A LIBS and raman spectrum combined system

Abstract

The embodiment of the application provides a LIBS and Raman spectrum combined system, after a first wavelength pulse laser is emitted by a Raman spectrum laser, the first wavelength pulse laser is reflected to the first focusing mirror by a high-pass dichroic mirror and is transmitted to a to-be-detected object, so that after receiving Raman scattering light excited by the to-be-detected object, the Raman scattering light is transmitted to a spectrometer; and after a second wavelength pulse laser is emitted by a LIBS laser, the second wavelength pulse laser is transmitted to the first focusing mirror by a low-pass dichroic mirror and a high-pass dichroic mirror, a LIBS signal excited by the to-be-detected object is received, and the LIBS signal is projected to the spectrometer. It can be seen that by the system, the combination of LIBS and Raman spectrum can be realized, and the first wavelength pulse laser and the second wavelength pulse laser corresponding to the Raman spectrum and the LIBS respectively can be emitted through the same light path, and the respective corresponding Raman scattering light and LIBS signal can be received, so that in-situ detection is realized, and the detection precision is improved.

Description

Technical Field

[0001] The present application relates to the field of detection technology, and in particular to a LIBS and Raman spectroscopy combined system. Background Art

[0002] Raman spectroscopy can determine the chemical composition and molecular structure of each substance by collecting its Raman spectrum, thereby performing qualitative analysis and structural identification. However, Raman spectroscopy has certain limitations when it comes to detecting metal components. Meanwhile, LIBS (Laser Induced Breakdown Spectroscopy) is a spectral detection method that enables rapid, in-situ, and simultaneous analysis of multiple elements. It is commonly used to analyze the chemical composition of metals, alloys, ceramics, semiconductors, etc. However, it is less effective for solid and gas samples that do not generate plasma.

[0003] Raman spectroscopy and LIBS are highly complementary in the qualitative and quantitative analysis of substances. However, current detection methods often rely on separate Raman and LIBS spectrometers for testing a single sample. This is not only costly but also fails to guarantee in-situ measurements, compromising data accuracy. Summary of the Invention

[0004] The purpose of the present invention is to provide a LIBS and Raman spectroscopy combined system to achieve in-situ detection of Raman spectroscopy and LIBS. The specific technical solution is as follows:

[0005] In a first aspect of an embodiment of the present application, a LIBS and Raman spectroscopy system is provided, the system comprising:

[0006] a Raman spectroscopy laser, configured to emit a pulsed laser of a first wavelength;

[0007] a first reflecting mirror, configured to receive the pulsed laser of the first wavelength emitted by the Raman spectroscopy laser and reflect it to a high-pass dichroic mirror;

[0008] The high-pass dichroic mirror is used to receive the pulsed laser of the first wavelength reflected by the first reflector and reflect it to the first focusing mirror;

[0009] The first focusing mirror is used to receive the pulsed laser of the first wavelength reflected by the high-pass dichroic mirror and transmit it to the object to be detected; receive the Raman scattered light excited by the object to be detected and transmit it to the high-pass dichroic mirror;

[0010] The high-pass dichroic mirror is further used to receive the Raman scattered light transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror;

[0011] The low-pass dichroic mirror is used to receive the Raman scattered light transmitted by the high-pass dichroic mirror and transmit it to the spectrometer;

[0012] a LIBS laser configured to emit pulsed laser light of a second wavelength, wherein the second wavelength is greater than the first wavelength;

[0013] a second reflecting mirror, configured to receive the pulsed laser of the second wavelength emitted by the LIBS laser and reflect it to the low-pass dichroic mirror;

[0014] The low-pass dichroic mirror is used to receive the pulsed laser of the second wavelength reflected by the second reflector and reflect it to the high-pass dichroic mirror;

[0015] The high-pass dichroic mirror is used to receive the pulsed laser of the second wavelength reflected by the low-pass dichroic mirror and transmit it to the first focusing mirror;

[0016] The first focusing mirror is further used to receive the pulsed laser of the second wavelength transmitted by the high-pass dichroic mirror and transmit it to the object to be detected; receive the LIBS signal excited by the object to be detected, focus it, and transmit it to the high-pass dichroic mirror;

[0017] The high-pass dichroic mirror is further used to receive the LIBS signal transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror;

[0018] The low-pass dichroic mirror is further configured to receive the LIBS signal transmitted by the high-pass dichroic mirror and transmit the signal to the spectrometer.

[0019] In one possible implementation, the spectrometer includes: a rotating grating and a detector;

[0020] The rotating grating includes at least a grating suitable for LIBS signals and a grating suitable for Raman scattered light;

[0021] The rotating grating is used to switch to the grating suitable for Raman scattered light when the spectrometer receives Raman scattered light; and to switch to the grating suitable for LIBS signal when the spectrometer receives LIBS signal;

[0022] The detector is used to receive the dispersed light of the rotating grating and analyze the composition of the object to be detected based on the received dispersed light.

[0023] In a possible implementation, the spectrometer further includes: a slit;

[0024] The slit is used to receive the Raman scattered light transmitted by the high-pass dichroic mirror, or the LIBS signal transmitted by the high-pass dichroic mirror, and only allows light of a specified wavelength to pass through and then be transmitted to the rotating grating, wherein the light of the specified wavelength is Raman scattered light or LIBS signal.

[0025] In a possible implementation, the spectrometer further includes: a first reflector and a second reflector;

[0026] The first reflector is configured to receive the light of a specified wavelength transmitted by the slit and reflect the light toward the rotating grating;

[0027] The rotating grating is specifically used to receive the light of a specified wavelength reflected by the first reflector, and reflect the light to the second reflector after dispersion;

[0028] The second reflector is used to receive the dispersed light reflected by the rotating grating and reflect it to the detector.

[0029] In a possible implementation, the system further includes: a second focusing lens;

[0030] The second focusing mirror is used to receive the Raman scattered light or LIBS signal transmitted by the low-pass dichroic mirror, focus the light, and then transmit it to the spectrometer.

[0031] In a possible implementation, the system further includes: a first collimating mirror;

[0032] The first collimating mirror is used to receive the pulsed laser of the first wavelength emitted by the Raman spectroscopy laser, and collimate it before transmitting it to the first reflecting mirror;

[0033] The first reflecting mirror is specifically configured to receive the pulsed laser of the first wavelength transmitted by the first collimating mirror and reflect the pulsed laser to the high-pass dichroic mirror.

[0034] In a possible implementation, the system further includes: a second collimating mirror;

[0035] The second collimating mirror is used to receive the pulsed laser of the second wavelength emitted by the LIBS laser, and collimate it before transmitting it to the second reflecting mirror;

[0036] The second reflecting mirror is specifically configured to receive the pulsed laser light of the second wavelength transmitted by the second collimating mirror and reflect the pulsed laser light to the high-pass dichroic mirror.

[0037] In one possible implementation, the wavelength of the first wavelength pulse laser is 266 nm;

[0038] The wavelength of the second-wavelength pulse laser is 1064 nm.

[0039] In one possible implementation, the high-pass dichroic mirror is configured to reflect light with a wavelength less than 276 nm and allow light with a wavelength greater than 276 nm to pass through.

[0040] In one possible implementation, the low-pass dichroic mirror is configured to reflect light with a wavelength greater than 1054 nm and allow light with a wavelength less than 1054 nm to pass through.

[0041] Beneficial effects of the embodiments of the present application:

[0042] The embodiment of the present application provides a LIBS and Raman spectroscopy combined system, the system comprising: a Raman spectroscopy laser for emitting a pulsed laser of a first wavelength; a first reflector for receiving the pulsed laser of the first wavelength emitted by the Raman spectroscopy laser and reflecting it to the high-pass dichroic mirror; the high-pass dichroic mirror for receiving the pulsed laser of the first wavelength reflected by the first reflector and reflecting it to the first focusing mirror; the first focusing mirror for receiving the pulsed laser of the first wavelength reflected by the high-pass dichroic mirror and transmitting it to an object to be detected; receiving Raman scattered light excited by the object to be detected and transmitting it to the high-pass dichroic mirror; the high-pass dichroic mirror for also receiving the Raman scattered light transmitted by the focusing mirror and transmitting it to the low-pass dichroic mirror; the low-pass dichroic mirror for receiving the Raman scattered light transmitted by the high-pass dichroic mirror and transmitting it to a spectrometer; the LIBS laser for emitting a pulsed laser of a second wavelength; a second reflecting mirror for receiving the pulsed laser of the second wavelength emitted by the LIBS laser and reflecting it to the low-pass dichroic mirror; the low-pass dichroic mirror for receiving the pulsed laser of the second wavelength reflected by the second reflecting mirror and reflecting it to the high-pass dichroic mirror; the high-pass dichroic mirror for receiving the pulsed laser of the second wavelength reflected by the low-pass dichroic mirror and transmitting it to the first focusing mirror; the first focusing mirror is also used to receive the pulsed laser of the second wavelength transmitted by the high-pass dichroic mirror and transmit it to the object to be detected; the LIBS signal excited by the object to be detected is received and transmitted to the high-pass dichroic mirror after focusing; the high-pass dichroic mirror is also used to receive the LIBS signal transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror; the low-pass dichroic mirror is also used to receive the LIBS signal transmitted by the high-pass dichroic mirror and transmit it to the spectrometer. It can be seen that through the system of the embodiment of the present application, not only can LIBS and Raman spectroscopy be combined, but also the first wavelength pulse laser and the second wavelength pulse laser corresponding to Raman spectroscopy and LIBS, respectively, can be emitted through the same optical path, and the corresponding Raman scattered light and LIBS signals can be received, thereby realizing in-situ detection and improving detection accuracy.

[0043] Of course, it is not necessary to achieve all the advantages described above at the same time when implementing any product or method of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other embodiments can also be obtained based on these drawings.

[0045] Figure 1 A schematic diagram of the structure of a LIBS and Raman spectroscopy system provided in an embodiment of the present application;

[0046] Figure 2 A schematic diagram of the structure of a spectrometer provided in an embodiment of the present application;

[0047] Figure 3 Another schematic diagram of the structure of the LIBS and Raman spectroscopy system provided in an embodiment of the present application;

[0048] Figure 4 This is another structural schematic diagram of the LIBS and Raman spectroscopy system provided in the embodiments of the present application. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field based on this application are within the scope of protection of this application.

[0050] In the first aspect of the embodiment of the present application, a LIBS and Raman spectroscopy system is first provided. Figure 1 , Figure 1 A schematic diagram of a LIBS and Raman spectroscopy system provided in an embodiment of the present application, wherein the system comprises:

[0051] A Raman spectroscopy laser 101 is configured to emit a pulsed laser of a first wavelength;

[0052] A first reflector 102 is configured to receive the pulsed laser light of the first wavelength emitted by the Raman spectroscopy laser and reflect the pulsed laser light to a high-pass dichroic mirror;

[0053] The high-pass dichroic mirror 103 is used to receive the pulsed laser of the first wavelength reflected by the first reflector and reflect it to the first focusing mirror;

[0054] The first focusing mirror 104 is used to receive the pulsed laser of the first wavelength reflected by the high-pass dichroic mirror and transmit it to the object to be detected; receive the Raman scattered light excited by the object to be detected and transmit it to the high-pass dichroic mirror;

[0055] The high-pass dichroic mirror 103 is further used to receive the Raman scattered light transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror;

[0056] The low-pass dichroic mirror 105 is used to receive the Raman scattered light transmitted by the high-pass dichroic mirror and transmit it to the spectrometer 106;

[0057] a LIBS laser 107 for emitting a pulsed laser of a second wavelength, wherein the second wavelength is greater than the first wavelength;

[0058] A second reflecting mirror 108 is used to receive the pulsed laser of the second wavelength emitted by the LIBS laser and reflect it to the low-pass dichroic mirror;

[0059] The low-pass dichroic mirror 105 is used to receive the pulsed laser of the second wavelength reflected by the second reflector and reflect it to the high-pass dichroic mirror;

[0060] The high-pass dichroic mirror 103 is used to receive the pulsed laser of the second wavelength reflected by the low-pass dichroic mirror and transmit it to the first focusing mirror;

[0061] The first focusing mirror 104 is further configured to receive the pulsed laser of the second wavelength transmitted by the high-pass dichroic mirror and transmit it to the object to be detected; receive the LIBS signal excited by the object to be detected, focus it, and transmit it to the high-pass dichroic mirror;

[0062] The high-pass dichroic mirror 103 is further used to receive the LIBS signal transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror;

[0063] The low-pass dichroic mirror 105 is further configured to receive the LIBS signal transmitted by the high-pass dichroic mirror and transmit the signal to the spectrometer 106 .

[0064] In the embodiments of the present application, Raman spectroscopy detection can be performed by irradiating an object to be detected with a Raman spectroscopy laser, and then collecting the Raman spectrum of the object to be detected to determine the chemical composition and molecular structure of the sample, thereby performing qualitative analysis and structural identification of the substance. The Raman spectroscopy laser is used to emit pulsed laser light of a first wavelength. Specifically, the first wavelength can be set according to actual conditions, but it should be noted that the selected first wavelength must be reflectable by a high-pass dichroic mirror.

[0065] The first reflector is used to receive the pulsed laser of the first wavelength emitted by the Raman spectroscopy laser and reflect it to the high-pass dichroic mirror. Specifically, the first reflector is a reflector. Figure 1 Through the setting of the reflector, the pulse laser of the first wavelength emitted by the Raman spectroscopy laser can be reflected to the high-pass dichroic mirror, and then reflected by the high-pass dichroic mirror to the first focusing mirror, so that the optical path from the Raman spectroscopy laser to the first reflector and the optical path from the first focusing mirror to the spectrometer can be parallel, which is beneficial to saving space, reducing the size of the equipment, and facilitating carrying and detection.

[0066] The high-pass dichroic mirror is used to receive the pulsed laser of the first wavelength reflected by the first reflector and reflect it to the first focusing mirror. As an optical element based on wavelength-selective spectroscopy, the core characteristic of the high-pass dichroic mirror is to achieve high transmittance for long-wavelength light while maintaining high reflectivity for short-wavelength light. Specifically, wavelength selectivity can be achieved by precisely designing the multi-layer dielectric film and utilizing the interference effect of light. Long-wavelength light is transmitted due to the constructive interference generated by the multi-layer film structure, while short-wavelength light is reflected due to destructive interference. In an embodiment of the present application, the high-pass dichroic mirror is used to reflect the pulsed laser of the first wavelength, while it can transmit light greater than the first wavelength. The specific critical value can be set according to actual conditions.

[0067] The first focusing mirror is used to receive the pulsed laser light of the first wavelength reflected by the high-pass dichroic mirror, transmit it to the object to be detected, and then receive the Raman scattered light excited by the object to be detected and transmit it to the high-pass dichroic mirror. Specifically, the first focusing mirror can be a convex lens, through which the pulsed laser light of the first wavelength can be transmitted to the object to be detected, and then receive the Raman scattered light excited by the object to be detected after receiving the pulsed laser light of the first wavelength. Finally, the Raman scattered light is focused by the first focusing mirror and transmitted to the high-pass dichroic mirror. The first focusing mirror can achieve the convergence of Raman scattered light, thereby facilitating improved detection accuracy.

[0068] The high-pass dichroic mirror is also used to receive the Raman scattered light transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror. In actual use, the wavelength of the Raman scattered light is longer than the wavelength of the first-wavelength pulsed laser. Therefore, the high-pass dichroic mirror achieves high transmittance for long-wavelength light while maintaining high reflectivity for short-wavelength light, thereby transmitting the Raman scattered light and reflecting the first-wavelength pulsed laser.

[0069] The low-pass dichroic mirror is used to receive the Raman scattered light transmitted by the high-pass dichroic mirror and transmit it to the spectrometer. The low-pass dichroic mirror is an optical element based on wavelength selectivity, and its core function is to achieve high transmittance for short-wavelength light while maintaining high reflectivity for long-wavelength light. Specifically, the low-pass dichroic mirror can achieve wavelength separation by precisely stacking a multilayer dielectric film (such as magnesium fluoride, silicon dioxide, etc.) and utilizing the interference effect of light. At the same time, short-wavelength light (lower than the cut-off wavelength) passes through with high transmittance due to the constructive interference of the thin film structure, while long-wavelength light (higher than the cut-off wavelength) is reflected due to destructive interference. Specifically, the cut-off wavelength is greater than the wavelength of the Raman scattered light. The spectrometer in the embodiment of the present application can determine the chemical composition and molecular structure of the object to be detected based on the received Raman scattered light, thereby performing qualitative analysis and structural identification of the substance.

[0070] The LIBS laser is used to emit pulsed laser light at a second wavelength, where the second wavelength is greater than the first wavelength. LIBS (Laser Induced Breakdown Spectroscopy) in the embodiments of the present application is a spectral detection method that enables rapid, in-situ, and simultaneous analysis of multiple elements. It can be used to analyze the chemical composition of materials such as metals, alloys, ceramics, and semiconductors. It can quickly determine the content of major and trace elements in a material, helping to assess the quality of metal materials and verify whether the material meets specific standards or specifications.

[0071] The second reflector is used to receive the pulsed laser of the second wavelength emitted by the LIBS laser and reflect it to the low-pass dichroic mirror. Specifically, the second reflector is a reflector. Figure 1 By setting the reflector, the second wavelength pulse laser emitted by the LIBS laser can be reflected to the low-pass dichroic mirror, and then reflected by the low-pass dichroic mirror to the high-pass dichroic mirror, so that the optical path from the LIBS laser to the second reflector and the optical path from the first focusing mirror to the spectrometer can be parallel, which is beneficial to saving space, reducing the size of the equipment, and facilitating carrying and detection.

[0072] The low-pass dichroic mirror is used to receive the second wavelength pulsed laser light reflected by the second reflector and reflect it to the high-pass dichroic mirror. As described above, this low-pass dichroic mirror can achieve high transmittance for short-wavelength light while maintaining high reflectivity for long-wavelength light. The specific cutoff wavelength is greater than the wavelength of the Raman scattered light and should be less than the wavelength of the second wavelength pulsed laser light.

[0073] The high-pass dichroic mirror is used to receive the pulsed laser of the second wavelength reflected by the low-pass dichroic mirror and transmit it to the first focusing mirror. Figure 1As shown, since the incident direction of the pulse laser of the second wavelength is the opposite side of the high-pass dichroic mirror, it will not be reflected by the high-pass dichroic mirror.

[0074] The first focusing mirror is also used to receive the pulsed laser of the second wavelength transmitted by the high-pass dichroic mirror, and transmit it to the object to be detected, and then receive the LIBS signal excited by the object to be detected after receiving the pulsed laser of the second wavelength, and transmit it to the high-pass dichroic mirror after focusing. Among them, LIBS can use high-energy laser to excite the sample surface to generate plasma, and obtain the elemental composition and concentration information of the sample by analyzing the spectrum emitted by the plasma. The LIBS signal in the embodiment of the present application is the spectrum emitted by the plasma. The first focusing mirror can receive this spectrum and transmit it to the high-pass dichroic mirror after focusing.

[0075] The high-pass dichroic mirror is also used to receive the LIBS signal transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror. In actual use, the wavelength of the spectrum emitted by the LIBS signal, i.e., the plasma, is shorter than that of the second-wavelength pulsed laser, but longer than that of the first-wavelength pulsed laser. Therefore, by achieving high transmittance for long-wavelength light while maintaining high reflectivity for short-wavelength light, the high-pass dichroic mirror can simultaneously reflect the first-wavelength pulsed laser and transmit the LIBS signal.

[0076] The low-pass dichroic mirror is also used to receive the LIBS signal transmitted by the high-pass dichroic mirror and transmit it to the spectrometer. Because the low-pass dichroic mirror can achieve high transmittance for short-wavelength light while maintaining high reflectivity for long-wavelength light. The cut-off wavelength of the low-pass dichroic mirror in the embodiment of the present application is greater than the wavelength of the Raman scattered light, and should be less than the wavelength of the second wavelength pulsed laser, and greater than the wavelength of the LIBS signal. Therefore, the LIBS signal transmitted by the high-pass dichroic mirror can be received by the low-pass dichroic mirror and transmitted to the spectrometer. The spectrometer in the embodiment of the present application can also perform chemical composition analysis through the LIBS signal, that is, the spectrum emitted by the plasma.

[0077] It can be seen that through the system of the embodiment of the present application, not only can LIBS and Raman spectroscopy be combined, but also the first wavelength pulse laser and the second wavelength pulse laser corresponding to Raman spectroscopy and LIBS, respectively, can be emitted through the same optical path, and the corresponding Raman scattered light and LIBS signals can be received, thereby realizing in-situ detection and improving detection accuracy.

[0078] In one possible implementation, see Figure 2 , the spectrometer comprises: a rotating grating 201 and a detector 202;

[0079] The rotating grating includes at least a grating suitable for LIBS signals and a grating suitable for Raman scattered light;

[0080] The rotating grating is used to switch to the grating suitable for Raman scattered light when the spectrometer receives Raman scattered light; and to switch to the grating suitable for LIBS signal when the spectrometer receives LIBS signal;

[0081] The detector is used to receive the dispersed light of the rotating grating and analyze the composition of the object to be detected based on the received dispersed light.

[0082] In order to meet the needs of both LIBS signals and Raman scattered light, the present application also creatively proposes a rotating grating in the embodiment. The rotating grating includes at least a grating suitable for LIBS signals and a grating suitable for Raman scattered light. Figure 2 The rotating grating includes at least two surfaces, one of which is a grating suitable for LIBS signals and the other is a grating suitable for Raman scattered light. When the spectrometer receives Raman scattered light, it switches to the grating suitable for Raman scattered light; when the spectrometer receives a LIBS signal, it switches to the grating suitable for LIBS signals. Specifically, the rotating grating can be driven by a drive motor and can rotate based on detection signals, such as LIBS detection signals and Raman scattered detection signals. Through this grating, after receiving the LIBS signal or Raman scattered light, the received LIBS signal or Raman scattered light can be dispersed, scattering light of different wavelengths in multiple directions. The dispersed light from the rotating grating is then received by a detector, and the composition of the object to be detected is analyzed based on the received dispersed light. In one example, the detector can be a CCD (Charge-coupled Device) detector. The CCD detector performs photoelectric conversion based on the received dispersed light, thereby analyzing the composition and concentration based on the electrical signal. In one example, different components may correspond to different spectra, and the concentration may be proportional to the light intensity, so that the composition and concentration of the object to be detected can be analyzed based on the received dispersed light.

[0083] In one possible implementation, see Figure 2 , Figure 2A schematic diagram of the structure of a spectrometer provided in an embodiment of the present application, wherein the spectrometer further includes: a slit 203; the slit is used to receive the Raman scattered light transmitted by the high-pass dichroic mirror, or the LIBS signal transmitted by the high-pass dichroic mirror, and only allows light of a specified wavelength to pass through before being transmitted to the rotating grating, wherein the light of the specified wavelength is the Raman scattered light or the LIBS signal. The slit in the embodiment of the present application can be a fixed slit, a unilaterally adjustable asymmetric slit, or a bilaterally adjustable symmetric slit. In actual use, the width of the slit can be set according to the requirements of LIBS or Raman scattered light. For example, when the width of the slit can simultaneously meet the requirements of LIBS signal and Raman scattered light for filtering stray light or ambient light, the slit can be fixed. For another example, the slit can be a unilaterally adjustable asymmetric slit, or a bilaterally adjustable symmetric slit, so that when using the LIBS signal or Raman scattered light for detection, the slit can be adjusted to different widths.

[0084] In one possible implementation, see Figure 2 The spectrometer further includes: a first reflector 204 and a second reflector 205; the first reflector is configured to receive light of a specified wavelength transmitted by the slit and reflect it toward the rotating grating; the rotating grating is configured to receive the light of a specified wavelength reflected by the first reflector, disperse it, and then reflect it toward the second reflector; the second reflector is configured to receive the dispersed light reflected by the rotating grating and reflect it toward the detector. By using these first and second reflectors, light of a specified wavelength passing through the slit can be reflected toward the rotating grating, dispersed by the rotating grating, and then reflected toward the spectrometer, thereby enabling the spectrometer to detect and analyze substances based on the received spectrum.

[0085] In one possible implementation, see Figure 3The system further includes: a second focusing mirror 301; the second focusing mirror is used to receive the Raman scattered light or LIBS signal transmitted by the low-pass dichroic mirror, focus it, and transmit it to the spectrometer. Specifically, the first reflector and the second reflector can be reflectors of the same material and specifications, but with different angles. In one possible embodiment, the system further includes: a first collimating mirror 303; the first collimating mirror is used to receive the pulsed laser light of the first wavelength emitted by the Raman spectroscopy laser, collimate it, and transmit it to the first reflector; the first reflector is specifically used to receive the pulsed laser light of the first wavelength transmitted by the first collimating mirror and reflect it to the high-pass dichroic mirror. In one possible embodiment, the system further includes: a second collimating mirror 302; the second collimating mirror is used to receive the pulsed laser light of the second wavelength emitted by the Raman LIBS laser, collimate it, and transmit it to the second reflector; the second reflector is specifically used to receive the pulsed laser light of the second wavelength transmitted by the second collimating mirror and reflect it to the high-pass dichroic mirror. Among them, the first collimating mirror and the second collimating mirror in the embodiment of the present application can both be transmissive collimating mirrors, through which the collimation of the light beam between the optical elements can be maintained, thereby ensuring the accuracy of the optical path and the accuracy of the measurement.

[0086] In one possible embodiment, the wavelength of the first-wavelength pulsed laser is 266 nm; the wavelength of the second-wavelength pulsed laser is 1064 nm. In one possible embodiment, the high-pass dichroic mirror is used to reflect light with a wavelength less than 276 nm and allow light with a wavelength greater than 276 nm to pass through. In one possible embodiment, the low-pass dichroic mirror is used to reflect light with a wavelength greater than 1054 nm and allow light with a wavelength less than 1054 nm to pass through. Figure 4 The Raman spectroscopy laser can be a 266nm narrow linewidth laser, the LIBS laser can be a 1064nm pulsed laser, and the above-mentioned first focusing mirror can be set inside the probe, so that the laser emits pulsed laser to the sample, and the detection of the object to be detected is achieved through the rotating grating spectrometer and the spectral analysis system.

[0087] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions can be transmitted from one website, computer, server or data center to another website, computer, server or data center via a wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) method. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that includes one or more available media integrations. The available medium can be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a solid-state drive (SSD).

[0088] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply the existence of any such actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or device comprising the element.

[0089] Each embodiment in this specification is described in a related manner. The same or similar parts between the embodiments can be referred to each other. Each embodiment focuses on the differences from other embodiments. The related parts can be referred to the partial description of the method embodiment.

[0090] The above description is only a preferred embodiment of the present application and is not intended to limit the scope of protection of the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application are included in the scope of protection of the present application.

Claims

1. A LIBS and Raman spectroscopy system, characterized in that: The system comprises: a Raman spectroscopy laser, configured to emit a pulsed laser of a first wavelength; a first reflecting mirror, configured to receive the pulsed laser of the first wavelength emitted by the Raman spectroscopy laser and reflect it to a high-pass dichroic mirror; The high-pass dichroic mirror is used to receive the pulsed laser of the first wavelength reflected by the first reflector and reflect it to the first focusing mirror; The first focusing mirror is used to receive the pulsed laser of the first wavelength reflected by the high-pass dichroic mirror and transmit it to the object to be detected; receive the Raman scattered light excited by the object to be detected and transmit it to the high-pass dichroic mirror; The high-pass dichroic mirror is further used to receive the Raman scattered light transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror; The low-pass dichroic mirror is used to receive the Raman scattered light transmitted by the high-pass dichroic mirror and transmit it to the spectrometer; a LIBS laser configured to emit pulsed laser light of a second wavelength, wherein the second wavelength is greater than the first wavelength; a second reflecting mirror, configured to receive the pulsed laser of the second wavelength emitted by the LIBS laser and reflect it to the low-pass dichroic mirror; The low-pass dichroic mirror is used to receive the pulsed laser of the second wavelength reflected by the second reflector and reflect it to the high-pass dichroic mirror; The high-pass dichroic mirror is used to receive the pulsed laser of the second wavelength reflected by the low-pass dichroic mirror and transmit it to the first focusing mirror; The first focusing mirror is further used to receive the pulsed laser of the second wavelength transmitted by the high-pass dichroic mirror and transmit it to the object to be detected; receive the LIBS signal excited by the object to be detected, focus it, and transmit it to the high-pass dichroic mirror; The high-pass dichroic mirror is further used to receive the LIBS signal transmitted by the focusing mirror and transmit it to the low-pass dichroic mirror; The low-pass dichroic mirror is further configured to receive the LIBS signal transmitted by the high-pass dichroic mirror and transmit the signal to the spectrometer.

2. The system according to claim 1, wherein: The spectrometer comprises: a rotating grating and a detector; The rotating grating includes at least a grating suitable for LIBS signals and a grating suitable for Raman scattered light; The rotating grating is used to switch to the grating suitable for Raman scattered light when the spectrometer receives Raman scattered light; and to switch to the grating suitable for LIBS signal when the spectrometer receives LIBS signal; The detector is used to receive the dispersed light of the rotating grating and analyze the composition of the object to be detected based on the received dispersed light.

3. The system according to claim 2, characterized in that The spectrometer further comprises: a slit; The slit is used to receive the Raman scattered light transmitted by the high-pass dichroic mirror, or the LIBS signal transmitted by the high-pass dichroic mirror, and only allows light of a specified wavelength to pass through and then be transmitted to the rotating grating, wherein the light of the specified wavelength is Raman scattered light or LIBS signal.

4. The system according to claim 3, characterized in that The spectrometer further comprises: a first reflecting mirror and a second reflecting mirror; The first reflector is configured to receive the light of a specified wavelength transmitted by the slit and reflect the light toward the rotating grating; The rotating grating is specifically used to receive the light of a specified wavelength reflected by the first reflector, and reflect the light to the second reflector after dispersion; The second reflector is used to receive the dispersed light reflected by the rotating grating and reflect it to the detector.

5. The system according to claim 1, wherein: The system further includes: a second focusing mirror; The second focusing mirror is used to receive the Raman scattered light or LIBS signal transmitted by the low-pass dichroic mirror, focus the light, and then transmit it to the spectrometer.

6. The system according to claim 1, wherein: The system further includes: a first collimating mirror; The first collimating mirror is used to receive the pulsed laser of the first wavelength emitted by the Raman spectroscopy laser, and collimate it before transmitting it to the first reflecting mirror; The first reflecting mirror is specifically configured to receive the pulsed laser of the first wavelength transmitted by the first collimating mirror and reflect the pulsed laser to the high-pass dichroic mirror.

7. The system according to claim 1, wherein: The system further comprises: a second collimating mirror; The second collimating mirror is used to receive the pulsed laser of the second wavelength emitted by the LIBS laser, and collimate it before transmitting it to the second reflecting mirror; The second reflecting mirror is specifically configured to receive the pulsed laser light of the second wavelength transmitted by the second collimating mirror and reflect the pulsed laser light to the high-pass dichroic mirror.

8. The system according to claim 1, wherein: The wavelength of the first wavelength pulse laser is 266nm; The wavelength of the second-wavelength pulse laser is 1064 nm.

9. The system according to claim 8, characterized in that The high-pass dichroic mirror is used to reflect light with a wavelength less than 276 nm and allow light with a wavelength greater than 276 nm to pass through.

10. The system according to claim 1, wherein: The low-pass dichroic mirror is used to reflect light with a wavelength greater than 1054 nm and allow light with a wavelength less than 1054 nm to pass through.

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