High-power excimer laser with low maintenance cost and optical path debugging method thereof
The split design of external laser resonant mirrors in excimer lasers reduces maintenance costs by preventing contamination and enabling easy mirror replacement and alignment, addressing the high maintenance issues of traditional designs.
Patent Information
- Application Number
- CN202510643439.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-19
- Publication Date
- 2025-07-15
AI Technical Summary
The laser resonator plates of existing high-power excimer lasers are susceptible to contamination by contaminants, have high maintenance costs, and are difficult to measure and adjust optical parameters quickly, resulting in expensive use and maintenance costs.
The split structure is adopted, and the laser resonant plate is placed outside the laser discharge cavity, and a low-cost ultraviolet lens is used to replace the cavity end mirror. After contamination, it can be removed, cleaned or replaced, and the laser resonant plate angle can be independently adjusted through the optical path debugging method to reduce maintenance frequency and cost.
It extends the service life of the laser resonator, reduces maintenance costs, improves the optical path debugging efficiency, and reduces the replacement frequency and maintenance time of expensive lenses.
Smart Images
Figure CN120320137A_ABST
Abstract
Description
[Technical field]
[0001] The invention relates to the field of excimer lasers, in particular to a high-power excimer laser with low maintenance cost and an optical path debugging method thereof. [Background technology]
[0002] High-power excimer laser is a laser that can generate high-energy pulsed ultraviolet light and is widely used in industry, medicine and scientific research. It is characterized by high output power, short wavelength and high pulse energy. Resonance plates are installed at both ends of the high-power excimer laser. The resonant plate at one end is fully reflected, and the resonant plate at the other end is partially reflected to output laser.
[0003] During the operation of high-power excimer lasers, the following pollutants mainly exist: 1. Halogen gas in the working gas reacts with the electrode and cavity materials to generate solid or gaseous pollutants; 2. During the discharge process, the electrode surface is bombarded by high-energy ions and electrons, resulting in corrosion and material peeling, generating particulate pollution; 3. When the laser is running at high power, the temperature change caused by local high temperature causes thermal stress in the material, resulting in microcracks and peeling, and generating particulate pollutants. In general, the laser resonator is also part of the laser discharge cavity. The laser discharge cavity cavity and the laser resonators at both ends together constitute a chamber filled with working gas. The laser resonator is in direct contact with the working gas. During operation, pollutants will adhere to the surface of the laser resonator. Therefore, the laser resonator needs to be cleaned and wiped frequently. However, the laser resonator is expensive and the optical coating on its surface cannot withstand multiple cleaning and wiping. The damage caused by wiping will change the optical parameters of the laser resonator. After multiple wiping, the laser resonator cannot meet the parameter range required for the use of high-power excimer lasers. In addition, the parameters of the laser resonator, such as transmittance and reflectivity, are strictly required, making it difficult to quickly measure them. It is also difficult to determine on-site whether they can continue to be used after multiple wipes. At this time, the expensive laser resonator needs to be replaced, which greatly increases the cost of use. Moreover, replacing the laser resonator requires re-adjusting the lens angle of the resonator, and the maintenance time cost is also high. As a laser for large-scale industrial applications, reducing the maintenance cost is an important issue that needs to be solved urgently. [Summary of the invention]
[0004] The object of the present invention is to overcome the deficiencies of the prior art and provide a high-power excimer laser with low maintenance costs. The laser adopts a split structure, and the first laser resonator plate and the second laser resonator plate are arranged on the outer sides of both sides of the laser discharge cavity, avoiding the contact of the expensive first laser resonator plate and the second laser resonator plate with the internal environment of the laser discharge cavity, eliminating the pollution of the internal pollutants of the laser discharge cavity to the first laser resonator plate and the second laser resonator plate, greatly prolonging the service life of the first laser resonator plate and the second laser resonator plate, and the positions on the cavity where the first laser resonator plate and the second laser resonator plate originally needed to be installed are replaced by using ultraviolet lenses with high transmittance. The ultraviolet lenses are inexpensive and can be disassembled, cleaned or replaced at any time after being polluted, greatly reducing the maintenance cost of the laser.
[0005] The present invention also provides an optical path debugging method for a high-power excimer laser with low maintenance costs. By debugging the optical path through this debugging method, the optical debugging efficiency can be greatly improved.
[0006] The present invention is realized through the following technical solutions:
[0007] A high-power excimer laser with low maintenance costs includes a frame. A laser discharge cavity is arranged inside the frame. The laser discharge cavity includes a cavity body. Transparent lenses are detachably arranged at both ends of the cavity body. The transparent lenses and the cavity body enclose a sealed space for filling working gas. An electrode for exciting the working gas is arranged inside the cavity body. A first adjustment seat and a second adjustment seat are also arranged inside the frame on both sides of the cavity body. A first laser resonator plate is arranged on the first adjustment seat and is spaced opposite to the transparent lens on one side of the cavity body. A second laser resonator plate is arranged on the second adjustment seat and is spaced opposite to the transparent lens on the other side of the cavity body.
[0008] The transparent lens is an ultraviolet lens.
[0009] The transmittance of the ultraviolet lens is greater than or equal to 96%.
[0010] A pre-ionizer is also arranged inside the cavity body.
[0011] An optical path debugging method for a high-power excimer laser includes the following steps:
[0012] S1. Install a first diaphragm and a second diaphragm spaced apart from each other at a reference position on the frame;
[0013] S2. Prepare a debugging light source, and sequentially set a third diaphragm, a first reflector and a second reflector on the light transmission path of the debugging light source. The third diaphragm is arranged at the light emission place of the debugging light source;
[0014] S3. Turn on the debugging light source to make the light pass through the third aperture. Then, adjust the positions of the first mirror and the second mirror so that the light passes through the centers of the first aperture and the second aperture. At this time, the optical path direction passing through the centers of the first aperture and the second aperture is the optical path transmission direction of the excimer laser to be obtained;
[0015] S4. Remove the first aperture and the second aperture. Install a fourth aperture at the position of the light-transmitting mirror on one side of the laser discharge cavity, and install a fifth aperture at the position of the light-transmitting mirror on the other side of the laser discharge cavity. Adjust the position of the laser discharge cavity so that the light of the debugging light source passes through the centers of the fourth aperture and the fifth aperture. Then, fix the position of the laser discharge cavity;
[0016] S5. Remove the fourth aperture and the fifth aperture;
[0017] S6. Set a first adjusting seat and a second adjusting seat on both sides of the laser discharge cavity. Install a sixth aperture on the first adjusting seat and install a seventh aperture on the second adjusting seat. Adjust the positions of the first adjusting seat and the second adjusting seat so that the light of the debugging light source passes through the centers of the sixth aperture and the seventh aperture. Then, fix the positions of the first adjusting seat and the second adjusting seat;
[0018] S7. Remove the sixth aperture and the seventh aperture;
[0019] S8. Install a first laser resonator plate and a second laser resonator plate on the first adjusting seat and the second adjusting seat. Adjust the angles of the first laser resonator plate and the second laser resonator plate so that the light emitted by the debugging light source presents two recognizable light spots on the third aperture after being reflected by the second laser resonator plate and the first laser resonator plate. Continue to adjust the angles of the first laser resonator plate and the second laser resonator plate until both of the two light spots are located at the center position of the third aperture.
[0020] The laser discharge cavity includes a cavity body. The light-transmitting mirrors are arranged at both ends of the cavity body. The light-transmitting mirrors and the cavity body enclose a sealed space for filling working gas. An electrode for exciting the working gas is arranged in the cavity body. The first adjusting seat and the second adjusting seat are arranged on both sides of the laser discharge cavity.
[0021] The light-transmitting mirrors are ultraviolet lenses, and the transmittance of the ultraviolet lenses is greater than or equal to 96%;
[0022] A pre-ionizer is also arranged in the cavity body.
[0023] The settings of the first mirror and the second mirror make the light emitted by the debugging light source form a first optical path and a second optical path that are parallel to each other. In steps S1 to S8, the first aperture, the second aperture, the laser discharge cavity, the fourth aperture, the fifth aperture, the first adjusting seat, and the second adjusting seat are arranged along the second optical path.
[0024] Compared with the prior art, the present invention has the following advantages:
[0025] 1. The present invention designs the discharge cavity of the high-power excimer laser and the laser resonator as a split structure. The laser discharge cavity includes a cavity and two light-transmitting mirrors sealed at both ends thereof. The first laser resonator and the second laser resonator are respectively disposed on both sides outside the laser discharge cavity. The split structure avoids the expensive first laser resonator and the second laser resonator from contacting the internal environment of the laser discharge cavity, thereby preventing the contamination of the first laser resonator and the second laser resonator by the internal pollutants of the laser discharge cavity. The light-transmitting mirrors at both ends of the cavity can use ultraviolet lenses with a transmittance of ≥96%, which are low in cost and can be disassembled, cleaned or replaced at any time after being contaminated, greatly reducing the maintenance cost of the laser.
[0026] 2. The high-transmittance ultraviolet lenses with a transmittance of ≥96% at both ends of the cavity of the present invention have a lower price compared to the laser resonator. At the same time, the key parameter of the ultraviolet lens is only the transmittance of the corresponding wavelength light, which can be quickly measured using an ultraviolet spectrophotometer. Therefore, the degree of damage after multiple wipes and whether it can be used continuously can be quickly judged on-site, reducing the maintenance cost of the laser.
[0027] 3. The optical path debugging method of the high-power excimer laser with low maintenance cost of the present invention first finds the optical path direction required by the excimer laser through the first diaphragm and the second diaphragm installed at the reference position, then determines the position of the laser discharge cavity through the fourth diaphragm and the fifth diaphragm, and then determines the positions of the first adjustment seat for installing the first laser resonator and the second adjustment seat for the second laser resonator through the sixth diaphragm and the seventh diaphragm. Finally, the angles of the first laser resonator and the second laser resonator are adjusted according to the spot position of the reflected light reflected by the first laser resonator and the second laser resonator on the third diaphragm. The entire debugging principle is ingenious, and the angles of the first laser resonator and the second laser resonator can be independently adjusted, greatly improving the debugging efficiency.
Description of the Drawings
[0028] Figure 1 is a schematic structural diagram of the high-power excimer laser with low maintenance cost of the present invention;
[0029] Figure 2 is one of the schematic diagrams of the steps of the optical path debugging method of the present invention;
[0030] Figure 3 is another schematic diagram of the steps of the optical path debugging method of the present invention;
[0031] Figure 4 is the third schematic diagram of the steps of the optical path debugging method of the present invention;
[0032] Figure 5This is the fourth schematic diagram of the optical path debugging method of the present invention.
Specific Embodiment
[0033] The present invention will be further described below with reference to the accompanying drawings:
[0034] As Figure 1 shown, a high-power excimer laser with low maintenance cost includes a frame 100. A laser discharge cavity 4 is provided inside the frame 100. The laser discharge cavity 4 includes a cavity body 41. Transparent lenses 42 are detachably provided at both ends of the cavity body 41. The transparent lenses 42 are ultraviolet lenses, and their transmittance is greater than or equal to 96%. The transparent lenses 42 and the cavity body 41 enclose a sealed space 43 for filling working gas. An electrode 44 for exciting the working gas is provided inside the cavity body 41. A pre-ionizer 45 is also provided inside the cavity body 41. First adjustment seats 5 and second adjustment seats 6 are provided on both sides of the cavity body 41 inside the frame 100. A first laser resonator plate 51 spaced apart and opposite to the transparent lens 42 on one side of the cavity body 41 is provided on the first adjustment seat 5. A second laser resonator plate 52 spaced apart and opposite to the transparent lens 42 on the other side of the cavity body 41 is provided on the second adjustment seat 6. The ultraviolet lenses are detachably installed at both ends of the cavity body 41, forming a sealed chamber with the cavity body 41. The first laser resonator plate 51 and the second laser resonator plate 52 are arranged on both outer sides of the laser discharge cavity 4 and opposite to the corresponding ultraviolet lenses, avoiding the pollution of the expensive first laser resonator plate 51 and the second laser resonator plate 52 by the pollutants generated during the operation of the laser. The polluted ultraviolet lenses can be wiped clean. Even if the wiping causes a change in their optical parameters, it can be quickly measured to determine whether they can continue to be used. Moreover, the cost of the ultraviolet lenses is lower than that of the resonator lenses. If the ultraviolet lenses reach the degree that needs to be replaced, they can be replaced at any time, greatly reducing the maintenance cost of the excimer laser.
[0035] As Figures 2 to 5 shown, the debugging method for debugging the optical path of the aforementioned high-power excimer laser includes the following steps:
[0036] S1. Install a first diaphragm 71 and a second diaphragm 72 spaced apart at a reference position on the frame;
[0037] S2. Prepare the debugging light source 1. The debugging light source 1 uses a green light source that can partially penetrate and partially reflect on the first laser resonator 51 and the second laser resonator 52. A third aperture stop 73, a first mirror 81, and a second mirror 82 are sequentially arranged on the light transmission path of the debugging light source 1. The third aperture stop 73 is arranged at the light emission place of the debugging light source 1 to ensure that the light emitted by the debugging light source 1 can pass through the central hole of the third aperture stop 73. The first mirror 81 and the second mirror 82 are arranged so that the light emitted by the debugging light source 1 forms mutually parallel first debugging optical path 11 and second debugging optical path 12;
[0038] S3. Turn on the debugging light source 1 to make the light pass through the third aperture stop 73, and then adjust the positions of the first mirror 81 and the second mirror 82 so that the light of the debugging light source 1 passes through the centers of the first aperture stop 71 and the second aperture stop 72. At this time, the optical path direction passing through the centers of the first aperture stop 71 and the second aperture stop 72 is the optical path transmission direction of the excimer laser to be obtained;
[0039] S4. Remove the first aperture stop 71 and the second aperture stop 72, install a fourth aperture stop 74 at the position of the light-transmitting mirror 42 on one side of the laser discharge cavity 4, and install a fifth aperture stop 75 at the position of the light-transmitting mirror 42 on the other side of the laser discharge cavity 4. The installation methods of the fourth aperture stop 74 and the fifth aperture stop 75 are not limited. Preferably, slots are opened at both ends of the cavity 41, and the fourth aperture stop 74 and the fifth aperture stop 75 are clamped and fixed with the slots. Then adjust the position of the laser discharge cavity 4 until the light of the debugging light source 1 passes through the centers of the fourth aperture stop 74 and the fifth aperture stop 752, and then fix the position of the laser discharge cavity 4;
[0040] S5. Remove the fourth aperture stop 74 and the fifth aperture stop 75 from the cavity 41;
[0041] S6. Set a first adjusting seat 5 and a second adjusting seat 6 on both sides of the laser discharge cavity 4. Install a sixth aperture stop 76 on the first adjusting seat 5, and install a seventh aperture stop 77 on the second adjusting seat 6. The sixth aperture stop 76 and the first adjusting seat 5, and the seventh aperture stop 77 and the second adjusting seat 6 can also be clamped and fixed. Then adjust the positions of the first adjusting seat 5 and the second adjusting seat 6 until the light of the debugging light source 1 passes through the centers of the sixth aperture stop 76 and the seventh aperture stop 77, and then fix the positions of the first adjusting seat 5 and the second adjusting seat 6;
[0042] S7. Remove the sixth aperture stop 76 and the seventh aperture stop 77;
[0043] S8. Install the first laser resonator 51 and the second laser resonator 52 on the first adjusting base 5 and the second adjusting base 6 and adjust the angles of the two. Debug the light emitted by the light source 1 so that partial reflection occurs on the first laser resonator 51 and the second laser resonator 52. Since the distances between the first laser resonator 51 and the second laser resonator 52 and the light source 1 are different, in this embodiment, the reflection optical path distance between the first laser resonator 51 and the light source 1 is relatively close, and the reflection optical path distance between the second laser resonator 52 and the light source 1 is relatively far. Therefore, the light reflected on the first laser resonator 51 forms a smaller bright spot on the third aperture 73 after being reflected by the second reflector 82 and the first reflector 81, while the light reflected on the second laser resonator 52 passes through the laser discharge cavity 4 and the first laser resonator 51 and forms a larger and slightly blurred spot on the third aperture 73 after being reflected by the second reflector 82 and the first reflector 81, that is, two recognizable spots are formed on the third aperture 73. Continue to adjust the angles of the first laser resonator 51 and the second laser resonator 52 until the above two spots are both located at the center position of the third aperture 73. At this time, the angles of the first laser resonator 51 and the second laser resonator 52 are adjusted, and the optical path of the entire excimer laser is also adjusted.
[0044] The debugging principle of the optical path debugging method of the present invention is ingenious. First, the designed optical path direction of the excimer laser is determined by the first aperture 71 and the second aperture 72 at the reference position. Then, the position of the laser discharge cavity 4 is determined by the fourth aperture 74 and the fifth aperture 75. Next, the positions of the first adjusting base 5 and the second adjusting base 6 are determined by the sixth aperture 76 and the seventh aperture 77. Finally, the angles of the first laser resonator 51 and the second laser resonator 52 are determined by the difference in the optical path distances between the first laser resonator 51 and the second laser resonator 52 and the light source 1, and recognizable spots will appear. And the debugging result can be visually judged by observing the two spots of the reflected light on the third aperture 73 with the naked eye, realizing the independent adjustment of the angles of the first laser resonator 51 and the second laser resonator 52. Compared with the traditional excimer laser that needs to adjust the position and angle of the resonator mirror and the laser cavity as a whole, when the optical path debugging method of the present invention is used for optical path debugging, the efficiency is greatly improved.
[0045] In steps S1 to S8, the first aperture 71, the second aperture 72, the laser discharge cavity 4, the fourth aperture 74, the fifth aperture 75, the first adjusting base 5 and the second adjusting base 6 are arranged on the second debugging optical path 12.
[0046] The above has described this embodiment in detail with reference to the accompanying drawings. However, the present invention is not limited to the above embodiment. Within the knowledge scope of those of ordinary skill in the art in the said technical field, various changes can be made without departing from the purpose of the present invention.
Claims
1. A high-power excimer laser with low maintenance costs, characterized in that, It includes a frame (100), within which a laser discharge cavity (4) is provided. The laser discharge cavity (4) includes a cavity body (41). At both ends of the cavity body (41), light-transmitting mirrors (42) are detachably provided. The light-transmitting mirrors (42) and the cavity body (41) enclose a sealed space (43) for filling working gas. An electrode (44) for exciting the working gas is provided within the cavity body (41). In the frame (100), a first adjusting base (5) and a second adjusting base (6) are further provided on both sides of the cavity body (41). A first laser resonator plate (51) spaced opposite to and separated from the light-transmitting mirror (42) on one side of the cavity body (41) is provided on the first adjusting base (5). A second laser resonator plate (52) spaced opposite to and separated from the light-transmitting mirror (42) on the other side of the cavity body (41) is provided on the second adjusting base (6).
2. A high-power excimer laser with low maintenance cost according to claim 1, characterized in that, The light-transmitting mirror (42) is an ultraviolet lens.
3. A high-power excimer laser with low maintenance cost according to claim 2, characterized in that, The transmittance of the ultraviolet lens is greater than or equal to 96%.
4. A high-power excimer laser with low maintenance cost according to claim 2, characterized in that, A pre-ionizer (45) is further provided within the cavity body (41).
5. A debugging method for the optical path of a high-power excimer laser, characterized in that, It includes the following steps: S1. Install a first diaphragm (71) and a second diaphragm (72) spaced apart from each other at a reference position on the frame (100). S2. Prepare a debugging light source (1), and sequentially arrange a third diaphragm (73), a first reflector (81), and a second reflector (82) on the light transmission path of the debugging light source (1). S3. Turn on the debugging light source (1) to make the light pass through the third diaphragm (73), and then adjust the positions of the first reflector (81) and the second reflector (82) so that the light passes through the centers of the first diaphragm (71) and the second diaphragm (72). At this time, the optical path direction passing through the centers of the first diaphragm (71) and the second diaphragm (72) is the optical path transmission direction of the required excimer laser. S4. Remove the first diaphragm (71) and the second diaphragm (72), install a fourth diaphragm (74) at the position of the light-transmitting mirror (42) on one side of the laser discharge cavity (4), install a fifth diaphragm (75) at the position of the light-transmitting mirror (42) on the other side of the laser discharge cavity (4), adjust the position of the laser discharge cavity (4) so that the light of the debugging light source (1) passes through the centers of the fourth diaphragm (74) and the fifth diaphragm (752), and then fix the position of the laser discharge cavity (4). S5. Remove the fourth diaphragm (74) and the fifth diaphragm (75). S6. Set a first adjusting base (5) and a second adjusting base (6) on both sides of the laser discharge cavity (4). Install a sixth diaphragm (76) on the first adjusting base (5), install a seventh diaphragm (77) on the second adjusting base (6), adjust the positions of the first adjusting base (5) and the second adjusting base (6) so that the light of the debugging light source (1) passes through the centers of the sixth diaphragm (76) and the seventh diaphragm (77), and then fix the positions of the first adjusting base (5) and the second adjusting base (6). S7. Remove the sixth diaphragm (76) and the seventh diaphragm (77). S8. Install the first laser resonator plate (51) and the second laser resonator plate (52) on the first adjusting seat (5) and the second adjusting seat (6), and adjust the angles of the first laser resonator plate (51) and the second laser resonator plate (61) so that the light rays emitted by the debugging light source (1) are reflected at the second laser resonator plate (52) and the first laser resonator plate (51) and present two recognizable light spots on the third aperture (73). Continue to adjust the angles of the first laser resonator plate (51) and the second laser resonator plate (52) until both of the said light spots are located at the central position of the third aperture (73).
6. The debugging method of the optical path of a high-power excimer laser with low maintenance cost according to claim 5, characterized in that The said third aperture (73) is arranged at the light source emission part of the debugging light source (1).
7. A debugging method for the optical path of a high-power excimer laser with low maintenance cost according to claim 5, characterized in that The said laser discharge cavity (4) includes a cavity body (41). The said light-transmitting mirrors (42) are arranged at both ends of the cavity body (41). The said light-transmitting mirrors (42) and the cavity body (41) enclose a sealed space (43) for filling working gas. An electrode (44) for exciting the working gas is arranged in the said cavity body (41). The said first adjusting seat (5) and the second adjusting seat (6) are arranged on both sides of the laser discharge cavity (4).
8. A debugging method for the optical path of a high-power excimer laser with low maintenance cost according to claim 5, characterized in that, The said light-transmitting mirror (42) is an ultraviolet lens, and the transmittance of the said ultraviolet lens is greater than or equal to 96%.
9. The alignment method for the optical path of a high-power excimer laser with low maintenance cost according to claim 5, characterized in that, A pre-ionizer (45) is further arranged in the said cavity body (41).
10. The debugging method of the optical path of a high-power excimer laser with low maintenance cost according to claim 5, characterized in that, The arrangements of the said first reflector (81) and the second reflector (82) make the light rays emitted by the debugging light source (1) form parallel first optical path (11) and second optical path (12). In steps S1 to S8, the said first aperture (71), second aperture (72), laser discharge cavity (4), fourth aperture (74), fifth aperture (75), first adjusting seat (5) and second adjusting seat (6) are arranged along the second optical path (12).