies a force to the bonding sample to cause the bonding sample to bend, and collects the bonding strength of the bonding sample in real time. The process includes: collecting data pairs of applied load and corresponding displacement in real time to draw a force-displacement curve; identifying the maximum load point based on the force-displacement curve, and calculating the bending strength of the bonding interface according to the bending strength calculation formula based on the maximum load point and sample size parameters; The bonding strength testing unit includes a force-applying device, which uses a three-point testing method or a four-point bending testing method to apply a force to the bonding sample to produce bending deformation; the force-applying device includes an electric linear drive using linear motor drive technology, and the interior of the force-applying device uses a closed-loop position and speed control system. The loading process includes: initial zero point positioning, uniform speed loading, real-time force feedback adjustment, and automatic stop after reaching the breaking force.

2. The optical glass hydrogen-oxygen catalytic bonding performance testing system according to claim 1, characterized in that: The bonding solution preparation unit includes: A balance is used to weigh the corresponding mass of NaOH powder according to the set molar ratio; A measuring cup for mixing the NaOH powder with deionized water to obtain the hydrogen-oxygen catalytic bonding solution; A thermometer, used to measure in real time the ambient temperature of the hydrogen-oxygen catalytic bonding solution; The constant temperature water bath is used to ensure that the preparation process of the hydrogen-oxygen catalytic bonding solution is always at a constant temperature.

3. The optical glass hydrogen-oxygen catalytic bonding performance testing system according to claim 1, characterized in that: The optical element surface measurement unit comprises: an interferometer, emitting interference light toward the surface of the sample to be bonded and / or the bonding surface, and receiving reflected light from the sample to be bonded and / or the bonding sample; A displacement adjustment platform, used for placing and adjusting the position of the sample to be bonded and / or the bonding sample; The surface shape data acquisition system receives the reflected light information emitted by the interferometer and obtains the surface shape of the sample to be bonded and / or the bonding surface according to the reflected light information.

4. The optical glass hydrogen-oxygen catalytic bonding performance testing system according to claim 1, characterized in that: The light spot position monitoring unit further includes: A laser generator irradiates the sample group to be bonded with laser light; a detector for receiving laser light reflected from the sample group to be bonded at different positions; The light spot data acquisition system receives and obtains the light spot position data based on the detection signal generated by the detector, and obtains the preliminary bonding time based on the light spot position data. The process includes: When the light spot data acquisition system detects that the change in the light spot position is lower than a preset threshold, the light spot data acquisition system records the current moment as the preliminary bonding time.

5. The optical glass hydrogen-oxygen catalytic bonding performance testing system according to claim 4, characterized in that: The light spot position monitoring unit further includes a hexapod adjustment mechanism and a fiber coupler; wherein: The output laser of the laser generator is coupled by the optical fiber coupler and then irradiated onto the sample group to be bonded; The hexapod adjustment mechanism includes six independently retractable and parallel-connected drive rods, which are connected between the upper and lower platforms to form a spatial rigid body structure. The specific displacement required for each drive rod to be retracted and extended is calculated based on the desired position or posture changes of the six drive rods in combination with an inverse kinematics algorithm.

6. The optical glass hydrogen-oxygen catalytic bonding performance testing system according to claim 1, characterized in that: The constant temperature heating unit comprises: A constant temperature box is used to heat the preliminary bonding sample according to a target temperature, and the preliminary bonding sample is accelerated by heating to obtain the bonding sample; A temperature control module is used to adjust the temperature in the constant temperature box from -10°C to 250°C, with a control accuracy of ±0.5°C; The temperature display module is used to display the temperature in the constant temperature box in real time.

7. The optical glass hydrogen-oxygen catalytic bonding performance testing system according to claim 1, characterized in that: The bonding strength testing unit further comprises: A displacement sensor for measuring in real time the displacement change of the force application point on the bonding sample; The force data acquisition system draws a force-displacement curve of the bonding sample during the force-bearing process according to the displacement change and the force acquired by the displacement sensor, and obtains the bonding strength according to the force-displacement curve.

8. A method for testing the hydrogen-oxygen catalytic bonding performance of optical glass, characterized in that: include: S1: determining multiple bonding parameters for hydrogen-oxygen catalytic bonding of the sample to be bonded; S2: changing at least one bonding parameter in step S1, while keeping the other bonding parameters unchanged, and measuring the bonding time and bonding strength of the bonded sample obtained by the current bonding using the optical glass hydrogen-oxygen catalytic bonding performance testing system according to any one of claims 1 to 7; S3: Repeat step S2 at least three times to obtain multiple sets of varying bonding parameters, bonding strengths, and bonding times; Obtaining the influence of the varying bonding parameters on the bonding time or the bonding strength according to the data distribution of the bonding parameters, the data distribution of the bonding strength, and the data distribution of the bonding time; S4: changing the bonding parameters and repeating steps S2 to S3 to obtain the influence of each bonding parameter on the bonding time or the bonding strength, and screening out the best bonding parameter combination.

9. The method for testing the hydrogen-oxygen catalytic bonding performance of optical glass according to claim 8, characterized in that: The bonding parameters in step S1 include: the molar ratio concentration of the hydrogen-oxygen catalytic bonding solution, the amount of the hydrogen-oxygen catalytic bonding solution added, the surface shape error of the sample to be bonded, the heating temperature and heating time during the hydrogen-oxygen catalytic bonding, and the effective bonding area.

10. The method for testing the hydrogen-oxygen catalytic bonding performance of optical glass according to claim 8, characterized in that: Step S2 includes: S21: setting the specific value of each bonding parameter in step S1; S22: using the bonding solution preparation unit to prepare a hydrogen-oxygen catalytic bonding solution according to the data in step S21; S23: using the optical element surface measurement unit to measure the surface to be bonded of the sample to be bonded, and cleaning the surface to be bonded after the measurement; S24: using a pipette, dripping the hydrogen-oxygen catalytic bonding solution prepared in step S22 onto the surface to be bonded in step S23, gently placing another sample to be bonded onto the surface to be bonded dripped with the hydrogen-oxygen catalytic bonding solution, so that the other sample to be bonded adheres to the sample to be bonded dripped with the hydrogen-oxygen catalytic bonding solution under the action of its own weight, and the hydrogen-oxygen catalytic bonding solution is evenly covered on the bonding interface, thereby forming the sample group to be bonded; S25: Using the light spot position monitoring unit, measure the light spot position of the sample group to be bonded obtained in step S24, and obtain the preliminary bonding time; S26: heating the preliminary bonding sample according to the data in step S21 by using the constant temperature heating unit to obtain the bonding sample; S27: Using the bonding strength testing unit to test the bonding strength of the bonding sample obtained in step S26.

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