Y-90 Radioactive Solution Automatic Loading System

By designing an automatic loading system and using components such as an electric pipette, an ultrasonic oscillator and a drying lamp, the automatic loading and drying of the Y-90 radioactive solution is achieved, solving the problems of low precision and efficiency in the existing technology and reducing the risk of cross-contamination.

CN120314593BActive Publication Date: 2025-09-23TIANJIN MIFUMEI TECH DEV CO LTD
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Patent Information

Application Number
CN202510544042.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-04-28
Publication Date
2025-09-23
Estimated Expiration
2045-04-28

AI Technical Summary

Technical Problem

In the existing technology, the loading of Y-90 radioactive solution is mostly done manually or semi-automatically, resulting in low precision and efficiency, and the risk of cross-contamination.

Method used

An automatic loading system for Y-90 radioactive solution was designed, which includes a workbench, a liquid storage device, a rotary station, a drying component and a six-axis robot. Automated loading and drying are achieved through components such as an electric pipette, an ultrasonic oscillator and a drying lamp to avoid cross contamination.

Benefits of technology

It realizes the automatic loading and drying of radioactive solution, improves the accuracy and efficiency, reduces the risk of personnel contamination, and recovers the evaporated radioactive solution to avoid waste.

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Abstract

The present invention relates to an automatic loading system for Y-90 radioactive solution, comprising a workbench, a backboard fixedly mounted above the workbench, and an electric pipette connected via a robotic arm disposed on the backboard; a liquid storage device disposed above the workbench, the liquid storage device comprising a fixed frame, and a solution A station, a solution B station, and a mixed solution station disposed on the fixed frame, respectively, with an ultrasonic oscillator disposed inside the mixed solution station; a rotating station disposed on one side of the top of the workbench, a drying assembly located above the rotating station disposed on one side of the backboard, and a vacuum waste liquid tank fixedly disposed on one side outer wall of the workbench, the vacuum waste liquid tank being used at least for returning evaporated radioactive solution. The function of the automatic loading system for radioactive solution of the present invention is to automatically load a specific radioactive solution into a specific area of ​​a substrate, and dry it to prepare a thin film. It becomes an ideal tool for automatic subpackaging. It improves the efficiency and consistency of subpackaging and reduces the possibility of personnel being contaminated by radiation.
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Description

Technical Field

[0001] The invention relates to the technical field of radioactive solutions, and in particular to an automatic loading system for a Y-90 radioactive solution. Background Art

[0002] Y-90 is a metal isotope coated in tiny resin microspheres. Guided by the microspheres, the radioactive element can enter peripheral microvasculature, penetrate into tumors, and generate radioactive energy to kill tumor cells. Yttrium-90 (Y-90) is a radionuclide with a half-life of 64 hours. It emits beta radiation and is often used as an ideal therapeutic radionuclide due to its favorable biological properties.

[0003] When processing radioactive solutions, a dropper is typically used to load a specific radioactive solution onto a specific area of ​​a substrate and then dry it to form a thin film. However, this process is often performed manually or semi-automatically, significantly compromising accuracy and efficiency. Therefore, a Y-90 radioactive solution automated loading system was urgently needed to address this issue. Summary of the Invention

[0004] The object of the present invention is to provide an automatic loading system for Y-90 radioactive solution to solve the above-mentioned deficiencies in the prior art.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] The Y-90 radioactive solution automatic loading system includes a workbench with a back plate fixedly mounted above the workbench, and an electric pipette connected to the back plate via a robotic arm;

[0007] A liquid storage device is provided above the workbench, and the liquid storage device includes a fixed frame, and the fixed frame is respectively provided with a solution A station, a solution B station and a mixed solution station, and an ultrasonic oscillator is provided inside the mixed solution station;

[0008] A rotating station is provided on one side of the top of the workbench, a drying assembly is provided on one side of the back plate and is located above the rotating station, and a vacuum waste liquid tank is fixedly provided on one outer wall of the workbench, and the vacuum waste liquid tank is used at least to recover evaporated radioactive solution;

[0009] An electric condenser is provided on one side of the top of the back plate, and the electric condenser is at least used to cool the evaporated waste liquid to liquefy it;

[0010] A six-axis robot is provided at one corner of the workbench, a substrate box placement station and a substrate placement station are arranged side by side on one side of the six-axis robot, and a dripping substrate placement station is provided at one corner of the top of the workbench.

[0011] Preferably, the robot arm includes an X-axis module fixed above the back plate, and a Y-axis module is arranged on the X-axis module, a vertical Z-axis module is arranged on one side of the Y-axis module, and the electric pipette is installed at the bottom end of the Z-axis module.

[0012] Preferably, the solution A station and the solution B station both comprise a lead glass cup and an upper lead glass cover for fixing the round bottom beaker and the protective shield;

[0013] The mixed solution station comprises a lead glass cup and an upper lead glass cover; a stainless steel lining is provided inside the lead glass cup; and an ultrasonic oscillator is fixed on the bottom of the stainless steel lining.

[0014] Preferably, a support frame is provided on one side of the workbench, and a solution A needle, a solution B needle and a mixed solution needle are arranged in sequence on the support frame. The solution A needle, solution B needle and mixed solution needle are used for dripping solution A, solution B and mixed solution respectively.

[0015] Preferably, the rotation station includes a servo motor arranged below the workbench and a turntable arranged above the workbench, the servo motor is equipped with a high-precision angle sensor, at least four substrates are placed on the rotation station, and at least four substrate boxes are placed.

[0016] Preferably, the drying component includes a support arm fixed on the outer wall of the back panel, and a lifting motor is installed above the support arm, the bottom end of the lifting motor is connected to a waterproof joint, and the bottom of the waterproof joint is fixedly connected to a lampshade, a sealing plate is provided on one side of the bottom of the lampshade, and a drying lamp is provided inside the lampshade.

[0017] Preferably, the electric condenser is provided with a condenser tube 1 and a condenser tube 2, the condenser tube 1 is connected to the drying component, and the condenser tube 2 is connected to the vacuum waste liquid tank.

[0018] Preferably, the electric pipette has a measuring range of 0-1000 μL, an accuracy of 0.15%-1.80%, can automatically replace the needle, has a communication interface and protocol, and can output a liquid level signal, a completion signal, and an alarm signal.

[0019] Preferably, the power of the ultrasonic oscillator is not less than 60W and the frequency is not less than 25kHz; the power of the drying lamp is not less than 250W.

[0020] The method for automatically loading a Y-90 radioactive solution into a system comprises the following steps:

[0021] 1) Replace the needle of solution A on the electronic pipette;

[0022] 2) Move solution A to the mixed solution station;

[0023] 3) Replace the needle of solution B on the electronic pipette;

[0024] 4) Move solution B to the mixed solution station;

[0025] 5) The ultrasonic oscillator mixes the solution in the mixed solution station evenly;

[0026] 6) The six-axis robot takes the substrate cassette from the substrate cassette placement station and places it in the rotation station, and takes the substrate from the substrate placement station and places it in the substrate cassette;

[0027] 7) Replace the needle of the mixed solution;

[0028] 8) Take the solution from the mixed solution station and drop it onto the substrate in the substrate box;

[0029] 9) The rotating station moves the current substrate box to the drying position, and then takes a new substrate box and places it on the rotating station;

[0030] 10) Repeat 8)-9) until there are undried substrates in the four substrate boxes of the drying station, then the drying assembly descends, the light is turned on to start drying, and after drying is completed, the light is turned off and the assembly ascends;

[0031] 11) The six-axis robot takes a substrate box from the drying position and places it on the rotating station, and then takes out the substrate and places it in the substrate box;

[0032] 12) Take the solution from the mixed solution station and drop it onto the substrate in the substrate box;

[0033] 13) The rotating station moves the current substrate box to the drying position, and then takes a new substrate box and places it on the rotating station;

[0034] 14) Repeat 11)-13) until there are undried substrates in the four substrate boxes at the drying station. Then, the drying lamp descends, the light is turned on to start drying, and after drying is completed, the light is turned off and the lamp is raised.

[0035] 15) Repeat the above process until all substrate boxes are full. The six-axis robot moves the substrate boxes to the final position in turn and retracts the mixed solution needle.

[0036] In the above technical solution, the Y-90 radioactive solution automatic loading system provided by the present invention has the following beneficial effects:

[0037] (1) The function of the radioactive solution automatic loading system of the present invention is to automatically load a specific radioactive solution into a specific area of ​​a substrate and dry it to prepare a thin film. It is an ideal tool for automatic packaging. It improves the efficiency and consistency of packaging and reduces the possibility of personnel being contaminated by radiation.

[0038] (2) The robot arm is used to drive the movement of the electric pipette to realize the switching movement of different solution stations. At the same time, different needles can be replaced for different solutions to avoid cross-contamination of solutions and realize automatic dripping operation with higher accuracy and efficiency.

[0039] (3) The drying component can not only dry the substrate to form a film, but also recover the evaporated radioactive solution and store it in the vacuum waste tank to avoid the waste of radioactive solution. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments described in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0041] Figure 1 The structure of the Y-90 radioactive solution automatic loading system embodiment of the present invention is provided Figure 1 .

[0042] Figure 2 A top view of the structure of an embodiment of the Y-90 radioactive solution automatic loading system of the present invention.

[0043] Figure 3 The structure of the Y-90 radioactive solution automatic loading system embodiment of the present invention is provided Figure 2 .

[0044] Figure 4 This is a schematic diagram of the drying assembly and electric condenser structure provided in an embodiment of the Y-90 radioactive solution automatic loading system of the present invention.

[0045] Figure 5 A schematic diagram of the structure of a liquid storage device provided in an embodiment of the automatic loading system for Y-90 radioactive solution of the present invention.

[0046] Figure 6 A schematic diagram of the control system software provided for an embodiment of the Y-90 radioactive solution automatic loading system of the present invention.

[0047] 1. Workbench; 2. Backboard; 3. X-axis module; 4. Y-axis module; 5. Z-axis module; 6. Liquid storage device; 61. Solution A station; 62. Solution B station; 63. Mixed solution station; 64. Ultrasonic oscillator; 65. Support frame; 66. Solution A needle; 67. Solution B needle; 68. Mixed solution needle; 7. Rotation station; 8. Drying component; 81. Support arm; 82. Lifting motor; 83. Waterproof connector; 84. Lampshade; 85. Sealing plate; 86. Drying lamp; 9. Vacuum waste liquid tank; 10. Electric condenser; 101. Condenser tube 1; 102. Condenser tube 2; 11. Six-axis robot; 12. Substrate box placement station; 13. Substrate placement station; 14. Dropping substrate placement station; 15. Electric pipette. DETAILED DESCRIPTION

[0048] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0049] like Figure 1-5 As shown, the Y-90 radioactive solution automatic loading system provided by the embodiment of the present invention includes a workbench 1, a back plate 2 is fixedly installed above the workbench 1, and an electric pipette 15 connected to the back plate 2 via a robot arm is provided; a liquid storage device 6 is provided above the workbench 1, and the liquid storage device 6 includes a fixed frame, and the fixed frame is respectively provided with an A solution station 61, a B solution station 62 and a mixed solution station 63, and an ultrasonic oscillator 64 is provided inside the mixed solution station 63; a rotating station 7 is provided on one side of the top of the workbench 1, and a rotating station 7 is provided on one side of the back plate 2. A drying assembly 8 is provided above the rotating station 7, and a vacuum waste liquid tank 9 is fixedly provided on the outer wall of one side of the workbench 1, and the vacuum waste liquid tank 9 is at least used to recover the evaporated radioactive solution; an electric condenser 10 is provided on the top side of the back plate 2, and the electric condenser 10 is at least used to cool the evaporated waste liquid to liquefy it; a six-axis robot 11 is provided at a corner of the workbench 1, and a substrate box placement station 12 and a substrate placement station 13 are arranged side by side on one side of the six-axis robot 11, and a dripping substrate placement station 14 is provided at the top corner of the workbench 1.

[0050] In this embodiment, a workbench 1 is provided with a back plate 2 fixedly mounted above the workbench 1. An electric pipette 15 connected to the back plate 2 via a robotic arm is provided on the back plate 2. The electric pipette 15 is small in size, light in weight, compact in structure, and features precise liquid level detection in capacitance / pressure dual modes, full-process TIP head status monitoring, air path blockage detection, active TIP head removal, RS-485 communication control, high precision, a built-in ceramic plunger, zero cross-contamination, and is used with disposable TIP heads.

[0051] Specifically, the robot arm includes an X-axis module 3 fixed above the back plate 2, and a Y-axis module 4 is arranged on the X-axis module 3, a vertical Z-axis module 5 is arranged on one side of the Y-axis module 4, and the electric pipette 15 is installed at the bottom end of the Z-axis module 5.

[0052] In this embodiment, a liquid storage device 6 is provided above the workbench 1. The liquid storage device 6 includes a fixed frame, and the fixed frame is respectively provided with a solution A station 61, a solution B station 62 and a mixed solution station 63. An ultrasonic oscillator 64 is provided inside the mixed solution station 63.

[0053] Specifically, the A solution station 61 and the B solution station 62 both include a lead glass cup and an upper lead glass lid, which are used to fix the round-bottom beaker and the protective shield. The mixed solution station 63 includes a lead glass cup and an upper lead glass lid. The interior of the lead glass cup is provided with a stainless steel lining. The ultrasonic oscillator 64 is fixed to the bottom of the stainless steel lining. The high-frequency vibration of the ultrasonic oscillator 64 is used to achieve mixing of solution A and solution B.

[0054] Specifically, a support frame 65 is provided on one side of the workbench 1, and an A solution needle 66, a B solution needle 67 and a mixed solution needle 68 are arranged in sequence on the support frame 65. The A solution needle 66, the B solution needle 67 and the mixed solution needle 68 are used for dripping the A solution, the B solution and the mixed solution respectively.

[0055] In this embodiment, a rotating station 7 is provided on one side of the top of the workbench 1;

[0056] Specifically, the rotating station 7 includes a servo motor arranged below the workbench 1 and a turntable arranged above the workbench 1. The servo motor is equipped with a high-precision angle sensor. At least four substrates and at least four substrate boxes are placed on the rotating station 7.

[0057] In this embodiment, a drying assembly 8 is provided on one side of the back plate 2 and is located above the rotating station 7;

[0058] Specifically, the drying component 8 includes a support arm 81 fixed on the outer wall of the back plate 2, and a lifting motor 82 is installed above the support arm 81, the bottom end of the lifting motor 82 is connected to a waterproof joint 83, and the bottom of the waterproof joint 83 is fixedly connected to a lampshade 84, a sealing plate 85 is provided on one side of the bottom of the lampshade 84, and a drying lamp 86 is provided inside the lampshade 84. The lifting motor 82 can drive the lampshade 84 to move up and down to achieve drying and removal of the substrate on the rotating station 7. At the same time, the lampshade 84 is made of stainless steel and has built-in heat insulation cotton added inside, which has a good heat preservation effect. An infusion tube connected to the vacuum waste liquid tank 9 is provided below one side of the lampshade 84, which can transport the collected solution inside the lampshade 84 to the inside of the vacuum waste liquid tank 9 for storage.

[0059] In this embodiment, a vacuum waste liquid tank 9 is fixedly mounted on one side of the outer wall of the workbench 1. The vacuum waste liquid tank 9 is used at least to recover the evaporated radioactive solution. An electric condenser 10 is mounted on one side of the top of the back plate 2. The electric condenser 10 is used at least to cool the evaporated waste liquid to liquefy it.

[0060] Specifically, the electric condenser 10 is provided with a condenser tube 101 and a condenser tube 102. The condenser tube 101 is connected to the drying component 8. The condenser tube 101 can cool the vaporized solution inside the lampshade 84 to make it liquid. The condenser tube 102 is connected to the vacuum waste liquid tank 9, which is more conducive to the collection of the solution by the vacuum waste liquid tank 9.

[0061] In this embodiment, a six-axis robot 11 is provided at a corner of the workbench 1, and a substrate box placement station 12 and a substrate placement station 13 are arranged side by side on one side of the six-axis robot 11. A dripping substrate placement station 14 is provided at a corner of the top of the workbench 1, and a groove is provided at the bottom of the substrate placement station 13, so as to achieve better positioning of the substrate in the substrate placement station 13. A clamping claw is provided at the end of the six-axis robot 11, which can carry a maximum of 200g. Suction cups are also provided on both sides of the end, which can be used together to more efficiently move the substrate box and substrate.

[0062] Specifically, the electric pipette 15 has a measuring range of 0~1000μL, an accuracy of 0.15%-1.80%, can automatically replace the needle, has a communication interface and protocol, and can output liquid level signals, completion signals, and alarm signals. The power of the ultrasonic oscillator 64 is not less than 60W and the frequency is not less than 25kHz; the power of the drying lamp 86 is not less than 250w.

[0063] The method for automatically loading a Y-90 radioactive solution into a system comprises the following steps:

[0064] 1) Replace the needle 66 of solution A with the electric pipette 15; 2) Move solution A to the mixed solution station 63; 3) Replace the needle 67 of solution B with the electric pipette 15; 4) Move solution B to the mixed solution station 63; 5) The ultrasonic oscillator 64 mixes the solutions in the mixed solution station 63 uniformly; 6) The six-axis robot 11 takes the substrate box in the substrate box placement station 12 and places it in the rotation station 7, and takes the substrate from the substrate placement station 13 and places it in the substrate box; 7) Replace the needle 68 of the mixed solution; 8) Take the liquid in the mixed solution station 63 and pipette it dropwise onto the substrate placed in the substrate box; 9) The rotation station 7 moves the current substrate box to the drying position, and then takes a new substrate box and places it on the rotation station 7; 10) Repeat 8)-9) until the drying station is After there are undried substrates in all four substrate boxes, the drying component 8 descends, the light is turned on to start drying, and the light is turned off and raised after drying is completed; 11), the six-axis robot 11 takes a substrate box from the drying position and places it on the rotating station, and takes a substrate and places it in the substrate box; 12), the liquid is taken from the mixed solution station 63 and dripped onto the substrate placed in the substrate box; 13), the rotating station 7 moves the current substrate box to the drying position, and then takes a new substrate box and places it on the rotating station; 14), repeat 11)-13), until there are undried substrates in all four substrate boxes at the drying station, the drying lamp descends, the light is turned on to start drying, and the light is turned off and raised after drying is completed; 15), repeat the above process until all substrate boxes are full, and the six-axis robot 11 moves the substrate boxes to the final position in turn and retracts the mixed solution needle.

[0065] like Figure 6 As shown, the radioactive solution automatic loading system software is a dedicated software designed to address the need for automated access control. It is designed for ease of use and features permission management for different user levels. The software offers the following advantages: a simple, user-friendly interface suitable for both novice and experienced users. It is specifically tailored for the radioactive solution automatic loading system, meeting all its requirements. A separate debugging system has been developed for replicated equipment. Comprehensive support and updates are provided to ensure the software remains up-to-date and secure. Hardware Requirements: This program runs on an industrial PC. The minimum system requirements are as follows: Processor: Intel Atom 1.8GB or higher; RAM: 2GB or higher DDR3; Display: 15-inch, 1920*1080 resolution; I / O: at least two serial ports (supporting RS485) or two USB ports with a USB-to-RS485 adapter; Storage: one 2.4-inch SATA or SSD hard drive with a capacity of 500GB or more; Operating environment: Temperature: -10°C to 55°C, Humidity: 5% to 90%; Power: 220V AC. Software requirements Operating system: Windows 7 or above.

[0066] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as above in terms of a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can, without departing from the scope of the technical solution of the present invention, make some changes or modifications to equivalent embodiments using the technical contents disclosed above. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A Y-90 radioactive solution automatic loading system, comprising a workbench (1), characterized in that: A back plate (2) is fixedly mounted above the workbench (1), and an electric pipette (15) connected via a robotic arm is provided on the back plate (2); A liquid storage device (6) is provided above the workbench (1), and the liquid storage device (6) includes a fixed frame, and an A solution station (61), a B solution station (62), and a mixed solution station (63) are respectively provided on the fixed frame, and an ultrasonic oscillator (64) is provided inside the mixed solution station (63); A rotating station (7) is provided on one side of the top of the workbench (1), a drying assembly (8) located above the rotating station (7) is provided on one side of the back plate (2), and a vacuum waste liquid tank (9) is fixedly provided on an outer wall of one side of the workbench (1), and the vacuum waste liquid tank (9) is used at least to recover evaporated radioactive solution; An electric condenser (10) is provided on one side of the top of the back plate (2), and the electric condenser (10) is at least used to cool the evaporated waste liquid to liquefy it; A six-axis robot (11) is provided at one corner of the workbench (1), a substrate box placement station (12) and a substrate placement station (13) are arranged in parallel on one side of the six-axis robot (11), and a droplet substrate placement station (14) is provided at one corner of the top of the workbench (1); The robot arm includes an X-axis module (3) fixed above the backboard (2), and a Y-axis module (4) is provided on the X-axis module (3), a vertical Z-axis module (5) is provided on one side of the Y-axis module (4), and the electric pipette (15) is installed at the bottom end of the Z-axis module (5), a support frame (65) is provided on one side of the workbench (1), and an A solution needle (66), a B solution needle (67) and a mixed solution needle (68) are arranged on the support frame (65) in sequence, and the A solution needle (66), the B solution needle (67) and the mixed solution needle (68) are used for dripping the A solution, the B solution and the mixed solution, respectively.

2. The Y-90 radioactive solution automatic loading system according to claim 1, characterized in that: The solution A station (61) and solution B station (62) each comprise a lead glass cup and an upper lead glass cover for fixing the round bottom beaker and the protective shield; The mixed solution station (63) comprises a lead glass cup and an upper lead glass cover, the interior of the lead glass cup is provided with a stainless steel lining, and the ultrasonic oscillator (64) is fixed to the bottom of the stainless steel lining.

3. The Y-90 radioactive solution automatic loading system according to claim 1, characterized in that: The rotating station (7) includes a servo motor arranged below the workbench (1) and a turntable arranged above the workbench (1). The servo motor is equipped with a high-precision angle sensor. At least four substrates are placed on the rotating station (7), and at least four substrate boxes are placed.

4. The Y-90 radioactive solution automatic loading system according to claim 1, characterized in that: The drying assembly (8) includes a support arm (81) fixed on the outer wall of the back plate (2), and a lifting motor (82) is installed above the support arm (81), the bottom end of the lifting motor (82) is connected to a waterproof joint (83), and the bottom of the waterproof joint (83) is fixedly connected to a lampshade (84), a sealing plate (85) is provided on one side of the bottom of the lampshade (84), and a drying lamp (86) is provided inside the lampshade (84).

5. The Y-90 radioactive solution automatic loading system according to claim 1, characterized in that: The electric condenser (10) is provided with a condenser tube 1 (101) and a condenser tube 2 (102), wherein the condenser tube 1 (101) is connected to the drying assembly (8), and the condenser tube 2 (102) is connected to the vacuum waste liquid tank (9).

6. The Y-90 radioactive solution automatic loading system according to claim 1, characterized in that: The electric pipette (15) has a measuring range of 0-1000 μL and an accuracy of 0.15%-1.80%, can automatically replace the needle, has a communication interface and protocol, and can output a liquid level signal, a completion signal, and an alarm signal.

7. The Y-90 radioactive solution automatic loading system according to claim 4, characterized in that: The power of the ultrasonic oscillator (64) is not less than 60W and the frequency is not less than 25kHz; the power of the drying lamp (86) is not less than 250W.

8. The method of the Y-90 radioactive solution automatic loading system according to any one of claims 1 to 7, characterized in that: The following steps are involved: 1) Replace the needle (66) of solution A with the electric pipette (15); 2) Move solution A to the mixed solution station (63); 3) Replace the needle (67) of solution B with the electric pipette (15); 4) Move solution B to the mixed solution station (63); 5) The ultrasonic oscillator (64) mixes the solution in the mixed solution station (63) uniformly; 6) The six-axis robot (11) takes the substrate box in the substrate box placement station (12) and places it in the rotation station (7), and takes the substrate from the substrate placement station (13) and places it in the substrate box; 7) Replace the mixed solution needle (68); 8) Take the solution from the mixed solution station (63) and drop it onto the substrate placed in the substrate box; 9) The rotating station (7) moves the current substrate box to the drying position, and then takes a new substrate box and places it on the rotating station (7); 10) Repeat 8)-9) until there are undried substrates in the four substrate boxes of the drying station, then the drying assembly (8) descends, the light is turned on to start drying, and after drying is completed, the light is turned off and the drying assembly (8) ascends; 11), the six-axis robot (11) takes a substrate box at the drying position and places it on the rotating station, and takes a substrate and places it in the substrate box; 12) Take the solution from the mixed solution station (63) and drop it onto the substrate placed in the substrate box; 13) The rotating station (7) moves the current substrate box to the drying position, and then takes a new substrate box and places it in the rotating station; 14) Repeat 11)-13) until there are undried substrates in the four substrate boxes at the drying station. Then, the drying lamp descends, the light is turned on to start drying, and after drying is completed, the light is turned off and the lamp is raised. 15) Repeat the above process until all the substrate boxes are full, and the six-axis robot (11) moves the substrate boxes to the final position in turn and retracts the mixed solution needle.

Citation Information

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