A multi-head galvanometer laser flying scribing method and device

Abstract

The present invention relates to the field of laser processing technology, and specifically discloses a multi-head galvanometer laser flying scribing method and device. The method comprises: the carrier axis assembly drives the product at a speed of v Continuous uniform motion; the visual axis assembly and the stage axis establish a unified coordinate system, linking the spatial positions of multiple galvanometer lenses. During stage motion, the galvanometer lenses synchronously activate their lasers, marking the pre-loaded contour path. For corners of contoured lines, the trajectory is dynamically adjusted using compensation to generate arc radius. The dust extraction axis assembly's independent dust extraction port fully covers the processing area (dust residue <0.1mg / m³). The device includes: a stage axis assembly (speed 0.5-2m / s); a crossbeam axis assembly equipped with 4-10 galvanometer lenses; a spectrometer assembly (energy uniformity error <3%); a dust extraction axis assembly (dust extraction efficiency ≥95%); and a control system (delay <1ms). This invention enables high-speed machining while maintaining a balance of precision, efficiency, and cleanliness.

Description

Technical Field

[0001] The present invention relates to the field of laser processing and automated control technology, and in particular to a multi-head galvanometer laser flying scribing method and device, which is particularly suitable for the special-shaped laser scribing process of photovoltaic thin-film cells such as perovskite, cadmium telluride, and copper indium gallium selenide. Background Art

[0002] In the industrialization process of photovoltaic thin film cells (such as perovskite solar cells), laser scribing is a key process in the process. The three scribing lines P1, P2, and P3 are used to divide the entire film layer into series-connected sub-cells. The traditional process uses straight line scribing (such as Figure 1 As shown in the figure above), in order to improve the photoelectric conversion efficiency, the effective illumination area needs to be increased. The latest research shows that:

[0003] Special-shaped line design: Change the P1 straight line into a circular arc, triangle or other special-shaped line, and extend the raised part to the P2 line position;

[0004] Nested structure: Change the continuous line of P2 to a discontinuous dot or line segment, and embed it into the raised part of the special-shaped line of P1 (such as Figure 1 superior).

[0005] This design can theoretically increase the effective illumination area, but faces the following technical bottlenecks:

[0006] Defects of existing technology

[0007] 1. Insufficient multi-head linkage accuracy: Current equipment mostly uses multi-head focused cutting heads, which are limited by the multi-axis linkage accuracy and response speed (delay>5ms). The trajectory deviation is large during special-shaped line processing and cannot meet the overprint accuracy requirement of ±1μm.

[0008] 2. Low processing efficiency: The traditional static splicing process requires the stage to frequently start and stop to wait for the galvanometer positioning, and the processing speed is ≤0.5m / s, which affects mass production efficiency.

[0009] 3. Insufficient dust pollution control: Dust generated by scratching is easily deposited on the surface of the film layer. The existing dust extraction system has a low coverage rate and the residual dust is >1mg / m³, which leads to a decrease in battery performance.

[0010] Technology gap

[0011] Currently, there is no mass-produced equipment that supports high-speed dynamic flight engraving of special-shaped lines at home and abroad, nor is there a solution that takes into account precision, efficiency and cleanliness. This is a technological gap that the industry urgently needs to break through. Summary of the Invention

[0012] In view of the existing technical problems, the purpose of the present invention is to provide a multi-head galvanometer laser flying scribing method and device that takes into account precision, efficiency and cleanliness.

[0013] In order to achieve the above object, the present invention provides a multi-head galvanometer laser flying scribing method, comprising the following steps:

[0014] S1: The carrier axis assembly drives the product to be processed along the engraving direction at a speed =0.5~2m / s continuous uniform motion;

[0015] S2: A unified coordinate system is constructed by the visual axis assembly and the stage axis assembly to associate the spatial positions of multiple galvanometer lens assemblies and device deviations ;

[0016] S3: During the uniform motion of the stage axis, multiple galvanometer lens assemblies simultaneously turn on the laser and perform engraving according to the pre-loaded special-shaped pattern path;

[0017] S4: When the engraving trajectory is a special-shaped line, the vibration lens assembly dynamically adjusts the moving trajectory according to the compensation path, and the compensation amount δ The calculation formula is:

[0018]

[0019] Corner machining to radius r Arc:

[0020]

[0021] S5: Multiple independent dust extraction ports of the dust extraction shaft assembly cover the entire processing area, removing dust in real time, with dust residue <0.1mg / m 3 .

[0022] Another aspect of the present invention provides a multi-head galvanometer laser flying scribing device, comprising:

[0023] Stage axis assembly: driven by a linear motor, with a speed range of 0.5~2m / s and a straightness of <5μm;

[0024] Crossbeam axis assembly: equipped with 4 to 10 independently movable galvanometer lens assemblies, each galvanometer lens is driven by a linear motor and shares a stator and guide rail;

[0025] Visual axis assembly: through interferometer data compensation, positioning accuracy is ±1μm;

[0026] Optical system: including laser components, external light path components, and splitter box components. The energy uniformity error after splitting is <3%:

[0027] .

[0028] Dust extraction shaft assembly: Dust extraction efficiency ≥ 95%, wind speed u satisfy , dust residue <0.1mg / m3 ;

[0029] Control system: Synchronous control of the stage axis, galvanometer lens and laser switch timing, delay time <1ms.

[0030] Due to the adoption of the above technical solution, the beneficial effects of the present invention are as follows:

[0031] 1. Accuracy improvement: multi-head galvanometer collaborative error E <1μm, overprint accuracy reaches ±1μm;

[0032] 2. Efficiency breakthrough: Continuous motion of the carrier + dynamic compensation, the processing speed is increased to 2m / s (300% higher than the traditional one);

[0033] 3. Pollution eradication: dust residue is reduced to below 0.1mg / m³, and battery yield is increased by ≥15%;

[0034] 4. Cost optimization: Single laser beam splitting and multi-head solution reduces equipment costs by 40%. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Schematic diagram comparing traditional straight line scribing and special-shaped scribing of the present invention;

[0036] Figure 2 This is a logic principle diagram of the multi-head galvanometer laser flying scribing method of the present invention;

[0037] Figure 3 This is a comparative diagram of the special-shaped markings of P1 of the present invention;

[0038] Figure 4 This is the nested line diagram of P2 of the present invention;

[0039] Figure 5 This is a schematic structural diagram of the multi-head galvanometer laser flying scribing device of the present invention.

[0040] In the figure, 100-frame assembly, 200-stage axis assembly, 300-visual axis assembly, 400-beam axis assembly, 510-laser assembly, 520-external optical path assembly, 530-left spectrometer box assembly, 540-right spectrometer box assembly, 610-Z axis assembly, 620-galvanometer lens assembly, 700-dust extraction axis assembly, 710-independent dust extraction port. DETAILED DESCRIPTION

[0041] The technical solutions of the present invention will be described clearly and completely below with reference to the accompanying drawings and specific embodiments. It is obvious that the embodiments described are only a portion of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are intended to fall within the scope of protection of the present invention.

[0042] Example 1: Flow of the special-shaped scribing method

[0043] Combine Figures 2 to 4 , taking the irregular marking of perovskite cell P1 as an example:

[0044] 1. Initialization:

[0045] S1: The carrier shaft assembly 200 drives the product to be processed along the engraving direction at a speed =1.5m / s continuous uniform motion;

[0046] S2: The unified coordinate system constructed by the visual axis assembly 300 and the stage axis assembly 200, which associates the spatial positions of multiple galvanometer lens assemblies 620, and the device deviation ;

[0047] 2. Dynamic line drawing:

[0048] S3: During the uniform motion of the stage axis, multiple galvanometer lens assemblies 620 simultaneously turn on the laser to perform engraving according to the pre-loaded special-shaped pattern path;

[0049] 3. Corner compensation:

[0050] S4: When marking to corner( ), a compensation path is generated:

[0051]

[0052] The actual processing is an arc with a radius of r:

[0053]

[0054] 4. Dust control:

[0055] S5: The processing area is fully covered by multiple independent dust extraction ports 710 of the dust extraction shaft assembly 700, and the actual dust residual amount is 0.08 mg / m 3 .

[0056] Example 2: P2 nested line verification

[0057] like Figure 4 As shown:

[0058] 1. The visual axis captures the P1 edge mark point and locates the P2 starting coordinate;

[0059] 2. While the stage is moving at a constant speed, the galvanometer lens switches the laser on and off at high speed (frequency 1kHz) to create discontinuous dots.

[0060] 3. The dots are precisely embedded in the P1 triangular protrusion, with an overprint accuracy of ±0.9μm.

[0061] Example 3: Device structure and working principle

[0062] like Figure 5 As shown, a multi-head galvanometer laser flying scribing device includes:

[0063] 1. Carrier shaft assembly 200:

[0064] Driven by a linear motor, the speed range is 0.5~2m / s and the straightness is <5μm;

[0065] Load the photovoltaic thin film cell to be processed (such as a perovskite substrate) and move continuously and uniformly along the scribing direction (X-axis).

[0066] 2. Crossbeam shaft assembly 400:

[0067] Equipped with 8 galvanometer lens assemblies 620, each galvanometer lens is driven by an independent linear motor and shares a stator guide rail;

[0068] Number of galvanometer lenses n =8, the position feedback accuracy calculation formula is:

[0069]

[0070] in .

[0071] 3. Visual axis component 300:

[0072] Through interferometer data compensation, positioning accuracy is ±1μm;

[0073] It is linked with the stage axis assembly 200 to build a unified coordinate system and associate the spatial position of the galvanometer lens.

[0074] 4. Optical system:

[0075] Laser assembly 510: outputs a beam of ultraviolet laser (wavelength 355nm, power 30W);

[0076] External optical path component 520: After beam expansion and filtering, the single laser beam is split into two beams;

[0077] Left and right beam splitter box assemblies 530 and 540: After secondary splitting, the beams are divided into 8 beams, with an energy uniformity error of <3%. The attenuator adjustment formula is:

[0078]

[0079] 5. Dust extraction shaft assembly 700:

[0080] 8 independent dust extraction ports 710 corresponding to the galvanometer processing area, wind speed u =2.5m / s, satisfying ;

[0081] Dust residue <0.1mg / m 3 .

[0082] 6. Control system:

[0083] Synchronous control of stage movement, galvanometer action and laser switch, delay time .

[0084] The technical effect verification is shown in Table 1

[0085] Table 1:

[0086]

Claims

1. A multi-head galvanometer laser flying scribing method, characterized in that: The following steps are involved: S1: The product to be processed is driven by the carrier shaft assembly (200) along the engraving direction at a speed of v Continuous uniform motion; S2: Using a unified coordinate system constructed by the visual axis assembly (300) and the stage axis assembly (200), the spatial positions of the plurality of galvanometer lens assemblies (620) are associated to satisfy the relationship: in is the position deviation, is the reference coordinate; S3: During the uniform motion of the carrier axis, the plurality of galvanometer lens assemblies (620) simultaneously start the laser and perform engraving according to the pre-loaded special-shaped graphic path; S4: When the engraving trajectory is a special-shaped line, the vibration lens assembly (620) dynamically adjusts the moving trajectory according to the compensation path, and the compensation amount δ The calculation formula is: in v is the stage speed, is the galvanometer response delay time, a is the galvanometer acceleration; The generation of the compensation path includes: According to the corner angle of the special-shaped line θ and stage speed v , dynamically adjust the acceleration of the galvanometer a ; The actual machining trajectory at the corner is the radius r The arc satisfies: ； S5: The processing area is fully covered by the multiple independent dust extraction ports (710) of the dust extraction shaft assembly (700), and dust is extracted in real time.

2. The method according to claim 1, characterized in that In step S3: Multiple galvanometer lens assemblies (620) are controlled by independent marking control cards respectively, and achieve action consistency and collaborative error through data collaborative algorithm. E satisfy: 。 3. A multi-head galvanometer laser flying scribing device, used to implement the method according to any one of claims 1-2, characterized in that: include: The carrier axis assembly (200) is driven by a linear motor with a speed range of 0.5 to 2 m / s and a straightness of <5 μm; A beam shaft assembly (400) is provided with a plurality of independently movable galvanometer lens assemblies (620), each galvanometer lens being driven by a linear motor and sharing a stator and a guide rail; Visual axis assembly (300): through interferometer data compensation, positioning accuracy ±1μm; Optical system: including a laser assembly (510), an external light path assembly (520), a left light splitting box assembly (530), and a right light splitting box assembly (540), wherein the energy uniformity error after light splitting is less than 3%; Dust extraction shaft assembly (700): dust extraction efficiency ≥ 95%, dust residue < 0.1 mg / m 3 ; Control system: Synchronous control of the stage axis, galvanometer lens and laser switch timing, delay time <1ms.

4. The device according to claim 3, characterized in that: The attenuator adjustment formulas of the left splitter box assembly (530) and the right splitter box assembly (540) are: in k is the splitting ratio coefficient, α is the attenuation coefficient, d is the attenuator displacement.

5. The device according to claim 3, characterized in that: The number of the galvanometer lens assembly (620) n Satisfying 4≤n≤10, each galvanometer adopts closed-loop control, and the position feedback accuracy is: in is the scanning range of the galvanometer.

6. The device according to claim 3, characterized in that: The wind speed of the dust extraction port of the dust extraction shaft assembly (700) u and processing area A satisfy: in is the amount of dust generated per unit time.

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