Measuring device
By designing the combination of atomic force microscope and tilt platform, the problem of long scanning electron microscope measurement time and the inability to detect three-dimensional information is solved, and faster and more accurate tilt grating measurement is achieved, which is suitable for near-eye display devices and augmented reality devices.
Patent Information
- Application Number
- CN202510645777.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-19
- Publication Date
- 2025-07-18
AI Technical Summary
In the prior art, the measurement time of the inclined grating by scanning electron microscope is too long, and the atomic force microscope cannot detect three-dimensional information when the grating stripes are inclined.
A measurement device is designed, including an atomic force microscope and an inclined platform. The inclined angle of the inclined platform is based on the inclined grating and the needle tip angle of the probe to ensure that the probe is in full contact with the inclined grating surface and compensate for the angle of the grating stripes through the adjustment of the inclined platform.
The speed and accuracy of inclined grating measurement are improved, and the time cost of quality inspection is reduced.
Smart Images
Figure CN120333341A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of precision measurement, and particularly to a measuring device. Background Art
[0002] An inclined grating is a special grating in which the grating stripes are at a certain inclination angle with respect to the substrate direction. Currently, the measurement of an inclined grating is usually carried out using a scanning electron microscope. However, the time required for the scanning electron microscope to scan the inclined grating is too long, usually more than six hours, and the time cost is too high when applied to the quality inspection in the production process of the inclined grating. Another method is to use an atomic force microscope to measure the inclined grating. However, the atomic force microscope uses a probe to contact the surface of the sample to obtain three-dimensional information. In the case of inclined grating stripes, the conventional atomic force microscope cannot detect the three-dimensional information of the inclined part of the grating. Summary of the Invention
[0003] Based on this, this application provides a measuring device that can measure the inclined grating faster and more accurately.
[0004] This application provides a measuring device in one aspect, which includes: An atomic force microscope, including a probe, the probe being used to detect the inclined grating; and An inclined platform, the inclined platform being used to carry the inclined grating; wherein, the inclination angle of the inclined platform is set based on the inclination angle of the inclined grating and the tip angle of the probe.
[0005] The measuring device provided by the embodiment of this application can improve the measurement efficiency by setting an atomic force microscope, thereby facilitating the reduction of the time cost for quality inspection in the production process of the inclined grating. By setting an inclined platform and setting the inclination angle of the inclined platform based on the inclination angle of the inclined grating and the tip angle of the probe, the angle of the inclined grating stripes in the inclined grating can be compensated, so that the probe can be in full contact with the surface of the inclined grating, thereby improving the measurement accuracy.
[0006] In one embodiment, the inclined platform includes a base and at least one inclined block, and the inclined block is used to be fixed on the base for carrying the inclined grating.
[0007] In one embodiment, the inclined block includes two opposite end faces and three bearing surfaces sequentially connected between the two end faces, and the three bearing surfaces are arranged around to form a closed prism.
[0008] In one embodiment, the angle values of the three edges of the inclined block are not the same.
[0009] In one embodiment, the edges and corners of the inclined block are set based on the inclined gratings with different inclined angles and the probes with different tip angles.
[0010] In one embodiment, the material of the inclined block is aluminum alloy.
[0011] In one embodiment, the height of the inclined block is less than 2 cm.
[0012] In one embodiment, the inclined platform includes a base, a carrier substrate, and an inclination mechanism. The inclination mechanism is disposed on the base, and the carrier substrate is disposed on a side of the inclination mechanism away from the base; the carrier substrate is used to carry the inclined grating, and the inclination mechanism is used to control the inclination angle of the carrier substrate.
[0013] In one embodiment, the inclination mechanism includes a plurality of lifting units. The plurality of lifting units are respectively disposed corresponding to different positions of the carrier substrate, and the inclination mechanism is independently used to control each of the lifting units.
[0014] In one embodiment, the tip angle of the probe is the tip cone angle of the probe minus the lift angle of the probe. Description of the Drawings
[0015] Figure 1 It is a schematic structural diagram of the measurement device in the embodiment of the present application.
[0016] Figure 2 It is a schematic structural diagram of the inclined platform in one embodiment of the present application.
[0017] Figure 3 It is a schematic diagram of the working state of the inclined platform in one embodiment of the present application.
[0018] Figure 4 It is a schematic structural diagram of the inclined platform in another embodiment of the present application.
[0019] Description of the Main Element Symbols Measurement device: 100; Atomic force microscope: 10; Probe: 11; Cantilever beam: 13; Inclined platform: 30; Base: 31; Inclined block: 33; End face: 331; Bearing surface: 333; Inclination mechanism: 35; Lifting unit: 351; Driving module: 353; Carrier substrate: 37; Inclined grating: 200; Substrate: 210; Grating stripe: 230; Side wall: 231; Bottom wall: 233; Gap: 240; Inclination angle: θ; Inclined angle: α; Tip angle: β; Lift angle: β1; Cone angle: β2; First direction: X.
[0020] The following specific embodiments will further illustrate the present application in conjunction with the above drawings. Specific Embodiments
[0021] Next, in combination with the accompanying drawings in the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments.
[0022] Unless otherwise defined, all technical and scientific terms used in the present application have the same meaning as commonly understood by those skilled in the technical field to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application.
[0023] In order to further elaborate on the technical means and effects adopted by the present application to achieve the predetermined purpose, the following detailed description of the present application is made in combination with the accompanying drawings and preferred embodiments.
[0024] Please refer to Figure 1 , the measurement device 100 provided by the embodiment of the present application includes an atomic force microscope 10 and a tilt platform 30. Among them, the atomic force microscope 10 includes a probe 11, and the probe 11 is used to detect the three-dimensional information on the surface of the tilted grating 200. The tilt platform 30 is used to carry the tilted grating 200. Among them, the inclination angle θ of the tilt platform 30 is set based on the tilt angle α of the tilted grating 200 and the tip angle β of the probe 11.
[0025] Specifically, the tilted grating 200 includes a substrate 210 and a plurality of grating stripes 230 arranged in parallel and spaced apart in sequence on the substrate 210. There is a gap 240 between two adjacent grating stripes 230. The tilted grating 200 is specifically an optical element with a micro-nano structure. The plurality of grating stripes 230 extend away from the substrate 210 on the substrate 210, and the extending direction of the grating stripes 230 is not perpendicular to the surface of the substrate 210, that is, the included angle between the extending direction of the grating stripes 230 and the surface of the substrate 210 is an acute angle. The tilted grating 200 can achieve asymmetric regulation of incident light, and thus can be applied to specific scenarios. For example, the tilted grating 200 can be applied to a near-eye display device, especially a near-eye display device based on augmented reality. The tilted grating 200 can be used as an input grating and / or an output grating of a waveguide sheet, so as to transmit the light emitted by the light engine to the human eye through the waveguide and form an image for near-eye display.
[0026] The tilt angle α of the tilted grating 200 is the included angle between the side wall 231 of the grating stripe 230 and the substrate 210. In this embodiment, the tilt angle α can be a known value. For example, the tilt angle α can be a value set during the manufacturing process. In other embodiments, the tilt angle α can also be obtained after measurement using a scanning electron microscope. The present application does not limit the specific acquisition method of the tilt angle α.
[0027] The atomic force microscope 10 detects the surface topography of a sample through the interaction force (e.g., van der Waals force) between a nanoscale probe 11 at the end of a microcantilever 13 and the sample surface. The probe 11 is usually fixed at one end of the cantilever 13, and the other end of the cantilever 13 is connected to a piezoelectric ceramic scanner (not shown in the figure), which is used to drive the probe 11 to move precisely in three-dimensional space. A reflective layer (not shown in the figure) is plated on the back of the cantilever 13 and cooperates with a laser emitter-photodetector system (not shown in the figure) to convert the deformation or vibration of the probe 11 into an electrical signal, and then the surface topography of the sample can be constructed based on the electrical signal.
[0028] The tilt platform 30 includes a base 31. The tilt platform 30 is used to carry the tilted grating 200 for the probe 11 to perform measurements. During the measurement process, the cantilever 13 controls the movement of the probe 11 to contact different positions on the surface of the tilted grating 200. Specifically, the movement of the probe 11 controlled by the cantilever 13 can be divided into a lifting movement that controls the probe 11 to move away from the sample surface and a translational movement that controls the probe 11 to align with different positions on the sample surface. Taking the direction of the surface of the base 31 as the first direction X, the angle between the direction of the lifting movement of the probe 11 controlled by the cantilever 13 and the first direction X is the lifting angle β1.
[0029] The tip of the probe 11 itself also has a cone angle β2, that is, the outer wall of the probe 11 has a certain inclination angle. When contacting the tilted grating 200, the inclined outer wall of the probe 11 will also contact the grating stripe 230. Specifically, when measuring the tilted grating 200, in order to obtain accurate three-dimensional information on the surface of the tilted grating 200, the probe 11 needs to penetrate into the gap 240 to fully contact the side wall 231 of the grating stripe 230 and the bottom wall 233 of the gap 240. Based on the lifting angle β1 and the cone angle β2, the angle between the outer wall of the probe 11 and the first direction X can be obtained, that is, the tip angle β. The tip angle β is the difference between the cone angle β2 and the lifting angle β1. The inclination angle θ of the tilt platform 30 should be configured such that the angle between the side wall 231 of the grating stripe 230 of the tilted grating 200 placed on the tilt platform 30 and the first direction X is greater than the tip angle β, so that the probe 11 can fully contact any position on the surface of the tilted grating 200. That is, the sum of the inclination angle θ of the tilt platform 30 and the tilt angle α of the tilted grating 200 is greater than or equal to the tip angle β plus 90°. For example, in an embodiment, the cone angle β2 of the probe is 35°, the lifting angle β1 of the probe is 10°, so the tip angle β of the probe is 25°, and the tilt angle α of the tilted grating 200 is 45°, so the calculated inclination angle θ is at least greater than or equal to 60°. When the tilt angle α of the tilted grating 200 is 57°, the calculated inclination angle θ is at least greater than or equal to 58°, that is, the inclination angle θ can be 60°.
[0030] By setting the inclination angle θ of the tilt platform 30 according to the tilt angle α of the tilted grating 200 and the tip angle β of the probe 11, the probe 11 can be made to fully contact the surface of the tilted grating 200, which is conducive to improving the measurement accuracy of the tilted grating 200.
[0031] Please refer to Figure 2 and Figure 3 As shown in the figure, in one embodiment, the tilt platform 30 includes a base 31 and at least one tilt block 33. The tilt block 33 is used to be fixed on the base 31 for carrying the tilted grating 200. Specifically, the tilt block 33 includes two end faces 331 arranged oppositely and three bearing surfaces 333 sequentially connected between the two end faces 331. The three bearing surfaces 333 are arranged around to form a closed prism. That is, in this embodiment, the tilt block 33 is a triangular prism. In other embodiments, the tilt block 33 may also include four or more bearing surfaces 333, and the present application does not limit this. The bearing surface 333 is used to carry the tilted grating 200 and to contact the surface of the base 31. The included angle between the bearing surface 333 for carrying the tilted grating 200 and the bearing surface 333 in contact with the surface of the base 31 is the inclination angle θ of the tilt platform 30.
[0032] In this embodiment, the angular values of the three edges of the tilt block 33 are different from each other. That is, when different bearing surfaces 333 are used to carry the tilted grating 200, different angles of the inclination angle θ can be formed. For example, the angular values of the three edges can be 45°, 60° and 75°. According to the different tilt angles α of the tilted grating 200, different bearing surfaces 333 can be selected to carry the tilted grating 200, thereby improving the adaptability of the measuring device 100. In other embodiments, the angular values of the three edges of the tilt block 33 can also be the same, or the angular values of two of the edges are the same, or one of the edges is a right angle, and the present application does not limit this.
[0033] In this embodiment, according to the different tilt angles α of the tilted grating 200, multiple tilt blocks 33 can also be prepared, so that multiple inclination angles θ of different angles can be set, and different tilt blocks 33 can be selected according to the tilt angles α of different tilted gratings 200.
[0034] In this embodiment, the material of the tilt block 33 is aluminum alloy. In other embodiments, the tilt block 33 can also be made of other materials, and the present application does not limit this.
[0035] In this embodiment, the height of the tilt block 33 is less than 2 cm. Specifically, when the height of the tilt block 33 is too high, it will interfere with the atomic force microscope 10 and affect the measurement of the tilted grating 200 by the atomic force microscope 10. By limiting the height of the tilt block 33 to be less than 2 cm, the interference of the tilt block 33 on the atomic force microscope 10 can be avoided.
[0036] Please refer to Figure 4 Figure 4 , in another embodiment, the tilting platform 30 includes a base 31, a tilting mechanism 35, and a carrier substrate 37. The tilting mechanism 35 is disposed on the base 31, and the carrier substrate 37 is disposed on a side of the tilting mechanism 35 away from the base 31. The carrier substrate 37 is used to carry the tilted grating 200, and the tilting mechanism 35 is used to control the tilting angle of the carrier substrate 37.
[0037] The tilting mechanism 35 includes a plurality of lifting units 351. The plurality of lifting units 351 are respectively disposed corresponding to different positions of the carrier substrate 37. The tilting mechanism 35 is used to independently control each lifting unit 351. Specifically, the tilting mechanism 35 further includes a driving module 353. The driving module 353 is disposed on the base 31 and is connected to each lifting unit 351. The driving module 353 is used to drive the lifting unit 351 to move in the first direction X, so as to drive the carrier substrate 37 connected to the lifting unit 351 to move in the first direction X. By controlling the lifting of each lifting unit 351, the lifting degrees of different positions of the carrier substrate 37 can be made different, so that the carrier substrate 37 is tilted relative to the base 31. By controlling the lifting distance of each lifting unit 351, the tilt angle θ of the carrier substrate 37 can be controlled.
[0038] In other embodiments, the tilting mechanism 35 may also include a motor and a rotating shaft. The rotating shaft is connected to the carrier substrate 37 and is used to drive the carrier substrate 37 to rotate. The motor is used to drive the rotating shaft to rotate, so as to adjust the tilt angle θ of the carrier substrate 37.
[0039] In the measuring device 100 provided by the embodiment of the present application, by setting the tilting platform 30 to include the tilting mechanism 35, the tilting angle of the carrier substrate 37 can be adjusted, so that the tilt angle θ of the tilting platform 30 is adjustable, and then the tilted grating 200 with different tilt angles α can be adapted.
[0040] In the measuring device 100 provided by the embodiment of the present application, by setting the tilting platform 30 with a tilt angle θ, the tilted grating 200 placed on the tilting platform 30 can be tilted accordingly, so that the tilt angle α of the grating stripes 230 on the tilted grating 200 is compensated, so that the probe 11 of the atomic force microscope 10 can be in full contact with the surface of the tilted grating 200, thereby improving the measurement accuracy. By measuring the tilted grating 200 using the atomic force microscope 10, it is also beneficial to improve the measurement speed, which is beneficial to be applied in the quality inspection stage of the tilted grating 200 manufacturing process, and is beneficial to measure the tilted grating 200 faster and more accurately.
[0041] Those of ordinary skill in the art should recognize that the above embodiments are only used to illustrate the present application and are not intended to limit the present application. As long as appropriate changes and variations are made to the above embodiments within the scope of the substantial spirit of the present application, they fall within the scope of protection required by the present application.
Claims
1. A measuring device, characterized in that, Comprising: An atomic force microscope, including a probe for detecting a tilted grating; And A tilt platform for carrying the tilted grating; Wherein, the tilt angle of the tilt platform is set based on the tilt angle of the tilted grating and the tip angle of the probe.
2. The measuring device according to claim 1, characterized in that, The tilt platform includes a base and at least one tilt block for fixing on the base to carry the tilted grating.
3. The measuring device according to claim 2, wherein The tilt block includes two end faces arranged oppositely and three bearing surfaces sequentially connected between the two end faces, and the three bearing surfaces are arranged around to form a closed prism.
4. The measuring device according to claim 3, wherein The angle values of the three edges of the tilt block are different from each other.
5. The measuring device according to claim 4, characterized in that, The edges of the tilt block are set based on the tilted gratings with different tilt angles and the probes with different tip angles.
6. The measuring device according to claim 2, characterized in that, The material of the tilt block is aluminum alloy.
7. The measuring device according to claim 2, wherein The height of the tilt block is less than 2 cm.
8. The measuring device according to claim 1, characterized in that, The tilt platform includes a base, a carrying substrate and a tilting mechanism. The tilting mechanism is arranged on the base, and the carrying substrate is arranged on the side of the tilting mechanism away from the base; the carrying substrate is used for carrying the tilted grating, and the tilting mechanism is used for controlling the tilt angle of the carrying substrate.
9. The measuring device according to claim 8, wherein, The tilting mechanism includes a plurality of lifting units respectively arranged corresponding to different positions of the carrying substrate, and the tilting mechanism is used for independently controlling each lifting unit.
10. The measuring device according to claim 1, characterized in that, The tip angle of the probe is the tip cone angle of the probe minus the lifting angle of the probe.