Ultrathin glass thickness detection device and method thereof

Through the combination of driving components and rotating components, ultra-thin glass is driven to rotate and move leftward in the laser thickness gauge, solving the problem of low detection accuracy in the prior art, realizing high-precision thickness detection and automated fixing and cleaning processes.

CN120333312AInactive Publication Date: 2025-07-18SUZHOU YUHAO SEMICONDUCTOR MATERIAL TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202510517746.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-23
Publication Date
2025-07-18
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The existing ultra-thin glass thickness detection devices have the problem of low detection accuracy, because most of the measurement points are located on the same straight line and cannot accurately reflect the thickness of the entire glass surface.

Method used

Using a combination of driving components and rotating components, the screw is driven to rotate the meshing frame through a motor, which drives the suction cup to move left and rotates. Combined with the meshing of gears and racks, the rotational movement of ultra-thin glass in the laser thickness gauge is realized, multiple points of different straight lines are selected for measurement, and the glass is adsorbed, fixed and cleaned by the air pressure component.

Benefits of technology

The accuracy of ultra-thin glass thickness detection is improved, and automated and rapid fixing and unloading processes are realized, while avoiding the impact of dust impurities on detection accuracy.

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Abstract

The invention relates to the technical field of glass detection, and discloses an ultra-thin glass thickness detection device which comprises a bottom plate and a laser thickness gauge, a driving assembly is fixedly installed at the top end of the bottom plate, and a rotating assembly is arranged at the left end of the driving assembly. The motor drives the lead screw to rotate to drive the meshing frame to drive the suction cup to move leftwards, the gear drives the suction cup to rotate through meshing of the gear and the rack in the leftward moving process of the suction cup, and finally the movement mode that the suction cup moves leftwards and rotates at the same time is achieved; the movement of the ultra-thin glass in the laser thickness gauge is not linear movement, but a mode of moving leftwards while rotating, so that a plurality of selected point positions cannot be located on the same straight line when the thickness is detected, the thickness of the whole ultra-thin glass can be reflected accurately, and the detection precision is high.
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Description

Technical Field

[0001] The present invention relates to the technical field of glass detection, and more specifically, the present invention relates to a thickness detection device and method for ultra-thin glass. Background Art

[0002] Ultra-thin glass is a kind of glass with a relatively thin thickness, which is commonly used in various scenarios such as substrates. The thickness of ultra-thin glass is one of the important quality standards of ultra-thin glass. Therefore, it is necessary to detect the thickness of ultra-thin glass after production to ensure the production quality. Most of the thickness detection devices in the prior art use a conveyor belt to send ultra-thin glass into a laser thickness gauge for thickness detection. However, in such a conveyance, even if multi-point measurement is adopted, the selected measurement points may be on the same straight line, and the thickness of the entire surface of the ultra-thin glass cannot be well reflected, resulting in relatively low detection accuracy. Summary of the Invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides a thickness detection device and method for ultra-thin glass, which has the advantage of high detection accuracy.

[0004] To achieve the above object, the present invention provides the following technical solution: A thickness detection device for ultra-thin glass, including a bottom plate and a laser thickness gauge. A driving component is fixedly installed at the top end of the bottom plate, and a rotating component is provided at the left end of the driving component;

[0005] The driving component includes a motor, the motor is fixedly installed at the top end of the bottom plate, a lead screw is fixedly sleeved on the output end of the motor, a meshing frame is meshed on the surface of the lead screw, a connecting block is fixedly installed at the left end of the meshing frame, and a suction cup is rotatably connected to the middle of the connecting block;

[0006] The rotating component includes a gear, the gear is fixedly installed on the surface of the suction cup, and a rack is fixedly installed at the top end of the bottom plate.

[0007] As a preferred technical solution of the present invention, the laser thickness gauge is fixedly installed on the left side of the top end of the bottom plate, and the rack is fixedly installed on the laser thickness gauge.

[0008] As a preferred technical solution of the present invention, the driving component further includes a support seat and a slide rail. The support seat is fixedly installed on the top surface of the bottom plate, the slide rail is fixedly installed on the bottom surface of the meshing frame, and the slide rail is slidably connected in the support seat.

[0009] As a preferred technical solution of the present invention, the rotating component further includes a connecting hose, the connecting hose is rotatably connected to the bottom end of the suction cup, the gear is rotatably connected to the middle of the connecting block, the rear side of the gear is meshed with the rack, and a balance bar is fixedly installed at the middle end of the suction cup.

[0010] As a preferred technical solution of the present invention, there are three balance rods in total. The three balance rods are equally angularly distributed on the circumference of the suction cup, and the top ends of the balance rods are on the same plane as the top surface of the suction cup.

[0011] As a preferred technical solution of the present invention, a pneumatic component is fixedly installed at the top end of the bottom plate. The pneumatic component includes an air pipe. A moving rod is fixedly installed on the right side of the front end of the right end of the meshing frame. A push plate is fixedly installed at the left end of the moving rod. A pressure pipe is fixedly installed on the right side of the top end of the air pipe.

[0012] As a preferred technical solution of the present invention, the position where the front end of the gear is connected to the air pipe is on the right side of the push plate. The pressure pipe is on the right side of the push plate. The push plate is movably connected inside the air pipe.

[0013] As a preferred technical solution of the present invention, a cleaning component is fixedly installed at the top end of the bottom plate. The cleaning component includes a vertical rod. The vertical rod is fixedly installed at the top end of the bottom plate. A nozzle is fixedly installed at the top end of the vertical rod. A connecting pipe is fixedly installed at the bottom end of the vertical rod. A support frame is fixedly installed at the front end of the connecting pipe. A telescopic rod is fixedly installed on the rear side of the support frame. A closing plate is fixedly installed at the rear end of the telescopic rod. A fixing ring is fixedly installed inside the cavity of the connecting pipe. A spring is fixedly installed between the support frame and the closing plate. A one-way intake pipe is fixedly installed on the left side of the top end of the air pipe.

[0014] As a preferred technical solution of the present invention, the connecting pipe is fixedly connected to the air pipe. The connecting pipe is on the left side of the push plate. The closing plate is in contact with the fixing ring.

[0015] A detection method for a thin glass thickness detection device, the detection method includes the following steps:

[0016] Place the thin glass to be detected on the top end of the suction cup, ensure that the thin glass will not fall, and then start the motor. The motor drives the lead screw to rotate. Through the meshing of the lead screw and the meshing frame, the meshing frame can be driven to move leftward, thereby driving the suction cup and the thin glass to move leftward. When the meshing frame moves leftward, the moving rod and the push plate are driven to move. Since the bottom end of the suction cup is communicated with the right side of the bottom end of the air pipe, the air in the suction cup is pumped into the air pipe to adsorb the thin glass.

[0017] As the suction cup moves leftward, the gear can be driven to move leftward. Through the meshing of the gear and the rack, the gear can be driven to rotate around the circumferential line of the suction cup, thereby realizing the gear driving the suction cup and the thin glass to rotate, so that the thin glass moves leftward and rotates at the same time.

[0018] When the ultra-thin glass moves leftward and rotates, the pushing piece has been moving leftward in the air pipe, and the air on the left side of the pushing piece in the air pipe can be pushed into the connecting pipe. When the pressure on the closing plate is greater than the elastic force of the spring, the closing plate is pushed forward to open the fixing ring. At this time, the gas enters the vertical rod and is ejected through the nozzle, and blows on the upper and lower sides of the ultra-thin glass to clean the ultra-thin glass before entering the laser thickness gauge.

[0019] After the ultra-thin glass enters the laser thickness gauge, the motor stops working. At this time, the laser thickness gauge measures the thickness of a point on the ultra-thin glass. After the measurement is completed, the motor works again, and the ultra-thin glass is rotated and moved leftward into the laser thickness gauge again to measure the thickness of the second point. Repeat the above steps of measuring the thickness of the point position to measure the thickness of the third point.

[0020] After the measurement is completed, the motor drives the lead screw to reverse, and the pushing piece moves rightward in the air pipe. The outside air enters the air pipe through the one-way air inlet pipe, and the air on the right side of the pushing piece in the air pipe is squeezed into the suction cup and flows out through the gap between the suction cup and the ultra-thin glass.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0022] 1. The present invention drives the engaging frame to drive the suction cup to move leftward by the rotation of the motor driving the lead screw, and realizes the rotation of the gear driving the suction cup by the meshing of the gear and the rack during the leftward movement of the suction cup. Finally, the movement mode of the suction cup moving leftward and rotating is realized. Furthermore, when driving the ultra-thin glass to be transported and detected, the movement of the ultra-thin glass in the laser thickness gauge is no longer a linear movement, but a way of rotating and moving leftward. It can be realized that multiple point positions selected during thickness detection are not on the same straight line, and thus the thickness of the entire ultra-thin glass can be accurately reflected, and the detection accuracy is high.

[0023] 2. The present invention adopts the method of placing the ultra-thin glass on the suction cup. During the process of the motor driving the engaging frame to move, the moving rod is driven to move, so that the moving rod drives the pushing piece to slide in the air pipe, realizing the suction of the air in the suction cup into the air pipe, and then adsorbing and fixing the ultra-thin glass. After the detection is completed, the pushing piece is driven to move in the reverse direction by the engaging frame during the reset process to send the air in the air pipe into the suction cup to unlock the ultra-thin glass, realizing the automatic and rapid fixing and blanking of the ultra-thin glass.

[0024] 3. The present invention can squeeze the air in the air pipe into the connecting pipe during the movement of the pushing piece. When the pressure in the connecting pipe is greater than the elastic force of the spring, the closing plate is separated from the fixing ring. At this time, the compressed air in the connecting pipe and the air pipe enters the nozzle through the vertical rod and is sprayed on the surface of the ultra-thin glass through the nozzle, realizing the pre-cleaning of the ultra-thin glass before it enters the laser thickness gauge, and avoiding the influence of dust and impurities on the surface of the ultra-thin glass on the detection accuracy. Brief Description of the Drawings

[0025] Figure 1 It is a schematic structural diagram of the present invention;

[0026] Figure 2 It is a schematic cross-sectional view of the cleaning component of the structure of the present invention;

[0027] Figure 3 For the present invention Figure 2 An enlarged schematic view of part A in it;

[0028] Figure 4 It is a schematic cross-sectional view of the air pressure component of the structure of the present invention;

[0029] Figure 5 It is an exploded connection schematic diagram of the driving component and the rotating component of the structure of the present invention.

[0030] In the figure: 1, bottom plate; 2, laser thickness gauge; 3, driving component; 31, motor; 32, lead screw; 33, slide rail; 34, meshing frame; 35, connecting block; 36, support seat; 37, suction cup; 4, rotating component; 41, gear; 42, rack; 43, connecting hose; 5, air pressure component; 51, air pipe; 52, moving rod; 53, pushing piece; 54, pressure pipe; 6, cleaning component; 61, vertical rod; 62, nozzle; 63, connecting pipe; 64, support frame; 65, telescopic rod; 66, spring; 67, closing plate; 68, fixing ring; 69, one-way air inlet pipe; 7, balance rod. Detailed Description of the Invention

[0031] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0032] As Figures 1 to 5 shown, the present invention provides an ultra-thin glass thickness detection device, including a bottom plate 1 and a laser thickness gauge 2. A driving component 3 is fixedly installed at the top end of the bottom plate 1, and a rotating component 4 is provided at the left end of the driving component 3;

[0033] The driving component 3 includes a motor 31. The motor 31 is fixedly installed at the top end of the bottom plate 1. The output end of the motor 31 is fixedly sleeved with a lead screw 32. A meshing frame 34 is meshed on the surface of the lead screw 32. A connecting block 35 is fixedly installed at the left end of the meshing frame 34. A suction cup 37 is rotatably connected to the middle of the connecting block 35;

[0034] The rotating assembly 4 includes a gear 41 which is fixedly installed on the surface of the suction cup 37, and a rack 42 is fixedly installed at the top end of the bottom plate 1;

[0035] The rotation of the lead screw 32 is driven by the motor 31 to drive the engagement frame 34 to drive the suction cup 37 to move leftward. And during the leftward movement of the suction cup 37, the rotation of the gear 41 is realized through the engagement of the gear 41 and the rack 42, and finally the movement mode of the suction cup 37 moving leftward while rotating is realized. Furthermore, when driving the ultra-thin glass for transportation and detection, the movement of the ultra-thin glass in the laser thickness gauge 2 is no longer a linear movement, but a mode of moving leftward while rotating. In this way, multiple points selected during thickness detection will not be on the same straight line, and thus the thickness of the entire ultra-thin glass can be accurately reflected, with high detection accuracy.

[0036] Among them, the laser thickness gauge 2 is fixedly installed on the left side of the top end of the bottom plate 1, and the rack 42 is fixedly installed on the laser thickness gauge 2;

[0037] By using the laser thickness gauge 2 to detect the thickness of the ultra-thin glass, rapid and accurate detection can be achieved.

[0038] Among them, the driving assembly 3 further includes a support seat 36 and a slide rail 33. The support seat 36 is fixedly installed on the top surface of the bottom plate 1, and the slide rail 33 is fixedly installed on the bottom surface of the engagement frame 34. The slide rail 33 is slidably connected in the support seat 36;

[0039] By setting the support seat 36 to support the engagement frame 34, the connecting block 35 and the suction cup 37, it is ensured that the axis of the suction cup 37 is in a vertical state. The provided slide rail 33 can position and guide the movement of the engagement frame 34, avoiding the situation that the engagement frame 34 rotates with the lead screw 32.

[0040] Among them, the rotating assembly 4 further includes a connecting hose 43. The connecting hose 43 is rotatably connected to the bottom end of the suction cup 37. The gear 41 is rotatably connected to the middle of the connecting block 35. The rear side of the gear 41 meshes with the rack 42. A balance bar 7 is fixedly installed in the middle of the suction cup 37;

[0041] The connecting hose 43 connects the suction cup 37 and the air pipe 51, and can realize pumping the air in the suction cup 37 into the air pipe 51 to realize the adsorption and fixation of the ultra-thin glass.

[0042] Among them, there are three balance bars 7 in total. The three balance bars 7 are equally angularly distributed on the circumference of the suction cup 37. The top ends of the balance bars 7 are on the same plane as the top surface of the suction cup 37;

[0043] By setting three balance bars 7, the horizontal positioning of the ultra-thin glass can be carried out, avoiding the situation that the ultra-thin glass is in an inclined state when entering the laser thickness gauge 2, and improving the detection accuracy.

[0044] Among them, a pneumatic component 5 is fixedly installed at the top end of the bottom plate 1. The pneumatic component 5 includes an air pipe 51. A moving rod 52 is fixedly installed on the right side of the front end of the right end of the meshing frame 34. A push piece 53 is fixedly installed at the left end of the moving rod 52. A pressure pipe 54 is fixedly installed on the right side of the top end of the air pipe 51;

[0045] By adopting the method of placing the ultra-thin glass on the suction cup 37, during the process of the motor 31 driving the meshing frame 34 to move, the moving rod 52 is driven to move, so that the moving rod 52 drives the push piece 53 to slide in the air pipe 51, realizing pumping the air in the suction cup 37 into the air pipe 51, and then adsorbing and fixing the ultra-thin glass. After the detection is completed, the meshing frame 34 drives the push piece 53 to move in the reverse direction during the reset process to send the air in the air pipe 51 into the suction cup 37 to unlock the ultra-thin glass, realizing automatic and rapid fixing and blanking of the ultra-thin glass.

[0046] Among them, the position where the front end of the gear 41 is connected to the air pipe 51 is on the right side of the push piece 53. The pressure pipe 54 is on the right side of the push piece 53. The push piece 53 is movably connected in the air pipe 51;

[0047] By setting the pressure pipe 54, after the suction cup 37 adsorbs and fixes the ultra-thin glass, since the push piece 53 is still moving leftward, the pressure in the area on the right side of the push piece 53 in the air pipe 51 will become smaller. When the pressure reaches the opening pressure of the pressure pipe 54, the outside air enters the air pipe 51 through the pressure pipe 54 to ensure the smooth movement of the push piece 53. And the pressure pipe 54 is a one-way pipe. When the push piece 53 moves rightward, the air is squeezed into the suction cup 37. At this time, the ultra-thin glass is only placed on the suction cup 37, and there is a gap between the two. The air in the air pipe 51 flows out through the gap.

[0048] Among them, a cleaning component 6 is fixedly installed at the top end of the bottom plate 1. The cleaning component 6 includes a vertical rod 61. The vertical rod 61 is fixedly installed at the top end of the bottom plate 1. A nozzle 62 is fixedly installed at the top end of the vertical rod 61. A connecting pipe 63 is fixedly installed at the bottom end of the vertical rod 61. A support frame 64 is fixedly installed at the front end of the connecting pipe 63. A telescopic rod 65 is fixedly installed on the rear side of the support frame 64. A closing plate 67 is fixedly installed at the rear end of the telescopic rod 65. A fixing ring 68 is fixedly installed in the inner cavity of the connecting pipe 63. A spring 66 is fixedly installed between the support frame 64 and the closing plate 67. A one-way air inlet pipe 69 is fixedly installed on the left side of the top end of the air pipe 51. The connecting pipe 63 is fixedly connected to the air pipe 51. The connecting pipe 63 is on the left side of the push piece 53. The closing plate 67 fits with the fixing ring 68;

[0049] During the movement of the pushing piece 53, the air in the air pipe 51 can be squeezed into the connecting pipe 63. When the pressure in the connecting pipe 63 is greater than the elastic force of the spring 66, the closing plate 67 is separated from the fixed ring 68. At this time, the compressed air in the connecting pipe 63 and the air pipe 51 enters the nozzle 62 through the vertical rod 61 and is sprayed on the surface of the ultra-thin glass through the nozzle 62, realizing pre-cleaning of the ultra-thin glass before it enters the laser thickness gauge 2, and avoiding the influence of dust and impurities on the surface of the ultra-thin glass on the detection accuracy. After the measurement is completed, the motor 31 drives the lead screw 32 to reverse, and the pushing piece 53 moves to the right in the air pipe 51, and the outside air enters the air pipe 51 through the one-way air inlet pipe 69 to supplement the air on the left side of the pushing piece 53 in the air pipe 51.

[0050] A detection method for an ultra-thin glass thickness detection device, the detection method includes the following steps:

[0051] Place the ultra-thin glass to be detected on the top of the suction cup 37, ensure that the ultra-thin glass will not fall, and then start the motor 31. The motor 31 drives the lead screw 32 to rotate. Through the meshing of the lead screw 32 and the meshing frame 34, the meshing frame 34 can be driven to move to the left, and then the suction cup 37 and the ultra-thin glass are driven to move to the left. When the meshing frame 34 moves to the left, the moving rod 52 and the pushing piece 53 are driven to move. Since the bottom end of the suction cup 37 is connected to the right side of the bottom end of the air pipe 51, the air in the suction cup 37 is pumped into the air pipe 51 to adsorb the ultra-thin glass;

[0052] As the suction cup 37 moves to the left, the gear 41 can be driven to move to the left. Through the meshing of the gear 41 and the rack 42, the gear 41 can be driven to rotate around the circumference of the suction cup 37, and then the gear 41 drives the suction cup 37 and the ultra-thin glass to rotate, so that the ultra-thin glass rotates while moving to the left;

[0053] When the ultra-thin glass rotates while moving to the left, the pushing piece 53 has been moving to the left in the air pipe 51, and the air on the left side of the pushing piece 53 in the air pipe 51 can be pushed into the connecting pipe 63. When the pressure received by the closing plate 67 is greater than the elastic force of the spring 66, the closing plate 67 is pushed forward to open the fixed ring 68. At this time, the gas enters the vertical rod 61 and is sprayed out through the nozzle 62 and blows on the upper and lower sides of the ultra-thin glass to clean the ultra-thin glass before it enters the laser thickness gauge 2;

[0054] When the ultra-thin glass enters the laser thickness gauge 2, the motor 31 stops working. At this time, the laser thickness gauge 2 measures the thickness of a point on the ultra-thin glass. After the measurement is completed, the motor 31 works again, and the ultra-thin glass is rotated and moved to the left again into the laser thickness gauge 2 to realize the thickness measurement of the second point. Repeat the above steps of measuring the thickness of the point to be measured to measure the thickness of the third point;

[0055] After the measurement is completed, the motor 31 drives the lead screw 32 to reverse. The pushing piece 53 moves rightward in the air pipe 51, and the outside air enters the air pipe 51 through the one-way air inlet pipe 69. The air located on the right side of the pushing piece 53 in the air pipe 51 is squeezed into the suction cup 37 and flows out through the gap between the suction cup 37 and the ultra-thin glass.

[0056] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device.

[0057] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An ultra-thin glass thickness detection device, comprising a bottom plate and a laser thickness gauge, characterized in that, A driving component is fixedly installed at the top end of the bottom plate, and a rotating component is provided at the left end of the driving component; The driving component includes a motor, the motor is fixedly installed at the top end of the bottom plate, the output end of the motor is fixedly sleeved with a lead screw, a meshing frame is meshed on the surface of the lead screw, a connecting block is fixedly installed at the left end of the meshing frame, and a suction cup is rotatably connected to the middle of the connecting block; The rotating component includes a gear, the gear is fixedly installed on the surface of the suction cup, and a rack is fixedly installed at the top end of the bottom plate.

2. The thickness detection device for ultra-thin glass according to claim 1, wherein The laser thickness gauge is fixedly installed on the left side of the top end of the bottom plate, and the rack is fixedly installed on the laser thickness gauge.

3. The thickness detection device for ultra-thin glass according to claim 1, characterized in that, The driving component further includes a support seat and a slide rail, the support seat is fixedly installed on the top surface of the bottom plate, the slide rail is fixedly installed on the bottom surface of the meshing frame, and the slide rail is slidably connected in the support seat.

4. The thickness detection device for ultra-thin glass according to claim 1, wherein The rotating component further includes a connecting hose, the connecting hose is rotatably connected to the bottom end of the suction cup, the gear is rotatably connected to the middle of the connecting block, the rear side of the gear is meshed with the rack, and a balance rod is fixedly installed in the middle end of the suction cup.

5. The thickness detection device for ultra-thin glass according to claim 4, characterized in that, There are three balance rods in total, the three balance rods are equally angularly distributed on the circumference of the suction cup, and the top ends of the balance rods are on the same plane as the top surface of the suction cup.

6. The thickness detection device for ultra-thin glass according to claim 4, wherein, An air pressure component is fixedly installed at the top end of the bottom plate, the air pressure component includes an air pipe, a moving rod is fixedly installed on the right front side of the right end of the meshing frame, a pushing piece is fixedly installed at the left end of the moving rod, and a pressure pipe is fixedly installed on the right side of the top end of the air pipe.

7. An ultra-thin glass thickness detection device according to claim 6, characterized in that, The position where the front end of the gear is connected to the air pipe is on the right side of the pushing piece, the pressure pipe is on the right side of the pushing piece, and the pushing piece is movably connected in the air pipe.

8. The thickness detection device for ultra-thin glass according to claim 6, characterized in that, A cleaning component is fixedly installed at the top end of the bottom plate, the cleaning component includes a vertical rod, the vertical rod is fixedly installed at the top end of the bottom plate, a nozzle is fixedly installed at the top end of the vertical rod, a connecting pipe is fixedly installed at the bottom end of the vertical rod, a support frame is fixedly installed at the front end of the connecting pipe, a telescopic rod is fixedly installed on the rear side surface of the support frame, a closing plate is fixedly installed at the rear end of the telescopic rod, a fixing ring is fixedly installed in the inner cavity of the connecting pipe, a spring is fixedly installed between the support frame and the closing plate, and a one-way air inlet pipe is fixedly installed on the left side of the top end of the air pipe.

9. The thickness detection device for ultra-thin glass according to claim 8, characterized in that The connecting pipe is fixedly connected to the air pipe, the connecting pipe is on the left side of the pushing piece, and the closing plate is attached to the fixing ring.

10. The detection method of an ultra-thin glass thickness detection device according to any one of claims 1-9, characterized in that, The detection method includes the following steps: Place the ultra-thin glass to be detected on the top end of the suction cup, ensure that the ultra-thin glass will not fall off, and then start the motor. The motor drives the lead screw to rotate. Through the meshing of the lead screw and the meshing frame, the meshing frame can be driven to move leftward, thereby driving the suction cup and the ultra-thin glass to move leftward. When the meshing frame moves leftward, it drives the moving rod and the pushing piece to move. Since the bottom end of the suction cup is communicated with the right side of the bottom end of the air pipe, the air in the suction cup is pumped into the air pipe, and the ultra-thin glass is adsorbed; As the suction cup moves leftward, the gear can be driven to move leftward. Through the meshing of the gear and the rack, the gear can be driven to rotate around the circumferential line of the suction cup, thereby driving the gear to drive the suction cup and the ultra-thin glass to rotate, so that the ultra-thin glass moves leftward and rotates at the same time; When the ultra-thin glass moves leftward and rotates, the pushing piece has been moving leftward in the air pipe, and the air on the left side of the pushing piece in the air pipe can be pushed into the connecting pipe. When the pressure on the closing plate is greater than the elastic force of the spring, the closing plate is pushed forward to open the fixing ring. At this time, the gas enters the vertical rod and is ejected through the nozzle, and blows on the upper and lower sides of the ultra-thin glass to clean the ultra-thin glass before entering the laser thickness gauge; After the ultra-thin glass enters the laser thickness gauge, the motor stops working. At this time, the laser thickness gauge measures the thickness of a point on the ultra-thin glass. After the measurement is completed, the motor works again, and the ultra-thin glass is rotated and moved leftward into the laser thickness gauge again to measure the thickness of the second point. Repeat the above steps of measuring the thickness of the measured point to measure the thickness of the third point; After the measurement is completed, the motor drives the lead screw to reverse, and the pushing piece moves rightward in the air pipe. The outside air enters the air pipe through the one-way intake pipe, and the air on the right side of the pushing piece in the air pipe is squeezed into the suction cup and flows out through the gap between the suction cup and the ultra-thin glass.

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